CN115739718A

CN115739718A - Device cleaning apparatus for semiconductor integrated circuit

Info

Publication number: CN115739718A
Application number: CN202211389046.8A
Authority: CN
Inventors: 张晨; 许璟旻
Original assignee: Anhui Formula Industrial Design And Service Co ltd
Current assignee: Anhui Formula Industrial Design And Service Co ltd
Priority date: 2022-11-08
Filing date: 2022-11-08
Publication date: 2023-03-07

Abstract

The invention provides a device cleaning device for a semiconductor integrated circuit, and relates to the technical field of semiconductor integrated device production. This semiconductor integrated circuit's device belt cleaning device, including supporting baseplate, the first backup pad of supporting baseplate top fixedly connected with, first backup pad top is equipped with the rolling disc, rolling disc top fixedly connected with clearance case, clearance incasement portion is equipped with places the platform, this a device belt cleaning device for semiconductor integrated circuit, through starting first electric putter, makes first electric putter promote the link, makes the clearance dish in the link outside contact with the device to fixedly connected with spring between promotion frame and the link can make the clearance dish shrink through the spring, avoids the clearance dish to cause the injury to the device, through the mode that shower nozzle and clearance dish combined together, reaches and carries out the intensive cleaning to the device.

Description

Device cleaning apparatus for semiconductor integrated circuit

Technical Field

The invention relates to a semiconductor device cleaning device, in particular to a device cleaning device for a semiconductor integrated circuit, and belongs to the technical field of semiconductor integrated device production.

Background

With the development of planar flash memories, the manufacturing process of semiconductors has made great progress. In recent years, however, the development of planar flash memories has met with various challenges: physical limits, existing development technology limits, and storage electron density limits, among others. In this context, in order to solve the difficulties encountered by the flat flash memory and to pursue lower production costs of the unit cell, various three-dimensional (3D) flash memory structures have been developed, such as 3D nor flash memory and 3D nand flash memory.

The device of the semiconductor integrated circuit needs to be cleaned by equipment in the production process, and the device of the semiconductor integrated circuit has the following problems when being cleaned:

1. the cleaning spray heads are fixedly arranged during cleaning, the surfaces of the devices cannot be cleaned in an all-round manner, and the devices cannot be cleaned efficiently by adopting a flushing manner and a single cleaning manner during cleaning.

2. When the device is cleaned, the device needs to be manually taken to perform the next operation, the device is dried and taken after being cleaned, the device cannot be integrally set, personnel are needed to participate, and secondary pollution can be caused to the device after being cleaned.

Disclosure of Invention

Technical problem to be solved

The present invention aims to solve the above problems and provide a device cleaning apparatus for semiconductor integrated circuits, which solves the problems that in the prior art, all cleaning nozzles are fixed and cannot clean the device surface in all directions, and in the cleaning process, the device cannot be cleaned efficiently by a single cleaning method, i.e., a rinsing method; when the device is cleaned, the device needs to be manually taken to perform the next operation, the drying and the taking of the cleaned device cannot achieve the integrated setting, personnel are needed to participate, and the device is cleaned, so that the secondary pollution is caused.

(II) technical scheme

In order to achieve the purpose, the invention is realized by the following technical scheme: a device belt cleaning device for semiconductor integrated circuit, including supporting baseplate, the first backup pad of supporting baseplate top fixedly connected with, first backup pad top is equipped with the rolling disc, rolling disc top fixedly connected with clearance case, clearance incasement portion is equipped with places the platform, place the first threaded rod of platform bottom fixedly connected with, first threaded rod runs through clearance case and rolling disc in proper order, first threaded rod rotates with clearance case to be connected, first threaded rod and rolling disc threaded connection, the first threaded rod outside is equipped with the adjusting part of lift, clearance roof portion fixedly connected with supporting seat, the supporting seat top is rotated and is connected with outer ring gear, the outer ring gear outside is equipped with the clearance subassembly, supporting baseplate top fixedly connected with second backup pad, second backup pad top is equipped with the carousel, the carousel bottom is connected with the bull stick, the bull stick runs through the second backup pad and rotates with the second backup pad to be connected, carousel bottom fixedly connected with second electric putter and third electric putter, third electric putter bottom is equipped with the centre gripping subassembly, supporting baseplate top fixedly connected with accomodates the frame.

