CN116553932A - 一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法 - Google Patents

一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法 Download PDF

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CN116553932A
CN116553932A CN202310829937.9A CN202310829937A CN116553932A CN 116553932 A CN116553932 A CN 116553932A CN 202310829937 A CN202310829937 A CN 202310829937A CN 116553932 A CN116553932 A CN 116553932A
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carbide
powder
tungsten carbide
tungsten
degreasing
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谢兴铖
林中坤
王继新
杨剑
曹瑞军
史植广
刘皓
杨志民
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GRIMN Engineering Technology Research Institute Co Ltd
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Abstract

一种用于高可靠性楔焊劈刀的碳化钨材料,其成分以重量百分比计,由以下组分组成:WC 55‑74.5%、TiC 20‑35%、Co 2‑15%、Ni 2‑15%、Cr2C3 0.15‑1%、VC 0.15‑1%、Mo 0.5‑10%、K 0.5‑15%,所述K为钽的碳化物、铪的碳化物、铌的碳化物、铼的碳化物、碳化钽铌固溶体、碳化钨钛固溶体中的至少一种;其生产方法是采用变径内孔近净模压技术;该生产方法进一步突破了碳化钨材料的键合使用范围,大幅提升碳化钨材料的键合使用寿命,同时,实现了台阶式内孔碳化钨楔焊劈刀的一体成形,大大减少了劈刀加工工序,大幅降低碳化钨楔焊劈刀生产成本。

Description

一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法
技术领域
本发明属于集成电路工具材料领域,具体涉及一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法。
背景技术
电子装备(机载、舰载、星载等雷达和通讯系统)不断向微型化、轻量化、高频化、多功能、高可靠和低成本的方向发展,对集成电路芯片级组装和互连技术提出了更高要求,即对芯片级引线键合提出了极大挑战,而楔形劈刀成为高密度、小焊点、细间距和多腔深腔楔焊键合的关键工具。尤其是手动型楔焊键合过程中,稳定的引线送丝、引线出丝、引线断丝以及操作手法对键合可靠性影响显著,这也对楔焊劈刀的自身结构提出了新的要求,例如,典型的过渡垂直送丝引线孔结构,其包括喇叭入口、粗引线孔、过渡引线孔、细引线孔等部分,典型过渡引线孔是由直径0.4mm内孔过渡到直径0.15mm内孔,即垂直引线孔出口直径为0.15mm,其引线出丝的稳定性显著提升。
