CN116183004A - Real-time measuring device for material weight in crucible of single crystal furnace - Google Patents
Real-time measuring device for material weight in crucible of single crystal furnace Download PDFInfo
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- CN116183004A CN116183004A CN202310141810.8A CN202310141810A CN116183004A CN 116183004 A CN116183004 A CN 116183004A CN 202310141810 A CN202310141810 A CN 202310141810A CN 116183004 A CN116183004 A CN 116183004A
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- Prior art keywords
- crucible
- diaphragm
- weight
- real
- single crystal
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G19/00—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups
- G01G19/14—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups for weighing suspended loads
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G23/00—Auxiliary devices for weighing apparatus
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a real-time measuring device for the weight of materials in a crucible of a single crystal furnace. The diaphragm effect principle is adopted, the diaphragm can effectively resist the rotation torque of the screw nut, and the precision of the weighing sensor cannot be affected by the tiny deformation of the diaphragm in the axial direction. The characteristics of high rotation rigidity of the diaphragm and weak rigidity in the direction perpendicular to the diaphragm are utilized, so that the sensor only bears axial tension and does not bear lateral force, and the measurement accuracy of the sensor can be ensured. The invention has the advantages that: the stress is reasonable, the function implementation is simpler, the input cost is low, and the device is suitable for mass production and installation. The weight of the silicon material in the crucible can be accurately detected in real time: the device can assist in improving the accuracy of measuring the liquid mouth distance during crystal pulling; most importantly, the device can directly monitor that the weight of the silicon material in the crucible is abnormal and suddenly leaked, and the system can quickly start an emergency program to avoid potential safety hazards of equipment.
Description
Technical Field
The invention relates to a real-time measuring device for the weight of materials in a crucible of a single crystal furnace.
Background
In the prior art, the single crystal furnace generally cannot monitor the material quantity in the crucible in real time, multiple feeding is needed during melting, manual weighing and multiple calculation are needed, accumulated errors are large, the accurate weight of the silicon material in the crucible cannot be fed back, if special conditions are met, such as when the silicon material in the crucible leaks by a few kilograms or more accidentally, the system cannot monitor, explosion can be caused in serious conditions, and casualties and property loss are caused.
CN114318506a discloses a single crystal furnace crucible lifting lower shaft weighing device, wherein a corrugated pipe is sleeved outside a crucible shaft, and the lower end of the corrugated pipe is used for fixing a crucible rotating magnetic fluid through a magnetic fluid mounting plate; and the weight of the crucible is monitored in real time by combining with a pressure detection mechanism. The structure adopts the Fang Yuanpan sensor arranged under the magnetic fluid to realize weighing, so that on one hand, the sensor has higher cost and complex installation structure, and on the other hand, the bending moment generated by the system has larger influence on the measurement precision, and the change of the silicon material quantity in the crucible can not be effectively and accurately reflected.
Disclosure of Invention
The invention provides a real-time measuring device for the weight of materials in a crucible of a single crystal furnace, which aims to overcome the defects in the prior art and realize real-time accurate detection of the silicon material in the crucible.
The technical solution of the invention is as follows: the real-time measuring device for the weight of the material in the crucible of the single crystal furnace is characterized in that a weighing sensor is arranged at a screw rod, and the weight of the material in the crucible is accurately measured by measuring the upward thrust of the screw rod. The diaphragm effect principle is adopted, the diaphragm can effectively resist the rotation torque of the screw nut, and the precision of the weighing sensor cannot be affected by the tiny deformation of the diaphragm in the axial direction. Furthermore, the characteristics of high rotation rigidity of the diaphragm and weak rigidity in the direction perpendicular to the diaphragm are utilized, so that the sensor only bears axial tension and does not bear lateral force, and the measurement accuracy of the sensor is ensured.
The invention has the advantages that: the structure is simple and compact, the stress is reasonable, the function implementation is simple, the input cost is low, and the device is suitable for mass production and installation. The weight of the silicon material in the crucible can be accurately detected in real time: specifically, firstly, the device can assist in improving the accuracy of measuring the liquid mouth distance during crystal pulling; most importantly, the device can directly monitor that the weight of the silicon material in the crucible is abnormal and suddenly leaked, and the system can quickly start an emergency program to avoid potential safety hazards of equipment.
