CN220329480U - Dust collecting equipment easy to seal - Google Patents
Dust collecting equipment easy to seal Download PDFInfo
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- CN220329480U CN220329480U CN202322081651.5U CN202322081651U CN220329480U CN 220329480 U CN220329480 U CN 220329480U CN 202322081651 U CN202322081651 U CN 202322081651U CN 220329480 U CN220329480 U CN 220329480U
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- dust removing
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- carrier
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- 239000000428 dust Substances 0.000 title claims abstract description 186
- 238000007789 sealing Methods 0.000 claims abstract description 32
- 230000007246 mechanism Effects 0.000 claims description 41
- 150000002500 ions Chemical class 0.000 claims description 24
- 238000007664 blowing Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 5
- 150000001450 anions Chemical class 0.000 description 4
- 238000005265 energy consumption Methods 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model relates to the technical field of chip production, in particular to dust removing equipment easy to seal; comprises a dust removing shell; the dust removing device comprises a dust removing shell, a dust removing cavity, a linear module and a movable frame, wherein the dust removing shell is provided with an opening for placing and taking a chip and a sealing door for opening or closing the opening.
Description
Technical Field
The utility model relates to the technical field of chip production, in particular to dust removing equipment easy to seal.
Background
Chips are a collective term for semiconductor device products; an integrated circuit, also called a thin-film (thin-film) integrated circuit, fabricated on the surface of a semiconductor chip; another type of thick-film integrated circuit (hybrid integrated circuit) is a miniaturized circuit that is composed of separate semiconductor devices and passive components integrated into a substrate or wiring board.
At present, when the produced chip is dedusted, the surface of the chip is cleaned by manual dust removal in a mode of blowing by clean air flow, a clamp is generally arranged for better dust removal, the chip is installed by the clamp, the chip is dedusted, the labor cost can be saved, the production efficiency can be improved, however, in the dust removal mode, a closed space is lacked, dust is easy to adhere to the chip again, and the dust removal quality of the chip is lower.
Based on the above problems, we propose a dust removing device which is easy to seal.
Disclosure of Invention
In order to overcome the defects in the prior art, the utility model provides dust removing equipment which is easy to seal, and the equipment can effectively solve the problems in the background art after being improved.
The technical scheme of the utility model is as follows:
the utility model provides a dust collecting equipment of easy sealed, includes frame, dust removal casing, dust removal tool and dust removal mechanism; the dust removing device comprises a frame, a dust removing shell, a dust removing jig and a dust removing mechanism, wherein the frame is provided with the dust removing shell, the dust removing shell is enclosed to form an internal cavity structure, the dust removing jig and the dust removing mechanism are arranged in the cavity, and one end of the cavity is provided with an exhaust port; the dust removing mechanism comprises an air outlet component, and the air outlet component is used for blowing air to a chip placed in the dust removing jig for dust removal;
the dust removing shell is also provided with an opening for placing and taking a chip and a sealing door for opening or closing the opening, the frame is also provided with a linear module, the moving end of the linear module is connected with a moving frame, and the other end of the moving frame is fixedly connected with the sealing door; the air inlet end pipe of the objective table is fixedly connected with the sealing door, and the port of the air inlet end pipe is exposed outside the sealing door; the linear module drives the sealing door to push the objective table into the dust removal shell when closing the opening or pull the objective table out of the dust removal shell when opening the opening.
Further, the dust removing mechanism at least comprises two air outlet components which are oppositely arranged, and one of the air outlet components is provided with an air outlet which can change direction.
Further, the air outlet component comprises an air plate and an air pipe, and the air plate and the air pipe are respectively communicated with the positive pressure system; the air plate is arranged on the upper part of the dust removing shell, the air pipe is arranged on the lower part of the dust removing shell and pivoted with the dust removing shell, a driving mechanism for driving the air pipe to rotate is further arranged on the dust removing shell, and the dust removing jig is arranged between the air plate and the air pipe.
Further, a negative pressure system is also arranged on the frame, the exhaust port is arranged at the bottom of the dust removal shell, and the air inlet end of the negative pressure system is communicated with the exhaust port; the area of the dust removing shell close to the exhaust port is an inclined surface.
