CN112831830A

CN112831830A - Crucible lifting mechanism for crystal growth equipment and crystal growth equipment

Info

Publication number: CN112831830A
Application number: CN202011629059.9A
Authority: CN
Inventors: 袁长路; 苗江涛
Original assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
Current assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
Priority date: 2020-12-31
Filing date: 2020-12-31
Publication date: 2021-05-25
Anticipated expiration: 2040-12-31
Also published as: CN112831830B

Abstract

The invention discloses a crucible lifting mechanism for crystal growth equipment and the crystal growth equipment, wherein the crucible lifting mechanism comprises a crucible shaft, a weighing component and an adjusting component, the crucible is suitable for being installed on the crucible shaft, the crucible shaft is used for driving the crucible to move up and down and driving the crucible to rotate around the central axis of the crucible shaft, the weighing component is matched with the crucible shaft and is used for weighing the bearing weight on the crucible shaft and outputting weighing information, and the adjusting component is connected with the crucible shaft and the weighing component and is used for adjusting the interaction force of the crucible shaft and the weighing component in the axial direction of the crucible shaft. The crucible lifting mechanism for the crystal growth equipment has good weighing stability and accuracy.

Description

Crucible lifting mechanism for crystal growth equipment and crystal growth equipment

Technical Field

The invention relates to the technical field of crystal growth, in particular to a crucible lifting mechanism for crystal growth equipment and the crystal growth equipment.

Background

Conventional methods for producing crystals are generally silicon single crystals or oxide crystals grown by the Czochralski (CZ) method. In the growth process of the crystal, various conditions of the crystal in the growth process need to be controlled in order to ensure the quality of the crystal, and the precondition for regulating the growth condition of the crystal is to judge whether the growth condition of the crystal needs to be changed or not by checking the weight change of the crystal in the growth process.

The CZ single crystal furnace is generally not equipped with a weighing device, mainly by measuring the diameter of the crystal and converting it into weight according to the density of the ingot, thereby determining the position of the crucible liquid level and adjusting the crucible heel ratio (i.e., the ratio between the moving speed of the crucible and the pulling speed of the crystal pulling mechanism).

With the development of the CCZ technology, the CCZ crystal pulling process can realize feeding in the crystal pulling process, and the mass of silicon consumed in the crystal pulling process is controlled to be the same as that of silicon added through a feeder through software, so that the liquid port distance can be kept unchanged (the liquid port distance refers to the distance from the lower edge of the guide cylinder to the liquid level of molten silicon or the interface of the molten silicon) in the crystal pulling process on the premise of not using a crucible to lift. For the CCZ technique, it becomes more important to accurately know the change in weight of the solution in the crucible. Patent CN211771652U discloses a feeding device for single crystal furnace production, wherein a weight sensing device is arranged on the bottom surface of a feeding bin, so as to realize weight measurement of raw materials. However, in the actual production process, the raw materials are lost, and the weight result has large errors, so that errors exist in the adjustment of a series of parameters in the growth process, and the quality of the grown crystals is poor. Therefore, it is becoming increasingly important to accurately measure the weight change in the crucible regardless of the crystal growth method.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides the crucible lifting mechanism for the crystal growth equipment, which has good weighing stability and accuracy and is convenient for realizing the accurate tracking of the real-time position of the material liquid level in the crucible body.

The invention also provides crystal growth equipment with the crucible lifting mechanism.

A crucible lifting mechanism for a crystal growing apparatus according to a first aspect of the present invention, the crystal growing apparatus including a crucible, the crucible lifting mechanism comprising: the crucible shaft is suitable for being installed on the crucible shaft and used for driving the crucible to move up and down and driving the crucible to rotate around the central axis of the crucible shaft; the weighing component is matched with the crucible shaft and used for weighing the bearing weight on the crucible shaft and outputting weighing information; the adjusting component is connected with the crucible shaft and the weighing component and is used for adjusting the interaction force of the crucible shaft and the weighing component in the axial direction of the crucible shaft.

According to the crucible lifting mechanism for the crystal growth equipment, the weighing component and the adjusting component are arranged, so that the symmetrical component of the adjusting component can be weighed and corrected conveniently, the weighing stability and accuracy of the crucible lifting mechanism are ensured, the real-time position change of the material liquid surface in the crucible body can be tracked accurately, and the production efficiency can be further improved.

In some embodiments, the weighing assembly comprises: the sliding seat is sleeved outside the crucible shaft, and the adjusting assembly is connected with the sliding seat and the crucible shaft; and the weighing mechanism is arranged between the sliding seat and the crucible shaft and is used for weighing the bearing weight on the crucible shaft.

In some embodiments, the crucible lifting mechanism further comprises: and the lifting driving component is used for driving the crucible shaft to move up and down through the sliding seat.

In some embodiments, be formed with mounting flange on the crucible axle, the slide cooperation is in the downside of mounting flange, the weighing machine constructs to be established the slide with between the mounting flange, adjusting part follows the axial setting of crucible axle and connects the slide with mounting flange.

In some embodiments, the adjustment assembly comprises: the connecting piece is connected with the crucible shaft and the weighing component; an adjusting member provided between the connecting member and one of the crucible shaft and the weighing assembly, and constantly driving the one of the crucible shaft and the weighing assembly to move toward the other of the crucible shaft and the weighing assembly; optionally, the connecting piece is fixedly connected with the other one of the crucible shaft and the weighing assembly and is in sliding fit with the one of the crucible shaft and the weighing assembly along the axial direction of the crucible shaft.

In some embodiments, the connecting member is in threaded fit with the weighing component, a mounting hole extending along the axial direction of the crucible shaft is formed on the crucible shaft, the connecting member is movably arranged in the mounting hole in a penetrating way, the adjusting member is arranged between the crucible shaft and the connecting member and is used for driving the crucible shaft to move towards the direction of the weighing component; optionally, an end cap is disposed at an end of the mounting hole away from the weighing assembly, and the end cap closes the mounting hole.

