CN116619443A - Be applied to mobile robot's wafer box and open box device - Google Patents
Be applied to mobile robot's wafer box and open box device Download PDFInfo
- Publication number
- CN116619443A CN116619443A CN202310608950.1A CN202310608950A CN116619443A CN 116619443 A CN116619443 A CN 116619443A CN 202310608950 A CN202310608950 A CN 202310608950A CN 116619443 A CN116619443 A CN 116619443A
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- box opening
- wafer
- box
- alignment block
- mobile robot
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- 230000001360 synchronised effect Effects 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000006978 adaptation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a wafer box opening device applied to a mobile robot, which comprises a carrying platform positioned on the mobile robot and a box opening mechanism positioned on one side of the carrying platform, wherein the carrying platform is provided with a positioning mechanism for positioning and fixing the lower part of the wafer box; the box opening mechanism comprises box opening arms symmetrically positioned at the left side and the right side of the positioning mechanism, clamping heads matched with the box covers of the wafer boxes are arranged at the inner sides of the box opening arms, the box opening arms are driven to synchronously rotate through a synchronous driving mechanism, the box opening of the wafer boxes is realized, and an adjusting mechanism for driving the clamping heads to move along the arm length direction of the box opening arms is arranged on the box opening arms; through setting up the box opening device at mobile robot at wafer box handling in-process automatic realization to wafer box opening operation, improve production efficiency, avoid artificial participation simultaneously, can keep the cleanness of production line, guarantee production quality.
Description
Technical Field
The invention relates to the technical field of wafer processing, in particular to a wafer box opening device applied to a mobile robot.
Background
In the existing semiconductor wafer production factory, after the wafer box needs to be fixed at a certain position and the box opening action is manually completed, the wafer box is carried to equipment to complete production tasks, and because of the operations of placing, opening and carrying, the production steps are increased, the production efficiency is affected, meanwhile, the cleanliness of the production environment is emphasized in wafer processing, dust is easily generated due to manual participation, and the quality of products is affected.
Disclosure of Invention
The technical purpose is that: aiming at the defects that the existing wafer box production line has low box opening and carrying efficiency, is manually participated and is easy to influence the production environment, the invention discloses a wafer box opening device of a mobile robot, which can synchronously and automatically complete box opening in the wafer box carrying process without manual participation operation.
The technical scheme is as follows: in order to achieve the technical purpose, the invention adopts the following technical scheme:
the wafer box opening device comprises a carrying platform and a box opening mechanism, wherein the carrying platform is arranged on the mobile robot, the box opening mechanism is arranged on one side of the carrying platform, and a positioning mechanism for positioning and fixing the lower part of the wafer box is arranged on the carrying platform; the box opening mechanism comprises box opening arms symmetrically positioned at the left side and the right side of the positioning mechanism, clamping heads matched with the box covers of the wafer boxes are arranged on the inner sides of the box opening arms, the box opening arms are driven to synchronously rotate through a synchronous driving mechanism, the box opening of the wafer boxes is realized, and an adjusting mechanism used for driving the clamping heads to move along the arm length direction of the box opening arms is arranged on the box opening arms.
Preferably, the box opening arm adopts a hollow structure, one end of the chuck is positioned outside the box opening arm, and the other end of the chuck stretches into the box opening arm to be connected with the driving end of the adjusting mechanism; the box opening arm is provided with a guide groove matched with the sliding adjustment of the clamping head.
Preferably, the adjusting mechanism comprises a sliding block fixed at the end part of the clamping head, the sliding block is in sliding connection with the box opening arms, a threaded rod is threaded on the sliding block, the axial direction of the threaded rod is consistent with the sliding direction of the sliding block, a driving assembly is connected with the end part of the threaded rod, and the driving assembly drives the threaded rods in the two box opening arms to synchronously rotate so as to adjust the position of the clamping head.
