CN114318506A - Single crystal growing furnace crucible promotes lower axle weighing device - Google Patents
Single crystal growing furnace crucible promotes lower axle weighing device Download PDFInfo
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- CN114318506A CN114318506A CN202111530936.1A CN202111530936A CN114318506A CN 114318506 A CN114318506 A CN 114318506A CN 202111530936 A CN202111530936 A CN 202111530936A CN 114318506 A CN114318506 A CN 114318506A
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Abstract
The invention belongs to the technical field of crystal growth, and particularly relates to a single crystal furnace crucible lifting lower shaft weighing device which comprises a crucible base, wherein a lead screw is connected to the inside of the crucible base through threads, a crucible lifting assembly is fixed at the lower end of the lead screw, a crucible shaft is connected to the inside of the crucible base in a through mode, a corrugated pipe is sleeved on the outside of the crucible shaft, a magnetofluid mounting plate is fixed at the lower end of the corrugated pipe, and crucible rotary magnetofluid is fixed inside the magnetofluid mounting plate; according to the invention, the magnetic fluid mounting plate and the pressure detection mechanism are arranged at the bottom of the crucible shaft, so that the weight of the crucible can be effectively monitored in real time in a lower shaft weighing mode, and the following beneficial effects can be achieved by comparing the mass change in the crucible with the mass change of the produced crystals through a system: the lower shaft of the crucible furnace can be automatically weighed and whether leakage occurs or not can be judged; the quality of the residual silicon material in the crucible can be directly fed back; the crystallization condition can be judged; can be used for calibrating the quality of silicon materials in the crucible.
Description
Technical Field
The invention relates to the technical field of crystal growth, in particular to a single crystal furnace crucible lifting lower shaft weighing device.
Background
The single crystal refers to a crystal composed of an easily spatial lattice as a whole in three dimensions, and among them, the single crystal of silicon, which is the raw material for manufacturing semiconductor silicon devices, is most widely used, and the demand for the single crystal of silicon is gradually increasing today with the advanced information, and the main production method of the single crystal of silicon is the czochralski method.
Chinese patent publication No. CN106757125A proposes a weighing device for a single crystal furnace, comprising: the weighing device is arranged in a crystal pulling mechanism of the single crystal furnace and used for weighing the weight of the crystal; and the bearing piece is supported on the weighing device and is used for bearing the lifting rope of the crystal lifting mechanism. The weighing device of the single crystal furnace obtains the weight of the residual material in the crucible by utilizing the total charging weight and the weighed crystal weight in the crucible, controls the lifting speed of the crucible lifting mechanism and avoids the influence of too small or too large ratio of the crucible to the crystal growth.
In the technical scheme, when dislocation-free monocrystalline silicon products are produced, dynamic weighing of crystal bar products is realized through a weighing sensor arranged in an upper crystal lifting mechanism, so that real-time monitoring is achieved, a crucible and corresponding residual silicon raw materials are not directly weighed, and the weights of a lower crucible and the residual silicon materials are calculated through a calculation mode, so that the defects exist in the real-time monitoring process, whether the silicon materials leak or not cannot be judged through monitoring the weight change in the crucible, meanwhile, the existing czochralski method monocrystalline silicon equipment is mainly simple and judged through furnace pressure change and the like because a closed space is formed in a furnace and a visual time port cannot be arranged due to the design requirement of a thermal field, so that leakage accidents occur, the judgment is difficult in the early stage, the judgment can be carried out only when the silicon leakage reaches a certain amount, and more judgment is carried out by depending on experience of operators, the phenomenon of long and inaccurate judgment reaction period exists; therefore, the crucible lifting lower shaft weighing device for the single crystal furnace is provided for solving the problems.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the single crystal furnace crucible lifting lower shaft weighing device comprises a crucible base, wherein a lead screw is arranged inside the crucible base, a crucible lifting assembly is fixed at the lower end of the lead screw, a crucible shaft is connected inside the crucible base, a corrugated pipe is sleeved outside the crucible shaft, a magnetofluid mounting plate is fixed at the lower end of the corrugated pipe, a crucible rotating magnetofluid is fixed inside the magnetofluid mounting plate, a pressure monitoring mechanism is fixed at the lower end of the magnetofluid mounting plate, a magnetofluid base is fixed at the lower end of the pressure monitoring mechanism, and a crucible rotating assembly is arranged at the lower end of the crucible shaft; when preparing monocrystalline silicon, install the crucible at the top of crucible axle, and be connected bellows and stove plate bottom, make form a inclosed space in the crucible stove, thereby make managing to find time in the crucible, at the in-process of preparation, thereby the crucible rises the rotation of subassembly drive lead screw and drives the crucible base and go up and down, and then the position of adjustment crucible, and the crucible changes subassembly drive crucible axle and rotates, it changes the single crystal quality that improves the preparation to form the crucible, at the in-process of preparation, along with the gradual reduction of raw materials in the crucible, its gravity is also reducing, thereby make the pressure that the crucible axle applyed pressure monitoring mechanism reduce, monitor through the signal that sends pressure monitoring mechanism this moment, alright obtain the real-time weight data in the crucible, can reach following effect through these weight data of contrast: the effect of monitoring the silicon leakage condition in a lower shaft weighing mode can be realized; the control of crystal pulling can be more directly realized by monitoring the weight of the crucible, and the quality of the residual silicon material in the crucible is directly fed back; the crystallization condition can be judged, whether the liquid level has the crystallization condition or not in the crystal growing process is judged, if the crystallization is caused by the low temperature at the liquid level, the crystallization can be promoted along with the crystal bar, and the weighing mass can be obviously changed; can be arranged in the crucible silicon material mass calibration, add material to crucible inside at this, silicon material all is after the outside is weighed in succession toward the crucible in reinforced, and the current is direct monitors through weighing to the crucible, needs to explain that the judgement mode that reveals to the crucible has the multiple, but the mode of weighing through the lower axle is most direct and also multiple additional beneficial effect.