In some embodiments, the adjusting piece is sleeved outside the connecting piece, one end of the connecting piece, which is far away from the weighing assembly, is provided with a stop bulge, and the adjusting piece is stopped between the stop bulge and the crucible shaft; optionally, the adjusting member is a compression spring.

In some embodiments, the epaxial mounting flange that is formed with of crucible, the mounting hole is formed at mounting flange is last, the subassembly of weighing includes slide and weighing mechanism, the slide cover is established the crucible is epaxial and the cooperation is in mounting flange's downside, the slide with connecting piece screw-thread fit, weighing mechanism establishes mounting flange with between the slide in the circumference of crucible axle, the mounting hole with weighing mechanism interval sets up.

In some embodiments, a linear bearing is arranged in the mounting hole, the connecting piece is movably arranged through the linear bearing, and the adjusting piece is arranged between the linear bearing and the connecting piece; or a shaft sleeve is arranged in the mounting hole, the connecting piece is movably arranged in the shaft sleeve in a penetrating mode, and the adjusting piece is arranged between the shaft sleeve and the connecting piece; optionally, when a linear bearing is arranged in the mounting hole, a gasket is arranged between the adjusting piece and the linear bearing; when the shaft sleeve is arranged in the mounting hole, a gasket is arranged between the adjusting piece and the shaft sleeve.

In some embodiments, the crucible shaft is adapted to be movably arranged on a furnace bottom plate of the crystal growth equipment in a penetrating mode, a mounting flange is formed on the crucible shaft, a corrugated pipe is sleeved outside the crucible shaft, and the corrugated pipe is connected between the furnace bottom plate and the mounting flange in a sealing mode; optionally, the bellows is a metallic piece.

In some embodiments, the connecting member is a bearing steel material member having a surface that is hardened and carburized.

In some embodiments, the crucible lifting mechanism further comprises: and the display component is connected with the weighing component and used for displaying the weighing information.

A crystal growth apparatus according to a second aspect of the present invention includes: a crucible; the crucible lifting mechanism is used for the crystal growth equipment according to the first aspect of the invention, the crucible is mounted at the upper end of the crucible shaft, and the crucible shaft is movably arranged on the furnace bottom plate of the crystal growth equipment along the axial direction of the crucible shaft in a penetrating way and is in rotating fit with the furnace bottom plate.

According to the crystal growth equipment, the crucible lifting mechanism is adopted, so that the change of the material liquid level in the crucible body can be accurately tracked conveniently, and the production efficiency can be further improved.

In some embodiments, the crystal growth apparatus is a continuous czochralski growth apparatus.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic view of a crucible lifting mechanism according to one embodiment of the present invention;

FIG. 2 is a partial cross-sectional view of the crucible lifting mechanism shown in FIG. 1;

FIG. 3 is another partial cross-sectional view of the crucible lifting mechanism shown in FIG. 1;

FIG. 4 is still another partial cross-sectional view of the crucible lifting mechanism shown in FIG. 1;

FIG. 5 is a schematic view of a crucible lifting mechanism according to another embodiment of the present invention;

FIG. 6 is a schematic view of the attachment of a weighing mechanism to a display assembly according to one embodiment of the present invention.

Reference numerals:

a crucible lifting mechanism 100, a furnace bottom plate, a fixed bracket 102,

A crucible shaft 1, an installation flange 11, an installation hole 11a,

The weighing component 2, the sliding seat 21, the first wire through hole 21a, the weighing mechanism 22, the connecting wire 221, the mounting part 23, the second wire through hole 23a,

The adjusting component 3, a connecting piece 31, a stop bulge 31a, an adjusting piece 32, an end cover 33, a linear bearing 34, a gasket 35,

A corrugated pipe 4,

Display module 6, data conversion box 61, CPU62, display screen 63,

A lifting driving component 7,

A first driver 71, a lifting mechanism 72, a lead screw 721,

A synchronous belt drive mechanism 73, a first driving pulley 731, a first driven pulley 732, an endless belt 733, a guide mechanism 74, a guide rail 741,

A rotary driving component 8,

A second driver 81,

A poly-v belt transmission 82, a second driving pulley 821, a second driven pulley 822, and a poly-v belt 823.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

Next, with reference to the drawings, a crucible lifting mechanism 100 for a crystal growth apparatus according to an embodiment of the present invention is described.

The crystal growth equipment comprises a crucible, the crucible is used for containing materials required by crystal growth, the crucible is arranged on a crucible lifting mechanism 100, then the crucible lifting mechanism 100 can be supported at the bottom of a crucible body, and the crucible lifting mechanism 100 is used for driving the crucible to move up and down and driving the crucible to rotate around the central axis of the crucible.

As shown in fig. 1 and 4, the crucible lifting mechanism 100 comprises a crucible shaft 1 and a weighing component 2, the crucible is suitable for being installed on the crucible shaft 1, the crucible shaft 1 is used for driving the crucible to move up and down and driving the crucible to rotate around the central axis of the crucible shaft 1, the weighing component 2 is matched with the crucible shaft 1, the weighing component 2 is used for weighing the bearing weight on the crucible shaft 1 and outputting weighing information, an operator can obtain the bearing weight of the crucible shaft 1 according to the weighing information output by the weighing component 2, so that the weight of a material in the crucible is obtained, the height of the liquid level of the material in the crucible is calculated, and the real-time tracking of the height of the liquid level of the material in the crucible can be realized. It can be understood that when the weighing component 2 is used for weighing the bearing weight on the crucible shaft 1, the weighing component 2 is abutted against the crucible shaft 1, so that the bearing weight on the crucible shaft 1 acts on the weighing component 2.

As shown in fig. 1 and fig. 2, the crucible lifting mechanism 100 further includes an adjusting component 3, the adjusting component 3 connects the crucible shaft 1 and the weighing component 2, and the adjusting component 3 is used for adjusting the interaction force of the crucible shaft 1 and the weighing component 2 in the axial direction of the crucible shaft 1, for example, the adjusting component 3 can increase or decrease the interaction force of the crucible shaft 1 and the weighing component 2 in the axial direction of the crucible shaft 1, so as to realize the correction of the weighing component 2, thereby when the crucible lifting mechanism 100 is applied to a vacuum environment, it is beneficial to improve the weighing accuracy of the weighing component 2, reduce the error influence of the vacuum environment on the weighing component 2, and simultaneously, it is convenient to ensure the weighing balance of the crucible lifting mechanism 100, and avoid the unbalanced state between the weighing component 2 and the crucible shaft 1.

