CN116222984B - Grating ruler reflectivity measuring device - Google Patents
Grating ruler reflectivity measuring device Download PDFInfo
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- CN116222984B CN116222984B CN202310511984.9A CN202310511984A CN116222984B CN 116222984 B CN116222984 B CN 116222984B CN 202310511984 A CN202310511984 A CN 202310511984A CN 116222984 B CN116222984 B CN 116222984B
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- 238000002310 reflectometry Methods 0.000 title claims abstract description 61
- 238000005259 measurement Methods 0.000 claims abstract description 31
- 230000007246 mechanism Effects 0.000 claims description 22
- 230000003287 optical effect Effects 0.000 claims description 13
- 239000000523 sample Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 10
- 238000009434 installation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention provides a grating ruler reflectivity measuring device, which comprises: the beam shrinking unit is used for converting an incident beam into a parallel beam; the grating ruler fixing unit is used for installing a grating ruler to be measured and comprises a grating ruler bevel fixing seat, the grating ruler bevel fixing seat is provided with a bevel which is perpendicular to a horizontal plane and forms a preset angle with a parallel light beam, the grating ruler is installed on the bevel and can move up and down, a bevel first through hole and a bevel second through hole are arranged in the grating ruler bevel fixing seat, the parallel light beam can irradiate the grating ruler through the bevel first through hole and generate a reflected light beam, and the bevel second through hole can pass through the reflected light beam; the power measuring unit is positioned on the side surface of the inclined plane fixing seat of the grating ruler and is used for measuring the reflected light beam. The reflectivity measuring device of the grating ruler can directly measure the reflected light of the grating ruler, and improves the measurement accuracy; and the device does not need a light splitting element, and has the advantages of simple structure and easy operation.
Description
Technical Field
The invention belongs to the technical field of measurement, and relates to a grating ruler reflectivity measuring device.
Background
The grating ruler is used as an important tool for measuring displacement and is widely applied to various precision machines. The reflectivity of the reflective grating ruler is an important technical index, and the normal operation of the reading head is directly affected. The traditional reflectivity measurement system is used for measuring the reflected light of an object at an angle of 0 degrees, a light splitting element is needed, the reflected light can be measured after passing through a plurality of optical elements, the structure of the reflection measurement device is complex, the operation difficulty is high, and the reflected light can cause light loss after passing through the plurality of optical elements to influence the measurement result.
Therefore, how to provide a device for measuring reflectivity of a grating ruler to reduce the complexity of the device and improve the accuracy of reflectivity measurement is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a device for measuring reflectivity of a grating ruler, which is used for solving the problems of complex structure, low measurement accuracy and the like of the device for measuring reflectivity of the grating ruler in the prior art.
To achieve the above and other related objects, the present invention provides a grating scale reflectivity measuring apparatus, comprising:
the beam shrinking unit is used for converting an incident beam into a parallel beam;
the grating ruler fixing unit is used for installing a grating ruler to be measured and comprises a grating ruler inclined plane fixing seat, wherein the grating ruler inclined plane fixing seat is provided with an inclined plane which is perpendicular to a horizontal plane and forms a preset angle with the parallel light beam, and the grating ruler is installed on the inclined plane and can move up and down; the optical grating ruler comprises an optical grating ruler bevel fixing seat, a power measuring unit and a light source, wherein a bevel first through hole and a bevel second through hole are arranged in the optical grating ruler bevel fixing seat, the parallel light beam can irradiate the optical grating ruler through the bevel first through hole and generate a reflected light beam, and the reflected light beam can irradiate the power measuring unit outside the optical grating ruler bevel fixing seat through the bevel second through hole;
the power measuring unit is positioned on the side surface of the inclined plane fixing seat of the grating ruler and is used for measuring the reflected light beam.
Optionally, an included angle between the inclined plane and the parallel light beam is 45 degrees, wherein the inclined plane first through hole is perpendicular to the inclined plane second through hole, an included angle between the inclined plane first through hole and the inclined plane is 45 degrees, and an included angle between the inclined plane second through hole and the inclined plane is 45 degrees.
Optionally, the upper end of inclined plane is equipped with first grating chi fixed block, the lower extreme on inclined plane is equipped with the second grating chi fixed block, first grating chi fixed block with be equipped with the grating chi and remove the slider between the second grating chi fixed block, the grating chi remove the slider can in first grating chi fixed block with the second grating chi fixed block is gone up and down, waits to measure the grating chi install in on the grating chi removes the slider along with the grating chi removes the slider and reciprocates.
Optionally, a bevel groove penetrating through the bevel is formed in the bevel, the grating ruler moving slide block comprises a first slide block bevel and a second slide block bevel which are oppositely arranged, a moving slide block protruding portion matched with the bevel groove is arranged on the first slide block bevel, and the moving slide block protruding portion is in sliding connection with the bevel groove.
Optionally, a sliding block groove is formed in the second inclined plane of the sliding block, and the grating ruler is arranged behind the grating ruler moving sliding block and fixed to the grating ruler moving sliding block through a clamping plate, wherein a part of the clamping plate extends into the sliding block groove.
Optionally, a riser is arranged between the first grating ruler fixing block and the second grating ruler fixing block, the upper end of the riser is connected with the first grating ruler fixing block, the lower end of the riser is connected with the second grating ruler fixing block, a waist hole is formed in the riser, and when the grating ruler moving sliding block moves to a preset position between the first grating ruler fixing block and the second grating ruler fixing block, the grating ruler moving sliding block is fixed through the waist hole.
Optionally, the beam shrinking unit includes a beam shrinking base, a positive lens component and a negative lens component, the beam shrinking base is connected with the grating scale fixing unit, the positive lens component is installed at one end of the beam shrinking base away from the grating scale fixing unit, the negative lens component is installed at one end of the beam shrinking base close to the grating scale fixing unit, wherein the positive lens component is used for converting the incident beam into a converging beam, and the negative lens component is used for converting the converging beam into a parallel beam.
