CN116373144A - Single crystal bar wire squaring device - Google Patents
Single crystal bar wire squaring device Download PDFInfo
- Publication number
- CN116373144A CN116373144A CN202310654777.9A CN202310654777A CN116373144A CN 116373144 A CN116373144 A CN 116373144A CN 202310654777 A CN202310654777 A CN 202310654777A CN 116373144 A CN116373144 A CN 116373144A
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- square
- ring
- single crystal
- wire
- diamond wire
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- 239000013078 crystal Substances 0.000 title claims abstract description 55
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 140
- 239000010432 diamond Substances 0.000 claims abstract description 140
- 238000005520 cutting process Methods 0.000 claims description 66
- 238000004804 winding Methods 0.000 claims description 35
- 239000013013 elastic material Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims 8
- 238000010168 coupling process Methods 0.000 claims 8
- 238000005859 coupling reaction Methods 0.000 claims 8
- 238000006073 displacement reaction Methods 0.000 claims 2
- 239000000463 material Substances 0.000 abstract description 10
- 230000000149 penetrating effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 13
- 238000003860 storage Methods 0.000 description 13
- 210000000078 claw Anatomy 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 230000007774 longterm Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of single crystal rod processing, in particular to a single crystal rod wire squaring device, which comprises a squaring box, wherein the interior of the squaring box is hollow, four sliding columns are fixedly connected to the bottom of the inner side of the squaring box, the four sliding columns form a square, square-opening rings are arranged between the inner sides of the four sliding columns, sliding components are arranged between the square-opening rings and the sliding columns and are used for driving the square-opening rings to slide up and down, a feeding hole penetrating through the inner side is formed in the bottom of the squaring box and is arranged concentrically with the square-opening rings, a receiving component for receiving finished products and leftover materials is arranged at the bottom of the feeding hole, four diamond wires are arranged on the inner ring of the square-opening rings, one end of each diamond wire is fixedly connected with the square-opening rings, the four fixed joints are arrayed at equal angles, and the other end of each diamond wire is provided with a moving component which is used for driving the other end of each diamond wire to move annularly.
Description
Technical Field
The invention relates to the technical field of single crystal bar processing, in particular to a single crystal bar wire squaring device.
Background
The single crystal bar is a bar-shaped object formed by single crystal silicon after forming, the single crystal silicon is a single crystal of silicon, has basically complete lattice structure, is a good semiconductor material, is used for manufacturing semiconductor devices, solar cells, chips and the like, and is formed by pulling high-purity polycrystalline silicon in a single crystal furnace.
The main purpose of single crystal and polycrystalline evolution is to remove the edge leather material of the silicon rod, remove the edge corner material of the silicon ingot and cut into silicon blocks with certain size, the silicon blocks are generally rectangular and square, after the silicon blocks are evolved, the silicon blocks are ground down, and finally the silicon blocks are sliced, so that square silicon wafers can be prepared.
The diamond wire is used for cutting the single crystal rod, the thin diamond wire with high rigidity can be used for effectively cutting the single crystal rod at high temperature, compared with cutting by a blade, the diamond wire occupies small space and has certain flexibility, the position of the diamond wire can be changed randomly, so that the single crystal rod can be processed in various forms, the technology of cutting by using the diamond wire is also used in the prior art, but the position changing process of the diamond wire and the cutting flow are rough, the cutting position of the diamond wire cannot be well mastered, and the cutting can be completed only by using the mutual matching of multiple groups of diamond wires, so that the operation is complex.
Disclosure of Invention
Therefore, the invention aims to solve the technical problems that the position change process and the cutting flow of the diamond wire in the prior art are rough, the cutting position of the diamond wire cannot be well mastered, and the cutting can be completed only by mutually matching a plurality of groups of diamond wires, so that the operation is complicated.