Preferably, the magnetic fluid mounting plate is connected with the crucible rotating magnetic fluid and pressure monitoring mechanism by screws; during operation, the crucible shaft is inserted into the crucible to rotate magnetofluid, the crucible rotates the magnetofluid to be connected with the magnetofluid mounting plate, and the magnetofluid mounting plate can sense timely when the gravity of the crucible shaft changes, so that the crucible can be supported to be weighed while growing crystals.
Preferably, the pressure monitoring mechanism comprises a weighing frame, a transmission rod is arranged between the weighing frame and the magnetic fluid mounting plate, a transmission block is fixed at the lower end of the transmission rod, a limiting frame is fixed on one side, away from the magnetic fluid mounting plate, of the transmission block, a sliding shifting piece is fixed on one side, away from the transmission block, of the limiting frame, a rheostat is arranged on one side, away from the limiting frame, of the sliding shifting piece, binding posts are fixed at the upper end and the lower end of the rheostat respectively, a mounting seat is fixed at one end, away from the rheostat, of the binding posts, and the mounting seat is fixedly connected with the inner wall of the weighing frame; when the crucible lifting mechanism works, the gravity of the crucible lifting mechanism is reduced along with the gradual reduction of raw materials in the crucible, so that the pressure applied by the crucible rotating magnetofluid to the magnetofluid mounting plate is reduced, the magnetofluid mounting plate is driven to pull the transmission rod to move, the transmission rod can pull the transmission block to move together in the movement process, the transmission block moves to drive the limiting frame to move, the limiting frame can slide on the limiting rod at the moment, the movement of the limiting frame is more stable, the deflection condition cannot occur, the limiting frame moves to pull the sliding poking piece to slide on the rheostat, the resistance value of the rheostat in a circuit can be changed, the current flowing through the binding post changes, the weight of the reduced raw materials in the crucible can be calculated through the change of the current, and the weight of the crystal bar conveyed back by the weighing sensor arranged in the comparison lifting mechanism, the condition that the leakage can be generated can be effectively deduced, so that the condition that the lower shaft can be automatically weighed and whether the leakage occurs or not can be judged.
Preferably, a buffer spring is fixed at the bottom end of the transmission rod and fixedly connected with the weighing frame, a stable spring rod is arranged on one side of the transmission rod close to the crucible shaft and fixedly connected with the magnetic fluid mounting plate and the weighing frame respectively; the during operation, along with the gradual reduction of the raw materials in the crucible, its gravity also is reducing, and at this moment firm spring beam kick-backs with buffer spring jointly to promote the motion of magnetic current body mounting panel, when realizing the surplus measurement in the crucible through firm spring beam and buffer spring, also can make the more mild of motion process of magnetic current body mounting panel, from not influencing the growth quality of crystal, do not influence the condition of the growth of crystal when realizing weighing.
Preferably, a fastening frame is fixed at the top end of the transmission rod and fixedly connected with the magnetic fluid mounting plate, a limiting rod is connected in the limiting frame in a through mode, and the limiting rod is fixedly connected with the inner wall of the crucible base; during operation, thereby the magnetic fluid mounting panel motion pulling transfer line moves, and the setting of fastening frame can make the transfer line more firm with being connected of magnetic fluid mounting panel, and spacing can slide on the gag lever post, can make the motion of spacing more steady the condition that can not appear deflecting through the gag lever post, and the effectual motion when weighing is restricted.
Preferably, one side of the transmission block, which is close to the crucible shaft, is rotatably connected with a push-pull rod, one end of the push-pull rod, which is far away from the transmission block, is rotatably connected with a sliding block, a fixed rod is connected in the sliding block in a run-through manner, one end of the sliding block, which is far away from the center of the fixed rod, is rotatably connected with a rotating screw rod, the outer part of the rotating screw rod is connected with a hollow ring through threads, a fixed frame is arranged at the outer height of the hollow ring, and the fixed frame is fixedly connected with the inner wall of the weighing frame; the during operation, along with the raw materials gradual reduction in the crucible, firm spring rod and gradual reseing of buffer spring, thereby the pulling driving block moves always, thereby the driving block motion promotes the push-and-pull rod motion, the push-and-pull rod motion and then drive the sliding block and slide on the dead lever, thereby the sliding block motion promotes the rotation screw rod motion, so alright carry out real-time transmission according to the raw materials surplus in the crucible, prepare for two protections, and because the rotation screw rod passes through threaded connection with hollow ring, so the running state of rotating the screw rod this moment is the direction motion of keeping away from the mount for the limit is rotated, thereby change the running state who rotates the screw rod, make its emergence rotate and prepare for subsequent warning.