In addition, because adjusting part 3 connects crucible axle 1 and weighing component 2 for crucible axle 1 and weighing component 2 have the interact power on the bearing of crucible axle 1 bearing, and this effort can be adjusted, makes weighing component 2 can follow crucible axle 1 and move in the axial of crucible axle 1, guarantees that adjusting part 3's setting can not influence the lift of crucible axle 1.

It can be understood that when crucible elevating system 100 is applied to crystal growth equipment, if crystal growth equipment adopts vacuum state in the process, then vacuum in the crystal growth equipment can cause certain influence to weighing accuracy of weighing subassembly 2, through the mutual effort between adjusting part 3 adjustment crucible axle 1 and the weighing subassembly 2, can offset vacuum state to weighing subassembly 2's influence, guarantees that crucible axle 1 and weighing subassembly 2 are stable to end, is favorable to reducing the error.

According to the crucible lifting mechanism 100 for the crystal growth equipment, provided by the embodiment of the invention, the weighing component 2 and the adjusting component 3 are arranged, so that the adjusting component 3 can conveniently weigh and correct the weighing component 2, and the influence of the symmetrical recombination components 2 such as a vacuum state, torsion generated by rotation of the crucible shaft 1 and the like can be counteracted, so that the weighing stability and accuracy of the crucible lifting mechanism 100 are ensured, the accurate tracking of the real-time position change of the material liquid level in the crucible is conveniently realized, the production efficiency is further improved, and the unit consumption of the production time is saved.

In some embodiments, as shown in fig. 2 and 3, the weighing assembly 2 includes a sliding seat 21 and a weighing mechanism 22, the sliding seat 21 is sleeved outside the crucible shaft 1, the adjusting assembly 3 connects the sliding seat 21 and the crucible shaft 1, the adjusting assembly 3 can adjust the interaction force of the sliding seat 21 and the crucible shaft 1 in the moving direction of the crucible shaft 1, the weighing mechanism 22 is disposed between the sliding seat 21 and the crucible shaft 1, and the weighing mechanism 22 is used for weighing the bearing weight on the crucible shaft 1 and outputting weighing information, the weighing mechanism 22 can weigh the interaction force between the sliding seat 21 and the crucible shaft 1, and the adjusting assembly 3 can realize weighing correction on the weighing mechanism to ensure the weighing accuracy of the weighing mechanism. From this, subassembly 2 of weighing simple structure sets up the convenience.

Optionally, the weighing mechanism 22 is a load cell.

For example, in the example of fig. 3, the weighing mechanism 22 may be fixed on the slide 21, for the mounting of the weighing mechanism 22; for example, the weighing means 22 can be fixedly connected to the carriage 21 by means of a mounting 23. Of course, the weighing means 22 can also be fixed to the crucible shaft 1.

In some embodiments, the crucible lifting mechanism 100 further comprises a lifting driving assembly 7, the lifting driving assembly 7 is used for driving the crucible shaft 1 to move up and down through the sliding seat 21, then the lifting driving assembly 7 is matched with the sliding seat 21 to drive the sliding seat 21 to move up and down, so as to drive the crucible shaft 1 to move up and down, and at this time, the arrangement of the weighing assembly 2 does not influence the lifting of the crucible, so as to facilitate the operations of assembling, loading, taking materials, cleaning and the like of the crystal growth equipment.

For example, in the example of fig. 5, the lifting drive assembly 7 comprises a first driver 71 and a lifting mechanism 72, the first driver 71 is mounted on a fixed bracket 102, and the fixed bracket 102 is suitable for being connected with a furnace bottom plate of the crystal growth device, so that the crucible lifting mechanism 100 is ensured to be compact and the occupied space is saved; the lifting mechanism 72 comprises a lead screw 721, the lead screw 721 is connected with the first driver 71 to be driven by the first driver 71 to rotate, the lead screw 721 extends along the axial direction of the crucible shaft 1, and the lead screw 721 is in threaded fit with the sliding base 21, so that the lead screw 721 rotates to drive the sliding base 21 to move along the extending direction of the lead screw 721, and the lifting of the crucible shaft 1 is realized. From this, lift drive assembly 7 simple structure is convenient for guarantee drive stability.

For example, the lifting driving assembly 7 may further include a synchronous belt transmission mechanism 73, the synchronous belt transmission mechanism 73 is disposed between the first driver 71 and the lifting mechanism 72, and the synchronous belt transmission mechanism 73 may transmit the power of the first driver 71 to the lifting mechanism 72; the synchronous belt drive mechanism 73 includes a first driving pulley 731, a first driven pulley 732, and an endless belt 733, the first driving pulley 731 is connected to the first driver 71 to be driven to rotate by the first driver 71, the first driven pulley 732 is connected to the lead screw 721, and the endless belt 733 is tensioned on the first driving pulley 731 and the first driven pulley 732, so that the lead screw 721 is driven to rotate by the first driven pulley 732. Therefore, the annular transmission belt 733 and the first driving pulley 731 and the first driven pulley 732 do not slide relatively, so that a strict transmission ratio can be ensured, and the crucible body can be accurately controlled to move up and down conveniently.

The diameter of the first driving pulley 731 is smaller than the diameter of the first driven pulley 732, and the rotating speed of the first driven pulley 732 is smaller than the rotating speed of the first driving pulley 731, so that the reduction transmission is realized, and the stability of the movement of the crucible shaft 1 is ensured.

As shown in fig. 5, the lifting driving assembly 7 may further include a guiding mechanism 74, the guiding mechanism 74 includes a guide rail 741 and a slider, the guide rail 741 is adapted to be fixed on the fixed bracket 102, the guide rail 741 extends along the axial direction of the crucible shaft 1, the slider is disposed on the sliding base 21, and the slider is in sliding fit with the guide rail 741, so that the slider can move relative to the guide rail 741 along the extending direction of the guide rail 741, so as to ensure the stability and smoothness of the movement of the sliding base 21, and thus, the crucible shaft 1 can move stably and smoothly.

