CN116571034A - Semiconductor air purifying device - Google Patents
Semiconductor air purifying device Download PDFInfo
- Publication number
- CN116571034A CN116571034A CN202310452358.7A CN202310452358A CN116571034A CN 116571034 A CN116571034 A CN 116571034A CN 202310452358 A CN202310452358 A CN 202310452358A CN 116571034 A CN116571034 A CN 116571034A
- Authority
- CN
- China
- Prior art keywords
- fixed
- pipe
- air
- plate
- outer side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 230000007246 mechanism Effects 0.000 claims abstract description 53
- 238000002955 isolation Methods 0.000 claims abstract description 47
- 238000007664 blowing Methods 0.000 claims abstract description 36
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 210000001503 joint Anatomy 0.000 claims abstract description 25
- 238000009423 ventilation Methods 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims description 29
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 22
- 229910052742 iron Inorganic materials 0.000 claims description 11
- 238000000746 purification Methods 0.000 claims description 11
- 238000002347 injection Methods 0.000 claims description 10
- 239000007924 injection Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 4
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000004887 air purification Methods 0.000 claims 8
- 238000004140 cleaning Methods 0.000 claims 4
- 239000000428 dust Substances 0.000 abstract description 10
- 238000013461 design Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a semiconductor air purifying device, which relates to the technical field of semiconductors and comprises two purifying cylinders arranged on the outer side of an isolation frame, and further comprises a U-shaped pipe fixedly communicated with the bottom of the purifying cylinders, wherein a butt joint pipe is inserted in the U-shaped pipe, the top of the U-shaped pipe is fixedly communicated with an air outlet pipe, and the top of the air outlet pipe is fixedly communicated with an air outlet pipe; the air outlet of the air exchanging mechanism is connected with the butt joint pipe, the air inlet of the air exchanging mechanism is communicated with an air suction pipe, and the air suction pipe is fixedly communicated with one side wall of the isolation pipe; the ventilation mechanism designed in the invention can extract the gas in the isolation frame, purify the gas through the evolutionary liquid in the evolutionary cylinder, and then blow the purified gas to the outer side of the semiconductor chip in a targeted way by matching with the blowing mechanism, and the gas nearby the semiconductor is replaced preferentially, so that the dust-containing gas is reduced around the semiconductor chip.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a semiconductor air purifying device.
Background
A semiconductor refers to a material having conductivity between that of a conductor and an insulator at normal temperature. Semiconductor chip consumer electronics, communication systems, photovoltaic power generation, lighting applications, power conversion, and the like have their active figures.
In the preparation process of a semiconductor chip, the method mainly comprises the steps of wafer production, oxidization, photoetching, etching, film deposition, interconnection, testing and packaging, and when the semiconductor is subjected to packaging operation, a wafer saw is required to be cut, a single wafer is required to be attached, interconnection, molding and packaging are required to be tested, and the chip subjected to the final packaging test is the chip with the final form and is applied to products of various industries;
in the whole step, because the cut small chips are very precise, fine dust is adhered and then has a pattern influencing the layout of precise wires on the small chips, and serious consequences of electrical short circuit or circuit breaking are caused, a series of operations are required to be carried out in a sealed space for isolating dust, but the cut small chips are put into the sealed space, and the sealing performance of the space is broken when the packaged chips are taken out, so that external air enters, and an air purifying device is required to purify the internal air and remove the fine dust;
the existing air purifying device mainly comprises a filtering purifying mode by utilizing a filter screen and a filter cloth and the like, and a purifying mode by utilizing liquid to adsorb and dissolve impurities in the air, wherein the two purifying modes can purify the air in the space, but because a series of operations are needed to be carried out in the sealed space, the sealed space has a certain volume, the area which is really needed to be purified is mainly the place where the cut small chips are put into the sealed space and the area where the packaged chips are taken out, and the conventional air purifying device can only completely purify the air in the space, has low purifying pertinence and low efficiency for effectively purifying.
Disclosure of Invention
In order to solve the technical problems set forth in the background art, the invention provides a semiconductor air purifying device, which has the advantages that the gas nearby the semiconductor can be purified preferentially, so that the semiconductor is in a purified gas environment.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the semiconductor air purifying device comprises two purifying cylinders arranged on the outer side of an isolation frame, and further comprises a U-shaped pipe fixedly communicated with the bottom of the purifying cylinders, wherein an opposite connection pipe is inserted in the U-shaped pipe, the top of the U-shaped pipe is fixedly communicated with an air outlet pipe, and the top of the air outlet pipe is fixedly communicated with an air outlet pipe; the air outlet of the air exchanging mechanism is connected with the butt joint pipe, the air inlet of the air exchanging mechanism is communicated with an air suction pipe, and the air suction pipe is fixedly communicated with one side wall of the isolation pipe; and the blowing mechanism is arranged in the isolation frame and blows the purified gas to the semiconductor chip, and the exhaust pipe is in butt joint with the blowing mechanism.
The technical scheme is as follows: the designed blowing mechanism can blow the purified gas out of the semiconductor chip, purify the peripheral gas of the semiconductor chip, and realize targeted purification.
