CN116564859A - Device utilizing translation CUP and liquid receiving CUP sucker for linkage - Google Patents

Device utilizing translation CUP and liquid receiving CUP sucker for linkage Download PDF

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Publication number
CN116564859A
CN116564859A CN202310619327.6A CN202310619327A CN116564859A CN 116564859 A CN116564859 A CN 116564859A CN 202310619327 A CN202310619327 A CN 202310619327A CN 116564859 A CN116564859 A CN 116564859A
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CN
China
Prior art keywords
cup
translation
liquid receiving
wafer
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202310619327.6A
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Chinese (zh)
Inventor
毛林才
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Optical Micro Semiconductor Jilin Co ltd
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Optical Micro Semiconductor Jilin Co ltd
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Publication date
Application filed by Optical Micro Semiconductor Jilin Co ltd filed Critical Optical Micro Semiconductor Jilin Co ltd
Priority to CN202310619327.6A priority Critical patent/CN116564859A/en
Publication of CN116564859A publication Critical patent/CN116564859A/en
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The invention provides a device utilizing linkage of a translation CUP and a liquid receiving CUP sucker, which comprises a CUP cleaning box, wherein the CUP cleaning box comprises a CUP cleaning box bottom plate, one side of the CUP cleaning box bottom plate is provided with a fixed shell, and the other side of the CUP cleaning box bottom plate is slidably provided with a translation shell which can provide a closed space for wafer cleaning; the fixed casing one side is provided with the liquid CUP that connects, the annular equidistance array has the sucking disc that is used for adsorbing the wafer on the liquid CUP, guarantees the stability when the wafer washs, translation casing removes can control the gasbag and take out, the exhaust to control the absorption and the blowdown of sucking disc to the wafer, thereby utilize the removal guide arm of translation casing to drive the tensile gas extraction of gasbag, thereby the air in the sucking disc is evacuated, guarantee the inseparable absorption of sucking disc and wafer, thereby guaranteed the stability that the wafer was placed, when reducing the damage to the wafer, realize the linkage of translation CUP structure and sucking disc.

Description

Device utilizing translation CUP and liquid receiving CUP sucker for linkage
Technical Field
The invention relates to the technical field of wafer cleaning, in particular to a device for linkage by utilizing a translation CUP and a liquid receiving CUP sucker, and especially relates to a linkage method for the device for linkage by utilizing the translation CUP and the liquid receiving CUP sucker.
Background
With the development of miniaturization, integration and intellectualization of modern electronic products, the complexity and integration density of the core component IC chip are higher and higher, and the corresponding cleaning technology is also complicated. In the manufacturing process of semiconductor devices and integrated circuits, almost every process involves cleaning in order to ensure that the wafer surface is always in a clean state, and the more integrated circuits are manufactured, the more cleaning processes and processing methods are required. At present, in the equipment applying high-pressure liquid, a common method is to use a totally-enclosed process cavity, integrate a wafer clamping mechanism, a chemical supply mechanism, a swing arm mechanism and the like into a sealed cavity, protect moving and electric control components, and fully seal the cavity when the high-pressure liquid is used, so that the safety of a moving structure in the cavity can be ensured, and spray and liquid drop splashing generated by high pressure can be completely controlled in the cavity.
The CUP structure for preventing high-pressure water mist from splashing comprises a CUP body, an exhaust interface, an upper end cover, a door opening mechanism, a liquid pipe, a bottom plate, a wafer chuck, a nozzle, a motor and a driving mechanism, wherein the CUP body is arranged on the bottom plate, the wafer chuck for bearing wafers is arranged in the CUP body, and the wafer chuck is driven to rotate by the motor arranged on the bottom plate; the driving mechanism is arranged on a bottom plate outside the CUP body, the liquid pipe is driven to move by the driving mechanism, the upper end cover is arranged on the CUP body, a hole is formed in the upper end cover along the moving track of the liquid pipe, and the liquid pipe is inserted into the CUP body from the hole and is provided with a nozzle; the liquid supply source for supplying high-pressure liquid to the liquid pipe is positioned outside the CUP body, and the high-pressure liquid is sprayed to the surface of the wafer through the liquid pipe and the nozzle; the CUP body is respectively provided with a door opening mechanism and an exhaust interface. The device has the advantages of small size, simple structure, low processing and installation cost and the like, and is suitable for semiconductor equipment needing high-pressure liquid functions such as photoresist removal, cleaning and the like.