Optionally, the positive lens subassembly includes positive lens subassembly fixing base, positive lens rotatory mounting and positive lens, the positive lens subassembly fixing base install in the beam shrinking base, be equipped with in the positive lens subassembly fixing base towards the first screw hole of positive lens of grating chi fixing unit, the positive lens rotatory mounting is close to the one end extension of positive lens subassembly fixing base goes into in the first screw hole of positive lens, the positive lens rotatory mounting is kept away from the one end of positive lens subassembly fixing base is equipped with the positive lens counter bore, the positive lens install in the positive lens counter bore, wherein, the positive lens rotatory mounting is close to the one end of positive lens subassembly fixing base be equipped with the external screw thread that the first screw hole of positive lens matches, the positive lens rotatory mounting can in the first screw hole of positive lens is rotatory forward or rotatory back, be equipped with in the positive lens rotatory mounting towards the positive lens second through-hole of negative lens subassembly, the incident light beam can pass through the positive lens changes into the beam of gathering gets into in the positive lens second through-hole.
Optionally, the negative lens subassembly includes negative lens fixing base and negative lens, the negative lens fixing base install in the base contracts the beam, keep away from in the negative lens fixing base the one end of positive lens subassembly is equipped with the negative lens counter bore, the negative lens install in the negative lens counter bore, be close to in the negative lens fixing base one end of positive lens subassembly is equipped with the first through-hole of negative lens, wherein, the beam that gathers gets into in the first through-hole of negative lens passes through the negative lens conversion becomes parallel light beam.
Optionally, the optical lens assembly further comprises an aperture fixing assembly, the aperture fixing assembly comprises a first aperture fixing piece, a second aperture fixing piece and a third aperture fixing piece, the first aperture fixing piece is installed at one end of the positive lens assembly, which is close to the negative lens assembly, the second aperture fixing piece is installed at one end of the negative lens assembly, which is close to the positive lens assembly, the third aperture fixing piece is located at one side, away from the beam shrinking unit, of the grating ruler inclined plane fixing seat and is spaced from the grating ruler inclined plane fixing seat by a preset distance, a first aperture light through hole is formed in the first aperture fixing piece, a second aperture light through hole is formed in the second aperture fixing piece, a third aperture light through hole is formed in the third aperture fixing piece, wherein the converged light beam can irradiate into the second aperture light through hole and then irradiates into the negative lens assembly through the first aperture light through hole, and the parallel light beam can irradiate into the third aperture light through hole.
Optionally, the power measurement unit includes the power meter fixing base, be equipped with in the power meter fixing base with the first through-hole of power meter that inclined plane second through-hole is in the same straight line, be equipped with the power meter recess in the power meter fixing base in the one end that keeps away from the fixed unit of grating chi, the power meter recess is used for installing the power meter probe, the reflection light beam can pass through the inclined plane second through-hole with the first through-hole of power meter is caught by the power meter probe.
As described above, the device for measuring the reflectivity of the grating ruler can directly measure the reflected light of the grating ruler, and improves the measurement accuracy; and the device does not need a light splitting element, and has the advantages of simple structure and easy operation. In addition, the distance between the positive lens and the negative lens is adjustable, so that the influence of part machining errors and installation errors is eliminated, and the measurement result can be more accurate; moreover, the grating ruler can move up and down along with the grating ruler moving slide block, so that the grating ruler reflectivity measuring device can be suitable for measuring grating rulers with various sizes and stripe positions, and the flexibility of the equipment is improved.
Drawings
Fig. 1 shows a top view of the grating scale reflectivity measuring mechanism provided by the invention.
Fig. 2 shows a cross-sectional view of the grating scale reflectivity measuring mechanism provided by the invention.
Fig. 3 is a schematic diagram showing that an incident beam is converted into a parallel beam and irradiated to a grating scale in the grating scale reflectivity measuring device provided by the invention.
Fig. 4 is a top view of a beam shrinking base in the grating scale reflectivity measuring mechanism according to the present invention.
Fig. 5 is a plan view showing a grating scale fixing base in the grating scale reflectivity measuring device provided by the invention.
Fig. 6 is a rear view of a grating scale fixing base in the grating scale reflectivity measuring apparatus according to the present invention.
Fig. 7 is a top view of a bevel fixing seat of a grating ruler in the device for measuring reflectivity of the grating ruler.
Fig. 8 is a front view of a bevel fixing seat of a grating ruler in the device for measuring reflectivity of the grating ruler.
Fig. 9 is a top view of a first grating scale fixing block in the grating scale reflectivity measuring device provided by the invention.
Fig. 10 is a front view of a first grating scale fixing block in the grating scale reflectivity measuring device provided by the invention.
Fig. 11 is a schematic structural view of a riser in the grating scale reflectivity measuring mechanism according to the present invention.
Fig. 12 is a top view of a movable slider of a grating scale in the device for measuring reflectivity of a grating scale according to the present invention.
Fig. 13 is a front view of a grating scale moving slide block in the grating scale reflectivity measuring device provided by the invention.
Fig. 14 is a schematic structural view of a clamping plate in the device for measuring reflectivity of a grating ruler.
Fig. 15 is a schematic view showing that a grating scale is mounted on a bevel fixing seat of the grating scale in the device for measuring reflectivity of the grating scale according to the present invention.
Fig. 16 is a schematic view showing that a reflected light beam is captured by a power measuring unit in the grating scale reflectivity measuring device provided by the invention.
Fig. 17 is a left side view showing a power measuring unit in the grating scale reflectivity measuring device provided by the invention.
Fig. 18 is a front view showing a power measuring unit in the grating scale reflectivity measuring device provided by the invention.
Fig. 19 is a left side view of the positive lens assembly holder in the grating scale reflectivity measuring mechanism according to the present invention.
Fig. 20 is a left side view of a first orifice mount in the grating scale reflectivity measuring mechanism of the present invention.
Fig. 21 is a left side view of a negative lens holder in the grating scale reflectivity measuring mechanism of the present invention.
Fig. 22 is a left side view of a second orifice mount in the grating scale reflectivity measuring mechanism of the present invention.
Fig. 23 is a left side view showing a third orifice fixing member in the grating scale reflectivity measuring mechanism according to the present invention.
Fig. 24 is a left side view showing a rear end fixing base in the grating scale reflectivity measuring mechanism according to the present invention.
Fig. 25 is a schematic diagram showing the installation of positive and negative lenses in the grating scale reflectivity measuring device according to the present invention.
Fig. 26 is a schematic diagram showing connection of each component in the grating scale reflectivity measuring mechanism according to the present invention.
