CN116062440B - Feeding mechanism and silicon wafer cleaning machine - Google Patents
Feeding mechanism and silicon wafer cleaning machine Download PDFInfo
- Publication number
- CN116062440B CN116062440B CN202211632696.0A CN202211632696A CN116062440B CN 116062440 B CN116062440 B CN 116062440B CN 202211632696 A CN202211632696 A CN 202211632696A CN 116062440 B CN116062440 B CN 116062440B
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- frame
- feeding
- telescopic cylinder
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- 238000004140 cleaning Methods 0.000 title claims abstract description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 22
- 239000010703 silicon Substances 0.000 title claims abstract description 22
- 238000003825 pressing Methods 0.000 claims abstract description 28
- 238000007599 discharging Methods 0.000 claims abstract description 17
- 235000012431 wafers Nutrition 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 230000003014 reinforcing effect Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/82—Rotary or reciprocating members for direct action on articles or materials, e.g. pushers, rakes, shovels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
- Y02A40/80—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in fisheries management
- Y02A40/81—Aquaculture, e.g. of fish
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application relates to the field of semiconductor processing, in particular to a feeding mechanism and a silicon wafer cleaning machine, which comprises a bottom plate, a feeding component, a discharging component, a supporting frame, a pressing component, a fixing component and a containing component, wherein the bottom plate is horizontally arranged, an operating table is arranged at the upper end of the bottom plate, the feeding component is arranged at one side of the operating table, the feeding component comprises a feeding belt and a pushing telescopic cylinder, the discharging component is arranged at one side of the operating table far away from the feeding component, the discharging component comprises a discharging belt, the supporting frame is vertically arranged at the upper end of the operating table, the device simultaneously conveys and positions two containing baskets which are arranged in a combined mode through a conveying belt structure with lower cost, then the silicon wafer is cleaned and fed under the horizontal and vertical pushing actions of the pushing telescopic cylinder and the pressing telescopic cylinder, the cost is lower, more silicon wafers can be cleaned at one time, the efficiency is higher, in addition, the installation is simple and convenient under the effect of the fixing component, no extra pollution is caused to cleaning, the device is durable, and the device is convenient to use.
Description
Technical Field
The application relates to the field of semiconductor processing, in particular to a feeding mechanism and a silicon wafer cleaning machine.
Background
Silicon chip is common photovoltaic and semiconductor material for chip, need carry out strict polishing and cleaning operation when carrying out the processing operation in prior art, because trace pollution also can lead to the device to become invalid, the silicon chip can neatly put the silicon chip in the silicon chip basket when carrying out cleaning operation, then will hold the basket of flowers that holds the silicon chip in the washing pond that holds cleaning solution through artifical or the mode of arm, manual operation mode causes the pollution to cleaning solution easily, the mode of arm then input cost and maintenance cost are higher, and efficiency is lower, it is very inconvenient to use.
Disclosure of Invention
The application aims to provide a feeding mechanism and a silicon wafer cleaning machine, which are used for solving the problems of high input cost and low cleaning efficiency in the background technology.
In order to achieve the above purpose, the present application provides the following technical solutions: feed mechanism, feed mechanism includes:
the bottom plate is horizontally arranged, and an operation table is arranged at the upper end of the bottom plate;
the feeding assembly is arranged on one side of the operating platform and comprises a feeding belt and a pushing telescopic cylinder;
the discharging assembly is arranged on one side, far away from the feeding assembly, of the operating platform and comprises a discharging belt;
the support frame is vertically arranged at the upper end of the operation table;
the pressing component is arranged at the lower end of the supporting frame and comprises a pressing telescopic cylinder and a pressing plate;
the fixing components are arranged on two sides of the supporting frame, the fixing components comprise a movable frame and a fixed frame, and the fixed frame is arranged at the lower end of the movable frame;
the accommodating assembly comprises an installing frame and two accommodating baskets, and two sides of the installing frame are arranged between the movable frame and the lower pressing plate.
