CN115996590A - Display panel and display device - Google Patents

Display panel and display device Download PDF

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Publication number
CN115996590A
CN115996590A CN202310070248.4A CN202310070248A CN115996590A CN 115996590 A CN115996590 A CN 115996590A CN 202310070248 A CN202310070248 A CN 202310070248A CN 115996590 A CN115996590 A CN 115996590A
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metal
layer
substructure
substrate
orthographic projection
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刘军
周斌
黄勇潮
苏同上
王海东
栾兴龙
马宇轩
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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Priority to CN202310070248.4A priority Critical patent/CN115996590A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The embodiment of the application provides a display panel and display equipment. In the display panel provided by the embodiment of the application, the barrier structure is arranged on one side of the barrier region of the substrate, the second metal substructure in the barrier structure is in orthographic projection of the substrate, and the first metal substructure and the third metal substructure are positioned in orthographic projection of the substrate, namely, the second metal substructure is laterally retracted relative to the first metal substructure, so that the cross section of the barrier structure is I-shaped, the barrier performance of the barrier structure can be improved, and the reliability of the display panel can be improved. The first metal layer and the first structure of the pixel structure positioned in the display area are arranged on the same layer, and the materials of the first metal layer and the first structure are the same, so that the preparation process of the barrier structure can be simplified, the preparation difficulty of the barrier structure can be reduced, and the preparation cost of the display panel can be reduced.

Description

显示面板及显示设备Display panel and display device

本申请为申请号为202110729219.5,发明名称为“显示面板及其制备方法、显示设备”的发明专利申请的分案申请。This application is a divisional application of the invention patent application with the application number 202110729219.5 and the invention title "display panel and its preparation method, and display device".

技术领域technical field

本申请涉及显示技术领域,具体而言,本申请涉及一种显示面板及显示设备。The present application relates to the field of display technology, and in particular, the present application relates to a display panel and a display device.

背景技术Background technique

随着显示技术的发展,越来越的应用有有机发光显示面板的显示产品得到用户的青睐。对于异形有机发光显示面板而言,由于发光区的形状不同于传统的矩形发光区,需要设置阻隔结构对有机发光层、阴极等进行水汽阻挡隔离,以保障有机发光显示面板密封性。With the development of display technology, more and more display products using organic light-emitting display panels are favored by users. For special-shaped organic light-emitting display panels, because the shape of the light-emitting area is different from the traditional rectangular light-emitting area, it is necessary to set up a barrier structure to block and isolate the organic light-emitting layer, cathode, etc. from water vapor, so as to ensure the airtightness of the organic light-emitting display panel.

目前,在有机发光显示面板的制备过程中,阻隔结构的阻隔性能较低,导致有机发光显示面板的成品率较低。At present, in the preparation process of the organic light emitting display panel, the barrier performance of the barrier structure is low, resulting in a low yield of the organic light emitting display panel.

发明内容Contents of the invention

本申请针对现有方式的缺点,提出一种显示面板及显示设备,用以解决现有技术中有机发光显示面板中阻隔结构的阻隔性能较低的技术问题。In view of the shortcomings of the existing methods, the present application proposes a display panel and a display device to solve the technical problem of low barrier performance of the barrier structure in the organic light-emitting display panel in the prior art.

第一个方面,本申请实施例提供了一种显示面板,包括显示区域和阻隔区域,阻隔区域围绕显示区域,显示面板包括:In the first aspect, the embodiment of the present application provides a display panel, including a display area and a blocking area, the blocking area surrounds the display area, and the display panel includes:

衬底基板;Substrate substrate;

阻隔结构,位于衬底基板的一侧,且位于阻隔区域;阻隔结构包括第一结构,第一结构包括沿远离衬底基板的方向依次层叠设置的第一金属子结构、第二金属子结构和第三金属子结构;第二金属子结构在衬底基板的正投影,位于第一金属子结构和第三金属子结构在衬底基板的正投影内;The barrier structure is located on one side of the base substrate and is located in the barrier area; the barrier structure includes a first structure, and the first structure includes a first metal substructure, a second metal substructure and The third metal substructure; the orthographic projection of the second metal substructure on the base substrate is located within the orthographic projection of the first metal substructure and the third metal substructure on the substrate;

像素结构,位于衬底基板的一侧,且位于显示区域,像素结构包括第一金属层,与第一结构同层设置,第一金属层的材料与第一结构的材料相同。The pixel structure is located on one side of the base substrate and in the display area. The pixel structure includes a first metal layer, which is arranged on the same layer as the first structure. The material of the first metal layer is the same as that of the first structure.

可选地,第二金属子结构在衬底基板的正投影的边界,与第一金属子结构在衬底基板的正投影的边界具有第一设定距离。Optionally, the boundary of the orthographic projection of the second metal substructure on the substrate has a first set distance from the boundary of the orthographic projection of the first metal substructure on the substrate.

可选地,第一金属子结构在衬底基板的正投影,与第三金属子结构在衬底基板的正投影重叠。Optionally, the orthographic projection of the first metal substructure on the substrate overlaps with the orthographic projection of the third metal substructure on the substrate.

可选地,阻隔结构还包括第二结构,第二结构位于第一结构远离衬底基板的一侧,Optionally, the barrier structure further includes a second structure, the second structure is located on a side of the first structure away from the base substrate,

第二结构包括沿远离衬底基板的方向依次层叠设置的第四金属子结构、第五金属子结构和第六金属子结构;第五金属子结构在衬底基板的正投影,位于第四金属子结构和第六金属子结构在衬底基板的正投影内;且第五金属子结构在衬底基板的正投影的边界,与第四金属子结构在衬底基板的正投影的边界具有第二设定距离。The second structure includes a fourth metal substructure, a fifth metal substructure, and a sixth metal substructure that are sequentially stacked in a direction away from the substrate; the orthographic projection of the fifth metal substructure on the substrate is located at the fourth metal substructure. The substructure and the sixth metal substructure are within the orthographic projection of the base substrate; and the boundary of the orthographic projection of the fifth metal substructure on the substrate substrate has a boundary with the boundary of the orthographic projection of the fourth metal substructure on the substrate substrate. 2. Set the distance.

可选地,第五金属子结构在衬底基板的正投影,位于第二金属子结构在衬底基板的正投影内。Optionally, the orthographic projection of the fifth metal substructure on the substrate is located within the orthographic projection of the second metal substructure on the substrate.

可选地,第六金属子结构在衬底基板的正投影,与第四金属子结构在衬底基板的正投影重叠。Optionally, the orthographic projection of the sixth metal substructure on the substrate overlaps with the orthographic projection of the fourth metal substructure on the substrate.

可选地,像素结构包括第二金属层,与第二结构同层设置,第二金属层的材料与第二结构的材料相同。Optionally, the pixel structure includes a second metal layer disposed on the same layer as the second structure, and the material of the second metal layer is the same as that of the second structure.