Preferably, the driving assembly comprises a rotating shaft, the rotating shaft is arranged along the direction perpendicular to the threaded rod, two ends of the rotating shaft are connected with the threaded rod in a matched manner through bevel gear sets, the rotating shaft is matched with a rotating part of the synchronous driving mechanism through a gear pair capable of being engaged and disengaged, one gear of the gear pair is fixed on the rotating part of the synchronous driving mechanism and is marked as a fixed gear, the other gear is arranged on the rotating shaft in a sliding manner and is marked as a sliding gear, a torque rib matched with an inner ring of the sliding gear for torque transmission is arranged on the rotating shaft, and the sliding gear slides along the direction of the torque rib.
Preferably, the synchronous driving mechanism comprises a second rotating shaft and a power source, wherein the end part of the second rotating shaft is fixedly connected with the box opening arm, the power source drives the second rotating shaft to rotate, the second rotating shaft is connected with the driving end of the power source, and the power source drives the box opening arm to rotate through the second rotating shaft so as to perform box opening operation of the wafer box.
Preferably, a roller is rotatably arranged at one end of the chuck close to the wafer box, and the roller is matched with the box cover of the wafer box in the process of opening the wafer box by rotating the box opening arm.
Preferably, the positioning mechanism comprises a front alignment block, a rear alignment block, a left alignment block and a right alignment block which are positioned around the wafer box, wherein the front alignment block is positioned on one side of the carrier close to the box opening mechanism and is fixedly connected with the carrier, the rear alignment block, the left alignment block and the right alignment block are all arranged on the carrier in a penetrating way, and the lower end of the rear alignment block is driven to synchronously move through a linkage mechanism arranged at the bottom of the carrier.
Preferably, the linkage mechanism is arranged on a supporting bottom plate which is fixed at the bottom of the carrying platform in parallel, and the box opening mechanism is fixedly arranged on the supporting bottom plate; the linkage mechanism comprises a motor, a ball screw, a linkage frame and a connecting rod, the axis direction of the motor is the same as the connecting line direction of the front alignment block and the rear alignment block, the driving end of the motor is connected with a screw rod of the ball screw, the linkage frame is connected with a nut of the ball screw, and when the motor drives the screw rod to rotate, the linkage frame moves forwards and backwards along the axis direction of the screw rod; the rear alignment block is arranged at one end of the linkage frame, which is away from the motor; the left aligning block and the right aligning block are symmetrically positioned at the left side and the right side of the linkage frame and are connected with the linkage frame through connecting rods, and an auxiliary base used for assisting in moving is arranged below the left aligning block and the right aligning block.
Preferably, the auxiliary base comprises a second guide groove matched with the width of the linkage frame, and the end part of the linkage frame is positioned in the second guide groove and slides back and forth along the direction of the guide groove; the auxiliary base is also provided with sliding guide rails below the left aligning block and the right aligning block, and when the linkage frame drives the connecting rods on two sides to move, the left aligning block and the right aligning block correspondingly connected with the two connecting rods slide back and forth along the direction of the sliding guide rails.
Preferably, the rear alignment block is in sliding connection with the guide rod on the linkage frame along the length direction of the ball screw rod, the guide rod is penetrated with a telescopic spring, one end of the telescopic spring is fixed on the linkage frame, the other end of the telescopic spring is fixedly connected with the end face of the rear alignment block, and the telescopic spring is compatible with the size deviation regulated by the motor.
The beneficial effects are that: the wafer box opening device applied to the mobile robot has the following beneficial effects:
1. according to the invention, the box opening operation of the wafer box is automatically realized in the wafer box carrying process through the box opening device arranged on the mobile robot, so that the production efficiency is improved, meanwhile, the participation of manpower is avoided, the cleanliness of a production line can be kept, and the production quality is ensured.
2. The box opening device provided by the invention utilizes the synchronous driving mechanism to drive the box opening arm to rotate so as to realize the box opening operation of the wafer box, the synchronism of the stress on the two sides of the box cover is maintained, the wafer box can be stably opened by matching with the positioning mechanism, and the reliability of the box opening device is ensured.
