CN215576093U

CN215576093U - Mask plate cleaning agent spraying equipment

Info

Publication number: CN215576093U
Application number: CN202121336368.7U
Authority: CN
Inventors: 刘小勇; 房龙翔; 叶鑫煌
Original assignee: Fujian Youda Environmental Protection Material Co ltd
Current assignee: Fujian Youda Environmental Protection Material Co ltd
Priority date: 2021-06-16
Filing date: 2021-06-16
Publication date: 2022-01-18
Anticipated expiration: 2031-06-16

Abstract

The utility model discloses spraying equipment for a mask cleaning agent, relates to the field of mask cleaning equipment, and aims to solve the problems that the existing mask is poor in cleaning effect due to the fact that the existing mask is soaked and cleaned, the service life of the mask is affected, and the preparation cost of a display is increased. The mask plate cleaning device is novel in structure, can be used for carrying out flowing type cleaning on the mask plate, can be used for stably clamping the mask plate in the cleaning process, reduces the probability of damage of the mask plate during cleaning, and prolongs the service life of the mask plate.

Description

Mask plate cleaning agent spraying equipment

Technical Field

The utility model relates to the field of mask plate cleaning equipment, in particular to spraying equipment for a mask plate cleaning agent.

Background

The photomask base plate is an ideal photosensitive blank plate for making fine photomask graph, and the required photomask plate can be obtained by photoetching plate-making process, and its product is made up by using quartz glass as substrate, plating a layer of metal chromium and photosensitive resist on the substrate to obtain a photosensitive material, and exposing the designed circuit graph on the photosensitive resist by means of electronic laser equipment, and the exposed region can be developed, and on the metal chromium a circuit graph can be formed, so that it can be made into the photomask plate similar to exposed negative plate, then it can be used for making projection positioning of integrated circuit.

The mask plate is required to be cleaned due to the fact that photoresist and other stains appear in multiple exposure processes, a cleaning part is usually directly placed in a container filled with a cleaning agent to be soaked in the cleaning process, and the cleaning agent is static, so that the stains after cleaning are easy to adhere to the surface of the cleaning part again, the cleaning capacity is limited, the service life of the mask plate is influenced, and the preparation cost of a display is high.

SUMMERY OF THE UTILITY MODEL

The mask cleaning agent uses the spraying equipment, and solves the problems that the mask is poor in cleaning effect due to the soaking and cleaning mode, the service life of the mask is influenced, and the preparation cost of a display is increased.

In order to achieve the purpose, the utility model adopts the following technical scheme:

a spraying device for a mask cleaning agent comprises a cleaning tank and an installation box, wherein two brackets which are transversely arranged are fixedly installed inside the top end of the cleaning tank, a water outlet is formed in the cleaning tank, clamping devices are arranged at two ends of the cleaning tank respectively, each clamping device comprises a clamping plate and an installation plate, a spraying device is arranged on the top end of the cleaning tank and comprises a water storage pipe and a support frame, and linkage devices are arranged on two side walls of the cleaning tank and comprise a motor, a first rack, a second rack and a gear;

the bottom fixed mounting install bin of washing tank, be equipped with drive mechanism between install bin and the washing tank, drive mechanism includes bearing frame, hydraulic telescoping rod, carousel, first driven lever, second driven lever and base rod.

Preferably, the equal fixed mounting in both sides of washing tank has two mounting panels that are vertical setting, and two of homonymy rotate between the mounting panel and install the splint that are the V type setting.

Preferably, two the notch has all been seted up to the bottom of splint, two the equal fixed mounting in notch has the fixed axle that is horizontal setting, two it has first driven lever and second driven lever to articulate respectively on the circumference lateral wall of fixed axle, one side fixed mounting of install bin has two bearing frames that are vertical form, two fixedly connected with horizontal pole between the bearing frame, it is equipped with hydraulic telescoping rod to rotate the cover on the horizontal pole, the inside of install bin rotates installs the carousel that is vertical setting, one side fixed mounting of carousel has three group's structures the same and is the basic pole that the horizontal direction set up.

Preferably, three groups the base pole all is horizontal setting, just first driven lever, second driven lever and hydraulic telescoping rod's one end respectively with three groups the base pole is articulated in proper order.

Preferably, the spacing groove has all been seted up on the both sides wall of washing tank, equal slidable mounting has first rack and the second rack that is horizontal setting on the top of spacing groove and the bottom inner wall, first rack is the dislocation distribution with the second rack, two the gear is all installed in the inside of spacing groove rotation, just the gear is located one side that first rack and second rack are close to each other, and meshes with the tooth piece on first rack and the second rack mutually, one side fixed mounting of washing tank has the motor, and one of them the axis of rotation of gear sets up with the output shaft fixed connection of motor.

Preferably, two relatively first rack and two equal fixed mounting has the support frame that is the type of falling U and vertical setting between the second rack, and two all fixed cover is equipped with the water storage pipe on the support frame top circumference lateral wall, two all set up the nozzle that is the array and distributes on the circumference lateral wall of water storage pipe to and the water receiving mouth has been seted up to the one end of water storage pipe.