目前,采用激光加工、电加工等方式可以实现过渡性变径内孔的加工,但其加工难度大、加工成本高昂,因此,开发低成本制造技术势在必行。
发明内容
鉴于现有技术存在的问题,本发明针对熔点相对较低的碳化钨材料,通过材料成分设计与调控,开发出变径内孔近净模压技术,不仅拓宽碳化钨劈刀的键合适用性,而且大幅降低碳化钨劈刀制造成本。由此,本发明提出一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法,为进一步提高楔形劈刀的结构设计和使用性能,本发明提供一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法。
本发明的第一方面,是提供一种用于高可靠性楔焊劈刀的碳化钨材料,其成分以重量百分比计,由以下组分组成:WC 55-74.5%、TiC 20-35%、Co 2-15%、Ni 2-15%、Cr2C30.15-1%、VC 0.15-1%、Mo 0.5-10%、K 0.5-15%,所述K为钽的碳化物、铪的碳化物、铌的碳化物、铼的碳化物、碳化钽铌固溶体、碳化钨钛固溶体中的至少一种。
优选方案,本发明的碳化钨材料,其成分以重量百分比计,由以下组分组成:WC55-65%、TiC 25-30%、Co 2-6%、Ni 2-6%、Cr2C3 0.15-0.75%、VC 0.15-0.75%、Mo 0.5-7.5%、K 1.5-7.5%,所述K为(Ta、Nb)C、(W、TiC)C。
优选地,碳化钨材料硬度为80.5-95.5HRA、抗弯强度>1300MPa;所述碳化钨材料制备成的手动型楔焊劈刀的键合次数大于10万次。
本发明的第二方面,是提供本发明第一方面一种用于高可靠性楔焊劈刀的碳化钨材料的生产方法,包括如下步骤:
1)按设计组分配取碳化钨粉、碳化钛粉、钴粉、镍粉、碳化铬粉、碳化钒粉、钼粉、K粉;所述K粉选自钽的碳化物、铪的碳化物、铌的碳化物、铼的碳化物、碳化钽铌固溶体、碳化钨钛固溶体中的至少一种;
2)依次将配取的上述粉末置于倾斜式湿磨机或高能球磨机内进行湿法混料球磨,球磨后,将混合料通过真空干燥箱或真空搅拌干燥机进行干燥处理,干燥后的混合粉末在200目的筛网下进行筛分后,备用;
3)将备用粉末和成型剂按比例加入到真空搅拌干燥机中进行混炼,成型剂添加量为取用粉末的2.0-4.5%之间,混炼时间为60-90min,混炼温度为75-95℃,优选地,成型剂采用硬质合金石蜡或聚乙二醇;降温后,将混炼后的混合料在80目的筛网下进行筛分后,备用;
4)将备用混合料在液压机上模压成形碳化钨楔焊劈刀压坯;
5)采用真空脱脂烧结一体炉对模压成形的压坯进行脱脂烧结。
优选地,在步骤5),所述的脱脂烧结处理为真空负压脱脂,炉内惰性气体流量为0.5-2.0m3/h;所述脱脂保温温度为320-350℃、脱脂时间为90-180min;烧结温度为1400-1500℃、保温时间为60-120min。
优选地,在步骤1),所述碳化钨粉的平均粒度为0.2-2.5μm,碳化钛粉和钼粉的平均粒度为0.2-3.0μm,钴粉、镍粉、碳化铬粉、碳化钒粉的平均粒度为 0.2-1.0μm、K粉的平均粒度为0.2-2.0μm。
优选地,在步骤4),所述碳化钨楔焊劈刀压坯为带台阶式内孔或实心棒坯;所述棒坯的外径尺寸Φ1为2-4mm,长度L为25-50mm,台阶式内孔尺寸Φ2/Φ3为(0.3-1)/(0.1-0.4)mm。
优选地,在步骤5),所述碳化钨楔焊劈刀压坯在脱脂烧结过程中倾斜式放置于石墨舟皿上,所述石墨舟皿涂覆有氧化铝、氧化锆或石墨/氧化铝防粘涂层。
本发明的有益效果有:
本发明针对熔点相对较低的碳化钨材料,通过材料成分设计与调控,实现碳化钨颗粒与固溶体颗粒之间的粒度适配,进一步突破了碳化钨材料的键合使用范围,大幅提升碳化钨材料的键合使用寿命,多种材质引线的手动型楔焊劈刀键合次数大于10万次。
本发明针对碳化钨材料的大长径比台阶式内孔的加工难度大、加工成本高等存在问题,突破了材料成分范围限制、台阶孔模芯易折断、棒料精细结构难以控制等关键技术与理论,本发明开发出一种变径内孔近净模压技术,实现了台阶式内孔碳化钨楔焊劈刀的一体成形,大大减少了劈刀加工工序,大幅降低碳化钨楔焊劈刀生产成本。
附图说明
图1为实施例1的碳化钨材料的微观形貌图。
图2为实施例1的碳化钨材料的微孔形貌图。
图3为实施例1的碳化钨楔焊劈刀剖面结构示意图。
图4为实施例1的碳化钨楔焊劈刀端面结构示意图。
具体实施方式
本发明提供一种用于高可靠性楔焊劈刀的碳化钨材料及其生产方法,为了使本发明的内容更容易被清楚地理解,下面根据具体实施例,对本发明作进一步详细的说明。
在下述实施例中所用的物料均为工业产品及现有技术提供的装置。
实施例1
配料时选用重量百分比为65%的WC粉(FSSS 0.8μm)、20%的TiC粉(FSSS 1μm)、6%的Co粉(FSSS 1μm)、6%的Ni粉(FSSS 1μm)、0.2%的Cr2C3粉(FSSS 1μm)、0.3%的VC粉(FSSS 1μm)、1.0%MoC粉(FSSS 1μm)、1.5%的(Ta、Nb)C粉(FSSS 1μm),总计100%。配取成分后,置于滚动球磨机进行湿法混料球磨,将混合料通过真空搅拌干燥机进行干燥处理,干燥后的混合粉末在200目的筛网下进行筛分,将粉末和成型剂按比例加入到真空搅拌干燥机中进行混炼,添加硬质合金石蜡(粉末的3.0%),混炼时间为75min,混炼温度为85℃,混炼后80目筛网下进行筛分;将制备的混合料在液压机上模压成形碳化钨楔焊劈刀压坯(Φ1为3mm,长度L为35mm,台阶式内孔尺寸Φ23为0.4/0.15mm;将碳化钨压坯倾斜式置于涂覆有氧化铝的石墨舟皿上,采用真空脱脂烧结一体炉进行脱脂烧结:脱脂处理为真空负压脱脂,炉内惰性气体流量为1m3/h;所述脱脂保温温度为330℃、脱脂时间为120min;烧结温度为1450℃、保温时间为90min。制备得到的碳化钨楔焊劈刀的硬度为88HRA、抗弯强度2960MPa、孔隙度为A02B00C00、碳化钨晶粒度为0.3μm。
图1为实施例1的碳化钨材料的微观形貌图。图1中白色物相为碳化钨颗粒,灰色和芯(黑色)环(灰色)结构大颗粒物相为以碳化钛含量为主的(Ti、Mo、Ta、Nb)多元固溶体,填充在上述物相之间的为镍-钴粘结相,多元固溶体呈均有分布,与粘结相具有良好的润湿相,自身的高硬度、高耐磨损性能,同时通过碳化钨颗粒与固溶体颗粒之间的粒度匹配设计,使得碳化钨材料同时适用于金丝、铝丝/铝硅丝等引线,大幅提升碳化钨材料的适用范围和使用寿命。
图2为实施例1的碳化钨材料的微孔形貌图。图2为带台阶式内孔的碳化钨烧结棒料,外径尺寸Φ1为2.3mm,长度L为30mm,台阶式内孔尺寸Φ23为0.15/0.4mm,减少了楔焊劈刀内孔加工工序,缩短了生产流程,大幅降低楔焊劈刀生产成本。
图3为实施例1的碳化钨楔焊劈刀剖面结构示意图。图4为实施例1的碳化钨楔焊劈刀端面结构示意图。将上述碳化钨材料制备成手动型楔焊劈刀(型号为YWBTS2025-3/4-1/16-4-CG-45),采用Westbond 7476 E键合机在陶瓷金基板上开展25微米金丝、铝丝键合使用寿命验证,连续完整焊点数分别为11.52万点、12.63万点。
实施例2