However, the following problems remain in the implementation of the above device and the prior art:
in the prior art, the material frame of the structure of the multiple slots is utilized for the primary cleaning of the wafer to simultaneously clean multiple groups of wafers, and along with the increase of working procedures, the subsequent cleaning needs to deeply clean single wafers, and the fixing mechanism of the single wafers adopts the sucking disc to increase the adsorption area and flexibly fix the single wafers simultaneously, so that the damage to the wafers is reduced, but the vacuum sucking disc needs to be controlled by an independent pneumatic module, and the cost of the cleaning device is increased.
Disclosure of Invention
The invention aims to provide a device for utilizing the linkage of a translation CUP and a liquid receiving CUP sucker so as to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the device comprises a CUP cleaning box, wherein the CUP cleaning box comprises a CUP cleaning box bottom plate, a fixed shell is arranged on one side of the CUP cleaning box bottom plate, and a translation shell capable of providing a closed space for cleaning a wafer is slidably arranged on the other side of the CUP cleaning box bottom plate;
the fixed casing one side is provided with the liquid cup that connects, connect annular equidistance array to have the sucking disc that is used for adsorbing the wafer on the liquid cup, guarantee the stability when the wafer washs, translation casing removes can control the gasbag and take out, exhaust to the absorption and the blowdown of control sucking disc to the wafer.
Preferably, the fixed casing upper surface symmetry is provided with two sets of lead screws, lead screw both ends symmetry is provided with the first otic placode that is used for supporting, the end and the first otic placode rotation of lead screw are connected, lead screw surface threaded connection is in the removal cover, the removal piece is located through the bearing housing and is moved the cover surface, removal piece and translation shells inner wall fixed connection, CUP washs case bottom plate both sides and is located translation shells and move the position and be provided with the deflector.
Preferably, one end of the screw rod extends to the outside of the CUP cleaning box, one end of the screw rod is in transmission connection with a driving part, the driving part comprises two groups of second lug plates and a driving transmission rod which is rotationally connected between the two groups of second lug plates, an RV motor is installed at the center of the surface of the driving transmission rod, the RV motor is fixedly installed on the outer wall of a fixed shell, driving bevel gears are symmetrically arranged on the surface of the driving transmission rod, one end of the screw rod is fixedly provided with driven bevel gears, the driving bevel gears are meshed with the driven bevel gears and used for driving the screw rod to rotate so as to drive the translation shell to move, and accordingly opening and closing of the CUP cleaning box are controlled.
The CUP cleaning box is closed, a sealing space is provided for cleaning the wafer, when the translation shell moves to a certain position, the push rod moves to one end of the guide rod, and when the push plate is attached to the end of the guide rod, the push rod pushes the guide rod to move synchronously, so that the contact area of the push rod and the guide rod is ensured to be full, and the pushing effect is ensured.
Preferably, the liquid receiving cup comprises a liquid receiving cup high cup opening and a liquid receiving cup low cup opening, wherein the liquid receiving cup high cup opening and the liquid receiving cup low cup opening form a cup body cavity, and the sucking disc is arranged on the upper surface of the liquid receiving cup low cup opening.
Preferably, the sucking disc is provided with a plurality of groups, and a plurality of groups of sucking discs one side is all fixed to be communicated with the sucking disc connecting pipe, and a plurality of groups of sucking disc connecting pipe communicate jointly and have the connecting pipe, connecting pipe one side is fixed to be communicated with the gasbag through gas-supply pipe.
When the push rod moves to one end of the guide rod and is attached to the end of the guide rod, the air bag is controlled to inhale, the suction pipe, the connecting pipe and the suction CUP connecting pipe sequentially pass through the air pipe, the suction CUP is vacuumized, the CUP cleaning box is closed, the suction CUP is controlled to suck the wafer tightly, and the linkage of the CUP and the suction CUP of the liquid receiving CUP is realized.
Preferably, the air bag is provided with two groups, utilizes two groups the air bag provides the air supply for the sucking disc for vacuum effect is stable, air bag one side is provided with the air bag backup pad, two groups the air inlet of air bag is all fixed intercommunication has the air bag connecting pipe, air bag connecting pipe and gas-supply pipe fixed intercommunication, air bag keeps away from air bag connecting pipe one end fixedly connected with connecting axle, two groups link to each other through the connecting plate between the connecting axle, connecting plate one side is located and is provided with the guide arm between two sets of air bags.