The invention is further arranged that the ventilation mechanism comprises two air exchange cylinders and a support frame, wherein the air exchange cylinders are internally provided with reciprocating screw rods through rotating shafts in a rotating manner, the outer sides of the air exchange cylinders are fixed with the support frame through supports, the bottom ends of the reciprocating screw rods are in rotating butt joint with the support frame through bearings, gears are fixed on the outer sides of the bottoms of the reciprocating screw rods, toothed belts are meshed and sleeved on the outer sides of the two gears, a driving motor is fixed on the bottom of the support frame through a motor frame, the output end of the driving motor is fixed with the bottom of one of the reciprocating screw rods through a coupler, a piston sleeve is sleeved on the outer side of each reciprocating screw rod in a threaded manner, a limiting rod is inserted in each piston sleeve in a sliding manner, the two ends of each limiting rod are respectively fixed with the inner wall of the top of the air exchange cylinder and the support frame, two exhaust valves are fixedly communicated with the top of each air exchange cylinder, and the two exhaust valves face opposite directions and are respectively communicated with a butt joint pipe and an air suction pipe.
The technical scheme is as follows: the designed ventilation mechanism can circularly pump out, purify and input the gas in the isolation frame.
The exhaust valve further comprises a valve pipe fixedly communicated with the ventilation cylinder, an abutting ring is fixed on the inner wall of the valve pipe, a connecting rod is arranged in the abutting ring, a sealing ball matched with the abutting ring is fixed at one end of the connecting rod, a abutting plate is fixed at the other end of the connecting rod, an extrusion spring fixed with the abutting plate and the abutting ring is sleeved on the outer side of the connecting rod, the outer end of the valve pipe for exhausting is fixedly communicated with the abutting pipe, and the outer end of the valve pipe for sucking is fixedly communicated with the air suction pipe.
The technical scheme is as follows: the design of the exhaust valve meets the requirement of unidirectional conveying, and when the piston sleeve moves up and down, the ventilation treatment in the isolation frame is met.
The invention further provides that the blowing mechanism comprises a mounting plate fixed in the isolation frame, a cylindrical air bag is fixed in the mounting plate, rail rods are fixed at the top and the bottom of the mounting plate, two ends of the two rail rods are fixed with the inner wall of the isolation frame through fixing frames, two ends of the two rail rods are sleeved with a pushing cover in a sliding manner, the outer side of the rail rods is sleeved with a tension spring fixed with the pushing cover and the mounting plate, the pushing cover is propped against the outer end of the air bag, two ends of the mounting plate are fixed with through pipes for air inlet and air outlet of the air bag, the through pipes for air inlet extend to the outer side through the isolation frame, a three-way pipe is fixed, the three-way pipe is in butt joint with two exhaust pipes, and the outer side of the other through pipe is fixed with a blowing component blowing towards the semiconductor chip.
The technical scheme is as follows: the air bag in the air blowing mechanism can store the purified gas firstly through expansion of the air bag, so that the gas in the isolation frame is pumped away and purified preferentially, and then the semiconductor chip is blown once again, and the purifying effect is improved.
The invention further provides that the blowing assembly comprises a long pipe fixed with the through pipe, a track plate is fixed on the outer side of the long pipe, a plurality of exhaust holes communicated with the long pipe are formed in the inner wall of the track plate, shielding plates are inserted into the two ends of the track plate in a sliding mode, vent holes are formed in positions, corresponding to the exhaust holes, of the shielding plates, and an adjusting piece used for adjusting the positions of the shielding plates is arranged on the long pipe.
The technical scheme is as follows: the blowing assembly is used for blowing air to the outer side of the semiconductor chip.
The invention is further arranged that the adjusting piece comprises two connecting plates fixed at two ends of the long tube, the middle position of the track plate and the outer ends of the two connecting plates are respectively fixed with a magnetic attraction block, iron blocks attracted by the magnetic attraction blocks are respectively fixed at two ends of the shielding plate, an adjusting plate is fixed at the outer side of the pushing cover, and an abutting plate abutted against the adjusting plate is fixed at the outer sides of the iron blocks close to one end of the connecting plate and the shielding plate.
The technical scheme is as follows: the design of the adjusting piece meets the requirements of opening and closing the exhaust hole, and cooperates with the air suction and exhaust treatment of the air bag to realize the air blowing treatment of the outer side of the semiconductor chip.
The invention is further characterized in that a rubber hose is fixed at the outer end of the butt joint pipe, a threaded cap is rotatably arranged on the outer side of the butt joint pipe through a bearing, and a threaded groove matched with the threaded cap is formed at the outer end of the U-shaped pipe.
The technical scheme is as follows: the connecting pipe is more convenient to insert and convenient to overhaul and replace.
The invention is further characterized in that the bottom of the U-shaped pipe is fixedly communicated with a liquid discharge pipe, the top of the purifying cylinder is provided with a liquid injection pipe, and the outer ends of the liquid injection pipe and the liquid discharge pipe are respectively sleeved with a sealing cover in a threaded manner.
The technical scheme is as follows: the designed liquid discharge pipe and the liquid injection rod can be used for replacing liquid in the purifying cylinder.
The invention further provides that the air outlet pipe is provided with a closing mechanism at the outer side, the closing mechanism comprises an arc-shaped frame fixedly communicated with the air outlet pipe, an arc-shaped sealing plate is slidably arranged in the arc-shaped frame, an arc-shaped opening is formed in the sealing plate, an arc-shaped rod is fixedly arranged in the arc-shaped opening, a limit post fixed with the inner wall of the arc-shaped frame is sleeved at the outer side of the arc-shaped rod in a sliding manner, an arc-shaped pushing spring propped against the limit post and the inner wall of the arc-shaped opening is sleeved at the outer side of the arc-shaped rod, an elastic sleeve wrapping the outer end of the arc-shaped sealing plate is fixedly arranged at the outer side of the arc-shaped frame, and a pushing assembly for pushing the elastic sleeve is arranged at the outer side of the isolation frame.
The technical scheme is as follows: the design of the closing mechanism ensures that the shutdown operation is not needed when the liquid in the purifying cylinder is replaced.
