CN116169088A - Stripping clamp, stripping machine and application method of stripping clamp - Google Patents
Stripping clamp, stripping machine and application method of stripping clamp Download PDFInfo
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- CN116169088A CN116169088A CN202310115793.0A CN202310115793A CN116169088A CN 116169088 A CN116169088 A CN 116169088A CN 202310115793 A CN202310115793 A CN 202310115793A CN 116169088 A CN116169088 A CN 116169088A
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- bearing plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/82—Recycling of waste of electrical or electronic equipment [WEEE]
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a stripping clamp, which relates to the technical field of stripping processes and comprises a bearing plate and a clamping mechanism, wherein the bearing plate is used for placing a sample to be clamped; the clamping mechanism comprises a plurality of clamping assemblies, the clamping assemblies are all located on the bearing plate, the positions of the clamping assemblies on the bearing plate can be adjusted, and the clamping assemblies are used for clamping samples with different shapes. Based on the technical scheme of the invention, the stripping machine can be compatible with the irregular silicon wafer, the condition that the irregular silicon wafer can only be stripped manually is avoided, and the damage to the sample caused by manual operation of operators can be reduced.
Description
Technical Field
The invention relates to the technical field of stripping processes, in particular to a stripping clamp, a stripping machine and a using method of the stripping clamp.
Background
The stripping process is a common method in the semiconductor preparation process, after a silicon wafer sample to be processed passes through a pattern required by photoresist photoetching, the required pattern is reserved through exposure and development, then a metal coating is carried out on the photoresist, and finally a stripping machine is used for removing the photoresist and the unnecessary metal coating outside the pattern together, so that only the required pattern is reserved.
When the stripping machine is used for stripping the metal coating, the matched clamp sample tray is required to be fixed on the rotatable main shaft of the stripping machine main body, the inner hexagon and the matched screw are used for fixing firmly, then the silicon wafer sample to be stripped is placed in the center of the clamp, the main shaft and the clamp fixed on the main shaft are driven by the motor to rotate, the spray liquid for cleaning and spraying is sprayed from the special spray gun and uniformly sprayed on the surface of the sample in the rotating process of the silicon wafer sample, and the metal layer required to be removed on the surface of the sample can be removed to the greatest extent under the double functions of the centrifugal force of the rotation of the main shaft and the spraying liquid spraying, and only the part of the useful center required to be reserved is reserved, so that the stripping purpose is achieved.
The existing clamp sample tray adopts a positioning pin with a fixed position and a position which can not be changed at will on the design of the positioning pin, so that the clamp sample tray can only fix standard round silicon wafer samples, but in actual process operation, samples to be stripped are not only limited to standard circles, but also have sectors, rectangles and other shapes, and the samples cannot be stripped by using the existing clamp sample tray, so that the stripping machine cannot be used for stripping, and the manual stripping can be performed only by a manual operation mode of an operator, thereby increasing the damage of the samples caused by the errors of the operator, and the consistency of the silicon wafer samples processed by different operators is different, so that the whole process is not facilitated. In addition, the prior patent discloses the following technology:
the invention discloses a chip stripping mechanism, a stripping machine and a stripping method, which comprise a telescopic manipulator for clamping and positioning a bearing film provided with a chip and an adsorption device, wherein the publication number of the telescopic manipulator is CN 114188264B; after the chip to be stripped moves to the upper part of the adsorption device, the adsorption device adsorbs the chip to be stripped on the bearing film after generating negative pressure, and then the telescopic manipulator is displaced towards the reverse direction of the suction of the adsorption device to strip the chip from the bearing film. The chip and the UV film are stripped rapidly and conveniently, not only is the stripping unnecessary, but also the damage rate of the chip during stripping can be reduced, the stripping efficiency is high, and the cost is saved. The device is clamped by an adsorption mode.
Although the above patent also cannot well clamp silicon wafer samples with different shapes in an adsorption type fixing mode, the adsorption points cover part of the silicon wafer samples, so that the stripping effect is poor, the silicon wafer samples with larger weight cannot be fixed, and the clamping stability is poor.
Disclosure of Invention
The purpose of the invention is that: the invention provides a stripping clamp, a stripping machine and a using method of the stripping clamp, aiming at solving the technical problems that the existing stripping machine clamping device cannot clamp samples with different shapes, has poor clamping stability and has poor stripping effect.