In order to solve the technical problems, the invention provides a single crystal ingot wire squaring device, which comprises a squaring box, wherein the interior of the squaring box is hollow, four sliding columns are fixedly connected to the bottom of the inner side of the squaring box, square-opening rings are arranged between the inner sides of the four sliding columns, the four sliding columns are arranged at equal angles on the outer sides of the square-opening rings, sliding components are arranged between the square-opening rings and the sliding columns and used for driving the square-opening rings to slide up and down, a feeding hole penetrating through the inner side is formed in the bottom of the square-opening box, the feeding hole and the square-opening rings are concentrically arranged, a receiving component used for receiving finished products and leftover materials is arranged at the bottom of the feeding hole, four diamond wires are arranged at the inner ring of the square-opening rings, one ends of the diamond wires are fixedly connected with the square-opening rings, the four fixed joints are arranged at equal angles, and the other ends of the diamond wires are provided with moving components which are used for driving the other ends of the diamond wires to move annularly;
through the arrangement of the square ring, a single crystal ingot to be cut is jacked into the square box upwards from a feed inlet at the top of the square box, the square ring is driven to move up and down on the outer side of the sliding column through a sliding component at the outer side of the square ring, one end of the diamond wire is fixed, the other end of the diamond wire is driven to move at the inner ring of the square ring through a moving component, and the other ends of the four diamond wires simultaneously move in the same direction and in the same distance, so that the centers of the four diamond wires form a square area, the square area can be changed according to the moving distance of the end parts of the diamond wires, and meanwhile, the enclosed area is square all the time and meets the requirements of square opening because one end of the diamond wire is always fixed; the method for operating the diamond wires is simple, the square structure in the middle of the four diamond wires can be always maintained, the cutting process is also differentiated, and the diamond wires do not need to be regulated during vertical cutting, so that the operation is simple, the cutting is stable and the error rate is reduced.
In one embodiment of the invention, the top of the square box is fixedly connected with a driving rail, the inner side of the bottom end of the driving rail is slidably connected with a moving module, the moving module can reciprocate at the bottom of the driving rail, the bottom of the moving module is fixedly connected with an electric telescopic rod, the bottom of the electric telescopic rod is fixedly connected with a cantilever, a plurality of annular mechanical claws are arranged at the outer side of the cantilever near the bottom, after the side edge of the monocrystalline rod is cut, the electric telescopic rod at the top of the cantilever stretches to enable the cantilever to sink, the mechanical claws are used for grabbing the monocrystalline rod, after the bottom of the finished product after the square is cut, the finished product is transferred through the rising of the cantilever and the movement of the driving rail, and by the arrangement, the finished product can be continuously cut by only continuously supplying the monocrystalline rod upwards from the bottom, so that the working efficiency is accelerated.
In one embodiment of the invention, the moving assembly comprises a moving seat, the diamond wire is connected with the moving seat, the inner ring of the square opening ring is provided with an annular groove, clamping plates are fixedly connected to the top end and the bottom of the moving seat, the moving seat is in sliding clamping connection with the annular groove through the clamping plates, an electric wheel attached to the inner wall of the annular groove is arranged on the outer side of the moving seat, the moving seat is driven to move through the rotation of the electric wheel of the moving seat, the clamping plates at the two ends of the moving seat are matched, the moving track of the moving seat can be well limited, and as the end part of the diamond wire is connected with the moving seat, the four diamond wires can be driven to move through the four moving seats, so that the effect of changing the position of the diamond wire is realized.
In one embodiment of the invention, four winding drums which are annularly arranged are fixedly connected to the outer side of the square opening ring, four feeding drums which are annularly arranged are fixedly connected to the outer side of the square opening ring, the structure of each feeding drum is the same as that of each winding drum, servo motors are fixedly connected to the bottoms of the winding drums and the feeding drums, two ends of each diamond wire are fixedly connected to the outer sides of the output ends of two corresponding servo motors respectively, after the diamond wire is cut for a long time, the outer surface of the diamond wire is severely worn, the cutting effect is reduced, and the problem that the cutting effect is not in place is solved, the traditional diamond wire is fixedly connected with mobile equipment, and the diamond wire is frequently and fussy to replace;
through the setting of receipts reel and feed cylinder, when needs change, will remove the seat and move one side of a winding section of thick bamboo, four buddha's warrior attendant lines expansion area is the biggest this moment, through the drive of servo motor in the receipts reel, can receive the buddha's warrior attendant line, and it has new buddha's warrior attendant line to coil in the feed cylinder, and feed cylinder inboard also has servo motor, two corresponding servo motors release one and retrieve, thereby can renew the buddha's warrior attendant line, old buddha's warrior attendant line can receive in the receipts reel, after a roll of buddha's attendant line that stores in the feed cylinder is used, will receive reel and feed cylinder and carry out whole change again, this kind of setting, manual change cycle has greatly reduced, make the device can long-term use, in buddha's warrior attendant line change in-course, buddha's warrior attendant line in the receipts reel can be outwards pulled out, the length change of inner circle buddha's warrior attendant line.
In one embodiment of the invention, the inner ring of the square ring is fixedly connected with four locking valves, the positions of the locking valves correspond to the feeding cylinder, the diamond wire passes through the locking valves, the diamond wire passes through the inner part of the movable seat and is connected with the winding cylinder, the electromagnetic valve is fixedly connected on the inner side of the movable seat, the diamond wire close to the feeding cylinder can be fixed through the locking valves, the diamond wire is ensured to be unchanged in the changing process, the area surrounded by the middle part is kept square, the diamond wire passes through the movable seat, and the electromagnetic valve is arranged, so that the diamond wire can be blocked by the electromagnetic valve when the diamond wire is cut vertically, and the stable cutting process is ensured.