The invention further provides that the pushing assembly comprises a connecting rod fixed on the outer wall of the isolation frame, a pushing plate is sleeved on the outer side of the connecting rod, an adjusting disc is fixed on the outer side of the connecting rod, a plurality of limiting holes are formed in the adjusting disc, a plug rod which is plugged with the limiting holes in a sliding manner is plugged on the pushing plate, a pull plate is fixed on the top of the plug rod, a limiting ring is fixed on the bottom of the plug rod, and a pushing spring is sleeved on the outer side of the limiting rod.
The technical scheme is as follows: the design of the pushing component is convenient for people to squeeze the elastic sleeve.
The invention is further arranged that both sides of the pushing plate are fixedly provided with arc plates, and the arc plates are contacted with the elastic sleeve.
The technical scheme is as follows: improve area of contact, make the laminating inseparabler simultaneously, convenient propelling movement.
The invention further provides that the contact surface of the shielding plate and the track plate is made of rubber materials.
The technical scheme is as follows: the rubber material can improve sealing performance and avoid air leakage.
The beneficial effects of the invention are as follows:
1. the ventilation mechanism designed in the invention can extract the gas in the isolation frame, purify the gas through the evolutionary liquid in the evolutionary cylinder, and then blow the purified gas to the outer side of the semiconductor chip in a targeted way by matching with the blowing mechanism, so that the gas nearby the semiconductor is replaced preferentially, and the dust-containing gas is reduced around the semiconductor chip;
2. the air bag designed in the air blowing mechanism can store a certain content of purified gas, so that most of the gas is pumped out for purification when the gas is purified in the isolation frame, and the purified gas is not directly transmitted into the isolation frame, thereby improving the purification efficiency of impurity gas, and then uniformly blowing out the gas in the air bag, and effectively reducing dust-containing gas outside the semiconductor chip;
3. the closing mechanism designed in the invention is matched with the pushing component, so that the essence in the purifying cylinder can be replaced without stopping, and the requirement of purifying for 24 hours without stopping is met.
Drawings
FIG. 1 is a schematic view of a docking structure with a spacer of the present invention;
FIG. 2 is a schematic view of another angle structure of the present invention for interfacing with a spacer;
FIG. 3 is a schematic diagram showing the positional relationship between the blowing mechanism and the isolation frame according to the present invention;
FIG. 4 is a schematic diagram of the relationship between the ventilation mechanism and the purifying cylinder;
FIG. 5 is a schematic view of the ventilation mechanism of the present invention with portions broken away;
FIG. 6 is a schematic illustration of the connection of the butt joint pipe and U-shaped pipe of the present invention;
FIG. 7 is a schematic view in partial cross-section of a closure mechanism of the present invention;
FIG. 8 is a schematic diagram of the connection between a tee and an exhaust pipe according to the present invention;
FIG. 9 is a schematic diagram of the blowing mechanism of the present invention;
FIG. 10 is a schematic view of another angular configuration of the blowing mechanism of the present invention;
FIG. 11 is a schematic view of the track plate of the present invention connected to a shielding plate.
In the figure: 1. a purifying cylinder; 2. a U-shaped tube; 3. a butt joint pipe; 4. an air outlet pipe; 5. an exhaust pipe; 6. a ventilation mechanism; 7. an air suction pipe; 8. an air blowing mechanism; 9. a gas cylinder; 10. a support frame; 11. a reciprocating screw rod; 12. a gear; 13. a toothed belt; 14. a driving motor; 15. a piston sleeve; 16. a limit rod; 17. an exhaust valve; 18. a valve tube; 19. a propping ring; 20. a connecting rod; 21. a sealing ball; 22. a retaining plate; 23. extruding a spring; 24. a mounting plate; 25. an air bag; 26. a track rod; 27. pushing the cover; 28. a tension spring; 29. a three-way pipe; 30. an air blowing assembly; 31. a long tube; 32. a track plate; 33. an exhaust hole; 34. a shielding plate; 35. a vent hole; 36. an adjusting member; 37. a connecting plate; 38. a magnetic suction block; 39. iron blocks; 40. an adjusting plate; 41. an abutting plate; 42. a rubber hose; 43. a threaded cap; 44. a liquid discharge pipe; 45. a liquid injection pipe; 46. a closing mechanism; 47. an arc frame; 48. an arc-shaped sealing plate; 49. an arc-shaped rod; 50. a limit column; 51. an arc pushing spring; 52. an elastic sleeve; 53. a pushing assembly; 54. a connecting rod; 55. a pushing plate; 56. an adjusting plate; 57. a limiting hole; 58. a rod; 59. pulling a plate; 60. a limiting ring; 61. pushing the spring tightly; 62. an arc-shaped plate.
Detailed Description
The technical scheme of the patent is further described in detail below with reference to the specific embodiments.
Embodiments of the present patent are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present patent and are not to be construed as limiting the present patent.