The utility model has the beneficial effects that:

1. through setting up aggregate unit cooperation spray set, can improve the mask version and soak abluent mode, avoid wasing the dirt that gets off and adhere to the base plate once more, realize optimizing the cleaning performance, increase the purpose of clean dynamics, can also play the effect of evenly washing simultaneously, plate body pressurized inequality when avoiding spraying leads to the base plate to go wrong, causes the display panel of final preparation to appear harmful phenomenon when lighting.

2. Through setting up drive mechanism control clamping device, can be at the in-process that sprays, need not to hand, avoid the hand to cause secondary pollution to the mask version, more reduce the smooth accident that causes unexpected damage to the base plate of hand, realize the purpose of the in-process stable state of mask version spraying.

To sum up, the device not only can utilize linkage system to assist spray set, carries out the formula that flows and washs the mask version, promotes dissolving and the peeling effect of cleaner, has improved the work efficiency of mask version cleaning work, has increased the washing dynamics, can also utilize drive mechanism control clamping device, realizes that the mask version is stable in the cleaning process state, the purpose of evenly washing, reduces the impaired probability of mask version washing, ensures the production effect of preparation display panel.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of an installation structure of the cleaning tank of the present invention;

fig. 3 is a schematic view of the mounting structure of the transmission mechanism of the present invention.

Reference numbers in the figures: 1. a cleaning tank; 2. installing a box; 3. a motor; 4. a splint; 5. a fixed shaft; 6. mounting a plate; 7. a bearing frame; 8. a hydraulic telescopic rod; 9. a turntable; 10. a first driven lever; 11. a second driven lever; 12. a base shaft; 13. a first rack; 14. a second rack; 15. a gear; 16. a bracket; 17. a water storage pipe; 18. a support frame.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

Referring to fig. 1-2, a mask version cleaner uses equipment of spraying, including washing tank 1 and install bin 2, the inside fixed mounting in top of washing tank 1 has two brackets 16 that are horizontal setting, and washing tank 1 is inside to be equipped with the delivery port, can place the base plate and wash on bracket 16, the both ends of washing tank 1 all are equipped with clamping device, clamping device includes splint 4 and mounting panel 6, the equal fixed mounting in both sides of washing tank 1 has two mounting panels 6 that are vertical setting, and rotate between two mounting panels 6 of homonymy and install the splint 4 that is the setting of V type, can realize the purpose to the protection of base plate centre gripping in the base plate cleaning process.

Referring to fig. 1-2, a linkage device is arranged on two side walls of the cleaning tank 1, the linkage device includes a motor 3, a first rack 13, a second rack 14 and a gear 15, two side walls of the cleaning tank 1 are both provided with a limiting groove, the top end of the limiting groove and the inner wall of the bottom end are both slidably mounted with the first rack 13 and the second rack 14 which are transversely arranged, the first rack 13 and the second rack 14 are in staggered distribution, the gear 15 is rotatably mounted inside the two limiting grooves, the gear 15 is located at one side where the first rack 13 and the second rack 14 are close to each other and meshed with tooth blocks on the first rack 13 and the second rack 14, the motor 3 is fixedly mounted at one side of the cleaning tank 1, and a rotating shaft of one of the gears 15 is fixedly connected with an output shaft of the motor 3, so as to drive the support frame 18 to perform parallel reciprocating displacement.

Referring to fig. 1-2, all be equipped with spray set on the top of washing tank 1, spray set includes water storage pipe 17 and support frame 18, equal fixed mounting has the support frame 18 that is the type of falling U and vertical setting between two relative first racks 13 and two second racks 14, and all fix the cover on two support frame 18 top circumference lateral walls and be equipped with water storage pipe 17, the nozzle that is array distribution is all seted up on the circumference lateral wall of two water storage pipes 17, and the water receiving mouth has been seted up to the one end of water storage pipe 17, two support frames 18 are the setting of staggering, can realize evenly spraying abluent mesh to the base plate.

Referring to fig. 1 and 3, a mounting box 2 is fixedly mounted at the bottom end of a cleaning tank 1, a transmission mechanism is arranged between the mounting box 2 and the cleaning tank 1, the transmission mechanism comprises bearing frames 7, hydraulic telescopic rods 8, a rotary table 9, a first driven rod 10, a second driven rod 11 and a base rod 12, notches are respectively formed at the bottom ends of two clamping plates 4, transversely arranged fixing shafts 5 are respectively fixedly mounted at the two notches, the circumferential side walls of the two fixing shafts 5 are respectively hinged with the first driven rod 10 and the second driven rod 11, two vertical bearing frames 7 are fixedly mounted at one side of the mounting box 2, a cross rod is fixedly connected between the two bearing frames 7, the hydraulic telescopic rods 8 are rotatably sleeved on the cross rod, the vertically arranged rotary table 9 is rotatably mounted inside the mounting box 2, three groups of base rods 12 which have the same structure and are arranged in the horizontal direction are fixedly mounted at one side of the rotary table 9, and the three groups of base rods 12 are transversely arranged, and one end of the first driven rod 10, the second driven rod 11 and one end of the hydraulic telescopic rod 8 are respectively hinged with the three groups of base rods 12 in sequence, so that the clamping device can be driven, and the substrate of the mask plate is stable in the cleaning process.