Two sets of gasbags, loop through connecting pipe, sucking disc connecting pipe, gasbag connecting pipe and gas-supply pipe and carry gas to with connect the sucking disc intercommunication setting on the liquid CUP, thereby utilize the removal guide arm of translation casing to drive the tensile bleed of gasbag, thereby find time the air in the sucking disc, guarantee the inseparable absorption of sucking disc and wafer, thereby guaranteed the stability that the wafer was placed, when reducing the damage to the wafer, realize the linkage of translation CUP structure and sucking disc, need not to add solitary pneumatic module and control.
Preferably, the fixed sleeve is fixedly arranged at the center of the inner wall of the translation shell, a push rod is fixedly connected to one side of the fixed sleeve, a push plate is fixedly connected to one end of the push rod, and when the translation shell moves to the position of the guide rod, the push plate is attached to one end of the guide rod.
Preferably, the top of the translation shell is fixedly arranged on the translation shell cover plate, a support is fixedly arranged on the top of the translation shell cover plate, an air cylinder is fixedly arranged on the support, and the output shaft end of the air cylinder is connected with a liquid receiving cup cover.
Preferably, the atomizer is fixedly arranged at the central position in the liquid receiving cup cover, the guide sleeve is fixedly arranged in the translational shell cover plate, the output shaft end of the air cylinder is slidably arranged in the guide sleeve, the output shaft end of the air cylinder is connected with the liquid inlet pipe, the liquid inlet pipe is communicated with the atomizer, and the liquid inlet pipe is communicated with the external pump body and the detergent storage tank.
The method based on the device for linkage by utilizing the translation CUP and the liquid receiving CUP sucker comprises the following steps of:
s1: starting a driving part, driving a screw rod to rotate by utilizing forward rotation of an RV motor, and driving a moving block to move on the surface of the screw rod, so that a translation shell moves towards a direction far away from a fixed shell, and a CUP cleaning box is opened, and a wafer is placed in a liquid receiving CUP and is guaranteed to be placed above a sucker;
s2: the RV motor is controlled to rotate reversely, the screw rod is utilized to drive the translation shell to approach the fixed shell, the CUP cleaning box is closed, a sealing space is provided for cleaning the wafer, in the process, the push rod moves to one end of the guide rod, when the push plate is attached to the end of the guide rod, the air bag is controlled to inhale, the suction pipe, the connecting pipe and the suction CUP connecting pipe sequentially pass through the air pipe, the suction CUP is vacuumized, the CUP cleaning box is closed, and the suction CUP is controlled to suck the wafer tightly, so that linkage of the CUP and the suction CUP of the liquid receiving CUP is realized;
s3: the starting cylinder drives the liquid receiving cup cover to move downwards to be attached to the high cup opening of the liquid receiving cup, and meanwhile, the external pump body is started to pump the cleaning agent out of the liquid inlet pipe through the atomizer to clean the single wafer.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the fixed shell, the translation shell and the CUP cleaning box bottom plate which are sequentially arranged, the translation shell moves in the CUP cleaning box bottom plate, so that a working space convenient for sealing is provided for cleaning the wafer, and meanwhile, the translation shell is automatically opened and closed, so that the wafer is convenient to take and place;
2. according to the invention, two groups of air bags are arranged, and the air is conveyed sequentially through the connecting pipe, the sucker connecting pipe, the air bag connecting pipe and the air conveying pipe, so that the air bags are communicated with the sucker on the liquid receiving CUP, the movable guide rod of the translation shell is utilized to drive the air bags to stretch and exhaust air, so that air in the sucker is pumped out, the tight adsorption of the sucker and a wafer is ensured, the stability of placing the wafer is ensured, the damage to the wafer is reduced, the linkage of the translation CUP structure and the sucker is realized, the independent pneumatic module is not required to be additionally arranged for control, and the cost of the cleaning device is increased.
Drawings
FIG. 1 is a schematic view of a right-looking perspective structure of the present invention;
FIG. 2 is an enlarged schematic view of the portion A of FIG. 1 according to the present invention;
FIG. 3 is a schematic view of a left-hand perspective structure of the present invention;
FIG. 4 is a schematic view of the internal perspective structure of the CUP cleaning tank according to the present invention;
FIG. 5 is a schematic view of the structure of the air bag according to the present invention;
FIG. 6 is a schematic view of an airbag mounting structure of the present invention;
fig. 7 is a schematic diagram of a second explosion structure according to an embodiment of the present invention.