3. According to the invention, the adjusting mechanism arranged in the box opening arm drives the clamping head to move along the arm length direction of the box opening arm, so that the position of the clamping head can be adjusted according to the specifications of different wafer boxes, and the smooth opening of the box cover of the wafer box can be ensured.
4. The rotating shaft of the driving assembly is matched and connected with the rotating part of the synchronous driving mechanism through the gear pair, the driving assembly and the synchronous driving mechanism can be connected and disconnected by utilizing the matching between the sliding gear and the fixed gear, when the chuck is required to be adjusted, the driving assembly and the synchronous driving mechanism are connected, and when the box is opened, the driving assembly and the synchronous driving mechanism are disconnected, so that a power source for driving the rotating shaft to rotate is not required to be additionally and independently designed, the structure is simplified, and the load of the mobile robot and the difficulty in controlling the box opening are reduced.
5. The chuck is provided with the roller at one end matched with the box cover of the wafer box, and the roller and the box cover relatively roll in the process of rotating the box opening arm to drive the box cover of the wafer box to be opened, so that the box opening resistance is reduced, and meanwhile, the abrasion of the box cover caused by sliding friction between the chuck and the box cover is avoided.
6. The positioning mechanism of the invention uses the alignment blocks arranged at four directions of the carrier to clamp and fix the wafer box, thereby ensuring the stability of the box body of the wafer box in the box opening process.
7. The left aligning block and the right aligning block of the positioning mechanism are synchronously driven to move by the linkage mechanism, so that the synchronous movement of the left aligning block and the right aligning block is ensured to adjust the distance, and the clamping and positioning requirements of wafer boxes with different specifications are met.
8. When the linkage frame is driven to move by the motor, the distance between the front and rear alignment blocks also changes, and meanwhile, as the moving distance of the rear alignment block is inconsistent with the moving distance of the left alignment block, the aspect ratio of the wafer box is not ensured to be consistent with the moving proportion of the alignment block of the opening and closing device, and therefore, the telescopic spring is added, the position of the rear alignment block can be adjusted, and the stable clamping and positioning of the periphery of the wafer box are ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
FIG. 1 is a diagram of the overall structure of a wafer cassette opening device of the present invention;
FIG. 2 is a split structure diagram of the wafer cassette opening and closing apparatus of the present invention;
FIG. 3 is a view showing the internal structure of the box opening arm of the present invention;
FIG. 4 is a schematic view of the auxiliary base structure of the present invention;
the device comprises a 1-carrying platform, a 2-box opening mechanism, a 3-positioning mechanism, a 4-box opening arm, a 5-chuck, a 6-synchronous driving mechanism, a 7-adjusting mechanism, an 8-sliding block, a 9-guide groove, a 10-threaded rod, an 11-rotating shaft, a 12-bevel gear set, a 13-fixed gear, a 14-sliding gear, a 15-torque rib, a 16-second rotating shaft, a 17-power source, an 18-roller, a 19-front alignment block, a 20-rear alignment block, a 21-left alignment block, a 22-right alignment block, a 23-supporting bottom plate, a 24-motor, a 25-ball screw, a 26-linkage frame, a 27-connecting rod, a 28-auxiliary base, a 29-second guide groove, a 30-sliding guide rail, a 31-guide rod and a 32-telescopic spring.
Description of the embodiments
The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown, but in which the invention is not so limited.
As shown in fig. 1-4, the invention discloses a wafer box opening device applied to a mobile robot, which comprises a carrying platform 1 positioned on the mobile robot and a box opening mechanism 2 positioned on one side of the carrying platform 1, wherein a positioning mechanism 3 for positioning and fixing the lower part of the wafer box is arranged on the carrying platform 1; the box opening mechanism 2 comprises box opening arms 4 symmetrically arranged at the left side and the right side of the positioning mechanism 3, clamping heads 5 matched with the box covers of the wafer boxes are arranged on the inner sides of the box opening arms 4, the box opening arms 4 are driven to synchronously rotate through a synchronous driving mechanism 6, the box opening of the wafer boxes is realized, and an adjusting mechanism 7 used for driving the clamping heads 5 to move along the arm length direction of the box opening arms 4 is arranged on the box opening arms 4.