The technical scheme provided by the invention for realizing the purpose is as follows:
the invention provides a stripping clamp which comprises a bearing plate and a clamping mechanism, wherein the bearing plate is used for placing a sample to be clamped; the clamping mechanism comprises a plurality of clamping assemblies, the clamping assemblies are all located on the bearing plate, the positions of the clamping assemblies on the bearing plate can be adjusted, and the clamping assemblies are used for clamping samples with different shapes.
In one embodiment, the stripping machine further comprises a mounting mechanism fixedly arranged on one side surface of the bearing plate, and the mounting mechanism is used for detachably mounting the bearing plate on the main shaft of the stripping machine.
In one embodiment, the mounting mechanism comprises a bracket fixedly arranged on one side of the bearing plate, and a mounting hole is arranged on the bracket and used for connecting the bracket to the main shaft of the stripping machine.
Specifically, taking a bracket arm as an example of a cross-shaped mounting frame, the orthogonal part of the cross-shaped mounting frame is designed into a disc shape, and the four tail ends of the cross-shaped mounting frame are provided with connecting columns fixedly connected with a bearing plate; the mounting hole quantity is two at least, and all mounting holes all set up on the disc of cross "mounting bracket quadrature department.
In one embodiment, a plurality of strip-shaped mounting grooves are formed in the bearing plate, the number of the clamping assemblies is the same as that of the strip-shaped mounting grooves, and the clamping assemblies are matched with the strip-shaped mounting grooves in a one-to-one correspondence mode.
Specifically, as each strip-shaped mounting groove can be provided with a corresponding clamping component, each clamping component can adjust the position along the corresponding strip-shaped mounting groove, and the positions of the clamping components are mutually independent and adjusted without interference, the structure is convenient for clamping samples with regular or irregular shapes.
In one embodiment, each clamping assembly includes a positioning portion and a locking portion; the positioning part comprises a positioning column, one end of the positioning column is provided with a tightening part, and the other end of the positioning column is provided with a part of stud; the locking part comprises a locking nut, the stud of the positioning column passes through the corresponding strip-shaped mounting groove to be matched with the locking nut, and the locking nut and the bracket are positioned on the same side of the bearing plate.
Specifically, lock nut and bracket all set up in the back of loading board, and location portion is located the front of loading board, and the front of loading board is used for placing the sample, and location portion is used for the centre gripping sample edge.
In one embodiment, the locking nut is a square nut, the bearing plate is provided with guide limit grooves for preventing the square nut from rotating, the number of the guide limit grooves is the same as that of the strip-shaped mounting grooves and corresponds to that of the strip-shaped mounting grooves one by one, and the guide limit grooves and the mounting mechanisms are positioned on the same side of the bearing plate; the guide limit groove is consistent with the trend of the corresponding strip-shaped mounting groove, and the width of the guide limit groove is larger than that of the corresponding strip-shaped mounting groove.
Specifically, the opening of each strip-shaped mounting groove on the back surface of the bearing plate is provided with a guide limit groove with the width larger than that of the strip-shaped mounting groove, the width of the guide limit groove is matched with that of the square nut, and the square nut is in sliding clamping connection in the corresponding guide limit groove during assembly, so that the square nut can only slide in the guide limit groove and cannot slide in the guide limit groove; if the guiding limit groove is not formed, when an operator rotates the positioning part, the square nut can rotate along with the positioning part, so that the positioning part cannot be locked, and at the moment, the square nut must be manually fixed to prevent the square nut from rotating; so the setting of direction spacing groove prevents effectively that square nut from rotating when screwing up the location portion, and operating personnel only need one hand rotate the location portion, need not go fixed square nut for screw up location portion convenient and fast more, location portion can select in this embodiment.
In one embodiment, the positioning part is an external thread positioning pin, the positioning column is a pin shaft of the external thread positioning pin, part of the stud is a bottom thread column positioned at the pin shaft, and the tightening part is an inner hexagonal hole arranged at the top of the pin shaft.