可选地,显示面板包括下述至少一项:Optionally, the display panel includes at least one of the following:

第一金属层包括沿远离衬底基板的方向依次层叠设置的第一金属子层、第二金属子层和第三金属子层;第一金属子层和第三金属子层的材料相同,第二金属子层的材料不同于第一金属子层和第三金属子层的材料;第一金属子层和第三金属子层的厚度均不小于300微米且不大于600微米,第二金属子层的厚度不小于6000微米且不大于6500微米;The first metal layer includes a first metal sub-layer, a second metal sub-layer and a third metal sub-layer stacked in sequence along the direction away from the base substrate; the materials of the first metal sub-layer and the third metal sub-layer are the same, and the second metal sub-layer The material of the second metal sublayer is different from the material of the first metal sublayer and the third metal sublayer; the thickness of the first metal sublayer and the third metal sublayer is not less than 300 microns and not more than 600 microns, and the second metal sublayer The thickness of the layer is not less than 6000 microns and not more than 6500 microns;

第二金属层包括沿远离衬底基板的方向依次层叠设置的第四金属子层、第五金属子层和第六金属子层;第四金属子层和第六金属子层的材料相同,第五金属子层的材料不同于第四金属子层和第六金属子层的材料;第四金属子层和第六金属子层的厚度均不小于300微米且不大于600微米,第五金属子层的厚度不小于6000微米且不大于6500微米。The second metal layer includes a fourth metal sublayer, a fifth metal sublayer and a sixth metal sublayer stacked in sequence along the direction away from the base substrate; the materials of the fourth metal sublayer and the sixth metal sublayer are the same, and the first The material of the fifth metal sublayer is different from the material of the fourth metal sublayer and the sixth metal sublayer; the thickness of the fourth metal sublayer and the sixth metal sublayer is not less than 300 microns and not more than 600 microns, and the fifth metal sublayer The thickness of the layer is not less than 6000 micrometers and not more than 6500 micrometers.

可选地,第一设定距离和第二设定距离的取值范围均不小于0.3微米且不大于0.5微米。Optionally, the value ranges of the first set distance and the second set distance are not less than 0.3 microns and not more than 0.5 microns.

可选地,阻隔区域设置有至少两个阻隔结构,任意相邻两个阻隔结构之间的距离不小于8微米且不大于15微米。Optionally, the barrier region is provided with at least two barrier structures, and the distance between any two adjacent barrier structures is not less than 8 microns and not greater than 15 microns.

可选地,第五金属子结构在衬底基板的正投影,位于第二金属子结构在衬底基板的正投影内。Optionally, the orthographic projection of the fifth metal substructure on the substrate is located within the orthographic projection of the second metal substructure on the substrate.

可选地,第二金属子结构在衬底基板的正投影,与第五金属子结构在衬底基板的正投影相重叠。Optionally, the orthographic projection of the second metal substructure on the substrate overlaps with the orthographic projection of the fifth metal substructure on the substrate.

可选地,显示面板还包括:Optionally, the display panel also includes:

第一钝化结构,设置于第三金属子结构远离衬底基板的一侧;第一钝化结构在衬底基板的正投影覆盖第三金属子结构在衬底基板的正投影;The first passivation structure is disposed on the side of the third metal substructure away from the base substrate; the orthographic projection of the first passivation structure on the base substrate covers the orthographic projection of the third metal substructure on the base substrate;

第二钝化结构,设置于第六金属子结构远离衬底基板的一侧;第二钝化结构在衬底基板的正投影覆盖第六金属子结构在衬底基板的正投影。The second passivation structure is disposed on a side of the sixth metal substructure away from the substrate; the orthographic projection of the second passivation structure on the substrate covers the orthographic projection of the sixth metal substructure on the substrate.

可选地,显示面板还包括:有机发光层,设置于第二钝化结构远离衬底基板的一侧。Optionally, the display panel further includes: an organic light emitting layer disposed on a side of the second passivation structure away from the base substrate.

第二个方面,本申请实施例提供了一种显示设备,包括:上述第一个方面所提供的显示面板。In a second aspect, an embodiment of the present application provides a display device, including: the display panel provided in the first aspect above.

本申请实施例提供的技术方案带来的有益技术效果包括:The beneficial technical effects brought by the technical solutions provided by the embodiments of the present application include:

在本申请实施例所提供的显示面板中,通过在衬底基板位于阻隔区域的一侧设置阻隔结构,阻隔结构中第二金属子结构在衬底基板的正投影,位于第一金属子结构和第三金属子结构在衬底基板的正投影内,即第二金属子结构相对于第一金属子结构侧向缩进,使得阻隔结构的截面形状设置为工字形,从而能够提高阻隔结构的阻隔性能,能够提高显示面板的可靠性。In the display panel provided by the embodiment of the present application, by setting the barrier structure on the side of the base substrate located in the barrier region, the orthographic projection of the second metal substructure in the barrier structure on the base substrate is located between the first metal substructure and the The third metal substructure is within the orthographic projection of the substrate, that is, the second metal substructure is laterally indented relative to the first metal substructure, so that the cross-sectional shape of the barrier structure is set to an I-shape, thereby improving the barrier of the barrier structure performance, which can improve the reliability of the display panel.

而且,通过设置位于显示区域的像素结构的第一金属层与第一结构同层设置,且两者的材料相同,从而能够简化阻隔结构的制备工艺,能够降低阻隔结构的制备难度,能够降低显示面板的制备成本。Moreover, by setting the first metal layer of the pixel structure located in the display area on the same layer as the first structure, and the materials of the two are the same, the preparation process of the barrier structure can be simplified, the difficulty of preparing the barrier structure can be reduced, and the display can be reduced. Panel preparation costs.

本申请附加的方面和优点将在下面的描述中部分给出,这些将从下面的描述中变得明显,或通过本申请的实践了解到。Additional aspects and advantages of the application will be set forth in part in the description which follows, and will become apparent from the description, or may be learned by practice of the application.

附图说明Description of drawings

本申请上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present application will become apparent and easy to understand from the following description of the embodiments in conjunction with the accompanying drawings, wherein:

图1为本申请实施例提供的一种显示面板的制备方法的流程示意图;FIG. 1 is a schematic flow chart of a method for preparing a display panel provided in an embodiment of the present application;

图2为本申请实施例提供的另一种显示面板的制备方法的流程示意图;FIG. 2 is a schematic flowchart of another method for preparing a display panel provided in the embodiment of the present application;

图3为在第二钝化层远离衬底基板的一侧制备光阻结构后的结构示意图;Fig. 3 is a structural schematic diagram after preparing a photoresist structure on the side of the second passivation layer away from the base substrate;

图4为在第二金属结构和第一金属结构的端部形成有阻挡部的结构示意图;FIG. 4 is a structural schematic diagram of barriers formed at the ends of the second metal structure and the first metal structure;

图5为剥离阻挡部和光阻结构后得到的结构示意图;5 is a schematic diagram of the structure obtained after stripping off the blocking portion and the photoresist structure;

图6为刻蚀第二金属结构和第一金属结构得到一种阻隔结构后的结构示意图;Fig. 6 is a structural schematic diagram after etching the second metal structure and the first metal structure to obtain a barrier structure;