Drawings
FIG. 1 is a schematic diagram of the front view structure of the real-time measuring device for the weight of materials in the crucible of the single crystal furnace.
Fig. 2 is a top view of fig. 1.
Fig. 3 is a cross-sectional view taken along A-A of fig. 1.
FIG. 4 is a schematic perspective view of a real-time measuring device for the weight of materials in a crucible of a single crystal furnace.
In the figure, a screw rod 1, a nut 2, a connecting plate 3, a fixed support column 4, a tension and pressure sensor 5, a crucible assembly 6 and a diaphragm 7 are shown.
Description of the embodiments
The present invention will be described in further detail with reference to examples and embodiments.
As shown in fig. 1-4, the real-time measuring device for the weight of materials in a crucible of a single crystal furnace structurally comprises a screw rod 1, wherein the end part of the screw rod is connected with the output end of a motor (not shown), a nut 2 is arranged on the screw rod 1, the nut 2 is fixed at the center of a connecting plate 3, two sides of the bottom of the connecting plate 3 are respectively connected with a crucible assembly 6 through a pulling pressure sensor 5, two sides of the crucible assembly 6 are respectively connected with the connecting plate 3 through a fixing support 4, and the edges of two sides of the top surface of the connecting plate 3 are respectively fixed with a diaphragm 7 which is also connected with the fixing support 4.
According to the structure, when the crucible assembly is in operation, the motor drives the screw rod 1 to do rotary motion, and the driving nut 2 drives the crucible assembly 6 to do up-down linear motion. The nut 2 is fixed on the connection plate 3, and the connection plate 3 is connected with a crucible assembly 6 (weighed) through two pull pressure sensors 5, and the weight of the crucible assembly can be directly measured through the 2 pull pressure sensors 5.
When weighing, the connecting plate 3 has a trace degree of freedom along with the pull pressure sensor 5, but does not bear rotation torque, so as to ensure the weighing precision of the pull pressure sensor 5, and a film fixing structure of the diaphragm 7 is adopted.
The diaphragm 7 is fixed on the connecting plate 3 and the fixed support column 4 and is used for bearing torque generated by the rotation of the screw rod 1, so that the connecting plate 3 is not influenced by the rotation torque, and a trace of freedom degrees can be provided along with the upper and lower directions of the tension and pressure sensor 5: the up-down elastic deformation amount of the diaphragm 7 is very small, and the measurement accuracy of the tension-pressure sensor 5 is hardly affected.
The membrane 7 is specifically a thin metal sheet, as shown in fig. 2, fixed on the connecting plate 3 and distributed on the left and right side edges of the connecting plate 3, and connected to the fixing support 4 by screws.
The principle of the anti-rotation sheet (membrane 7) against torque is as follows:
the axial load born by the screw rod is F,
according to energy conservation, the screw 1 runs at constant speed
T*ω=F*v
Wherein: t is the driving torque; omega is the angular velocity of the screw; f is an axial force; v is the load moving speed.
Because of
V=P*n
Wherein P is the lead of the lead screw, and n is the rotating speed of the lead screw.
Finally can get
T 1 =F*P/(2π*τ)
Wherein: the value of tau is the transmission efficiency of the machine,
let the friction coefficient between the nut 2 and the screw 1 be alpha,
the torque applied to the connection plate 3 is
T 2 =α*(F*P)/(2π*τ)
So the torque applied by the anti-rotation sheet is also T 2 The friction coefficient alpha is extremely small, so that the torque of the system can be effectively resisted through the anti-rotation sheet.
The radial load applied to the anti-rotation tab was analyzed as follows:
when weighing, the axial load born by the screw rod is F
According to Hooke's law, the deformation of the pull pressure sensor is as follows:
δ1=F/E 1
wherein: e (E) 1 In order to pull the spring constant of the pressure sensor 5,
the deformation amount of the anti-rotation sheet is also δ1,
the two ends of the anti-rotation sheet are fixed, the middle is deformed, and according to theory:
f=PL 3 /192EI
wherein: f is deformation, P is load, L is rod length, E is elastic modulus, and I is cross-sectional area.