In one embodiment of the invention, the sliding assembly comprises four lifting modules which are respectively and slidably clamped on the outer side of the sliding column, the lifting modules are composed of two chucks which are vertically and parallelly arranged, the two chucks limit the square opening ring at the middle part, the outer sides of the chucks are connected with remote control wheels which are movably attached to the sliding column, the positions of the square opening ring are limited by the two chucks, the chucks are driven to move by the driving of the remote control wheels, and the square opening ring can be accurately and stably driven to lift by being matched with the stable movement of the four groups of chucks, so that the cutting accuracy is further ensured.
In one embodiment of the invention, the receiving assembly comprises a corner frame, a round hole corresponding to the width of the monocrystalline ingot is formed in the middle of the corner frame, the corner frame is located below the feeding hole, the middle of the corner frame is arranged in a concave shape, a buffer pad made of elastic materials is fixedly connected to the inner wall of the corner frame, two guide rails used for moving are connected between the corner frame and the bottom of the square box, a translation module is further connected between the corner frame and the guide rails, the translation module is used for driving the corner frame to move, the corner frame is moved to the position below the feeding hole through the translation module before the monocrystalline ingot is inserted into the square box, the monocrystalline ingot penetrates through the round hole of the corner frame, then the cut scrap falls downwards along with the cutting, and is received by the corner frame, so that the recovery is completed, in order to reduce vibration and damage caused by impact, after the square box is received, the equipment for ejecting the monocrystalline ingot is firstly moved downwards, the corner frame is moved to one side through the translation module, and the scrap in the corner frame is conveniently taken out.
In one embodiment of the invention, a closed door is rotationally connected to one side of the square opening box, a containing box is arranged on one side, close to the closed door, of the interior of the square opening box, a translation rail is arranged at the bottom of the containing box and fixedly connected with the square opening box, a translation vehicle is connected between the translation rail and the containing box, after finished products are clamped by a mechanical claw, the finished products can come above the containing box along with lifting and transferring, and the finished products fall into the containing box along with lowering of the mechanical claw, so that containing of the finished products is completed, and the containing box can be transferred outwards through the arrangement of the translation vehicle and the translation rail.
In one embodiment of the invention, the semi-annular connecting rods are fixedly connected between the four movable seats, the four connecting rods form an annular structure, the annular structure is positioned at the inner side of the annular groove of the square opening ring, the annular structure is positioned below the diamond wire, and the four movable seats are connected into a whole by matching with the arrangement of the four connecting rods, so that one movable seat can only move simultaneously, in the same direction and at the same distance, the regularity of the square structure surrounded by the center of the diamond wire is ensured, and the cutting precision is improved.
In one embodiment of the invention, a clamping groove is formed in one side, close to the square opening ring, of the sliding column, a sliding block matched with the clamping groove is fixedly connected to the outer side of the square opening ring, and the lifting stability of the square opening ring is guaranteed due to the matching of the clamping groove and the sliding block.
Compared with the prior art, the technical scheme of the invention has the following advantages: through the setting of square ring, the slip subassembly outside the square ring drives square ring and reciprocates in the outside of traveller, one of them one end of buddha's warrior attendant line is fixed, the other end of buddha's warrior attendant line is driven through the removal subassembly and is moved at the inner circle of square ring of opening, the other end of four buddha's warrior attendant lines simultaneously, the equidirectional, the equidistance removes, make four buddha's warrior attendant line centers enclose into a square region, and this square region, can change according to the removal distance of buddha's warrior attendant line tip, simultaneously because one of the buddha's warrior attendant line one end is fixed all the time, therefore the region of enclosing must be square, this kind of structure, the method of operating buddha's warrior attendant line is simple, and can maintain the square structure at four buddha's warrior attendant line middle parts always, the cutting process also is differentiated, need not to regulate and control buddha's warrior attendant line during the vertical cutting, through this kind of setting, make easy operation, the cutting stable, the fault rate has been reduced.
After the side edge of the monocrystalline rod is cut, the cantilever is extended by the electric telescopic rod at the top of the cantilever, the cantilever is sunk, the monocrystalline rod is grasped by the plurality of mechanical claws, after the bottom of the finished product after the cutting is finished, the finished product is transferred by the rising of the cantilever and the movement of the driving rail, and by the arrangement, the finished product can be cut continuously by only continuously feeding the monocrystalline rod upwards from the bottom, so that the working efficiency is improved.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings.