图7为本申请实施例提供的图6所示结构的俯视示意图;Fig. 7 is a schematic top view of the structure shown in Fig. 6 provided by the embodiment of the present application;

图8为刻蚀第二金属结构和第一金属结构得到另一种阻隔结构后的结构示意图;Fig. 8 is a structural schematic diagram after etching the second metal structure and the first metal structure to obtain another barrier structure;

图9为剥离位于衬底基板位于显示区域的一侧光阻层并制备像素定义结构和有机发光层后的示意图;FIG. 9 is a schematic diagram after peeling off the photoresist layer on the side of the base substrate located in the display area and preparing a pixel definition structure and an organic light-emitting layer;

图10为本申请实施例提供的一种显示面板的结构示意图;FIG. 10 is a schematic structural diagram of a display panel provided by an embodiment of the present application;

图11为本申请实施例提供的另一种显示面板的结构示意图;FIG. 11 is a schematic structural diagram of another display panel provided by an embodiment of the present application;

图12为本申请实施例提供的又一种显示面板的结构示意图。FIG. 12 is a schematic structural diagram of another display panel provided by an embodiment of the present application.

附图标记说明:Explanation of reference signs:

10-衬底基板;10-substrate substrate;

20-阻隔结构;21-阻隔结构的第一结构;211-第一金属子结构;212-第二金属子结构;213-第三金属子结构;22-阻隔结构20的第二结构;221-第四金属子结构;222-第五金属子结构;223-第六金属子结构;20—barrier structure; 21—the first structure of the barrier structure; 211—the first metal substructure; 212—the second metal substructure; 213—the third metal substructure; 22—the second structure of the barrier structure 20; 221— 4th metal substructure; 222-fifth metal substructure; 223-sixth metal substructure;

30-第一钝化结构;30 - a first passivation structure;

40-第二钝化结构;40 - a second passivation structure;

60-阻挡部;60 - blocking part;

101-缓冲层;101-buffer layer;

102-第一栅极绝缘层;102 - the first gate insulating layer;

103-第二栅极绝缘层;103 - the second gate insulating layer;

104-有源层;104 - active layer;

105-第一栅极层;105 - the first gate layer;

106-层间绝缘层;106-interlayer insulating layer;

107-第一金属层;1071-第一金属结构;107-first metal layer; 1071-first metal structure;

108-第一平坦化层;108 - the first planarization layer;

109-第一钝化层;109 - a first passivation layer;

110-第二金属层;1101-第二金属结构;110-second metal layer; 1101-second metal structure;

111-第二钝化层;111 - the second passivation layer;

112-第二平坦化层;112 - the second planarization layer;

113-阳极层;113 - anode layer;

114-光阻层;1141-光阻结构;114-photoresist layer; 1141-photoresist structure;

115-第二栅极层;115 - the second gate layer;

116-像素定义结构;116-pixel definition structure;

117-有机发光层;117-organic light-emitting layer;

201-显示区域;202-阻隔区域。201-display area; 202-barrier area.

具体实施方式Detailed ways

下面详细描述本申请,本申请的实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的部件或具有相同或类似功能的部件。此外,如果已知技术的详细描述对于示出的本申请的特征是不必要的,则将其省略。下面通过参考附图描述的实施例是示例性的,仅用于解释本申请,而不能解释为对本申请的限制。The present application is described in detail below, and examples of embodiments of the present application are shown in the drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. Also, detailed descriptions of known technologies will be omitted if they are not necessary to illustrate the features of the present application. The embodiments described below by referring to the figures are exemplary only for explaining the present application, and are not construed as limiting the present application.

本技术领域技术人员可以理解,除非另外定义,这里使用的所有术语(包括技术术语和科学术语),具有与本申请所属领域中的普通技术人员的一般理解相同的意义。还应该理解的是,诸如通用字典中定义的那些术语,应该被理解为具有与现有技术的上下文中的意义一致的意义,并且除非像这里一样被特定定义,否则不会用理想化或过于正式的含义来解释。Those skilled in the art can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meanings as commonly understood by those of ordinary skill in the art to which this application belongs. It should also be understood that terms, such as those defined in commonly used dictionaries, should be understood to have meanings consistent with their meaning in the context of the prior art, and unless specifically defined as herein, are not intended to be idealized or overly Formal meaning to explain.

本技术领域技术人员可以理解,除非特意声明,这里使用的单数形式“一”、“一个”、“所述”和“该”也可包括复数形式。应该进一步理解的是,本申请的说明书中使用的措辞“包括”是指存在所述特征、整数、步骤、操作、元件和/或组件,但是并不排除存在或添加一个或多个其他特征、整数、步骤、操作、元件、组件和/或它们的组。应该理解,当我们称元件被“连接”到另一元件时,它可以直接连接到其他元件,或者也可以存在中间元件。这里使用的措辞“和/或”包括一个或更多个相关联的列出项的全部或任一单元和全部组合。Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, elements and/or components, but does not exclude the presence or addition of one or more other features, Integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The expression "and/or" used herein includes all or any elements and all combinations of one or more associated listed items.

本申请的发明人进行研究发现,对于异形有机发光显示面板而言,由于发光区的形状不同于传统的矩形发光区,需要设置阻隔结构对有机发光层、阴极等进行水汽阻挡隔离,以保障有机发光显示面板密封性。目前,阻隔结构的截面形状多为工字形,在有机发光显示面板的制备过程中,需要通过刻蚀工艺,利用不同金属材料对刻蚀液的刻蚀速率的差异形成工字形的阻隔结构。但是,在阻隔结构的制备过程中,阻隔结构的两个容易生成阻挡部等副产物,导致刻蚀液难以直接接触阻隔结构的金属材料,导致工字形的阻隔结构的形成率较低,进而导致有机发光显示面板的成品率较低。The inventors of the present application conducted research and found that for special-shaped organic light-emitting display panels, since the shape of the light-emitting area is different from the traditional rectangular light-emitting area, it is necessary to set up a barrier structure to block and isolate the organic light-emitting layer and cathode from water vapor, so as to protect the organic light-emitting area. Luminous display panel hermeticity. At present, the cross-sectional shape of the barrier structure is mostly I-shaped. In the manufacturing process of the organic light-emitting display panel, it is necessary to use the difference in the etching rate of the etching solution for different metal materials to form the I-shaped barrier structure through an etching process. However, during the preparation process of the barrier structure, the two parts of the barrier structure are likely to generate by-products such as barrier parts, which makes it difficult for the etching solution to directly contact the metal material of the barrier structure, resulting in a low formation rate of the I-shaped barrier structure, which in turn leads to The yield rate of organic light emitting display panels is relatively low.

而且,现有工字形的阻隔结构远离衬底基板的一侧通常是单层金属结构,在后续的有机发光显示面板的制备工艺过程中,单层金属结构容易出现断裂、塌陷等问题,导致工字形的阻隔结构失去阻挡作用,进一步降低工字形的阻隔结构的形成率。Moreover, the side of the existing I-shaped barrier structure away from the substrate is usually a single-layer metal structure. During the subsequent manufacturing process of the organic light-emitting display panel, the single-layer metal structure is prone to problems such as fracture and collapse, resulting in The zigzag barrier structure loses its barrier effect, further reducing the formation rate of the I-shaped barrier structure.