In some embodiments, as shown in fig. 1 and 2, the crucible shaft 1 is formed with a mounting flange 11, a sliding base 21 is fitted on the lower side of the mounting flange 11, a weighing mechanism 22 is arranged between the sliding base 21 and the mounting flange 11, the adjusting assembly 3 is arranged along the axial direction of the crucible shaft 1, and the adjusting assembly 3 connects the sliding base 21 and the mounting flange 11. Therefore, by arranging the mounting flange 11, the mounting flange 11 and the sliding seat 21 are opposite to each other along the axial direction of the crucible shaft 1, and the arrangement of the adjusting assembly 3 is convenient.

In some embodiments, as shown in fig. 2, the adjusting assembly 3 comprises a connecting member 31 and an adjusting member 32, the connecting member 31 connects the crucible shaft 1 and the weighing assembly 2, the adjusting member 32 is disposed between the connecting member 31 and one of the crucible shaft 1 and the weighing assembly 2, and the adjusting member 32 always drives the one of the crucible shaft 1 and the weighing assembly 2 to move toward the other of the crucible shaft 1 and the weighing assembly 2, that is, the adjusting member 32 always applies a force to the one of the crucible shaft 1 and the weighing assembly 2, the force causes the one of the crucible shaft 1 and the weighing assembly 2 to have a drive toward the other of the crucible shaft 1 and the weighing assembly 2, and the adjusting member 32 can increase the interaction force between the crucible shaft 1 and the weighing assembly 2, thereby offsetting the influence of the vacuum environment on the weighing assembly 2, the weighing accuracy is improved.

For example, in the example of fig. 2, the adjusting member 32 is disposed between the crucible shaft 1 and the connecting member 31, and the adjusting member 32 always drives the crucible shaft 1 to move towards the weighing assembly 2, and the direction of the acting force applied to the crucible shaft 1 by the adjusting member 32 is consistent with the gravity direction of the crucible shaft 1, which is beneficial to reducing the requirement on the bearing capacity of the adjusting member 32. Of course, the adjusting member 32 may also be provided between the weighing assembly 2 and the connecting member 31, in which case the adjusting member 32 always drives the weighing assembly 2 towards the crucible shaft 1.

Alternatively, in the example of fig. 2, the connecting member 31 is fixedly connected with the other one of the crucible shaft 1 and the weighing assembly 2, and the connecting member 31 is slidably engaged with the one of the crucible shaft 1 and the weighing assembly 2 along the axial direction of the crucible shaft 1, for example, the adjusting member 32 is arranged between the crucible shaft 1 and the connecting member 31, and the adjusting member 32 always drives the crucible shaft 1 to move towards the weighing assembly 2, while the connecting member 31 is fixedly connected with the weighing assembly 2, and the connecting member 31 is slidably engaged with the crucible shaft 1 along the axial direction of the crucible shaft 1; alternatively, the adjusting member 32 is disposed between the weighing assembly 2 and the connecting member 31, and the adjusting member 32 always drives the weighing assembly 2 to move towards the crucible shaft 1, at this time, the connecting member 31 is fixedly connected with the crucible shaft 1, and the connecting member 31 and the weighing assembly 2 are in sliding fit along the axial direction of the crucible shaft 1. Thereby, it is facilitated to ensure that the force of the adjustment member 32 is effective to correct the weighing assembly 2.

It should be noted that the connecting member 31 is fixedly connected to the other one of the crucible shaft 1 and the weighing assembly 2, which means that the connecting member 31 and the other one of the crucible shaft 1 and the weighing assembly 2 do not move relatively in the axial direction of the crucible shaft 1 after the installation of the connecting member 31 is completed.

Alternatively, the connecting member 31 is formed as an adjustable connecting member, in which the connecting member 31 is in threaded engagement with the other one of the crucible shaft 1 and the weighing assembly 2, and the connecting member 31 is in sliding engagement with the other one of the crucible shaft 1 and the weighing assembly 2, and in which the engagement length of the connecting member 31 with the other one of the crucible shaft 1 and the weighing assembly 2 is adjustable, so that the connecting member 31 can adjust the magnitude of the acting force applied by the adjusting member 32 to the other one of the crucible shaft 1 and the weighing assembly 2, so that the crucible lifting mechanism 100 can be applied to different vacuum environments, which is beneficial to improving the applicability of the crucible lifting mechanism 100.

In some embodiments, as shown in fig. 2, the connecting member 31 is screwed with the weighing assembly 2, and the connecting member 31 is slidably engaged with the crucible shaft 1 along the axial direction of the crucible shaft 1, the adjusting member 32 is disposed between the crucible shaft 1 and the connecting member 31, and the adjusting member 32 always drives the crucible shaft 1 to move toward the weighing assembly 2; when the thread fit length between the connecting piece 31 and the weighing component 2 is increased, the connecting piece 31 can continuously extrude the adjusting piece 32, the deformation of the adjusting piece 32 is increased, the acting force exerted by the adjusting piece 32 on the crucible shaft 1 is increased at the moment, when the thread fit length between the connecting piece 31 and the weighing component 2 is reduced, the deformation of the adjusting piece 32 is reduced, the acting force exerted by the adjusting piece 32 on the crucible shaft 1 is reduced at the moment, meanwhile, in the use process of the crucible lifting mechanism 100, the crucible shaft 1 is allowed to have a certain movement amplitude relative to the sliding seat 21 along the axial direction of the crucible shaft 1, and the weighing component 2 has a certain weighing range. Wherein the adjusting member 32 may be formed as a resilient member to effectively cooperate with the connecting member 31 to effect a correction of different sizes of the weighing assembly 2.

Wherein, be formed with the mounting hole 11a along the axial extension of crucible axle 1 on the crucible axle 1, the connecting piece 31 is movably worn to locate in mounting hole 11a, has realized the sliding fit of connecting piece 31 with crucible axle 1, simple structure. For example, in the example of fig. 2, a mounting flange 11 is formed on the crucible shaft 1, and a mounting hole 11a is formed on the mounting flange 11 to facilitate the arrangement of the connection member 31.

