CN116494270B - Unloading manipulator is washd with going up to photomask version - Google Patents
Unloading manipulator is washd with going up to photomask version Download PDFInfo
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- CN116494270B CN116494270B CN202310776940.9A CN202310776940A CN116494270B CN 116494270 B CN116494270 B CN 116494270B CN 202310776940 A CN202310776940 A CN 202310776940A CN 116494270 B CN116494270 B CN 116494270B
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- sliding
- side wall
- sliding sleeve
- outer side
- rod
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- 238000004140 cleaning Methods 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 230000005540 biological transmission Effects 0.000 claims description 47
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 2
- 230000006978 adaptation Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000005507 spraying Methods 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 239000000084 colloidal system Substances 0.000 description 4
- 240000009087 Crescentia cujete Species 0.000 description 3
- 235000005983 Crescentia cujete Nutrition 0.000 description 3
- 235000009797 Lagenaria vulgaris Nutrition 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/008—Manipulators for service tasks
- B25J11/0085—Cleaning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The application provides a loading and unloading manipulator for cleaning a photomask, which relates to the technical field of manipulators for cleaning the photomask and comprises a connecting pipe and a supporting substrate arranged at the bottom of the connecting pipe, wherein a transverse sliding sleeve is sleeved on the outer side wall of the supporting substrate in a sliding way, two sides of the supporting substrate are fixedly connected with double-layer supporting guide rails, a first sliding sleeve is sleeved on the outer side wall of the double-layer supporting guide rails in a sliding way, a second sliding sleeve capable of sliding on the double-layer supporting guide rails is hinged on the outer side wall of the first sliding sleeve in a sliding way, and a clamping cylinder is fixedly connected between the transverse sliding sleeve and the bottom of the first sliding sleeve.
Description
Technical Field
The application relates to the technical field of a manipulator for cleaning a photomask, in particular to a loading and unloading manipulator for cleaning a photomask.
Background
Photolithography masks are generally used continuously as nearly every photolithography process step, and the masks are generally dirty when wafers/samples are processed, and since the photolithography process is generally performed by a photolithography machine in which the masks are in close contact with the surfaces of the photoresist to improve photolithography accuracy, small fragments of the photoresist inevitably adhere to the masks over time, and in order to ensure a longer service life, the masks are thrown into a cleaning tank, daily cleaning and powerful cleaning are performed as needed, and operations such as throwing of the masks into the cleaning tank, taking out after cleaning, throwing to a wiping frame, transferring after drying, and the like are performed by a mechanical arm and a mechanical receiver.
At present, in the prior art, the loading and unloading manipulator for cleaning the photomask is generally only used for loading and unloading in the process of taking part in the cleaning work, and the photomask is in an idle state in the cleaning work process, so that the photomask cannot be used for effectively assisting in the cleaning work, and resources are idle and wasted.
Disclosure of Invention
The application aims to solve the defects that in the prior art, in the process of cleaning the photomask, the capability of a manipulator to participate in the cleaning is limited, and resources are idle and wasted due to the fact that the manipulator is idle in the interval of feeding and discharging the photomask to a cleaning tank.
In order to achieve the above purpose, the present application adopts the following technical scheme: the utility model provides a photomask washs with last unloading manipulator, includes connecting pipe and the support base plate of its bottom installation, horizontal sliding sleeve has been cup jointed on the lateral wall of support base plate, the both sides of support base plate all rigid coupling has double-deck support rail, no. one sliding sleeve has all been cup jointed on the lateral wall of double-deck support rail to slide, no. two sliding sleeves that can slide on double-deck support rail are all articulated on the lateral wall of No. one sliding sleeve, all rigid coupling has the centre gripping cylinder between the bottom of horizontal sliding sleeve and No. one sliding sleeve, detain the slide rail in both sides of No. two sliding sleeves all fixed mounting, all sliding sleeve has cup jointed hollow grip lever on the inside wall of detaining the slide rail in, all fixed sleeve has cup jointed calabash shaped holder on the lateral wall of hollow grip lever, one end of calabash shaped holder all is provided with the clamp mouth, install the reciprocal drive structure that is used for controlling No. one sliding sleeve reciprocating movement on the lateral wall of connecting pipe, install the longitudinal spacing adjustment structure that is used for adjusting the interval between two hollow grip levers on No. two sliding sleeve;
the outer side walls of the calabash-shaped clamping pieces are all in sliding sleeve connection with air ejector tubes, the air ejector tubes are all in inclined arrangement, the air ejector tubes are far away from the end opening of the inner buckling sliding rail, the outer side walls of the air ejector tubes are all communicated with the hollow clamping rods, and a transmission structure for controlling the air ejector tubes to rotate is fixedly arranged between every two adjacent hollow clamping rods.
In at least some embodiments, all fixedly connected with laminating swivel on the inside wall of gas jet pipe, the one end of laminating swivel is all rotated and is cup jointed on hollow clamping lever's lateral wall, laminating swivel slip cup joints on the lateral wall of calabash shape holder.