本申请提供的显示面板及其制备方法、显示设备,旨在解决现有技术的如上技术问题。The display panel, its manufacturing method, and display device provided by the present application aim to solve the above technical problems in the prior art.

下面以具体地实施例对本申请的技术方案以及本申请的技术方案如何解决上述技术问题进行详细说明。The technical solution of the present application and how the technical solution of the present application solves the above technical problems will be described in detail below with specific embodiments.

本申请实施例提供了一种显示面板的制备方法,该制备方法的流程示意图如图1所示,包括步骤S101-S105:The embodiment of the present application provides a method for manufacturing a display panel. The schematic flow chart of the method is shown in Figure 1, including steps S101-S105:

S101、在衬底基板10位于阻隔区域202的一侧依次制备第一金属层107和第一钝化层109。S101 , sequentially preparing a first metal layer 107 and a first passivation layer 109 on the side of the base substrate 10 located at the barrier region 202 .

S102、在第一钝化层109远离衬底基板10的一侧制备光阻结构1141;S102, preparing a photoresist structure 1141 on the side of the first passivation layer 109 away from the base substrate 10;

S103、基于光阻结构1141图案化第一钝化层109和第一金属层107,得到第一钝化结构和第一金属结构,且第一金属结构的端部形成有阻挡部。S103 , patterning the first passivation layer 109 and the first metal layer 107 based on the photoresist structure 1141 to obtain a first passivation structure and a first metal structure, and a barrier portion is formed at an end of the first metal structure.

S104、剥离阻挡部60和光阻结构1141。S104 , peeling off the blocking portion 60 and the photoresist structure 1141 .

S105、刻蚀第一金属结构得到阻隔结构20的第一结构21,使得第一结构21中、第二金属子结构212在衬底基板10的正投影,位于第一金属子结构211和第三金属子结构213在衬底基板10的正投影内;第一金属子结构211、第二金属子结构212和第三金属子结构213层叠设置。S105. Etching the first metal structure to obtain the first structure 21 of the barrier structure 20, so that in the first structure 21, the orthographic projection of the second metal substructure 212 on the base substrate 10 is located between the first metal substructure 211 and the third The metal substructure 213 is within the orthographic projection of the substrate 10 ; the first metal substructure 211 , the second metal substructure 212 and the third metal substructure 213 are stacked.

在本申请实施例提供的显示面板的制备方法中,在基于光阻结构1141图案化第一钝化层109和第一金属层107得到第一钝化结构30和第一金属结构1071后,及时剥离在第一金属结构1071的端部形成的阻挡部60,能够避免阻挡部60对后续第一金属结构1071刻蚀过程的影响,以保障第一结构21中、第二金属子结构212在衬底基板10的正投影,位于第一金属子结构211和第三金属子结构213在衬底基板10的正投影内,从而能够保障第一结构21的形成率,进而能够保障阻隔结构20的形成率,能够保障有机发光显示面板的成品率。In the manufacturing method of the display panel provided by the embodiment of the present application, after the first passivation layer 109 and the first metal layer 107 are patterned based on the photoresist structure 1141 to obtain the first passivation structure 30 and the first metal structure 1071, in time Stripping off the barrier portion 60 formed at the end of the first metal structure 1071 can avoid the impact of the barrier portion 60 on the subsequent etching process of the first metal structure 1071, so as to ensure that the second metal substructure 212 in the first structure 21 is formed on the substrate. The orthographic projection of the base substrate 10 is located within the orthographic projection of the first metal substructure 211 and the third metal substructure 213 on the base substrate 10, so that the formation rate of the first structure 21 can be ensured, and the formation of the barrier structure 20 can be ensured. The rate can ensure the yield rate of the organic light emitting display panel.

而且,由于在第一金属层107远离衬底基板10的一侧制备有第一钝化层109,使得形成的第一结构21的第三金属子结构213远离衬底基板10的一侧形成有第一钝化结构30,第一钝化结构30能够增强第三金属子结构213的刚性,从而能够降低第三金属子结构213出现断裂、塌陷等问题的几率,从而能够保障阻隔结构20的可靠性,保障阻隔结构20的形成率。Moreover, since the first passivation layer 109 is prepared on the side of the first metal layer 107 away from the base substrate 10, the third metal substructure 213 of the formed first structure 21 is formed on the side away from the base substrate 10. The first passivation structure 30, the first passivation structure 30 can enhance the rigidity of the third metal substructure 213, thereby reducing the probability of problems such as fracture and collapse of the third metal substructure 213, thereby ensuring the reliability of the barrier structure 20 properties, ensuring the formation rate of the barrier structure 20 .

在本申请的一个实施例中,上述步骤S105具体包括:对第一金属结构的第一金属子层、第二金属子层和第三金属子层进行刻蚀,形成第一结构21的第一金属子结构211、第二金属子结构212和第三金属子结构213,直至第二金属子结构212在衬底基板10的正投影的边界,与第一金属子结构211和第三金属子结构213在衬底基板10的正投影的边界具有第一设定距离d1。In one embodiment of the present application, the above step S105 specifically includes: etching the first metal sublayer, the second metal sublayer and the third metal sublayer of the first metal structure to form the first metal sublayer of the first structure 21. The metal substructure 211, the second metal substructure 212 and the third metal substructure 213, until the boundary of the orthographic projection of the second metal substructure 212 on the base substrate 10, and the first metal substructure 211 and the third metal substructure The boundary of the orthographic projection of 213 on the base substrate 10 has a first set distance d1.

本申请实施例中,通过限定第二金属子结构212在衬底基板10的正投影的边界,与第一金属子结构211和第三金属子结构213在衬底基板10的正投影的边界具有第一设定距离d1,使得准备得到的阻隔结构的满足要求,以保障阻隔结构的性能,从而能够进一步保障阻隔结构的形成率,能够保障有机发光显示面板的成品率。In the embodiment of the present application, by defining the boundary of the orthographic projection of the second metal substructure 212 on the base substrate 10, it has the same The first set distance d1 makes the barrier structure to be obtained meet the requirements to ensure the performance of the barrier structure, so as to further ensure the formation rate of the barrier structure and the yield rate of the organic light emitting display panel.

应该说明的是,如图10和图11所示,第一设定距离d1指的是,沿显示区域201指向阻隔区域202的方向,第二金属子结构212在衬底基板10的正投影的边界,与第一金属子结构211和第三金属子结构213在衬底基板10的正投影的边界的距离。It should be noted that, as shown in FIG. 10 and FIG. 11 , the first set distance d1 refers to the distance of the orthographic projection of the second metal substructure 212 on the base substrate 10 along the direction from the display area 201 to the barrier area 202 Boundary, the distance from the boundary of the orthographic projection of the first metal substructure 211 and the third metal substructure 213 on the base substrate 10 .