Optionally, in the example of fig. 2, an end cover 33 is disposed at an end of the mounting hole 11a far away from the weighing assembly 2, and the end cover 33 closes the mounting hole 11a, so that the end cover 33 can prevent foreign matters from entering the mounting hole 11a to affect the adjusting member 32, and ensure the operational reliability of the adjusting member 32.

For example, in the example of fig. 2, one end of the mounting hole 11a far from the slider 21 may be formed as a stepped portion, and the edge of the end cap 33 is formed with a protrusion portion that engages with the stepped portion, so that a concave-convex engagement may be formed between the outer peripheral wall of the end cap 33 and the wall surface of the mounting hole 11a, which is beneficial to improving the sealing performance between the end cap 33 and the mounting hole 11 a.

In some embodiments, as shown in fig. 2, the adjusting member 32 is sleeved outside the connecting member 31, one end of the connecting member 31, which is away from the weighing assembly 2, is provided with a stopping protrusion 31a, and the adjusting member 32 is stopped between the stopping protrusion 31a and the crucible shaft 1, so as to limit the adjusting member 32, avoid the adjusting member 32 from being separated, and ensure that the adjusting member 32 is reliably installed.

Alternatively, in the example of fig. 2, the adjusting member 32 is a compression spring, and the elastic force generated by the adjusting member 32 is adjustable, so that the weighing assemblies can be corrected in different sizes, and the crucible lifting mechanism 100 can use vacuum degrees in different sizes.

It will be appreciated that the amount of force applied by the adjustment assembly 3 may be determined empirically or the like, after the vacuum level in the crystal growing apparatus has been determined. For example, in the example of fig. 2, after empirically determining the amount of force applied by the adjustment assembly 3, the length of the threaded engagement between the link 31 and the carriage 21 can be determined.

In some embodiments, as shown in fig. 1 to 3, the crucible shaft 1 is formed with a mounting flange 11, a mounting hole 11a is formed on the mounting flange 11, the weighing assembly 2 includes a sliding seat 21 and a weighing mechanism 22, the sliding seat 21 is sleeved outside the crucible shaft 1, the sliding seat 21 is fitted on the lower side of the mounting flange 11, the sliding seat 21 is in threaded fit with the connecting member 31, so that the mounting hole 11a and the sliding seat 21 are oppositely arranged along the axial direction of the crucible shaft 1, so that the connecting member 31 connects the crucible shaft 1 and the sliding seat 21; the weighing mechanism 22 is arranged between the mounting flange 11 and the sliding seat 21 and used for weighing the bearing weight on the crucible shaft 1, and the mounting holes 11a and the weighing mechanism 22 are arranged at intervals in the circumferential direction of the crucible shaft 1, so that the weighing mechanism 22 and the connecting piece 31 cannot interfere with each other, and the weighing mechanism 22 and the connecting piece 31 are ensured to be smoothly mounted.

In some embodiments, as shown in fig. 2, a linear bearing 34 is disposed in the mounting hole 11a, and the connecting member 31 is movably disposed through the linear bearing 34, so that the connecting member 31 and the linear bearing 34 are slidably engaged along the axial direction of the crucible shaft 1, which is beneficial to reducing the frictional resistance received during the movement of the crucible shaft 1 relative to the connecting member 31, and improving the movement stability of the crucible shaft 1, so as to ensure that the weighing components are parallel to each other. Wherein, the adjusting piece 32 is arranged between the linear bearing 34 and the connecting piece 31, the adjusting piece 32 is convenient to arrange, and the adjusting piece 32 can apply acting force to the crucible shaft 1 through the linear bearing 34.

In addition, because crucible axle 1 can have certain torsion, this torsion can be used to weighing component 2 for weighing component 2 measuring result is inaccurate, through setting up linear bearing 34, can play the effect of adjusting the torsion to a certain extent, so that the weighing result is accurate.

Optionally, the linear bearing 34 is a ball bearing; alternatively, the linear bearing 34 is a piece of copper material, in which case the linear bearing 34 may be oil-free.

Optionally, when the linear bearing 34 is arranged in the mounting hole 11a, the adjusting piece 32 and the gasket 35 are arranged between the linear bearings 34, so that the balance of acting force applied to the linear bearing 34 by the adjusting piece 32 is favorably improved, the crucible shaft 1 is further ensured to stably move, the gasket 35 can buffer the axial impact load received by the linear bearing 34, and the linear bearing 34 is ensured to be reliably used.

In other embodiments, a shaft sleeve is arranged in the mounting hole 11a, the connecting member 31 is movably arranged in the shaft sleeve in a penetrating manner, the connecting member 31 is in sliding fit with the shaft sleeve along the axial direction of the crucible shaft 1, the shaft sleeve can be made of a polytetrafluoroethylene material, so that the friction resistance of the crucible shaft 1 in the moving process relative to the connecting member 31 can be reduced, the movement stability of the crucible shaft 1 is improved, and the shaft sleeve has good wear resistance and is reliable in use. Wherein, the adjusting piece 32 is arranged between the shaft sleeve and the connecting piece 31, the adjusting piece 32 is convenient to be arranged, and the adjusting piece 32 can apply acting force to the crucible shaft 1 through the shaft sleeve.

Optionally, when a shaft sleeve is arranged in the mounting hole 11a, a gasket 35 is arranged between the adjusting piece 32 and the shaft sleeve, so that the balance of acting force applied to the shaft sleeve by the adjusting piece 32 is favorably improved, and the stable movement of the crucible shaft 1 is further ensured.