配料时选用重量百分比为55%的WC粉(FSSS 2.5μm)、35%的TiC粉(FSSS 0.5μm)、2%的Co粉(FSSS 1μm)、4%的Ni粉(FSSS 1μm)、0.2%的Cr2C3粉(FSSS 1μm)、0.3%的VC粉(FSSS 1μm)、1.5%MoC粉(FSSS 1μm)、2.0%的(W、TiC)C粉(FSSS 1μm),总计100%。配取成分后,置于滚动球磨机进行湿法混料球磨,将混合料通过真空干燥箱进行干燥处理,干燥后的混合粉末在200目的筛网下进行筛分,将粉末和成型剂按比例加入到真空搅拌干燥机中进行混炼,添加硬质合金石蜡(粉末的4.5%),混炼时间为90min,混炼温度为75℃,混炼后80目筛网下进行筛分;将制备的混合料在液压机上模压成形碳化钨楔焊劈刀压坯(Φ1为4mm,长度L为50mm,台阶式内孔尺寸Φ23为1/0.4mm;将碳化钨压坯倾斜式置于涂覆有氧化锆的石墨舟皿上,采用真空脱脂烧结一体炉进行脱脂烧结:脱脂处理为真空负压脱脂,炉内惰性气体流量为2.0m3/h;所述脱脂保温温度为350℃、脱脂时间为180min;烧结温度为1500℃、保温时间为180min。制备得到的碳化钨楔焊劈刀的硬度为93HRA、抗弯强度2460MPa、孔隙度为A02B00C00、碳化钨晶粒度为0.8μm。将上述碳化钨材料制备成手动型楔焊劈刀(型号为YWBTS2025-3/4-1/16-4-CG-45),采用Westbond 7476 E键合机在陶瓷金基板上开展25微米金丝、铝丝键合使用寿命验证,连续完整焊点数分别为11.82万点、12.53万点。
实施例3
配料时选用重量百分比为74.5%的WC粉(FSSS 0.2μm)、20%的TiC粉(FSSS 0.5μm)、2%的Co粉(FSSS 1μm)、2%的Ni粉(FSSS 1μm)、0.2%的Cr2C3粉(FSSS 1μm)、0.3%的VC粉(FSSS1μm)、0.5%MoC粉(FSSS 1μm)、0.5%的(Ta、Nb)C粉(FSSS 1μm),总计100%。配取成分后,置于滚动球磨机进行湿法混料球磨,将混合料通过真空搅拌干燥机进行干燥处理,干燥后的混合粉末在200目的筛网下进行筛分,将粉末和成型剂按比例加入到真空搅拌干燥机中进行混炼,添加硬质合金石蜡(粉末的2.0%),混炼时间为90min,混炼温度为75℃,混炼后80目筛网下进行筛分;将制备的混合料在液压机上模压成形碳化钨楔焊劈刀压坯(Φ1为2mm,长度L为25mm,台阶式内孔尺寸Φ23为0.3/0.1mm;将碳化钨压坯倾斜式置于涂覆有石墨/氧化铝的石墨舟皿上,采用真空脱脂烧结一体炉进行脱脂烧结:脱脂处理为真空负压脱脂,炉内惰性气体流量为0.5m3/h;所述脱脂保温温度为320℃、脱脂时间为90min;烧结温度为1460℃、保温时间为60min。制备得到的碳化钨楔焊劈刀的硬度为93.5HRA、抗弯强度2355MPa、孔隙度为A02B00C00、碳化钨晶粒度为0.1μm。将上述碳化钨材料制备成手动型楔焊劈刀(型号为YWBTS2025-3/4-1/16-4-CG-45),采用Westbond 7476 E键合机在陶瓷金基板上开展25微米金丝、铝丝键合使用寿命验证,连续完整焊点数分别为11.72万点、12.96万点。
由上述实施例的结果可以看到,本发明针对熔点相对较低的碳化钨材料,通过材料成分设计与调控,实现碳化钨颗粒与固溶体颗粒之间的粒度适配,进一步突破了碳化钨材料的键合使用范围,所制备得到的碳化钨楔焊劈刀的硬度为88HRA以上、抗弯强度可达2355MPa以上、孔隙度为A02B00C00、碳化钨晶粒度可为0.1μm。大幅提升碳化钨材料的键合使用寿命,多种材质引线的手动型楔焊劈刀键合次数大于10万次。