本申请实施例提供了另一种显示面板的制备方法,该制备方法的流程示意图如图2所示,包括步骤S201-S205:The embodiment of the present application provides another method for preparing a display panel. The schematic flow chart of the preparation method is shown in FIG. 2 , including steps S201-S205:

S201、在衬底基板10位于阻隔区域202的一侧依次制备第一金属层107和第一钝化层109。S201 , sequentially prepare a first metal layer 107 and a first passivation layer 109 on the side of the base substrate 10 located at the barrier region 202 .

在一些可能的实施方式中,在衬底基板10位于阻隔区域202的一侧依次制备第一金属层107和第一钝化层109。可选地,第一金属层107包括层叠设置的至少三层金属子层,且金属子层采用不同的金属材料制成,在后续制备工艺中,利用不同金属材料对刻蚀液的刻蚀速率的差异形成工字形的阻隔结构20。可选地,本申请实施例中,第一金属层107包括层叠设置的三层金属子层,且夹设于上下两层金属子层之间的金属子层的刻蚀速率大于上下两层金属子层的刻蚀速率。可选地,上下两层金属子层采用Ti(钛)制成,夹设于上下两层金属子层之间的金属子层采用Al(铝)制成。In some possible implementation manners, the first metal layer 107 and the first passivation layer 109 are sequentially prepared on the side of the base substrate 10 located at the barrier region 202 . Optionally, the first metal layer 107 includes at least three metal sub-layers stacked, and the metal sub-layers are made of different metal materials. The difference forms an I-shaped barrier structure 20. Optionally, in the embodiment of the present application, the first metal layer 107 includes three layers of metal sub-layers stacked, and the etching rate of the metal sub-layer interposed between the upper and lower two metal sub-layers is greater than that of the upper and lower two metal sub-layers. The etch rate of the sublayer. Optionally, the upper and lower metal sublayers are made of Ti (titanium), and the metal sublayer sandwiched between the upper and lower metal sublayers is made of Al (aluminum).

在一些可能的实施方式中,第一金属层107和第一钝化层109可与位于显示区域201的像素结构的相关膜层同时制备。这样可以简化阻隔结构20的制备工艺,降低阻隔结构20的制备难度,降低阻隔结构20的制备成本,从而降低显示面板的制备成本。可选地,本申请实施例中,位于阻隔区域202的第一金属层107和位于显示区域201的第一金属层107同时制备而成,位于阻隔区域202的第一钝化层109和位于显示区域201的第一钝化层109同时制备而成。In some possible implementations, the first metal layer 107 and the first passivation layer 109 can be prepared simultaneously with the related film layers of the pixel structure located in the display area 201 . In this way, the manufacturing process of the barrier structure 20 can be simplified, the difficulty of manufacturing the barrier structure 20 can be reduced, and the manufacturing cost of the barrier structure 20 can be reduced, thereby reducing the manufacturing cost of the display panel. Optionally, in the embodiment of the present application, the first metal layer 107 located in the barrier area 202 and the first metal layer 107 located in the display area 201 are prepared at the same time, the first passivation layer 109 located in the barrier area 202 and the first metal layer 107 located in the display area The first passivation layer 109 in the region 201 is prepared at the same time.

可选地,在衬底基板10位于阻隔区域202的一侧依次制备第一金属层107和第一钝化层109之前,还包括:在衬底基板10位于阻隔区域202的一侧制备层间绝缘层106,位于阻隔区域202的层间绝缘层106和位于显示区域201的层间绝缘层106同时制备而成。然后在层间绝缘层106远离衬底基板10的一侧依次制备第一金属层107和第一钝化层109。Optionally, before sequentially preparing the first metal layer 107 and the first passivation layer 109 on the side of the base substrate 10 located at the barrier region 202 , further comprising: preparing an interlayer on the side of the base substrate 10 located at the barrier region 202 The insulating layer 106 , the interlayer insulating layer 106 located in the barrier area 202 and the interlayer insulating layer 106 located in the display area 201 are prepared simultaneously. Then, the first metal layer 107 and the first passivation layer 109 are sequentially prepared on the side of the interlayer insulating layer 106 away from the base substrate 10 .

S202、在第一钝化层109远离衬底基板10的一侧依次制备第二金属层110和第二钝化层111。S202 , preparing the second metal layer 110 and the second passivation layer 111 in sequence on the side of the first passivation layer 109 away from the base substrate 10 .

在一些可能的实施方式中,在第一钝化层109远离衬底基板10的一侧依次制备第二金属层110和第二钝化层111。可选地,第二金属层110包括层叠设置的至少三层金属子层,且金属子层采用不同的金属材料制成,在后续制备工艺中,利用不同金属材料对刻蚀液的刻蚀速率的差异形成工字形的阻隔结构20。可选地,本申请实施例中,第二金属层110包括层叠设置的三层金属子层,且夹设于上下两层金属子层之间的金属子层的刻蚀速率大于上下两层金属子层的刻蚀速率。可选地,上下两层金属子层采用Ti(钛)制成,夹设于上下两层金属子层之间的金属子层采用Al(铝)制成。In some possible implementation manners, the second metal layer 110 and the second passivation layer 111 are sequentially prepared on the side of the first passivation layer 109 away from the base substrate 10 . Optionally, the second metal layer 110 includes at least three metal sub-layers stacked, and the metal sub-layers are made of different metal materials. The difference forms an I-shaped barrier structure 20. Optionally, in the embodiment of the present application, the second metal layer 110 includes three layers of metal sub-layers stacked, and the etching rate of the metal sub-layer sandwiched between the upper and lower two metal sub-layers is greater than that of the upper and lower metal sub-layers. The etch rate of the sublayer. Optionally, the upper and lower metal sublayers are made of Ti (titanium), and the metal sublayer sandwiched between the upper and lower metal sublayers is made of Al (aluminum).

在一些可能的实施方式中,第二金属层110和第二钝化层111可与位于显示区域201的像素结构的相关膜层同时制备。这样可以进一步简化阻隔结构20的制备工艺,进一步降低阻隔结构20的制备难度,进一步降低阻隔结构20的制备成本,从而进一步降低显示面板的制备成本。可选地,本申请实施例中,位于阻隔区域202的第二金属层110和位于显示区域201的第二金属层110同时制备而成,位于阻隔区域202的第二钝化层111和位于显示区域201的第二钝化层111同时制备而成。In some possible implementations, the second metal layer 110 and the second passivation layer 111 can be prepared simultaneously with the related film layers of the pixel structure located in the display area 201 . In this way, the manufacturing process of the barrier structure 20 can be further simplified, the difficulty of manufacturing the barrier structure 20 can be further reduced, and the manufacturing cost of the barrier structure 20 can be further reduced, thereby further reducing the manufacturing cost of the display panel. Optionally, in this embodiment of the present application, the second metal layer 110 located in the barrier area 202 and the second metal layer 110 located in the display area 201 are prepared at the same time, the second passivation layer 111 located in the barrier area 202 and the second metal layer 110 located in the display area The second passivation layer 111 in the region 201 is prepared at the same time.

S203、在第二钝化层111远离衬底基板10的一侧制备光阻结构1141。S203 , preparing a photoresist structure 1141 on a side of the second passivation layer 111 away from the base substrate 10 .

在一些可能的实施方式中,在第二钝化层111位于阻隔区域202部分的远离衬底基板10的一侧制备光阻结构1141,如图3所示。可选地,用于制备光阻结构1141的光阻层114可与位于显示区域201的像素结构的光阻层114同时制备。本申请实施例中,在第二钝化层111远离衬底基板10的一侧制备得到两个光阻结构1141。In some possible implementation manners, a photoresist structure 1141 is prepared on a side of the second passivation layer 111 located in the blocking region 202 away from the base substrate 10 , as shown in FIG. 3 . Optionally, the photoresist layer 114 used to prepare the photoresist structure 1141 can be prepared simultaneously with the photoresist layer 114 of the pixel structure located in the display area 201 . In the embodiment of the present application, two photoresist structures 1141 are prepared on the side of the second passivation layer 111 away from the base substrate 10 .

应该说明的是,如图3所示,用于制备像素结构的区域为显示区域201,用于制备有阻隔结构20的区域为阻隔区域202。It should be noted that, as shown in FIG. 3 , the region for preparing the pixel structure is the display region 201 , and the region for preparing the barrier structure 20 is the barrier region 202 .

S204、基于光阻结构1141图案化第二钝化层111、第二金属层110、第一钝化层109和第一金属层107,得到第二钝化结构40、第二金属结构1101、第一钝化结构30和第一金属结构1071,且第二金属结构1101和第一金属结构1071的端部均形成有阻挡部60。S204, pattern the second passivation layer 111, the second metal layer 110, the first passivation layer 109, and the first metal layer 107 based on the photoresist structure 1141, to obtain the second passivation structure 40, the second metal structure 1101, the second A passivation structure 30 and the first metal structure 1071 , and the ends of the second metal structure 1101 and the first metal structure 1071 are formed with barrier portions 60 .

在一些可能的实施方式中,基于两个光阻结构1141图案化第二钝化层111、第二金属层110、第一钝化层109和第一金属层107,得到两个第二钝化结构40、两个第二金属结构1101、两个第一钝化结构30和两个第一金属结构1071,且两个第二金属结构1101和两个第一金属结构1071的端部均形成有阻挡部60,如图4所示。In some possible implementations, the second passivation layer 111, the second metal layer 110, the first passivation layer 109, and the first metal layer 107 are patterned based on the two photoresist structures 1141 to obtain two second passivation layers. structure 40, two second metal structures 1101, two first passivation structures 30, and two first metal structures 1071, and the ends of the two second metal structures 1101 and the two first metal structures 1071 are formed with The blocking portion 60 is shown in FIG. 4 .

可选地,基于两个光阻结构1141,使用CF4(四氟化碳)和O2(氧气)的组合气氛,对第二钝化层111进行干刻,使得第二钝化层111图案化后形成第二钝化结构40;继续使用BCl3(三氯化硼)和Cl2(氯气)的组合气氛,对第二金属层110进行干刻,使得第二金属层110图案化后形成第二金属结构1101,且在干刻过程中,会在第二金属结构1101的两个端部形成阻挡部60。采用CF4(四氟化碳)和O2(氧气)的组合气氛,对第一钝化层109进行干刻,使得第一钝化层109图案化后形成第一钝化结构30;继续使用BCl3(三氯化硼)和Cl2(氯气)的组合气氛,对第一金属层107进行干刻,使得第一金属层107图案化后形成第一金属结构1071,且在干刻过程中,会在第一金属结构1071的两个端部形成阻挡部60。Optionally, based on the two photoresist structures 1141, the second passivation layer 111 is dry etched using a combined atmosphere of CF4 (carbon tetrafluoride) and O2 (oxygen), so that after the second passivation layer 111 is patterned Form the second passivation structure 40; continue to use the combined atmosphere of BCl3 (boron trichloride) and Cl2 (chlorine gas) to dry-etch the second metal layer 110, so that the second metal layer 110 is patterned to form a second metal structure 1101 , and during the dry etching process, barrier portions 60 will be formed at both ends of the second metal structure 1101 . Adopt the combined atmosphere of CF4 (carbon tetrafluoride) and O2 (oxygen) to dry etch the first passivation layer 109, so that the first passivation layer 109 is patterned to form the first passivation structure 30; continue to use BCl3 ( The combined atmosphere of boron trichloride) and Cl2 (chlorine gas) performs dry etching on the first metal layer 107, so that the first metal layer 107 is patterned to form the first metal structure 1071, and in the dry etching process, the first metal structure 1071 will be formed in the first metal layer 107 Two ends of a metal structure 1071 form the blocking portion 60 .

应该说明的是,在显示面板的制备过程中,由于位于阻隔区域202的第一金属层107和位于显示区域201的第一金属层107同时制备而成,且对于位于显示区域201的第一金属层107会进行图案化工艺进行处理,因此,可以在位于显示区域201的第一金属层107进行图案化处理的过程中,同时,图案化处理位于阻隔区域202的第一金属层107,这样在步骤S204中可以省去基于光阻结构1141图案化第一金属层107的工艺步骤。可以进一步简化阻隔结构20的制备工艺,进一步降低阻隔结构20的制备难度,进一步降低阻隔结构20的制备成本,从而进一步降低显示面板的制备成本。It should be noted that, in the manufacturing process of the display panel, since the first metal layer 107 located in the barrier area 202 and the first metal layer 107 located in the display area 201 are prepared at the same time, and for the first metal layer 107 located in the display area 201 The layer 107 will be processed by a patterning process. Therefore, during the patterning process of the first metal layer 107 located in the display area 201, the first metal layer 107 located in the barrier area 202 can be patterned at the same time, so that in In step S204 , the process step of patterning the first metal layer 107 based on the photoresist structure 1141 can be omitted. The manufacturing process of the barrier structure 20 can be further simplified, the difficulty of manufacturing the barrier structure 20 can be further reduced, and the manufacturing cost of the barrier structure 20 can be further reduced, thereby further reducing the manufacturing cost of the display panel.

可选地,光阻结构1141的厚度不小于1.5微米,不大于1.8微米Optionally, the thickness of the photoresist structure 1141 is not less than 1.5 microns, not more than 1.8 microns

S205、剥离阻挡部60和光阻结构1141。S205 , peeling off the blocking portion 60 and the photoresist structure 1141 .

在一些可能的实施方式中,采用湿法剥离工艺剥离位于第二金属结构1101两端部的阻挡部60、位于第一金属结构1071两端部的阻挡部60和位于第二钝化层111远离衬底基板10的一侧的光阻结构1141,得到如图5所示的结构。In some possible implementations, a wet stripping process is used to strip the barrier portions 60 located at both ends of the second metal structure 1101 , the barrier portions 60 located at both ends of the first metal structure 1071 , and the barrier portions 60 located at both ends of the second passivation layer 111 away from the The photoresist structure 1141 on one side of the base substrate 10 has a structure as shown in FIG. 5 .