The magnitude of the radial load to which the anti-rotation tab is subjected is: p=192E 2 I 2 *δ1/L 3
Wherein: e (E) 2 For the elastic modulus of the anti-rotation sheet, I 2 Is the cross-sectional area of the anti-rotation sheet.
Because δ1 is extremely small, the radial direction rotation preventing sheet has no interference with the measurement accuracy of the pull pressure sensor 5.
In summary, the diaphragm 7 can effectively counteract the torque of the screw nut 2, and the small elastic deformation of the diaphragm 7 up and down does not affect the weighing precision.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present invention.
Claims (2)
1. The utility model provides a real-time measuring device of material weight in single crystal furnace crucible, a serial communication port, lead screw (1) including end connection motor output, be equipped with nut (2) on lead screw (1), nut (2) are fixed in connecting plate (3) center, connecting plate (3) bottom both sides are respectively through a tension and pressure sensor (5) connection crucible assembly (6), connecting plate (3) are connected through a fixed stay (4) respectively in crucible assembly (6) both sides, connecting plate (3) top surface both sides edge is fixed with diaphragm (7) that are also connected with fixed stay (4) respectively.
2. The real-time measuring device for the weight of materials in a crucible of a single crystal furnace according to claim 1, wherein the membrane (7) is a metal sheet and is connected with the fixed support (4) through a screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310141810.8A CN116183004A (en) | 2023-02-21 | 2023-02-21 | Real-time measuring device for material weight in crucible of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310141810.8A CN116183004A (en) | 2023-02-21 | 2023-02-21 | Real-time measuring device for material weight in crucible of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116183004A true CN116183004A (en) | 2023-05-30 |
Family
ID=86434154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310141810.8A Pending CN116183004A (en) | 2023-02-21 | 2023-02-21 | Real-time measuring device for material weight in crucible of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116183004A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101280836A (en) * | 2008-04-25 | 2008-10-08 | 中国科学院国家天文台南京天文光学技术研究所 | Guide mechanism based on elastic element |
| CN203893931U (en) * | 2014-04-02 | 2014-10-22 | 天通吉成机器技术有限公司 | Symmetric dynamic double-weighing device |
| CN208701249U (en) * | 2018-07-25 | 2019-04-05 | 浙江晶阳机电有限公司 | A kind of single crystal growing furnace weighing device |
| WO2021098347A1 (en) * | 2019-11-22 | 2021-05-27 | 中国电子科技集团公司第十三研究所 | System for preparing indium phosphide crystal from indium phosphorus mixture |
| CN215328453U (en) * | 2021-06-05 | 2021-12-28 | 北京北方华创真空技术有限公司 | Crucible elevating system that monocrystalline silicon production was used and can be weighed |
| CN114318506A (en) * | 2021-12-14 | 2022-04-12 | 连城凯克斯科技有限公司 | Single crystal growing furnace crucible promotes lower axle weighing device |
| CN217733338U (en) * | 2022-05-13 | 2022-11-04 | 隆基绿能科技股份有限公司 | Crucible driving device and single crystal furnace |
-
2023
- 2023-02-21 CN CN202310141810.8A patent/CN116183004A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101280836A (en) * | 2008-04-25 | 2008-10-08 | 中国科学院国家天文台南京天文光学技术研究所 | Guide mechanism based on elastic element |
| CN203893931U (en) * | 2014-04-02 | 2014-10-22 | 天通吉成机器技术有限公司 | Symmetric dynamic double-weighing device |
| CN208701249U (en) * | 2018-07-25 | 2019-04-05 | 浙江晶阳机电有限公司 | A kind of single crystal growing furnace weighing device |
| WO2021098347A1 (en) * | 2019-11-22 | 2021-05-27 | 中国电子科技集团公司第十三研究所 | System for preparing indium phosphide crystal from indium phosphorus mixture |
| CN215328453U (en) * | 2021-06-05 | 2021-12-28 | 北京北方华创真空技术有限公司 | Crucible elevating system that monocrystalline silicon production was used and can be weighed |
| CN114318506A (en) * | 2021-12-14 | 2022-04-12 | 连城凯克斯科技有限公司 | Single crystal growing furnace crucible promotes lower axle weighing device |
| CN217733338U (en) * | 2022-05-13 | 2022-11-04 | 隆基绿能科技股份有限公司 | Crucible driving device and single crystal furnace |
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