The working principle is as follows: when the device is used, firstly, a substrate of a mask plate is placed on a bracket 16 in a cleaning tank 1, a transmission mechanism can be utilized to control a clamping device, the substrate is enabled to obtain a stable effect in the cleaning process, when a hydraulic telescopic rod 8 on a bearing frame 7 is started, a base rod 12 on a rotary table 9 is pushed, the rotary table 9 is enabled to rotate at a certain angle in an installation box 2, the base rods 12 which are respectively hinged with a first driven rod 10 and a second driven rod 11 can push two fixed shafts 5, the top ends of two clamping plates 4 play a clamping role in cleaning the substrate placed on the cleaning tank 1, and the probability that the mask plate is damaged due to the fact that hands slide in the cleaning process is reduced.

Utilize aggregate unit cooperation spray set to evenly wash the base plate after that, starter motor 3, drive a gear 15 and rotate, make first rack 13 and the second rack 14 of homonymy begin to mesh and rotate, two support frames 18 are staggering setting, make two support frames 18 can carry out parallel reciprocating motion on washing tank 1, then insert the water pipe with the water receiving mouth on the water storage pipe 17, the nozzle evenly washes the base plate, the realization is carried out the formula that flows to the mask version and is washd abluent purpose, when optimizing clean dynamics, the life of mask version has been prolonged, can accomplish work.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.

Claims

1. The mask cleaning agent spraying equipment comprises a cleaning tank (1) and an installation box (2), and is characterized in that two transverse brackets (16) are fixedly installed inside the top end of the cleaning tank (1), a water outlet is formed in the cleaning tank (1), clamping devices are arranged at two ends of the cleaning tank (1) respectively and comprise a clamping plate (4) and an installation plate (6), a spraying device is arranged on the top end of the cleaning tank (1) respectively and comprises a water storage pipe (17) and a support frame (18), linkage devices are arranged on two side walls of the cleaning tank (1) respectively and comprise a motor (3), a first rack (13), a second rack (14) and a gear (15);

the bottom fixed mounting install bin (2) of washing tank (1), be equipped with drive mechanism between install bin (2) and washing tank (1), drive mechanism includes bearing frame (7), hydraulic telescoping rod (8), carousel (9), first driven lever (10), second driven lever (11) and base lever (12).

2. The mask cleaning agent spraying equipment as claimed in claim 1, wherein two mounting plates (6) which are longitudinally arranged are fixedly mounted on both sides of the cleaning tank (1), and a clamping plate (4) which is V-shaped is rotatably mounted between the two mounting plates (6) on the same side.

3. The mask cleaning agent spraying device as claimed in claim 1, wherein notches are formed in the bottom ends of the two clamping plates (4), fixed shafts (5) transversely arranged are fixedly mounted on the notches, a first driven rod (10) and a second driven rod (11) are hinged to the side walls of the circumference of the fixed shafts (5), two vertical bearing frames (7) are fixedly mounted on one side of the installation box (2), a cross rod is fixedly connected between the two bearing frames (7), a hydraulic telescopic rod (8) is sleeved on the cross rod in a rotating mode, a vertically arranged rotary table (9) is mounted in the installation box (2) in a rotating mode, and three groups of base rods (12) which are identical in structure and arranged in the horizontal direction are fixedly mounted on one side of the rotary table (9).

4. The mask cleaning agent spraying equipment as claimed in claim 3, wherein three groups of base rods (12) are transversely arranged, and one ends of the first driven rod (10), the second driven rod (11) and the hydraulic telescopic rod (8) are respectively hinged with the three groups of base rods (12) in sequence.

5. The mask cleaning agent spraying device according to claim 1, both side walls of the cleaning tank (1) are provided with limit grooves, the inner walls of the top end and the bottom end of the limit grooves are respectively provided with a first rack (13) and a second rack (14) which are transversely arranged in a sliding way, the first rack (13) and the second rack (14) are distributed in a staggered manner, gears (15) are rotatably arranged in the two limiting grooves, and the gear (15) is positioned on one side of the first rack (13) and the second rack (14) which are close to each other, and is meshed with the tooth blocks on the first rack (13) and the second rack (14), one side of the cleaning tank (1) is fixedly provided with a motor (3), and the rotating shaft of one of the gears (15) is fixedly connected with the output shaft of the motor (3).

6. The mask cleaning agent spraying equipment as claimed in claim 5, wherein two opposite first racks (13) and two support frames (18) which are in an inverted U shape and are vertically arranged are fixedly installed between the two second racks (14), the top circumferential side walls of the two support frames (18) are fixedly sleeved with water storage pipes (17), the circumferential side walls of the two water storage pipes (17) are provided with nozzles which are distributed in an array manner, and one ends of the water storage pipes (17) are provided with water receiving ports.