Preferably, the center of the operation table is provided with a through groove in a penetrating way, the two sides of the operation table are horizontally provided with supporting rollers close to one end of the through groove, and the feeding belt and the discharging belt are respectively sleeved with the two supporting rollers.
Preferably, the operation panel is located feeding area and ejection of compact area one side and is equipped with first baffle and second baffle respectively, pushes away flexible jar of material level and locates first baffle one side, and pushes away the flexible jar of material and set up along passing through the groove central line.
Preferably, the support frame comprises two support plates and a transverse plate, wherein the two support plates are respectively vertically arranged at two sides of the upper end through grooves of the operating platform, the transverse plate is horizontally arranged at the upper ends of the two support plates, and the lower end center of the transverse plate is vertically arranged by the downward-pressing telescopic cylinder.
Preferably, the vertical environmental protection pole that is equipped with of push down flexible jar lower extreme, environmental protection pole lower extreme is connected with holding down plate upper end center and is set up, and the bar groove has all been vertically seted up at two backup pad upper end centers, and the bar inslot is all vertically equipped with the slide bar, and the fly frame is L shape structure setting, and the diaphragm one side level of fly frame runs through bar groove activity and cup joints the slide bar upper end setting, and the slide bar lower extreme cover connects and is equipped with the spring.
Preferably, the backup pad is close to holding down plate one side lower extreme all levels and is equipped with the auxiliary rod, and riser one side center of movable frame has all run through and has offered the spout, and auxiliary rod one side runs through the grafting and arranges the spout in and be equipped with the stopper through the screw grafting, and the stopper diameter is greater than the diameter of auxiliary rod.
Preferably, the equal level in holding down plate both sides is equipped with the symmetry and is equipped with two deflector, and two deflector one side is all vertical runs through and has seted up the guide way, and the mount includes plugboard and layer board, and plugboard lower extreme one side setting is located to the layer board level, and the guide way that two deflector were run through respectively on the plugboard upper end is connected with the movable frame lower extreme, and layer board and plugboard are connected one side lower extreme and all are equipped with the strengthening rib.
Preferably, hold the basket in the symmetry and be equipped with a plurality of silicon chips, the mounting bracket includes connecting seat and mounting panel, two hold the basket symmetry and locate the connecting seat both sides, the connecting seat upper end is located to the mounting panel level, be close to the equal vertical recess of seting up in backup pad both sides through the inslot, the plugboard lower extreme is pegged graft and is arranged in the recess, the layer board upper surface flushes with the operation panel upper surface, the mounting panel both sides lower extreme contacts with two layer board upper ends respectively, two constant head tanks have been seted up to mounting panel upper end bilateral symmetry, the holding down plate lower extreme is located the equal vertical locating piece that is equipped with in constant head tank one side, and four sides are the inclined plane setting in locating piece lower extreme four sides and the constant head tank.
Preferably, the upper end of the bottom plate is positioned at the lower end of the operating platform and is horizontally movably provided with a movable table, three cleaning tanks are symmetrically arranged at the upper end of the movable table, and the descending height of the lower pressing plate is larger than the height of the upper end of the operating platform from the liquid level in the cleaning tanks.
A silicon wafer cleaning machine is provided with the feeding mechanism.
Compared with the prior art, the application has the beneficial effects that:
the device carries and fixes a position to the basket that holds that two combinations set up simultaneously through the lower conveyer belt structure of cost, then under pushing away the flexible jar of material and pushing down the level and vertical pushing action of flexible jar, washs the material loading to the silicon chip, and the cost is lower, and single cleanable more silicon chip, and efficiency is higher, and in addition under fixed subassembly's effect, the simple installation is convenient, can not cause extra pollution to wasing, durable, convenient to use.
Drawings
FIG. 1 is a schematic diagram of the structure of the present application;
FIG. 2 is a schematic view of the mounting structure of the feed assembly of the present application;
FIG. 3 is a schematic view of the mounting structure of the discharge assembly of the present application;
FIG. 4 is a schematic view of the mounting structure of the support frame of the present application;
FIG. 5 is a schematic view of the mounting structure of the lower platen of the present application;
FIG. 6 is a schematic view of the attachment structure of the mounting bracket of the present application;
fig. 7 is a schematic diagram of the portion a of fig. 1 according to the present application.