In some embodiments, as shown in fig. 1 and 5, the crucible shaft 1 is adapted to movably penetrate through a furnace bottom plate of a crystal growth apparatus, a mounting flange 11 is formed on the crucible shaft 1, a corrugated pipe 4 is sleeved outside the crucible shaft 1, the corrugated pipe 4 is hermetically connected between the furnace bottom plate and the mounting flange 11, one axial end of the corrugated pipe 4 is hermetically connected with the furnace bottom plate, and the other axial end of the corrugated pipe 4 is hermetically connected with the mounting flange 11, so that a relatively closed mounting space can be defined between the furnace bottom plate, the corrugated pipe 4 and the mounting flange 11, and a part of the crucible shaft 1 is located in the mounting space, so that in the process of moving up and down the crucible shaft 1, sealing of the part of the crucible shaft 1 can be achieved, and influence of impurities and the like on the up and down.

It can be understood that, in the process that the crucible shaft 1 moves up and down, the corrugated pipe 4 can generate a certain acting force on the crucible shaft 1, and at the moment, the adjusting component 3 can be adjusted to offset the acting force applied to the crucible shaft 1 by the corrugated pipe 4, so that the weighing component 2 is ensured to weigh accurately. Meanwhile, when the crucible lifting mechanism 100 is applied to a vacuum environment, the vacuum degree also has a certain influence on the corrugated pipe 4, so that the acting force exerted on the crucible shaft 1 by the corrugated pipe 4 is influenced, the adjusting assembly 3 can be adjusted according to experience to offset the influence, and the weighing accuracy of the weighing assembly 2 is ensured.

Optionally, the corrugated pipe 4 is a metal piece to ensure that the corrugated pipe 4 is reliable in use and can adapt to more application scenarios.

In some embodiments, the connecting member 31 is a bearing steel material member with a hardened and tempered surface and a carburized surface, so that the connecting member 31 can be hardened to bear a large lateral force and reduce the abrasion of the connecting member 31. Because crucible shaft 1 includes this somatic part and rotating part, the rotating part can normal running fit in this somatic part, and the rotating part is used for driving the crucible and rotates around the central axis of crucible shaft 1, and this moment this somatic part is the locking, does not rotate, and connecting piece 31 is the only fixed part of fixed this somatic part and slide 21, can produce rotatory side direction torsion when the rotating part is rotatory for this somatic part has the tendency of rotating, and connecting piece 31 can receive the side direction power this moment, so that guarantee that connecting piece 31 satisfies the user demand.

As shown in fig. 5, the crucible lifting mechanism 100 further includes a rotation driving assembly 8, the crucible shaft 1 includes a body portion and a rotation portion, the rotation portion can be rotatably fitted in the body portion, the adjusting assembly 3 is connected with the body portion and the weighing assembly 2, and the rotation driving assembly 8 is used for driving the rotation portion to rotate around the central axis of the crucible shaft 1, so that when the crucible lifting mechanism 100 is applied to a crystal growth apparatus, the crucible body is soaked by a heating device of the crystal growth apparatus.

For example, in the example of fig. 5, the rotation driving assembly 8 includes a second driver 81 and a v-belt transmission mechanism 82, the second driver 81 is directly or indirectly mounted on the slide carriage assembly 2, the v-belt transmission mechanism 82 includes a second driving pulley 821, a second driven pulley 822 and a v-belt 823, the second driving pulley 821 is connected with the second driver 81 to be driven to rotate by the second driver 81, the second driven pulley 822 is connected with the crucible shaft 1, and the v-belt 823 is tensioned on the second driving pulley 821 and the second driven pulley 822, so that the second driven pulley 822 can drive the crucible shaft 1 to rotate. Therefore, the rotary driving assembly 8 runs stably and has a compact structure.

Wherein, the diameter of the second driving pulley 821 is smaller than that of the second driven pulley 822, and the rotating speed of the second driven pulley 822 is smaller than that of the second driving pulley 821 to realize speed reduction transmission, which is beneficial to ensuring the stability of the crucible rotation.

In some embodiments, as shown in fig. 6, the crucible lifting mechanism 100 further comprises a display assembly 6, the display assembly 6 is connected with the weighing assembly 2 for displaying weighing information, and an operator can obtain the bearing weight on the crucible shaft 1 through the display assembly 6, so as to facilitate the operation of the operator.

For example, in the examples of fig. 3, 4 and 6, the weighing assembly 2 includes a sliding seat 21 and a weighing mechanism 22, the sliding seat 21 is sleeved outside the crucible shaft 1, a first wire passing hole 21a is formed on the sliding seat 21, the first wire passing hole 21a penetrates the sliding seat 21 along the axial direction of the crucible shaft 1, the first wire passing hole 21a and the weighing mechanism 22 are arranged at intervals along the circumferential direction of the crucible shaft 1, the first wire passing hole 21a is arranged adjacent to the weighing mechanism 22, a connecting wire 221 of the weighing mechanism 22 passes through the first wire passing hole 21a, and the connecting wire 221 is connected with the display assembly 6, thereby facilitating the routing arrangement of the connecting wire 221 between the weighing mechanism 22 and the display assembly 6, and simultaneously, since the distance between the first wire passing hole 21a and the weighing mechanism 22 is smaller, the length of the connecting wire 221 can be shortened, the cost can be reduced, and a wire clamp need not be arranged between the first wire passing hole 21a and the weighing, in order to simplify the structure of the crucible lifting mechanism 100, and in a manner that the first wire passing hole 21a extends along the radial direction of the sliding base 21, the first wire passing hole 21a is arranged in a manner that a part of the connecting wire 221 is prevented from being arranged on the outer peripheral wall of the sliding base 21, so that the part of the connecting wire 221 is easily collided with other parts to cause abrasion, the weighing mechanism 22 is effectively prevented from being damaged, and the reliability of connection between the weighing mechanism 22 and the display module 6 is ensured.

Further, in the example of fig. 3, 4 and 6, the weighing mechanism 22 is fixedly connected to the slide carriage 21 by a mounting member 23, the mounting member 23 is formed in a ring-shaped structure, and the weighing mechanism 22 is disposed on a side of the mounting member 23 away from the slide carriage 21, so as to facilitate quick mounting of the weighing mechanism 22 on the slide carriage 21; the second wire passing hole 23a is formed in the mounting part 23, the second wire passing hole 23a is opposite to the first wire passing hole 21a, the second wire passing hole 23a and the weighing mechanism 22 are arranged at intervals along the circumferential direction of the mounting part 23, the connecting wire 221 sequentially passes through the second wire passing hole 23a and the first wire passing hole 21a, and the arrangement of the mounting part 23 does not affect the wiring arrangement of the connecting wire 221.