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a cross-sectional view of the open square box of the present invention;
FIG. 3 is a perspective view of the strut and open square ring of the present invention;
FIG. 4 is a cross-sectional view of an open square ring of the present invention;
FIG. 5 is a cross-sectional view of the take-up reel and the open square ring of the present invention;
FIG. 6 is a perspective view of the storage box and cantilever of the present invention;
FIG. 7 is a bottom view of the open square chest of the present invention;
description of the specification reference numerals: 1. opening a square box; 2. a drive rail; 3. closing the door; 4. a translation rail; 5. a spool; 6. a feed inlet; 7. opening a square ring; 8. a clamping groove; 9. a lifting module; 10. a diamond wire; 11. winding up a winding drum; 12. a supply cylinder; 13. a locking valve; 14. a movable seat; 15. a servo motor; 16. a clamping plate; 17. a cantilever; 18. a mechanical claw; 20. a storage box; 21. an annular groove; 22. and (5) connecting a rod.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Referring to fig. 1 to 3, a single crystal ingot wire square opening device comprises a square opening box 1, wherein the inside of the square opening box 1 is hollow, four sliding columns 5 are fixedly connected to the bottom of the inner side of the square opening box 1, square opening rings 7 are arranged between the inner sides of the four sliding columns 5, the four sliding columns 5 are arranged at equal angles on the outer sides of the square opening rings 7, sliding components are arranged between the square opening rings 7 and the sliding columns 5 and used for driving the square opening rings 7 to slide up and down, a feeding hole 6 penetrating to the inner side is formed in the bottom of the square opening box 1, the feeding hole 6 is circular and is concentrically arranged with the square opening rings 7, a receiving component used for receiving finished products and leftover materials is arranged at the bottom of the feeding hole 6, four diamond wires 10 are arranged on the inner ring of the square opening rings 7, one ends of the diamond wires 10 are fixedly connected with the square opening rings 7, four fixed joints are arranged at equal angles on the square opening rings 7, a moving component is arranged at the other ends of the diamond wires 10, and the moving component is used for driving the annular diamond wires 10 to move;
during operation, the diamond wire 10 is used for cutting the single crystal ingot, the thin and high-rigidity diamond wire 10 can be used for effectively cutting the single crystal ingot at high temperature, compared with cutting by a blade, the diamond wire 10 occupies smaller space and has certain flexibility, and the position can be changed at will, so that the single crystal ingot can be processed in various forms, in the prior art, the technology of cutting by using the diamond wire 10 is also used, but the position change process of the diamond wire 10 and the control of the cutting flow are rough, the cutting position of the diamond wire 10 cannot be well grasped, and the cutting can be completed by using the mutual matching of a plurality of groups of diamond wires 10, so that the operation is complicated;
according to the single crystal ingot wire squaring device provided by the invention, through the arrangement of the squaring ring 7, a single crystal ingot to be cut is jacked into the squaring box 1 upwards from the feed inlet 6 at the top of the squaring box 1, the squaring ring 7 is driven to move up and down on the outer side of the sliding column 5 by the sliding component on the outer side of the squaring ring 7, one end of the diamond wire 10 is fixed, the other end of the diamond wire 10 is driven to move at the inner ring of the squaring ring 7 by the moving component, the other ends of the four diamond wires 10 simultaneously move at the same angle in the same direction, so that the centers of the four diamond wires 10 form a square area, the area of the square area can be changed according to the moving distance of the end parts of the diamond wires 10, and meanwhile, the enclosed area is always kept square and meets the requirements of squaring because one end of the diamond wire 10 is always fixed;
the method is characterized in that the head of a single crystal bar extending into the square box 1 is cut to be flat, the movable ends of four diamond wires 10 are required to be moved to the limit, the area of the square area in the middle is reset to zero, the irregular top area of the single crystal bar is cut, then the square area is enlarged to a preset area (smaller than the bottom area of the single crystal bar), the top of the single crystal bar is taken as the starting point, the whole square ring 7 and the diamond wires 10 sink to perform vertical cutting, the outer side edge of the cylindrical single crystal bar is cut, the single crystal bar is cut into square bars, the sinking square ring 7 is stopped, the middle area of the four diamond wires 10 is contracted again, and therefore a square single crystal silicon finished product is cut.
Referring to fig. 2 to 6, the top of the square box 1 is fixedly connected with a driving rail 2, the inner side of the bottom end of the driving rail 2 is slidably connected with a moving module, the moving module can reciprocate at the bottom of the driving rail 2, an electric telescopic rod is fixedly connected at the bottom of the moving module, a cantilever 17 is fixedly connected at the bottom of the electric telescopic rod, a plurality of annular mechanical claws 18 are arranged at the outer side of the cantilever 17 near the bottom, after the side edge of a monocrystalline rod is cut, the cantilever 17 is stretched through the electric telescopic rod at the top of the cantilever 17 to sink, the monocrystalline rod is grasped through the plurality of mechanical claws 18, after the bottom of a finished product after the square is cut, the finished product is transferred through the rising of the cantilever 17 and the movement of the driving rail 2, and through the arrangement, the finished product can be cut continuously only by continuously supplying the monocrystalline rod upwards from the bottom, so that the working efficiency is accelerated.
