CN208701249U - A kind of single crystal growing furnace weighing device - Google Patents
A kind of single crystal growing furnace weighing device Download PDFInfo
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- CN208701249U CN208701249U CN201821187461.4U CN201821187461U CN208701249U CN 208701249 U CN208701249 U CN 208701249U CN 201821187461 U CN201821187461 U CN 201821187461U CN 208701249 U CN208701249 U CN 208701249U
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- seed crystal
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- weighing device
- pulley
- growing furnace
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Abstract
The utility model discloses a kind of single crystal growing furnace weighing devices, including weigh assembly, weigh assembly includes the pillar for claiming to be symmetrically mounted on seed crystal cavity hatch side, lower rod end is from top to bottom disposed with weighing sensor, bracket component, lower rod end is fixed on seed crystal cavity, upper end mounting plate；Weighing sensor upper end is connected and fixed plate, lower end connecting bracket component；Pulley is installed on bracket component, seed crystal rope is set on pulley, seed crystal rope is protruded into the seed crystal cavity by being open.In single crystal growing furnace operation process, using weighing device, the simplification of operation is effectively raised, reduces labor intensity and cost, thoroughly solves the phenomenon that boule wt that former technical operation generates is unable to accurate judgement, crystal bar high production cost；Specifically, in crystal bar pulling process, the weight that crystal bar is drawn can be determined by weighing device, to calculate the weight of remaining silicon material in silica crucible, improve the efficiency of crystal pulling, crystal bar is reduced and draw cost.
Description
Technical field
The utility model relates to single crystal growing furnaces, and in particular to a kind of single crystal growing furnace weighing device.
Background technique
Single crystal growing furnace is the necessary equipment that polysilicon is converted into monocrystalline silicon technical process, and monocrystalline silicon be photovoltaic power generation and
Basic material in semicon industry.Critical support material of the monocrystalline silicon as advanced information society is most heavy in the world at present
One of monocrystal material wanted, it is not only to develop computer and the major function material and photovoltaic power generation of integrated circuit utilize
The major function material of solar energy.
General single crystal growing furnace all without weighing device, can not accurately judge the remaining situation of silicon material in silica crucible, hold
Easily cause phenomena such as silicon material surplus in the bottom of a pan is big, silicon material wastes, crystal pulling is at high cost in silica crucible.
Summary of the invention
In view of the above technical problems, the utility model provides a kind of single crystal growing furnace weighing device, in single crystal growing furnace operation
Cheng Zhong effectively raises the simplification of operation using weighing device, reduces labor intensity and cost, thoroughly solves former skill
The phenomenon that boule wt that art operation generates is unable to accurate judgement, crystal bar high production cost；Specifically, in crystal bar pulling process
In, the weight that crystal bar is drawn can be determined by weighing device, to calculate the weight of remaining silicon material in silica crucible, improved
The efficiency of crystal pulling reduces crystal bar and draws cost.
In order to solve the above technical problems, the technical solution that the utility model uses is: a kind of single crystal growing furnace weighing dress
Set, including weigh assembly, weigh assembly includes claiming to be symmetrically mounted on the pillar of seed crystal cavity hatch side, lower rod end by up to
Under be disposed with weighing sensor, bracket component, lower rod end is fixed on seed crystal cavity, upper end mounting plate；Weighing
Sensor upper end is connected and fixed plate, lower end connecting bracket component；Pulley is installed on bracket component, seed crystal rope is set on pulley,
Seed crystal rope is protruded into the seed crystal cavity by being open, and the end for covering on the weighing device is additionally provided on seed crystal cavity
Lid seals cooperation between the end cap and seed crystal cavity.
Bracket component includes the bracket being fixedly connected with weighing sensor and fixed installation as a preferred embodiment of the above solution,
Connecting plate on the bracket has interval between connecting plate and the bracket, be spaced interior setting pulley.