Specifically, in this embodiment, the positioning portion is an external thread positioning pin, the partial stud is a bottom thread column of the external thread positioning pin, the tightening portion is an internal hexagonal hole arranged at the top of the external thread positioning pin, the internal hexagonal hole is convenient for subsequent tightening of the external thread positioning pin, and the external thread positioning pin is used for clamping the edge of the sample after being fixed. The positioning portion may have another structure capable of realizing the above-described function.
In one embodiment, the bearing plate is disc-shaped, the center of the bearing plate is provided with a lightening hole, a plurality of strip-shaped mounting grooves are uniformly distributed on the bearing plate along the circumference of the center of the bearing plate, and each strip-shaped mounting groove extends along the radial direction of the bearing plate.
In particular, this construction facilitates installation and positioning. Taking the number of the strip-shaped mounting grooves as 8 as an example, the 8 strip-shaped mounting grooves are uniformly distributed along the circumference of the center of the bearing plate, and each strip-shaped mounting groove extends along the radial direction, namely the length direction of each strip-shaped mounting groove is the radial direction of the circumference. Because each bar mounting groove can install a corresponding clamping assembly, can install 8 clamping assemblies of orientation altogether, and 8 clamping assemblies all can be along the bar mounting groove adjustment radial position that corresponds respectively, mutually independent adjustment mutually noninterfere, this kind of structure is convenient for centre gripping shape rule or irregular sample. The lightening holes are independent from the strip-shaped mounting grooves and do not cross.
The invention also provides a stripping machine comprising the stripping clamp.
The invention also provides a using method of the stripping clamp, which comprises the following steps:
s1, fixing a stripping clamp on a main shaft of a stripping machine;
s2, moving all the external thread locating pins to the outermost sides of the corresponding strip-shaped mounting grooves;
s3, placing the sample to be cleaned in the center of the bearing plate.
S4, moving each external thread locating pin to a position 0.5-1 mm away from the edge of the sample according to the shape of the sample;
s5, fastening the sample on the bearing plate by using an internal hexagonal screwing or manual screwing external thread locating pin;
s6, starting a stripping procedure of a stripper to strip the metal coating on the surface of the sample.
The above-described features may be combined in various suitable ways or replaced by equivalent features as long as the object of the present invention can be achieved.
Compared with the prior art, the stripping clamp, the stripping machine and the using method of the stripping clamp have the following beneficial effects:
according to the stripping clamp, the stripping machine and the application method of the stripping clamp, the stripping machine can be compatible with an irregular silicon wafer, the situation that the irregular silicon wafer can only be stripped manually is avoided, and the damage to a sample caused by manual operation of an operator can be reduced. The invention uses the clamping component capable of adjusting the position, so that the stripping clamp can fix various irregularly-shaped silicon wafers, thereby ensuring that the irregularly-shaped silicon wafers to be stripped can meet the use requirement of the stripping machine. The edge of this stripping clamp centre gripping sample can not shelter from the sample surface, has increased the effect of peeling off, and the silicon chip sample of great weight can be fixed in the edge centre gripping, increases the centre gripping stability.
Drawings
The invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings. Wherein:
FIG. 1 is a schematic view of a stripping fixture according to the present invention;
FIG. 2 is a schematic view of the structure of FIG. 1 from another perspective;
fig. 3 is a schematic view of the structure of fig. 1 in an operating state.
In the drawings, like parts are designated with like reference numerals. The figures are not to scale.
Reference numerals:
10. a carrying plate; 11. a strip-shaped mounting groove; 12. a guide limit groove; 13. a lightening hole; 20. a clamping mechanism; 21. a positioning part; 22. a locking part; 30. a mounting mechanism; 31. a bracket arm; 32. a mounting hole; 40. and (3) a sample.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
The embodiment of the invention provides a stripping clamp, which comprises a bearing plate 10 and a clamping mechanism 20, wherein the bearing plate 10 is used for placing a sample 40 to be clamped; the clamping mechanism 20 comprises a plurality of clamping assemblies, the clamping assemblies are all located on the bearing plate 10 and can adjust the positions of the clamping assemblies on the bearing plate 10, and the clamping assemblies are used for clamping samples 40 with different shapes.
In one embodiment, the stripping machine further comprises a mounting mechanism 30, wherein the mounting mechanism 30 is fixedly arranged on one side surface of the bearing plate 10, and the mounting mechanism 30 is used for detachably mounting the bearing plate 10 on a main shaft of the stripping machine.