Referring to fig. 4 to 5, the moving assembly comprises a moving seat 14, the diamond wire 10 is connected with the moving seat 14, an annular groove 21 is formed in the inner ring of the square opening ring 7, clamping plates 16 are fixedly connected to the top end and the bottom of the moving seat 14, the moving seat 14 is slidably clamped with the annular groove 21 through the clamping plates 16, an electric wheel attached to the inner wall of the annular groove 21 is arranged on the outer side of the moving seat 14, and when the moving assembly works, the moving seat 14 is driven to move through the rotation of the electric wheel of the moving seat 14, and the moving track of the moving seat 14 is well limited by matching with the clamping plates 16 at the two ends of the moving seat 14.
Referring to fig. 3 to 5, four winding drums 11 arranged in an annular manner are fixedly connected to the outer side of the square ring 7, four feeding drums 12 arranged in an annular manner are fixedly connected to the outer side of the square ring 7, the structure of each feeding drum 12 is identical to that of each winding drum 11, servo motors 15 are fixedly connected to the bottoms of each winding drum 11 and each feeding drum 12, two ends of each diamond wire 10 are fixedly connected to the outer sides of the output ends of two corresponding servo motors 15 respectively, when the diamond wire cutting machine works, the outer surface of the diamond wire 10 is severely worn after long-term cutting, the cutting effect is reduced, and the problem that the cutting is not in place is solved, the conventional diamond wire 10 is fixedly connected with mobile equipment, and the replacement is frequent and tedious;
through the arrangement of the winding drum 11 and the feeding drum 12, when the winding drum 11 and the feeding drum 12 need to be replaced, the movable seat 14 is moved to one side of the winding drum 11, at the moment, the unwinding area of the four diamond wires 10 is the largest, the diamond wires 10 can be wound in the feeding drum 12 by driving the servo motor 15 in the winding drum 11, new diamond wires 10 are wound in the feeding drum 12, the servo motor 15 is also arranged at the inner side of the feeding drum 12, one of the two corresponding servo motors 15 is released and recycled, so that the diamond wires 10 can be updated, the old diamond wires 10 can be received in the winding drum 11, and the winding drum 11 and the feeding drum 12 are integrally replaced after the use of one roll of diamond wires 10 stored in the feeding drum 12 is completed.
Meanwhile, when the overcooled single crystal ingot is cut, the diamond wire 10 can be moved at a high speed by rapidly winding and releasing the two corresponding servo motors 15, so that the diamond wire 10 can obtain an ultrahigh cutting effect, and the cutting quality is further improved.
Referring to fig. 3 to 5, four locking valves 13 are fixedly connected to the inner ring of the square opening ring 7, the positions of the locking valves 13 correspond to the positions of the feeding cylinder 12, the diamond wire 10 passes through the locking valves 13, the diamond wire 10 passes through the inside of the movable seat 14 and is connected with the winding cylinder 11, an electromagnetic valve is fixedly connected to the inner side of the movable seat 14, during operation, the diamond wire 10 close to the position of the feeding cylinder 12 can be fixed through the locking valves 13, during the changing process of the diamond wire 10, one section of the diamond wire 10 is kept unchanged, the area surrounded by the middle part is kept square, the diamond wire 10 passes through the movable seat 14 and the square opening ring 7 and is connected with the winding cylinder 11, and the electromagnetic valve is arranged, so that the diamond wire 10 can be blocked by the electromagnetic valve during the vertical cutting of the diamond wire 10, and the stable cutting process is ensured;
in the moving process of the moving seat 14, the winding drum 11 is fixedly connected to the outer side of the square opening ring 7 and kept still, the diamond wire 10 coiled on the inner side of the winding drum 11 can be partially pulled out when the moving seat 14 moves, the pulled-out diamond wire 10 can move along the moving direction of the moving seat 14 and is partially attached to the annular groove 21, the electric wheels for driving the moving seat 14 are distributed at the upper end and the lower end of the diamond wire 10 and cannot be influenced by the diamond wire 10, and after cutting is finished, the pulled-out diamond wire 10 is collected into the winding drum 11 through winding of the servo motor 15 in the winding drum 11.