In the figure: 1. a CUP cleaning tank; 2. a liquid receiving cup; 3. a driving section; 4. a suction cup; 5. a guide plate; 6. an air bag; 8. a first ear plate; 9. a moving block; 10. a screw rod; 11. a connecting pipe; 12. a suction cup connecting pipe; 13. an airbag support plate; 14. a connecting plate; 15. a guide rod; 16. an air bag connecting pipe; 17. a gas pipe; 18. a cylinder; 19. a support; 20. translating the housing cover plate; 301. a second ear plate; 302. a driving bevel gear; 303. a driven bevel gear; 304. a driving transmission rod; 305. an RV motor; 101. a fixed housing; 102. translating the housing; 201. the liquid receiving cup is provided with a high cup opening; 202. the liquid receiving cup has a low cup opening; 103. cleaning a bottom plate of the box by the CUP; 21. a guide sleeve; 22. a liquid inlet pipe; 23. a liquid receiving cup cover; 24. an atomizer; 25. a connecting shaft; 26. a fixed sleeve; 27. a push rod; 28. a pushing plate; 29. and (5) moving the sleeve.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-7, the present invention provides a technical solution: a device which utilizes the translation CUP and the sucker of the liquid receiving CUP to link;
embodiment one:
the utility model provides an utilize translation CUP and connect device of liquid CUP sucking disc linkage to wash case 1 including the CUP, CUP washs case 1 and includes CUP washs case bottom plate 103, CUP washs case bottom plate 103 one side and is provided with fixed casing 101, and the opposite side CUP washs case bottom plate 103 sliding mounting has translation casing 102 that can provide airtight space for the wafer washs, in this embodiment, provides a CUP washs case 1, provides an airtight space for the washing of wafer, because the detergent includes big chemicals and deionized high-purity water, consequently sets up the airtight space and washs the wafer, can avoid leaking outward of detergent, avoids polluted environment.
Referring to fig. 1 and 3, a liquid receiving cup 2 is disposed on one side of a fixed housing 101, suction cups 4 for adsorbing wafers are arrayed on the liquid receiving cup 2 in an annular equidistant manner, stability of the wafers during cleaning is guaranteed, specifically, in this embodiment, the liquid receiving cup 2 comprises a liquid receiving cup high cup opening 201 and a liquid receiving cup low cup opening 202, the liquid receiving cup high cup opening 201 and the liquid receiving cup low cup opening 202 form a cup cavity, the structure of the liquid receiving cup 2 is set into a high cup opening and low cup opening structure, the cavity of the liquid receiving cup 2 is arranged between the high cup opening and the low cup opening, and collection effect of cleaning liquid waste is improved.
Referring to fig. 1 and 2, two groups of screw rods 10 are symmetrically arranged on the upper surface of a fixed shell 101, first lug plates 8 for supporting are symmetrically arranged at two ends of the screw rods 10, the end heads of the screw rods 10 are rotationally connected with the first lug plates 8, the surface of the screw rods 10 is in threaded connection with a moving sleeve 29, a moving block 9 is sleeved on the surface of the moving sleeve 29 through a bearing, the two sides of a bottom plate 103 of a CUP cleaning box are fixedly connected with the inner wall of the moving shell 102, guide plates 5 are arranged at the moving positions of the moving block 9 and the moving shell 102, one end of the screw rods 10 extends to the outside of the CUP cleaning box 1, one end of the screw rods 10 is in transmission connection with a driving part 3, the driving part 3 comprises two groups of second lug plates 301 and a driving transmission rod 304 which is rotationally connected between the two groups of second lug plates 301, an RV motor 305 is installed at the central position of the surface of the driving transmission rod 304, the RV motor 305 is fixedly installed on the outer wall of the fixed shell 101, the RV motor 305 is fixedly installed by adopting the RV motor 305, the structure of the RV motor 305, the driving transmission rod 304 can penetrate through the RV motor 305, the driving rod 304 is not required to be matched with other transmission structures, the RV motor 304 can directly rotate, the driving transmission rod 304 is arranged at the moving part, the driving rod 304, the driving rod 302 is provided with a symmetrical gear 302, the surface of the driving rod 302, the driving rod 302 is rotationally drives the driving rod 302, and the driven gear 302 is rotatably moves along the driven by the driving rod 102, and finally, the driving rod 10 is rotationally moves along the driving rod 102, and the driving rod 102 through the driving rod 102, and finally, and the driving rod is rotationally and the driving rod 2 is rotationally and is in rotation.
Referring to fig. 1, 3 and 4, the suction cup 4 is mounted on the upper surface of the lower cup opening 202 of the liquid receiving cup, and the translation housing 102 can control the air bag 6 to pump and exhaust air, so as to control the suction cup 4 to adsorb and blow down the wafer. The sucking disc 4 is provided with a plurality of groups, and a plurality of groups sucking disc 4 one side all fixed intercommunication has sucking disc connecting pipe 12, and a plurality of groups sucking disc connecting pipe 12 intercommunication jointly has connecting pipe 11, and connecting pipe 11 one side is through gas-supply pipe 17 and the fixed intercommunication of gasbag 6, and gasbag 6 is provided with two sets of, in this embodiment, utilizes two sets of gasbags 6 to provide the air supply for sucking disc 4's vacuum effect is stable, sets up gasbag 6, compares the pump body structure of evacuation among the prior art, the effectual manufacturing cost who reduces the device. The gasbag 6 one side is provided with gasbag backup pad 13, and the air inlet of two sets of gasbags 6 is all fixed to be linked together and is had gasbag connecting pipe 16, and gasbag connecting pipe 16 and gas-supply pipe 17 are fixed to be linked together, and in this embodiment, loops through connecting pipe 11, sucking disc connecting pipe 12, gasbag connecting pipe 16 and gas-supply pipe 17 for two sets of gasbags 6 and a plurality of sucking discs 4 intercommunication, the compression or the tensile of gasbag 6 can bleed or aerify sucking disc 4 for adsorb or loosen the wafer of monolithic, be convenient for the fixed of wafer and get and put.
Referring to fig. 4-6, one end of the air bag 6 far away from the air bag connecting pipe 16 is fixedly connected with a connecting shaft 25, two groups of connecting shafts 25 are connected through a connecting plate 14, one side of the connecting plate 14 is provided with a guide rod 15 between the two groups of air bags 6, the middle position of the inner wall of the translation shell 102 is fixedly provided with a fixing sleeve 26, one side of the fixing sleeve 26 is fixedly connected with a push rod 27, one end of the push rod 27 is fixedly connected with a push plate 28, when the translation shell 102 moves to the guide rod 15, one end of the push plate 28 and one end of the guide rod 15 are in joint arrangement, in the embodiment, when the air bag 6 moves to the set position, the push plate 28 and the guide rod 15 at one end of the push rod 27 are in joint arrangement, then, the air bag 6 can be stretched along with the movement of the translation shell 102, and the air in the suction cup 4 is pumped out through the air pipe 17, the connecting pipe 11 and the suction cup connecting pipe 12 in the stretching process, so that the wafer surface to be cleaned is tightly jointed with the suction cup 4, the translation of the translation shell 102 and the gas control of the suction cup 4 are realized, and a pneumatic source module is not required to be separately arranged.