In order to realize the opening and closing operation of wafer boxes with different specifications through the box opening device, the clamping head 5 is designed into a mode of slidably adjusting the position, the box opening arm 4 of the invention adopts a hollow structure, one end of the clamping head 5 is positioned outside the box opening arm 4, and the other end extends into the box opening arm 4 to be connected with the driving end of the adjusting mechanism 7; the open box arm 4 is provided with a guide slot 9 for matching with the sliding adjustment of the clamping head 5. The adjusting mechanism 7 comprises a sliding block 8 fixed at the end part of the chuck 5, the chuck 5 is in threaded connection with the sliding block 8, and the box opening interval can be adjusted by rotating the chuck 5; the sliding block 8 is in sliding connection with the box opening arms 4, a threaded rod 10 is threaded on the sliding block 8, the axial direction of the threaded rod 10 is consistent with the sliding direction of the sliding block 8, a driving assembly is connected to the end part of the threaded rod 10, and the threaded rod 10 in the two box opening arms 4 is driven to synchronously rotate through the driving assembly to adjust the position of the clamping head 5.
Because the rotation center of the box opening arm 4 is inconsistent with the rotation center of the box cover of the wafer box in the process of driving the box cover of the wafer box to rotate through the rotation of the box opening arm 4, the contact position of the box opening arm 4 and the box cover continuously changes in the rotation process, if the box cover is not rotated to an orientation with the included angle of the box body being larger than 90 degrees, the box opening arm 4 is separated from the box cover, and the box opening cannot be completed, so that the positions of the clamping heads on the box opening arm 4 are required to be adjusted according to the specification of the wafer box, and the moment required for rotating the box opening is reduced as much as possible when the box opening is completed.
In the embodiment of the invention, the rotation center of the box opening arm 4 is set to be consistent with the rotation center of the wafer box in height, the horizontal distance is d, the box cover length of the wafer box is a, and then the distance between the clamping head and the rotation center of the box opening arm 4So as to ensure that the wafer box can be opened smoothly; the adjustment of the rotation center of the box opening arm 4 can be realized by providing a lifting structure capable of adjusting the height of the opening and closing mechanism on the mobile robot.
As shown in fig. 3, the driving assembly of the present invention comprises a rotating shaft 11, the rotating shaft 11 is arranged along the direction perpendicular to the threaded rod 10, two ends of the rotating shaft 11 are matched and connected with the threaded rod 10 through a bevel gear set 12, the rotating shaft 11 is matched with the rotating part of the synchronous driving mechanism 6 through a gear pair capable of being engaged, one gear of the gear pair is fixed on the rotating part of the synchronous driving mechanism 6, the axial position relative to the rotating part is kept unchanged, and is marked as a fixed gear 13, the other gear is arranged on the rotating shaft 11 in a sliding manner, and is marked as a sliding gear 14, torque ribs 15 matched with the inner ring of the sliding gear 14 for torque transmission are arranged on the rotating shaft 11, and the sliding gear 14 slides along the direction of the torque ribs 15.
The sliding gear 14 is utilized to realize connection and disconnection between the rotating shaft 11 and the rotating part of the synchronous driving mechanism 6, so that after the position adjustment of the chuck 5 is completed, the sliding gear 14 is disconnected from the fixed gear 13, and the influence on the chuck 5 in the rotation process of the box opening arm 4 is avoided.