Referring to fig. 3, the sliding assembly includes four lifting module 9, and four lifting module 9 slip joint respectively in the outside of traveller 5, lifting module 9 comprises two chucks of perpendicular parallel arrangement, and two chucks limit the square ring 7 in the middle part, the outside of chuck is connected with the remote control wheel with traveller 5 activity laminating, during operation, restricts the position of square ring 7 through two chucks, drives the removal of chuck through the synchronous drive of two remote control wheels, cooperates the steady removal of four chuck groups, can be accurate steady drive square ring 7 go up and down, has further guaranteed the precision of cutting.
Referring to fig. 2 to 7, the receiving assembly includes a corner frame, a round hole corresponding to the width of the single crystal ingot is formed in the middle of the corner frame, the corner frame is located below the feed inlet 6, the middle of the corner frame is arranged in a concave shape, a buffer pad made of elastic materials is fixedly connected to the inner wall of the corner frame, two guide rails used for moving are connected between the corner frame and the bottom of the square ingot 1, a translation module is further connected between the corner frame and the guide rails, the translation module is used for driving the corner frame to move, during operation, before the single crystal ingot is inserted into the square ingot 1, the corner frame is moved to the lower portion of the feed inlet 6 through the translation module, the single crystal ingot passes through the round hole of the corner frame, then along with cutting, the cut corner materials drop downwards, so that the corner frame is collected, the buffer pad is arranged, vibration and damage caused by impact are reduced, equipment for ejecting the single crystal ingot is firstly dropped out, the corner frame is moved to one side through the translation module, and the corner is convenient for taking out the corner materials in the corner frame.
Referring to fig. 1 to 6, a closed door 3 is rotatably connected to one side of the square opening box 1, a storage box 20 is disposed on one side of the square opening box 1, close to the closed door 3, a translation rail 4 is disposed at the bottom of the storage box 20, the translation rail 4 is fixedly connected with the square opening box 1, a translation vehicle is connected between the translation rail 4 and the storage box 20, after finished products are clamped away by a gripper 18 during operation, the finished products can come to the upper side of the storage box 20 along with lifting and transferring, and fall into the storage box 20 along with lowering of the gripper 18, so that storage of the finished products is completed, and the storage box 20 can be transferred outwards through setting of the translation vehicle and the translation rail 4.
Referring to fig. 4 to 5, a semi-annular connecting rod 22 is fixedly connected between four movable seats 14, the four connecting rods 22 form an annular structure, the annular structure is positioned at the inner side of an annular groove 21 of the square opening ring 7, the annular structure is positioned below the diamond wire 10, and in operation, the four movable seats 14 are connected into a whole by matching with the arrangement of the four connecting rods 22, so that the movable seats 14 can only move at the same angle in the same direction at the same time, the regularity of the square structure surrounded by the center of the diamond wire 10 is ensured, and the cutting precision is improved.
Referring to fig. 3 to 4, a clamping groove 8 is formed in one side, close to the square ring 7, of the sliding column 5, a sliding block matched with the clamping groove 8 is fixedly connected to the outer side of the square ring 7, and when the square ring is in operation, the clamping groove 8 and the sliding block are matched, so that lifting stability of the square ring 7 is guaranteed.
During operation, the diamond wire 10 is used for cutting the single crystal rod at high temperature, compared with cutting by a blade, the diamond wire 10 occupies smaller space and has certain flexibility, and the position of the single crystal rod can be changed at will, so that the single crystal rod can be processed in various forms, in the prior art, the diamond wire 10 is used for cutting, but the diamond wire 10 is subjected to a position changing process, and the cutting process is rough, the cutting position of the diamond wire 10 cannot be well mastered, and the cutting can be completed only by using the mutual matching of a plurality of groups of diamond wires 10, so that the operation is complicated, the single crystal rod to be cut is jacked into the square box 1 from the feed port 6 at the top of the square box 1, the square box 7 is driven to move up and down on the outer side of the sliding column 5 by the sliding component outside the square box 7, one end of the diamond wire 10 is fixed, the other end of the diamond wire 10 is driven to move along the four diamond wires 10 in the same direction as the square box 10, and the other end of the diamond wire 10 is always in the same direction as the square box 10, and the diamond wire 10 is fixed in the same direction as the square area, and the other end is changed according to the certain diamond wire distance; the method comprises the steps of firstly cutting the head of a single crystal bar extending into the square box 1 to be flat, enabling the area of a square area in the middle to be zero only by enabling the movable end of the diamond wire 10 to be moved to the limit, cutting the irregular top area of the single crystal bar, enlarging the square area to a preset area, sinking the whole square ring 7 and the diamond wire 10, cutting the outer side corners of the cylindrical single crystal bar, enabling the outer side of the single crystal bar to be square, stopping the sinking square ring 7, and shrinking the middle area of the four diamond wires 10 again to cut square single crystal silicon finished products, wherein the method for operating the diamond wires 10 is simple, and can always maintain the square structure in the middle