It as a preferred embodiment of the above solution, further include pin shaft, pin shaft one end is fixedly connected with bracket, and the other end and connecting plate are solid
Fixed connection, and the axis direction of the pin shaft is horizontal, is arranged on the pin shaft by big bearing, big bearing inner race is fixed on pin shaft
On outer wall, outer ring is fixedly connected with the pulley internal ring wall.
It is also fixedly installed on bracket as a preferred embodiment of the above solution, for preventing seed crystal rope by the gear that falls off on pulley
Plate.
Fixed plate is equipped with stepped throughhole as a preferred embodiment of the above solution, which includes upper hole, lower section
Hole, upper section bore dia are greater than lower section bore dia, bearing are arranged in upper hole, and lock shaft is fixedly connected after passing through bearing, lower hole
Weighing sensor.
The beneficial effects of the utility model are:, using weighing device, effectively raising work in single crystal growing furnace operation process
The simplification of industry reduces labor intensity and cost, thoroughly solve the boule wt that former technical operation generates be unable to accurate judgement,
The phenomenon that crystal bar high production cost；
Weighing device reduces time and labor intensity that artificial crystal bar is drawn, improves the accuracy of control；
Weighing device realizes the accuracy of crystal bar measuring and calculating using weighing sensor, reduces the factors pair such as flavoring food surplus
The influence of cost, meanwhile, because of its less investment, convenient for promoting.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of weighing device；
Fig. 3 is Fig. 2 right view；
Fig. 4 is Fig. 2 top view.
Specific embodiment
Below with reference to embodiment, specific embodiment of the present utility model is further described.
As shown in Figs 1-4, a kind of single crystal growing furnace weighing device, including weigh assembly, weigh assembly include claiming to be symmetrically installed
In the pillar 3 of 1 open side of seed crystal cavity, lower rod end is from top to bottom disposed with weighing sensor 10, bracket component, branch
Column lower end is fixed on seed crystal cavity, upper end mounting plate 11；Weighing sensor upper end is connected and fixed plate, lower end connecting bracket
Component；Pulley 7 is installed on bracket component, seed crystal rope is set on pulley, seed crystal rope is protruded into the seed crystal cavity by being open.
Bracket component includes the connecting plate 9 of the bracket being fixedly connected with weighing sensor and fixed installation on the bracket, connection
There is interval between plate and the bracket, be spaced interior setting pulley.It further include pin shaft 5, pin shaft one end is fixedly connected with bracket 4,
The other end is fixedly connected with connecting plate 9, and the axis direction of the pin shaft is horizontal, is arranged by big bearing 6, greatly on the pin shaft
Bearing inner race is fixed on pin shaft outer wall, and outer ring is fixedly connected with the pulley internal ring wall.It is also fixedly installed with and is used on bracket
Prevent seed crystal rope by the baffle 8 that falls off on pulley.Fixed plate be equipped with stepped throughhole, the stepped throughhole include upper hole,
Lower hole, upper section bore dia are greater than lower section bore dia, bearing 13 are arranged in upper hole, after lock shaft 12 passes through bearing, lower hole
It is fixedly connected with weighing sensor.
Be additionally provided with the end cap 2 for covering on the weighing device on seed crystal cavity, the end cap and seed crystal cavity it
Between seal cooperation, to provide vacuum protection for weighing device.
Seed crystal rope is installed during crystal pulling, on pulley, suspension crystal bar has downward pulling force to pulley on seed crystal rope, so that
Together by downward pulling force, signal is fed back to PLC, passes through program pulley driving bracket by the effect of weighing sensor under tension
It calculates, can accurately know the weight for hanging crystal bar on seed crystal rope.
In the above scheme, pulley is a fixed pulley.