S206、刻蚀第一金属结构1071和第二金属结构1101,分别得到阻隔结构20的第一结构21和第二结构22,使得第二结构22中、第五金属子结构222在衬底基板10的正投影,位于第四金属子结构221和第六金属子结构223的在衬底基板10的正投影内;并使得第一结构21中、第二金属子结构212在衬底基板10的正投影,位于第一金属子结构211和第三金属子结构213在衬底基板10的正投影内。S206, etching the first metal structure 1071 and the second metal structure 1101 to obtain the first structure 21 and the second structure 22 of the barrier structure 20 respectively, so that in the second structure 22, the fifth metal substructure 222 is on the base substrate 10 The orthographic projection of the fourth metal substructure 221 and the sixth metal substructure 223 are located within the orthographic projection of the base substrate 10; and make the second metal substructure 212 in the first structure 21 The projection is located within the orthographic projection of the first metal substructure 211 and the third metal substructure 213 on the base substrate 10 .

可选地,第四金属子结构221、第五金属子结构222和第六金属子结构223层叠设置。可选地,第一金属子结构211、第二金属子结构212和第三金属子结构213层叠设置。Optionally, the fourth metal substructure 221 , the fifth metal substructure 222 and the sixth metal substructure 223 are stacked. Optionally, the first metal substructure 211 , the second metal substructure 212 and the third metal substructure 213 are stacked.

在一些可能的实施方式中,采用刻蚀液刻蚀处理图5所示的结构,由于第二金属结构1101中各层金属材料对刻蚀液的刻蚀速率的存在差异,使得第二结构22中、第五金属子结构222在衬底基板10的正投影,位于第四金属子结构221和第六金属子结构223的在衬底基板10的正投影内,即第五金属子结构222的端部相对于第四金属子结构221和第六金属子结构223均缩进。In some possible implementations, the structure shown in FIG. 5 is etched with an etchant. Due to the differences in the etch rates of the metal materials in the second metal structure 1101 to the etchant, the second structure 22 The orthographic projections of the middle and fifth metal substructures 222 on the substrate 10 are located within the orthographic projections of the fourth metal substructure 221 and the sixth metal substructure 223 on the substrate 10, that is, the fifth metal substructure 222 The ends are indented relative to both the fourth metal substructure 221 and the sixth metal substructure 223 .

同理,使得第一结构21中、第二金属子结构212在衬底基板10的正投影,位于第一金属子结构211和第三金属子结构213在衬底基板10的正投影内,即第二金属子结构212的端部相对于第一金属子结构211和第三金属子结构213均缩进,如图6所示。Similarly, in the first structure 21, the orthographic projection of the second metal substructure 212 on the substrate 10 is located within the orthographic projection of the first metal substructure 211 and the third metal substructure 213 on the substrate 10, that is The ends of the second metal substructure 212 are indented relative to the first metal substructure 211 and the third metal substructure 213 , as shown in FIG. 6 .

本申请实施例中,刻蚀液包括CH3COOH、HNO3和H3PO4,且CH3COOH的含量不小于10%,且不大于20%;HNO3的含量不小于1%,且不大于2.5%;H3PO4的含量不小于50%,且不大于60%。In the embodiment of the present application, the etching solution includes CH3COOH, HNO3 and H3PO4, and the content of CH3COOH is not less than 10% and not more than 20%; the content of HNO3 is not less than 1% and not more than 2.5%; the content of H3PO4 is not less than 50%, but not more than 60%.

可选地,图6中显示面板的阻隔区域202设置有两个阻隔结构20,每个阻隔结构20包括上下叠设的两个工字形结构,从而使得阻隔结构20为双重工字形结构,从而能够提高阻隔结构20的阻隔性能,提高了显示面板的可靠性。Optionally, the barrier area 202 of the display panel in FIG. 6 is provided with two barrier structures 20, and each barrier structure 20 includes two I-shaped structures stacked up and down, so that the barrier structure 20 is a double I-shaped structure, so that it can Improving the barrier performance of the barrier structure 20 improves the reliability of the display panel.

可选地,如图7所示,显示面板包括显示区域201和围绕显示区域201的阻隔区域202,阻隔区域202中设置有两个阻隔结构20。应该说明的是,本申请实施例中,第二金属子结构212在衬底基板10的正投影,与第五金属子结构222在衬底基板10的正投影相重叠,因此,图7中只用两条虚线表示第二金属子结构212和第五金属子结构222。Optionally, as shown in FIG. 7 , the display panel includes a display area 201 and a barrier area 202 surrounding the display area 201 , and two barrier structures 20 are disposed in the barrier area 202 . It should be noted that, in the embodiment of the present application, the orthographic projection of the second metal substructure 212 on the substrate 10 overlaps with the orthographic projection of the fifth metal substructure 222 on the substrate 10. Therefore, only The second metal substructure 212 and the fifth metal substructure 222 are represented by two dashed lines.

本申请实施例中,由于在第一金属层107远离衬底基板10的一侧制备有第一钝化层109,使得形成的第一结构21的第三金属子结构213远离衬底基板10的一侧形成有第一钝化结构30,第一钝化结构30能够增强第三金属子结构213的刚性,从而能够降低第三金属子结构213出现断裂、塌陷等问题的几率;同理,第二结构22中第六金属子结构223远离衬底基板10的一侧形成有第二钝化结构40,第二钝化结构40能够增强第六金属子结构223的刚性,从而能够降低第六金属子结构223出现断裂、塌陷等问题的几率,从而能够保障阻隔结构20的可靠性,保障阻隔结构20的形成率。In the embodiment of the present application, since the first passivation layer 109 is prepared on the side of the first metal layer 107 away from the base substrate 10 , the third metal substructure 213 of the formed first structure 21 is far away from the side of the base substrate 10 A first passivation structure 30 is formed on one side, and the first passivation structure 30 can enhance the rigidity of the third metal substructure 213, thereby reducing the probability of problems such as fracture and collapse of the third metal substructure 213; The second passivation structure 40 is formed on the side of the sixth metal substructure 223 in the second structure 22 away from the base substrate 10. The second passivation structure 40 can enhance the rigidity of the sixth metal substructure 223, thereby reducing the sixth metal substructure 223. The substructure 223 has the probability of problems such as fracture and collapse, thereby ensuring the reliability of the barrier structure 20 and the formation rate of the barrier structure 20 .

在本申请的一个实施例中,上述刻蚀第二金属结构1101得到阻隔结构20的第二结构22,使得第二结构22中、第五金属子结构222在衬底基板10的正投影,位于第四金属子结构221和第六金属子结构223的在衬底基板10的正投影内;第四金属子221结构、第五金属子结构222和第六金属子结构223层叠设置,包括:In one embodiment of the present application, the second structure 22 of the barrier structure 20 is obtained by etching the second metal structure 1101 above, so that in the second structure 22, the orthographic projection of the fifth metal substructure 222 on the substrate 10 is located at The fourth metal substructure 221 and the sixth metal substructure 223 are in the orthographic projection of the base substrate 10; the fourth metal substructure 221, the fifth metal substructure 222 and the sixth metal substructure 223 are stacked, including:

对第二金属结构1101的第四金属子层、第五金属子层和第六金属子层进行刻蚀,形成第二结构22的第四金属子结构221、第五金属子结构222和第六金属子结构223,直至第五金属子结构222在衬底基板10的正投影的边界,与第四金属子结构221和第六金属子结构223在衬底基板10的正投影的边界具有第二设定距离d2。The fourth metal sublayer, the fifth metal sublayer and the sixth metal sublayer of the second metal structure 1101 are etched to form the fourth metal substructure 221, the fifth metal substructure 222 and the sixth metal substructure of the second structure 22. The metal substructure 223, until the boundary of the orthographic projection of the fifth metal substructure 222 on the base substrate 10, has the second Set the distance d2.