of the four diamond wires 10, and is differentiated in the cutting process, the diamond wires 10 are not required to be regulated in the vertical cutting, so that the operation is simple, the cutting is stable, and the error rate is reduced; after the cutting of the side edge of the single crystal bar is finished, the cantilever 17 is stretched by an electric telescopic rod at the top of the cantilever 17, the single crystal bar is sunk, the plurality of mechanical claws 18 grasp the single crystal bar, after the bottom of the finished product after the opening is finished, the finished product is transferred by the rising of the cantilever 17 and the movement of the driving rail 2, and by the arrangement, the finished product can be continuously cut out by only continuously feeding the single crystal bar upwards from the bottom, so that the working efficiency is accelerated; the movable seat 14 is driven to move by the rotation of the electric wheel of the movable seat 14, and the movable track of the movable seat 14 can be well limited by matching with the clamping plates 16 at the two ends of the movable seat 14, and the movable seat 14 at the end part of the diamond wire 10 is connected, so that the four diamond wires 10 can be driven to move by the four movable seats 14, and the effect of changing the positions of the diamond wires 10 is realized; the diamond wire 10 is worn seriously after long-term cutting, so that the cutting effect is reduced and the cutting is not in place, the traditional diamond wire 10 is fixedly connected with mobile equipment, the traditional diamond wire 10 is frequently and fussy to replace, the moving seat 14 is moved to one side of the winding drum 11 when the diamond wire is required to be replaced through the arrangement of the winding drum 11 and the feeding drum 12, the unwinding area of the four diamond wires 10 is maximum, the diamond wire 10 can be wound by driving the servo motor 15 in the winding drum 11, a new diamond wire 10 is wound in the feeding drum 12, the servo motor 15 is arranged on the inner side of the feeding drum 12, one of the two corresponding servo motors 15 is released and recycled, so that the diamond wire 10 can be updated, the old diamond wire 10 can be received in the winding drum 11, and the winding drum 11 and the feeding drum 12 are integrally replaced after the old diamond wire 10 stored in the feeding drum 12 is used, the manual period is greatly reduced, the device can be used for a long time, and the diamond wire 10 in the winding drum 11 can be pulled out of the diamond wire 10 in the winding drum 10 is changed, and the diamond wire 10 can be pulled out to the outside; the diamond wire 10 close to the feeding cylinder 12 can be fixed through the locking valve 13, so that one section of the diamond wire 10 is kept unchanged in the changing process, the area surrounded by the middle part is kept square, the diamond wire 10 passes through the moving seat 14, and the electromagnetic valve is arranged, so that the diamond wire 10 can be blocked by the electromagnetic valve when the diamond wire 10 is cut vertically, and the stable cutting process is ensured; the position of the square opening ring 7 is limited by the two chucks, the chucks are driven to move by the driving of the remote control wheel, and the square opening ring 7 can be driven to lift accurately and stably by the cooperation of the stable movement of the four groups of chucks, so that the cutting accuracy is further ensured; before the single crystal bar is inserted into the square opening box 1, the corner frame is moved to the lower part of the feed inlet 6 through the translation module, the single crystal bar passes through the round hole of the corner frame, then along with the cutting, the cut corner material can drop downwards and is caught by the corner frame, so that recycling is finished, the setting of the buffer cushion is finished, after the square opening is received, equipment for ejecting the single crystal bar is firstly moved downwards and removed, and then the corner frame is moved to one side through the translation assembly, so that the corner material in the corner frame can be taken out conveniently; after the finished product is clamped away by the mechanical claw 18, the finished product can come above the storage box 20 along with lifting and transferring, and the finished product falls into the storage box 20 along with the falling of the mechanical claw 18, so that the storage of the finished product is completed, and the storage box 20 can be transferred outwards through the arrangement of the translation vehicle and the translation rail 4; the four movable seats 14 are connected into a whole by matching with the arrangement of the four connecting rods 22, so that the movable seat 14 can only move simultaneously, in the same direction and at the same distance, the regularity of a square structure surrounded by the centers of the diamond wires 10 is ensured, and the cutting precision is improved.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (10)
1. A single crystal bar wire squaring device is characterized in that: including square chest (1), the inboard bottom rigid coupling of square chest (1) has four slide columns (5), is provided with square ring (7) between the inboard of four slide columns (5), four the outside equiangular displacement of slide column (5) at square ring (7), be provided with sliding component between square ring (7) and slide column (5), sliding component is used for driving square ring (7) and reciprocates, feed inlet (6) to inboard are seted up to the bottom of square chest (1), feed inlet (6) and square ring (7) set up with one heart, the bottom of feed inlet (6) is provided with the receiving element who is used for receiving finished product and leftover bits, the inner circle of square ring (7) is provided with four buddha's warrior attendant line (10), the one end and the square ring (7) rigid coupling of buddha's warrior attendant line (10) are equiangular displacement, the other end of buddha's warrior attendant line (10) is provided with moving component, moving component is used for driving the annular buddha's warrior attendant line (10) of the other end.
