CN116599482A - 振动器件、电子设备以及移动体 - Google Patents

振动器件、电子设备以及移动体 Download PDF

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Publication number
CN116599482A
CN116599482A CN202310559452.2A CN202310559452A CN116599482A CN 116599482 A CN116599482 A CN 116599482A CN 202310559452 A CN202310559452 A CN 202310559452A CN 116599482 A CN116599482 A CN 116599482A
Authority
CN
China
Prior art keywords
wiring
detection
constant potential
electrode
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310559452.2A
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English (en)
Chinese (zh)
Inventor
西泽龙太
山口启一
小仓诚一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN116599482A publication Critical patent/CN116599482A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
CN202310559452.2A 2019-07-29 2020-07-27 振动器件、电子设备以及移动体 Pending CN116599482A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-138430 2019-07-29
JP2019138430A JP7251383B2 (ja) 2019-07-29 2019-07-29 振動デバイス、電子機器および移動体
CN202010729813.XA CN112311348B (zh) 2019-07-29 2020-07-27 振动器件、电子设备以及移动体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN202010729813.XA Division CN112311348B (zh) 2019-07-29 2020-07-27 振动器件、电子设备以及移动体

Publications (1)

Publication Number Publication Date
CN116599482A true CN116599482A (zh) 2023-08-15

Family

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CN202310559452.2A Pending CN116599482A (zh) 2019-07-29 2020-07-27 振动器件、电子设备以及移动体
CN202010729813.XA Active CN112311348B (zh) 2019-07-29 2020-07-27 振动器件、电子设备以及移动体

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US (3) US11340070B2 (enExample)
JP (2) JP7251383B2 (enExample)
CN (2) CN116599482A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7251383B2 (ja) * 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251385B2 (ja) * 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7415444B2 (ja) * 2019-10-30 2024-01-17 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP2023107353A (ja) * 2022-01-24 2023-08-03 セイコーエプソン株式会社 振動デバイス

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010256332A (ja) * 2009-04-02 2010-11-11 Seiko Epson Corp 振動片、振動子および物理量検出装置
US20130199295A1 (en) * 2012-02-02 2013-08-08 Robert Bosch Gmbh Damping device for a micromechanical sensor device
JP2016085182A (ja) * 2014-10-28 2016-05-19 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
CN106053883A (zh) * 2015-04-13 2016-10-26 精工爱普生株式会社 物理量传感器、电子设备以及移动体
CN106352861A (zh) * 2015-07-16 2017-01-25 精工爱普生株式会社 电子装置、电子设备以及移动体
JP2017211255A (ja) * 2016-05-25 2017-11-30 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、物理量センサー、電子機器および移動体
CN108627149A (zh) * 2017-03-23 2018-10-09 精工爱普生株式会社 振动器件、角速度传感器、电子设备和移动体

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WO2007125612A1 (ja) * 2006-04-26 2007-11-08 Murata Manufacturing Co., Ltd. 振動ジャイロ
JP2010223774A (ja) * 2009-03-24 2010-10-07 Seiko Epson Corp 物理量検出装置
JP5838749B2 (ja) * 2011-11-16 2016-01-06 セイコーエプソン株式会社 振動子、振動デバイスおよび電子機器
JP2013156127A (ja) * 2012-01-30 2013-08-15 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器
JP2014089049A (ja) 2012-10-29 2014-05-15 Tdk Corp 角速度センサ
JP2015087251A (ja) * 2013-10-30 2015-05-07 セイコーエプソン株式会社 振動素子、物理量検出装置、電子機器、および移動体
JP6357758B2 (ja) * 2013-11-25 2018-07-18 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US9568313B2 (en) * 2014-10-28 2017-02-14 Seiko Epson Corporation Electronic device, electronic apparatus, and moving object
JP2017015584A (ja) 2015-07-02 2017-01-19 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、電子機器、および移動体
JP6834581B2 (ja) 2017-02-23 2021-02-24 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
JP6855961B2 (ja) * 2017-06-30 2021-04-07 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子、振動子、電子機器および移動体
JP7251383B2 (ja) * 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010256332A (ja) * 2009-04-02 2010-11-11 Seiko Epson Corp 振動片、振動子および物理量検出装置
US20130199295A1 (en) * 2012-02-02 2013-08-08 Robert Bosch Gmbh Damping device for a micromechanical sensor device
DE102012201486A1 (de) * 2012-02-02 2013-08-08 Robert Bosch Gmbh Dämpfungsvorrichtung für eine mikromechanische Sensoreinrichtung
JP2016085182A (ja) * 2014-10-28 2016-05-19 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
CN106053883A (zh) * 2015-04-13 2016-10-26 精工爱普生株式会社 物理量传感器、电子设备以及移动体
CN106352861A (zh) * 2015-07-16 2017-01-25 精工爱普生株式会社 电子装置、电子设备以及移动体
JP2017211255A (ja) * 2016-05-25 2017-11-30 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、物理量センサー、電子機器および移動体
CN108627149A (zh) * 2017-03-23 2018-10-09 精工爱普生株式会社 振动器件、角速度传感器、电子设备和移动体

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JP2021021636A (ja) 2021-02-18
US20260036426A1 (en) 2026-02-05
US20210033398A1 (en) 2021-02-04
US20220236058A1 (en) 2022-07-28
CN112311348A (zh) 2021-02-02
JP7533663B2 (ja) 2024-08-14
JP2023076519A (ja) 2023-06-01
CN112311348B (zh) 2023-06-06
US11340070B2 (en) 2022-05-24
JP7251383B2 (ja) 2023-04-04

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