Further, the dust removal jig comprises an objective table and a carrier, wherein an air inlet end pipe of the objective table is communicated with the negative pressure system and used for sucking or loosening the carrier, the carrier is installed on the objective table, and the carrier is used for clamping a chip.
Further, the carrier comprises an upper carrier and a lower carrier, the upper carrier and the lower carrier are fixed through magnetic connection, a chip is clamped between the upper carrier and the lower carrier, and a blowing hole on the lower carrier is arranged in a wide opening.
Further, a negative ion tube is arranged on the frame, one end of the negative ion tube is communicated with the air plate, and the other end of the negative ion tube is communicated with the negative ion generator; negative ions blown out by the negative ion tube neutralize charges in the air in the cavity; and the air inlet end of the negative ion generator is communicated with the positive pressure system.
Further, the driving mechanism is fixedly connected to the frame, the driving mechanism is connected with the air pipe through gear transmission, one end of the air pipe, which is close to the driving mechanism, is exposed out of the dust removing shell and is provided with a rotary air tap, and the air inlet end of the rotary air tap is communicated with the positive pressure system, so that the rotary air tap is fixed when the air pipe rotates; the driving mechanism and the air pipe are correspondingly provided with a plurality of driving mechanisms and are connected independently, so that one driving mechanism controls one air pipe to rotate.
Further, the air plate is of an internal hollow structure, and one end of the air plate, which is close to the dust removal jig, is provided with a plurality of first air outlet holes; and a plurality of second air outlet holes are formed in one end, close to the dust removal jig, of the air pipe.
The beneficial effects of the utility model are as follows:
the dust removing device comprises a dust removing shell, a sealing door, a linear module and a movable frame, wherein the dust removing shell is enclosed to form an internal sealing cavity structure, and an exhaust port arranged at the bottom of the dust removing shell is directly communicated with a negative pressure system, so that the dust removing shell can give a relatively sealed environment for dust removal to a chip; in addition, in the in-process that drives the sealing door motion, can also impel the inside of dust removal casing with the objective table or pull out the dust removal casing with the objective table, assembly degree of automation is higher, and the energy consumption can be saved to the mode of drive simultaneously, also is convenient for the workman to place the carrier on the objective table or take out the carrier, reduces the step that the objective table impels and pulls out, further improves production efficiency.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a first internal schematic view of the present utility model;
FIG. 3 is a second internal schematic view of the present utility model;
FIG. 4 is an enlarged view of FIG. 3A in accordance with the present utility model;
FIG. 5 is a third internal schematic view of the present utility model;
FIG. 6 is an enlarged view of FIG. 5B in accordance with the present utility model;
FIG. 7 is a fourth internal schematic of the present utility model;
FIG. 8 is a schematic view of the dust removing housing of the present utility model;
fig. 9 is an exploded view of the carrier of the present utility model.
In the figure, 1, a rack; 11. an anion tube; 12. a linear module; 13. a moving rack; 2. a dust removal shell; 21. a cavity; 22. an exhaust port; 23. a wind plate; 231. a first air outlet hole; 24. an air duct; 241. a second air outlet hole; 25. a driving mechanism; 26. an inclined plane; 27. rotating the air tap; 28. sealing the door; 3. a dust removal jig; 31. an objective table; 311. an air inlet end pipe; 32. a carrier; 321. loading a carrier; 322. a downloading tool; 3221. opening; 3222. a blowing hole; 4. a dust removing mechanism; 5. a negative pressure system.