In at least some embodiments, the reciprocating driving structure comprises a driving motor, a turntable, an eccentric rotating rod and a transmission chute, wherein two turntables are arranged, one turntable is fixedly connected to the output end of the driving motor, the other turntable is rotationally connected to the upper surface of the double-layer supporting guide rail, the eccentric rotating rod is fixedly connected between the two turntables, the transmission chute is formed in the outer side wall of the transverse sliding sleeve, the eccentric rotating rod is slidably connected to the inside of the transmission chute, and the driving motor is fixedly connected to the outer side wall of the connecting pipe.
In at least some embodiments, the rotary drum has all been cup jointed in the rotation on the lateral wall of hollow clamping lever, the air vent has been seted up on the wall of hollow clamping lever in the rotary drum inside, fixed intercommunication has the breather pipe between the lateral wall of rotary drum and jet-propelled pipe, all fixed intercommunication has the intake pipe that is used for letting in gas to its inside on the lateral wall of hollow clamping lever.
In at least some embodiments, the transmission structure includes support casing, transfer line, the built-in slide, conical gear, drive gear, fluted disc, inclined bar and driving motor, homonymy all fixedly connected with support casing on the lateral wall of hollow clamping lever, two the one side that the support casing is close to all rotates and is connected with the transfer line, the one end that the transfer line is close to has slided jointly and has cup jointed the built-in slide, the built-in slide rotates and connects on the lateral wall of No. two sliding sleeves, the conical gear is all installed on the inside one end of transfer line and the inside wall of support casing, installs conical gear on the support casing inside wall is all coaxial arrangement drive gear, all rotate on the lateral wall of hollow clamping lever and cup jointed the fluted disc, the fluted disc is all sealed to rotate and cup jointed on the lateral wall of support casing, the fluted disc all is connected with the drive gear meshing, all rigid coupling has the inclined bar between fluted disc and the fumart.
In at least some embodiments, two inner buckle sliding plates are fixedly connected to the outer side wall of the hollow clamping rod, the hollow clamping rod is sleeved on the inner side wall of the inner buckle sliding rail in a sliding manner through the two inner buckle sliding plates, two symmetrically arranged side position pulleys are fixedly connected to the outer side wall of the hollow clamping rod, and the side position pulleys are respectively contacted with the upper side and the lower side of the inner buckle sliding rail.
In at least some embodiments, the vertical interval adjusting structure comprises a vertical plate, telescopic rods, pull rods, a fixed rotating shaft and a guide chute, wherein the vertical plate is fixedly connected to the outer side wall of the second sliding sleeve, a gap for adapting the vertical plate is formed in the side wall of the double-layer supporting guide rail, the telescopic rods are arranged on the outer side wall of the vertical plate, the output ends of the telescopic rods are fixedly connected with the fixed rotating shaft, the two pull rods are arranged, one ends of the two pull rods are rotatably sleeved on the outer side wall of the fixed rotating shaft, one ends of the pull rods, far away from the fixed rotating shaft, are rotatably sleeved on the outer side walls of the two hollow clamping rods respectively, the guide chute is formed in the side wall of the vertical plate, and one end of the fixed rotating shaft is slidably connected to the inner side wall of the guide chute.
In at least some embodiments, the side walls of the first sliding sleeve and the second sliding sleeve are respectively provided with a roller for sliding on the double-layer support guide rail, and the side wall of the second sliding sleeve is provided with a pulley for sliding along the bottom of the double-layer support guide rail.
In at least some embodiments, the inner side wall of the first sliding sleeve is fixedly connected with an anti-falling sliding rod for preventing the first sliding sleeve from sliding on the double-layer supporting guide rail.
In at least some embodiments, two nozzles arranged in a central symmetry manner are fixedly communicated on the outer side wall of the air nozzle, and one end of the hollow clamping rod is fixedly communicated with the clamping opening.
Compared with the prior art, the application has the advantages and positive effects that,
1. according to the application, in the process of cleaning the photomask in the cleaning pool, the hollow clamping rod and the gourd-shaped clamping piece are used for clamping the photomask in the reciprocating driving structure, the first sliding sleeve slides on the double-layer supporting guide rail to drive the photomask to swing back and forth in the cleaning pool, meanwhile, the air injection pipe rotates along the outer part of the gourd-shaped clamping piece under the action of the transmission structure, the air injected by the air injection pipe forms bubbles in the cleaning solution, the port of the air injection pipe is positioned on the central axis of the gourd-shaped clamping piece, the air is injected into the photomask from the upper side or the lower side of the photomask, and the injected air forms air columns and a large number of fine bubbles to flush the surface of the photomask in the solution.
2. According to the application, by arranging the clamping cylinder, the inner buckling sliding rail, the inner buckling sliding plate, the side pulleys and the longitudinal distance adjusting structure, on the basis that the clamping cylinder pulls the first sliding sleeve to drive the hollow clamping rod and the calabash-shaped clamping piece to adjust the clamping range, the hollow clamping rod is pulled to slide in the inner buckling sliding rail through the telescopic rod and the pull rod, the distance between the hollow clamping rod or the calabash-shaped clamping piece is adjusted, the clamping width of the clamped photomask plate is adjusted, the second sliding sleeve is movably hinged to one side of the first sliding sleeve and is abutted against the bottom of the double-layer supporting guide rail through the roller, the horizontal state of the hollow clamping rod is kept, the second sliding sleeve is pushed away from the double-layer supporting guide rail, the mechanical arm is controlled to rotate ninety degrees in the vertical direction through the mechanical arm, the second sliding sleeve and the inner buckling sliding rail are inclined and are parallel to the double-layer supporting guide rail under the action of gravity, the hollow clamping rod and the calabash-shaped clamping piece can be turned to the vertical state when the hollow clamping rod and the calabash-shaped clamping piece are pulled to slide along the double-layer supporting guide rail through the clamping cylinder, the inner concave part of the calabash-shaped clamping piece is used for clamping the photomask plate, the length adjusting range of the clamped photomask plate can be further enlarged, the clamped, the photomask plate can be adjusted, the photomask plate can be flexibly adjusted, and the photomask plate can be clamped to different sizes, and the photomask plate can be used for feeding photomask plate.
Drawings
Fig. 1 is a schematic perspective view of a loading and unloading manipulator for cleaning a photomask according to the present application;
fig. 2 is a schematic structural view of a double-layer support rail and a first sliding sleeve in a loading and unloading manipulator for cleaning a photomask;
fig. 3 is a schematic structural diagram of a longitudinal spacing adjustment structure in a loading and unloading manipulator for cleaning a photomask according to the present application;
fig. 4 is a schematic diagram of a connection relationship between a first sliding sleeve and a second sliding sleeve in a loading and unloading manipulator for cleaning a photomask according to the present application;
FIG. 5 is an exploded view of the inner snap slide rail and the rotary drum of the loading and unloading manipulator for cleaning a photomask plate according to the present application;
FIG. 6 is an exploded view showing the transmission structure of the loading and unloading manipulator for cleaning a photomask according to the present application;
fig. 7 is a schematic structural diagram of a loading and unloading manipulator for cleaning a photomask according to the present application;
FIG. 8 is an exploded view showing a reciprocating drive mechanism in a loading and unloading robot for cleaning a photomask according to the present application;
fig. 9 is a schematic structural view of an air ejector tube in a loading and unloading manipulator for cleaning a photomask.
Legend description: 1. a connecting pipe; 11. a support substrate; 12. a transverse sliding sleeve;
2. a double-layer support rail;
3. a clamping cylinder; 31. a first sliding sleeve; 32. a second sliding sleeve;
4. an inner buckle sliding rail; 41. an inner buckle sliding plate; 42. a side pulley;
5. a hollow clamping rod;
6. a gourd-shaped clamping member; 61. a clamping opening; 62. a gas lance; 63. a spout; 64. an air inlet pipe; 65. a rotating drum; 66. a vent pipe; 67. attaching a swivel;
7. a transmission structure; 71. a support housing; 72. a transmission rod; 73. a sliding cylinder is hidden inside; 74. a bevel gear; 75. a transmission gear; 76. fluted disc; 77. a diagonal rod; 78. a drive motor;
8. a longitudinal spacing adjustment structure; 81. a vertical plate; 82. a telescopic rod; 83. a pull rod; 84. fixing the rotating shaft; 85. a guide chute;
9. a reciprocating drive structure; 91. a driving motor; 92. a turntable; 93. an eccentric rotating rod; 94. and a transmission chute.
Detailed Description
In order that the above objects, features and advantages of the application will be more clearly understood, a further description of the application will be rendered by reference to the appended drawings and examples. It should be noted that, without conflict, the embodiments of the present application and features in the embodiments may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced otherwise than as described herein, and therefore the present application is not limited to the specific embodiments of the disclosure that follow.
In the process that unloading manipulator participated in cleaning work is used to photomask washs, only participate in generally putting in the photomask to wash the pond or take out and use, the mask is in idle state because can't participate in the effective supplementary cleaning work of photomask in the washing pond that carries out solution washs, it is idle and extravagant to make the resource, and conventional manipulator utilizes the cylinder that the centre gripping used to carry out the regulation of centre gripping scope generally, when carrying out the photomask cleaning operation of unconventional size, the manipulator still needs to carry out whole adjustment, accommodation is little.
Therefore, the embodiment of the application provides a loading and unloading manipulator for cleaning a photomask, which is at least aimed at participating in the cleaning work of an auxiliary photomask, so that the manipulator can shake reciprocally in a cleaning pool, and the surface of the photomask is impacted and rubbed with an air column, air bubbles and a solution by utilizing a large amount of air bubbles generated by jetting air in the shaking process, so that the efficiency of cleaning colloid is accelerated, the cleaning work of the photomask is accelerated, the length range of clamping the photomask can be further enlarged, the clamping size can be flexibly adjusted, and the manipulator is suitable for loading and unloading photomasks with different sizes.