Description of element numbers: 100-beam shrinking unit, 110-beam shrinking base, 1100-base first through hole, 1101-base second through hole, 1102-base first screw hole, 1103-base second screw hole, 120-positive lens component, 121-positive lens component fixing seat, 1210-positive lens first screw hole, 1211-positive lens second screw hole, 1212-positive lens third screw hole, 1213-positive lens first through hole, 122-positive lens rotation fixing piece, 1220-positive lens counter bore, 1221-external screw thread, 1222-positive lens second through hole, 1223-positive lens fourth screw hole, 123-positive lens, 130-negative lens component, 131-negative lens fixing seat, 1310-negative lens counter bore, 1311-negative lens first through hole, 1312-negative lens first screw hole, 1313-negative lens second through hole, 1314-negative lens second screw hole, 132-negative lens; 200-grating scale fixing units, 210-grating scale bevel fixing bases, 2100-bevel, 2101-bevel first through holes, 2102-bevel second through holes, 2103-bevel third through holes, 2104-bevel grooves, 2105-bevel first threaded holes, 2106-bevel second threaded holes, 220-first grating scale fixing blocks, 2200-fixing block convex parts, 2201-fixing block first threaded holes, 2202-fixing block first through holes, 230-second grating scale fixing blocks, 2300-fixing block second threaded holes, 2301-fixing block second through holes, 240-grating scale moving slide blocks, 2400-slide block first bevel, 2401-slide block second bevel, 2402-moving slide block convex parts, 2403-slide block grooves, 2404-slide block first threaded holes, 2405-slide block second threaded holes, 250-clamp plates, 2500-clamp plate main bodies, 2501-clamp plate heads, 2502-clamp plate through holes, 260-clamp plates, 2600-clamp plate first through holes, 2601-clamp plate second through holes, 2602-waist scale fixing bases, 270270-270-base bases, 2700-third through holes, 2702-clamp plates, 2703-clamp plates, 300-power meter, 300-base, 300-power meter, 300-meter, and other power meter, and the power meter; 400-small hole fixing components, 410-first small hole fixing pieces, 4100-first small hole light-passing holes, 4101-small hole first through holes, 420-second small hole fixing pieces, 4200-second small hole light-passing holes, 4201-small hole second through holes, 430-third small hole fixing pieces, 4300-third small hole light-passing holes, 4301-small hole third through holes, 440-rear end fixing seats, 4400-small hole fourth light-passing holes, 4401-small hole first threaded holes and 4402-small hole fourth through holes; 500-grating ruler; 600-incident beam, 610-converging beam, 620-parallel beam, 630-reflecting beam.
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
Please refer to fig. 1 to 26. It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.
The present embodiment provides a grating scale reflectivity measuring device, please refer to fig. 1 and 2, which are respectively shown as a top view and a cross-sectional view of the grating scale reflectivity measuring device, the grating scale reflectivity measuring device includes a beam shrinking unit 100, a grating scale fixing unit 200 and a power measuring unit 300, wherein the beam shrinking unit 100 is used for converting an incident beam 600 into a parallel beam 620; the grating scale fixing unit 200 is used for installing a grating scale 500 to be measured, the grating scale fixing unit 200 comprises a grating scale inclined plane fixing seat 210, the grating scale inclined plane fixing seat 210 is provided with an inclined plane 2100 which is perpendicular to a horizontal plane and forms a preset angle with a parallel light beam 620, the grating scale 500 is installed on the inclined plane 2100 and can move up and down, an inclined plane first through hole 2101 and an inclined plane second through hole 2102 are arranged in the grating scale inclined plane fixing seat 210, the parallel light beam 620 can irradiate the grating scale 500 through the inclined plane first through hole 2101 and generate a reflected light beam 630, and the reflected light beam 630 can irradiate the power measuring unit 300 outside the grating scale inclined plane fixing seat 210 through the inclined plane second through hole 2102; the power measuring unit 300 is located at a side of the bevel gear 210 of the grating ruler, and is used for measuring the reflected light beam 630.
As an example, the beam shrinking unit 100 includes a beam shrinking base 110, a positive lens assembly 120 and a negative lens assembly 130, the beam shrinking base 110 is connected with the grating scale fixing unit 200, the positive lens assembly 120 is mounted at one end of the beam shrinking base 110 far away from the grating scale fixing unit 200, and the negative lens assembly 130 is mounted at one end of the beam shrinking base 110 near the grating scale fixing unit 200. Referring to fig. 3, a schematic diagram of the incident beam 600 being converted into the parallel beam 620 and irradiated onto the grating scale 500 is shown, specifically, the incident beam 600 is converted into the converging beam 610 by the positive lens assembly 120, the converging beam 610 is converted into the parallel beam 620 by the negative lens assembly 130, and the parallel beam 620 is irradiated onto the grating scale 500 through the inclined first through hole 2101. Preferably, the area of the beam shrinking base 110 for installing the positive lens assembly 120 and the negative lens assembly 130 is in a boss shape, so that the centers of the positive lens assembly 120, the negative lens assembly 130 and the grating scale inclined surface fixing seat 210 are positioned on the same horizontal straight line.
As an example, referring to fig. 4, a top view of the beam shrinking base 110 is shown, wherein a base first through hole 1100 penetrating the beam shrinking base 110 in a vertical direction is provided in the beam shrinking base 110, and the base first through hole 1100 is used for connecting with an external lifting platform; one end of the beam shrinking base 110 away from the grating ruler fixing unit 200 is provided with a base first threaded hole 1102 which is vertically arranged, and the base first threaded hole 1102 is used for installing the positive lens assembly 120; one end of the beam shrinking base 110, which is close to the grating ruler fixing unit 200, is provided with a base second threaded hole 1103 which is arranged along the vertical direction, and the base second threaded hole 1103 is used for installing the negative lens assembly 130; a base second through hole 1101 is provided between the base first through hole 1100 and the base second threaded hole 1103, and the base second through hole 1101 is used for being connected with the grating ruler fixing unit 200.