In the figure: the device comprises a bottom plate 1, an operation table 2, a feeding belt 3, a pushing telescopic cylinder 4, a discharging belt 5, a supporting frame 6, a pushing telescopic cylinder 7, a lower pressing plate 8, a movable frame 9, a fixed frame 10, a mounting frame 11, a containing basket 12, a through groove 13, an environment-friendly rod 14, a strip-shaped groove 15, a sliding rod 16, a spring 17, an auxiliary rod 18, a sliding groove 19, a guide plate 20, a plugboard 21, a supporting plate 22, a silicon wafer 23, a mounting plate 24, a positioning groove 25, a positioning block 26, a movable table 27 and a cleaning pool 28.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below. Embodiments of the present application are intended to be within the scope of the present application as defined by the appended claims.
In order to make the objects, technical solutions, and advantages of the present application more apparent, the embodiments of the present application will be further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are some, but not all, embodiments of the present application, are intended to be illustrative only and not limiting of the embodiments of the present application, and that all other embodiments obtained by persons of ordinary skill in the art without making any inventive effort are within the scope of the present application.
In the description of the present application, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "a," an, "" the first, "" the second, "" the third, "" the fourth, "" the fifth, "and the sixth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
For purposes of brevity and description, the principles of the embodiments are described primarily by reference to examples. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments. It will be apparent, however, to one of ordinary skill in the art that the embodiments may be practiced without limitation to these specific details. In some instances, well-known methods and structures have not been described in detail so as not to unnecessarily obscure the embodiments. In addition, all embodiments may be used in combination with each other.
Example 1
Referring to fig. 1-7, the present application provides = a feeding mechanism: the feed mechanism includes:
the base plate 1 is horizontally arranged, and an operation table 2 is arranged at the upper end of the base plate 1;
the feeding assembly is arranged on one side of the operating platform 2 and comprises a feeding belt 3 and a pushing telescopic cylinder 4;
the discharging assembly is arranged on one side of the operating platform 2 far away from the feeding assembly, the discharging assembly comprises a discharging belt 5, a through groove 13 is formed in the center of the operating platform 2 in a penetrating manner, supporting rollers are horizontally arranged at one ends, close to the through groove, of the two sides of the operating platform 2, the feeding belt 3 and the discharging belt 5 are respectively sleeved with two supporting rollers, the operating platform 2 is arranged on one side of the feeding belt 3 and one side of the discharging belt 5 respectively and provided with a first baffle and a second baffle, the pushing telescopic cylinder 4 is horizontally arranged on one side of the first baffle, the pushing telescopic cylinder 4 is arranged along the center line of the through groove 13, the structures of the containing basket 12 and the mounting frame 11 are conveyed, and the pushing telescopic cylinder 4 is pushed into the through groove 13;
the support frame 6 is vertically arranged at the upper end of the operating platform 2;
the pushing component is arranged at the lower end of the supporting frame 6, the pushing component comprises a pushing telescopic cylinder 7 and a pushing plate 8, the supporting frame 6 comprises two supporting plates and a transverse plate, the two supporting plates are respectively and vertically arranged at the upper end of the operating platform 2 and pass through two sides of the groove 13, the transverse plate is horizontally arranged at the upper ends of the two supporting plates, the pushing telescopic cylinder 7 is vertically arranged at the center of the lower end of the transverse plate, the lower end of the pushing telescopic cylinder 7 is vertically provided with an environment-friendly rod 14, the lower end of the environment-friendly rod 14 is connected with the center of the upper end of the pushing plate 8, the centers of the upper ends of the two supporting plates are vertically provided with a bar-shaped groove 15, the bar-shaped groove 15 is vertically provided with a slide bar 16, the movable frame 9 is in an L-shaped structure, one side of the transverse plate of