Example 1
Referring to fig. 1-4, a semiconductor air purifying device in the drawings comprises two purifying cylinders 1 arranged on the outer sides of isolation frames, and further comprises a U-shaped pipe 2 fixedly communicated with the bottom of the purifying cylinders 1, a butt joint pipe 3 is inserted into the U-shaped pipe 2, an air outlet pipe 4 is fixedly communicated with the top of the butt joint pipe, and an air outlet pipe 5 is fixedly communicated with the top of the air outlet pipe 4; the air exchanging mechanism 6, the air outlet of the air exchanging mechanism 6 is connected with the butt joint pipe 3, the air inlet of the air exchanging mechanism 6 is communicated with an air suction pipe 7, and the air suction pipe 7 is fixedly communicated with one side wall of the isolation pipe; the air blowing mechanism 8 is arranged in the isolation frame, the air blowing mechanism 8 blows purified air to the semiconductor chip, and the exhaust pipe 5 is in butt joint with the air blowing mechanism 8;
in the scheme, the purifying cylinder 1 is filled with purifying liquid which is mainly used for adsorbing dust impurities in the air, and the purifying liquid can be used for capturing dust and is not limited to an environment-friendly dust suppressant;
referring to fig. 1 to 3, a closing plate is rotatably installed at an outer end of the isolation frame, a supporting table for holding and transferring semiconductor chips is provided in an inner portion of the isolation frame, and an isolation plate is rotatably installed at the other end of the isolation frame, and is opened by the closing plate, and is closed by a person to put the semiconductor chips on the supporting table, and then the closing plate is closed to perform main purification treatment on gas between the closing plate and the isolation plate.
Also to be described is: the ventilation mechanism 6 is designed to pump out the gas in the isolation frame, the gas is purified by the purification cylinder 1 and then is discharged into the blowing mechanism 8, the purified gas is blown out towards the semiconductor chip by the blowing mechanism 8, and the purification is high in efficiency.
Referring to fig. 4 and 5, the ventilation mechanism 6 in the drawing comprises two air exchange cylinders 9 and a support frame 10, wherein a reciprocating screw rod 11 is rotatably arranged in the air exchange cylinders 9 through a rotating shaft, the outer sides of the air exchange cylinders 9 are fixed with the support frame 10 through a support, the bottom ends of the reciprocating screw rods 11 are rotatably butted with the support frame 10 through bearings, a gear 12 is fixed on the outer sides of the bottoms of the reciprocating screw rods 11, toothed belts 13 are sleeved outside the two gears 12 in a meshed mode, a driving motor 14 is fixed on the bottom of the support frame 10 through a motor frame, the output end of the driving motor 14 is fixed with the bottom of one of the reciprocating screw rods 11 through a coupler, a piston sleeve 15 is sleeved on the outer sides of the reciprocating screw rods 11 through threads, a limiting rod 16 is slidably inserted in the piston sleeve 15, two ends of the limiting rod 16 are respectively fixed with the inner wall of the top of the air exchange cylinders 9 and the support frame 10, two exhaust valves 17 are fixedly communicated with the top of the air exchange cylinders 9, and the two exhaust valves 17 face opposite directions and are respectively communicated with a butting pipe 3 and an air suction pipe 7;
the exhaust valve 17 comprises a valve tube 18 fixedly communicated with the ventilation tube 9, an abutting ring 19 is fixed on the inner wall of the valve tube 18, a connecting rod 20 is arranged in the abutting ring 19, a sealing ball 21 matched with the abutting ring 19 is fixed at one end of the connecting rod 20, a abutting plate 22 is fixed at the other end of the connecting rod, an extrusion spring 23 fixed with the abutting plate 22 and the abutting ring 19 is sleeved on the outer side of the connecting rod 20, the outer end of the valve tube 18 for exhausting is fixedly communicated with the abutting tube 3, and the outer end of the valve tube 18 for sucking is fixedly communicated with the air suction tube 7.
The ventilation principle is realized: firstly, the driving motor 14 rotates and drives the two reciprocating screw rods 11 to rotate under the action of the gear 12 and the toothed belt 13, so that the two piston sleeves 15 are driven to lift in the ventilation cylinder 9, the piston sleeves 15 move downwards to suck air, the air in the partition frame is matched with the air suction pipe 7 to be pumped out, then the piston sleeves 15 move upwards to push out the air sucked into the ventilation cylinder 9, the air is transmitted into the U-shaped pipe 2 through the butt joint pipe 3 and purified by the purifying liquid in the purification cylinder 1, and then the air is transmitted into the air blowing mechanism 8 through the air exhaust pipe 5.
It should be noted that: when the air suction is performed, a certain distance is generated between the sealing ball 21 in one valve tube 18 and the propping ring 19 due to the downward movement of the sealing ball, so that the air suction is met, the sealing ball 21 in one valve tube 18 props against the propping ring 19 when the sealing ball moves downward, no air suction is realized, the sealing ball 21 is pushed to move upward when the air is exhausted, the distance is generated between the sealing ball 21 at the upper end and the propping ring 19 at the moment, the air exhaust is met, and the other valve tube 18 is in a sealing state, so that the unidirectional air transmission principle is realized.
Meanwhile, referring to fig. 8-10, the air blowing mechanism 8 comprises a mounting plate 24 fixed in the isolation frame, a cylindrical air bag 25 is fixed in the mounting plate 24, rail rods 26 are fixed at the top and bottom of the mounting plate 24, two ends of the two rail rods 26 are fixed with the inner wall of the isolation frame through fixing frames, two ends of the two rail rods 26 are slidably sleeved with a push cover 27, a tension spring 28 fixed with the push cover 27 and the mounting plate 24 is sleeved on the outer side of the rail rods 26, the push cover 27 abuts against the outer end of the air bag 25, two ends of the mounting plate 24 are fixed with through pipes for air inlet and outlet of the air bag 25, the through pipes for inlet extend to the outer side through the isolation frame and are fixed with three-way pipes 29, the three-way pipes 29 are butted with two exhaust pipes 5, and an air blowing assembly 30 for blowing towards a semiconductor chip is fixed on the outer side of the other through pipe;
the air blowing assembly 30 comprises a long tube 31 fixed with a through tube, a track plate 32 is fixed on the outer side of the long tube 31, a plurality of exhaust holes 33 communicated with the long tube 31 are formed in the inner wall of the track plate 32, shielding plates 34 are inserted into the two ends of the track plate 32 in a sliding mode, vent holes 35 are formed in positions, corresponding to the plurality of exhaust holes 33, of the shielding plates 34, and an adjusting piece 36 used for adjusting the positions of the shielding plates 34 is arranged on the long tube 31.