Preferably, a connecting rod is fixed at one end of the rotating screw rod, which is far away from the sliding block, extension rods are fixed at two sides of the connecting rod, a friction ball is fixed at one end of each extension rod, which is far away from the rotating screw rod, a concave-convex ring is arranged outside the friction ball, and the concave-convex ring is fixedly connected with the inner wall of the fixed frame; the during operation, thereby rotate the screw rod motion and drive the connecting rod motion, the connecting rod motion drives the extension rod motion, and then drives the friction ball and just rotate towards the direction motion limit of keeping away from the dead lever, and the raw materials in the crucible is whole to finish the friction ball and unsmooth ring contact and friction send harsh sound, and outside operating personnel can learn equipment emergence condition after hearing the sound, can remind the staff to catch up with coming to look over that the crucible takes place to reveal or the raw materials exhausts to form two protection machanisms.
Preferably, an activation spring is fixed outside the friction ball, and an arc-shaped shifting piece is fixed outside the activation spring; the during operation, the sound of dazzling can be sent to the friction ball, the friction ball must can be along with the production vibrations of motion at this in-process, thereby vibrations drive the excitation spring and vibrate, the excitation spring just can drive that the arc plectrum is reciprocal strikes the friction ball shaking the meeting, thereby make the further increase of the alarm sound that produces, make the staff notice the condition of crystal growth more easily, and the in-process that strikes the friction ball at the arc plectrum, thereby it can extrude air all around and produce the air current, the air current blows the surface to the friction ball in step, clean its surface, thereby reach the effect of extension its life.
Preferably, an alarm shell is fixed on one side, away from the crucible shaft, of the crucible base, a buzzing component is fixed at the top end of the alarm shell, an alarm driving component is fixed inside the alarm shell, a driving wheel is fixed on one side, close to the crucible base, of the alarm driving component, a knocking rod is fixed outside the driving wheel, a knocking head is arranged at one end, away from the driving wheel, of the knocking rod, soundboard bodies are arranged on two sides of the driving wheel, the distance between the soundboard bodies and the circle center of the alarm driving component is smaller than the distance between the knocking head and the circle center, a vibrating spring is fixed on one side, away from the driving wheel, of the soundboard bodies, the inner wall of the alarm shell is fixedly connected with the vibrating spring, and a vibrating iron sheet is fixed between the soundboard and the alarm shell; when the crucible leakage alarm device works, when a crucible leakage condition occurs, an external control system can judge that the leakage occurs and give a starting signal, so that the buzzing component starts to operate, the buzzing component can buzze to generate an aural alarm sound, meanwhile, the alarm driving component simultaneously starts to drive the driving wheel to rotate, the driving wheel rotates to drive the knocking rod to rotate, the knocking rod rotates to drive the knocking head to rotate, the knocking head can collide with the echo plate in the rotating process, the vibrating spring can be compressed and generates vibration under the action of the collision force, after the knocking head is separated from the echo plate, the vibrating spring drives the echo plate to vibrate, the vibrating iron sheet is further pulled to shake in a reciprocating manner to generate intense alarm sound, the alarm sound is inconsistent with the alarm sound generated when raw materials in the crucible are exhausted, and workers can effectively distinguish the difference of the alarm sound, when the buzzer fails to make a sound, the sound returning plate and the vibrating iron sheet can effectively inform the staff of the sound, so that the staff can quickly process the sound without missing the best time for remediation, and the effect of automatic stop alarm when leakage occurs is achieved.
Preferably, sound amplifying grooves are formed in both sides of the alarm shell, and eardrums are fixed inside the sound amplifying grooves; during operation, after the abnormal conditions appearing, the inside mechanism operation of alarm shell and at its inside alarm sound that produces, the sound wave of this alarm sound can outwards be passed through the public address groove to at the in-process of sound wave through the tympanic membrane, it can drive the tympanic membrane vibrations simultaneously, will this alarm sound enlargies behind the tympanic membrane vibrations, thereby makes the staff notice the alarm sound more easily.
The invention has the advantages that:
1. according to the invention, the magnetic fluid mounting plate and the pressure detection mechanism are arranged at the bottom of the crucible shaft, so that the weight of the crucible can be effectively monitored in real time in a lower shaft weighing mode, and the following beneficial effects can be achieved by comparing the mass change in the crucible with the mass change of the produced crystals through a system: the lower shaft of the crucible furnace can be automatically weighed and whether leakage occurs or not can be judged; the quality of the residual silicon material in the crucible can be directly fed back; the crystallization condition can be judged; can be used for calibrating the quality of silicon materials in the crucible.
2. According to the invention, the alarm driving component is arranged in the alarm, so that the alarm driving component drives the driving wheel to rotate, and the striking head is driven to strike the soundboard in a reciprocating manner, so that the soundboard and the vibrating iron sheet generate harsh alarm sound, and the sound is amplified through the loudspeaker, so that the effect of automatically and physically sending out the alarm sound when leakage occurs is achieved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a sectional view of the pressure monitoring mechanism of the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 2 according to the present invention;
FIG. 4 is a cross-sectional view of the structure of the friction ball of the present invention;
FIG. 5 is a sectional view of the alarm housing of the present invention;
FIG. 6 is a perspective view of the invention of a circular pressure monitoring mechanism in the third embodiment;
fig. 7 is a perspective view of the square pressure monitoring mechanism according to the third embodiment.