For those skilled in the art, technical solution documented by foregoing embodiments can still be repaired
Change or equivalent replacement of some of the technical features, it is within the spirit and principle of the utility model, made any
Modification, equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of single crystal growing furnace weighing device, which is characterized in that including weigh assembly, weigh assembly includes claiming to be symmetrically mounted on seed
The pillar of brilliant cavity hatch side, lower rod end are from top to bottom disposed with weighing sensor, bracket component, and lower rod end is solid
It is scheduled on seed crystal cavity, upper end mounting plate；Weighing sensor upper end is connected and fixed plate, lower end connecting bracket component；Bracket
Pulley is installed on component, seed crystal rope is set on pulley, and seed crystal rope is protruded into the seed crystal cavity by being open, on seed crystal cavity
It is additionally provided with the end cap for covering on the weighing device, cooperation is sealed between the end cap and seed crystal cavity.
2. single crystal growing furnace weighing device as described in claim 1, which is characterized in that bracket component includes solid with weighing sensor
Surely the connecting plate of the bracket and fixed installation connected on the bracket, has interval between connecting plate and the bracket,
Every interior setting pulley.
3. single crystal growing furnace weighing device as claimed in claim 2, which is characterized in that further include pin shaft, pin shaft one end and bracket
It is fixedly connected, the other end is fixedly connected with connecting plate, and the axis direction of the pin shaft is horizontal, is arranged on the pin shaft by big
Bearing, big bearing inner race are fixed on pin shaft outer wall, and outer ring is fixedly connected with the pulley internal ring wall.
4. single crystal growing furnace weighing device as claimed in claim 2, which is characterized in that be also fixedly installed on bracket for preventing
Seed crystal rope is by the baffle that falls off on pulley.
5. single crystal growing furnace weighing device as described in claim 1, which is characterized in that fixed plate is equipped with stepped throughhole, should
Stepped throughhole includes upper hole, lower hole, and upper section bore dia is greater than lower section bore dia, bearing, lock shaft is arranged in upper hole
Weighing sensor is fixedly connected with after bearing, lower hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821187461.4U CN208701249U (en) | 2018-07-25 | 2018-07-25 | A kind of single crystal growing furnace weighing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821187461.4U CN208701249U (en) | 2018-07-25 | 2018-07-25 | A kind of single crystal growing furnace weighing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208701249U true CN208701249U (en) | 2019-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821187461.4U Active CN208701249U (en) | 2018-07-25 | 2018-07-25 | A kind of single crystal growing furnace weighing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112080795A (en) * | 2020-09-16 | 2020-12-15 | 浙江晶阳机电股份有限公司 | Crystal bar falling prevention operation method and crystal growth furnace with crystal bar falling prevention clamping device |
| CN116183004A (en) * | 2023-02-21 | 2023-05-30 | 连城凯克斯科技有限公司 | Real-time measuring device for material weight in crucible of single crystal furnace |
| CN116497437A (en) * | 2023-06-25 | 2023-07-28 | 通威微电子有限公司 | Silicon carbide growth device, growth method and silicon carbide crystal |
-
2018
- 2018-07-25 CN CN201821187461.4U patent/CN208701249U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112080795A (en) * | 2020-09-16 | 2020-12-15 | 浙江晶阳机电股份有限公司 | Crystal bar falling prevention operation method and crystal growth furnace with crystal bar falling prevention clamping device |
| CN116183004A (en) * | 2023-02-21 | 2023-05-30 | 连城凯克斯科技有限公司 | Real-time measuring device for material weight in crucible of single crystal furnace |
| CN116497437A (en) * | 2023-06-25 | 2023-07-28 | 通威微电子有限公司 | Silicon carbide growth device, growth method and silicon carbide crystal |
| CN116497437B (en) * | 2023-06-25 | 2023-08-18 | 通威微电子有限公司 | Silicon carbide growth device and growth method |
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Address after: 314000 Building No. 72 Baolu, Dingqiao Town, Haining City, Jiaxing City, Zhejiang Province Patentee after: Zhejiang Jingyang electromechanical Co., Ltd Address before: 314000 Building No. 72 Baolu, Dingqiao Town, Haining City, Jiaxing City, Zhejiang Province Patentee before: ZHEJIANG JINGYANG MECHANICAL & ELECTRICAL Co.,Ltd. |