Principle of storing and then exhausting purified gas: the purified gas is introduced into the three-way pipe 29 through the exhaust pipe 5 and finally is input into the air bag 25, and the purified gas is stored through the expansion of the air bag 25, so that the original gas in the isolation frame can be preferentially extracted and purified at the moment, the purified gas is prevented from being mixed with the isolation frame, and the purification efficiency is reduced;
when the air bag 25 expands, the pushing covers 27 at two ends are driven to move along the track rod 26, when the pushing covers 27 move, the adjusting piece 36 is triggered to drive the shielding plate 34 to move, so that the vent holes 35 on the shielding plate 34 are aligned with the vent holes 33, and the pushing covers 27 are pulled to reset by the tension springs 28, so that the air bag 25 expanded before can be extruded, gas in the long tube 31 can be discharged and blown out towards the periphery of the semiconductor chip, and gas which is not purified at the outer side of the semiconductor chip is blown away, so that the semiconductor chip is in the purified gas, and the purification efficiency is improved.
In addition, referring to fig. 10 and 11, the adjusting member 36 in the drawings includes two connecting plates 37 fixed at two ends of the long tube 31, magnetic attraction blocks 38 are fixed at the middle position of the track plate 32 and at the outer ends of the two connecting plates 37, iron blocks 39 attracted by the magnetic attraction blocks 38 are fixed at two ends of the shielding plate 34, an adjusting plate 40 is fixed at the outer side of the pushing cover 27, and an abutting plate 41 abutting against the adjusting plate 40 is fixed at the outer sides of the iron blocks 39 and the shielding plate 34 near one end of the connecting plates 37;
it should be noted that: when the pushing cover 27 moves by expanding the air bag 25, the adjusting plate 40 at the outer end of the pushing cover 27 abuts against the abutting plate 41 near one end of the connecting plate 37, and drives the shielding plate 34 to move in a proper manner, so that the vent holes 35 on the shielding plate 34 are aligned with the vent holes 33 and are adsorbed and positioned by the iron blocks 39 and the magnetic attraction blocks 38, at the moment, under the action of the tension springs 28, the pushing cover 27 is reset and moved along the track rod 26 and finally abuts against the other abutting plate 41, the shielding plate 34 is pulled to move, the other iron blocks 39 are adsorbed and positioned by the magnetic attraction blocks 38, at the moment, the vent holes 35 on the shielding plate 34 are staggered with the vent holes 33, so that gas cannot be discharged, and the gas is adsorbed and stored by the next air bag 25 conveniently.
Notably, are: in order to improve the air tightness between the shielding plate 34 and the track plate 32 after being attached, and avoid air leakage, the contact surface of the shielding plate 34 and the track plate 32 is made of rubber.
The method for targeted gas purification of the semiconductor chip comprises the following steps: firstly, a person opens the closing plate to place the semiconductor chip on the supporting table, then, the closing plate and the isolation plate are closed, then, the air in the area between the closing plate and the isolation plate in the isolation frame is pumped out through the air exchanging mechanism 6, the air is purified through the purifying cylinder 1, the purified air is introduced into the air bag 25, the air bag 25 expands due to the air input, the purified air can be stored firstly instead of being directly input into the isolation frame along with the expansion of the air bag 25, so that the gas which is not evolved in the isolation frame can be adsorbed and purified preferentially, the purified air is prevented from evolving again, the evolution efficiency is improved, when the air bag expands to the maximum range, the adjusting plate 40 at the outer side of the pushing cover 27 is propped against the butt plate 41 at one end, the shielding plate 34 is driven to move, the vent hole 35 on the shielding plate 34 is aligned with the vent hole 33 and is adsorbed and positioned by the iron block 39 and the magnetic attraction block 38, at the moment, under the action of the tension spring 28, the pushing cover 27 is reset and moved along the track rod 26, so that the air bag 25 is extruded, the purified gas stored in the air bag is discharged and directly blown around the semiconductor chip, the purified gas is arranged around the semiconductor chip, the probability of being adsorbed by dust in the gas is reduced, after the pushing cover 27 is reset, the adjusting plate 40 is abutted against the other abutting plate 41 to drive the shielding plate 34 to move, and the other iron block 39 is adsorbed and positioned by the magnetic attraction block 38, at the moment, the vent hole 35 on the shielding plate 34 is staggered with the vent hole 33, so that the gas cannot be discharged, the gas can be conveniently adsorbed and stored by the next round of the air bag 25, and the gas between the isolating plate and the closing plate can be purified after being circulated for several times.
In this scheme, referring to fig. 6, in the illustration, a rubber hose 42 is fixed at the outer end of a butt joint pipe 3, a threaded cap 43 is rotatably installed on the outer side of the butt joint pipe 3 through a bearing, a threaded groove matched with the threaded cap 43 is formed at the outer end of a U-shaped pipe 2, meanwhile, a liquid discharge pipe 44 is fixedly communicated with the bottom of the U-shaped pipe 2, a liquid injection pipe 45 is formed at the top of a purifying cylinder 1, and sealing covers are sleeved on the outer ends of the liquid injection pipe 45 and the liquid discharge pipe 44 through threads;
it should be noted that: the design of rubber hose 42 and screw cap 43 for butt joint pipe 3 can break away from with U type pipe 2 easily, and the dismantlement of convenient follow-up maintenance is changed, and the notes liquid pipe 45 and the fluid-discharge tube 44 of design mutually support simultaneously, and the liquid that adsorbs the saturation in the section of thick bamboo 1 is changed very easily.