As an example, the positive lens assembly 120 includes a positive lens assembly fixing base 121, a positive lens rotation fixing member 122, and a positive lens 123; the positive lens assembly fixing base 121 is mounted on the beam shrinking base 110, and a positive lens first threaded hole 1210 facing the grating scale fixing unit 200 is provided in the positive lens assembly fixing base 121, as shown in fig. 19. A positive lens counterbore 1220 is arranged at one end of the positive lens rotation fixing piece 122 far away from the positive lens assembly fixing seat 121, and the positive lens counterbore 1220 is used for installing the positive lens 123; an external thread 1221 is arranged at one end of the positive lens rotation fixing member 122 near the positive lens assembly fixing seat 121 and extends into the positive lens first threaded hole 1210, the external thread 1221 is a fine thread, and the positive lens rotation fixing member 122 can rotate forward or rotate backward in the positive lens first threaded hole 1210; the positive lens rotation fixing member 122 is provided with a positive lens second through hole 1222 facing the negative lens assembly 130, the positive lens second through hole 1222 is communicated with the positive lens counter bore 1220, and the positive lens second through hole 1222 is used for passing the light beam converged by the positive lens 123; the positive lens 123 is mounted in the positive lens counterbore 1220 with the convex side of the positive lens 123 facing away from the negative lens assembly 130.
As an example, a positive lens second screw hole 1211 is provided in the positive lens assembly holder 121, and the positive lens second screw hole 1211 corresponds to the position of the positive lens first screw hole 1210 in the vertical direction, and the positive lens rotation fixture 122 is fixed by the positive lens second screw hole 1211 after rotating forward or backward in the positive lens first screw hole 1210 to a preset position.
As an example, the positive lens rotation fixture 122 has a positive lens fourth threaded hole 1223 formed therein, the positive lens fourth threaded hole 1223 being perpendicular to the positive lens counterbore 1220 for adjusting and fixing the positive lens 123; preferably, the number of the fourth screw holes 1223 of the positive lens is four, and the four screw holes are uniformly distributed on the outer side of the counterbore 1220 of the positive lens, when the positive lens 123 is mounted in the counterbore 1220 of the positive lens, the fourth screw holes 1223 of the positive lens can be inserted with bolts from four directions of up, down, left and right, the positive lens 123 is adjusted to the center position, and then the fourth screw holes 1223 of the positive lens without bolts are fixed by dispensing.
By way of example, the incident light beam 600 is converted into a converging light beam 610 by the positive lens 123 into a positive lens second through hole 1222 to be irradiated into the negative lens assembly 130.
As an example, the negative lens assembly 130 includes a negative lens holder 131 and a negative lens 132, the negative lens holder 131 is mounted on the beam shrinking base 110, one end of the negative lens holder 131 far away from the positive lens assembly 120 is provided with a negative lens counterbore 1310, the negative lens 132 is mounted on one side of the negative lens counterbore 1310, the concave surface of the negative lens 132 faces the grating scale fixing unit 200, one end of the negative lens holder 131 near the positive lens assembly 120 is provided with a negative lens first through hole 1311, and the negative lens first through hole 1311 is communicated with the negative lens counterbore 1310.
As an example, the negative lens holder 131 is provided therein with a negative lens first screw hole 1312, and the negative lens first screw hole 1312 is perpendicular to the negative lens counterbore 1310 for adjusting and fixing the negative lens 132; preferably, the number of the first screw holes 1312 of the negative lens is four, and the first screw holes 1312 of the negative lens are uniformly distributed on the outer side of the counter bore 1310 of the negative lens, when the negative lens 132 is mounted in the counter bore 1310 of the negative lens, the first screw holes 1312 of the negative lens can be inserted with bolts from four directions of up, down, left and right, and after the negative lens 132 is adjusted to the central position, dispensing and fixing are performed in the first screw holes 1312 of the negative lens without bolts.
As an example, the condensed light beam 610 enters the negative lens first through hole 1311 to be irradiated to the negative lens 132, is converted into a parallel light beam 620 by the negative lens 132, and is irradiated to the grating scale fixing unit 200.
As an example, the grating scale fixing unit 200 further includes a grating scale fixing base 270, wherein the grating scale bevel fixing base 210 is mounted to the grating scale fixing base 270, and the grating scale 500 is mounted to the grating scale bevel fixing base 210. Referring to fig. 5, a top view of a grating scale fixing base 270 is shown, wherein a base third through hole 2700 is provided in the grating scale fixing base 270 along a vertical direction, and the base third through hole 2700 is used for connecting with an external lifting platform; a third base threaded hole 2701 is formed in one end, close to the beam shrinking unit 100, of the grating scale fixing base 270, the third base threaded hole 2701 corresponds to the second base through hole 1101 in position, and the third base threaded hole 2701 is matched with the second base through hole 1101 to connect the grating scale fixing base 270 with the beam shrinking base 110; preferably, an extension part is arranged at one end of the beam shrinking base 110 close to the grating scale fixing base 270, a notch part is arranged at one end of the grating scale fixing base 270 close to the beam shrinking base 110, and the extension part is matched with the notch part for complementarily connecting the grating scale fixing base 270 with the beam shrinking base 110.
As an example, a fourth base threaded hole 2702 is further provided in the grating scale fixing base 270, and the fourth base threaded hole 2702 is used for installing the grating scale bevel fixing base 210, wherein the fourth base threaded hole 2702 is located between the third base threaded hole 2700 and the third base threaded hole 2701.
As an example, the end of the grating scale fixing base 270 remote from the beam shrinking unit 100 is provided with a base fifth screw hole 2703, and the base fifth screw hole 2703 is used for installing the rear end fixing base 440.
As an example, referring to fig. 6, which is a rear view of the scale fixing base 270, a base sixth screw hole 2704 is provided at a side surface of the scale fixing base 270, and the base sixth screw hole 2704 is used to mount the power measuring unit 300.
As an example, referring to fig. 7, a top view of the bevel-rule fixing base 210 is shown, and a third bevel hole 2103 is vertically disposed in the bevel-rule fixing base 210, where the third bevel hole 2103 corresponds to the fourth base threaded hole 2702; the end of the grating ruler bevel fixing base 210 far away from the beam shrinking unit 100 is a bevel 2100, and a bevel groove 2104 penetrating the bevel 2100 in the vertical direction is arranged in the bevel 2100.
As an example, the number of the bevel grooves 2100 is two, and the two bevel grooves 2100 are spaced apart by a preset distance; preferably, the bevel groove 2100 is semi-circular in shape.
