CN116105644B - Radiation scanning imaging method and radiation processing method - Google Patents
Radiation scanning imaging method and radiation processing method Download PDFInfo
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- CN116105644B CN116105644B CN202310370155.3A CN202310370155A CN116105644B CN 116105644 B CN116105644 B CN 116105644B CN 202310370155 A CN202310370155 A CN 202310370155A CN 116105644 B CN116105644 B CN 116105644B
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
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Abstract
The invention provides a ray scanning imaging method and a ray processing method. The ray scanning imaging method comprises the following steps: acquiring ray intensity data of sampling points on a surface to be scanned; acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point; recording ray intensity data corresponding to position data of sampling points on a surface to be scanned and deflection angle data corresponding to a ray deflection device; and combining the recorded position data of the sampling points and the ray intensity data to obtain an image of the surface to be scanned. The ray scanning imaging method provided by the invention can scan to obtain the optical morphology of the sample surface under the condition of not moving the sample, the resolution and the scanning imaging range are freely and flexibly adjusted, and the possibility is provided for alignment of processing points and detection of processing quality. The ray processing method provided by the invention improves the processing convenience, and simultaneously can realize accurate error-free processing position determination and processing starting point alignment, and improves the processing precision.
Description
Technical Field
The invention relates to the technical field of optical systems, in particular to a ray scanning imaging method and a ray processing method.
Background
The laser scanning technique is to change the output direction by changing the phase or reflection of the laser beam, and can be implemented by using different devices, such as an acousto-optic modulator, an electro-optic modulator, a micro-electromechanical micro-mirror system, a laser galvanometer, a laser turning mirror, and the like, and also requires the use of a sensor and a feedback control system to maintain precise alignment between the laser beam and the target. Compared with the traditional processing technology, which needs to control huge moving parts, the laser scanning technology only needs to perform kinematic or electrical control on the reflector or modulator with ultra-small mass, and can realize processing speed and processing precision far exceeding those of the traditional processing technology. The laser galvanometer is used for controlling the deflection of laser to perform scanning processing, and is the processing means which is most widely used at present.
The ray processing is one of special processing, and is commonly used in the fields of ultra-precise processing, ultra-fast processing and the like. Common rays used for processing include ion beams, electron beams, lasers, etc., where the laser application field is relatively more extensive. Ray machining requires deflection control of the rays to control their specific machining location. For example, in laser processing, the laser processing position can be determined by controlling the angle of the reflecting mirror, and in electron beam processing, the electron beam processing position can be determined by controlling the electromagnetic coil to deflect the electron beam. The laser galvanometer is used for controlling the deflection of laser, and scanning processing is a common processing means at present.
The traditional numerical control machine tool processes through a physical cutter, and can perform tool setting according to whether the cutter is in contact with a workpiece or not, so that the alignment of the whole part processing is realized. The existing ray scanning processing platform takes a laser galvanometer as an example, and has the following defects in the processing process: the laser vibrating mirror performs non-contact processing through laser, can not align like a numerical control machine tool, and in the processing process, the processing quality is often required to be detected, the prior art can not directly perform in-situ accurate detection on a workpiece on a laser vibrating mirror workbench under the condition that the workpiece is not taken down, if the workpiece is taken down for detection and then clamped again, clamping errors are necessarily caused, the subsequent processing can not accurately align with the previously processed pattern, and the overall processing quality is finally influenced. In addition, since the laser galvanometer processing adopts a rotary light path, the processing position of the laser galvanometer on a plane needs to be controlled by controlling the angle of the laser galvanometer. Distortion exists in the conversion process of the plane processing coordinates and the rotation angle of the laser galvanometer, and although algorithm correction can be performed, errors cannot be completely avoided, and pincushion distortion is generated.
Disclosure of Invention
The invention provides a ray scanning imaging method, which can scan to obtain the optical morphology of the sample surface under the condition of not moving the sample, and provides possibility for alignment of processing points and detection of processing quality; and the resolution and the scanning imaging range can be freely and flexibly adjusted, and the imaging quality and flexibility are improved.
On the other hand, the invention provides a ray machining method, which improves machining convenience, and simultaneously can realize accurate error-free machining position determination and machining starting point alignment, and improves machining precision.
The invention provides a ray scanning imaging method, which comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be scanned;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on the surface to be scanned and deflection angle data corresponding to a ray deflection device;
and combining the recorded position data of the sampling points and the ray intensity data to obtain the image of the surface to be scanned.
According to the radiation scanning imaging method provided by the invention, the acquiring of the radiation intensity data of the sampling point on the surface to be scanned comprises the following steps:
the rays reaching the sampling point reach the ray intensity detection device through the ray deflection device to obtain ray intensity data.
According to the ray scanning imaging method provided by the invention, the rays are laser, the ray intensity data are light intensity data, and the ray deflection device is a laser galvanometer.
The invention also provides a ray processing method, which comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be processed;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on the surface to be processed and deflection angle data corresponding to a ray deflection device;
inputting point data to be processed and starting processing.
According to the ray processing method provided by the invention, the method for acquiring the ray intensity data of the sampling point on the surface to be processed comprises the following steps:
the rays reaching the sampling point reach the ray intensity detection device through the ray deflection device to obtain ray intensity data.
According to the ray processing method provided by the invention, the data of the point to be processed is the position data of the point to be processed; and/or the data of the point to be processed is deflection angle data corresponding to the point to be processed.
The ray processing method provided by the invention further comprises the following steps:
and establishing a coordinate system on the surface to be processed, and obtaining coordinate position data of the sampling point on the surface to be processed through conversion of the deflection angle.
According to the ray processing method provided by the invention, the rays are laser, the ray intensity data are light intensity data, and the ray deflection device is a laser galvanometer.
The invention also provides an electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the radiographic imaging method as defined in any one of the preceding claims or the radiographic processing method as defined in any one of the preceding claims when executing the program.
The invention also provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements a radiation scanning imaging method as defined in any one of the above or a radiation machining method as defined in any one of the above.
The ray scanning imaging method provided by the invention can scan to obtain the optical morphology of the sample surface under the condition of not moving the sample, and provides possibility for alignment of processing points and detection of processing quality; and the resolution and the scanning imaging range can be freely and flexibly adjusted, and the imaging quality and flexibility are improved.
The ray processing method provided by the invention improves the processing convenience, and simultaneously can realize accurate error-free processing position determination and processing starting point alignment, thereby improving the processing precision.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an embodiment of a laser galvanometer system provided by the invention;
FIG. 2 is a schematic flow chart of a method of radiographic imaging provided by the present invention;
FIG. 3 is a schematic view of an optical path of a laser galvanometer system according to the present invention when scanning imaging is performed;
FIG. 4 is a schematic flow chart of the ray processing method provided by the invention;
FIG. 5 is a schematic view of a laser processing light path of the laser galvanometer system provided by the invention;
fig. 6 is a schematic structural diagram of an electronic device provided by the present invention.
Reference numerals:
1. a laser emitting device; 2. a laser galvanometer; 3. an angle adjusting module; 4. a focusing mirror; 5. a half mirror; 6. a light intensity detection device; 7. a surface to be scanned; 8. a surface to be processed;
810. a processor; 820. a communication interface; 830. a memory; 840. a communication bus.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that common rays used for scanning and processing include ion beams, electron beams, lasers, and the like, and the laser application field is relatively wider. Before describing the radiation scanning imaging method and the radiation processing method provided by the invention, taking laser as an example, the embodiment of the invention firstly provides a laser galvanometer system.
The laser galvanometer system provided by the invention is described below with reference to fig. 1.
Fig. 1 is a schematic diagram of an embodiment of a laser galvanometer system according to the present invention. The laser galvanometer system of the embodiment comprises a laser emitting device 1, a laser galvanometer 2 (provided with an angle adjusting module 3) and a focusing mirror 4, wherein the laser emitting device 1 is used for emitting laser, the angle adjusting module 3 is used for adjusting the deflection angle of the laser galvanometer 2, and the focusing mirror 4 is used for focusing the laser reflected by the laser galvanometer 2 onto a surface to be scanned or a surface to be processed;
the laser oscillator also comprises a half mirror 5 and a light intensity detection device 6, wherein the half mirror 5 is positioned between the laser outlet of the laser emitter 1 and the laser oscillator 2, the half mirror 5 comprises a first mirror surface and a second mirror surface, the first mirror surface is an incident mirror surface of laser, and the second mirror surface can reflect light rays emitted by the laser oscillator 2 to the light intensity detection device 6.
In the embodiment of the present invention, the laser emitting device 1 may be a laser, and the positions of the laser and the half mirror 5 remain relatively fixed when in use. The laser emitted by the laser can transmit half light through the first mirror surface of the half mirror 5, reflect half light, and the transmitted half light reaches the laser vibrating mirror 2 and is reflected to the surface to be scanned or the surface to be processed, so that the surface to be scanned or the surface to be processed is scanned or processed. The position of the half mirror 5 is adjusted to ensure that the laser processing/scanning point coincides with the light intensity detection point, i.e. the equivalent light paths of the laser processing/scanning point and the light intensity detection point coincide when the same deflection angle of the laser galvanometer 2 is unchanged.
According to the laser galvanometer system provided by the invention, the half mirror 5 is arranged between the laser outlet of the laser emission device 1 and the laser galvanometer 2, when laser reaches a surface to be scanned or a sampling point on the surface to be processed through reflection of the laser galvanometer 2 after passing through the half mirror 5, due to the reversible principle of an optical path, reflected light on the surface to be scanned or the surface to be processed can be reflected to the light intensity detection device 6 through the half mirror 5, so that the light intensity detection device 6 can detect light intensity data of the sampling point, the light intensity data corresponding to different sampling points are different from the deflection angle of the laser galvanometer 2, the position data of the sampling point can be determined according to the light intensity data by recording the light intensity data of different sampling points, the processing position can be determined through the deflection angle of the corresponding laser galvanometer 2, accurate lossless processing starting point alignment can be realized, and the processing precision is improved. The laser galvanometer system can perform laser processing like a traditional laser galvanometer, can also perform imaging of a workpiece by utilizing a laser galvanometer scanning principle, and can further determine a processing position and a processing technology according to imaging.
In addition, the in-situ detection of the laser galvanometer 2 processing can be realized, the accurate position information of the surface appearance of the workpiece can be obtained after the workpiece is clamped, the processing position is determined according to the information, the error caused by the fact that the laser galvanometer cannot be aligned due to clamping is avoided, and meanwhile the problem that the laser galvanometer processing cannot be directly in-situ detected is solved.
As shown in fig. 1, in the embodiment of the present invention, the angle between the laser outlet of the laser emitting device 1 and the first mirror surface is 45 °, and the angle between the detection end of the light intensity detecting device 6 and the second mirror surface is 45 °. The 45-degree fixture is selected because most commercial fixtures are designed according to 45 degrees, so that the 45-degree installation angle is used as a preference, the system construction can be facilitated, and the complexity of the system construction is reduced. In some embodiments, the angle between the laser outlet of the laser emitting device 1 and the first mirror, and the angle between the detection end of the light intensity detection device 6 and the second mirror may be other angles, for example, 30 °, 60 ° or 70 °, instead of 90 °.
In the embodiment of the invention, the laser galvanometer system further comprises a control module, the control module can receive the light intensity signal sent by the light intensity detection device 6, and the control module can send a control signal to the angle adjustment module 3. It should be noted that the control module may be integrated on the angle adjustment module 3.
The radiation scanning imaging method and the radiation processing method provided by the invention are described below, and the radiation scanning imaging method and the radiation processing method described below and the laser galvanometer system described above can be correspondingly referred to each other. When the ray scanning imaging method and the ray processing method are specifically applied to a laser galvanometer system, the ray deflection device corresponds to a laser galvanometer and an angle adjusting module in the laser galvanometer system, and the reflection direction of rays emitted by the ray emitting device can be adjusted by adjusting the deflection angle of the ray scanning imaging method and the ray processing method; the radiation emitting device corresponds to the laser emitting device 1 in the laser galvanometer system.
As shown in fig. 2, the present invention further provides a radiation scanning imaging method, including:
acquiring ray intensity data of sampling points on a surface to be scanned;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be scanned and deflection angle data corresponding to a ray deflection device;
and combining the recorded position data of the sampling points and the ray intensity data to obtain an image of the surface to be scanned.
The ray scanning imaging method provided by the invention can scan to obtain the optical morphology of the sample surface under the condition of not moving the sample, and provides possibility for alignment of processing points and detection of processing quality; and the resolution and the scanning imaging range can be freely and flexibly adjusted, and the imaging quality and flexibility are improved.
The following describes a specific example of the radiation scanning imaging method provided in the present invention when applied to a laser galvanometer system, please refer to fig. 3.
When laser scanning imaging is needed, the deflection angle of the laser galvanometer 2 is changed through the angle adjusting module 3, so that the irradiation points are spread over the whole surface 7 to be scanned; and recording the light intensity data measured by the light intensity detection device 6 corresponding to the deflection angle of each laser galvanometer 2 and the position coordinates of the corresponding sampling point, and combining the position data of each sampling point with the light intensity data to form a complete optical image. The scanning resolution and the breadth are respectively determined by the single deflection angle and the maximum deflection angle of the laser galvanometer 2, and can be freely adjusted without limitation, and the optical path and the moving optical device are not required to be changed. The surface 7 to be scanned may be a plane or a curved surface.
The method for acquiring the light intensity data specifically comprises the following steps: the laser emission device 1 emits laser, the laser reaches the laser vibrating mirror 2 through the half mirror 5 and reaches the sampling point on the surface 7 to be scanned, the laser reaching the sampling point can reach the light intensity detection device 6 through the laser vibrating mirror 2 and the half mirror 5 due to the light path reversibility principle, and the light intensity data of the corresponding sampling point can be obtained through the light intensity detection device 6. In some embodiments, ambient light or additional illumination sources may also be used as radiation.
As shown in fig. 4, the present invention further provides a ray processing method, including:
acquiring ray intensity data of sampling points on a surface to be processed;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be processed and deflection angle data corresponding to a ray deflection device;
inputting point data to be processed and starting processing. Specifically, when the method is applied to a laser galvanometer system, coordinates of a substitute processing point can be determined according to the acquired data, parameters to be adopted, such as laser power, repetition frequency and the like, can be determined, and galvanometer deflection can be controlled to process.
The ray processing method provided by the invention improves the processing convenience, and simultaneously can realize accurate error-free processing position determination and processing starting point alignment, thereby improving the processing precision.
In the embodiment of the invention, acquiring the light intensity data of all sampling points on the surface to be processed comprises the following steps: the ray transmitting device emits rays, the rays reach the ray deflecting device through the half reflecting mirror and reach the sampling point on the surface to be scanned, and the rays reaching the sampling point reach the ray intensity detecting device through the ray deflecting device due to the reversible principle of the optical path to obtain ray intensity data. In some embodiments, ambient light or additional illumination sources may also be used as radiation.
In the embodiment of the invention, the point data to be processed is the position data of the point to be processed; and/or the data of the point to be processed is deflection angle data corresponding to the point to be processed. In some embodiments, the point to be processed may be the sampling point itself, or may be derived from the sampling point data.
In the embodiment of the invention, a coordinate system can be established on the surface to be processed to obtain the coordinate position data of the sampling point on the surface to be processed. Therefore, all sampling points on the surface to be processed are conveniently coordinated, and the acquisition and the recording are convenient.
The following describes a specific example of the radiation processing method provided in the present invention when applied to a laser galvanometer system, please refer to fig. 5.
When processing is needed, the coordinate data of the surface 8 to be processed can be directly set like the traditional laser galvanometer 2, and the coordinate data of the surface 8 to be processed is converted into deflection angle data of the laser galvanometer 2 and is input to the angle adjusting module 3 or the control module; or directly extracting the original angle data of the position corresponding to the sampling point after determining the position to be processed according to scanning imaging, and inputting the original angle data to the laser galvanometer 2. The latter can be processed without distortion error. The two can be combined, scanning and imaging are firstly carried out, deflection angle data of the laser galvanometer 2 corresponding to the processing starting point is confirmed, and then the deflection angle data of the laser galvanometer 2 is further converted by combining the coordinate data, so that precise and nondestructive alignment of the processing starting point is realized. The surface 8 to be processed may be a plane surface or a curved surface.
Likewise, the method for acquiring the light intensity data is specifically as follows: the laser emission device 1 emits laser, the laser reaches the laser vibrating mirror 2 through the half mirror 5 and reaches the sampling point on the surface 7 to be scanned, the laser reaching the sampling point can reach the light intensity detection device 6 through the laser vibrating mirror 2 and the half mirror 5 due to the light path reversibility principle, and the light intensity data of the corresponding sampling point can be obtained through the light intensity detection device 6. In some embodiments, ambient light or additional illumination sources may also be used as radiation.
As can be seen from the description of the above embodiments, the radiation scanning imaging method and the radiation processing method provided by the present invention have at least the following advantages:
the device has in-situ detection capability, can scan the optical morphology of the sample surface under the condition of not moving the sample, and provides possibility for alignment of processing points and detection of processing quality. The maximum detection range is equal to the scanning range of the ray deflection device, the minimum detection precision is equal to the scanning precision of the ray deflection device, and the ultra-large-range and ultra-high-precision detection imaging can be realized, so that convenience is provided for processing;
the detection range and the detection resolution can be freely adjusted according to the requirements, and only the deflection angle of the ray deflection device is required to be adjusted, so that a complex optical zooming mechanism is not required;
the problem that the alignment cannot be performed in the radial processing in the prior art is solved, and the application range of the radial processing is widened;
the method solves the inconvenience caused by the need of moving a sample for detection during the radial processing, further eliminates the positioning error caused by repeated clamping, improves the precision of the radial processing, and simplifies the technological process of the radial processing;
when the processing position is determined according to imaging, the imaging is converted from angle data, and the processing without correction errors can be realized completely due to the reversible principle of the light path, so that the distortion caused by inaccurate correction algorithm is avoided.
Fig. 6 illustrates a physical schematic diagram of an electronic device, as shown in fig. 6, which may include: processor 810, communication interface (Communications Interface) 820, memory 830, and communication bus 840, wherein processor 810, communication interface 820, memory 830 accomplish communication with each other through communication bus 840. The processor 810 may invoke logic instructions in the memory 830 to perform a radiographic imaging method or a radiographic processing method.
The ray scanning imaging method comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be scanned;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be scanned and deflection angle data corresponding to a ray deflection device;
and combining the recorded position data of the sampling points and the ray intensity data to obtain an image of the surface to be scanned.
The ray processing method comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be processed;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be processed and deflection angle data corresponding to a ray deflection device;
inputting point data to be processed and starting processing.
Further, the logic instructions in the memory 830 described above may be implemented in the form of software functional units and may be stored in a computer-readable storage medium when sold or used as a stand-alone product. Based on this understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In another aspect, the present invention also provides a computer program product comprising a computer program storable on a non-transitory computer readable storage medium, the computer program, when executed by a processor, being capable of performing the radiographic imaging method or the radiographic processing method provided by the methods described above.
The ray scanning imaging method comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be scanned;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be scanned and deflection angle data corresponding to a ray deflection device;
and combining the recorded position data of the sampling points and the ray intensity data to obtain an image of the surface to be scanned.
The ray processing method comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be processed;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be processed and deflection angle data corresponding to a ray deflection device;
inputting point data to be processed and starting processing.
In yet another aspect, the present invention also provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, is implemented to perform the method of radiographic imaging or the method of radiographic processing provided by the above methods.
The ray scanning imaging method comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be scanned;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be scanned and deflection angle data corresponding to a ray deflection device;
and combining the recorded position data of the sampling points and the ray intensity data to obtain an image of the surface to be scanned.
The ray processing method comprises the following steps:
acquiring ray intensity data of sampling points on a surface to be processed;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of sampling points on a surface to be processed and deflection angle data corresponding to a ray deflection device;
inputting point data to be processed and starting processing.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the embodiments may be implemented by means of software plus necessary general hardware platforms, or of course may be implemented by means of hardware. Based on this understanding, the foregoing technical solution may be embodied essentially or in a part contributing to the prior art in the form of a software product, which may be stored in a computer readable storage medium, such as ROM/RAM, a magnetic disk, an optical disk, etc., including several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method described in the respective embodiments or some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (6)
1. A method of radiation processing comprising:
acquiring ray intensity data of sampling points on a surface to be processed;
acquiring deflection angle data corresponding to a ray deflection device when rays reach a sampling point;
recording ray intensity data corresponding to position data of a sampling point on the surface to be processed and deflection angle data corresponding to a ray deflection device, determining the position data of the sampling point through the light intensity data of the sampling point by recording the light intensity data of the sampling point to correspond to the deflection angle data of the ray deflection device, and determining a processing position through the deflection angle data of the ray deflection device, wherein the point to be processed is the sampling point or is calculated by the sampling point data;
inputting point data to be processed, and starting processing, wherein the point data to be processed is position data of points to be processed; and/or the data of the point to be processed is deflection angle data corresponding to the point to be processed.
2. The method according to claim 1, wherein the acquiring radiation intensity data of the sampling point on the surface to be processed includes:
the rays reaching the sampling point reach the ray intensity detection device through the ray deflection device to obtain ray intensity data.
3. The method of ray processing of claim 1, further comprising:
and establishing a coordinate system on the surface to be processed, and obtaining coordinate position data of the sampling point on the surface to be processed through conversion of the deflection angle.
4. A method of beam processing according to any one of claims 1 to 3, wherein the beam is a laser beam, the beam intensity data is light intensity data, and the beam deflection means is a laser galvanometer.
5. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, wherein the processor implements the radiation processing method of any of claims 1-4 when the program is executed by the processor.
6. A non-transitory computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when executed by a processor, implements the radiation processing method according to any one of claims 1-4.
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| CN112098336A (en) * | 2020-08-17 | 2020-12-18 | 深圳先进技术研究院 | Laser ultrasonic scanning imaging device and laser ultrasonic scanning imaging system |
| CN112828452B (en) * | 2020-12-31 | 2022-07-01 | 武汉华工激光工程有限责任公司 | Two-dimensional laser point cloud scanning imaging processing device and processing method |
| CN115373135A (en) * | 2022-08-18 | 2022-11-22 | 清华大学 | Closed-loop control system and method for resonant MEMS scanning mirror |
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