Alternatively, as shown in fig. 6, the display module 66 includes a data conversion box 61, a CPU62 and a display screen 63, the display screen 63 is electrically connected to the CPU62, the CPU62 is electrically connected to the data conversion box 61, the connection line 221231 is electrically connected to the data conversion box 61 to transmit weighing information to the data conversion box 61, the data conversion box 61 transmits a signal to the CPU62, and through PLC data processing, the CPU62 transmits a signal to the display screen 63 to display a specific numerical value of the load weight, and the operator can directly obtain the weighing information by reading the display information on the display screen 63.

It can be understood that the crucible lifting mechanism 100 may not include the display component 66, and the weighing component 2 may output weighing information in a manner of sound, etc. so that the operator can know the bearing weight on the crucible shaft 1; but is not limited thereto.

Optionally, a wire clamp is arranged at the first wire passing hole 21a and clamps the connecting wire 221 to limit the connecting wire 221, so as to fix the connecting wire 221, and when the weighing assembly 2 moves up and down along with the crucible shaft 1, the weighing mechanism 22 is prevented from being out of work due to the play phenomenon of the weighing mechanism 22, for example, the weighing mechanism 22 is damaged or weighing is inaccurate.

In some embodiments, as shown in fig. 6, the weighing mechanisms 22 are multiple, multiple weighing mechanisms 22 may be arranged at intervals along the circumferential direction of the crucible shaft 1, each weighing mechanism 22 is connected to the display assembly 66, and the display assembly 66 may display the weighing information output by each weighing mechanism 22, so as to realize independent display of the bearing weight weighed by multiple weighing mechanisms 22, so that an operator can obtain the weighing information more intuitively, and the effectiveness of the bearing weight can be judged quickly. In the description of the present application, "a plurality" means two or more.

Of course, the display assembly 66 may also display an average of the bearing weights weighed by the plurality of weighing mechanisms 22 and the final weighed bearing weight.

It can be understood that when the amount of the force applied by the adjusting member 32 to the crucible shaft 1 can be realized by adjusting the connecting member 31, the connecting member 31 can pre-tighten the crucible shaft 1 and the sliding seat 21, and at this time, the adjusting member 32 applies a force to the crucible shaft 1, so that the plurality of weighing mechanisms 22 all output weighing information, and if the weighing information of the plurality of weighing mechanisms 22 is substantially consistent, it indicates that the plurality of weighing mechanisms 22 are stressed equally, and the crucible shaft 1 and the sliding seat 2122 are installed in place.

Alternatively, in the example of fig. 6, three weighing mechanisms 22 are provided, and three weighing mechanisms 22 are uniformly spaced along the circumferential direction of the crucible shaft 1, so that the three weighing mechanisms 22 can be respectively located at three vertexes of a regular triangle, and a smaller number of weighing mechanisms 22 can be adopted, so as to achieve balanced weighing of the bearing weight. Of course, the weighing means 22 can also be two, four or more.

According to the crucible lifting mechanism 100 provided by the embodiment of the invention, as the crucible shaft 1 is connected with the driving assembly, the crucible is filled with solution with larger weight, and a certain torsion force exists on the crucible shaft 1 in the processes of driving the crucible to rotate and lift by the crucible shaft 1, and the torsion force acts on the weighing assembly 2, so that the measuring result of the weighing assembly 2 is inaccurate, and the adjustment assembly 3 is arranged, so that the effect of adjusting the torsion force can be achieved, and meanwhile, the weighing result is accurate.

In addition, the adjusting component 3 is provided with an adjusting piece 32, the adjusting piece 32 is a pressure spring, the pressure spring can be provided with pre-pressure, and when the crucible shaft 1 is in a vacuum state and the corrugated pipe 4 contracts and extends, the pressure spring can counteract the force applied by the vacuum and the corrugated pipe 4, so that the condition that the weighing component 2 and the crucible shaft 1 are unbalanced is avoided. Therefore, when the crucible is continuously added with the silicon material, the weighing component 2 can reflect the weight of the silicon material at the first time, and the position of the silicon liquid level in the crucible is calculated. After the silicon material in the crucible is straightened, the numerical value of the weighing component 2 can return to the original state, and the weighing component 2 has good stability.

The crystal growth apparatus according to the embodiment of the second aspect of the present invention includes a crucible, a crucible elevating mechanism 100. Wherein, the crucible lifting mechanism 100 is the crucible lifting mechanism 100 for the crystal growth apparatus according to the above-mentioned first aspect of the invention, the crucible is mounted at the upper end of the crucible shaft 1, the crucible shaft 1 is movably arranged through the furnace bottom plate of the crystal growth apparatus along the axial direction of the crucible shaft 1, and the crucible shaft 1 is rotatably matched with the furnace bottom plate so as to realize the lifting and rotating of the crucible shaft 1.

According to the crystal growth device provided by the embodiment of the invention, the crucible lifting mechanism 100 is adopted, so that the change of the material liquid level in the crucible body can be conveniently tracked in real time, and the production efficiency can be further improved.

In some embodiments, the crystal growing apparatus is a continuous Czochralski growing apparatus, i.e., an apparatus for producing crystals using a continuous Czochralski process, such as a single crystal furnace for producing single crystal silicon using a continuous Czochralski process.

Other configurations and operations of crystal growth apparatus according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present invention, it is to be understood that the terms "central," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A crucible lifting mechanism (100) for a crystal growing apparatus, the crystal growing apparatus comprising a crucible, the crucible lifting mechanism (100) comprising:

the crucible shaft (1) is suitable for being installed on the crucible shaft (1), and the crucible shaft (1) is used for driving the crucible to move up and down and driving the crucible to rotate around the central axis of the crucible shaft (1);

the weighing component (2) is matched with the crucible shaft (1), and is used for weighing the bearing weight on the crucible shaft (1) and outputting weighing information;

the crucible shaft weighing device comprises an adjusting component (3), wherein the adjusting component (3) is connected with the crucible shaft (1) and the weighing component (2) and is used for adjusting the interaction force of the crucible shaft (1) and the weighing component (2) in the axial direction of the crucible shaft (1).