Embodiment two:
based on the first embodiment, although the translation of the translation housing 102 can control the opening and closing of the CUP cleaning tank 1, so as to ensure the space closed during cleaning of the wafer and ensure the cleaning effect of the wafer, because components such as the air bag 6 and the like are arranged in the CUP cleaning tank 1, when the liquid receiving CUP 2 collects cleaning waste liquid, the cleaning agent sprayed by the atomizer 24 cannot be prevented from splashing, so that the recovery is incomplete, therefore, an assembly for preventing the cleaning agent from splashing is provided, referring to fig. 7, the assembly for preventing the cleaning agent from splashing comprises a cover plate 20 fixedly arranged at the top of the translation housing 102, a support 19 fixedly arranged at the top of the translation housing cover plate 20, a cylinder 18 fixedly arranged on the support 19, a liquid receiving CUP cover 23 connected to the output shaft end of the cylinder 18, an atomizer 24 fixedly arranged at the central position in the liquid receiving CUP cover 23, a guide sleeve 21 fixedly arranged in the illustrated translation housing cover plate 20, the output shaft end of the air cylinder 18 is slidably arranged in the guide sleeve 21, the output shaft end of the air cylinder 18 is connected with the liquid inlet pipe 22, the liquid inlet pipe 22 is communicated with the atomizer 24, the liquid inlet pipe 22 is communicated with the external pump body and the cleaning agent storage tank, in the embodiment, the liquid inlet pipe 22 communicated with the atomizer 24 is arranged at the top of the liquid receiving CUP cover 23 and is simultaneously connected with the output shaft end of the air cylinder 18, the integrity of the liquid receiving CUP cover 23 is ensured, the liquid receiving CUP cover 23 cannot be moved and the normal pumping of cleaning agent is not influenced, in the cleaning process, the air cylinder 18 drives the liquid receiving CUP cover 23 to move downwards, the liquid receiving CUP cover 23 covers the surface of the liquid receiving CUP high CUP opening 201, in the actual installation, a rubber pad is arranged on the surface of the liquid receiving CUP high CUP opening 201, the joint of the liquid receiving CUP high CUP opening 201 and the liquid receiving CUP cover 23 is ensured to be more tightly, the splashing of the cleaning agent is effectively prevented, so that the cleaning agent can be better recycled into the liquid receiving cup 2.
Working principle: in the using process of the device, through the opening of the driving part 3, the RV motor 305 is utilized to drive the screw rod 10 to rotate in a forward rotation manner, the moving block 9 is driven to move on the surface of the screw rod 10, so that the translation shell 102 moves towards the direction far away from the fixed shell 101, the CUP cleaning box 1 is opened, an operator can conveniently place a wafer in the liquid receiving CUP 2, a circle of the wafer falls into the CUP opening 201 of the liquid receiving CUP, and is attached above the suction CUP 4, after the wafer is placed, the RV motor 305 is controlled to rotate reversely, the translation shell 102 moves towards the fixed shell 101 to close the CUP cleaning box 1, a sealing space is provided for cleaning the wafer, when the translation shell 102 moves, one end of the push rod 27 moves to a certain position, when the push rod 15 is attached to the end of the push plate 28 and the guide rod 15, the push rod 27 pushes the guide rod 15 to move synchronously, in order to ensure the contact area of the push rod 27 and the guide rod 15 to be sufficient, the push effect is ensured, therefore, the push plate 28 is arranged at one end of the push rod 27, the guide rod 15 drives the connecting plate 14 to move, the air bag 6 is stretched, the air bag 6 sequentially passes through the connecting pipe 17 and the suction CUP 11 and the suction CUP 12, the suction CUP 4 is tightly and the suction CUP 4 is tightly attached to the wafer, and the suction CUP is tightly sucked on the surface of the wafer, and the suction CUP 4 is tightly cleaned, and the wafer is tightly processed, and the suction CUP is tightly and sucked on the suction CUP 4, and the wafer is tightly and sucked by the suction CUP 4; finally, the cylinder 18 is utilized to drive the liquid receiving cup cover 23 to move downwards, so that the liquid receiving cup cover 23 is attached to the high cup opening 201 of the liquid receiving cup, at the same time, the external pump body is started, the cleaning agent is sprayed out from the liquid inlet pipe 22 through the atomizer 24 to clean the single wafer, the cleaning procedure can be carried out on the part, the liquid receiving cup cover 23 is utilized to effectively ensure that the cleaning agent can not splash in the cleaning process, and the liquid receiving cup 2 is well helped to collect the cleaning waste liquid.
The invention also provides a linkage method of the device which utilizes the translation CUP and the sucker of the liquid receiving CUP to link, comprising the following steps:
s1: starting the driving part 3, driving the screw rod 10 to rotate by utilizing forward rotation of the RV motor 305, and driving the moving block 9 to move on the surface of the screw rod 10, so that the translation shell 102 moves towards the direction away from the fixed shell 101, and the CUP cleaning box 1 is opened, and a wafer is placed in the liquid receiving CUP 2 and is guaranteed to be placed above the sucker 4;
s2: the RV motor 305 is controlled to rotate reversely, the screw rod 10 is utilized to drive the translation shell 102 to approach the fixed shell 101, the CUP cleaning box 1 is closed, a sealing space is provided for cleaning the wafer, in the process, the push rod 27 moves to one end of the guide rod 15, when the pushing plate 28 is attached to the end of the guide rod 15, the air bag 6 is controlled to suck air, the suction CUP 4 is vacuumized sequentially through the air pipe 17, the connecting pipe 11 and the suction CUP connecting pipe 12, the suction CUP 4 is controlled to suck the wafer while the CUP cleaning box 1 is closed, and the linkage of the CUP and the suction CUP of the liquid receiving CUP is realized;
s3: the actuating cylinder 18 drives the liquid receiving cup cover 23 to move downwards to be attached to the high cup opening 201 of the liquid receiving cup, and at the same time, the external pump body is actuated to pump the cleaning agent out of the liquid inlet pipe 22 through the atomizer 24, so that the single wafer is cleaned.