In the figure: 1. a crucible base; 2. a screw rod; 3. a crucible lifting assembly; 4. a crucible shaft; 5. a bellows; 6. the crucible is used for converting magnetofluid; 7. a magnetic fluid mounting plate; 8. a pressure monitoring mechanism; 9. a magnetic fluid base; 10. a crucible rotating assembly; 11. an alarm housing; 12. a buzzer assembly; 13. an alarm drive assembly; 14. a driving wheel; 15. a knock bar; 16. a knocking head; 17. a sound returning plate; 18. a fluttering spring; 19. vibrating the iron sheet; 20. a sound amplification groove; 21. a tympanic membrane; 801. a weighing frame; 802. a stable spring rod; 803. a fastening frame; 804. a transmission rod; 805. a transmission block; 806. a buffer spring; 807. a limiting frame; 808. a limiting rod; 809. sliding the shifting piece; 810. a varistor; 811. a binding post; 812. a mounting seat; 813. a push-pull rod; 814. a slider; 815. fixing the rod; 816. rotating the screw; 817. a hollow ring; 818. a fixed mount; 819. a connecting rod; 820. an extension pole; 821. a friction ball; 822. a concave-convex ring; 823. activating the spring; 824. an arc-shaped shifting piece.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Referring to fig. 1, the crucible lifting device comprises a crucible base 1, a screw rod 2 is arranged inside the crucible base 1, a crucible lifting assembly 3 is fixed at the lower end of the screw rod 2, a crucible shaft 4 is arranged and connected inside the crucible base 1, a corrugated pipe 5 is sleeved outside the crucible shaft 4, a magnetofluid mounting plate 7 is fixed at the lower end of the corrugated pipe 5, a crucible rotating magnetofluid 6 is fixed inside the magnetofluid mounting plate 7, a pressure monitoring mechanism 8 is fixed at the lower end of the magnetofluid mounting plate 7, a magnetofluid base 9 is fixed at the lower end of the pressure monitoring mechanism 8, and a crucible rotating assembly 10 is arranged at the lower end of the crucible shaft 4; when preparing monocrystalline silicon, install the crucible at the top of crucible axle 4, and be connected bellows 5 and stove plate bottom, make form a confined space in the crucible stove, thereby make managing to find time in the crucible, at the in-process of preparation, thereby crucible lift subassembly 3 drive lead screw 2 rotates and drives 1 lifts of crucible base, and then the position of adjustment crucible, and crucible changes subassembly 10 drive crucible axle 4 and rotates, it changes the single crystal quality that improves the preparation to form the crucible, at the in-process of preparation, along with the gradual reduction of the raw materials in the crucible, its gravity also reduces, thereby make crucible axle 4 reduce the pressure that pressure monitoring mechanism 8 applyed, monitor through the signal that sends pressure monitoring mechanism 8 this moment, alright obtain the real-time weight data in the crucible, can reach following effect through these weight data of contrast: the effect of monitoring the silicon leakage condition in a lower shaft weighing mode can be realized; the control of crystal pulling can be more directly realized by monitoring the weight of the crucible, and the quality of the residual silicon material in the crucible is directly fed back; the crystallization condition can be judged, whether the liquid level has the crystallization condition or not in the crystal growing process is judged, if the crystallization is caused by the low temperature at the liquid level, the crystallization can be promoted along with the crystal bar, and the weighing mass can be obviously changed; can be arranged in the crucible silicon material mass calibration, add material to crucible inside at this, silicon material all is after the outside is weighed in succession toward the crucible in reinforced, and the current is direct monitors through weighing to the crucible, needs to explain that the judgement mode that reveals to the crucible has the multiple, but the mode of weighing through the lower axle is most direct and also multiple additional beneficial effect.
Referring to fig. 2, the magnetofluid mounting plate 7 is connected to the crucible-to-magnetofluid 6 and the pressure monitoring mechanism 8 by screws; during operation, crucible shaft 4 inserts crucible and changes magnetofluid 6, and crucible changes magnetofluid 6 and links to each other with magnetofluid mounting panel 7, and magnetofluid mounting panel 7 can be timely sense when crucible shaft 4 takes place gravity change, so alright realize weighing it when supporting the crucible and carrying out long brilliant.