As an example, referring to fig. 8, which is a front view of the bevel fixing base 210 of the grating ruler, the upper end portion of the bevel fixing base 210 of the grating ruler is provided with a first threaded hole 2105 of a bevel, and the first threaded hole 2105 of the bevel is used for installing the first fixing block 220 of the grating ruler; the lower end of the bevel-rule bevel fixing base 210 is provided with a bevel second threaded hole 2106, and the bevel second threaded hole 2106 is used for installing the second bevel-rule fixing block 230, wherein the bevel first threaded hole 2105 corresponds to the bevel second threaded hole 2106 in the vertical direction and is spaced by a preset distance.
As an example, referring to fig. 9, which is a top view of a first grating scale fixing block 220, a fixing block protruding portion 2200 matching with the bevel groove 2100 is provided on one side of the first grating scale fixing block 220 near the grating scale bevel fixing seat 210; referring to fig. 10, which is a front view of the first grating scale fixing block 220, a fixing block first through hole 2202 is provided in the first grating scale fixing block 220, and the fixing block first through hole 2202 corresponds to the position of the inclined plane first threaded hole 2105, so as to mount the first grating scale fixing block 220 on the inclined plane 2100; the first grating ruler fixing block 220 is further provided with a fixing block first threaded hole 2201, and the fixing block first threaded hole 2201 is used for installing the riser 260, wherein the fixing block first threaded hole 2201 and the fixing block first through hole 2202 are spaced at a preset distance in the horizontal direction.
As an example, the structure of the second grating scale fixing block 230 is identical to that of the first grating scale fixing block 230, and detailed description thereof will be omitted. Specifically, the second grating ruler fixing block 230 includes a fixing block second through hole 2301 and a fixing block second screw hole 2300.
As an example, referring to fig. 11, a schematic structural diagram of a riser 260 is shown, wherein a riser first through hole 2600 is formed at an upper end portion of the riser 260, and the riser first through hole 2600 corresponds to a first threaded hole 2201 of a fixed block in position for connecting the riser 260 with the first grating ruler fixed block 220; the lower tip of riser 260 is equipped with riser second through hole 2601, and riser second through hole 2601 is used for being connected riser 260 and second grating chi fixed block 230 with fixed block second screw hole 2300's position correspondence, and the upper end of riser 260 is connected with first grating chi fixed block 220 promptly, and the lower extreme of riser 260 is connected with second grating chi fixed block 230, wherein, is equipped with waist hole 2602 between riser first through hole 2600 and riser second through hole 2601, and waist hole 2602 is used for fixing grating chi movable slide block 240.
As an example, referring to fig. 12, which shows a top view of the grating scale moving slide 240, the grating scale moving slide 240 includes a first slide slope 2400 and a second slide slope 2401 disposed opposite to each other, wherein the first slide slope 2400 contacts the slope 2100, the first slide slope 2400 is provided with a moving slide protrusion 2402 adapted to the slope recess 2104, and the moving slide protrusion 2402 is slidably connected to the slope recess 2104; a slider groove 2403 is provided in the slider second ramp 2401 toward the slider first ramp 2400.
As an example, referring to fig. 13, a front view of the grating scale moving slide 240 is shown, in which the grating scale moving slide 240 is provided with a first threaded slide hole 2404, and the first threaded slide hole 2404 cooperates with the waist hole 2602 to fix the grating scale moving slide 240; further, a slider second screw hole 2405 is provided in the slider groove 2403.
As an example, the height of one end of the grating scale moving slide 240, which is close to the grating scale bevel fixing base 210, is higher than that of one end of the grating scale moving slide 240, which is far away from the grating scale bevel fixing base 210, and the grating scale 500 is mounted on the grating scale moving slide 240 through the clamping plate 250 after the grating scale 500 is placed on the grating scale moving slide 240.
As an example, referring to fig. 14, a schematic structural diagram of a clamping plate 250 is shown, the clamping plate 250 has a T-shaped structure, a clamping plate body 2500 of the clamping plate 250 has a rectangular shape, a clamping plate head 2501 protruding from the clamping plate body 2500 along a horizontal direction is provided at a top end of the clamping plate body 2500, a clamping plate through hole 2502 is provided in the clamping plate body 2500, and the clamping plate through hole 2502 is matched with a sliding block second threaded hole 2405 to be suitable for mounting the clamping plate 250 on a grating ruler moving sliding block 240.
As an example, please refer to fig. 15, which shows a schematic diagram of a grating scale 500 mounted on a grating scale slope fixing seat 210, wherein a first grating scale fixing block 220 is mounted on an upper end of a slope 2100, a second grating scale fixing block 230 is mounted on a lower end of the slope 2100, a grating scale moving slide 240 can move between the first grating scale fixing block 220 and the second grating scale fixing block 230, the grating scale 500 is fixed on the grating scale moving slide 240 through a clamping plate 250 after being placed on the grating scale moving slide 240, a vertical plate 260 is arranged between the first grating scale fixing block 220 and the second grating scale fixing block 230, and after the grating scale moving slide 240 drives the grating scale 500 to move to a predetermined position, the grating scale moving slide 240 is fixed through a waist hole 2602.
Specifically, in actual measurement, when the parallel light beam 620 is satisfied to irradiate the grating scale stripe of the grating scale 500, the fixed grating scale moving slider 240.
As an example, the materials of the grating ruler moving slide 240 and the clamping plate 250 include plastics, so as to avoid damage to the surface of the grating ruler 500 in the clamping process; and, the grating ruler 500 can move up and down along with the grating ruler moving slide block 240, so that the grating ruler reflectivity measuring device can measure the grating ruler with various sizes and stripe positions, and the flexibility and the service life of the device are improved.
As an example, referring to fig. 16, a schematic diagram is shown in which the reflected light beam 630 is captured by the power measurement unit 300, specifically, the reflected light beam 630 after the parallel light beam 620 irradiates the grating scale 500 is captured by the power measurement unit 300 through the inclined second through hole 2102.