Example two
Referring to fig. 6 and 7, for further explanation of the embodiment, a closing mechanism 46 is mounted on the outer side of the air outlet pipe 4 in the illustration, the closing mechanism 46 includes an arc frame 47 fixedly communicated with the air outlet pipe 4, an arc sealing plate 48 is slidably mounted in the arc frame 47, an arc opening is formed in the sealing plate, an arc rod 49 is fixed in the arc opening, a limit post 50 fixed on the inner wall of the arc frame 47 is slidably sleeved on the outer side of the arc rod 49, an arc pushing spring 51 propped against the limit post 50 and the inner wall of the arc opening is sleeved on the outer side of the arc rod 49, an elastic sleeve 52 wrapping the outer end of the arc sealing plate 48 is fixed on the outer side of the arc frame 47, and a pushing component 53 for pushing the elastic sleeve 52 is mounted on the outer side of the isolation frame;
wherein, push subassembly 53 is including fixing the connecting rod 54 on the isolation frame outer wall, and the outside cover of connecting rod 54 has push plate 55, and the outside of connecting rod 54 is fixed with adjustment disk 56, opens on the adjustment disk 56 has a plurality of spacing holes 57, and the slip grafting has the inserted bar 58 that peg graft mutually with spacing hole 57 on the push plate 55, and the top of inserted bar 58 is fixed with arm-tie 59, and the bottom is fixed with spacing ring 60, and the outside cover of gag lever post 16 has pushing spring 61.
Realize the principle of replacing purifying liquid without stopping the machine: the personnel pull up the pull plate 59 to enable the inserting rod 58 to be separated from the limiting hole 57, then rotate the pushing plate 55 to enable the pushing plate 55 to push the arc-shaped sealing plate 48 in the elastic sleeve 52 to move, so that the air outlet pipe 4 is blocked, and the air cannot be discharged, at the moment, under the action of the pushing spring 61, the inserting rod 58 is clamped with the other limiting hole 57 to position the pushing plate 55, then the personnel firstly opens the liquid discharge pipe 44 at the bottom to discharge liquid, then screws up the liquid discharge pipe 44, then injects purifying liquid through the liquid injection pipe 45 through the injector, finally screws up the liquid injection pipe 45 to complete the replacement of the purifying liquid, then enables the pushing plate 55 to rotate for resetting, and under the action of the arc-shaped pushing spring 51, enables the arc-shaped sealing plate 48 to reset, and cancels the blocking of the air outlet pipe 4, so that the purifying liquid is replaced without stopping machine;
also to be described is: in order to make the adjustment of the arc-shaped sealing plate 48 smoother, arc-shaped plates 62 are fixed on both sides of the push plate 55, and the arc-shaped plates 62 are in contact with the elastic sleeve 52.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (12)
1. A semiconductor air cleaning device comprising:
two purifying cylinders (1) arranged outside the isolation frame;
characterized by further comprising:
the U-shaped pipe (2) is fixedly communicated with the bottom of the purifying cylinder (1), the butt joint pipe (3) is inserted in the U-shaped pipe (2), the top of the U-shaped pipe is fixedly communicated with the air outlet pipe (4), and the top of the air outlet pipe (4) is fixedly communicated with the air outlet pipe (5);
the air outlet of the air exchanging mechanism (6) is connected with the butt joint pipe (3), the air inlet of the air exchanging mechanism (6) is communicated with an air suction pipe (7), and the air suction pipe (7) is fixedly communicated with one side wall of the isolation pipe;
and the blowing mechanism (8) is arranged in the isolation frame, the blowing mechanism (8) blows purified gas to the semiconductor chip, and the exhaust pipe (5) is in butt joint with the blowing mechanism (8).
2. The semiconductor air purification device according to claim 1, wherein the ventilation mechanism (6) comprises two ventilation cylinders (9) and a support frame (10), wherein a reciprocating screw rod (11) is rotatably installed in one of the ventilation cylinders (9) through a rotating shaft, the outer side of the ventilation cylinder (9) is fixed with the support frame (10) through a support, the bottom end of the reciprocating screw rod (11) is rotatably abutted with the support frame (10) through a bearing, a gear (12) is fixed on the outer side of the bottom of the reciprocating screw rod (11), toothed belts (13) are sleeved on the outer side of the gear (12) in a meshing manner, a driving motor (14) is fixed on the bottom of the support frame (10) through a motor frame, the output end of the driving motor (14) is fixed on the bottom of one of the reciprocating screw rods (11) through a coupler, a piston sleeve (15) is sleeved on the outer side of the reciprocating screw rod (11), limiting rods (16) are slidably inserted in the piston sleeve (15), two ends of the limiting rods (16) are respectively fixed with the inner wall of the top of the ventilation cylinder (9) and the support frame (10), the two exhaust valves (17) are fixedly connected with the two exhaust valves (17) respectively, and the two exhaust valves (17) are communicated with each other.
3. A semiconductor air purification device according to claim 2, characterized in that the exhaust valve (17) comprises a valve tube (18) fixedly communicated with the ventilation tube (9), a propping ring (19) is fixed on the inner wall of the valve tube (18), a connecting rod (20) is arranged in the propping ring (19), a sealing ball (21) matched with the propping ring (19) is fixed at one end of the connecting rod (20), a propping plate (22) is fixed at the other end of the connecting rod, an extrusion spring (23) fixed with the propping plate (22) and the propping ring (19) is sleeved on the outer side of the connecting rod (20), the outer end of the valve tube (18) for exhausting is fixedly communicated with the butt joint tube (3), and the outer end of the valve tube (18) for sucking is fixedly communicated with the air suction tube (7).
