CN116830447A - 驱动装置和用于操作这种驱动装置的方法 - Google Patents

驱动装置和用于操作这种驱动装置的方法 Download PDF

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Publication number
CN116830447A
CN116830447A CN202180093062.XA CN202180093062A CN116830447A CN 116830447 A CN116830447 A CN 116830447A CN 202180093062 A CN202180093062 A CN 202180093062A CN 116830447 A CN116830447 A CN 116830447A
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CN
China
Prior art keywords
drive
actuators
actuator
base
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180093062.XA
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English (en)
Chinese (zh)
Inventor
沃尔德曼·斯波默
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI GmbH and Co KG
Original Assignee
Physik Instrumente PI GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente PI GmbH and Co KG filed Critical Physik Instrumente PI GmbH and Co KG
Publication of CN116830447A publication Critical patent/CN116830447A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN202180093062.XA 2020-12-15 2021-12-10 驱动装置和用于操作这种驱动装置的方法 Pending CN116830447A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020133455.9A DE102020133455B3 (de) 2020-12-15 2020-12-15 Antriebsvorrichtung
DE102020133455.9 2020-12-15
PCT/DE2021/100994 WO2022127988A1 (de) 2020-12-15 2021-12-10 Antriebsvorrichtung und verfahren zum betreiben einer solchen antriebsvorrichtung

Publications (1)

Publication Number Publication Date
CN116830447A true CN116830447A (zh) 2023-09-29

Family

ID=79601629

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180093062.XA Pending CN116830447A (zh) 2020-12-15 2021-12-10 驱动装置和用于操作这种驱动装置的方法

Country Status (7)

Country Link
US (1) US20240048074A1 (de)
EP (1) EP4264816A1 (de)
JP (1) JP2023553568A (de)
KR (1) KR20230114303A (de)
CN (1) CN116830447A (de)
DE (1) DE102020133455B3 (de)
WO (1) WO2022127988A1 (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10148267B4 (de) 2001-06-08 2005-11-24 Physik Instrumente (Pi) Gmbh & Co. Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
JP2003243282A (ja) * 2002-02-14 2003-08-29 Nikon Corp ステージ装置及び露光装置
DE102008025812A1 (de) 2008-05-29 2009-12-10 Howaldtswerke-Deutsche Werft Gmbh Unterseeboot
DE112010005916B4 (de) * 2010-09-29 2023-02-09 Piezomotor Uppsala Aktiebolag Elektromechanischer Aktuator
DE102013108948B4 (de) * 2013-08-19 2018-02-01 Uwe Nakoinz Vorrichtung zur Beförderung von Flüssigkeiten mit Hilfe einer Piezo-Antriebsvorrichtung

Also Published As

Publication number Publication date
US20240048074A1 (en) 2024-02-08
KR20230114303A (ko) 2023-08-01
WO2022127988A1 (de) 2022-06-23
EP4264816A1 (de) 2023-10-25
JP2023553568A (ja) 2023-12-22
DE102020133455B3 (de) 2022-05-19

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