Preferably, carousel bottom fixedly connected with dwang, the dwang runs through first backup pad and rotates with first backup pad to be connected, supporting baseplate top fixedly connected with second motor, the output shaft and the dwang fixed connection of second motor drive the dwang through the second motor and rotate to make the dwang drive the carousel and rotate, make the clearance case on the carousel remove.

Preferably, the adjusting component comprises a first threaded cylinder, the first threaded cylinder is in threaded connection with the outer side of the first threaded rod, the first threaded cylinder is rotatably connected with the first supporting plate, and a first gear is fixedly connected with the outer side of the first threaded cylinder.

Preferably, the adjusting part still includes fixed ring gear, fixed ring gear is connected with first gear engagement, rolling disc top fixedly connected with spacing collar, spacing collar inner wall fixedly connected with stopper, the spout has been seted up in the first threaded rod outside, the stopper set up inside the spout and with first threaded rod sliding connection, carry on spacingly to first threaded rod through the stopper, make the unable rotation of first threaded rod, make it can only the rebound.

Preferably, the clearance subassembly includes the mounting panel, mounting panel fixed connection is in the clearance case outside, outer ring gear outside meshing is connected with the second gear, outer ring gear inner wall fixedly connected with connecting plate, the first electric putter of connecting plate one side fixedly connected with, first electric putter one end fixedly connected with link.

Preferably, the clearance subassembly still includes and promotes the frame, promote to erect and arrange in the connection frame inside and with connection frame sliding connection, promote a one end fixedly connected with clearance dish, fixedly connected with spring between connection frame and the promotion frame, the first motor of mounting panel bottom fixedly connected with, the output shaft and the second gear fixed connection of first motor drive the second gear through first motor and rotate to make the outer ring rotate around the clearance case, reach the effect of comprehensive clearance.

Preferably, supporting seat inner wall fixedly connected with shower nozzle, clearance case outside fixedly connected with mounting bracket, mounting bracket bottom fixedly connected with water tank, water tank internally mounted has the water pump, the scalable water pipe of shower nozzle one end fixedly connected with, scalable water pipe one end is connected with the water pump play water end, it has the outlet pipe to fix the intercommunication between clearance case and the water tank, filter equipment is installed in the outlet pipe outside, carries out purification treatment to making used clearance liquid through filter equipment.

Preferably, the top of the supporting base plate is fixedly connected with a third motor, an output shaft of the third motor is fixedly connected with the rotating rod, the bottom of the second electric push rod is fixedly connected with a connecting disc, the bottom of the connecting disc is fixedly connected with an air outlet head, the top of the rotating disc is fixedly connected with a blowing device, and an air outlet pipe is communicated between an air outlet end of the blowing device and the air outlet head.

Preferably, the centre gripping subassembly is including fixed frame, fixed frame fixed connection is in third electric putter bottom, fixed frame bottom is rotated and is connected with the transmission ring gear, the inside fixedly connected with bevel gear circle of transmission ring gear, the meshing of bevel gear circle outside is connected with two bevel gears, two bevel gear sets up relatively, bevel gear one side fixedly connected with first telescopic link, the first telescopic link outside is rotated and is connected with the riser, riser and fixed frame fixed connection, the meshing of first telescopic link outside is connected with the second screw thread section of thick bamboo, second screw thread section of thick bamboo one end fixedly connected with grip block, fixedly connected with second telescopic link between grip block and the riser makes the grip block carry out horizontal migration through the second telescopic link spacing to the grip block.

Preferably, the centre gripping subassembly still includes the diaphragm, diaphragm fixed connection is in fixed frame outside, diaphragm top fixedly connected with fourth motor, the meshing is connected with drive gear in the transmission ring gear outside, the output shaft and the drive gear fixed connection of fourth motor.

The invention provides a device cleaning device for a semiconductor integrated circuit, which has the following beneficial effects:

1. this a device belt cleaning device for semiconductor integrated circuit, through starting first electric putter, make first electric putter promote the connection frame, the clearance dish that makes the connection frame outside contacts with the device, the brush that makes the clearance dish outside contacts with the device, reach and brush the dust on the device, and fixedly connected with spring between promotion frame and the connection frame, can make the clearance dish shrink through the spring, avoid the clearance dish to cause the injury to the device, through the mode that shower nozzle and clearance dish combined together, reach and carry out abundant cleaning to the device.

