CN116599482A - 振动器件、电子设备以及移动体 - Google Patents
振动器件、电子设备以及移动体 Download PDFInfo
- Publication number
- CN116599482A CN116599482A CN202310559452.2A CN202310559452A CN116599482A CN 116599482 A CN116599482 A CN 116599482A CN 202310559452 A CN202310559452 A CN 202310559452A CN 116599482 A CN116599482 A CN 116599482A
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- detection
- constant potential
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- 238000001514 detection method Methods 0.000 claims abstract description 193
- 239000000758 substrate Substances 0.000 claims abstract description 114
- 238000010292 electrical insulation Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 14
- 239000010453 quartz Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 230000006870 function Effects 0.000 description 9
- 230000035882 stress Effects 0.000 description 8
- 230000001629 suppression Effects 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004984 smart glass Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5628—Manufacturing; Trimming; Mounting; Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019-138430 | 2019-07-29 | ||
| JP2019138430A JP7251383B2 (ja) | 2019-07-29 | 2019-07-29 | 振動デバイス、電子機器および移動体 |
| CN202010729813.XA CN112311348B (zh) | 2019-07-29 | 2020-07-27 | 振动器件、电子设备以及移动体 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010729813.XA Division CN112311348B (zh) | 2019-07-29 | 2020-07-27 | 振动器件、电子设备以及移动体 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116599482A true CN116599482A (zh) | 2023-08-15 |
Family
ID=74259186
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310559452.2A Pending CN116599482A (zh) | 2019-07-29 | 2020-07-27 | 振动器件、电子设备以及移动体 |
| CN202010729813.XA Active CN112311348B (zh) | 2019-07-29 | 2020-07-27 | 振动器件、电子设备以及移动体 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010729813.XA Active CN112311348B (zh) | 2019-07-29 | 2020-07-27 | 振动器件、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US11340070B2 (enExample) |
| JP (2) | JP7251383B2 (enExample) |
| CN (2) | CN116599482A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7251383B2 (ja) * | 2019-07-29 | 2023-04-04 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
| JP7251385B2 (ja) * | 2019-07-30 | 2023-04-04 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
| JP7415444B2 (ja) * | 2019-10-30 | 2024-01-17 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3969459B1 (ja) * | 2006-04-26 | 2007-09-05 | 株式会社村田製作所 | 振動ジャイロ |
| JP2010223774A (ja) * | 2009-03-24 | 2010-10-07 | Seiko Epson Corp | 物理量検出装置 |
| JP5838749B2 (ja) * | 2011-11-16 | 2016-01-06 | セイコーエプソン株式会社 | 振動子、振動デバイスおよび電子機器 |
| JP2013156127A (ja) * | 2012-01-30 | 2013-08-15 | Seiko Epson Corp | 振動片、振動デバイス、物理量検出装置、および電子機器 |
| DE102012201486B4 (de) * | 2012-02-02 | 2020-08-06 | Robert Bosch Gmbh | Dämpfungsvorrichtung für eine mikromechanische Sensoreinrichtung |
| JP2014089049A (ja) | 2012-10-29 | 2014-05-15 | Tdk Corp | 角速度センサ |
| JP2015087251A (ja) * | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 振動素子、物理量検出装置、電子機器、および移動体 |
| JP6357758B2 (ja) * | 2013-11-25 | 2018-07-18 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
| US9568313B2 (en) * | 2014-10-28 | 2017-02-14 | Seiko Epson Corporation | Electronic device, electronic apparatus, and moving object |
| JP6488640B2 (ja) * | 2014-10-28 | 2019-03-27 | セイコーエプソン株式会社 | 電子デバイス、電子機器および移動体 |
| JP2017015584A (ja) * | 2015-07-02 | 2017-01-19 | セイコーエプソン株式会社 | 電子デバイス、電子デバイスの製造方法、電子機器、および移動体 |
| JP6668626B2 (ja) * | 2015-07-16 | 2020-03-18 | セイコーエプソン株式会社 | 電子デバイス、電子機器、および移動体 |
| JP6680079B2 (ja) * | 2016-05-25 | 2020-04-15 | セイコーエプソン株式会社 | 電子デバイス、電子デバイスの製造方法、物理量センサー、電子機器および移動体 |
| JP6834581B2 (ja) * | 2017-02-23 | 2021-02-24 | セイコーエプソン株式会社 | 物理量センサー、電子機器及び移動体 |
| JP6957921B2 (ja) | 2017-03-23 | 2021-11-02 | セイコーエプソン株式会社 | 振動デバイス、角速度センサー、電子機器および移動体 |
| JP6855961B2 (ja) * | 2017-06-30 | 2021-04-07 | セイコーエプソン株式会社 | 振動素子の周波数調整方法、振動素子、振動子、電子機器および移動体 |
| JP7251383B2 (ja) * | 2019-07-29 | 2023-04-04 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
-
2019
- 2019-07-29 JP JP2019138430A patent/JP7251383B2/ja active Active
-
2020
- 2020-07-27 CN CN202310559452.2A patent/CN116599482A/zh active Pending
- 2020-07-27 CN CN202010729813.XA patent/CN112311348B/zh active Active
- 2020-07-28 US US16/940,745 patent/US11340070B2/en active Active
-
2022
- 2022-04-14 US US17/720,404 patent/US20220236058A1/en active Pending
-
2023
- 2023-03-22 JP JP2023045053A patent/JP7533663B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN112311348B (zh) | 2023-06-06 |
| JP2023076519A (ja) | 2023-06-01 |
| CN112311348A (zh) | 2021-02-02 |
| US20210033398A1 (en) | 2021-02-04 |
| US20220236058A1 (en) | 2022-07-28 |
| JP7533663B2 (ja) | 2024-08-14 |
| US11340070B2 (en) | 2022-05-24 |
| JP2021021636A (ja) | 2021-02-18 |
| JP7251383B2 (ja) | 2023-04-04 |
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| PB01 | Publication | ||
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