4. A semiconductor air purification device according to claim 1, characterized in that the air blowing mechanism (8) comprises a mounting plate (24) fixed in the isolation frame, a cylindrical air bag (25) is fixed in the mounting plate (24), rail rods (26) are fixed at the top and the bottom of the mounting plate (24), two rail rods (26) are fixed at two ends through fixing frames and the inner wall of the isolation frame, push covers (27) are slidably sleeved at two ends of the rail rods (26), tension springs (28) fixed with the push covers (27) and the mounting plate (24) are sleeved at the outer sides of the rail rods (26), the push covers (27) are propped against the outer ends of the air bags (25), a through pipe for air inlet and air outlet of the air bags (25) is fixed at two ends of the mounting plate (24), the through pipe for air inlet penetrates through the isolation frame to the outer sides, a three-way pipe (29) is fixed, the two through pipes (29) are butted with two through pipes, and an air blowing component (30) of the other chip is fixed at the outer sides of the three-way pipe.
5. The semiconductor air purification device according to claim 4, wherein the air blowing assembly (30) comprises a long tube (31) fixed with a through tube, a track plate (32) is fixed on the outer side of the long tube (31), a plurality of exhaust holes (33) communicated with the long tube (31) are formed in the inner wall of the track plate (32), shielding plates (34) are slidably inserted at two ends of the track plate (32), vent holes (35) are formed in positions, corresponding to the plurality of exhaust holes (33), of the shielding plates (34), and an adjusting piece (36) used for adjusting the positions of the shielding plates (34) is installed on the long tube (31).
6. A semiconductor air cleaning device according to claim 5, wherein the adjusting member (36) comprises two connecting plates (37) fixed at two ends of the long tube (31), magnetic attraction blocks (38) are fixed at the middle position of the track plate (32) and at the outer ends of the two connecting plates (37), iron blocks (39) attracted by the magnetic attraction blocks (38) are fixed at two ends of the shielding plate (34), an adjusting plate (40) is fixed at the outer side of the pushing cover (27), and an abutting plate (41) abutted against the adjusting plate (40) is fixed at the outer sides of the iron blocks (39) and the shielding plate (34) close to one end of the connecting plate (37).
7. The semiconductor air purification device according to claim 1, wherein a rubber hose (42) is fixed at the outer end of the butt joint pipe (3), a screw cap (43) is rotatably installed at the outer side of the butt joint pipe (3) through a bearing, and a screw groove matched with the screw cap (43) is formed at the outer end of the U-shaped pipe (2).
8. The semiconductor air purification device according to claim 1, wherein a drain pipe (44) is fixedly connected to the bottom of the U-shaped pipe (2), a liquid injection pipe (45) is arranged at the top of the purification cylinder (1), and sealing covers are sleeved on the outer ends of the liquid injection pipe (45) and the drain pipe (44) in a threaded manner.
9. The semiconductor air purification device according to claim 2, wherein a closing mechanism (46) is installed on the outer side of the air outlet pipe (4), the closing mechanism (46) comprises an arc-shaped frame (47) fixedly communicated with the air outlet pipe (4), an arc-shaped sealing plate (48) is installed in the arc-shaped frame (47) in a sliding mode, an arc-shaped opening is formed in the sealing plate, an arc-shaped rod (49) is fixedly arranged in the arc-shaped opening, a limit column (50) fixed on the inner wall of the arc-shaped frame (47) is sleeved on the outer side of the arc-shaped rod (49) in a sliding mode, an arc-shaped pushing spring (51) propped against the limit column (50) and the inner wall of the arc-shaped opening is sleeved on the outer side of the arc-shaped frame (47), an elastic sleeve (52) wrapping the outer end of the arc-shaped sealing plate (48) is fixedly arranged on the outer side of the arc-shaped frame, and a pushing assembly (53) used for pushing the elastic sleeve (52) is installed on the outer side of the isolation frame.
10. The semiconductor air purification device according to claim 9, wherein the pushing component (53) comprises a connecting rod (54) fixed on the outer wall of the isolation frame, a pushing plate (55) is sleeved on the outer side of the connecting rod (54), an adjusting disc (56) is fixed on the outer side of the connecting rod (54), a plurality of limiting holes (57) are formed in the adjusting disc (56), a plug rod (58) which is plugged with the limiting holes (57) in a sliding manner is plugged on the pushing plate (55), a pulling plate (59) is fixed on the top of the plug rod (58), a limiting ring (60) is fixed on the bottom of the plug rod, and a pushing spring (61) is sleeved on the outer side of the limiting rod (16).
11. A semiconductor air cleaning device according to claim 10, wherein an arc plate (62) is fixed to both sides of the push plate (55), and the arc plate (62) is in contact with the elastic sleeve (52).