2. This a device belt cleaning device for semiconductor integrated circuit, first threaded cylinder who drives fixed connection when first gear revolve rotates, because first threaded cylinder and first threaded rod threaded connection, the spout has been seted up in the first threaded rod outside, and it is equipped with the spacing collar to overlap in the first threaded rod outside, stopper through spacing collar inner wall fixed connection sets up in the spout that the first threaded rod outside was seted up, carry on spacingly to first threaded rod, make first threaded rod rise, thereby make placing the platform at first threaded rod top carry out jack-up with the device from the clearance case, along with the rotation of rolling disc promotes the device to clearance roof portion, and the clearance case removes the lower part to the carousel, reach and carry out automatic push-out clearance case with the device, reach next step, subsequent drying operation of being convenient for.

3. This a device belt cleaning device for semiconductor integrated circuit, through starting the fourth motor, make fourth motor output shaft drive gear and rotate, drive gear rotates the transmission ring gear that drives the meshing connection when rotating, drive the bevel gear circle of fixed connection when transmission ring gear rotates and rotate, bevel gear circle rotates the bevel gear that drives the meshing connection and rotates, it rotates to drive fixed connection's first telescopic link to rotate when bevel gear rotates, make first telescopic link drive threaded connection's second thread section of thick bamboo rotate, because second thread section of thick bamboo and grip block fixed connection, and fixedly connected with second telescopic link between grip block and the riser, thereby make two grip blocks move relatively, it is fixed to carry out the centre gripping to the device, rethread starts the third motor, make the carousel rotate, place the device and accomplish accomodating inside the storage frame, thereby reach taking out and accomodating the device, avoid artifical taking to cause the pollution, the cost of labor has been practiced thrift, work efficiency has been improved.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of a rotating disk structure of the present invention;

FIG. 3 is a schematic view of the cleaning box of the present invention;

FIG. 4 is a schematic view of an outer ring gear structure of the present invention;

FIG. 5 is a schematic view of a connection plate according to the present invention;

FIG. 6 is a schematic view of the cleaning plate structure of the present invention;

FIG. 7 is a schematic view of the placement table of the present invention;

FIG. 8 is a schematic diagram of a land structure according to the present invention;

FIG. 9 is a schematic view of the fixing frame structure of the present invention;

FIG. 10 is a schematic view of a transmission ring gear of the present invention;

FIG. 11 is a schematic view of a second threaded barrel of the present invention;

FIG. 12 is a schematic view of a first support plate according to the present invention;

FIG. 13 is a schematic view of the turntable structure of the present invention;

FIG. 14 is a schematic view of a bevel gear ring configuration of the present invention.

In the figure: 1. a support base plate; 2. a first support plate; 3. rotating the rod; 4. rotating the disc; 5. cleaning the box; 6. a placing table; 7. a first threaded rod; 8. a first threaded barrel; 9. a limiting ring; 10. a limiting block; 11. a first gear; 12. fixing the gear ring; 13. mounting a plate; 14. a second gear; 15. an outer ring gear; 16. a connecting plate; 17. a first electric push rod; 18. a connecting frame; 19. a pushing frame; 20. cleaning the disc; 21. a spring; 22. a mounting frame; 23. a telescopic water pipe; 24. a water outlet pipe; 25. a supporting seat; 26. a first motor; 27. a second motor; 28. a second support plate; 29. a rotating rod; 30. connecting the disc; 31. an air outlet head; 32. a second electric push rod; 33. an air outlet pipe; 34. a blowing device; 35. a third electric push rod; 36. a fixing frame; 37. a transverse plate; 38. a transmission gear; 39. a bevel gear ring; 40. a vertical plate; 41. a first telescopic rod; 42. a second threaded barrel; 43. a clamping plate; 44. a second telescopic rod; 45. a bevel gear; 46. a filtration device; 47. a third motor; 48. a storage frame; 49. a fourth motor; 50. a turntable; 51. a spray head; 52. a transmission gear ring; 53. a water tank.

Detailed Description

The embodiment of the invention provides a device cleaning device for a semiconductor integrated circuit.