It should be noted that, the RV motor 305, the cylinder 18, and the atomizer 24 are devices or apparatuses existing in the prior art, or may be devices or apparatuses implemented in the prior art, and the power supply, the specific composition, and the principle thereof will be clear to those skilled in the art, so they will not be described in detail.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. The utility model provides an utilize translation CUP and connect device of liquid CUP sucking disc linkage, includes CUP washs case (1), its characterized in that: the CUP cleaning box (1) comprises a CUP cleaning box bottom plate (103), a fixed shell (101) is arranged on one side of the CUP cleaning box bottom plate (103), and a translation shell (102) capable of providing a closed space for cleaning a wafer is slidably arranged on the other side of the CUP cleaning box bottom plate (103);
the wafer cleaning device is characterized in that a liquid receiving cup (2) is arranged on one side of the fixed shell (101), sucking discs (4) used for adsorbing wafers are arranged on the liquid receiving cup (2) in an annular equidistant array mode, stability of the wafers during cleaning is guaranteed, and the translation shell (102) can control the air bags (6) to pump and exhaust air so as to control the sucking discs (4) to adsorb and empty the wafers.
2. The device for interlocking by utilizing the translation CUP and the liquid receiving CUP sucker according to claim 1, wherein the device comprises: the utility model discloses a movable cleaning box for the automobile, including fixed casing (101) upper surface symmetry is provided with two sets of lead screws (10), lead screw (10) both ends symmetry is provided with first otic placode (8) that are used for supporting, the end and the first otic placode (8) of lead screw (10) rotate to be connected, lead screw (10) surface threaded connection is in removal cover (29), removal cover (29) surface is located through the bearing housing to removal piece (9), removal piece (9) and translation casing (102) inner wall fixed connection, CUP washs bottom plate (103) both sides and is located translation casing (102) shift position and be provided with deflector (5).
3. The device for interlocking by utilizing the translation CUP and the sucker of the liquid receiving CUP according to claim 2, wherein: lead screw (10) one end extends to the CUP and washs case (1) outside, and lead screw (10) one end transmission is connected with drive portion (3), drive portion (3) are including two sets of second otic placodes (301) and rotate drive transmission pole (304) of being connected between two sets of second otic placodes (301), RV motor (305) are installed to drive transmission pole (304) surface intermediate position, RV motor (305) fixed mounting is in fixed casing (101) outer wall, drive transmission pole (304) surface symmetry is provided with initiative bevel gear (302), lead screw (10) one end fixed mounting has driven bevel gear (303), initiative bevel gear (302) and driven bevel gear (303) meshing for drive lead screw (10) are rotatory, drive translation casing (102) and remove, thereby control opening and shutting of CUP washs case (1).
4. The device for interlocking by utilizing the translation CUP and the liquid receiving CUP sucker according to claim 1, wherein the device comprises: the liquid receiving cup (2) comprises a liquid receiving cup high cup opening (201) and a liquid receiving cup low cup opening (202), the liquid receiving cup high cup opening (201) and the liquid receiving cup low cup opening (202) form a cup body cavity, and the sucker (4) is arranged on the upper surface of the liquid receiving cup low cup opening (202).
5. The device for interlocking with the translation CUP and the CUP chuck according to claim 4, wherein: the sucking disc (4) is provided with a plurality of groups, and a plurality of groups of sucking discs (4) one side all fixedly communicates have sucking disc connecting pipe (12), and a plurality of groups sucking disc connecting pipe (12) communicate jointly and have connecting pipe (11), connecting pipe (11) one side is through gas-supply pipe (17) and balloon (6) fixed intercommunication.