As an example, referring to fig. 17, which is a left side view of the power meter fixing base 3001, a power meter first through hole 3002 is formed in the power meter fixing base 3001 and is in the same line with the inclined plane second through hole 2102, a power meter groove 3003 is formed in one end, far away from the grating scale fixing unit 200, of the power meter fixing base 3001, the power meter groove 3002 is used for installing a power meter probe, the reflected light beam 630 is captured by the power meter probe through the inclined plane second through hole 2102 and the power meter first through hole 3002, a power meter threaded hole 3004 is formed in a position, corresponding to the power meter groove 3003, of the power meter fixing base 3001, and the power meter threaded hole 3004 is used for fixing the power meter probe. Referring to fig. 18, which is a front view of the power meter fixing base 3001, a power meter second through hole 3005 is formed at a lower end portion of the power meter fixing base 3001, and the position of the power meter second through hole 3005 corresponds to the position of the sixth threaded hole 2704 of the base for mounting the power meter fixing base 3001 on the grating ruler fixing base 270.
As an example, the angle between the inclined plane 2100 and the parallel light beam 620 is 45 degrees, wherein the inclined plane first through hole 2101 is perpendicular to the inclined plane second through hole 2102, the angle between the inclined plane first through hole 2101 and the inclined plane 2100 is 45 degrees, the angle between the inclined plane second through hole 2102 and the inclined plane 2100 is 45 degrees, that is, the parallel light beam 620 irradiates the grating ruler 500 at an incident angle of 45 degrees, and the reflected light beam 630 is captured by the power measuring unit 300 at a reflection angle of 45 degrees. For measuring 0 degree's reflected light among the prior art, need a plurality of beam splitting elements, equipment structure is complicated, and the operation degree of difficulty is high, and can't measure original reflected light, and the reflected light of measuring 45 degrees need not beam splitting element in this application, simple structure, easily operation, and power measurement unit 300 can directly measure original reflected light, improves and measures the precision.
As an example, in the measurement process, the incident beam 600 is converted into the parallel beam 620 with the grating fringe size, when the focal length of the positive lens 123 and the focal length of the negative lens 132 are in the preset ratio, the light spot of the incident beam 600 is reduced by the beam shrinking unit 100 and is converted into the parallel beam 620, and the beam size of the parallel beam 620 and the beam size of the incident beam 600 satisfy the following formula:
Wherein a represents the size of the parallel beam, b represents the size of the incident beam, L 1 Represents the negative lens focal length, L 2 Indicating the positive lens focal length.
As an example, the focal length of the positive lens 123 is greater than that of the negative lens 132, and the long Jiao Zheng lens and the short-focus negative lens are combined to perfect the mounting process, because the positive lens rotation fixing member 122 can rotate forward or rotate backward in the positive lens first screw hole 1210, the distance between the positive lens 123 and the negative lens 132 is further adjusted, the influence of the part processing error and the mounting error is eliminated, the parallel light beam satisfying the measurement is generated, and the measurement result can be more accurate.
The optimal distance between the positive lens 123 and the negative lens 132 is L 2 -L 1 The optimal distance is the distance that the incident light beam 600 can become a reduced parallel light beam 620 after passing through the positive lens 123 and the negative lens 132. The distance between the positive lens 123 and the negative lens 132 is ideally L 2 -L 1 Preferably, the reduced parallel beam 620 in practice meets the proper distance with minimal near and far variation.
As an example, to more accurately determine the distance between the positive lens 123 and the negative lens 132 for fixing, the grating scale reflectivity measurement apparatus further includes a small hole fixing assembly 400, the small hole fixing assembly 400 includes a first small hole fixing member 410, a second small hole fixing member 420 and a third small hole fixing member 430, the first small hole fixing member 410 is mounted at one end of the positive lens assembly 120 near the negative lens assembly 130, the second small hole fixing member 420 is mounted at one end of the negative lens assembly 130 near the positive lens assembly 120, the third small hole fixing member 430 is located at one side of the grating scale bevel fixing seat 210 far from the beam shrinking unit 100 and spaced from the grating scale bevel fixing seat 210 by a preset distance, a first small hole through hole 4100 is provided in the first small hole fixing member 410, a second small hole through hole 4200 is provided in the second small hole fixing member 420, a third small hole through hole 4100 is provided in the third small hole fixing member 430, the converging light beam 610 can irradiate into the second small hole through the first small hole through hole 4100 and then irradiate into the negative lens assembly 130, and the converging light beam 620 can irradiate into the third small hole through the third hole through hole 4200.
As an example, the first small hole fixture 410 is installed on one side of the positive lens assembly fixing base 121 near the negative lens assembly 130, referring to fig. 19, which shows a left side view of the positive lens assembly fixing base 121, a positive lens first threaded hole 1210 is provided at the center of the positive lens assembly fixing base 121, and a positive lens third threaded hole 1212 is provided at the periphery of the positive lens first threaded hole 1210; referring to fig. 20, which is a left side view of the first small hole fixing member 410, a first small hole light-passing hole 4100 is disposed in the center of the first small hole fixing member 410, a small hole first through hole 4101 is disposed at the periphery of the first small hole light-passing hole 4100, and the position of the small hole first through hole 4101 corresponds to the position of the positive lens third threaded hole 1212 for mounting the first small hole fixing member 410 on the positive lens assembly fixing seat 121.
As an example, the second small hole fixing member 420 is installed on one side of the negative lens fixing base 131 near the positive lens assembly 120, referring to fig. 21, which shows a left side view of the negative lens fixing base 131, a negative lens first through hole 1311 is provided at the center of the negative lens fixing base 131, and a negative lens second threaded hole 1314 is provided at the periphery of the negative lens first through hole 1311; referring to fig. 22, which is a left side view of the second small hole fixing member 420, a second small hole light-transmitting hole 4200 is disposed in the center of the second small hole fixing member 420, a small hole second through hole 4201 is disposed at the periphery of the second small hole light-transmitting hole 4200, and the position of the small hole second through hole 4201 corresponds to the position of the negative lens second threaded hole 1314 for mounting the second small hole fixing member 420 on the negative lens fixing base 131; preferably, the second orifice-fixture 420 is identical in shape and size to the first orifice-fixture 410.
