CN205556849U - A weighing system for single crystal growing furnace - Google Patents
A weighing system for single crystal growing furnace Download PDFInfo
- Publication number
- CN205556849U CN205556849U CN201520789814.8U CN201520789814U CN205556849U CN 205556849 U CN205556849 U CN 205556849U CN 201520789814 U CN201520789814 U CN 201520789814U CN 205556849 U CN205556849 U CN 205556849U
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- China
- Prior art keywords
- elevating mechanism
- crucible
- single crystal
- crystal growing
- growing furnace
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Abstract
The utility model relates to a weighing system for single crystal growing furnace, including crucible, weighing sensor, guide cylinder, translation mechanism and elevating system, weighing sensor install in the guide cylinder, the both sides of crucible respectively are provided with an engaging lug seat, the engaging lug seat on seted up the through -hole, the both sides of crucible respectively are provided with an elevating system, elevating system and engaging lug seat link to each other, translation mechanism and elevating system link to each other. The weight in the quartzy earthenware is measured through a weighing sensor to this design to measure surplus silicon material volume, played the effect of practicing thrift the silicon material.
Description
Technical field
The utility model relates to single crystal growing furnace field, a kind of weighing system for single crystal growing furnace.
Background technology
Single crystal growing furnace is the necessary equipment that polysilicon is converted in monocrystalline silicon technical process, and monocrystalline silicon is photovoltaic
Basic material in generating and semicon industry.Monocrystalline silicon as the critical support material of advanced information society,
Being current one of the most most important monocrystal material, it is not only the main of development computer and integrated circuit
Functional material, is also the photovoltaic generation major function material that utilizes solar energy.
In silicon single crystal pulling process, need to measure the weight of crystal bar, it is simple to calculate excess silicon material in quartz pot
Quality, so needing a set of single crystal furnace weighing device.Existing weighing device, is all to use complicated machine
Tool action realizes, relatively elaborate, and the precision measured is the highest, the phenomenon such as waste easily causing silicon material.
Summary of the invention
The technical problem to be solved is to provide a kind of weighing system for single crystal growing furnace, this dress of weighing
Put and measure the weight in quartz earthenware by a LOAD CELLS, thus measure excess silicon doses, serve
Save the effect of silicon material.
For solving above-mentioned technical problem, structure of the present utility model includes crucible, LOAD CELLS, guiding
Cylinder, translation mechanism and elevating mechanism, described LOAD CELLS is arranged in guide cylinder, the two of described crucible
Side is each provided with one and connects ear mount, and described connection ear mount offers through hole, and the both sides of described crucible are each
Being provided with an elevating mechanism, described elevating mechanism is connected with being connected ear mount, described translation mechanism and liter
Descending mechanism is connected.
It is further: described translation mechanism includes cylinder, U-shaped push pedal, two horizontal rail and two slide blocks,
Two described slide blocks are respectively and movably connected in two horizontal rail, and described cylinder is connected with U-shaped push pedal,
The two ends of described U-shaped push pedal are connected on two slide blocks, and described elevating mechanism is connected on slide block.
Further: vertical rail that described elevating mechanism includes being arranged on slide block, lift cart, liter
Fall plate and locating dowel, the size of described locating dowel matches with being connected the size of through hole in ear mount, described liter
Fall dolly is slidably connected on vertical rail, and described lifter plate level is fixedly connected on lift cart, institute
The locating dowel stated is arranged on lifter plate.
After using said structure, the utility model measures the weight in quartz earthenware by a LOAD CELLS,
Thus measure excess silicon doses, serve the effect saving silicon material；And the design also have simple in construction,
The easily fabricated advantage with practicality and high efficiency.
Accompanying drawing explanation
With detailed description of the invention, the utility model is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of elevating mechanism.
Detailed description of the invention
A kind of weighing system for single crystal growing furnace as shown in Figure 1, including crucible 3, LOAD CELLS 10,
Guide cylinder 9, translation mechanism and elevating mechanism, described LOAD CELLS 10 is arranged in guide cylinder 9, institute
The both sides stating crucible 3 are each provided with a connection ear mount 6, described connection ear mount 6 offer through hole, institute
The both sides stating crucible 3 are each provided with an elevating mechanism, and described elevating mechanism is connected with being connected ear mount 6,
Described translation mechanism is connected with elevating mechanism.During work, after prepared by a collection of crystal bar, start translation
Mechanism is transported to the surface of guide cylinder 9 inner load cell 10 crucible 3, then starts elevating mechanism and makes
It to decline with crucible 3, makes crucible 3 drop on LOAD CELLS 10 along guide cylinder 9, works as crucible
After 3 drop on LOAD CELLS 10, continue to start elevating mechanism and make elevating mechanism separate with crucible 3,
The excess silicon doses in crucible 3 is measured now by LOAD CELLS 10.Reverse starting after measuring
Elevating mechanism makes crucible 3 rise from from guide cylinder 9, finally starts translation mechanism and crucible 3 is transmitted back in situ.