the movable frame 9 horizontally penetrates through the bar-shaped groove 15 to be movably sleeved with the upper end of the slide bar 16, the lower end of the sliding rod 16 is sleeved with a spring 17, the lower end of one side of the supporting plate, which is close to the lower pressure plate 8, is horizontally provided with an auxiliary rod 18, the center of one side of a vertical plate of the movable frame 9 is provided with a sliding groove 19 in a penetrating manner, one side of the auxiliary rod 18 is provided with a limiting block in a penetrating manner in the sliding groove 19 in a threaded manner, the diameter of the limiting block is larger than that of the auxiliary rod 18, when the environment-friendly rod 14 pushes the lower pressure plate 8 downwards through the telescopic cylinder 7 downwards, the environment-friendly rod 14 enters cleaning liquid, pollution of the cleaning liquid is avoided, then the movable frame 9 is elastically supported under the action of the spring 17, and when the lower pressure plate 8 pushes downwards, the movable frame 9 moves along with the movement, and the action of the auxiliary rod 18 runs stably;
the fixing assembly is arranged on two sides of the supporting frame 6 and comprises a movable frame 9 and a fixed frame 10, the fixed frame 10 is arranged at the lower end of the movable frame 9, two sides of the lower pressing plate 8 are horizontally provided with two guide plates 20 symmetrically, one sides of the two guide plates 20 are vertically penetrated and provided with guide grooves, the fixed frame 10 comprises a plugboard 21 and a supporting plate 22, the supporting plate 22 is horizontally arranged at one side of the lower end of the plugboard 21, the upper ends of the plugboard 21 are respectively penetrated and connected with the lower end of the movable frame 9 through the guide grooves of the two guide plates 20, the lower end of one side of the supporting plate 22 connected with the plugboard 21 is provided with a reinforcing rib, when the lower pressing plate 8 descends under the action of a spring 17, the movable frame 9 drives the supporting plate 22 to lift upwards under the action of the spring 17 and move opposite to the lower pressing plate 8, and accordingly the two sides of the mounting plate 24 are clamped and fixed;
the accommodating assembly comprises an installing frame 11 and two accommodating baskets 12, wherein two sides of the installing frame 11 are arranged between the movable frame 9 and the lower pressing plate 8, a plurality of silicon wafers 23 are symmetrically arranged in the accommodating baskets 12, the installing frame 11 comprises a connecting seat and an installing plate 24, the two accommodating baskets 12 are symmetrically arranged on two sides of the connecting seat, and the installing plate 24 is horizontally arranged at the upper end of the connecting seat.
Working principle: the feeding belt 5 is matched with the pushing telescopic cylinder 4 to push the containing basket 12 into the passing groove 13, the mounting plate 24 is placed on the two supporting plates 22, then the pushing telescopic cylinder 7 is pushed down to drive the lower pressing plate 8 to be in contact with the mounting plate 24, the supporting plates 22 are under the action of the springs 17 arranged on one side of the movable frame 9, the supporting plates 22 do not drop in the first time, the lower pressing plate 8 is matched with the lower pressing plate 8 to fixedly clamp the mounting plate 24, when knowing that the downward force is larger than the resilience force of the springs 17, the lower pressing plate 8 and the silicon wafer 23 enter the cleaning tank 28 to be cleaned, and finally the containing basket 12 is lifted, pushed onto the discharging belt 5 to be conveyed to the next procedure.
Example two
On the basis of the first embodiment, grooves are vertically formed in the groove 13 near two sides of the supporting plate, the lower ends of the plug boards 21 are inserted and arranged in the grooves, the upper surfaces of the supporting plates 22 are flush with the upper surfaces of the operating tables 2, the lower ends of the two sides of the mounting plates 24 are respectively contacted with the upper ends of the two supporting plates 22, two positioning grooves 25 are symmetrically formed in the two sides of the upper ends of the mounting plates 24, positioning blocks 26 are vertically arranged on one side of each positioning groove 25 at the lower end of each pressing plate 8, four sides of the lower end of each positioning block 26 and four sides of the inner side of each positioning groove 25 are inclined surfaces, the mounting plates 24 are stably positioned, and the stability of cleaning operation is improved.
Example III
On the basis of the second embodiment, the movable table 27 is horizontally movably arranged at the upper end of the bottom plate 1 and positioned at the lower end of the operating table 1, three cleaning tanks 28 are symmetrically arranged at the upper end of the movable table 27, the descending height of the lower pressing plate 8 is larger than the height of the upper end of the operating table 2 from the liquid level in the cleaning tanks 28, and the cleaning effect is good in a staged manner.
A silicon wafer cleaning machine is provided with the feeding mechanism.
While the foregoing describes illustrative embodiments of the present application so that those skilled in the art may understand the present application, the present application is not limited to the specific embodiments, and all applications and creations utilizing the inventive concepts are within the scope of the present application as long as the modifications are within the spirit and scope of the present application as defined and defined in the appended claims to those skilled in the art.
Claims (4)
1. Feeding mechanism, its characterized in that: the feed mechanism includes:
the base plate (1), the base plate (1) is horizontally arranged, and an operation table (2) is arranged at the upper end of the base plate (1);
the feeding assembly is arranged on one side of the operating platform (2) and comprises a feeding belt (3) and a pushing telescopic cylinder (4);
the discharging assembly is arranged on one side, far away from the feeding assembly, of the operating platform (2), and comprises a discharging belt (5);
the support frame (6) is vertically arranged at the upper end of the operating platform (2);
the pressing component is arranged at the lower end of the supporting frame (6) and comprises a pressing telescopic cylinder (7) and a pressing plate (8);
the fixing components are arranged on two sides of the supporting frame (6), each fixing component comprises a movable frame (9) and a fixing frame (10), and the fixing frame (10) is arranged at the lower end of the movable frame (9);
the accommodating assembly comprises an installing frame (11) and two accommodating baskets (12), and two sides of the installing frame (11) are arranged between the movable frame (9) and the lower pressing plate (8);
the support frame (6) comprises two support plates and a transverse plate, the two support plates are respectively and vertically arranged at two sides of the upper end passing groove (13) of the operating platform (2), the transverse plate is horizontally arranged at the upper ends of the two support plates, and the downward-pressing telescopic cylinder (7) is vertically arranged at the center of the lower end of the transverse plate;
the center of the operating platform (2) is provided with a through groove (13) in a penetrating way, one ends, close to the through groove, of the two sides of the operating platform (2) are horizontally provided with supporting rollers, and the feeding belt (3) and the discharging belt (5) are respectively sleeved with the two supporting rollers;
the lower end of the pushing-down telescopic cylinder (7) is vertically provided with an environment-friendly rod (14), the lower end of the environment-friendly rod (14) is connected with the center of the upper end of the lower pressing plate (8), the centers of the upper ends of the two supporting plates are vertically provided with strip grooves (15), the strip grooves (15) are vertically internally provided with slide bars (16), the movable frame (9) is in an L-shaped structure, one side of a transverse plate of the movable frame (9) horizontally penetrates through the strip grooves (15) to be movably sleeved with the upper end of the slide bars (16), and the lower ends of the slide bars (16) are sleeved with springs (17);
two sides of the lower pressing plate (8) are horizontally provided with two guide plates (20) symmetrically, one sides of the two guide plates (20) are vertically penetrated and provided with guide grooves, the fixing frame (10) comprises a plugboard (21) and a supporting plate (22), the supporting plate (22) is horizontally arranged at one side of the lower end of the plugboard (21), the upper ends of the plugboard (21) respectively penetrate through the guide grooves of the two guide plates (20) to be connected with the lower end of the movable frame (9), and the lower end of one side of the supporting plate (22) connected with the plugboard (21) is provided with reinforcing ribs;
a plurality of silicon wafers (23) are symmetrically arranged in the accommodating basket (12), the mounting frame (11) comprises a connecting seat and a mounting plate (24), the two accommodating baskets (12) are symmetrically arranged on two sides of the connecting seat, the mounting plate (24) is horizontally arranged at the upper end of the connecting seat, grooves are vertically formed in the two sides, close to the supporting plate, of the groove (13), the lower ends of the inserting plates (21) are inserted and arranged in the grooves, the upper surfaces of the supporting plates (22) are flush with the upper surfaces of the operating platform (2), the lower ends of the two sides of the mounting plate (24) are respectively contacted with the upper ends of the two supporting plates (22), two positioning grooves (25) are symmetrically formed in the two sides of the upper end of the mounting plate (24), positioning blocks (26) are vertically arranged on one side of the lower end of the lower pressing plate (8), and the four sides of the lower end of the positioning blocks (26) and the four sides in the positioning grooves (25) are inclined surfaces;
the upper end of the bottom plate (1) is horizontally movably provided with a movable table (27) at the lower end of the operation table (2), three cleaning tanks (28) are symmetrically arranged at the upper end of the movable table (27), and the descending height of the lower pressing plate (8) is larger than the height of the upper end of the operation table (2) from the liquid level in the cleaning tanks (28);
the pushing telescopic cylinder (4) is arranged along the center line of the through groove (13) and conveys the containing basket (12) and the mounting frame (11).