本发明针对碳化钨材料的大长径比台阶式内孔的加工难度大、加工成本高等存在问题,突破了材料成分范围限制、台阶孔模芯易折断、棒料精细结构难以控制等关键技术与理论,本发明开发出一种变径内孔近净模压技术,实现了台阶式内孔碳化钨楔焊劈刀的一体成形,大大减少了劈刀加工工序,大幅降低碳化钨楔焊劈刀生产成本。
以上所述实施例仅表达了本发明的具体实施方式,其描述较为具体和详细,但并不能因此而理解为对本发明专利范围的限制,应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构想的前提下,还可以做出若干变形和改性,这些都属于本发明的保护范围。

Claims (8)

1.一种用于高可靠性楔焊劈刀的碳化钨材料,其特征在于,其成分以重量百分比计,由以下组分组成:WC 55-74.5%、TiC 20-35%、Co 2-15%、Ni 2-15%、Cr2C3 0.15-1%、VC 0.15-1%、Mo 0.5-10%、K 0.5-15%,所述K为钽的碳化物、铪的碳化物、铌的碳化物、铼的碳化物、碳化钽铌固溶体、碳化钨钛固溶体中的至少一种。
2.根据权利要求1所述的碳化钨材料,其特征在于,其成分以重量百分比计,由以下组分组成:WC 55-65%、TiC 25-30%、Co 2-6%、Ni 2-6%、Cr2C3 0.15-0.75%、VC 0.15-0.75%、Mo0.5-7.5%、K 1.5-7.5%,所述K为(Ta、Nb)C、(W、TiC)C。
3.根据权利要求1所述的碳化钨材料,其特征在于,碳化钨材料硬度为80.5-95.5HRA、抗弯强度>1300MPa;所述碳化钨材料制备成的手动型楔焊劈刀的键合次数大于10万次。
4.一种如权利要求1-3任何一项所述的碳化钨材料的生产方法,包括如下步骤:
1)按设计组分配取碳化钨粉、碳化钛粉、钴粉、镍粉、碳化铬粉、碳化钒粉、钼粉、K粉;所述K粉选自钽的碳化物、铪的碳化物、铌的碳化物、铼的碳化物、碳化钽铌固溶体、碳化钨钛固溶体中的至少一种;
2)依次将配取的上述粉末置于倾斜式湿磨机或高能球磨机内进行湿法混料球磨,球磨后,将混合料通过真空干燥箱或真空搅拌干燥机进行干燥处理,干燥后的混合粉末在200目的筛网下进行筛分后,备用;
3)将备用粉末和成型剂按比例加入到真空搅拌干燥机中进行混炼,成型剂添加量为取用粉末的2.0-4.5%之间,混炼时间为60-90min,混炼温度为75-95℃,成型剂采用硬质合金石蜡或聚乙二醇,降温后,将混炼后的混合料在80目的筛网下进行筛分后,备用;
4)将备用混合料在液压机上模压成形碳化钨楔焊劈刀压坯;
5)采用真空脱脂烧结一体炉对模压成形的压坯进行脱脂烧结。
5.根据权利要求4所述的生产方法,在步骤1),所述碳化钨粉的平均粒度为0.2-2.5μm,碳化钛粉和钼粉的平均粒度为0.2-3.0μm,钴粉、镍粉、碳化铬粉、碳化钒粉的平均粒度为0.2-1.0μm、K粉的平均粒度为0.2-2.0μm。
6.根据权利要求4所述的生产方法,在步骤4),所述碳化钨楔焊劈刀压坯为带台阶式内孔或实心棒坯;所述棒坯的外径尺寸Φ1为2-4mm,长度L为25-50mm,台阶式内孔尺寸Φ2/Φ3为(0.3-1)/(0.1-0.4)mm。
7.根据权利要求4所述的生产方法,在步骤5),所述碳化钨楔焊劈刀压坯在脱脂烧结过程中倾斜式放置于石墨舟皿上,所述石墨舟皿涂覆有氧化铝、氧化锆或石墨/氧化铝防粘涂层。
8.根据权利要求4所述的生产方法,在步骤5),脱脂处理为真空负压脱脂,炉内惰性气体流量为0.5-2.0m3/h;所述脱脂保温温度为320-350℃、脱脂时间为90-180min;烧结温度为1400-1500℃、保温时间为60-120min。
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