In a specific embodiment, the synchronous driving mechanism 6 of the invention comprises a second rotating shaft 16 fixedly connected between the end part and the box opening arm 4 and a power source 17 for driving the second rotating shaft 16 to rotate, wherein the second rotating shaft 16 is connected with the driving end of the power source 17, and the power source 17 drives the box opening arm 4 to rotate through the second rotating shaft 16 so as to perform the box opening operation of the wafer box; the power source 17 adopts a motor to drive a gear set to drive, and is matched with the fixed gear 13 on the second rotating shaft 16 to drive the second rotating shaft 16 to rotate; in order to avoid the influence of the box opening arm 4 on the adjustment process when the position of the clamping head 5 is adjusted, a form of matching a rotating bearing is adopted between the second rotating shafts 16 of the fixed gears 13, locking rings are symmetrically arranged on two sides of the fixed gears 13 and are also in sliding connection with the second rotating shafts 16 through guide rail structures, locking pins are arranged on one sides of the locking rings, which are close to the end faces of the fixed gears, similarly to the matching form between the sliding gears 14 and the rotating shafts 11, when the box opening arm 4 is required to be driven to rotate, the second rotating shafts and the fixed gears are locked through the locking rings, when the power source 17 drives the fixed gears 13 to rotate, the second rotating shafts 16 and the fixed gears 13 synchronously rotate, and when the position of the clamping head 5 is adjusted, the locking rings and the fixed gears 13 are separated, and the second rotating shafts 16 and the fixed gears 13 do not synchronously rotate.
In order to avoid damage to the cover of the wafer box caused by relative sliding between the chuck and the cover of the wafer box and increase the resistance of opening the box, a roller 18 is rotatably arranged at one end of the chuck 5 close to the wafer box, and the roller 18 is matched with the cover of the wafer box in the process of opening the wafer box by rotating the box opening arm 4.
The positioning mechanism 3 comprises a front positioning block 19, a rear positioning block 20, a left positioning block 21 and a right positioning block 22 which are positioned around the wafer box, wherein the front positioning block 19 is positioned on one side of the carrier 1 close to the box opening mechanism 2 and is fixedly connected with the carrier 1, the rear positioning block 20, the left positioning block 21 and the right positioning block 22 are all penetrated on the carrier 1, the lower end of the rear positioning block 20 is driven to synchronously move by a linkage mechanism arranged at the bottom of the carrier 1, after the wafer box is placed on the carrier, the motor is used for driving the positioning blocks to move so as to realize clamping and positioning of the wafer box, and in order to reduce the moving resistance of the wafer box in the positioning process, a universal ball is arranged on the surface of the carrier and can freely roll on the carrier, so that the moving resistance between the bottom of the wafer box and the surface of the carrier is reduced.
As shown in fig. 2 and 4, the linkage mechanism of the present invention is provided on a support base plate 23 fixed in parallel to the bottom of the stage 11, and the box opening mechanism 2 is fixedly mounted on the support base plate 23; the linkage mechanism comprises a motor 24, a ball screw 25, a linkage frame 26 and a connecting rod 27, wherein the axial direction of the motor 24 is the same as the connecting line direction of the front alignment block 19 and the rear alignment block 20, the driving end of the motor 24 is connected with a screw rod of the ball screw 25, the linkage frame 26 is connected with a nut of the ball screw 25, and when the motor 24 drives the screw rod to rotate, the linkage frame 26 moves back and forth along the axial direction of the screw rod; the rear alignment block 20 is arranged at one end of the linkage frame 26 away from the motor 24; the left alignment block 21 and the right alignment block 22 are symmetrically positioned at the left and right sides of the linkage frame 26, and are connected with the linkage frame 26 through a connecting rod 27, and an auxiliary base 28 for assisting movement is arranged below the left alignment block 21 and the right alignment block 22.
The auxiliary base 28 comprises a second guide groove 29 matched with the width of the linkage frame 26, wherein the end part of the linkage frame 26 is positioned in the second guide groove 29 and slides back and forth along the direction of the guide groove 29; the auxiliary base 28 is further provided with a sliding guide rail 30 below the left alignment block 21 and the right alignment block 22, and when the linkage frame 26 drives the connecting rods 27 on both sides to move, the left alignment block 21 and the right alignment block 22 correspondingly connected with the two connecting rods 27 slide back and forth along the direction of the sliding guide rail 30.