Detailed Description
The following is a further description of embodiments of the utility model, taken in conjunction with the accompanying drawings:
as shown in fig. 1 to 9, the dust removing equipment easy to seal comprises a frame 1, a dust removing shell 2, a dust removing jig 3 and a dust removing mechanism 4; the dust removing device is characterized in that a dust removing shell 2, a dust removing jig 3 and a dust removing mechanism 4 are arranged on the frame 1, the dust removing shell 2 is enclosed to form an inner cavity 21 structure, the dust removing jig 3 and the dust removing mechanism 4 are arranged inside the cavity 21, and the dust removing jig 3 is used for installing a chip and can be conveniently pulled out of the cavity 21 or pushed into the cavity 21; an exhaust port 22 is arranged at one end of the cavity 21; the dust is discharged through the exhaust port 22; the dust removing mechanism 4 at least comprises two air outlet components which are arranged oppositely, so that the dust removing mechanism 4 can blow off dust on a chip by blowing up and down, and one of the air outlet components is provided with a direction-changeable air outlet; the air outlet can change direction and air outlet, so that dust on different positions of the chip can be effectively blown off; the air outlet component is used for blowing air to a chip placed in the dust removal jig 3 for dust removal;
the dust removal shell 2 is also provided with an opening for placing and taking chips and a sealing door 28 for opening or closing the opening, the frame 1 is also provided with a linear module 12, the moving end of the linear module 12 is connected with a moving frame 13, and the other end of the moving frame 13 is fixedly connected with the sealing door 28; the air inlet end pipe 311 of the object stage 31 is fixedly connected with the sealing door 28, and the port of the air inlet end pipe is exposed outside the sealing door 28; the linear module 12 drives the sealing door 28 to close the opening, pushes the object table 31 into the dust removing shell 2 or pulls the object table 31 out of the dust removing shell 2 when the opening is opened; it can be understood that the linear module 12 can control the movable frame 13 to move back and forth, so as to control the sealing door 28 to open or close the opening, in the process, manual assistance is not needed, the automation degree is high, and the object stage 31 can be directly driven to enter the interior of the dust removal shell 2 or be pulled out of the dust removal shell 2, so that the operation is convenient, the assembly is stable, the driving is also performed simultaneously, and the energy consumption is saved; in addition, in order to further enhance the sealing effect, corresponding grooves and sealing strips can be arranged on the periphery of the sealing door 28 and the periphery of the opening of the dust removal shell 2, and when the sealing door 28 is in contact extrusion with the dust removal shell 2, the sealing strips can deform to block the gap, so that the sealing effect of the dust removal shell 2 is enhanced, and the effect is better.
As a preferred embodiment; the air outlet component comprises an air plate 23 and an air duct 24, and the air plate 23 and the air duct 24 are respectively communicated with the positive pressure system; the wind plate 23 is arranged on the upper part of the dust removal shell 2, the wind pipe 24 is arranged on the lower part of the dust removal shell 2 and pivoted with the dust removal shell 2, the dust removal shell 2 is also provided with a driving mechanism 25 for driving the wind pipe 24 to rotate, and the dust removal jig 3 is arranged between the wind plate 23 and the wind pipe 24; it can be understood that after the air plate 23 and the air pipe 24 are communicated with the positive pressure system, high-pressure compressed air can be introduced to effectively blow and remove dust on the chip, and the dust removing jig 3 is arranged between the air plate 23 and the air pipe 24 and can blow air up and down to blow off dust on the chip; meanwhile, the air pipe 24 is of a pivot structure and can rotate inside the dust removal shell 2, and one implementation mode is as follows: the pivot end of actuating mechanism 25 rotates through gear and tuber pipe 24 to be connected, and the other end and the dust removal casing 2 inner wall of tuber pipe 24 rotate to be connected, and then can realize that tuber pipe 24 rotates in dust removal casing 2 inside, and the rotation process is along the center horizontal hunting of axle, and the wobbling range is less than 150, makes compressed air blow to on the corresponding chip (singly or adjacent) as far as possible, improves the effect of dust removal.