Example 1
According to fig. 1-9, as shown in fig. 1, the feeding and discharging manipulator for cleaning a photomask plate provided by the embodiment of the application comprises a connecting pipe 1 and a supporting substrate 11 fixedly installed at the bottom of the connecting pipe, wherein the connecting pipe 1 is a connecting piece for installing the manipulator on the mechanical arm (the mechanical arm is an existing device, the specific details are not repeated here), a transverse sliding sleeve 12 is sleeved on the outer side wall of the supporting substrate 11 in a sliding manner, two sides of the supporting substrate 11 are fixedly connected with a double-layer supporting guide rail 2, a first sliding sleeve 31 is sleeved on the outer side wall of the double-layer supporting guide rail 2 in a sliding manner, a second sliding sleeve 32 capable of sliding on the double-layer supporting guide rail 2 is hinged on the outer side wall of the first sliding sleeve 31, a clamping cylinder 3 is fixedly connected between the transverse sliding sleeve 12 and the bottom of the first sliding sleeve 31, two sides of the second sliding sleeve 32 are fixedly provided with inner buckles 4, hollow clamping rods 5 are sleeved on the inner side walls of the inner sliding rails 4 in a sliding manner, two side walls of the hollow sliding sleeves 5 are fixedly provided with a hollow block 6, one end of the hollow block 6 is fixedly provided with a clamping groove 6, and a distance between two reciprocating blocks 6 are arranged on the two end surfaces of the hollow block 6 is used for adjusting a longitudinal clamp structure 3, and one end of the hollow block 31 is provided with a gap 9;
the outer side walls of the calabash-shaped clamping pieces 6 are all in sliding sleeve connection with the air ejector tubes 62, as shown in fig. 1 and 9, the air ejector tubes 62 are all in inclined arrangement, when the end openings of the inner buckling sliding rails 4 are far away from each other, when the photomask is clamped by the clamping openings 61, inclined one ends stagger the plane where the photomask is located, the plane where the end openings of the air ejector tubes 62 are located in the rotating process of the air ejector tubes 62 is located on one side of the clamped photomask, the air ejector tubes 62 are prevented from colliding with the photomask, the shape of the air ejector tubes 62 is similar to the outline of the calabash-shaped clamping pieces 6, so that the positions, close to the tail ends of the calabash-shaped clamping pieces 6, of the air ejector tubes 62 are inclined towards the clamping openings 61, when the two end openings of the air ejector tubes 62 are respectively rotated to the upper surface and the lower surface of the photomask, air columns formed by gas introduced by the clamping rods 5 are respectively inclined towards the upper surface and the lower surface of the air ejector tubes 62, the outer side walls of the air ejector tubes 62 are all communicated with the hollow clamping rods 5, and the hollow clamping rods 5 are fixedly arranged between the two adjacent clamping rods 5, and the hollow clamping rods 62 are fixedly provided with a transmission structure 7 for controlling rotation of the air ejector tubes 62.
As shown in fig. 8, the reciprocating driving structure 9 includes a driving motor 91, a turntable 92, an eccentric rotating rod 93 and a transmission chute 94, where two turntable 92 are provided, one turntable 92 is fixedly connected to an output end of the driving motor 91, and the other turntable 92 is rotatably connected to an upper surface of the double-layer support rail 2, the eccentric rotating rod 93 is fixedly connected between the two turntable 92, the transmission chute 94 is provided on an outer side wall of the transverse sliding sleeve 12, the eccentric rotating rod 93 is slidably connected inside the transmission chute 94, the driving motor 91 is fixedly connected on an outer side wall of the connecting pipe 1, after the driving motor 91 is started, by driving the turntable 92 and the eccentric rotating rod 93 to do circular motion, the eccentric rotating rod 93 drives the transverse sliding sleeve 12 to reciprocate on the supporting substrate 11 through sliding in the transmission chute 94, and simultaneously drives the first sliding sleeve 31 and the second sliding sleeve 32 to do reciprocating motion through the clamping cylinder 3, so as to drive the photomask clamped by the clamping port 61 or the gourd-shaped clamping piece 6 to do reciprocating motion, and the photomask moves in solution, so as to accelerate cleaning efficiency through friction with the solution;
as shown in fig. 5, the outer side walls of the hollow clamping rods 5 are rotatably sleeved with a rotary drum 65, the rod walls of the hollow clamping rods 5, which are positioned in the rotary drum 65, are provided with vent holes, vent pipes 66 are fixedly communicated between the rotary drum 65 and the outer side walls of the air ejector tubes 62, the outer side walls of the hollow clamping rods 5 are fixedly communicated with air inlet pipes 64 for introducing air into the hollow clamping rods 5, the air inlet pipes 64 ventilate the hollow clamping rods 5 in the rotating process of the air ejector tubes 62, the air in the hollow clamping rods 5 enters the rotary drum 65 through the vent holes, so that the air enters the air ejector tubes 62 through the rotary drum 65 and the vent pipes 66, and when the air ejector tubes 62 rotate, the rotary drum 65 is driven to rotate on the outer side walls of the hollow clamping rods 5 through the vent pipes 66, and the hollow clamping rods 5 can still keep supplying air to the air ejector tubes 62 through the rotary drum 65 and the vent pipes 66;
referring to fig. 3 and 6, the transmission structure 7 includes a support housing 71, a transmission rod 72, a built-in sliding cylinder 73, a conical gear 74, a transmission gear 75, a fluted disc 76, a diagonal rod 77 and a transmission motor 78, wherein the support housing 71 is fixedly connected to the outer side wall of the hollow clamping rod 5 on the same side, the transmission rods 72 are rotatably connected to the two sides of the support housing 71, the built-in sliding cylinder 73 is slidably sleeved at the end of the transmission rod 72 close to each other, the built-in sliding cylinder 73 is rotatably connected to the outer side wall of the second sliding sleeve 32, the conical gear 74 is mounted on the inner side wall of the support housing 71 and the conical gear 74 mounted on the inner side wall of the support housing 71, the fluted disc 76 is rotatably sleeved on the outer side wall of the hollow clamping rod 5, the fluted disc 76 is in sealed rotation and sleeved on the side wall of the supporting shell 71, the fluted disc 76 is in meshed connection with the transmission gear 75, the inclined rods 77 are fixedly connected between the fluted disc 76 and the air spraying pipe 62, the transmission motor 78 is started in the cleaning process, the two transmission rods 72 can synchronously rotate through the built-in sliding cylinder 73, the meshed transmission of the two bevel gears 74 and the meshed transmission of the transmission gear 75 and the fluted disc 76 drive the fluted disc 76 to rotate on the outer side wall of the hollow clamping rod 5, namely the air spraying pipe 62 and the attaching swivel 67 are driven to rotate by taking the outer side wall of the hollow clamping rod 5 as the axis, when the air spraying pipe 62 is driven to rotate through the end opening, the opening of one end is inclined upwards, the opening of the other end is inclined downwards, after the direction of the opening is changed, the air column and a large number of bubbles sprayed in the solution from the end opening impact the upper surface and the lower surface of the photomask at different angles, the surface colloid is quickened to be cleaned.
As shown in fig. 2 and fig. 3, the side walls of the first sliding sleeve 31 and the second sliding sleeve 32 are respectively provided with a roller for sliding on the double-layer support rail 2, and the side wall of the second sliding sleeve 32 is provided with a pulley for sliding along the bottom of the double-layer support rail 2, so that the first sliding sleeve 31 and the second sliding sleeve 32 can slide conveniently when the cylinder 3 is clamped, and simultaneously the second sliding sleeve 32 can slide against the bottom of the double-layer support rail 2 conveniently; as shown in fig. 2, the inner side wall of the first sliding sleeve 31 is fixedly connected with an anti-drop sliding rod for preventing the first sliding sleeve from sliding off the double-layer supporting rail 2.
In this embodiment, when a photomask is required to be clamped for loading, the clamping cylinder 3 on the supporting substrate 11 pulls the first sliding sleeve 31 and the second sliding sleeve 32 to slide along the outer side wall of the double-layer supporting rail 2 until the clamping opening 61 clamps the side surface of the photomask, the manipulator is controlled to move by the mechanical arm to place the photomask in the cleaning pool to clean the surface colloid, the driving motor 91 is started, the output end of the driving motor drives the turntable 92 and the eccentric rotating rod 93 to rotate, and as the transverse sliding sleeve 12 is in sliding sleeve connection with the outer side wall of the supporting substrate 11, the first sliding sleeve 31 connected with the output end of the clamping cylinder 3 is in sliding sleeve connection with the outer side wall of the double-layer supporting rail 2, so that the sliding direction of the transverse sliding sleeve 12 is limited, and when the eccentric rotating rod 93 rotates, the transverse sliding sleeve 12 is driven to reciprocate outside the supporting substrate 11, the first sliding sleeve 31 is pulled by the clamping cylinder 3 to reciprocate on the double-layer supporting rail 2, and the two first sliding sleeves 31 reciprocate with the hollow clamping rod 5 through the inner buckling sliding rail 4, so that the photomask and the surface is rubbed with the solution, and the cleaning efficiency of the photomask is improved;
while the photomask plate reciprocates in the solution, nitrogen is added into the air inlet pipe 64, the air inlet pipe 64 guides the nitrogen into the hollow clamping rod 5, the hollow clamping rod 5 enters the rotary drum 65 through the air holes and is guided into the air spraying pipe 62 through the air pipe 66, meanwhile, the transmission motor 78 is started, the transmission motor 78 drives the transmission rod 72 to rotate, the transmission rod 72 drives the other transmission rod 72 to synchronously rotate through the built-in sliding drum 73, the transmission rod 72 synchronously drives the fluted disc 76 on the two hollow clamping rods 5 on the same side to rotate through the bevel gear 74 and the transmission gear 75, the fluted disc 76 drives the air spraying pipe 62 and the attaching rotary ring 67 to rotate along the central axis of the gourd-shaped clamping piece 6 through the inclined rod 77, the end opening of the air spraying pipe 62 sprays nitrogen in the solution to form air columns and a large number of bubbles sprayed in the inclined direction, and because the photomask plate clamped by the clamping opening 61 is positioned at the central axis of the hollow clamping rod 5, therefore, when the air ejector tube 62 rotates, the height of the opening at the end part of the air ejector tube 62 relative to the photomask and the angle of the opening at the end part of the air ejector tube relative to the photomask are updated at all times, when the opening at the end part of the air ejector tube 62 is positioned below the photomask, an upward-inclined nitrogen gas column is ejected to the photomask, when the opening of the air ejector tube 62 is positioned above the photomask, an downward-inclined nitrogen gas column is ejected to the photomask, the ejection angle of the gas column is changed along with the rotation time of the air ejector tube 62, the range of the ejection angle of the gas column is wide, the gas column and a large amount of generated bubbles impact the surface of the photomask, the gas column continuously brings new solution into impact to the surface of the photomask along with the reciprocating movement of the gourd-shaped clamping piece 6 and the rotation time updating of the air ejector tube 62, the photomask is reciprocated, the surface of the photomask is enabled to be rubbed with the new solution continuously, the colloid on the surface of the photomask is cleaned, the efficiency of photomask cleaning is improved, in the clearance process of loading and unloading the photomask, the photomask cleaning device can participate in the cleaning content of the photomask, effectively assist the photomask cleaning work, and improve the photomask cleaning efficiency.