Because the rear alignment block 20 is also driven to move by the linkage frame 26 when the motor 24 drives the linkage frame 26 to slide to carry out the left alignment block 21 and the right alignment block 22, the aspect ratio of the wafer box is not necessarily designed according to the aspect ratio adjusted by the corresponding positioning mechanism 3, which results in that when the left alignment block and the right alignment block clamp the wafer box, the edges of the rear positioning block 20 and the wafer box do not completely correspond, and in order to be compatible with the deviation, the effective clamping of the wafer box is maintained, the rear alignment block 20 is in sliding connection with the guide rod 31 on the linkage frame 26 along the length direction of the screw rod of the ball screw 25, the guide rod 31 is penetrated with the telescopic spring 32, one end of the telescopic spring 32 is fixed on the linkage frame 26, the other end of the telescopic spring 32 is fixedly connected with the end face of the rear alignment block 20, and the telescopic spring 32 is compatible with the dimensional deviation regulated by the motor 24.
When the wafer box opening device applied to the mobile robot is used, the position of the clamping head 5 is adjusted according to the specification of the wafer box of the production line, the fixed gear 13 is separated from the locking ring, the sliding gear 14 is meshed with the fixed gear 13, the fixed gear 13 is driven to rotate by the power source 17, the sliding gear 14 and the fixed gear 13 synchronously rotate to drive the rotating shaft 11 to rotate, the end part of the rotating shaft drives the threaded rod 10 to rotate by the conical gear set, synchronous adjustment of the clamping heads 5 in the two box opening arms 4 is realized, and meanwhile, the rotation directions of the threads of the threaded rod are required to be designed into opposite rotation directions for ensuring the moving synchronism of the clamping heads because the threaded rods 10 at the two ends of the rotating shaft rotate; after the position of the chuck 5 on the open box arm 4 is adjusted according to the spacing requirement, the sliding gear 14 is separated from the fixed gear 13, and the locking ring is locked relatively to the fixed gear 13.
The wafer box is placed in the pre-adjusted positioning mechanism 3 by the carrying manipulator on the mobile robot, the alignment block is driven to move by the motor 24, the clamping and fixing of the wafer box are realized, the box cover of the wafer box is positioned above the clamping head 5 of the box opening arm 4, the fixed gear 13 is driven to rotate by the power source 17, the box opening arm 4 rotates towards one side of the box opening due to the existence of the locking ring, the box cover of the wafer box is opened, after the cover opening is completed to a certain angle, the clamping head is separated from the box cover, the wafer box can be taken away from the mobile robot after the positioning mechanism loosens the wafer box, and is placed on a subsequent production line.
The foregoing is only a preferred embodiment of the invention, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.
Claims (10)
1. The wafer box opening device applied to the mobile robot is characterized by comprising a carrying platform (1) positioned on the mobile robot and a box opening mechanism (2) positioned on one side of the carrying platform (1), wherein the carrying platform (1) is provided with a positioning mechanism (3) for positioning and fixing the lower part of the wafer box; the box opening mechanism (2) comprises box opening arms (4) symmetrically positioned at the left side and the right side of the positioning mechanism (3), clamping heads (5) matched with the box covers of the wafer boxes are arranged on the inner sides of the box opening arms (4), the box opening arms (4) are driven to synchronously rotate through a synchronous driving mechanism (6), the box opening of the wafer boxes is realized, and an adjusting mechanism (7) used for driving the clamping heads (5) to move along the arm length direction of the box opening arms (4) is arranged on the box opening arms (4).
