CN217911829U

CN217911829U - Full-automatic photomask plate cleaning machine

Info

Publication number: CN217911829U
Application number: CN202222024516.2U
Authority: CN
Inventors: 王炫铭; 王伟; 王静
Original assignee: Suzhou Antaifeng Technology Co ltd
Current assignee: Suzhou Antaifeng Technology Co ltd
Priority date: 2022-08-02
Filing date: 2022-08-02
Publication date: 2022-11-29
Anticipated expiration: 2032-08-02

Abstract

The utility model discloses a full-automatic photomask plate cleaning machine, which comprises a machine table, wherein two mounting frames which are distributed in parallel are arranged inside the machine table, a plurality of water tanks are arranged on the two mounting frames, a plurality of rolling shafts which are distributed in parallel and used for conveying photomask plates are arranged between the two mounting frames, and the plurality of rolling shafts sequentially pass through the plurality of water tanks; all be provided with a plurality of spray set and a plurality of automatically regulated round brush device on every basin, and the both sides of every automatically regulated round brush device all are provided with compression roller axle subassembly and gluey roller axle subassembly, and the top and the below of roller bearing all are provided with a plurality of air knife subassemblies that are used for getting rid of photomask plate surface water stain in every basin, spray set distribute in the top and the below of roller bearing in the basin. The utility model discloses can wash and air-dry the photomask plate to guarantee the smooth finish on photomask plate surface, the degree of automation of cleaning machine is high, greatly reduces workman's intensity of labour, improves the cleaning operation efficiency of photomask plate.

Description

Full-automatic photomask plate cleaning machine

Technical Field

The utility model relates to a cleaning machine technical field, especially a full-automatic photomask plate cleaning machine.

Background

In the production process of semiconductors, a consumable material, namely a photomask plate, is needed, and the photomask plate is a hard-surface photomask material, namely a photomask substrate, which is a mainstream photosensitive material (equivalent to photosensitive film for photography) for the current and future fine processing of photomasks. The chromium film base plate is formed by depositing a chromium nitride-chromium oxynitride film on a flat and high-finish glass base plate through direct current magnetron Sputtering (SP), and a photoresist (also called photoresist) or an electron beam resist is coated on the chromium film base plate to prepare a photoresist-homogenized chromium plate.

Because the smooth finish requirement of photomask plate to its surface when using is higher, therefore photomask plate need wash its surface processing completion, adopt artificial mode to wash photomask plate's surface usually, but this kind of efficiency is too low, also adopt cleaning equipment to wash, but the degree of automation of equipment is not high, still need extra mechanical equipment to handle photomask plate's water stain after the washing is accomplished, otherwise the water stain that leaves after waiting the water stain drying also has an influence to photomask plate's use, consequently need research and development a cleaning machine that collects washing and drying in an organic whole that degree of automation is high and wash photomask plate.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem and designing a full-automatic photomask plate cleaning machine.

The technical scheme of the utility model is that the full-automatic photomask plate cleaning machine comprises a machine table, wherein two mounting frames which are distributed in parallel are arranged inside the machine table, a plurality of water tanks are arranged on the two mounting frames, a plurality of rolling shafts which are distributed in parallel and used for conveying photomask plates are arranged between the two mounting frames, and the plurality of rolling shafts sequentially pass through the plurality of water tanks;

all be provided with a plurality of spray set and a plurality of automatically regulated round brush device on every basin, and the both sides of every automatically regulated round brush device all are provided with compression roller axle subassembly and gluey roller axle subassembly, and the top and the below of roller bearing all are provided with a plurality of air knife subassemblies that are used for getting rid of photomask plate surface water stain in every basin, spray set distribute in the top and the below of roller bearing in the basin.

As a further supplement, each automatic adjusting rolling brush device comprises two rolling brush components, and the two rolling brush components are symmetrically distributed up and down relative to the rolling shaft.

As a further supplement, the round brush subassembly includes the transfer line, the both ends of transfer line are provided with first fixing base and second fixing base respectively, just all be provided with the mounting panel on first fixing base and the second fixing base, and the side both sides of every mounting panel all are provided with the slide rail, and sliding connection has the slide on the slide rail.