Example 2
For example, in fig. 2, fig. 5 and fig. 8, based on the same concept of the above embodiment 1, the difference is that, as shown in fig. 2 and fig. 8, the longitudinal spacing adjusting structure 8 includes a vertical plate 81, a telescopic rod 82, a pull rod 83, a fixed rotating shaft 84 and a guiding chute 85, the vertical plate 81 is fixedly connected to the outer side wall of the second sliding sleeve 32, a gap adapted to the vertical plate 81 is provided on the side wall of the double-layer supporting rail 2, the telescopic rod 82 is mounted on the outer side wall of the vertical plate 81, the output end of the telescopic rod 82 is fixedly connected with the fixed rotating shaft 84, two pull rods 83 are provided, one ends of the two pull rods 83 are rotatably sleeved on the outer side wall of the fixed rotating shaft 84, one ends of the pull rods 83 far from the fixed rotating shaft 84 are rotatably sleeved on the outer side walls of the two hollow clamping rods 5, the guiding chute 85 is opened on the side wall of the vertical plate 81, one end of the fixed rotating shaft 84 is slidably connected to the inner side wall of the guiding chute 85, the guiding chute 85 is located at a middle position between the two hollow clamping rods 5, and the fixed rotating shaft 84 is prevented from being inclined uniformly by the two sides of the fixed rotating shaft 83 when the fixed rotating shaft 84 is provided; as shown in fig. 5, two inner buckle sliding plates 41 are fixedly connected to the outer side wall of the hollow clamping rod 5, the hollow clamping rod 5 is slidably sleeved on the inner side wall of the inner buckle sliding rail 4 through the two inner buckle sliding plates 41, two symmetrically arranged side pulleys 42 are fixedly connected to the outer side wall of the hollow clamping rod 5, the side pulleys 42 are respectively contacted with the upper side and the lower side of the inner buckle sliding rail 4, and the side pulleys 42 and the inner buckle sliding plates 41 on the two sides strengthen the stability of the hollow clamping rod 5 when the inner buckle sliding rail 4 slides.
In this embodiment, when a photomask of a conventional size is clamped, the first sliding sleeve 31 is driven to slide along the outer portion of the double-layer support rail 2 by controlling the expansion and contraction of the clamping cylinder 3, the top of the second sliding sleeve 32 is driven to slide along the bottom of the double-layer support rail 2 by the roller, and the distance between the two side clamping openings 61 can be adjusted to adapt to the conventional size of the clamped photomask, when the required clamping size exceeds the clamping range by the expansion and contraction adjustment of the clamping opening 61 of the clamping cylinder 3, the clamping cylinder 3 is started to push the second sliding sleeve 32 to be separated from the double-layer support rail 2, then in the vertical direction, the mechanical arm is controlled to drive the mechanical arm to rotate ninety degrees in the vertical direction, under the action of gravity, the second sliding sleeve 32 and the inner buckling sliding rail 4 rotate ninety degrees on one side of the first sliding sleeve 31 by the hinge, the second sliding sleeve 32 is parallel to the double-layer support guide rail 2, the output end of the clamping cylinder 3 is controlled to pull the first sliding sleeve 31 and the second sliding sleeve 32 to slide along the outer side wall of the double-layer support guide rail 2 in the direction close to the connecting pipe 1, the second sliding sleeve 32 is in sliding sleeve connection with the outer side wall of the double-layer support guide rail 2, the second sliding sleeve 32 drives the hollow clamping rod 5 to rotate ninety degrees in the vertical direction through the inner buckling sliding rail 4, the part space occupied by the hollow clamping rod 5 in the horizontal direction before ninety degrees of rotation is increased to be the movable space after the gourd-shaped clamping piece 6 rotates to be in the vertical state, when the hollow clamping rod 5 is driven to slide through the clamping cylinder 3, the gourd-shaped clamping piece 6 can move in the increased space, and a photomask exceeding the conventional size is clamped through the inner concave of the gourd-shaped clamping piece 6, the size range of the manipulator for grabbing the photomask can be increased by changing the position of the second sliding sleeve 32;
when clamping photomasks of different sizes, the vertical plate 81 is started to push the fixed rotating shaft 84 to slide on the vertical plate 81 along the guide sliding groove 85, the two hollow clamping rods 5 are pulled to be separated from each other through the fixed rotating shaft 84 and the pull rod 83, the hollow clamping rods 5 slide in the inner buckling sliding rail 4 through the inner buckling sliding plate 41, the sliding relation between the hollow clamping rods 5 and the inner buckling sliding rail 4 is reinforced through the side pulleys 42 on two sides, the hollow clamping rods 5 can slide on the inner buckling sliding rail 4 stably, the output end of the vertical plate 81 is controlled to stretch and retract, and the distance between the two hollow clamping rods 5, namely the distance between the two gourd-shaped clamping pieces 6 or the two clamping openings 61, can be adjusted to adapt to clamping photomasks of different sizes, and the photomasks of different sizes can be flexibly adjusted.