12. A semiconductor air cleaning device according to claim 5, wherein the contact surface of the shielding plate (34) and the track plate (32) is made of rubber material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310452358.7A CN116571034A (en) | 2023-04-24 | 2023-04-24 | Semiconductor air purifying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310452358.7A CN116571034A (en) | 2023-04-24 | 2023-04-24 | Semiconductor air purifying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116571034A true CN116571034A (en) | 2023-08-11 |
Family
ID=87536879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310452358.7A Pending CN116571034A (en) | 2023-04-24 | 2023-04-24 | Semiconductor air purifying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116571034A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100253124B1 (en) * | 1993-04-13 | 2000-04-15 | 마쓰바 구니유키 | Air cleaning apparatus and air cleaning method |
| WO2015179850A1 (en) * | 2014-05-23 | 2015-11-26 | Small Terrell Jackson | Universal air handler unit |
| CN207401856U (en) * | 2017-10-27 | 2018-05-25 | 河南师范大学 | A kind of computer electronic component dedusting drying device |
| RU2017100796A (en) * | 2017-01-10 | 2018-07-12 | Станислав Викторович Еськин | PURIFIED AIR CAMERA OF PULSE CARTRIDGE OR HOSE FILTER WITH QUICK RELEASE BLOWING PIPES |
| CN109569162A (en) * | 2018-12-27 | 2019-04-05 | 吴冬梅 | A kind of environmental protection room air displacement apparatus |
| US20210023501A1 (en) * | 2018-04-11 | 2021-01-28 | Zhuhai Heca Purification Technology Co., Ltd. | Mutual switching type compressed air purification apparatus |
| CN212733372U (en) * | 2020-07-30 | 2021-03-19 | 天津鸣方科技有限公司 | Semi-automatic core machine tool with dust removal function |
| CN114789598A (en) * | 2022-04-02 | 2022-07-26 | 丹阳市业成塑料制品有限公司 | Thermoprinting process applied to automobile plastic lamp |
| KR102442592B1 (en) * | 2022-05-08 | 2022-09-13 | 세일산업 주식회사 | Supply and exhaust hood device |
| CN218855047U (en) * | 2023-02-14 | 2023-04-14 | 吉林省耐思机电设备有限公司 | Packaging device of optical fiber sensor |
-
2023
- 2023-04-24 CN CN202310452358.7A patent/CN116571034A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100253124B1 (en) * | 1993-04-13 | 2000-04-15 | 마쓰바 구니유키 | Air cleaning apparatus and air cleaning method |
| WO2015179850A1 (en) * | 2014-05-23 | 2015-11-26 | Small Terrell Jackson | Universal air handler unit |
| RU2017100796A (en) * | 2017-01-10 | 2018-07-12 | Станислав Викторович Еськин | PURIFIED AIR CAMERA OF PULSE CARTRIDGE OR HOSE FILTER WITH QUICK RELEASE BLOWING PIPES |
| CN207401856U (en) * | 2017-10-27 | 2018-05-25 | 河南师范大学 | A kind of computer electronic component dedusting drying device |
| US20210023501A1 (en) * | 2018-04-11 | 2021-01-28 | Zhuhai Heca Purification Technology Co., Ltd. | Mutual switching type compressed air purification apparatus |
| CN109569162A (en) * | 2018-12-27 | 2019-04-05 | 吴冬梅 | A kind of environmental protection room air displacement apparatus |
| CN212733372U (en) * | 2020-07-30 | 2021-03-19 | 天津鸣方科技有限公司 | Semi-automatic core machine tool with dust removal function |
| CN114789598A (en) * | 2022-04-02 | 2022-07-26 | 丹阳市业成塑料制品有限公司 | Thermoprinting process applied to automobile plastic lamp |
| KR102442592B1 (en) * | 2022-05-08 | 2022-09-13 | 세일산업 주식회사 | Supply and exhaust hood device |
| CN218855047U (en) * | 2023-02-14 | 2023-04-14 | 吉林省耐思机电设备有限公司 | Packaging device of optical fiber sensor |
Non-Patent Citations (2)
| Title |
|---|
| 中国电机工程学会燃气轮机发电专业委员会等编: "《大型燃气-蒸汽联合循环电厂培训教材 PG9351燃气轮机 汽轮机分册》", 31 October 2014, 重庆大学出版社, pages: 121 - 124 * |
| 石文星等编著: "《小型空调热泵装置设计》", 31 October 2013, 中国建筑工业出版社, pages: 59 - 60 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108155270B (en) | A kind of separator and separation method of film and chip | |
| CN107851598A (en) | Door open and close system and the load port for possessing an open and close system | |
| CN208422868U (en) | For handling the chamber of substrate | |
| JP2011216520A (en) | Substrate holding rotating device and substrate processing apparatus | |
| CN116571034A (en) | Semiconductor air purifying device | |
| CN113800473B (en) | Industrial oxygen generator using compressed air | |
| US20030136343A1 (en) | Apparatus for sealing a vacuum chamber | |
| CN108598023B (en) | Chip processing method | |
| CN103934655A (en) | Vacuum assembling mechanism | |
| CN1630049A (en) | System and a method for fluid filling wafer level packages | |
| CN205349648U (en) | Reciprocating type purifying circulation device of machinery | |
| CN208444850U (en) | Silicon wafer wafer separator | |
| CN114618852B (en) | Glue removing machine and glue removing method for semiconductor processing | |
| JP2009290162A (en) | Semiconductor device manufacturing equipment | |
| CN204977588U (en) | Device of inhaling out of end machine is stuck with paste to compound bag of paper twine | |
| CN104743523B (en) | A kind of gas cleaning plant and method for gas purification thereof | |
| CN209718861U (en) | Photovoltaic module laminater | |
| CN116564859A (en) | Device utilizing translation CUP and liquid receiving CUP sucker for linkage | |
| CN112588694A (en) | Cleaning structure for environmental protection equipment | |
| CN112117956A (en) | Photovoltaic power generation buffering support | |
| CN118156180A (en) | Wet cleaning equipment for semiconductor integrated circuit process | |
| KR100855737B1 (en) | Wafer spin chuck | |
| CN220641650U (en) | Die sucking jig | |
| CN117080134B (en) | Wafer conveying carrier with inflatable sealing and antioxidation functions | |
| CN115751168B (en) | Sulfur hexafluoride recovery device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |