CN116162894A - Mask plate and manufacturing method thereof - Google Patents
Mask plate and manufacturing method thereof Download PDFInfo
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- CN116162894A CN116162894A CN202310183758.2A CN202310183758A CN116162894A CN 116162894 A CN116162894 A CN 116162894A CN 202310183758 A CN202310183758 A CN 202310183758A CN 116162894 A CN116162894 A CN 116162894A
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- metal frame
- hollowed
- adhesive
- frame
- out areas
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 184
- 239000002184 metal Substances 0.000 claims abstract description 184
- 239000000853 adhesive Substances 0.000 claims abstract description 120
- 230000001070 adhesive effect Effects 0.000 claims abstract description 120
- 239000000463 material Substances 0.000 claims abstract description 76
- 238000000034 method Methods 0.000 claims abstract description 29
- 239000012790 adhesive layer Substances 0.000 claims description 19
- 238000003466 welding Methods 0.000 claims description 18
- 239000003822 epoxy resin Substances 0.000 claims description 15
- 229920000647 polyepoxide Polymers 0.000 claims description 15
- 239000010410 layer Substances 0.000 claims description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 8
- 229910052738 indium Inorganic materials 0.000 claims description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 8
- 238000007788 roughening Methods 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 239000004841 bisphenol A epoxy resin Substances 0.000 claims 1
- 238000001704 evaporation Methods 0.000 abstract description 57
- 230000008020 evaporation Effects 0.000 abstract description 56
- 238000004140 cleaning Methods 0.000 abstract description 19
- 230000008569 process Effects 0.000 abstract description 12
- 238000007740 vapor deposition Methods 0.000 description 32
- 239000011248 coating agent Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 11
- 230000009286 beneficial effect Effects 0.000 description 10
- 238000009834 vaporization Methods 0.000 description 9
- 230000008016 vaporization Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000007747 plating Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000005498 polishing Methods 0.000 description 1
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- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention provides a mask and a manufacturing method thereof. The mask plate comprises: the metal frame body is provided with a plurality of first hollowed-out areas; the adhesive frame is arranged on one side of the metal frame body, the adhesive frame is provided with a plurality of second hollowed-out areas, and orthographic projection of the second hollowed-out areas on the metal frame body covers the first hollowed-out areas. Therefore, the adhesive frame is arranged on one side of the metal frame main body, so that the adhesiveness of the evaporation surface of the mask plate can be improved, the adhesive strength of the evaporation material attached to the surface of the adhesive frame and the adhesive frame is high in the evaporation process by using the mask plate, the evaporation material is not easy to fall off, the cleaning frequency of the mask plate is reduced, the number of standby mask plates is reduced, the product yield is improved, and the production operation cost is reduced.
Description
Technical Field
The invention relates to the technical field of display, in particular to a mask plate and a manufacturing method thereof.
Background
OLED devices (organic light emitting display devices) have advantages of short response time, large viewing angle, high contrast ratio, light weight, low power consumption, etc., and are considered as the most potential flat panel display devices and are considered as the display technologies most likely to be fabricated into flexible display devices.
At present, a plurality of film structures in the OLED are formed by adopting a mask evaporation mode, but the existing mask has the technical problems of poor binding force with evaporation materials and the like.
Therefore, the current mask and the manufacturing method thereof still need to be improved.
Disclosure of Invention
The present invention has been made based on the findings and knowledge of the inventors regarding the following facts and problems:
common layer material in OLED display screen mainly evaporates through the mask plate and evaporates on to the glass substrate, and the material can adhere to in the coating by vaporization in-process mask plate bottom, after adhering to a certain amount of coating by vaporization material, need replace and wash the mask plate, otherwise the coating by vaporization material that adheres to mask plate bottom can drop into the coating by vaporization machine to pollute the coating by vaporization environment, influence product yield. In addition, the evaporation material needs a specific solvent (such as NMP (N-methyl pyrrolidone), HC (cyclopentanone) and the like) and is provided with corresponding cleaning equipment to clean, so that the mask plate of the public layer has high cleaning cost and long cleaning period. In order to ensure that the production continues to be carried out stably in the mask cleaning process, a certain amount of masks are needed to be replaced and used, the mask manufacturing cost is high, and when more masks are reserved, the mass production of products is not facilitated. In order to solve at least one of the technical problems in the related art to a certain extent, the inventor finds through a great amount of experiments that an adhesive glue layer can be arranged on the evaporation surface of the mask, so that the bonding strength of the evaporation material and the evaporation surface of the mask is improved, the problem that the evaporation material falls off to pollute the evaporation environment is avoided to at least a certain extent, and the number of standby mask plates can be reduced; the adhesive layer can be further formed on the surface of the adhesive frame, so that the bonding strength of the evaporation material and the evaporation surface is further improved.
In view of this, in one aspect of the present invention, a mask is provided. According to an embodiment of the present invention, the reticle includes: the metal frame body is provided with a plurality of first hollowed-out areas; the adhesive frame is arranged on one side of the metal frame body, the adhesive frame is provided with a plurality of second hollowed-out areas, and orthographic projection of the second hollowed-out areas on the metal frame body covers the first hollowed-out areas. Therefore, the adhesive frame is arranged on one side of the metal frame main body, so that the adhesiveness of the evaporation surface of the mask plate can be improved, the adhesive strength of the evaporation material attached to the surface of the adhesive frame and the adhesive frame is high in the evaporation process by using the mask plate, the evaporation material is not easy to fall off, the cleaning frequency of the mask plate is reduced, the number of standby mask plates is reduced, the product yield is improved, and the production operation cost is reduced.
According to the embodiment of the invention, the orthographic projection of the second hollowed-out area on the metal frame main body is basically coincident with the first hollowed-out area. Therefore, the non-hollowed-out areas of the steaming surface of the mask plate have good viscosity, and the usability of the mask plate is improved.
According to an embodiment of the present invention, the reticle further includes: and the adhesive layer is arranged on at least part of the surface of the adhesive frame away from the metal frame main body. Therefore, the adhesive layer is arranged on the adhesive frame, so that the adhesiveness of the non-hollowed-out area of the evaporation surface of the mask plate can be further improved, the adhesive strength of the evaporation material and the evaporation surface of the mask plate is further improved, the evaporation material is not easy to fall off, and the cleaning frequency of the mask plate is further reduced.
According to an embodiment of the present invention, the metal frame body includes: the first metal frame is provided with a third hollowed-out area; the second metal frame is arranged between the first metal frame and the adhesive frame, the second metal frame is provided with a plurality of first hollowed-out areas, and the third hollowed-out areas cover the orthographic projection of the plurality of first hollowed-out areas on the first metal frame. Therefore, the first metal frame can be used as a metal mother frame, and the second metal frame plays a role of a shielding strip.
According to an embodiment of the present invention, the material of the first metal frame includes at least one of stainless steel and indium steel; and/or the material of the second metal frame comprises at least one of stainless steel and indium steel. Therefore, the first metal frame and/or the second metal frame have high strength, and good stability can be maintained in the evaporation process.
According to an embodiment of the invention, the reticle satisfies at least one of the following conditions: the adhesive frame is made of epoxy resin; the adhesive frame is detachable; the surface of the adhesive frame far away from the metal frame main body is provided with a plurality of bulges; the roughness of the surface of the adhesive frame is greater than the roughness of the surface of the metal frame body; the roughness of the surface of the adhesive frame far away from the metal frame body is larger than that of the surface of the adhesive frame near the metal frame body; the shape of the plurality of first hollowed-out areas comprises at least one of a circle, an ellipse, a rectangle, a diamond, a pentagon and a hexagon; the shape of the second hollowed-out area is the same as the shape of the first hollowed-out area corresponding to the second hollowed-out area. Therefore, the usability of the mask plate is further improved.
According to an embodiment of the present invention, the epoxy resin includes bisphenol a type epoxy resin; and/or the epoxy resin contains hydroxyl groups and ether linkages. Therefore, the adhesion of the adhesive frame under the high vacuum condition is further improved, and the bonding strength of the vapor deposition material and the adhesive frame is further improved.
According to an embodiment of the invention, the metal frame body comprises a joint provided with laser welding spots and/or threaded holes. Therefore, the metal frame main body can be firmly combined with the adhesive frame through laser welding and/or threaded connection, and the mask plate can keep good structural stability in the use process; the metal frame body and the adhesive frame are combined by the method, and the adhesive frame is detachable.
In another aspect of the present invention, a method of making the above-described reticle is provided. The method for manufacturing the mask plate comprises the following steps: forming a metal frame body, wherein the metal frame body is provided with a plurality of first hollowed-out areas; an adhesive frame is arranged on one side of the metal frame body, the adhesive frame is provided with a plurality of second hollowed-out areas, and orthographic projection of the second hollowed-out areas on the metal frame body covers the first hollowed-out areas. Therefore, the mask plate manufactured by the method has all the characteristics and advantages of the mask plate, and the description is omitted.
According to an embodiment of the present invention, forming the metal frame body includes: providing a first metal frame, wherein the first metal frame is provided with a third hollowed-out area; providing a second metal frame, wherein the second metal frame is provided with a plurality of first hollowed-out areas; fixing the second metal frame on one side of the first metal frame through laser welding and/or threaded connection, so that the third hollowed-out area covers orthographic projection of a plurality of first hollowed-out areas on the first metal frame; after the second metal frame is fixed on one side of the first metal frame, the adhesive frame is fixed on one side of the second metal frame away from the first metal frame through laser welding and/or threaded connection. Therefore, the mask plate can be manufactured by the method, and the method has simple steps and easy operation, and is beneficial to improving the yield of manufacturing the mask plate.
According to an embodiment of the present invention, the method for manufacturing a mask plate described above may further include: and carrying out roughening treatment on one side surface of the adhesive frame, wherein the roughened surface is far away from the metal frame main body. Therefore, the contact area between the roughened surface and the evaporation material is further increased, which is beneficial to improving the bonding strength between the evaporation material and the mask plate plating surface.
According to an embodiment of the present invention, the method for manufacturing the mask plate further includes: a glue layer is formed on at least a portion of a surface of the adhesive frame remote from the metal frame body. Therefore, the adhesiveness of the mask plate plating surface can be further improved by forming an adhesive layer on the adhesive frame, so that the bonding strength of the vapor deposition material and the mask plate plating surface is further improved.
Drawings
FIG. 1 shows a schematic diagram of a reticle according to one embodiment of the invention;
FIG. 2 shows a cross-sectional view of the reticle of FIG. 1 along line AA';
FIG. 3 is a schematic diagram of a mask according to another embodiment of the present invention;
FIG. 4 is a schematic diagram of a mask according to another embodiment of the present invention;
FIG. 5 is a schematic diagram showing the shedding of vapor deposition material in the related art;
FIG. 6 is a schematic diagram of a reticle according to yet another embodiment of the invention;
FIG. 7 shows a cross-sectional view of the reticle of FIG. 6 along BB';
FIG. 8 is a schematic diagram of a mask according to another embodiment of the present invention;
FIG. 9 shows a cross-sectional view of the reticle of FIG. 8 along CC';
FIG. 10 is a schematic diagram of a reticle according to yet another embodiment of the invention;
FIG. 11 is a schematic diagram of a reticle according to yet another embodiment of the invention;
FIG. 12 is a flow chart of a method of making a reticle in accordance with one embodiment of the invention;
FIG. 13 is a flow chart of a method of making a reticle in accordance with another embodiment of the invention;
FIG. 14 is a flowchart of a method for making a reticle according to yet another embodiment of the invention;
FIG. 15 is a flowchart of a method for making a reticle according to yet another embodiment of the invention;
fig. 16 is a flowchart illustrating a method of fabricating a reticle according to yet another embodiment of the invention.
Reference numerals illustrate:
100: a metal frame body; 101: a first threaded hole; 102: a first hollowed-out area; 110: a first metal frame; 111: a third hollowed-out area; 120: a second metal frame; 121: a third threaded hole; 200: an adhesive frame; 210: the second hollowed-out area; 220: a second threaded hole; 230: a protrusion; 300: a glue layer; 1: a vapor deposition source; 2: a metal mask; 3: evaporating a material; 4: a substrate.
Detailed Description
Embodiments of the present invention are described in detail below. The following examples are illustrative only and are not to be construed as limiting the invention. The examples are not to be construed as limiting the specific techniques or conditions described in the literature in this field or as per the specifications of the product.
In one aspect of the present invention, a mask is provided. Referring to fig. 1 to 4, a mask may include a metal frame body 100 and an adhesive frame 200, wherein the metal frame body 100 has a plurality of first hollowed-out areas 102, the adhesive frame 200 is disposed on one side of the metal frame body 100, the adhesive frame 200 has a plurality of second hollowed-out areas 210, and an orthographic projection of the second hollowed-out areas 210 on the metal frame body 100 covers the first hollowed-out areas 102. When the mask plate is used for evaporation, the side provided with the adhesive frame is placed towards the evaporation source, the adhesive frame has good viscosity, the bonding strength of the evaporation material and the mask plate can be improved, the evaporation material is not easy to fall off, the problems that the evaporation material falls off to pollute an evaporation chamber and the like are avoided at least to a certain extent, the cleanliness of the evaporation chamber is improved, and the yield of products is improved; in addition, the bonding strength of the evaporation material and the mask is higher, so that the cleaning and replacement frequency of the mask is reduced, the number of standby masks is reduced, and the production cost and the operation cost of the display device are reduced.
Referring to fig. 5, a vapor deposition source 1 vapor-deposits a vapor deposition material on a substrate 4 through a hollowed-out portion of a metal mask 2, and a portion of the vapor deposition material adheres to a vapor deposition surface of the metal mask 2, in the related art, the vapor deposition surface of the metal mask 2 is made of smooth and flat metal material, the adhesion of the vapor deposition material 3 is poor, and when a certain amount of the substrate 4 (for example, a glass substrate) is vapor-deposited, the vapor deposition material 3 falls off, and the vapor deposition chamber is contaminated by the fallen vapor deposition material, so that the mask needs to be replaced periodically. In addition, the evaporation thicknesses of different public layers (such as an anode, an electron transmission layer, a hole blocking layer, an electron blocking layer, a hole transmission layer and the like) are inconsistent, and the material adhesion also has certain difference, so that the replacement periods of different evaporation chamber masks are different, the number of needed standby masks is large, the manufacturing cost of the public layer masks is high, the investment cost is high due to the fact that a large number of standby masks are large, and the profit difficulty is increased; in addition, the replaced common layer mask plate needs to be sent to specific cleaning equipment and is provided with corresponding solvents (such as NMP, HC and the like), and the defects of high investment cost, long cleaning period and the like of the cleaning equipment, the solvents and the like exist, so that the production cost and the operation cost of the display device can be further improved. In the mask plate of the invention, the adhesive frame 200 is arranged on one side of the metal frame main body 100, and in the use process, the vapor deposition material can be firmly adhered to the vapor deposition surface of the mask plate, and the vapor deposition material adhered to the vapor deposition surface of the mask plate is not easy to fall off, so that pollution to a vapor deposition cavity can be avoided at least to a certain extent, and the improvement of the yield of products is facilitated; and moreover, the use efficiency of the mask plate can be greatly improved, the cleaning frequency of the mask plate is reduced, the cost of equipment and solvents for cleaning the mask plate is reduced, and the number of standby mask plates can be reduced, so that the production cost and the operation cost of a display device are reduced.
It should be noted that, the orthographic projection of the second hollow area 210 on the metal frame body 100 covers the first hollow area 102, which may include the following two cases: according to some embodiments of the present invention, referring to fig. 3, the size of the second hollowed-out area 210 may be larger than that of the first hollowed-out area 102, and the adhesive frame 200 may cover a part of the surface of the metal frame body 100, so that the adhesion strength between the evaporation surface of the mask and the evaporation material may be improved to a certain extent, so that the evaporation material is not easy to fall off. According to further embodiments of the present invention, referring to fig. 1, 2 (fig. 2 is a cross-sectional view of the mask along AA' in fig. 1) and fig. 4, the front projection of the second hollowed-out area 210 on the metal frame body 100 is substantially coincident with the first hollowed-out area 102, that is, the dimensions of the second hollowed-out area 210 and the dimensions of the first hollowed-out area 102 are substantially coincident, wherein substantially coincident or substantially coincident means that it is difficult to ensure that the front projection of the second hollowed-out area 210 on the metal frame body 100 and the first hollowed-out area 102 are completely coincident during the manufacturing process.
According to an embodiment of the present invention, the shapes of the plurality of first hollowed-out areas 102 may include at least one of a circle (as shown in fig. 4), an ellipse, a rectangle (as shown in fig. 1), a diamond, a pentagon, a hexagon, etc., and thus, the mask may be suitable for manufacturing common layers with different shapes of the display panel. It should be noted that the shapes of the plurality of first hollow areas 102 may be the same or different, and those skilled in the art may set and adjust according to actual needs. Of course, those skilled in the art may set the first hollowed-out area 102 to have other regular shapes or special shapes according to actual needs.
According to the embodiment of the invention, the shape of the second hollowed-out area 210 is the same as the shape of the first hollowed-out area 102 corresponding to the second hollowed-out area 210, so that the matching degree of the second hollowed-out area and the first hollowed-out area is improved, the overlapping degree of the second hollowed-out area and the first hollowed-out area corresponding to the second hollowed-out area is higher, and the overall performance of the mask plate is improved further.
According to some embodiments of the present invention, referring to fig. 1, 3 and 4, a first screw hole 101 may be provided on the metal frame body 100 to fix the reticle in the evaporation chamber by screwing. Of course, those skilled in the art may also fix the mask in the evaporation chamber in other manners according to the specific situation.
Referring to fig. 6 and 7, fig. 7 is a cross-sectional view of the mask of fig. 6 along BB', the metal frame body 100 may include a first metal frame 110 and a second metal frame 120, wherein the first metal frame 110 has a third hollowed-out area 111, the second metal frame 120 is disposed between the first metal frame 110 and the adhesive frame 200, the second metal frame 120 has a plurality of first hollowed-out areas 102, and the third hollowed-out area 111 covers an orthographic projection of the plurality of first hollowed-out areas 102 on the first metal frame 110. Therefore, the first metal frame is used as a metal mother frame, the second metal frame can play a role of a shielding strip, the second metal frame is fixed on one side of the first metal frame, and then the adhesive frame is fixed on one side, far away from the first metal frame, of the second metal frame, so that a mask with excellent performance can be formed.
According to some embodiments of the present invention, the material of the first metal frame 110 may include at least one of stainless steel and indium steel, for example, the first metal frame 110 may be made of stainless steel (specifically, 304 stainless steel) or indium steel, so that the first metal frame has higher strength and better corrosion resistance, which is beneficial to further improving the service performance of the mask, and is beneficial to prolonging the service life of the mask.
According to some embodiments of the present invention, the material of the second metal frame 120 may include at least one of stainless steel and indium steel, etc., for example, the second metal frame 120 may be composed of stainless steel or indium steel. Therefore, the second metal frame has higher strength and good corrosion resistance, thereby being beneficial to further improving the overall performance of the mask.
According to some embodiments of the present invention, the metal frame body 100 may include a connection portion provided with laser welding points and/or screw holes, and thus, the metal frame body may be firmly combined with the adhesive frame through laser welding and/or screw connection, which is advantageous for improving the overall stability of the mask. According to some embodiments of the invention, the connection of the metal frame bodies may be provided with only threaded holes or laser welding spots. According to other embodiments of the present invention, the connection portion of the metal frame body may be provided with both a screw hole and a laser welding spot, so that the adhesive frame may be fixed to one side of the metal frame body by laser welding and screw connection, thereby being advantageous to further improve the overall stability of the mask.
Referring to fig. 8-10, wherein fig. 9 is a cross-sectional view of the reticle of fig. 8 along CC', the reticle may further include an adhesive layer 300, the adhesive layer 300 being disposed on at least a portion of a surface of the adhesive frame 200 remote from the metal frame body 100, according to some embodiments of the present invention. Therefore, the adhesiveness of the mask plate plating surface can be further improved by forming an adhesive layer on the adhesive frame, so that the bonding strength of the vapor deposition material and the adhesive frame is further improved. The specific material of the adhesive layer 200 is not particularly limited in the present invention, and a person skilled in the art can select and adjust the adhesive layer according to the actual situation, so long as the adhesive layer 200 has better viscosity and high temperature resistance.
According to the embodiment of the invention, the material of the adhesive frame 200 may include epoxy resin (EP), so that the adhesive frame may have better adhesion, which is beneficial to improving the bonding strength of the vapor deposition material and the adhesive frame, so that the vapor deposition material attached to the vapor deposition surface of the mask plate is not easy to fall off; in addition, the adhesive frame has good electrical insulation performance, high temperature resistance (the working temperature can reach 100 ℃) and high vacuum resistance, and is beneficial to further improving the overall stability of the mask plate in the use process. According to some embodiments of the present invention, the epoxy resin may include a bisphenol a type epoxy resin, wherein the bisphenol a type epoxy resin contains hydroxyl groups and ether bonds, which is beneficial to further improving the bonding strength between the evaporation material and the adhesive frame. According to other embodiments of the present invention, the epoxy resin may contain hydroxyl groups and ether linkages, thereby facilitating the improvement of the adhesive strength of the adhesive frame to the vapor deposition material.
According to some embodiments of the present invention, the material of the adhesive frame 200 may be bisphenol a EP, and the molecular structure of the bisphenol a EP contains hydroxyl and ether bond, so that the adhesion force of the adhesive frame to various common vacuum materials is relatively high, and the adhesion strength of the evaporation material and the adhesive frame can be improved; in addition, the adhesive frame formed by the material has excellent mechanical strength, is favorable for improving the structural stability of the mask, and is high-temperature resistant and high-vacuum resistant, thereby being favorable for further improving the stability of the mask in the use process.
According to some embodiments of the present invention, the adhesive frame 200 is detachable, so that the adhesive frame can be detached and replaced according to evaporation conditions, thereby ensuring cleanliness of the mask, reducing cleaning frequency of the mask, and greatly reducing production and operation costs; the adhesive frame has detachability, after a certain number of glass substrates are evaporated, the mask can be taken out to be replaced by a clean adhesive frame, compared with the process of cleaning the metal mask, the process saves time and cost, compared with the process of cleaning the metal mask, the process has the advantages that the investment cost of cleaning equipment and the investment cost of cleaning solvent (cleaning liquid medicine) can be reduced, the realization of product profit is facilitated, and the cyclic utilization rate of the mask is higher; in addition, after evaporation is finished, more evaporation materials are adhered to the adhesive frame, and the evaporation materials can be recovered, purified and reused by some technical means, so that the production cost and the operation cost are further reduced; the adhesive frame can be repeatedly used by cleaning and re-smearing adhesive, so that the production and operation cost is further reduced.
According to some embodiments of the present invention, the roughness of the surface of the adhesive frame 200 may be greater than the roughness of the surface of the metal frame body 100, and thus, the adhesive frame has a relatively rough surface, which is advantageous for increasing the surface area of the deposition surface of the reticle, thereby increasing the contact area of the deposition material with the adhesive frame, and thus, increasing the bonding force of the deposition material with the adhesive frame.
According to some embodiments of the present invention, the roughness of the surface of the adhesive frame 200 away from the metal frame body 100 may be greater than the roughness of the surface of the adhesive frame 200 close to the metal frame body 100, thereby advantageously increasing the contact area of the adhesive frame with the evaporation material, and thus advantageously increasing the bonding strength of the evaporation material with the adhesive frame.
According to some embodiments of the present invention, referring to fig. 10, the surface of the adhesive frame 200, which is far from the metal frame body 100, may have a plurality of protrusions 230, and thus, the contact area of the evaporation material and the adhesive frame may be increased, thereby being beneficial to further improving the bonding strength of the evaporation material and the adhesive frame, and making the evaporation material attached to the adhesive frame less prone to falling off.
According to some embodiments of the present invention, referring to fig. 10, when the adhesive frame 200 has a plurality of protrusions 230 at a surface far from the metal frame body 100, the adhesive layer 300 may also have a concave-convex structure, thereby increasing a contact area of the adhesive layer with the evaporation material, thereby further improving a bonding strength of the evaporation material with the adhesive frame.
According to some embodiments of the present invention, referring to fig. 11, the adhesive frame 200 may be provided with a second screw hole 220, so that the adhesive frame may be fastened to one side of the metal frame body by means of screw connection, which is advantageous for improving the overall stability of the mask.
In another aspect of the present invention, a method of making the above-described reticle is provided. According to some embodiments of the present invention, referring to fig. 12, a method of fabricating the reticle described above may include the steps of:
s100: a metal frame body is formed.
In this step, a metal frame body 100 is formed, and the metal frame body 100 has a plurality of first hollowed-out areas 102. The shape of the first hollow area is described in detail above, and will not be described herein.
According to some embodiments of the present invention, referring to fig. 13 to 16, forming the metal frame body may include the steps of:
s110: a first metal frame is provided.
In this step, a first metal frame 110 is provided, wherein the first metal frame 110 has a third hollowed-out area 111. According to some embodiments of the present invention, referring to fig. 13 to 16, the third hollowed-out area 111 may have a rectangular shape. Of course, the third hollow area may be in other shapes, and those skilled in the art may set and select the third hollow area according to actual situations. The material of the first metal frame has been described above, and will not be described herein. The size of the first metal frame may be designed according to the size of the vapor deposition machine generation line, and is not particularly limited in the present invention.
S120: a second metal frame is provided.
In this step, a second metal frame 120 is provided, wherein the second metal frame 120 has a plurality of first hollowed-out areas 102. The material of the second metal frame, the shape of the first hollow area, etc. are described in detail above, and will not be described here again. In addition, it should be noted that the specific shape of the second metal frame may be designed according to the actual product requirement, which is not specifically limited in the present invention.
S130: the second metal frame is fixed to one side of the first metal frame by laser welding and/or screw connection.
According to the embodiment of the invention, the second metal frame 120 can be fixed on one side of the first metal frame 110 through laser welding and/or threaded connection, so that the third hollowed-out area 111 covers the orthographic projection of the plurality of first hollowed-out areas 102 on the first metal frame 110, and therefore, the first metal frame and the second metal frame can be firmly combined, and the structural stability of the mask plate is improved. According to some embodiments of the present invention, the second metal frame 120 may be fixed to one side of the first metal frame 110 only by means of laser welding or screw connection. According to other specific embodiments of the present invention, the fixing may be performed by laser welding and screw connection, so that the bonding strength of the first metal frame and the second metal frame is further improved, and further, the structural stability of the mask plate is advantageously improved.
S200: an adhesive frame is provided at one side of the metal frame body.
Referring to fig. 12 to 14, an adhesive frame 200 is disposed on one side of a metal frame body 100, and the adhesive frame 200 has a plurality of second hollowed-out areas 210, and an orthographic projection of the second hollowed-out areas 210 on the metal frame body 100 covers the first hollowed-out areas 102.
According to some embodiments of the present invention, the adhesive frame 200 may be fixed on one side of the metal frame body 100 by means of laser welding and/or threaded connection, so that the adhesive frame may be tightly matched with the metal frame body, so that the vapor deposition surface of the mask has a certain viscosity, thereby improving the bonding strength between the vapor deposition material and the vapor deposition surface of the mask in the vapor deposition process, avoiding the vapor deposition material from falling off and polluting the vapor deposition chamber to at least a certain extent, and being beneficial to improving the cleanliness of the vapor deposition chamber, thereby improving the product yield.
According to some embodiments of the present invention, when the metal frame body 100 includes the first metal frame 110 and the second metal frame 120, after fixing the second metal frame 120 to one side of the first metal frame 110, the adhesive frame 200 may be fixed to one side of the second metal frame 120 remote from the first metal frame 110 by laser welding and/or screw connection. According to some embodiments of the present invention, referring to fig. 15 and 16, a second screw hole 220 may be provided on the adhesive frame 200, a third screw hole 121 may be provided on the second metal frame 120, and the adhesive frame 200 may be fixed to a side of the second metal frame 120 remote from the first metal frame 110 through screw connection.
According to some embodiments of the present invention, the method for fabricating a reticle as described above may further include: one side surface of the adhesive frame 200 is roughened, and the roughened surface is disposed away from the metal frame body 100. Through carrying out the roughening treatment to the surface of viscidity frame, can increase the area of contact of viscidity frame and coating by vaporization material to be favorable to improving the joint strength of coating by vaporization material and mask version plating face, further avoid the whereabouts of coating by vaporization material, ensure the cleanliness factor of coating by vaporization cavity. The roughening treatment may be performed before the adhesive frame 200 is provided on one side of the metal frame body 100, or may be performed after the adhesive frame 200 is provided on one side of the metal frame body 100.
According to some embodiments of the present invention, the roughening treatment may include one or more of polishing, streaking, and embossing, and after the roughening treatment, the contact area between the adhesive frame and the evaporation material may be increased, so as to further improve the bonding strength between the evaporation material and the evaporation surface of the mask.
According to some embodiments of the present invention, referring to fig. 15 and 16, the method for fabricating a reticle as described above may further include: an adhesive layer 300 is formed on at least a portion of the surface of the adhesive frame 200 remote from the metal frame body 100. Therefore, the adhesiveness of the plating surface of the mask plate can be further improved, so that the bonding strength of the vapor deposition material and the mask plate is further improved, and the vapor deposition material is not easy to fall off.
According to some embodiments of the present invention, referring to fig. 15, after the adhesive frame 200 is fixed to one side of the metal frame body 100, an adhesive layer 300 may be formed on a surface of the adhesive frame 200 remote from the metal frame body 100. According to other embodiments of the present invention, referring to fig. 16, the adhesive layer 300 may be formed on the surface of the adhesive frame 200, and then the adhesive frame 200 having the adhesive layer 300 formed thereon may be fixed to one side of the metal frame body 100, with the adhesive layer 300 being disposed away from the metal frame body 100.
According to an embodiment of the present invention, the adhesive layer 300 may be formed on the surface of the adhesive frame 200 by coating adhesive. The specific way of coating the adhesive is not limited in the invention, and one skilled in the art can select the way of brushing, spraying, spin coating and the like to coat the adhesive according to actual situations.
In general, the method for manufacturing the mask plate has simple steps, and can not cause remarkable improvement of the manufacturing cost of the mask plate; the method has strong controllability and high product yield.
The terms "first," "second," and "third" are used herein for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", or a third "may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present specification, reference to the terms "one embodiment," "another embodiment," "yet another embodiment," "some embodiments," or "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (11)
1. A reticle, comprising:
the metal frame body is provided with a plurality of first hollowed-out areas;
the adhesive frame is arranged on one side of the metal frame body, the adhesive frame is provided with a plurality of second hollowed-out areas, and orthographic projection of the second hollowed-out areas on the metal frame body covers the first hollowed-out areas.
2. The reticle of claim 1, wherein an orthographic projection of the second hollowed-out area on the metal frame body substantially coincides with the first hollowed-out area.
3. The reticle of claim 1, further comprising:
and the adhesive layer is arranged on at least part of the surface of the adhesive frame away from the metal frame main body.
4. A reticle according to any one of claims 1 to 3, wherein the metal frame body comprises:
the first metal frame is provided with a third hollowed-out area;
the second metal frame is arranged between the first metal frame and the adhesive frame, the second metal frame is provided with a plurality of first hollowed-out areas, and the third hollowed-out areas cover the orthographic projection of the plurality of first hollowed-out areas on the first metal frame.
5. The reticle of claim 4, wherein the material of the first metal frame comprises at least one of stainless steel and indium steel;
and/or the material of the second metal frame comprises at least one of stainless steel and indium steel.
6. The reticle according to any one of claims 1 to 3 and 5, wherein at least one of the following conditions is satisfied:
the adhesive frame is made of epoxy resin;
the adhesive frame is detachable;
the surface of the adhesive frame far away from the metal frame main body is provided with a plurality of bulges;
the roughness of the surface of the adhesive frame is greater than the roughness of the surface of the metal frame body;
the roughness of the surface of the adhesive frame far away from the metal frame body is larger than that of the surface of the adhesive frame near the metal frame body;
the shape of the plurality of first hollowed-out areas comprises at least one of a circle, an ellipse, a rectangle, a diamond, a pentagon and a hexagon;
the shape of the second hollowed-out area is the same as the shape of the first hollowed-out area corresponding to the second hollowed-out area.
7. The reticle of claim 6, wherein the epoxy resin comprises bisphenol a epoxy resin; and/or the epoxy resin contains hydroxyl groups and ether linkages.
8. The mask plate according to any one of claims 1 to 3 and 5, wherein the metal frame body comprises a connection provided with laser welding spots and/or threaded holes.
9. A method of making a reticle according to any one of claims 1 to 8, comprising:
forming a metal frame body, wherein the metal frame body is provided with a plurality of first hollowed-out areas;
an adhesive frame is arranged on one side of the metal frame body, the adhesive frame is provided with a plurality of second hollowed-out areas, and orthographic projection of the second hollowed-out areas on the metal frame body covers the first hollowed-out areas.
10. The method of claim 9, wherein forming the metal frame body comprises:
providing a first metal frame, wherein the first metal frame is provided with a third hollowed-out area;
providing a second metal frame, wherein the second metal frame is provided with a plurality of first hollowed-out areas;
fixing the second metal frame on one side of the first metal frame through laser welding and/or threaded connection, so that the third hollowed-out area covers orthographic projection of a plurality of first hollowed-out areas on the first metal frame;
after the second metal frame is fixed on one side of the first metal frame, the adhesive frame is fixed on one side of the second metal frame away from the first metal frame through laser welding and/or threaded connection.
11. The method according to claim 9 or 10, further comprising: roughening one side surface of the adhesive frame, wherein the roughened surface is far away from the metal frame main body;
and/or forming a glue layer on at least part of the surface of the adhesive frame away from the metal frame body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310183758.2A CN116162894A (en) | 2023-02-28 | 2023-02-28 | Mask plate and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310183758.2A CN116162894A (en) | 2023-02-28 | 2023-02-28 | Mask plate and manufacturing method thereof |
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| CN116162894A true CN116162894A (en) | 2023-05-26 |
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| CN202310183758.2A Pending CN116162894A (en) | 2023-02-28 | 2023-02-28 | Mask plate and manufacturing method thereof |
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