CN116806172A - 液滴释放装置和液滴释放方法 - Google Patents

液滴释放装置和液滴释放方法 Download PDF

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Publication number
CN116806172A
CN116806172A CN202280012626.7A CN202280012626A CN116806172A CN 116806172 A CN116806172 A CN 116806172A CN 202280012626 A CN202280012626 A CN 202280012626A CN 116806172 A CN116806172 A CN 116806172A
Authority
CN
China
Prior art keywords
droplet discharge
carriage
discharge head
functional liquid
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280012626.7A
Other languages
English (en)
Chinese (zh)
Inventor
太田义治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN116806172A publication Critical patent/CN116806172A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet

Landscapes

  • Coating Apparatus (AREA)
CN202280012626.7A 2021-02-10 2022-01-27 液滴释放装置和液滴释放方法 Pending CN116806172A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021019683 2021-02-10
JP2021-019683 2021-02-10
PCT/JP2022/003013 WO2022172762A1 (ja) 2021-02-10 2022-01-27 液滴吐出装置及び液滴吐出方法

Publications (1)

Publication Number Publication Date
CN116806172A true CN116806172A (zh) 2023-09-26

Family

ID=82838720

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280012626.7A Pending CN116806172A (zh) 2021-02-10 2022-01-27 液滴释放装置和液滴释放方法

Country Status (4)

Country Link
JP (1) JPWO2022172762A1 (ja)
KR (1) KR20230142538A (ja)
CN (1) CN116806172A (ja)
WO (1) WO2022172762A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005324130A (ja) * 2004-05-14 2005-11-24 Seiko Epson Corp 液滴吐出装置、電気光学装置、電気光学装置の製造方法、および電子機器
JP2007261021A (ja) 2006-03-28 2007-10-11 Toppan Printing Co Ltd インクジェット吐出装置
JP4730250B2 (ja) * 2006-08-21 2011-07-20 セイコーエプソン株式会社 位置決め装置、及び位置決め方法、並びにヘッドユニット組立装置、及びヘッドユニット組立方法
JP2009125615A (ja) * 2007-11-20 2009-06-11 Seiko Epson Corp 液滴吐出装置および液滴吐出装置の描画制御方法
JP2015120130A (ja) * 2013-12-25 2015-07-02 セイコーエプソン株式会社 ヘッドキャリッジ、液滴吐出装置
JP6117724B2 (ja) 2014-03-26 2017-04-19 東京エレクトロン株式会社 塗布装置および塗布方法
JP6967883B2 (ja) * 2016-07-25 2021-11-17 東京エレクトロン株式会社 機能液吐出装置及び機能液吐出位置補正方法

Also Published As

Publication number Publication date
KR20230142538A (ko) 2023-10-11
JPWO2022172762A1 (ja) 2022-08-18
WO2022172762A1 (ja) 2022-08-18

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