2. The single crystal ingot wire-square apparatus of claim 1, wherein: the utility model discloses a square cutting machine, including square cutting case (1), bottom, movable module, cantilever (17) are fixed with in the top rigid coupling of square cutting case (1), the inboard sliding connection of bottom of driving rail (2) has movable module, movable module can reciprocate in driving rail (2) bottom, movable module's bottom rigid coupling has electric telescopic handle, cantilever (17) are fixed with in the bottom, cantilever (17) are provided with a plurality of gripper (18) that are annular setting by the bottom outside.
3. The single crystal ingot wire-square apparatus of claim 2, wherein: the diamond wire moving assembly comprises a moving seat (14), the diamond wire (10) is connected with the moving seat (14), an annular groove (21) is formed in the inner ring of the square ring (7), clamping plates (16) are fixedly connected to the top end and the bottom of the moving seat (14), the moving seat (14) is in sliding clamping connection with the annular groove (21) through the clamping plates (16), and an electric wheel attached to the inner wall of the annular groove (21) is arranged on the outer side of the moving seat (14).
4. A single crystal ingot wire-square apparatus as set forth in claim 3, wherein: the outside rigid coupling of evolution ring (7) has four winding drums (11) that are annular arrangement, the outside of evolution ring (7) still rigid coupling has four supply drums (12) that are annular arrangement, the structure of supply drum (12) is the same with winding drum (11), the bottom of winding drum (11) and supply drum (12) all is fixedly connected with servo motor (15), the both ends rigid coupling of buddha's warrior attendant line (10) are outside at the output of two corresponding servo motor (15) respectively.
5. The single crystal ingot wire-square apparatus of claim 4, wherein: the inner ring of the square opening ring (7) is fixedly connected with four locking valves (13), the positions of the locking valves (13) correspond to the feeding cylinder (12), the diamond wire (10) passes through the locking valves (13), the diamond wire (10) passes through the inside of the movable seat (14) to be connected with the winding cylinder (11), and the inner side of the movable seat (14) is fixedly connected with an electromagnetic valve.
6. The single crystal ingot wire-square apparatus of claim 5, wherein: the sliding assembly comprises four lifting modules (9), the four lifting modules (9) are respectively connected to the outer side of the sliding column (5) in a sliding clamping mode, the lifting modules (9) are composed of two chucks which are vertically arranged in parallel, the two chucks limit the square opening ring (7) to the middle of the square opening ring, and a remote control wheel which is movably attached to the sliding column (5) is connected to the outer side of the chucks.
7. The single crystal ingot wire-square apparatus of claim 6, wherein: the receiving assembly comprises a corner frame, a round hole corresponding to the width of the monocrystalline ingot is formed in the middle of the corner frame, the corner frame is located below the feeding hole (6), the middle of the corner frame is arranged in a concave shape, a buffer pad made of elastic materials is fixedly connected to the inner wall of the corner frame, two guide rails used for moving are connected between the corner frame and the bottom of the square box (1), and a translation module is further connected between the corner frame and the guide rails and used for driving the corner frame to move.
8. The monocrystalline ingot wire-square apparatus as set forth in claim 7, wherein: one side rotation of evolution case (1) is connected with closed door (3), one side that the inside of evolution case (1) leaned on closed door (3) is provided with containing box (20), the bottom of containing box (20) is provided with translation rail (4), translation rail (4) and evolution case (1) rigid coupling, be connected with the translation car between translation rail (4) and containing box (20).
9. The monocrystalline ingot wire-square apparatus as set forth in claim 8, wherein: a semi-annular connecting rod (22) is fixedly connected between the four movable seats (14), the four connecting rods (22) form an annular structure, the annular structure is positioned at the inner side of an annular groove (21) of the square opening ring (7), and the annular structure is positioned below the diamond wire (10).
10. The single crystal ingot wire-square apparatus of claim 9, wherein: the sliding column is characterized in that a clamping groove (8) is formed in one side, close to the square opening ring (7), of the sliding column (5), and a sliding block matched with the clamping groove (8) is fixedly connected to the outer side of the square opening ring (7).
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| CN202310654777.9A CN116373144B (en) | 2023-06-05 | 2023-06-05 | Single crystal bar wire squaring device |
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