Referring to fig. 2, the pressure monitoring mechanism 8 includes a weighing frame 801, a transmission rod 804 is disposed between the weighing frame 801 and the magnetic fluid mounting plate 7, a transmission block 805 is fixed at a lower end of the transmission rod 804, a limit frame 807 is fixed at a side of the transmission block 805 away from the magnetic fluid mounting plate 7, a sliding dial 809 is fixed at a side of the limit frame 807 away from the transmission block 805, a rheostat 810 is disposed at a side of the sliding dial 809 away from the limit frame 807, binding posts 811 are fixed at upper and lower ends of the rheostat 810, a mounting seat 812 is fixed at a end of the binding post 811 away from the rheostat 810, and the mounting seat 812 is fixedly connected with an inner wall of the weighing frame 801; when the crucible device works, along with the gradual reduction of raw materials in the crucible, the gravity of the crucible device is reduced, so that the pressure applied by the crucible rotating magnetofluid 6 to the magnetofluid mounting plate 7 is reduced, the magnetofluid mounting plate 7 is driven to pull the transmission rod 804 to move, the transmission rod 804 can pull the transmission block 805 to move together in the movement process, the transmission block 805 moves to drive the limiting frame 807 to move, the limiting frame 807 slides on the limiting rod 808 at the moment, the movement of the limiting frame 807 is more stable and does not deflect, the limiting frame 807 moves to pull the sliding pull plate 809 to slide on the rheostat 810, the resistance value of the rheostat 810 in a circuit is changed, the current flowing through the binding post 811 is changed, the weight of the reduced raw materials in the crucible can be calculated through the change of the current of an external system, and the weight of a crystal bar returned by comparing with a weighing sensor arranged in the lifting mechanism, the condition that the leakage can be generated can be effectively deduced, so that the condition that the lower shaft can be automatically weighed and whether the leakage occurs or not can be judged.
Referring to fig. 2, a buffer spring 806 is fixed at the bottom end of the transmission rod 804, the buffer spring 806 is fixedly connected with the weighing frame 801, a stable spring rod 802 is arranged at one side of the transmission rod 804 close to the crucible shaft 4, and the stable spring rod 802 is fixedly connected with the magnetic fluid mounting plate 7 and the weighing frame 801 respectively; the during operation, along with the gradual reduction of the raw materials in the crucible, its gravity also is reducing, at this moment firm spring beam 802 kick-backs with buffer spring 806 jointly to promote the motion of magnetic current body mounting panel 7, when realizing the surplus measurement in the crucible through firm spring beam 802 and buffer spring 806, also can make the more mild of motion process of magnetic current body mounting panel 7, from not influencing the growth quality of crystal, do not influence the condition of the growth of crystal when realizing weighing.
Referring to fig. 2, a fastening frame 803 is fixed at the top end of the transmission rod 804, the fastening frame 803 is fixedly connected with the magnetic fluid mounting plate 7, a limiting rod 808 is connected in the limiting frame 807 in a through manner, and the limiting rod 808 is fixedly connected with the inner wall of the crucible base 1; during operation, thereby magnetic fluid mounting panel 7 motion pulling transfer line 804 moves, and the setting of fastening frame 803 can make the transfer line 804 more firm with being connected of magnetic fluid mounting panel 7, and spacing 807 can slide on gag lever post 808, can make the motion of spacing 807 more steady the condition that can not appear deflecting through gag lever post 808, and the effectual motion when weighing is restricted.
Referring to fig. 4, a push-pull rod 813 is rotatably connected to one side of the transmission block 805 close to the crucible shaft 4, a sliding block 814 is rotatably connected to one end of the push-pull rod 813 away from the transmission block 805, a fixed rod 815 is connected to the inside of the sliding block 814 in a penetrating manner, a rotating screw 816 is rotatably connected to one end of the sliding block 814 away from the center of the fixed rod 815, a hollow ring 817 is connected to the outside of the rotating screw 816 through threads, a fixed frame 818 is arranged at the height outside the hollow ring 817, and the fixed frame 818 is fixedly connected to the inner wall of the weighing frame 801; during operation, as the raw materials in the crucible are gradually reduced, the stable spring rod 802 and the buffer spring 806 are gradually reset, so that the transmission block 805 is pulled to move all the time, the transmission block 805 moves to push the push-pull rod 813 to move, the push-pull rod 813 moves to drive the sliding block 814 to slide on the fixed rod 815, and the sliding block 814 moves to push the rotating screw 816 to move, so that real-time transmission can be performed according to the raw material remaining amount in the crucible, preparation is made for two-way protection, and because the rotating screw 816 is in threaded connection with the hollow ring 817, the operating state of the rotating screw 816 at this time is that the rotating screw 816 moves towards the direction far away from the fixed frame 818 while rotating, so that the moving state of the rotating screw 816 is changed, and the rotating screw is made to be ready for subsequent alarm.
Referring to fig. 3, a connecting rod 819 is fixed at one end of the rotating screw 816, which is away from the sliding block 814, an extending rod 820 is fixed on both sides of the connecting rod 819, a friction ball 821 is fixed at one end of the extending rod 820, which is away from the rotating screw 816, a concave-convex ring 822 is arranged outside the friction ball 821, and the concave-convex ring 822 is fixedly connected with the inner wall of the fixing frame 818; the during operation, thereby rotate screw 816 motion and drive the motion of connecting rod 819, the motion of connecting rod 819 drives extension rod 820, and then drive friction ball 821 just rotates towards the direction motion limit of keeping away from dead lever 815, the whole friction ball 821 that finishes using of raw materials in the crucible contacts and rubs the sound that sends the thorn ear, outside operating personnel can learn equipment emergence condition after hearing sound, can remind the staff to catch up to look over to appear that the crucible takes place to reveal or the raw materials exhausts, thereby form two protection machanisms.