As the utility model discloses a further supplement, install drive motor on the first fixing base, the transfer line with the drive motor transmission is connected, just is in the both ends of transfer line all are provided with bevel gear, be provided with the support on the mounting panel, be provided with ball bearing on the support, ball bearing goes up to rotate and is connected with the lead screw, the lower extreme of lead screw is provided with bevel gear, just the bevel gear of lead screw lower extreme with the bevel gear meshing of transfer line tip, the upper end of lead screw with slide transmission connects, through the drive motor drive the transfer line rotates to it rotates to drive the lead screw by bevel gear to drive the slide and be elevating movement along the guide rail.

As a further supplement, be provided with the pivot directly over the transfer line, the both ends of pivot are rotated with the slide at transfer line both ends respectively and are connected, are close to be provided with the motor mount pad on the slide on the first fixing base, be provided with the rotation motor on the motor mount pad, rotate the motor with connect through the gear piece meshing between the pivot, be provided with the cylinder brush in the pivot.

As a further supplement, the bottom of each water tank is provided with a water outlet, and the water outlet is connected with the drainage pipeline assembly arranged at the bottom of the machine platform through a pipeline.

As the utility model discloses a further supplement, the inside of board is provided with water tank, filter assembly and water pump, the water pump passes through the pipeline and is connected with water tank and filter assembly respectively, filter assembly pass through the pipeline with spray set connects.

Its beneficial effects lie in, the utility model discloses in the smooth mask plate passes through the roller bearing and carries the basin, spray set in the basin can spray water respectively to the two sides of mask plate, then wash the dirt on mask plate surface through the cylinder brush, air-dry the water stain on mask plate surface through air knife tackle spare after that, the above-mentioned process of repetition twice altogether, consequently, can guarantee the smooth finish on mask plate surface, and also can not have the water stain to remain, the degree of automation of cleaning machine is high, can greatly reduce workman's intensity of labour, effectively improve mask plate's cleaning operation efficiency.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the bottom structure of the machine table of the present invention;

FIG. 3 is a schematic view of the structure of the middle water tank of the present invention;

fig. 4 is a schematic structural view of the automatic rolling brush adjusting device of the present invention;

fig. 5 is a schematic structural view of the middle rolling brush assembly of the present invention.

In the figure, 1, a machine; 2. a spraying device; 3. automatically adjusting the rolling brush device; 31. a roll brush assembly; 311. A first fixed seat; 312. mounting a plate; 313. a transmission rod; 314. a drive motor; 315. a guide rail; 316. a slide plate; 317. a support; 318. a screw rod; 319. a rotating shaft; 320. a roller brush; 321. a motor mounting base; 322. rotating the motor; 323. a second fixed seat; 4. a wind knife assembly; 5. a drain pipe assembly; 6. a water tank; 7. a water pump; 8. a filter assembly; 9. a mounting frame; 10. a water tank; 11. and (4) rolling.

Detailed Description

First, explain the utility model discloses an original intention, because present photomask plate's cleaning work adopts artifical or semi-automatization mechanical equipment to wash mostly, the cleaning performance is not very ideal, and it is not timely to wash the completion back in addition, and there is the water mark on photomask plate's surface can, influences photomask plate's result of use, consequently in order to solve above-mentioned problem, the utility model provides a full-automatic photomask plate cleaning machine.

The utility model discloses it is right that combine the attached drawing below the utility model discloses it is specific to describe the utility model, as shown in fig. 1 and fig. 3, this cleaning machine mainly by board 1, set up in the inside transport assembly of board 1, basin 10, spray set 2, automatically regulated brush roll device 3, parts such as air knife subassembly 4 constitute, wherein transport assembly mainly comprises two parallel distribution's mounting bracket 9, and set up subassembly such as a plurality of roller bearings 11 between two mounting brackets 9 and constitute, basin 10 is equipped with two in this embodiment, all install on mounting bracket 9, and a plurality of roller bearings 11 pass two basins 10 in proper order, all be provided with a plurality of spray set 2 on every basin 10, a plurality of automatically regulated brush roll device 3 and a plurality of air knife subassembly 4, a plurality of automatically regulated brush roll device 2 and a plurality of air knife subassembly 4 are symmetrical distribution from top to bottom to roller bearings 11, after mask plate is sent into basin 10 through mask plate 11, automatically regulated brush roll device 2 and air knife subassembly 4 are located these several little compartments respectively, and a plurality of spray set 2, a plurality of automatically regulated brush roll device 3 and a plurality of air knife subassembly 4 carry out the dirty washing device of air-drying and cleaning through two air-spray brush roll device and carry out the dirty washing device of air-drying and cleaning device through the air-drying of cleaning device after mask plate is sent into mask plate through mask plate respectively, then, two dirt cleaning device is carried out on the air-drying of the mask plate.