2. The wafer box opening device applied to the mobile robot according to claim 1, wherein the box opening arm (4) adopts a hollow structure, one end of the chuck (5) is positioned outside the box opening arm (4), and the other end of the chuck extends into the box opening arm (4) and is connected with the driving end of the adjusting mechanism (7); the box opening arm (4) is provided with a guide groove (9) which is matched with the sliding adjustment of the clamping head (5).
3. The wafer box opening device applied to the mobile robot according to claim 2, wherein the adjusting mechanism (7) comprises a sliding block (8) fixed at the end part of the clamping head (5), the sliding block (8) is in sliding connection with the box opening arm (4), a threaded rod (10) is threaded on the sliding block (8), the axial direction of the threaded rod (10) is consistent with the sliding direction of the sliding block (8), a driving assembly is connected at the end part of the threaded rod (10), and the threaded rod (10) in the two box opening arms (4) is driven to synchronously rotate through the driving assembly to adjust the position of the clamping head (5).
4. A wafer box opening device applied to a mobile robot according to claim 3, wherein the driving assembly comprises a rotating shaft (11), the rotating shaft (11) is arranged along the direction perpendicular to the threaded rod (10), two ends of the rotating shaft (11) are matched and connected with the threaded rod (10) through a bevel gear set (12), the rotating shaft (11) is matched and connected with the rotating part of the synchronous driving mechanism (6) through a gear pair capable of being separated and combined, one gear of the gear pair is fixed on the rotating part of the synchronous driving mechanism (6) and is marked as a fixed gear (13), the other gear is arranged on the rotating shaft (11) in a sliding mode and is marked as a sliding gear (14), a torque rib (15) matched and used for torque transmission with the inner ring of the sliding gear (14) is arranged on the rotating shaft (11), and the sliding gear (14) slides along the direction of the torque rib (15).
5. The wafer box opening device applied to the mobile robot according to claim 1, wherein the synchronous driving mechanism (6) comprises a second rotating shaft (16) fixedly connected between the end part and the box opening arm (4) and a power source (17) for driving the second rotating shaft (16) to rotate, the second rotating shaft (16) is connected with the driving end of the power source (17), and the power source (17) drives the box opening arm (4) to rotate through the second rotating shaft (16) to perform box opening operation of the wafer box.
6. The wafer cassette opening device applied to the mobile robot according to claim 1, wherein a roller (18) is rotatably arranged at one end of the chuck (5) close to the wafer cassette, and the roller (18) is matched with the cover of the wafer cassette in the process of opening the wafer cassette by rotating the cassette opening arm (4).
7. The wafer box opening device applied to the mobile robot according to claim 1, wherein the positioning mechanism (3) comprises a front alignment block (19), a rear alignment block (20), a left alignment block (21) and a right alignment block (22) which are positioned around the wafer box, the front alignment block (19) is positioned on one side of the carrier (1) close to the box opening mechanism (2) and is fixedly connected with the carrier (1), the rear alignment block (20), the left alignment block (21) and the right alignment block (22) are all arranged on the carrier (1) in a penetrating manner, and the lower end of the front alignment block is driven to synchronously move through a linkage mechanism arranged at the bottom of the carrier (1).
8. The wafer box opening device applied to the mobile robot according to claim 7, wherein the linkage mechanism is arranged on a supporting bottom plate (23) which is fixed at the bottom of the carrying platform (11) in parallel, and the box opening mechanism (2) is fixedly arranged on the supporting bottom plate (23); the linkage mechanism comprises a motor (24), a ball screw (25), a linkage frame (26) and a connecting rod (27), the axis direction of the motor (24) is the same as the connecting line direction of the front alignment block (19) and the rear alignment block (20), the driving end of the motor (24) is connected with a screw rod of the ball screw (25), the linkage frame (26) is connected with a nut of the ball screw (25), and when the motor (24) drives the screw rod to rotate, the linkage frame (26) moves back and forth along the axis direction of the screw rod; the rear alignment block (20) is arranged at one end of the linkage frame (26) which is away from the motor (24); the left aligning block (21) and the right aligning block (22) are symmetrically arranged at the left side and the right side of the linkage frame (26), are connected with the linkage frame (26) through connecting rods (27), and an auxiliary base (28) for assisting movement is arranged below the left aligning block (21) and the right aligning block (22).