Please refer to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5 and fig. 6, which includes a supporting bottom plate 1, a first supporting plate 2 fixedly connected to the top of the supporting bottom plate 1, a rotating disc 4 disposed on the top of the first supporting plate 2, a cleaning box 5 fixedly connected to the top of the rotating disc 4, a placing table 6 disposed inside the cleaning box 5, a first threaded rod 7 fixedly connected to the bottom of the placing table 6, the first threaded rod 7 sequentially penetrates through the cleaning box 5 and the rotating disc 4, the first threaded rod 7 is rotatably connected to the cleaning box 5, the first threaded rod 7 is threadedly connected to the rotating disc 4, a lifting adjusting assembly is disposed on the outer side of the first threaded rod 7, a supporting seat 25 fixedly connected to the top of the cleaning box 5, an outer gear ring 15 is rotatably connected to the top of the supporting seat 25, a cleaning assembly is disposed on the outer side of the outer gear ring 15, a second supporting bottom plate 28 fixedly connected to the top of the supporting bottom plate 1, a rotating disc 50 having a rotating rod 29 connected to the top of the second supporting plate 28, a second electric push rod 32 and a third push rod 35 fixedly connected to the top of the supporting plate 48, and a holding frame 48 fixedly connected to the top of the supporting plate 1.

4 bottom fixedly connected with dwang 3 of rolling disc, dwang 3 run through first backup pad 2 and rotate with first backup pad 2 and be connected, 1 top fixedly connected with second motor 27 of supporting baseplate, second motor 27's output shaft and dwang 3 fixed connection drive dwang 3 through second motor 27 and rotate to make dwang 3 drive rolling disc 4 and rotate, make the cleaning box 5 on the rolling disc 4 remove.

The clearance subassembly includes mounting panel 13, mounting panel 13 fixed connection is in the 5 outsides of clearance case, the meshing is connected with second gear 14 in the 15 outside of outer ring gear, 15 inner wall fixedly connected with connecting plates 16 of outer ring gear, connecting plates 16 one side first electric putter 17 of fixedly connected with, 17 one end fixedly connected with link 18 of first electric putter, the clearance subassembly is still including pushing away frame 19, pushing away frame 19 sets up inside and with link 18 sliding connection in

link

18, 19 one end fixedly connected with clearance dish 20 of pushing away, fixedly connected with spring 21 between link 18 and the promotion frame 19, the first motor 26 of mounting panel 13 bottom fixedly connected with, the output shaft and the 14 fixed connection of second gear of first motor 26, it rotates to drive second gear 14 through first motor 26, thereby make outer ring gear 15 rotate around clearance case 5, reach the effect of comprehensive clearance.

Supporting seat 25 inner wall fixedly connected with

shower nozzle

51, 5 outside fixedly connected with mounting bracket 22 of cleaning tank, mounting bracket 22 bottom fixedly connected with water tank 53, water tank 53 internally mounted has the water pump, but shower nozzle 51 one end fixedly connected with telescopic water pipe 23, telescopic water pipe 23 one end is connected with the water pump play water end, fixed intercommunication has outlet pipe 24 between cleaning tank 5 and the water tank 53, filter equipment 46 is installed in the outlet pipe 24 outside, carry out purification treatment to used cleaning solution through filter equipment 46.

Specifically, when the device is cleaned, an operator places the device on the placement table 6 in the cleaning box 5, the first motor 26 is started, the output shaft of the first motor 26 drives the second gear 14 to rotate, the second gear 14 rotates to drive the connecting plate 16 in meshing connection to rotate at the top of the cleaning box 5, at this time, as the spray head 51 is fixedly connected to the inner wall of the outer gear ring 15, the spray head 51 rotates along with the outer gear ring 15, the water pump in the water tank 53 is started at this time, cleaning liquid in the water tank 53 is injected into the spray head 51 through the telescopic water pipe 23, the spray head 51 uniformly washes the outside of the device by rotating around the outer gear ring 15, so that the device is cleaned more comprehensively, the water outlet pipe 24 is fixedly connected to the outer side of the cleaning box 5, the used cleaning liquid flows back into the water tank 53 again to be fully used by connecting the water outlet pipe 24 with the water tank 53, the filtering device 46 installed on the outer side of the water outlet pipe 24 is used for purification, the water outlet pipe 24 adopts the existing filter or the simple filtering device, and the purpose of recycling is achieved without further elaboration.