2. A feeding mechanism according to claim 1, wherein: the operation panel (2) is located feeding area (3) and ejection of compact area (5) one side and is equipped with first baffle and second baffle respectively, pushes away material telescopic cylinder (4) level and locates first baffle one side.
3. A feeding mechanism according to claim 1, wherein: the backup pad is close to holding down plate (8) one side lower extreme all levels are equipped with auxiliary rod (18), and riser one side center of movable frame (9) all runs through and has seted up spout (19), and auxiliary rod (18) one side runs through the grafting and arranges spout (19) and be equipped with the stopper through the screw grafting, and stopper diameter is greater than the diameter of auxiliary rod (18).
4. A silicon wafer cleaning machine is characterized in that: the silicon wafer cleaning machine is provided with the feeding mechanism as claimed in any one of the claims 1-3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211632696.0A CN116062440B (en) | 2022-12-19 | 2022-12-19 | Feeding mechanism and silicon wafer cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211632696.0A CN116062440B (en) | 2022-12-19 | 2022-12-19 | Feeding mechanism and silicon wafer cleaning machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116062440A CN116062440A (en) | 2023-05-05 |
| CN116062440B true CN116062440B (en) | 2023-11-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211632696.0A Active CN116062440B (en) | 2022-12-19 | 2022-12-19 | Feeding mechanism and silicon wafer cleaning machine |
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| CN (1) | CN116062440B (en) |
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| CN209255358U (en) * | 2018-12-28 | 2019-08-16 | 佳木斯大学 | A kind of pathology department's glass slide cleaning device |
| KR20210144372A (en) * | 2020-05-22 | 2021-11-30 | 주식회사 우정이엔지 | apparatus for binding seaweed seed string |
| CN214321145U (en) * | 2021-02-01 | 2021-10-01 | 常州市潞星超声清洗科技有限公司 | Sealing structure for silicon wafer ultrasonic cleaning machine |
| CN112781345A (en) * | 2021-02-05 | 2021-05-11 | 苏州赛森电子科技有限公司 | Drying device for silicon wafer |
| CN214933054U (en) * | 2021-06-25 | 2021-11-30 | 林州市恒丰车桥有限公司 | Clean shot blasting machine conveying mechanism for automobile axle preparation |
| CN217322298U (en) * | 2022-01-21 | 2022-08-30 | 深圳市创新特科技有限公司 | Tray feeding mechanism |
| CN115194662A (en) * | 2022-06-30 | 2022-10-18 | 江苏华玻光电技术有限公司 | AG anti-dazzle sand blasting unit for glass of regularly clearance |
| CN115148639A (en) * | 2022-07-12 | 2022-10-04 | 安徽森米诺智能装备有限公司 | Cross-contamination-free wafer tank type cleaning machine |
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| CN116062440A (en) | 2023-05-05 |
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