9. The wafer cassette opening device applied to the mobile robot according to claim 8, wherein the auxiliary base (28) comprises a second guide groove (29) matched with the width of the linkage frame (26), and the end part of the linkage frame (26) is positioned in the second guide groove (29) and slides back and forth along the direction of the guide groove (29); the auxiliary base (28) is also provided with sliding guide rails (30) below the left alignment block (21) and the right alignment block (22), and when the linkage frame (26) drives the connecting rods (27) on two sides to move, the left alignment block (21) and the right alignment block (22) which are correspondingly connected with the two connecting rods (27) slide back and forth along the direction of the sliding guide rails (30).
10. The wafer box opening device applied to the mobile robot according to claim 8, wherein the rear alignment block (20) is slidably connected with a guide rod (31) on the linkage frame (26) along the length direction of a screw of the ball screw (25), a telescopic spring (32) is arranged on the guide rod (31) in a penetrating manner, one end of the telescopic spring (32) is fixed on the linkage frame (26), the other end of the telescopic spring is fixedly connected with the end face of the rear alignment block (20), and the telescopic spring (32) is compatible with the size deviation regulated by the motor (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310608950.1A CN116619443B (en) | 2023-05-29 | 2023-05-29 | Be applied to mobile robot's wafer box and open box device |
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| CN202310608950.1A CN116619443B (en) | 2023-05-29 | 2023-05-29 | Be applied to mobile robot's wafer box and open box device |
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| CN116619443B CN116619443B (en) | 2024-04-26 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5885871B1 (en) * | 2015-04-13 | 2016-03-16 | Dmg森精機株式会社 | Work attachment / detachment device |
| CN107687304A (en) * | 2016-08-05 | 2018-02-13 | 上海太比雅电力设备有限公司 | Electric and hand is opened and closed changeable hoisting port cover plate switching mechanism and its hoisting port |
| CN208938941U (en) * | 2018-12-11 | 2019-06-04 | 苏州美仪自动化设备有限公司 | A kind of type box opening mechanism for wafer box |
| CN110757566A (en) * | 2019-11-15 | 2020-02-07 | 东北大学秦皇岛分校 | Five-axis two-linkage indexing type float cutting machine |
| CN213184234U (en) * | 2021-03-19 | 2021-05-11 | 台湾积体电路制造股份有限公司 | Opening and closing device of wafer carrier |
| CN113073917A (en) * | 2021-03-26 | 2021-07-06 | 湖北三环汽车电器有限公司 | Automatic open and close lid mechanism |
-
2023
- 2023-05-29 CN CN202310608950.1A patent/CN116619443B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5885871B1 (en) * | 2015-04-13 | 2016-03-16 | Dmg森精機株式会社 | Work attachment / detachment device |
| CN107687304A (en) * | 2016-08-05 | 2018-02-13 | 上海太比雅电力设备有限公司 | Electric and hand is opened and closed changeable hoisting port cover plate switching mechanism and its hoisting port |
| CN208938941U (en) * | 2018-12-11 | 2019-06-04 | 苏州美仪自动化设备有限公司 | A kind of type box opening mechanism for wafer box |
| CN110757566A (en) * | 2019-11-15 | 2020-02-07 | 东北大学秦皇岛分校 | Five-axis two-linkage indexing type float cutting machine |
| CN213184234U (en) * | 2021-03-19 | 2021-05-11 | 台湾积体电路制造股份有限公司 | Opening and closing device of wafer carrier |
| CN113073917A (en) * | 2021-03-26 | 2021-07-06 | 湖北三环汽车电器有限公司 | Automatic open and close lid mechanism |
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| CN116619443B (en) | 2024-04-26 |
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