When the outer gear ring 15 rotates, the connecting plate 16 is fixedly connected to the inner wall of the outer gear ring 15, the first electric push rod 17 is fixedly connected to the outer side of the connecting plate 16, the first electric push rod 17 is started to push the connecting frame 18 to enable the cleaning disc 20 on the outer side of the connecting frame 18 to be in contact with a device (a brush is installed on the outer side of the cleaning disc 20), the brush on the outer side of the cleaning disc 20 is in contact with the device to remove dust on the device, the spring 21 is fixedly connected between the pushing frame 19 and the connecting frame 18, the cleaning disc 20 can contract through the spring 21, the cleaning disc 20 is prevented from damaging the device, and the device is sufficiently cleaned through the combination of the spraying head 51 and the cleaning disc 20.

Please refer to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6, and fig. 7, the adjusting assembly includes a first thread cylinder 8, the first thread cylinder 8 is connected to the outside of the first threaded rod 7 through a thread, the first thread cylinder 8 is connected to the first supporting plate 2 in a rotating manner, a first gear 11 is fixedly connected to the outside of the first thread cylinder 8, the adjusting assembly further includes a fixed gear ring 12, the fixed gear ring 12 is connected to the first gear 11 in a meshing manner, a limiting ring 9 is fixedly connected to the top of the rotating disc 4, a limiting block 10 is fixedly connected to the inner wall of the limiting ring 9, a sliding groove is formed in the outside of the first threaded rod 7, the limiting block 10 is arranged inside the sliding groove and is connected to the first threaded rod 7 in a sliding manner, the first threaded rod 7 is limited by the limiting block 10, so that the first threaded rod 7 cannot rotate and can only move upwards.

Specifically, after the device inside cleaning box 5 is cleaned, by starting second motor 27, second motor 27 is made to drive rotating rod 3 to rotate, rotating disk 4 fixedly connected is rotated when rotating rod 3 rotates, cleaning box 5 fixedly connected is rotated when rotating disk 4 rotates, when cleaning box 5 rotates along with rotating disk 4, because fixed gear ring 12 is fixedly connected to the top of first supporting plate 2, first gear 11 connected to the outside of fixed gear ring 12 in a meshed manner is made to rotate, first threaded cylinder 8 fixedly connected is driven to rotate when first gear 11 rotates, because first threaded cylinder 8 is in threaded connection with first threaded rod 7, a chute is formed in the outer side of first threaded rod 7, limiting ring 9 is sleeved on the outer side of first threaded rod 7, limiting block 10 fixedly connected through the inner wall of limiting ring 9 is arranged in a chute formed in the outer side of first threaded cylinder 7, first threaded rod 7 is limited, so that first threaded rod 7 rises, thereby placing platform 6 at the top of first threaded rod 7 can push the device from cleaning box 5 to reach the top, cleaning box 5 rotates along with the rotating disk, and push the device 5 to be pushed out automatically on the next step, and the cleaning box 5 is pushed out.

Referring to fig. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 and 14, a third motor 47 is fixedly connected to the top of the supporting base plate 1, an output shaft of the third motor 47 is fixedly connected to the rotating rod 29, a connecting disc 30 is fixedly connected to the bottom of the second electric push rod 32, an air outlet head 31 is fixedly connected to the bottom of the connecting disc 30, a blowing device 34 is fixedly connected to the top of the rotating disc 50, and an air outlet pipe 33 is connected between an air outlet end of the blowing device 34 and the air outlet head 31.

The clamping component comprises a fixed frame 36, the fixed frame 36 is fixedly connected to the bottom of the third electric push rod 35, a transmission gear ring 52 is rotatably connected to the bottom of the fixed frame 36, a bevel gear ring 39 is fixedly connected to the inside of the transmission gear ring 52, two bevel gears 45 are meshed with the outer side of the bevel gear ring 39 and are arranged oppositely, a first telescopic rod 41 is fixedly connected to one side of each bevel gear 45, a vertical plate 40 is rotatably connected to the outer side of the first telescopic rod 41, the vertical plate 40 is fixedly connected with the fixed frame 36, a second threaded cylinder 42 is meshed with the outer side of the first telescopic rod 41, one end of the second threaded cylinder 42 is fixedly connected with a clamping plate 43, a second telescopic rod 44 is fixedly connected between the clamping plate 43 and the vertical plate 40, the clamping plate 43 is limited by the second telescopic rod 44, the clamping plate 43 is enabled to move horizontally, the clamping component further comprises a transverse plate 37, the transverse plate 37 is fixedly connected to the outer side of the fixed frame 36, a fourth motor 49 is fixedly connected to the top of the transverse plate 37, a transmission gear 38 is meshed with the outer side of the transmission gear ring 52, and an output shaft of the fourth motor 49 is fixedly connected with the transmission gear 38.