2. The crucible lifting mechanism (100) for a crystal growth apparatus of claim 1, wherein the weighing assembly (2) comprises:

the sliding seat (21) is sleeved outside the crucible shaft (1), and the adjusting assembly (3) is connected with the sliding seat (21) and the crucible shaft (1);

the weighing mechanism (22) is arranged between the sliding seat (21) and the crucible shaft (1) and is used for weighing the bearing weight on the crucible shaft (1).

3. The crucible lifting mechanism (100) for a crystal growth apparatus of claim 2, wherein the crucible lifting mechanism (100) further comprises:

the lifting driving component (7) is used for driving the crucible shaft (1) to move up and down through the sliding seat (21).

4. The crucible lifting mechanism (100) for a crystal growth apparatus according to claim 2, wherein the crucible shaft (1) is formed with a mounting flange (11), the slide (21) is fitted to the lower side of the mounting flange (11), the weighing mechanism (22) is provided between the slide (21) and the mounting flange (11), and the adjusting assembly (3) is axially disposed along the crucible shaft (1) and connected to the slide (21) and the mounting flange (11).

5. The crucible lifting mechanism (100) for a crystal growth apparatus of any of claims 1-4, wherein the adjustment assembly (3) comprises:

a connecting piece (31), wherein the connecting piece (31) is connected with the crucible shaft (1) and the weighing component (2);

an adjusting piece (32), wherein the adjusting piece (32) is arranged between the connecting piece (31) and one of the crucible shaft (1) and the weighing assembly (2), and constantly drives the one of the crucible shaft (1) and the weighing assembly (2) to move towards the other one of the crucible shaft (1) and the weighing assembly (2);

optionally, the connecting piece (31) is fixedly connected with the other one of the crucible shaft (1) and the weighing assembly (2) and is in sliding fit with the one of the crucible shaft (1) and the weighing assembly (2) along the axial direction of the crucible shaft (1).

6. The crucible lifting mechanism (100) for the crystal growth apparatus according to claim 5, wherein the connecting member (31) is in threaded engagement with the weighing assembly (2), the crucible shaft (1) is formed with a mounting hole (11a) extending in an axial direction of the crucible shaft (1), the connecting member (31) is movably inserted through the mounting hole (11a), the adjusting member (32) is disposed between the crucible shaft (1) and the connecting member (31) and normally drives the crucible shaft (1) to move toward the weighing assembly (2);

optionally, an end of the mounting hole (11a) far away from the weighing assembly (2) is provided with an end cover (33), and the end cover (33) closes the mounting hole (11 a).

7. The crucible lifting mechanism (100) for the crystal growth apparatus according to claim 6, wherein the adjusting member (32) is sleeved outside the connecting member (31), one end of the connecting member (31) far away from the weighing assembly (2) is provided with a stopping protrusion (31a), and the adjusting member (32) is stopped between the stopping protrusion (31a) and the crucible shaft (1);

optionally, the adjusting element (32) is a compression spring.

8. The crucible lifting mechanism (100) for crystal growth equipment of claim 6, characterized in that, be formed with mounting flange (11) on crucible axle (1), mounting hole (11a) is formed on mounting flange (11), weighing component (2) include slide (21) and weighing mechanism (22), slide (21) cover is established crucible axle (1) is outer and the cooperation is in the downside of mounting flange (11), slide (21) with connecting piece (31) screw-thread fit, weighing mechanism (22) is established mounting flange (11) with between slide (21) in the circumference of crucible axle (1), mounting hole (11a) with weighing mechanism (22) interval sets up.

9. The crucible lifting mechanism (100) for a crystal growth apparatus of claim 6,

a linear bearing (34) is arranged in the mounting hole (11a), the connecting piece (31) is movably arranged in the linear bearing (34) in a penetrating way, and the adjusting piece (32) is arranged between the linear bearing (34) and the connecting piece (31); alternatively, the first and second electrodes may be,

a shaft sleeve is arranged in the mounting hole (11a), the connecting piece (31) is movably arranged through the shaft sleeve, and the adjusting piece (32) is arranged between the shaft sleeve and the connecting piece (31);

optionally, when a linear bearing (34) is arranged in the mounting hole (11a), a gasket (35) is arranged between the adjusting piece (32) and the linear bearing (34); when the shaft sleeve is arranged in the mounting hole (11a), a gasket (35) is arranged between the adjusting piece (32) and the shaft sleeve.

10. The crucible lifting mechanism (100) for the crystal growth equipment as claimed in claim 6, wherein the crucible shaft (1) is adapted to be movably arranged on a furnace bottom plate of the crystal growth equipment, a mounting flange (11) is formed on the crucible shaft (1), a corrugated pipe (4) is sleeved outside the crucible shaft (1), and the corrugated pipe (4) is hermetically connected between the furnace bottom plate and the mounting flange (11);

optionally, the corrugated tube (4) is a metal piece.

11. The crucible lifting mechanism (100) for a crystal growth apparatus of claim 5, wherein the connecting member (31) is a bearing steel material member having a surface that is hardened and carburized.

12. The crucible lift mechanism (100) for a crystal growth apparatus of claim 1, further comprising:

the display component (6), the display component (6) with weigh subassembly (2) link to each other and be used for showing the information of weighing.

13. A crystal growth apparatus, comprising:

a crucible;

the crucible lifting mechanism (100), the crucible lifting mechanism (100) is the crucible lifting mechanism (100) for the crystal growth equipment according to any one of claims 1 to 12, the crucible is installed at the upper end of the crucible shaft (1), and the crucible shaft (1) is movably arranged on the furnace bottom plate of the crystal growth equipment along the axial direction of the crucible shaft (1) and is in running fit with the furnace bottom plate.

14. The crystal growth apparatus of claim 13, wherein the crystal growth apparatus is a continuous czochralski growth apparatus.