In one embodiment, the mounting mechanism 30 includes a bracket arm 31, the bracket arm 31 is fixedly disposed on one side of the carrier plate 10, and a mounting hole 32 is disposed on the bracket arm 31, and the mounting hole 32 is used to connect the bracket arm 31 to the spindle of the stripping machine.
Specifically, taking the bracket arm 31 as an example of a cross-shaped mounting frame, the orthogonal part of the cross-shaped mounting frame is designed into a disc shape, and the four tail ends of the cross-shaped mounting frame are all provided with connecting columns fixedly connected with the bearing plate 10; the number of mounting holes 32 is at least two, and all mounting holes 32 are arranged on the disc at the orthogonal position of the cross-shaped mounting frame.
In one embodiment, a plurality of strip-shaped mounting grooves 11 are formed in the bearing plate 10, the number of clamping assemblies is the same as that of the strip-shaped mounting grooves 11, and the clamping assemblies are in one-to-one correspondence with the strip-shaped mounting grooves 11.
Specifically, since each bar-shaped mounting groove 11 is capable of mounting a corresponding clamping assembly, each clamping assembly can be adjusted in position along the respective bar-shaped mounting groove 11, and each clamping assembly is mutually independent in adjusting position and does not interfere with each other, the structure facilitates clamping samples 40 having regular or irregular shapes.
In one embodiment, each clamping assembly includes a positioning portion 21 and a locking portion 22; the positioning part 21 comprises a positioning column, one end of the positioning column is provided with a tightening part, and the other end of the positioning column is provided with a part of stud; the locking portion 22 includes a locking nut, and the stud of the positioning post passes through the corresponding bar-shaped mounting groove 11 to be matched with the locking nut, and the locking nut and the bracket arm 31 are located on the same side of the carrier plate 10.
Specifically, the lock nut and the bracket arm 31 are both disposed on the back of the carrier plate 10, the positioning portion 21 is located on the front of the carrier plate 10, the front of the carrier plate 10 is used for placing the sample 40, and the positioning portion 21 is used for clamping the edge of the sample 40.
In one embodiment, the lock nut is a square nut, the bearing plate 10 is provided with guiding limit grooves 12 for preventing the square nut from rotating, the number of the guiding limit grooves 12 is the same as that of the strip-shaped mounting grooves 11 and corresponds to one, and the guiding limit grooves 12 and the mounting mechanisms 30 are positioned on the same side of the bearing plate 10; the guiding and limiting groove 12 is consistent with the trend of the corresponding strip-shaped mounting groove 11, and the width of the guiding and limiting groove 12 is larger than the width of the corresponding strip-shaped mounting groove 11.
Specifically, the openings of each strip-shaped mounting groove 11 on the back surface of the bearing plate 10 are provided with guide limit grooves 12 with the width larger than that of the strip-shaped mounting groove 11, the width of each guide limit groove 12 is matched with that of each square nut, and when the square nut is assembled, the square nuts are slidably clamped in the corresponding guide limit grooves 12, so that the square nuts can only slide in the guide limit grooves 12 and cannot slide in the guide limit grooves 12; if the guiding and limiting groove is not formed, when an operator rotates the positioning part 21, the square nut can rotate along with the positioning part 21, so that the positioning part 21 cannot be locked, and at the moment, the square nut must be manually fixed to prevent the square nut from rotating; so the setting of the guiding and limiting groove 12 effectively prevents the square nut from rotating when the positioning part 21 is screwed, the operator only needs to rotate the positioning part 21 by one hand, and the square nut does not need to be fixed, so that the positioning part 21 can be screwed more conveniently and rapidly, and the positioning part 21 can be selected in the embodiment.
In one embodiment, the positioning portion 21 is an external thread positioning pin, the positioning column is a pin shaft of the external thread positioning pin, part of the stud is a thread column positioned at the bottom of the pin shaft, and the tightening portion is an internal hexagonal hole arranged at the top of the pin shaft.
Specifically, in this embodiment, the positioning portion 21 is taken as an external thread positioning pin as an example, a part of the stud is a bottom thread column of the external thread positioning pin, the tightening portion is an internal hexagonal hole arranged at the top of the external thread positioning pin, the internal hexagonal hole is convenient for subsequent tightening of the external thread positioning pin, and the external thread positioning pin is used for clamping the edge of the sample 40 after being fixed. The positioning portion 21 may have another structure capable of realizing the above-described function.