Example 3
As shown in fig. 5 and 9, based on the same concept of the above embodiment 1, the difference is that the inner side walls of the air nozzles 62 are fixedly connected with a fitting swivel 67, one ends of the fitting swivel 67 are rotatably sleeved on the outer side walls of the hollow clamping rods 5, the fitting swivel 67 is slidably sleeved on the outer side walls of the gourd-shaped clamping pieces 6, the fitting swivel 67 is used for supporting the air nozzles 62, so that the stability of the air nozzles during rotation is enhanced, and meanwhile, the self-cleaning of the surfaces of the gourd-shaped clamping pieces 6 can be completed in solution; as shown in fig. 5 and 9, two nozzles 63 arranged in central symmetry are fixedly connected to the outer side wall of the air nozzle 62, as shown in fig. 1, one end of the hollow clamping rod 5 is fixedly connected to the clamping opening 61, the connection part between the clamping opening 61 and the hollow clamping rod 5 can be covered when the photomask is clamped through the clamping opening 61, air leakage is avoided, and when the photomask is transferred from the wiping frame by using a mechanical arm, drying efficiency of surfaces of the gourd-shaped clamping piece 6 and the clamping opening 61 can be accelerated by gas sprayed out from the hollow clamping rod 5, the clamping opening 61 and the nozzles 63.
In this embodiment, the air ejector 62 is rotationally sleeved on the outer sidewall of the hollow clamping rod 5 through the attaching swivel 67, and slides along the surface of the gourd-shaped clamping member 6, so that on one hand, the rotating state of the air ejector 62 is further stabilized, on the other hand, the attaching swivel 67 slides along the surface of the gourd-shaped clamping member 6 when rotating in a solution, and the surface of the scraping gourd-shaped clamping member 6 has self-cleaning capability.
The present application is not limited to the above embodiments, and any equivalent embodiments which can be changed or modified by the technical disclosure described above can be applied to other fields, but any simple modification, equivalent changes and modification to the above embodiments according to the technical matter of the present application will still fall within the protection scope of the technical disclosure.
Claims (10)
1. The utility model provides a unloading manipulator is gone up in photomask version washs, includes connecting pipe (1) and support base plate (11) of its bottom installation, its characterized in that: the device comprises a support substrate (11), wherein a transverse sliding sleeve (12) is sleeved on the outer side wall of the support substrate (11) in a sliding manner, double-layer support guide rails (2) are fixedly connected to the two sides of the support substrate (11), a first sliding sleeve (31) is sleeved on the outer side wall of the double-layer support guide rails (2) in a sliding manner, a second sliding sleeve (32) capable of sliding on the double-layer support guide rails (2) is hinged on the outer side wall of the first sliding sleeve (31), a clamping cylinder (3) is fixedly connected between the transverse sliding sleeve (12) and the bottom of the first sliding sleeve (31), inner buckling sliding rails (4) are fixedly installed on the two sides of the second sliding sleeve (32), hollow clamping rods (5) are fixedly sleeved on the inner side walls of the inner buckling sliding rails (4), gourd-shaped clamping pieces (6) are fixedly sleeved on the outer side walls of the hollow clamping rods (5), clamping ports (61) are formed in one end of the gourd-shaped clamping pieces (6), a reciprocating driving structure (9) for controlling the first sliding sleeve (31) to reciprocate is installed on the outer side wall of the second sliding sleeve (31), and a longitudinal spacing distance between the two hollow clamping rods (8) is adjusted;
the outer side walls of the calabash-shaped clamping pieces (6) are respectively and slidably sleeved with an air ejector tube (62), the air ejector tubes (62) are respectively and obliquely arranged, the outer side walls of the air ejector tubes (62) are respectively communicated with the hollow clamping rods (5), and a transmission structure (7) for controlling the air ejector tubes (62) to rotate is fixedly arranged between every two adjacent hollow clamping rods (5).
2. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the inner side wall of the air nozzle (62) is fixedly connected with a fitting swivel (67), one end of the fitting swivel (67) is rotationally sleeved on the outer side wall of the hollow clamping rod (5), and the fitting swivel (67) is slidably sleeved on the outer side wall of the gourd-shaped clamping piece (6).
3. The photomask cleaning loading and unloading manipulator of claim 1, wherein: reciprocating drive structure (9) are including driving motor (91), carousel (92), eccentric rotary rod (93) and transmission spout (94), carousel (92) are provided with two, one carousel (92) fixed connection is on the output of driving motor (91), and another carousel (92) rotate and connect the upper surface at double-deck support rail (2), eccentric rotary rod (93) rigid coupling is between two carousel (92), on the lateral wall of horizontal sliding sleeve (12) is seted up in transmission spout (94), eccentric rotary rod (93) sliding connection is in the inside of transmission spout (94), driving motor (91) rigid coupling is on the lateral wall of connecting pipe (1).
4. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the rotary cylinder (65) has all been rotated on the lateral wall of hollow clamping rod (5), the air vent has been seted up on the inside pole wall of rotary cylinder (65) in hollow clamping rod (5), fixed intercommunication has breather pipe (66) between the lateral wall of rotary cylinder (65) and jet-propelled pipe (62), all fixed intercommunication has on the lateral wall of hollow clamping rod (5) be used for to its inside intake pipe (64) of letting in gas.
5. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the transmission structure (7) comprises a support shell (71), a transmission rod (72), an inner sliding cylinder (73), conical gears (74), transmission gears (75), fluted discs (76), inclined rods (77) and a transmission motor (78), wherein the same side of the transmission rod is fixedly connected with the support shell (71) on the outer side wall of the hollow clamping rod (5), the two transmission rods (72) are connected to one side, close to each other, of the support shell (71) in a rotating mode, the inner sliding cylinder (73) is connected to the outer side wall of the second sliding sleeve (32) in a rotating mode in a sliding mode, the transmission rods (72) are located on one end, inside the support shell (71), of the inner side wall of the support shell (71), the conical gears (74) are all coaxially arranged on the inner side wall of the support shell (71), the transmission gears (75) are all sleeved on the outer side wall of the hollow clamping rod (5) in a rotating mode in a sleeved mode, the fluted discs (76) are all connected to the outer side wall of the support shell (71) in a rotating mode in a sealing mode, and meshed mode with the fluted discs (76) are meshed with the toothed discs (76) in the inner side wall of the support shell (71).
6. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the hollow clamping rod is characterized in that two inner buckling sliding plates (41) are fixedly connected to the outer side wall of the hollow clamping rod (5), the hollow clamping rod (5) is sleeved on the inner side wall of the inner buckling sliding rail (4) in a sliding manner through the two inner buckling sliding plates (41), two symmetrical side position pulleys (42) are fixedly connected to the outer side wall of the hollow clamping rod (5), and the side position pulleys (42) are respectively contacted with the upper side and the lower side of the inner buckling sliding rail (4).
7. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the utility model provides a vertical interval adjusting structure (8) includes riser (81), telescopic link (82), pull rod (83), fixed pivot (84) and direction spout (85), riser (81) fixed connection is on the lateral wall of No. two sliding sleeves (32), be provided with the clearance of adaptation riser (81) on the lateral wall of double-deck support rail (2), install on the lateral wall of riser (81) telescopic link (82), the output and the fixed pivot (84) fixed connection of telescopic link (82), pull rod (83) are provided with two, two the one end of pull rod (83) is all rotated and is cup jointed on the lateral wall of fixed pivot (84), the one end that fixed pivot (84) was kept away from to pull rod (83) is rotated respectively and is cup jointed on the lateral wall of two hollow clamping bars (5), direction spout (85) are seted up on the lateral wall of riser (81), the one end sliding connection of fixed pivot (84) is on the inside wall of direction spout (85).
8. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the side walls of the first sliding sleeve (31) and the second sliding sleeve (32) are respectively provided with a roller used for sliding on the double-layer supporting guide rail (2), and the side wall of the second sliding sleeve (32) is provided with a pulley used for sliding along the bottom of the double-layer supporting guide rail (2).
9. The photomask cleaning loading and unloading manipulator of claim 1, wherein: the anti-falling sliding rod used for preventing the sliding sleeve I from sliding on the double-layer supporting guide rail (2) is fixedly connected to the inner side wall of the sliding sleeve I (31).
10. The photomask cleaning loading and unloading manipulator of claim 1, wherein: two nozzles (63) which are arranged in a central symmetry manner are fixedly communicated with the outer side wall of the air ejector tube (62), and one end of the hollow clamping rod (5) is fixedly communicated with the clamping opening (61).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310776940.9A CN116494270B (en) | 2023-06-29 | 2023-06-29 | Unloading manipulator is washd with going up to photomask version |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310776940.9A CN116494270B (en) | 2023-06-29 | 2023-06-29 | Unloading manipulator is washd with going up to photomask version |
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| CN116494270A CN116494270A (en) | 2023-07-28 |
| CN116494270B true CN116494270B (en) | 2023-09-12 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102018206278A1 (en) * | 2018-04-24 | 2019-10-24 | Carl Zeiss Smt Gmbh | Method and apparatus for removing a particle from a photolithographic mask |
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| JP2006268043A (en) * | 2005-03-21 | 2006-10-05 | Pkl Co Ltd | Photomask washing device and washing method |
| KR20060010858A (en) * | 2006-01-10 | 2006-02-02 | 코리아테크노(주) | Photomask position controlling apparatus |
| CN104380456A (en) * | 2012-06-15 | 2015-02-25 | 斯克林集团公司 | Substrate inverting apparatus and substrate processing apparatus |
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| CN116494270A (en) | 2023-07-28 |
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