Referring to fig. 4, an activation spring 823 is fixed outside the friction ball 821, and an arc-shaped shifting piece 824 is fixed outside the activation spring 823; in operation, friction ball 821 can send harsh sound, friction ball 821 must can shake along with the production of motion at this in-process, thereby vibrations drive exciting spring 823 and shake, exciting spring 823 can drive the reciprocal friction ball 821 of arc plectrum 824 and strike shaking just in vibrations, thereby make the further increase of alarm sound that produces, make the staff notice the condition of crystal growth more easily, and strike the in-process at arc plectrum 824 to friction ball 821, thereby it can extrude air all around and produce the air current, the air current blows to friction ball 821's surface in step, clean its surface, thereby reach the effect of extension its life.
Example two
Referring to fig. 5, in a first comparative example, as another embodiment of the present invention, an alarm housing 11 is fixed to a side of the crucible base 1 away from the crucible shaft 4, a buzzer assembly 12 is fixed at the top end of the alarm shell 11, an alarm driving assembly 13 is fixed in the alarm shell 11, a driving wheel 14 is fixed on one side of the alarm driving component 13 close to the crucible base 1, a knocking rod 15 is fixed outside the driving wheel 14, one end of the knocking rod 15, which is far away from the driving wheel 14, is provided with a knocking head 16, two sides of the driving wheel 14 are provided with soundboard 17, the length of the soundboard 17 from the center of the alarm driving assembly 13 is less than the length of the knocking head 16 from the center of the circle, a vibrating spring 18 is fixed on one side of the sound returning plate 17, which is far away from the driving wheel 14, the vibrating spring 18 is easy to fixedly connect with the inner wall of the alarm shell 11, and a vibrating iron sheet 19 is fixed between the sound returning plate 17 and the alarm shell 11; when the crucible leakage alarm device works, when a crucible leakage condition occurs, an external control system judges that the leakage occurs and gives a starting signal, so that the buzzer assembly 12 starts to operate, at the moment, the buzzer assembly 12 buzzes to generate a harsh alarm sound, meanwhile, the alarm driving assembly 13 simultaneously starts to drive the driving wheel 14 to rotate, the driving wheel 14 rotates to drive the knocking rod 15 to rotate, the knocking rod 15 rotates to drive the knocking head 16 to rotate, the knocking head 16 collides with the echo plate 17 in the rotating process, the vibrating spring 18 is compressed and generates vibration under the action of the impact force, after the knocking head 16 is separated from the echo plate 17, the vibrating spring 18 drives the echo plate 17 to vibrate, further, the vibrating iron sheet 19 is pulled to shake in a reciprocating manner to generate violent alarm sound, and the alarm sound is inconsistent with the alarm sound generated when the raw materials in the crucible are exhausted, the staff can effectually distinguish the difference of alarm sound to when buzzer abnormal fault appears and can't make a sound, also can effectually inform the staff through the produced sound of soundboard 17, vibrations iron sheet 19 for the staff handles fast and can not miss the optimum time of remedy, so just reached when taking place to reveal the effect of automatic shutdown warning.
Referring to fig. 6, sound amplification grooves 20 are formed on both sides of the alarm housing 11, and a drum 21 is fixed inside the sound amplification grooves 20; in operation, after an abnormal condition occurs, the mechanism inside the alarm housing 11 operates and generates an alarm sound inside, the sound wave of the alarm sound moves outwards through the sound expansion slot 20, and simultaneously drives the eardrum 21 to vibrate in the process that the sound wave passes through the eardrum 21, and the alarm sound is amplified after the eardrum 21 vibrates, so that the alarm sound is more easily noticed by the staff.
EXAMPLE III
Referring to fig. 6 to 7, in a first comparative example, as another embodiment of the present invention, three or more pressure monitoring mechanisms 8 may be installed and distributed at the lower end of the magnetic fluid mounting plate 7 in an array, the shape of the pressure monitoring mechanism 8 may be circular or square, or the pressure monitoring mechanism may be manufactured into a housing shape adapted to the shape of the magnetic fluid mounting plate 7.