In one embodiment, the bearing plate 10 is disc-shaped, the center of the bearing plate 10 is provided with a lightening hole 13, a plurality of strip-shaped mounting grooves 11 are uniformly distributed on the bearing plate 10 along the circumference of the center of the bearing plate 10, and each strip-shaped mounting groove 11 extends along the radial direction of the bearing plate 10.
In particular, this construction facilitates installation and positioning. Taking the number of the strip-shaped mounting grooves 11 as 8 as an example, the 8 strip-shaped mounting grooves 11 are uniformly distributed along the circumference of the center of the bearing plate 10, and each strip-shaped mounting groove 11 extends along the radial direction, that is, the length direction of each strip-shaped mounting groove 11 is the radial direction of the circumference. Because each bar-shaped mounting groove 11 can be provided with a corresponding clamping assembly, a total of 8 clamping assemblies can be provided, and the radial positions of the 8 clamping assemblies can be adjusted along the bar-shaped mounting grooves 11 corresponding to each other, and the radial positions can be adjusted independently without interference, so that the structure is convenient for clamping samples 40 with regular or irregular shapes. The lightening holes are independent of the strip-shaped mounting grooves 11 and do not intersect.
The embodiment of the invention provides a stripping machine, which comprises the stripping clamp.
The embodiment of the invention provides a use method of a stripping clamp, which comprises the following steps:
s1, fixing a stripping clamp on a main shaft of a stripping machine;
s2, moving all external thread locating pins to the outermost sides of the corresponding strip-shaped mounting grooves 11;
and S3, placing the sample 40 to be cleaned in the center of the bearing plate 10.
S4, moving each external thread locating pin to a position 0.5-1 mm away from the edge of the sample 40 according to the shape of the sample 40;
s5, fastening the sample 40 on the bearing plate 10 by using an internal hexagonal screwing or manual screwing external thread locating pin;
s6, starting a stripping procedure of a stripper to strip the metal coating on the surface of the sample 40.
In addition to the traditional manual stripping method, the irregular silicon wafer can be stripped by using an ultrasonic cleaning method.
In the description of the present invention, it should be understood that the terms "upper," "lower," "bottom," "top," "front," "rear," "inner," "outer," "left," "right," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present invention.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that the different dependent claims and the features described herein may be combined in ways other than as described in the original claims. It is also to be understood that features described in connection with separate embodiments may be used in other described embodiments.
Claims (10)
1. A peeling clamp, comprising:
a carrying plate for placing a sample to be clamped; and
the clamping mechanism comprises a plurality of clamping assemblies, the clamping assemblies are all positioned on the bearing plate, the positions of the clamping assemblies on the bearing plate can be adjusted, and the clamping assemblies are used for clamping samples with different shapes.
2. The stripping jig of claim 1 further comprising a mounting mechanism fixedly disposed on a side of the carrier plate, the mounting mechanism for removably mounting the carrier plate on a spindle of a stripper.
3. The stripping jig of claim 2, wherein the mounting mechanism comprises a bracket fixedly disposed on one side of the carrier plate, the bracket having mounting holes disposed thereon for connecting the bracket to the stripper spindle.
4. The stripping fixture as claimed in claim 3, wherein a plurality of strip-shaped mounting grooves are formed in the bearing plate, the number of the clamping assemblies is the same as that of the strip-shaped mounting grooves, and the clamping assemblies are in one-to-one corresponding fit with the strip-shaped mounting grooves.
5. A peeling clamp according to claim 3, wherein each of the clamping assemblies comprises:
the positioning part comprises a positioning column, one end of the positioning column is provided with a tightening part, and the other end of the positioning column is provided with a part of stud; and
the locking part comprises a locking nut, the stud of the positioning column passes through the corresponding strip-shaped mounting groove to be matched with the locking nut, and the locking nut and the supporting arm are positioned on the same side of the bearing plate.