As a preferred embodiment; the frame 1 is also provided with a negative pressure system 5, the exhaust port 22 is arranged at the bottom of the dust removal shell 2, and the air inlet end of the negative pressure system 5 is communicated with the exhaust port 22; the area of the dust removing shell 2 close to the exhaust port 22 is provided with a bevel 26. It can be understood that after the positive pressure system is ventilated, the dust removing shell 2 enters high-pressure compressed air through the air plate 23 and the air pipe 24, and at the moment, the negative pressure system 5 can be used for exhausting air to the direction of the air outlet 22, so that a certain negative pressure environment is formed at the lower part in the dust removing shell 2, the buoyancy in the dust removing shell 2 is reduced, dust is sucked to fall, the dust is prevented from suspending in the dust removing shell 2, and the dust removing efficiency is further improved, and the dust removing quality is further improved; in this embodiment, the negative pressure system 5 may be a vacuum cleaner, and may be connected to the exhaust port 22 through a dust suction pipe; in addition, the exhaust area that inclined plane 26 set up can make the dust fall better, reduces and blocks, reduces frictional force, prevents that the dust from gathering, and the dust removal effect is better.
As a preferred embodiment; the dust removal jig 3 comprises an objective table 31 and a carrier 32, an air inlet end pipe 311 of the objective table 31 is communicated with the negative pressure system 5 and is used for sucking or loosening the carrier 32, the carrier 32 is arranged on the objective table 31, and the carrier 32 is used for clamping a chip; the carrier 32 includes an upper carrier 321 and a lower carrier 322, the upper carrier 321 and the lower carrier 322 are fixed by magnetic connection, a chip is clamped between the upper carrier 321 and the lower carrier 322, and a blowing hole 3222 on the lower carrier 322 is set up for a wide opening 3221; in this embodiment, after the chip is mounted on the carrier 32, after air is introduced through the air inlet end pipe 311 (the air inlet end pipe 311 is communicated with the negative pressure hole of the downloading tool 322, and then the downloading tool 322 can be used for sucking the upper carrier 321), the carrier 32 can be sucked on the surface of the objective table 31, so that the stability of the chip is better, the situation of deviation is not easy to occur, and the quality of the dust removal process is ensured; simultaneously, go up carrier 321 and download utensil 322 and connect fixedly through magnetism, can further stabilize centre gripping chip, stabilize the effect and further strengthen, moreover, blow hole 3222 is for opening 3221 setting, for the but the angle of blowing of chip is bigger (this part is the pad part of chip, and the place that the dust gathered is more), prevents to shelter from, is favorable to blowing off the dust, and the dust removal effect is good.
As a preferred embodiment; the negative ion tube 11 is also arranged on the frame 1, one end of the negative ion tube 11 is communicated with the air plate 23, and the other end is communicated with the negative ion generator; negative ions blown out by the negative ion tube 11 neutralize charges in the air in the cavity 21; and the air inlet end of the negative ion generator is communicated with the positive pressure system. In the embodiment, by adopting the anion tube 11, the anion tube 11 is communicated with the air plate 23, anions can be introduced into the dust removing shell 2 to neutralize the charges of the air in the dust removing shell 2, so that the surface of dust is uncharged, the viscosity is lost, and the dust is effectively blown off; meanwhile, the air inlet end of the negative ion generator is communicated with the positive pressure system, so that pressure can be provided for negative ions, and the negative ions can enter a relatively high-pressure environment inside the dust removal shell 2; specifically, negative ions can be injected first, then compressed air is injected, charge is neutralized first, and then blowing is carried out, so that dust can be blown off easily.
As a preferred embodiment; the driving mechanism 25 is fixedly connected to the frame 1, the driving mechanism 25 is connected with the air pipe 24 through gear transmission, one end of the air pipe 24, which is close to the driving mechanism 25, is exposed out of the dust removal shell 2 and is provided with a rotary air tap 27, and the air inlet end of the rotary air tap 27 is communicated with the positive pressure system, so that the rotary air tap 27 is fixed when the air pipe 24 rotates; the driving mechanism 25 and the air duct 24 are correspondingly provided with a plurality of driving mechanisms and are separately connected, so that one driving mechanism 25 controls one air duct 24 to rotate. In this embodiment, actuating mechanism 25 is connected with gear drive mainly through the pivot end of self, and then drives tuber pipe 24 and rotate, and be provided with rotatory air cock 27 for tuber pipe 24 when rotating, rotatory air cock 27 can be motionless, and then is favorable to rotatory air cock 27 to be connected through pipeline and positive pressure system, when realizing tuber pipe 24 rotation, also can conveniently inject compressed air, moreover, realize one actuating mechanism 25 control tuber pipe 24 rotates, can adjust according to the actual conditions, and energy consumption is saved more (for example, one of them tuber pipe 24 does not have the chip corresponding to carrier 32 that should be located, can stop the tuber pipe 24 operation of this department), and secondly, it is more convenient to use, does not influence each other, can adjust different angles to different tuber pipes 24, more can adapt to the position of blowing of different products, and then improves the dust removal effect.