As shown in fig. 4 and 5, the automatic adjustment roller brush device 3 includes two roller brush assemblies 31 vertically distributed with respect to the roller 11, and the upper and lower surfaces of the photomask plate are subjected to roller brush cleaning by the two roller brush assemblies 31, wherein the roller brush assemblies 31 include a transmission rod 313, a first fixing seat 311, a second fixing seat 323, a rotating shaft 319, a transmission motor 314, a rotation motor 322, a roller brush 320, and the like, wherein the first fixing seat 311 and the second fixing seat 323 are respectively located at two ends of the transmission rod 313 and are rotatably connected with the transmission rod 313, and mounting plates 312 are respectively disposed on the first fixing seat 311 and the second fixing seat 323, the mounting plates 312 are vertically mounted on the first fixing seat 311 and the second fixing seat 323, slide rails are disposed on two sides of a side surface of each mounting plate 312, and a sliding plate 316 is slidably connected with the slide rails, while a transmission motor 314 is further mounted on the first fixing seat 311, the mounting plates 313 are in transmission connection with the transmission motor 314, a support 317 is disposed on a side surface of the mounting plate 312, a ball bearing is disposed on the support 317, and a lead screw 318 is rotatably connected with the transmission rod 313, and a bevel gear 316 is disposed on the transmission rod 313, and the transmission rod 312 is engaged with the bevel gear 316, when the transmission rod 312 is rotated along the bevel gear, the bevel gear is driven by the bevel gear, the bevel gear 318, the lead screw 316, the lead screw 318 is disposed on the lead screw 318, and the lead screw 316, the bevel gear 312.

A rotating shaft 319 is arranged right above the transmission rod 313, two ends of the rotating shaft 319 are respectively rotatably connected with sliding plates 316 at two ends of the transmission rod 313, the rotating shaft 319 and the transmission rod 313 are distributed in an up-and-down parallel manner, a motor mounting seat 321 is arranged on the sliding plate 316 close to the first fixing seat 311, a rotating motor 322 is arranged on the motor mounting seat 321, the rotating motor 322 is meshed with the rotating shaft 319 through a gear piece, a roller brush 320 is arranged on the rotating shaft 319, the rotating motor 322 drives the rotating shaft 319 to rotate through the gear piece, so that the roller brush 320 is driven to rotate, and dirt on the surface of the photomask plate is cleaned through the roller brush 320.

The two sides of each automatic adjusting roller brush device 3 are provided with a compression roller shaft assembly and a rubber roller shaft assembly, after a photomask plate is conveyed into the water tank 10 through the roller 11, the upper surface and the lower surface of the photomask plate are wetted by the spraying device 2, the upper surface and the lower surface of the photomask plate are fixedly pressed and conveyed forwards by the rubber roller shaft assemblies in a matching mode, the transmission motor 314 drives the transmission rod 313 to rotate, the distance between the roller brushes 320 on the upper side and the lower side of the roller 11 is adjusted, the roller brushes 320 are tightly attached to the surface of the photomask plate, meanwhile, the rotation motor 322 is rotated to drive the roller brushes 320 to rotate, dirt on the surface of the photomask plate is cleaned, the spraying device 2 can clean the dirt on the surface of the photomask plate during cleaning, then the surface of the photomask plate is air-dried by the air knife assembly 4, and due to the two water tanks 10, the above process needs to be repeated twice, clean and thorough cleaning is guaranteed, and the smooth finish degree of the surface of the cleaned photomask plate is high.

As shown in fig. 2, the water of the spraying device 2 is provided by the water tank 6 arranged inside the machine table 1, and the inside of the machine table 1 is further provided with the filter assembly 8 and the water pump 7, wherein the water pump 7 is respectively connected with the water tank 6 and the filter assembly 8 through pipelines, the filter assembly 8 is connected with the spraying device 2 through pipelines, the water pump 7 can send the water pump 7 in the water tank 6 to the filter assembly 8, the water is further filtered and purified by the filter assembly 8, the purity of the water is ensured, after the photomask plate is cleaned, dirty water flows out through the water outlet arranged at the bottom of the water tank 10, finally flows into the drainage pipeline assembly 5 connected with the water outlet through the pipelines, and the dirty water is discharged by the drainage pipeline assembly 5.