The working principle is that when in use, a mechanism for dynamically weighing crystal bar products through a weighing sensor arranged in an upper crystal lifting mechanism belongs to the prior art, and is not mentioned in detail herein, when a lower shaft weighing device is used, a crucible shaft 4 is sequentially arranged in a corrugated pipe 5, a crucible rotating magnetic fluid 6, a magnetic fluid mounting plate 7, a pressure monitoring mechanism 8 and a magnetic fluid base 9, when monocrystalline silicon is prepared, a crucible is arranged at the top of the crucible shaft 4, and the corrugated pipe 5 is connected with a crucible furnace, so that a closed space is formed in the crucible furnace, and the crucible is evacuated, during the preparation process, a crucible lifting assembly 3 drives a screw rod 2 to rotate so as to drive a crucible base 1 to lift and further adjust the position of the crucible, and a crucible rotating assembly 10 drives the crucible shaft 4 to rotate so as to form a crucible rotating to improve the quality of the prepared monocrystalline, during the preparation process, along with the gradual reduction of raw materials in the crucible, its gravity also is reducing to make crucible shaft 4 reduce the pressure that pressure monitoring mechanism 8 applyed, monitor through the signal that sends pressure monitoring mechanism 8 this moment, alright obtain the real-time weight data in the crucible, can reach following effect through comparing these weight data: the effect of monitoring the silicon leakage condition in a lower shaft weighing mode can be realized; the control of crystal pulling can be more directly realized by monitoring the weight of the crucible, and the quality of the residual silicon material in the crucible is directly fed back; the crystallization condition can be judged, whether the liquid level has the crystallization condition or not in the crystal growing process is judged, if the crystallization is caused by the low temperature at the liquid level, the crystallization can be promoted along with the crystal bar, and the weighing mass can be obviously changed; the crucible weighing device can be used for calibrating the quality of silicon materials in a crucible, the silicon materials are fed into the crucible before, the silicon materials are continuously fed into the crucible after the weighing outside, and the crucible weighing is directly monitored at present;
in the preparation process, as the raw material in the crucible is gradually reduced, the stable spring rod 802 and the buffer spring 806 rebound together to push the magnetic fluid mounting plate 7 to move upwards, the magnetic fluid mounting plate 7 moves to pull the transmission rod 804 to move, the fastening frame 803 is arranged to enable the connection between the transmission rod 804 and the magnetic fluid mounting plate 7 to be more stable, the transmission rod 804 can pull the transmission block 805 to move together in the moving process, the transmission block 805 moves to drive the limiting frame 807 to move, the limiting frame 807 slides on the limiting rod 808 at the moment, so that the movement of the limiting frame 807 is more stable and does not deflect, the limiting frame 807 moves to pull the sliding poking piece 809 to slide on the rheostat 810, the resistance value of the rheostat 810 in the circuit can be changed, and the current flowing through the binding post 811 can be changed, at the moment, the external system can calculate the weight of the reduced raw material in the crucible through the change of current, at the moment, the system can effectively deduce the condition of sufficient leakage by comparing the weight of the crystal bar transmitted back by a weighing sensor arranged in a lifting mechanism, and in the process, according to the reduced weight in the crucible, a control system can send a signal to the crucible lifting assembly 3 to drive the crucible lifting assembly to move, so that the crucible displacement caused in the resetting process of the stable spring rod 802 and the buffer spring 806 is compensated, and the growth quality of the crystal is improved;
as the raw material in the crucible is gradually reduced, the steady spring rod 802 and the buffer spring 806 are gradually reset, so as to pull the transmission block 805 to move all the time, the transmission block 805 moves to push the push-pull rod 813 to move, the push-pull rod 813 moves to drive the sliding block 814 to slide on the fixed rod 815, the sliding block 814 moves to drive the rotating screw 816 to move, and the rotating screw 816 is in threaded connection with the hollow ring 817, so that the rotating screw 816 moves in a direction away from the fixed rod 815 while rotating, the rotating screw 816 moves to drive the connecting rod 819 to move, the connecting rod 819 moves to drive the extension rod 820 to move, so as to drive the friction ball 821 to move in a direction away from the fixed rod 815 while rotating, when the raw material in the crucible is completely used, the friction ball 821 contacts with the concave-convex ring 822 and rubs to generate a harsh sound, and the friction ball 821 necessarily vibrates along with the movement in the process, thereby vibrations drive the exciting spring 823 and vibrate, exciting spring 823 just can drive the reciprocal friction ball 821 of arc plectrum 824 to strike at vibrations, thereby make the alarm sound that produces further increase, make the staff notice the condition of crystal growth more easily, and in the process of arc plectrum 824 strikes friction ball 821, it can extrude air all around thereby produce the air current, the air current blows to the surface of friction ball 821 in step, clean its surface, thereby reach the effect of extension its life, outside operating personnel can learn the equipment emergence condition after hearing the sound, can remind the staff to catch up and look over, and meanwhile, driving block 805 can drive slide plectrum 809 and slide to the top of rheostat 810, thereby make terminal 811 can output stop signal to the system, this condition is applicable to when the crucible is revealed, the automatic shutdown operation when no staff checks is carried out, so that the effect of automatically weighing and comparing the lower shaft when the monocrystalline silicon is prepared by the Czochralski method is achieved;
when the crucible leakage occurs, an external control system can judge that the leakage occurs and give a starting signal, so that the buzzer assembly 12 starts to operate, at the moment, the buzzer assembly 12 can buzz to generate an aural alarm sound, meanwhile, the alarm driving assembly 13 simultaneously starts to drive the driving wheel 14 to rotate, the driving wheel 14 rotates to drive the knocking rod 15 to rotate, the knocking rod 15 rotates to drive the knocking head 16 to rotate, the knocking head 16 collides with the echo plate 17 in the rotating process, the vibrating spring 18 is compressed and generates vibration under the action of the impact force, after the knocking head 16 is separated from the echo plate 17, the vibrating spring 18 drives the echo plate 17 to vibrate, further, the vibrating iron sheet 19 is pulled to shake in a reciprocating manner to generate a violent alarm sound, the sound wave of the alarm sound moves outwards through the sound expansion groove 20, and in the process that the sound wave passes through the eardrum 21, it can drive tympanic membrane 21 vibrations simultaneously, tympanic membrane 21 vibrations back is enlargied this alarm sound, thereby make the staff notice the alarm sound more easily, produced alarm sound is inconsistent when raw materials run out in this alarm sound and the crucible, the staff can effectual differentiation alarm sound's difference, thereby carry out emergency treatment to equipment, and at this in-process, control system can be with the emergent automatic control procedure of automatic operation after receiving the signal of revealing, automatic shutdown heating etc. thereby reduce personnel's safety and equipment product loss, so just reached when taking place to reveal the effect of auto-stop warning.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. The utility model provides a single crystal growing furnace crucible promotes lower weighing device which characterized in that: including crucible base (1), crucible base (1) inside is provided with lead screw (2), lead screw (2) lower extreme is fixed with crucible and rises subassembly (3), crucible base (1) inside sets up and is connected with crucible axle (4), bellows (5) have been cup jointed to crucible axle (4) outside, bellows (5) lower extreme is fixed with magnetic fluid mounting panel (7), magnetic fluid mounting panel (7) inside is fixed with crucible and changes magnetic fluid (6), magnetic fluid mounting panel (7) lower extreme is fixed with pressure monitoring mechanism (8), pressure monitoring mechanism (8) lower extreme is fixed with magnetic fluid base (9), crucible axle (4) lower extreme is provided with crucible and changes subassembly (10).
2. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: the magnetic fluid mounting plate (7) is connected with the crucible rotating magnetic fluid (6) and the pressure monitoring mechanism (8) through screws.
3. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: the pressure monitoring mechanism (8) comprises a weighing frame (801), a transmission rod (804) is arranged between the weighing frame (801) and the magnetic fluid mounting plate (7), a transmission block (805) is fixed to the lower end of the transmission rod (804), a limiting frame (807) is fixed to one side, away from the magnetic fluid mounting plate (7), of the transmission block (805) of the limiting frame (807), a sliding pull sheet (809) is fixed to one side, away from the limiting frame (807), of the limiting frame (807), a rheostat (810) is arranged on one side, away from the limiting frame (807), of the sliding pull sheet (809), binding posts (811) are fixed to the upper end and the lower end of the rheostat (810), a mounting seat (812) is fixed to one end, away from the rheostat (810), of the binding posts (811) is fixedly connected with the inner wall of the weighing frame (801).
4. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: the bottom end of the transmission rod (804) is fixed with a buffer spring (806), the buffer spring (806) is fixedly connected with the weighing frame (801), one side, close to the crucible shaft (4), of the transmission rod (804) is provided with a stable spring rod (802), and the stable spring rod (802) is fixedly connected with the magnetic fluid mounting plate (7) and the weighing frame (801) respectively.
5. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: the top end of the transmission rod (804) is fixed with a fastening frame (803), the fastening frame (803) is fixedly connected with the magnetic fluid mounting plate (7), a limiting rod (808) is connected inside the limiting frame (807) in a penetrating manner, and the limiting rod (808) is fixedly connected with the inner wall of the crucible base (1).
6. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: one side of the transmission block (805) close to the crucible shaft (4) is rotatably connected with a push-pull rod (813), one end, far away from the transmission block (805), of the push-pull rod (813) is rotatably connected with a sliding block (814), a fixed rod (815) is connected in the sliding block (814) in a penetrating mode, one end, far away from the center of the fixed rod (815), of the sliding block (814) is rotatably connected with a rotating screw rod (816), the outside of the rotating screw rod (816) is connected with a hollow ring (817) through threads, a fixing frame (818) is arranged at the height of the outside of the hollow ring (817), and the fixing frame (818) is fixedly connected with the inner wall of the weighing frame (801).
7. The single crystal furnace crucible lifting lower shaft weighing device as claimed in claim 6, wherein: a connecting rod (819) is fixed to one end, far away from the sliding block (814), of the rotating screw rod (816), extension rods (820) are fixed to two sides of the connecting rod (819), a friction ball (821) is fixed to one end, far away from the rotating screw rod (816), of the extension rods (820), a concave-convex ring (822) is arranged outside the friction ball (821), and the concave-convex ring (822) is fixedly connected with the inner wall of the fixing frame (818).
8. The single crystal furnace crucible lifting lower shaft weighing device as claimed in claim 7, wherein: an activation spring (823) is fixed to the outer portion of the friction ball (821), and an arc-shaped shifting piece (824) is fixed to the outer portion of the activation spring (823).
9. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: an alarm shell (11) is fixed on one side, away from the crucible shaft (4), of the crucible base (1), a buzzing component (12) is fixed on the top end of the alarm shell (11), an alarm driving component (13) is fixed inside the alarm shell (11), a driving wheel (14) is fixed on one side, close to the crucible base (1), of the alarm driving component (13), a knocking rod (15) is fixed on the outer portion of the driving wheel (14), a knocking head (16) is arranged at one end, away from the driving wheel (14), of the knocking rod (15), soundboard (17) are arranged on two sides of the driving wheel (14), the length, away from the center of the circle of the alarm driving component (13), of the soundboard (17) is smaller than the length, from the knocking head (16) to the center of the circle, a vibrating spring (18) is fixed on one side, away from the driving wheel (14), of the soundboard (17), and the inner wall of the alarm shell (11) is easy to connect, and a vibrating iron sheet (19) is fixed between the soundboard (17) and the alarm shell (11).
10. The single crystal furnace crucible lifting lower shaft weighing device is characterized in that: both sides of the alarm shell (11) are provided with sound expansion grooves (20), and eardrums (21) are fixed in the sound expansion grooves (20).
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| CN114318506B (en) | 2022-12-06 |
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