As a preferred embodiment; the air plate 23 is of an internal hollow structure, and one end of the air plate 23, which is close to the dust removal jig 3, is provided with a plurality of first air outlet holes 231; a plurality of second air outlet holes 241 are formed in one end of the air pipe 24, which is close to the dust removing jig 3. In this embodiment, the first air outlet holes 231 may be disposed at equal intervals, so as to uniformly blow air downwards, increase the contact area with each chip, and improve the dust removing effect; in addition, the apertures of the plurality of second air outlet holes 241 are continuously increased on the air inlet path, so as to realize uniform air outlet, or the air outlet volumes of the front and rear second air outlet holes 241 are approximately the same (the air outlet volumes of the rear second air outlet holes 241 are ensured), which is favorable for better blowing and dedusting.
In this application, it should be noted that, in the prior art, there are mainly the following problems: under the existing dust removal mode, a closed space is lacking, dust is easy to adhere to the chip again, and the dust removal quality of the chip is low.
Therefore, after the improvement of the dust removing device is adopted, the dust removing shell 2, the sealing door 28, the linear module 12 and the movable frame 13 are arranged, the dust removing shell 2 is enclosed to form an internal sealing cavity 21 structure, the exhaust port 22 arranged at the bottom of the dust removing shell is directly communicated with the negative pressure system 5, so that the dust removing shell 2 can give a relatively sealed environment for dust removal of a chip, the sealing door 28 can be abutted against the dust removing shell 2 under the driving of the linear module 12, the sealing effect is better, in addition, in the dust removing process, the negative pressure system 5 and the exhaust port 22 also form a negative pressure environment at the inner bottom of the dust removing shell 2, the buoyancy of the inside of the dust removing shell 2 is reduced, the dust is attracted to fall down, the dust is prevented from being suspended inside the dust removing shell 2 and the dust is repeatedly attached to the chip, and the dust removing efficiency is further accelerated, and the dust removing quality is improved; in addition, in the process of driving the sealing door 28 to move, the object stage 31 can be pushed into the dust removing shell 2 or pulled out of the dust removing shell 2, the assembly automation degree is high, meanwhile, the energy consumption can be saved in a driving mode, workers can conveniently place the carrier 32 on the object stage 31 or take out the carrier 32, the steps of pushing and pulling out the object stage 31 are reduced, and the production efficiency is further improved.
The above embodiments are merely illustrative of the preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model, and various modifications and improvements made by those skilled in the art to the technical solution of the present utility model should fall within the scope of protection defined by the claims of the present utility model without departing from the spirit of the design of the present utility model.
Claims (9)
1. The utility model provides a dust collecting equipment of easy sealed, includes frame, dust removal casing, dust removal tool and dust removal mechanism; the dust removing device comprises a frame, a dust removing shell, a dust removing jig and a dust removing mechanism, wherein the frame is provided with the dust removing shell, the dust removing shell is enclosed to form an internal cavity structure, the dust removing jig and the dust removing mechanism are arranged in the cavity, and one end of the cavity is provided with an exhaust port; the dust removing mechanism comprises an air outlet component, and the air outlet component is used for blowing air to a chip placed in the dust removing jig for dust removal; the method is characterized in that:
the dust removing jig comprises an objective table and a carrier, an opening for placing and taking a chip and a sealing door for opening or closing the opening are further arranged on the dust removing shell, a linear module is further arranged on the rack, the moving end of the linear module is connected with a moving frame, and the other end of the moving frame is fixedly connected with the sealing door; the air inlet end pipe of the objective table is fixedly connected with the sealing door, and the port of the air inlet end pipe is exposed outside the sealing door; the linear module drives the sealing door to push the objective table into the dust removal shell when closing the opening or pull the objective table out of the dust removal shell when opening the opening.
2. An easily sealable dust removing apparatus according to claim 1, wherein: the dust removing mechanism at least comprises two air outlet components which are oppositely arranged, and one of the air outlet components is provided with an air outlet which can change direction.
3. An easily sealable dust removing apparatus according to claim 1, wherein: the air outlet component comprises an air plate and an air pipe, and the air plate and the air pipe are respectively communicated with the positive pressure system; the air plate is arranged on the upper part of the dust removing shell, the air pipe is arranged on the lower part of the dust removing shell and pivoted with the dust removing shell, a driving mechanism for driving the air pipe to rotate is further arranged on the dust removing shell, and the dust removing jig is arranged between the air plate and the air pipe.
4. An easily sealable dust removing apparatus according to claim 1, wherein: the negative pressure system is further arranged on the frame, the exhaust port is arranged at the bottom of the dust removal shell, and the air inlet end of the negative pressure system is communicated with the exhaust port; the area of the dust removing shell close to the exhaust port is an inclined surface.
5. An easily sealable dust removing apparatus according to claim 1, wherein: the air inlet end pipe of the objective table is communicated with the negative pressure system and used for sucking or loosening the carrier, the carrier is installed on the objective table, and the carrier is used for clamping the chip.
6. An easily sealable dust removing apparatus according to claim 5, wherein: the carrier comprises an upper carrier and a lower carrier, the upper carrier and the lower carrier are fixed through magnetic connection, the upper carrier and the lower carrier are used for clamping chips, and a blowing hole on the lower carrier is arranged for a wide opening.
7. An easily sealable dust removing apparatus according to claim 1, wherein: the negative ion tube is also arranged on the frame, one end of the negative ion tube is communicated with the air plate, and the other end of the negative ion tube is communicated with the negative ion generator; negative ions blown out by the negative ion tube neutralize charges in the air in the cavity; and the air inlet end of the negative ion generator is communicated with the positive pressure system.
8. A dust removing apparatus which is easily sealable according to claim 3, wherein: the driving mechanism is fixedly connected to the frame, the driving mechanism is connected with the air pipe through gear transmission, one end of the air pipe, which is close to the driving mechanism, is exposed out of the dust removal shell and is provided with a rotary air tap, and the air inlet end of the rotary air tap is communicated with the positive pressure system, so that the rotary air tap is fixed when the air pipe rotates; the driving mechanism and the air pipe are correspondingly provided with a plurality of driving mechanisms and are connected independently, so that one driving mechanism controls one air pipe to rotate.
9. A dust removing apparatus which is easily sealable according to claim 3, wherein: the air plate is provided with a plurality of first air outlet holes at one end close to the dust removal jig; and a plurality of second air outlet holes are formed in one end, close to the dust removal jig, of the air pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322081651.5U CN220329480U (en) | 2023-08-03 | 2023-08-03 | Dust collecting equipment easy to seal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322081651.5U CN220329480U (en) | 2023-08-03 | 2023-08-03 | Dust collecting equipment easy to seal |
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| Publication Number | Publication Date |
|---|---|
| CN220329480U true CN220329480U (en) | 2024-01-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322081651.5U Active CN220329480U (en) | 2023-08-03 | 2023-08-03 | Dust collecting equipment easy to seal |
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| Country | Link |
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| CN (1) | CN220329480U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118174652A (en) * | 2024-05-15 | 2024-06-11 | 江苏宁美新能源有限公司 | Photovoltaic panel EL detection tool and detection method thereof |
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2023
- 2023-08-03 CN CN202322081651.5U patent/CN220329480U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118174652A (en) * | 2024-05-15 | 2024-06-11 | 江苏宁美新能源有限公司 | Photovoltaic panel EL detection tool and detection method thereof |
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