Translation mechanism as shown in Figure 1 includes cylinder 6,4, two horizontal rail 1 of U-shaped push pedal and two cunnings
Block 2, two described slide blocks 2 are respectively and movably connected in two horizontal rail 1, described cylinder 6 and U
Type push pedal 4 is connected, and the two ends of described U-shaped push pedal 4 are connected on two slide blocks 2, described lifting
Mechanism is connected on slide block 2.During work, start cylinder 6 and make it 6 push U-shaped push pedal 4 and carry out level shifting
Dynamic, two slide blocks 2 can carry out water with crucible 3 along two horizontal rail under the effect of U-shaped push pedal 4
Translation is dynamic, thus crucible 3 is transported to the surface of LOAD CELLS 10.The design have simple in construction,
The easily fabricated advantage with practicality and high efficiency.
Vertical rail 13 that elevating mechanism as shown in Figure 2 includes being arranged on slide block 2, lift cart 13,
Lifter plate 15 and locating dowel 8, the size of described locating dowel 8 matches with being connected the size of through hole in ear mount 6,
Described lift cart 13 is slidably connected on vertical rail 13, and described lifter plate 15 level is fixing to be connected
On lift cart 1, described locating dowel 8 is arranged on lifter plate 15.When crucible is transported to weighing and sensing
During the surface of device 10, start lift cart 13 and be passed to lifter plate 15 and move downward with crucible 3,
Crucible 3 is transported on LOAD CELLS 10, then proceedes to start lift cart 13 and make and be connected ear mount 6
It is separated, now utilizes LOAD CELLS 10 to remaining silicon doses in measuring crucible 3.After measuring
Direction starts lift cart 1 to be made lifter plate 15 and is connected ear mount and 6 contacts, thus utilizes lifter plate 15
Crucible 3 rises from from guide cylinder 9.The design is prevented by the design of through hole in locating dowel 8 and connection ear mount 6
Only crucible 3 drops during transport, thus serves the effect reducing unnecessary loss.
Claims (3)
1. the weighing system for single crystal growing furnace, it is characterised in that: include crucible (3), weighing and sensing
Device (10), guide cylinder (9), translation mechanism and elevating mechanism, described LOAD CELLS (10) is installed
In guide cylinder (9), the both sides of described crucible (3) are each provided with one and connect ear mount (6), described company
Offering through hole on lug seat (6), the both sides of described crucible (3) are each provided with an elevating mechanism, institute
The elevating mechanism stated is connected with being connected ear mount (6), and described translation mechanism is connected with elevating mechanism.
A kind of weighing system for single crystal growing furnace the most according to claim 1, it is characterised in that: institute
The translation mechanism stated includes cylinder (6), U-shaped push pedal (4), two horizontal rail (1) and two cunnings
Block (2), two described slide blocks are respectively and movably connected on two horizontal rail (1), described gas
Cylinder (6) is connected with U-shaped push pedal (4), and the two ends of described U-shaped push pedal (4) are connected to two
On slide block (2), described elevating mechanism is connected on slide block (2).
3. a kind of weighing system for single crystal growing furnace stated according to claim 2, it is characterised in that: described
Elevating mechanism include being arranged on slide block (2) vertical rail (13), lift cart (13), rise
Fall plate (15) and locating dowel (8), the size of described locating dowel (8) goes up through hole with being connected ear mount (6)
Size matches, and described lift cart (13) is slidably connected on vertical rail (13), described
Lifter plate (15) level is fixedly connected on lift cart (1), and described locating dowel (8) is arranged on liter
In fall plate (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520789814.8U CN205556849U (en) | 2015-10-13 | 2015-10-13 | A weighing system for single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520789814.8U CN205556849U (en) | 2015-10-13 | 2015-10-13 | A weighing system for single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205556849U true CN205556849U (en) | 2016-09-07 |
Family
ID=56822410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520789814.8U Active CN205556849U (en) | 2015-10-13 | 2015-10-13 | A weighing system for single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205556849U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884054A (en) * | 2017-10-24 | 2018-04-06 | 南京泰祺瑞新材料科技有限公司 | A kind of novel weighing system |
| CN112831830A (en) * | 2020-12-31 | 2021-05-25 | 徐州晶睿半导体装备科技有限公司 | Crucible lifting mechanism for crystal growth equipment and crystal growth equipment |
-
2015
- 2015-10-13 CN CN201520789814.8U patent/CN205556849U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884054A (en) * | 2017-10-24 | 2018-04-06 | 南京泰祺瑞新材料科技有限公司 | A kind of novel weighing system |
| CN112831830A (en) * | 2020-12-31 | 2021-05-25 | 徐州晶睿半导体装备科技有限公司 | Crucible lifting mechanism for crystal growth equipment and crystal growth equipment |
| CN112831830B (en) * | 2020-12-31 | 2022-05-10 | 徐州晶睿半导体装备科技有限公司 | Crucible lifting mechanism for crystal growth equipment and crystal growth equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |