CN1163977C - 氮化镓基蓝光发光二极管芯片的制造方法 - Google Patents
氮化镓基蓝光发光二极管芯片的制造方法 Download PDFInfo
- Publication number
- CN1163977C CN1163977C CNB001313223A CN00131322A CN1163977C CN 1163977 C CN1163977 C CN 1163977C CN B001313223 A CNB001313223 A CN B001313223A CN 00131322 A CN00131322 A CN 00131322A CN 1163977 C CN1163977 C CN 1163977C
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- Prior art keywords
- electrode
- gallium nitride
- type
- layer
- blue led
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- 229910002601 GaN Inorganic materials 0.000 title claims abstract description 30
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 238000005516 engineering process Methods 0.000 title description 4
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 claims abstract description 25
- 238000001259 photo etching Methods 0.000 claims abstract description 14
- 239000013078 crystal Substances 0.000 claims abstract description 8
- 238000001312 dry etching Methods 0.000 claims abstract description 6
- 238000001704 evaporation Methods 0.000 claims description 18
- 230000008020 evaporation Effects 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 5
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
- 230000004913 activation Effects 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000000460 chlorine Substances 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 238000009616 inductively coupled plasma Methods 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 230000008859 change Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000003595 mist Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 8
- 238000002834 transmittance Methods 0.000 abstract description 2
- 230000003213 activating effect Effects 0.000 abstract 1
- -1 gallium nitride compound Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB001313223A CN1163977C (zh) | 2000-10-26 | 2000-10-26 | 氮化镓基蓝光发光二极管芯片的制造方法 |
Applications Claiming Priority (1)
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CNB001313223A CN1163977C (zh) | 2000-10-26 | 2000-10-26 | 氮化镓基蓝光发光二极管芯片的制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN1351383A CN1351383A (zh) | 2002-05-29 |
CN1163977C true CN1163977C (zh) | 2004-08-25 |
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CNB001313223A Expired - Fee Related CN1163977C (zh) | 2000-10-26 | 2000-10-26 | 氮化镓基蓝光发光二极管芯片的制造方法 |
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CN (1) | CN1163977C (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100383987C (zh) * | 2003-09-10 | 2008-04-23 | 深圳市方大国科光电技术有限公司 | 蓝宝石衬底发光二极管芯片电极制作方法 |
CN100352067C (zh) * | 2003-09-23 | 2007-11-28 | 深圳市方大国科光电技术有限公司 | 蓝宝石衬底减薄方法 |
CN100349305C (zh) * | 2003-12-04 | 2007-11-14 | 中国科学院半导体研究所 | 大功率氮化镓基发光二极管的制作方法 |
CN100435360C (zh) * | 2004-12-27 | 2008-11-19 | 北京大学 | 带有二维自然散射出光面的led芯片的制备方法 |
CN101180420B (zh) * | 2005-04-04 | 2012-10-17 | 东北技术使者株式会社 | GaN单晶生长方法、GaN基板制备方法、GaN系元件制备方法以及GaN系元件 |
KR100929464B1 (ko) | 2007-12-21 | 2009-12-02 | 주식회사 동부하이텍 | 반도체칩, 이의 제조 방법 및 반도체칩 적층 패키지 |
CN104716023B (zh) * | 2009-08-26 | 2017-08-29 | 首尔伟傲世有限公司 | 制造半导体基底的方法和制造发光装置的方法 |
CN101916769A (zh) * | 2010-05-19 | 2010-12-15 | 武汉华灿光电有限公司 | 抗静电氮化镓基发光器件及其制作方法 |
CN102800779A (zh) * | 2011-05-27 | 2012-11-28 | 广东银雨芯片半导体有限公司 | 一种石墨烯电极的led晶片及其制作方法 |
JP6404890B2 (ja) * | 2016-11-24 | 2018-10-17 | 日機装株式会社 | 半導体発光素子の製造方法 |
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2000
- 2000-10-26 CN CNB001313223A patent/CN1163977C/zh not_active Expired - Fee Related
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