Specifically, at carousel 50 bottom fixedly connected with second electric putter 32, through starting second electric putter 32, make second electric putter 32 promote connection pad 30, make connection pad 30 be close to the device of placing platform 6 top, through blast apparatus 34 exhaust apparatus at this moment through set up the heater strip in its inside, make the gas that blows out have certain higher temperature and exhaust through outlet duct 33, make gas outlet head 31 carry out drying process to the device.

After the device is dried, the third motor 47 is started, the third motor 47 drives the rotating rod 29 to rotate, the fixedly connected rotating disc 50 is driven to rotate by the rotating rod 29, the third electric push rod 35 fixedly connected with the bottom of the rotating disc 50 is positioned above the cleaning box 5, at the moment, the third electric push rod 35 is driven to push the fixed frame 36 to descend by starting the third electric push rod 35, when the two clamping plates 43 at the bottom of the fixed frame 36 are positioned at two sides of the device, the output shaft of the fourth motor 49 drives the transmission gear 38 to rotate by starting the fourth motor 49, when the transmission gear 38 rotates, the transmission gear 52 in meshing connection is driven to rotate, and when the transmission gear 52 rotates, the fixedly connected bevel gear 39 is driven to rotate, bevel gear circle 39 rotates bevel gear 45 that drives the meshing and connects and rotates, rotate bevel gear 45 and drive fixed connection's first telescopic link 41 and rotate, make first telescopic link 41 drive threaded connection's second screw thread section of thick bamboo 42 and rotate, because second screw thread section of thick bamboo 42 and grip block 43 fixed connection, and fixedly connected with second telescopic link 44 between grip block 43 and the riser 40, thereby make two grip block 43 relative movement, it is fixed to carry out the centre gripping to the device, rethread starts third motor 47, make carousel 50 rotate, place the device and accomplish accomodating inside storage frame 48, thereby reach taking out and accomodating the device, avoid artifical taking to cause the pollution, the labor cost is saved, work efficiency is improved.

The foregoing shows and describes the general principles and features of the present invention, together with the advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. Device cleaning apparatus for semiconductor integrated circuits, comprising a support base plate (1), characterized in that: the top of the supporting bottom plate (1) is fixedly connected with a first supporting plate (2), the top of the first supporting plate (2) is provided with a rotating disc (4), the top of the rotating disc (4) is fixedly connected with a cleaning box (5), a placing table (6) is arranged inside the cleaning box (5), the bottom of the placing table (6) is fixedly connected with a first threaded rod (7), the first threaded rod (7) sequentially penetrates through the cleaning box (5) and the rotating disc (4), the first threaded rod (7) is rotatably connected with the cleaning box (5), the first threaded rod (7) is in threaded connection with the rotating disc (4), the outer side of the first threaded rod (7) is provided with an adjusting component for lifting, the top of the cleaning box (5) is fixedly connected with a supporting seat (25), the top of the supporting seat (25) is rotatably connected with an outer gear ring (15), the outer side of the outer gear ring (15) is provided with a cleaning component, the top of the supporting bottom plate (1) is fixedly connected with a second supporting plate (28), the top of the second supporting plate (28) is provided with a rotating disc (50), the bottom of the rotating disc (50) is connected with a rotating rod (29), and a second supporting plate (35) is connected with an electric push rod (35), the bottom of the third electric push rod (35) is provided with a clamping assembly, and the top of the supporting base plate (1) is fixedly connected with a storage frame (48).

2. The device cleaning apparatus for semiconductor integrated circuits according to claim 1, characterized in that: carousel (4) bottom fixedly connected with dwang (3), dwang (3) run through first backup pad (2) and rotate with first backup pad (2) and be connected, supporting baseplate (1) top fixedly connected with second motor (27), the output shaft and dwang (3) fixed connection of second motor (27).