6. The stripping fixture of claim 5, wherein the lock nut is a square nut, the bearing plate is provided with guide limit grooves for preventing the square nut from rotating, the number of the guide limit grooves is the same as that of the strip-shaped mounting grooves, the guide limit grooves and the mounting mechanisms are positioned on the same side of the bearing plate; the guide limit groove is consistent with the trend of the corresponding strip-shaped mounting groove, and the width of the guide limit groove is larger than that of the corresponding strip-shaped mounting groove.
7. The stripping fixture of claim 5, wherein said locating portion is an externally threaded locating pin, said locating post is a pin shaft of an externally threaded locating pin, said portion of said stud is a bottom threaded post located on said pin shaft, and said tightening portion is an internal hexagonal hole disposed on top of said pin shaft.
8. The stripping jig according to any one of claims 4-7, wherein the bearing plate is disc-shaped, the bearing plate center is provided with a lightening hole, a plurality of strip-shaped mounting grooves are uniformly distributed on the bearing plate along the circumference of the bearing plate center, and each strip-shaped mounting groove extends along the radial direction of the bearing plate.
9. A peeling machine comprising the peeling jig according to any one of claims 1 to 8.
10. A method of using the peel clamp of claim 8, comprising the steps of:
s1, fixing the stripping clamp on a main shaft of the stripping machine;
s2, moving all the external thread locating pins to correspond to the outermost sides of the strip-shaped mounting grooves;
s3, placing a sample to be cleaned in the center of the bearing plate;
s4, moving each external thread locating pin to a position 0.5-1 mm away from the edge of the sample according to the shape of the sample;
s5, screwing the external thread locating pin by using an internal hexagon or manually screwing the external thread locating pin to fasten the sample on the bearing plate
Applying;
s6, starting a stripping procedure of a stripper to strip the metal coating on the surface of the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310115793.0A CN116169088B (en) | 2023-02-08 | 2023-02-08 | Stripping clamp, stripping machine and application method of stripping clamp |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310115793.0A CN116169088B (en) | 2023-02-08 | 2023-02-08 | Stripping clamp, stripping machine and application method of stripping clamp |
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| CN116169088A true CN116169088A (en) | 2023-05-26 |
| CN116169088B CN116169088B (en) | 2023-08-18 |
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Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4990051A (en) * | 1987-09-28 | 1991-02-05 | Kulicke And Soffa Industries, Inc. | Pre-peel die ejector apparatus |
| JP2004165582A (en) * | 2002-09-17 | 2004-06-10 | Nikon Corp | Method for manufacturing substrate holder, substrate tray, stage equipment and substrate holder |
| JP2010016080A (en) * | 2008-07-02 | 2010-01-21 | Hitachi Kokusai Electric Inc | Substrate holding fixture attaching jig and semiconductor manufacturing equipment |
| JP2010272650A (en) * | 2009-05-20 | 2010-12-02 | Daisho Denshi Co Ltd | Substrate holding and carrying jig, substrate pressing member, pressing member removal jig, metal mask plate, carrying method of printed wiring substrate, method of manufacturing wiring substrate with electronic component, substrate carrying device |
| CN201852779U (en) * | 2010-03-23 | 2011-06-01 | 深圳市华测检测技术股份有限公司 | Clad laminate high-temperature peel strength testing machine |
| CN105118897A (en) * | 2015-09-18 | 2015-12-02 | 英利能源（中国）有限公司 | Stripper and stripping system for photovoltaic assembly backboard |
| JP2016190698A (en) * | 2015-03-31 | 2016-11-10 | 株式会社Ｓｃｒｅｅｎホールディングス | Peeling device |