As an example, the small hole fixing assembly 400 further includes a rear end fixing base 440, the rear end fixing base 440 is mounted at an end of the grating scale fixing base 270 away from the grating scale inclined plane fixing base 210 and is spaced from the grating scale inclined plane fixing base 210 by a preset distance, the rear end fixing base 440 is used for mounting a third small hole fixing member 430, referring to fig. 23, which shows a left side view of the third small hole fixing member 430, a third small hole light through hole 4300 is disposed at a center of the third small hole fixing member 430, and a small hole third through hole 4301 is disposed at a periphery of the third small hole light through hole 4300; referring to fig. 24, a left side view of the rear end fixing base 440 is shown, a small hole fourth through hole 4400 is formed in the center of the rear end fixing base 440, a small hole first threaded hole 4401 is formed in the periphery of the small hole fourth through hole 4400, and the positions of the small hole first threaded hole 4401 and the small hole third through hole 4301 correspond to each other for mounting the third small hole fixing member 430 on the rear end fixing base 440. Wherein, the rear end fixing base 440 is provided with a vertically arranged small hole fourth through hole 4402, and the position of the small hole fourth through hole 4402 corresponds to the position of the base fifth threaded hole 2703 for mounting the rear end fixing base 440 on the grating ruler fixing base 270 (see subsequent fig. 26).
As an example, referring to fig. 25, which shows a schematic diagram of the installation of a positive lens and a negative lens in a grating scale reflectivity measuring device, wherein the size of the first small hole light-transmitting hole 4100 is slightly larger than the size of the incident light beam 600, the size of the third small hole light-transmitting hole 4300 is slightly larger than the size of the parallel light beam 620, and when the laser light beam passes through the first small hole light-transmitting hole 4100 and the second small hole light-transmitting hole 4200, the third small hole light-transmitting hole 4300 is at the center of the light beam, the beam reduction base 100 and the grating scale fixing base 270 are fixed; then, the positive lens 123 is installed in the positive lens counterbore 1220, and when the converging light beam 610 completely passes through the second small hole light-passing hole 4200 and the third small hole light-passing hole 4300 is positioned at the center of the light spot diverging after the light beam is converged, the positive lens 123 is fixed; the negative lens 132 is then mounted in the negative lens counterbore 1310, and the converging light beam 610 is turned into a parallel light beam 620 under the diverging action of the negative lens 132, and the negative lens 132 is fixed when the parallel light beam 620 passes through the third aperture light passing hole 4300. And, the third small aperture light-passing aperture 4300 is capable of verifying the spot size of the parallel light beam 620.
As an example, the beam shrinking unit 100 can be precisely installed by the cooperation of the first, second and third small hole fixtures 410, 420 and 430, and the accuracy of the reflectivity measurement can be improved.
As an example, please refer to fig. 26, which shows a schematic connection diagram of each component in the grating scale reflectivity measuring device, wherein a positive lens first through hole 1213 is vertically arranged in the positive lens assembly fixing base 121, and the positive lens first through hole 1213 cooperates with a base first threaded hole 1102 in the beam shrinking base 110 to mount the positive lens assembly fixing base 121 on the beam shrinking base 110; the negative lens fixing base 131 is provided with a negative lens second through hole 1313 which is vertically arranged, and the negative lens second through hole 1313 is matched with a base second threaded hole 1103 in the beam shrinking base 110 to install the negative lens fixing base 131 on the beam shrinking base 110; the second through hole 1101 in the beam shrinking base 110 is matched with the third threaded hole 2701 in the grating ruler fixing base 270 to fixedly connect the beam shrinking base 110 with the grating ruler fixing base 270; the third inclined-plane through hole 2103 in the inclined-plane fixing base 210 of the grating ruler is matched with the fourth base threaded hole 2702 in the fixed base 270 of the grating ruler to install the inclined-plane fixing base 210 of the grating ruler on the fixed base 270 of the grating ruler; the small hole fourth through hole 4402 in the rear end fixing base 440 cooperates with the base fifth threaded hole 2703 in the grating scale fixing base 270 for mounting the rear end fixing base 440 to the grating scale fixing base 270.
In summary, the reflectivity measuring device of the grating ruler can directly measure the reflected light of the grating ruler, and improves the measurement accuracy; and the device does not need a light splitting element, and has the advantages of simple structure and easy operation. In addition, the distance between the positive lens and the negative lens is adjustable, so that the influence of part machining errors and installation errors is eliminated, and the measurement result can be more accurate; moreover, the grating ruler can move up and down along with the grating ruler moving slide block, so that the grating ruler reflectivity measuring device can be suitable for measuring grating rulers with various sizes and stripe positions, and the flexibility of the equipment is improved. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (11)
1. A grating scale reflectivity measurement mechanism, comprising:
a beam shrinking unit (100) for converting an incident light beam (600) into a parallel light beam (620);
the grating ruler fixing unit (200) is used for installing a grating ruler (500) to be measured, the grating ruler fixing unit (200) comprises a grating ruler inclined plane fixing seat (210), the grating ruler inclined plane fixing seat (210) is provided with an inclined plane (2100) which is perpendicular to a horizontal plane and forms a preset angle with the parallel light beam (620), and the grating ruler (500) is installed on the inclined plane (2100) and can move up and down; the optical grating ruler inclined plane fixing seat (210) is internally provided with an inclined plane first through hole (2101) and an inclined plane second through hole (2102), wherein the size of the parallel light beam (620) is consistent with that of an optical grating stripe of the optical grating ruler (500), the parallel light beam (620) can irradiate the optical grating stripe through the inclined plane first through hole (2101) and generate a reflected light beam (630), and the reflected light beam (630) can irradiate a power measuring unit (300) outside the optical grating ruler inclined plane fixing seat (210) through the inclined plane second through hole (2102);
and the power measuring unit (300) is positioned on the side surface of the grating ruler inclined surface fixing seat (210) and is used for measuring the reflected light beam (630).
2. The grating scale reflectivity measurement mechanism of claim 1, wherein: the included angle between the inclined plane (2100) and the parallel light beam (620) is 45 degrees, wherein the inclined plane first through hole (2101) is perpendicular to the inclined plane second through hole (2102), the included angle between the inclined plane first through hole (2101) and the inclined plane (2100) is 45 degrees, and the included angle between the inclined plane second through hole (2102) and the inclined plane (2100) is 45 degrees.
3. The grating scale reflectivity measurement mechanism of claim 1, wherein: the upper end of inclined plane (2100) is equipped with first grating chi fixed block (220), the lower extreme of inclined plane (2100) is equipped with second grating chi fixed block (230), first grating chi fixed block (220) with be equipped with grating chi movable slide block (240) between second grating chi fixed block (230), grating chi movable slide block (240) can in first grating chi fixed block (220) with move from top to bottom between second grating chi fixed block (230), wait to measure grating chi (500) install in on grating chi movable slide block (240) follow grating chi movable slide block (240) reciprocates.