3. The device cleaning apparatus for semiconductor integrated circuits according to claim 1, wherein: the adjusting part comprises a first thread cylinder (8), the first thread cylinder (8) is in threaded connection with the outer side of the first threaded rod (7), the first thread cylinder (8) is in rotary connection with the first supporting plate (2), and the outer side of the first thread cylinder (8) is fixedly connected with a first gear (11).

4. A device cleaning apparatus for a semiconductor integrated circuit according to claim 3, wherein: the adjusting part still includes fixed ring gear (12), fixed ring gear (12) are connected with first gear (11) meshing, rolling disc (4) top fixedly connected with spacing collar (9), spacing collar (9) inner wall fixedly connected with stopper (10), the spout has been seted up in the first threaded rod (7) outside, stopper (10) set up inside the spout and with first threaded rod (7) sliding connection.

5. The device cleaning apparatus for semiconductor integrated circuits according to claim 1, wherein: the clearance subassembly includes mounting panel (13), mounting panel (13) fixed connection is in the clearance case (5) outside, outer ring gear (15) outside meshing is connected with second gear (14), outer ring gear (15) inner wall fixedly connected with connecting plate (16), connecting plate (16) one side first electric putter (17) of fixedly connected with, first electric putter (17) one end fixedly connected with link (18).

6. The device cleaning apparatus for semiconductor integrated circuits according to claim 5, wherein: the clearance subassembly is still including propelling movement frame (19), propelling movement frame (19) set up in connecting frame (18) inside and with connecting frame (18) sliding connection, propelling movement frame (19) one end fixedly connected with clearance dish (20), fixedly connected with spring (21) between connecting frame (18) and propelling movement frame (19), mounting panel (13) bottom fixedly connected with first motor (26), the output shaft and second gear (14) fixed connection of first motor (26).

7. The device cleaning apparatus for semiconductor integrated circuits according to claim 6, wherein: supporting seat (25) inner wall fixedly connected with shower nozzle (51), cleaning box (5) outside fixedly connected with mounting bracket (22), mounting bracket (22) bottom fixedly connected with water tank (53), water tank (53) internally mounted has the water pump, but shower nozzle (51) one end fixedly connected with telescopic water pipe (23), telescopic water pipe (23) one end is connected with the water pump play water end, fixed intercommunication has outlet pipe (24) between cleaning box (5) and water tank (53), filter equipment (46) are installed in outlet pipe (24) outside.

8. The device cleaning apparatus for semiconductor integrated circuits according to claim 1, characterized in that: supporting baseplate (1) top fixedly connected with third motor (47), the output shaft and bull stick (29) fixed connection of third motor (47), second electric putter (32) bottom fixedly connected with connection pad (30), connection pad (30) bottom fixedly connected with goes out gas head (31), carousel (50) top fixedly connected with blast apparatus (34), it has outlet duct (33) to lead to between giving vent to anger end and the gas head (31) of blast apparatus (34).

9. The device cleaning apparatus for semiconductor integrated circuits according to claim 8, wherein: the centre gripping subassembly is including fixed frame (36), fixed frame (36) fixed connection is in third electric putter (35) bottom, fixed frame (36) bottom is rotated and is connected with transmission ring gear (52), transmission ring gear (52) inside fixedly connected with bevel gear circle (39), bevel gear circle (39) outside meshing is connected with two bevel gear (45), two bevel gear (45) set up relatively, the first telescopic link of bevel gear (45) one side fixedly connected with (41), first telescopic link (41) outside is rotated and is connected with riser (40), riser (40) and fixed frame (36) fixed connection, the meshing of first telescopic link (41) outside is connected with second thread section of thick bamboo (42), second thread section of thick bamboo (42) one end fixedly connected with grip block (43), fixedly connected with second telescopic link (44) between grip block (43) and riser (40).

10. The device cleaning apparatus for semiconductor integrated circuits according to claim 9, wherein: the centre gripping subassembly still includes diaphragm (37), diaphragm (37) fixed connection is in fixed frame (36) outside, diaphragm (37) top fixedly connected with fourth motor (49), transmission gear ring (52) outside meshing is connected with drive gear (38), the output shaft and drive gear (38) fixed connection of fourth motor (49).