| US20180128782A1 (en) * | 2016-11-04 | 2018-05-10 | Sonix, Inc. | Adjustable fixture for scanning acoustic microscopy |
| EP3482259A1 (en) * | 2016-07-06 | 2019-05-15 | ASML Netherlands B.V. | A substrate holder and a method of manufacturing a substrate holder |
| CN110422415A (en) * | 2019-07-04 | 2019-11-08 | 宁波市鄞州特尔斐电子有限公司 | A kind of support plate conveying line device of integrated circuit Coating-removing machine |
| CN110422416A (en) * | 2019-07-04 | 2019-11-08 | 宁波市鄞州特尔斐电子有限公司 | A kind of integrated circuit and its dyestripping method and dyestripping plate-laying equipment |
| CN111508868A (en) * | 2019-01-31 | 2020-08-07 | 三菱电机株式会社 | Method and jig for separating semiconductor substrate |
| CN112054095A (en) * | 2020-09-15 | 2020-12-08 | 北京智创芯源科技有限公司 | Infrared detector mounting device, mounting method, manufacturing system and manufacturing method |
| CN214641098U (en) * | 2021-04-22 | 2021-11-09 | 宁波奇峰标识科技有限公司 | Clamp capable of performing laser cutting on fonts with different shapes |
| CN113808987A (en) * | 2020-06-15 | 2021-12-17 | 贤昇科技股份有限公司 | Transfer apparatus and method of transferring work |
| CN114188264A (en) * | 2022-02-15 | 2022-03-15 | 合肥矽迈微电子科技有限公司 | Chip stripping mechanism, stripping machine and stripping method |
| CN114200795A (en) * | 2021-12-08 | 2022-03-18 | 江苏晋誉达半导体股份有限公司 | Soaking type degumming stripping machine |
-
2023
- 2023-02-08 CN CN202310115793.0A patent/CN116169088B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4990051A (en) * | 1987-09-28 | 1991-02-05 | Kulicke And Soffa Industries, Inc. | Pre-peel die ejector apparatus |
| JP2004165582A (en) * | 2002-09-17 | 2004-06-10 | Nikon Corp | Method for manufacturing substrate holder, substrate tray, stage equipment and substrate holder |
| JP2010016080A (en) * | 2008-07-02 | 2010-01-21 | Hitachi Kokusai Electric Inc | Substrate holding fixture attaching jig and semiconductor manufacturing equipment |
| JP2010272650A (en) * | 2009-05-20 | 2010-12-02 | Daisho Denshi Co Ltd | Substrate holding and carrying jig, substrate pressing member, pressing member removal jig, metal mask plate, carrying method of printed wiring substrate, method of manufacturing wiring substrate with electronic component, substrate carrying device |
| CN201852779U (en) * | 2010-03-23 | 2011-06-01 | 深圳市华测检测技术股份有限公司 | Clad laminate high-temperature peel strength testing machine |
| JP2016190698A (en) * | 2015-03-31 | 2016-11-10 | 株式会社Ｓｃｒｅｅｎホールディングス | Peeling device |
| CN105118897A (en) * | 2015-09-18 | 2015-12-02 | 英利能源（中国）有限公司 | Stripper and stripping system for photovoltaic assembly backboard |
| EP3482259A1 (en) * | 2016-07-06 | 2019-05-15 | ASML Netherlands B.V. | A substrate holder and a method of manufacturing a substrate holder |
| US20180128782A1 (en) * | 2016-11-04 | 2018-05-10 | Sonix, Inc. | Adjustable fixture for scanning acoustic microscopy |
| CN111508868A (en) * | 2019-01-31 | 2020-08-07 | 三菱电机株式会社 | Method and jig for separating semiconductor substrate |
| CN110422415A (en) * | 2019-07-04 | 2019-11-08 | 宁波市鄞州特尔斐电子有限公司 | A kind of support plate conveying line device of integrated circuit Coating-removing machine |
| CN110422416A (en) * | 2019-07-04 | 2019-11-08 | 宁波市鄞州特尔斐电子有限公司 | A kind of integrated circuit and its dyestripping method and dyestripping plate-laying equipment |
| CN113808987A (en) * | 2020-06-15 | 2021-12-17 | 贤昇科技股份有限公司 | Transfer apparatus and method of transferring work |
| CN112054095A (en) * | 2020-09-15 | 2020-12-08 | 北京智创芯源科技有限公司 | Infrared detector mounting device, mounting method, manufacturing system and manufacturing method |
| CN214641098U (en) * | 2021-04-22 | 2021-11-09 | 宁波奇峰标识科技有限公司 | Clamp capable of performing laser cutting on fonts with different shapes |
| CN114200795A (en) * | 2021-12-08 | 2022-03-18 | 江苏晋誉达半导体股份有限公司 | Soaking type degumming stripping machine |
| CN114188264A (en) * | 2022-02-15 | 2022-03-15 | 合肥矽迈微电子科技有限公司 | Chip stripping mechanism, stripping machine and stripping method |
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