4. A grating scale reflectivity measuring mechanism as defined in claim 3, wherein: the grating ruler moving slide block (240) comprises a slide block first inclined plane (2400) and a slide block second inclined plane (2401) which are oppositely arranged, wherein an inclined plane groove (2104) penetrating through the inclined plane (2100) in the vertical direction is formed in the inclined plane (2100), a moving slide block protruding portion (2402) matched with the inclined plane groove (2104) is formed in the slide block first inclined plane (2400), and the moving slide block protruding portion (2402) is in sliding connection with the inclined plane groove (2104).
5. The grating scale reflectivity measurement mechanism of claim 4, further comprising: the second inclined surface (2401) of the sliding block is provided with a sliding block groove (2403), after the grating ruler (500) is placed on the grating ruler moving sliding block (240), the grating ruler (500) is fixed on the grating ruler moving sliding block (240) through a clamping plate (250), wherein a part of the clamping plate (250) extends into the sliding block groove (2403).
6. A grating scale reflectivity measuring mechanism as defined in claim 3, wherein: a vertical plate (260) is arranged between the first grating ruler fixing block (220) and the second grating ruler fixing block (230), the upper end of the vertical plate (260) is connected with the first grating ruler fixing block (220), the lower end of the vertical plate (260) is connected with the second grating ruler fixing block (230), a waist hole (2602) is formed in the vertical plate (260), and after the grating ruler moving sliding block (240) moves to a preset position between the first grating ruler fixing block (220) and the second grating ruler fixing block (230), the grating ruler moving sliding block (240) is fixed through the waist hole (2602).
7. The grating scale reflectivity measurement mechanism of claim 1, wherein: the beam shrinking unit (100) comprises a beam shrinking base (110), a positive lens assembly (120) and a negative lens assembly (130), the beam shrinking base (110) is connected with the grating ruler fixing unit (200), the positive lens assembly (120) is installed at one end, far away from the grating ruler fixing unit (200), of the beam shrinking base (110), the negative lens assembly (130) is installed at one end, close to the grating ruler fixing unit (200), of the beam shrinking base (110), wherein the positive lens assembly (120) is used for converting an incident beam (600) into a converging beam (610), and the negative lens assembly (130) is used for converting the converging beam (610) into a parallel beam (620).
8. The grating scale reflectivity measurement mechanism of claim 7, further characterized by: the positive lens assembly (120) comprises a positive lens assembly fixing seat (121), a positive lens rotation fixing piece (122) and a positive lens (123), the positive lens assembly fixing seat (121) is installed in the beam shrinking base (110), a positive lens first threaded hole (1210) which faces the grating scale fixing unit (200) is formed in the positive lens assembly fixing seat (121), one end, close to the positive lens assembly fixing seat (121), of the positive lens rotation fixing piece (122) extends into the positive lens first threaded hole (1210), one end, far away from the positive lens assembly fixing seat (121), of the positive lens rotation fixing piece (122) is provided with a positive lens counter bore (1220), the positive lens (123) is installed in the positive lens counter bore (1220), external threads (1221) which are matched with the positive lens first threaded hole (1210) are formed in one end, close to the positive lens rotation fixing piece (122) can rotate in the positive lens first threaded hole (1210), or rotate forwards in the positive lens assembly (1222) and then rotate forwards, the positive lens assembly (122) is provided with a second lens rotation through hole (1221), the incident light beam (600) can be converted into the converging light beam (610) by the positive lens (123) into the positive lens second through hole (1222).
9. The grating scale reflectivity measurement mechanism of claim 7, further characterized by: the negative lens assembly (130) comprises a negative lens fixing base (131) and a negative lens (132), the negative lens fixing base (131) is installed on the beam shrinking base (110), one end, far away from the positive lens assembly (120), of the negative lens fixing base (131) is provided with a negative lens counter bore (1310), the negative lens (132) is installed in the negative lens counter bore (1310), one end, close to the positive lens assembly (120), of the negative lens fixing base (131) is provided with a negative lens first through hole (1311), and the converging light beam (610) enters the negative lens first through hole (1311) and is converted into the parallel light beam (620) through the negative lens (132).
10. The grating scale reflectivity measurement mechanism of claim 7, further characterized by: still include aperture fixed subassembly (400), aperture fixed subassembly (400) include first aperture mounting (410), second aperture mounting (420) and third aperture mounting (430), first aperture mounting (410) install in positive lens subassembly (120) are close to the one end of negative lens subassembly (130), install in negative lens subassembly (130) are close to one end of positive lens subassembly (120), third aperture mounting (430) are located grating chi inclined plane fixing base (210) keep away from one side of beam shrinking unit (100) and with grating chi inclined plane fixing base (210) interval predetermine the distance, wherein, be equipped with first aperture light-passing hole (4100) in first aperture mounting (410), be equipped with second aperture light-passing hole (4200) in second aperture mounting (420), be equipped with third aperture light-passing hole (4200) in third aperture mounting (430), wherein can pass through grating chi inclined plane fixing base (210) and grating chi inclined plane fixing base (210), wherein, second aperture light-passing hole (4200) can be passed through in the aperture (4300) and the light beam of light can be in the aperture (4300) irradiation of third aperture (4300).
11. The grating scale reflectivity measurement mechanism of claim 1, wherein: the power measurement unit (300) comprises a power meter fixing seat (3001), a power meter first through hole (3002) which is in the same straight line with the inclined plane second through hole (2102) is arranged in the power meter fixing seat (3001), a power meter groove (3003) is formed in one end, away from the grating ruler fixing unit (200), of the power meter fixing seat (3001), the power meter groove (3003) is used for installing a power meter probe, and the reflected light beam (630) can be captured by the power meter probe through the inclined plane second through hole (2102) and the power meter first through hole (3002).
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Denomination of invention: A grating ruler reflectivity measurement device Effective date of registration: 20231213 Granted publication date: 20230725 Pledgee: Industrial Bank Co.,Ltd. Shanghai Hongkou sub branch Pledgor: Shanghai Yinguan Semiconductor Technology Co.,Ltd. Registration number: Y2023310000848 |