6. The device for interlocking with the translation CUP and the CUP chuck according to claim 5, wherein: the utility model discloses a vacuum air bag, including gasbag (6), connecting plate (14), gasbag (6) are provided with two sets of gasbag (16), gasbag (16) and gas-supply pipe (17) fixed intercommunication, gasbag (6) are kept away from gasbag connecting pipe (16) one end fixedly connected with connecting axle (25), two sets of link to each other through connecting plate (14) between connecting axle (25), connecting plate (14) one side is located and is provided with guide arm (15) between two sets of gasbag (6).
7. The device for interlocking with the translation CUP and the CUP chuck according to claim 6, wherein: the fixed sleeve (26) is fixedly arranged at the middle position of the inner wall of the translation shell (102), a push rod (27) is fixedly connected to one side of the fixed sleeve (26), a push plate (28) is fixedly connected to one end of the push rod (27), and when the translation shell (102) moves to the position of the guide rod (15), the push plate (28) and one end of the guide rod (15) are attached.
8. The device for interlocking by utilizing the translation CUP and the liquid receiving CUP sucker according to claim 1, wherein the device comprises: the top of the translation shell (102) is fixedly arranged on the translation shell cover plate (20), a support (19) is fixedly arranged on the top of the translation shell cover plate (20), an air cylinder (18) is fixedly arranged on the support (19), and the output shaft end of the air cylinder (18) is connected with a liquid receiving cup cover (23).
9. The device for interlocking with the translation CUP and the CUP chuck according to claim 8, wherein: the utility model discloses a liquid collecting cup cover, including liquid receiving cup cover (23), liquid receiving cup cover, outer pump body, cleaner storage tank, atomizer (24) are fixed mounting in the central point in liquid receiving cup cover (23), and fixed mounting has uide bushing (21) in translation casing apron (20) shown, the output axle head slidable mounting of cylinder (18) is in uide bushing (21), and the output axle head of cylinder (18) is connected with feed liquor pipe (22), feed liquor pipe (22) and atomizer (24) intercommunication setting, feed liquor pipe (22) and outside pump body and cleaner storage tank intercommunication.
10. A method, based on a device according to any of the previous claims 1-9, using a translational CUP and a CUP chuck linkage, comprising the steps of:
s1: starting a driving part (3), driving a screw rod (10) to rotate by utilizing forward rotation of an RV motor (305), and driving a moving block (9) to move on the surface of the screw rod (10), so that a translation shell (102) moves towards a direction far away from a fixed shell (101), and a CUP cleaning box (1) is opened, and a wafer is placed in a liquid receiving CUP (2) and is guaranteed to be placed above a sucker (4);
s2: the RV motor (305) is controlled to reversely rotate, the screw rod (10) is utilized to drive the translation shell (102) to approach the fixed shell (101), the CUP cleaning box (1) is closed, a sealing space is provided for cleaning the wafer, in the process, the push rod (27) moves to one end of the guide rod (15) and controls the air bag (6) to suck air when the pushing plate (28) is attached to the end of the guide rod (15), the air pipe (17), the connecting pipe (11) and the sucker connecting pipe (12) are sequentially used for vacuumizing the sucker (4), and the sucker (4) is controlled to suck the wafer while the CUP cleaning box (1) is closed, so that linkage of the CUP and the sucker of the liquid receiving CUP is realized;
s3: the starting cylinder (18) drives the liquid receiving cup cover (23) to move downwards to be attached to the high cup opening (201) of the liquid receiving cup, and meanwhile, the external pump body is started to pump the cleaning agent out of the liquid inlet pipe (22) through the atomizer (24) to clean the single wafer.
CN202310619327.6A 2023-05-30 2023-05-30 Device utilizing translation CUP and liquid receiving CUP sucker for linkage Withdrawn CN116564859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310619327.6A CN116564859A (en) 2023-05-30 2023-05-30 Device utilizing translation CUP and liquid receiving CUP sucker for linkage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310619327.6A CN116564859A (en) 2023-05-30 2023-05-30 Device utilizing translation CUP and liquid receiving CUP sucker for linkage

Publications (1)

Publication Number Publication Date
CN116564859A true CN116564859A (en) 2023-08-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310619327.6A Withdrawn CN116564859A (en) 2023-05-30 2023-05-30 Device utilizing translation CUP and liquid receiving CUP sucker for linkage

Country Status (1)

Country Link
CN (1) CN116564859A (en)

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Application publication date: 20230808