Above-mentioned technical scheme has only embodied the utility model discloses technical scheme's preferred technical scheme, some changes that this technical field's technical personnel probably made to some parts wherein have all embodied the utility model discloses a principle belongs to within the protection scope of the utility model.

Claims

1. A full-automatic photomask plate cleaning machine comprises a machine table (1) and is characterized in that two mounting frames (9) which are distributed in parallel are arranged inside the machine table (1), a plurality of water tanks (10) are arranged on the two mounting frames (9), a plurality of rolling shafts (11) which are distributed in parallel and used for conveying photomask plates are arranged between the two mounting frames (9), and the plurality of rolling shafts (11) sequentially penetrate through the plurality of water tanks (10);

all be provided with a plurality of spray set (2) and a plurality of automatically regulated round brush device (3) on every basin (10), and the both sides of every automatically regulated round brush device (3) all are provided with the compression roller subassembly and glue the roller subassembly, and the top and the below of roller bearing (11) all are provided with a plurality of wind knife tackle spares (4) that are used for getting rid of photomask plate surface water stain in every basin (10), spray set (2) distribute in the top and the below of roller bearing (11) in basin (10).

2. A full-automatic cleaning machine for photomask plates according to claim 1, wherein each automatic adjusting roller brush device (3) comprises two roller brush assemblies (31), and the two roller brush assemblies (31) are vertically and symmetrically distributed relative to the roller (11).

3. The cleaning machine for the full-automatic photomask plate according to claim 2, wherein the rolling brush assembly (31) comprises a transmission rod (313), the two ends of the transmission rod (313) are respectively provided with a first fixing seat (311) and a second fixing seat (323), the first fixing seat (311) and the second fixing seat (323) are respectively provided with a mounting plate (312), two sides of the side surface of each mounting plate (312) are respectively provided with a sliding rail, and the sliding rail is slidably connected with a sliding plate (316).

4. The full-automatic cleaning machine for the photomask plate according to claim 3, wherein a transmission motor (314) is installed on the first fixing seat (311), the transmission rod (313) is in transmission connection with the transmission motor (314), bevel gears are installed at both ends of the transmission rod (313), a support (317) is installed on the mounting plate (312), a ball bearing is installed on the support (317), a lead screw (318) is connected to the ball bearing in a rotating manner, a bevel gear is installed at the lower end of the lead screw (318), the bevel gear at the lower end of the lead screw (318) is meshed with the bevel gear at the end of the transmission rod (313), the upper end of the lead screw (318) is in transmission connection with the sliding plate (316), the transmission rod (313) is driven to rotate by the transmission motor (314), and the bevel gear drives the lead screw (318) to rotate, so as to drive the sliding plate (316) to do lifting movement along the guide rail (315).

5. The full-automatic photomask plate cleaning machine according to claim 4, wherein a rotating shaft (319) is arranged right above the transmission rod (313), two ends of the rotating shaft (319) are respectively connected with the sliding plates (316) at two ends of the transmission rod (313) in a rotating manner, a motor mounting seat (321) is arranged on the sliding plate (316) close to the first fixing seat (311), a rotating motor (322) is arranged on the motor mounting seat (321), the rotating motor (322) is connected with the rotating shaft (319) through a gear piece in a meshing manner, and a roller brush (320) is arranged on the rotating shaft (319).

6. The cleaning machine for the full-automatic photomask plate according to claim 1, wherein the bottom of each water tank (10) is provided with a water outlet, and the water outlet is connected with a drainage pipeline assembly (5) arranged at the bottom of the machine table (1) through a pipeline.

7. The full-automatic cleaning machine for the photomask plates according to claim 1, wherein a water tank (6), a filter assembly (8) and a water pump (7) are arranged inside the machine table (1), the water pump (7) is respectively connected with the water tank (6) and the filter assembly (8) through pipelines, and the filter assembly (8) is connected with the spraying device (2) through a pipeline.