本申请实施例中,通过限定第五金属子结构222在衬底基板10的正投影的边界,与第四金属子结构221和第六金属子结构223在衬底基板10的正投影的边界具有第二设定距离d2,使得准备得到的阻隔结构20的满足要求,以保障阻隔结构20的性能,从而能够进一步保障阻隔结构20的形成率,能够保障有机发光显示面板的成品率。In the embodiment of the present application, by defining the boundary of the orthographic projection of the fifth metal substructure 222 on the base substrate 10, it has the same The second set distance d2 makes the prepared barrier structure 20 meet the requirements to ensure the performance of the barrier structure 20, thereby further ensuring the formation rate of the barrier structure 20 and the yield rate of the organic light emitting display panel.

本申请实施例中,如图11所示,第二设定距离d2指的是,沿显示区域201指向阻隔区域202的方向,第五金属子结构222在衬底基板10的正投影的边界,与第四金属子结构221和第六金属子结构223在衬底基板10的正投影的边界之间的距离。In the embodiment of the present application, as shown in FIG. 11 , the second set distance d2 refers to the boundary of the orthographic projection of the fifth metal substructure 222 on the base substrate 10 along the direction from the display area 201 to the barrier area 202 , The distance between the boundaries of the fourth metal substructure 221 and the sixth metal substructure 223 on the orthographic projection of the base substrate 10 .

应该说明的是,在垂直于衬底基板10的方向,由于第一金属结构1071和第二金属结构1101的高度存在差异,在湿刻过程中,在刻蚀液从上向下流动的过程中,位于第一金属结构1071上方的第二金属结构1101接触的刻蚀液的流速更快,因此第二金属结构1101刻蚀的程度大于第一金属结构1071刻蚀的程度。从而使得形成的第二结构22中第二设定距离d2,大于第一结构21中第一设定距离d1,如图8所示。It should be noted that, in the direction perpendicular to the base substrate 10, due to the difference in height between the first metal structure 1071 and the second metal structure 1101, during the wet etching process, when the etchant flows from top to bottom The flow rate of the etching solution contacted by the second metal structure 1101 above the first metal structure 1071 is faster, so the degree of etching of the second metal structure 1101 is greater than that of the first metal structure 1071 . Therefore, the second set distance d2 in the formed second structure 22 is greater than the first set distance d1 in the first structure 21 , as shown in FIG. 8 .

在本申请的一个实施例中,在第一钝化层109远离衬底基板10的一侧制备光阻结构1141,包括:In one embodiment of the present application, the photoresist structure 1141 is prepared on the side of the first passivation layer 109 away from the base substrate 10, including:

在第一钝化层109远离衬底基板10的一侧制备光阻层114,使得光阻层114覆盖衬底基板10位于显示区域201一侧的准像素结构;图案化光阻层114,使得光阻层114位于阻隔区域202的部分形成光阻结构1141。Prepare a photoresist layer 114 on the side of the first passivation layer 109 away from the base substrate 10, so that the photoresist layer 114 covers the quasi-pixel structure of the base substrate 10 on the side of the display area 201; pattern the photoresist layer 114, so that A portion of the photoresist layer 114 located in the blocking region 202 forms a photoresist structure 1141 .

可选地,在第二钝化层111远离衬底基板10的一侧制备光阻层114,使得光阻层114覆盖衬底基板10位于显示区域201一侧的准像素结构,具体的,使得光阻层114覆盖准像素结构的阳极层113、第二钝化层111以及准像素结构各个膜层的端部,从而避免阻隔结构20的制备工艺对准像素结构产生影响;图案化光阻层114,使得光阻层114位于阻隔区域202的部分形成光阻结构1141。Optionally, a photoresist layer 114 is prepared on the side of the second passivation layer 111 away from the base substrate 10, so that the photoresist layer 114 covers the quasi-pixel structure of the base substrate 10 on the side of the display area 201, specifically, such that The photoresist layer 114 covers the anode layer 113 of the quasi-pixel structure, the second passivation layer 111 and the ends of each film layer of the quasi-pixel structure, thereby avoiding the influence of the preparation process of the barrier structure 20 on the quasi-pixel structure; the patterned photoresist layer 114 , so that the portion of the photoresist layer 114 located in the blocking region 202 forms a photoresist structure 1141 .

在一些可能的实施方式中,如图3-图9所示,衬底基板10位于显示区域201一侧的准像素结构包括:有源层104、第一栅极层105、层间绝缘层106、第一金属层107、第一平坦化层108、第一钝化层109、第二金属层110、第二钝化层111、第二平坦化层112、阳极层113、光阻层114和位于第二栅极绝缘层103远离衬底基板10一侧的第二栅极层115。衬底基板10的一侧还设置有缓冲层101、第一栅极绝缘层102和第二栅极绝缘层103。In some possible implementation manners, as shown in FIGS. 3-9 , the quasi-pixel structure of the base substrate 10 on the side of the display region 201 includes: an active layer 104 , a first gate layer 105 , and an interlayer insulating layer 106 , the first metal layer 107, the first planarization layer 108, the first passivation layer 109, the second metal layer 110, the second passivation layer 111, the second planarization layer 112, the anode layer 113, the photoresist layer 114 and The second gate layer 115 is located on the side of the second gate insulating layer 103 away from the base substrate 10 . A buffer layer 101 , a first gate insulating layer 102 and a second gate insulating layer 103 are further provided on one side of the base substrate 10 .

可选地,位于显示区域201一侧的准像素结构用于形成后续显示面板中的像素结构。Optionally, the quasi-pixel structure located on one side of the display area 201 is used to form a pixel structure in a subsequent display panel.

在一些可能的实施方式中,衬底基板10位于显示区域201一侧的准像素结构的制备过程包括:In some possible implementation manners, the preparation process of the quasi-pixel structure where the base substrate 10 is located on the side of the display region 201 includes:

在衬底基板10的一侧沉积制备缓冲层101,缓冲层101的制备材料包括氮化硅、氧化硅等,其中,氮化硅的厚度不小于0.3微米,不大于0.7微米;氧化硅的厚度不小于1微米,不大于1.2微米。在缓冲层101位于显示区域201的一侧沉积制备有源层104,有源层104的制备材料为非晶硅,有源层104的厚度为0.05微米,并对有源层104进行去氢化处理,去氢化处理的温度为不小于300℃且不大于350℃;然后对有源层104进行ELA(Excimer LaserAnnealing,准分子激光退火)处理,使得有源层104中的部分非晶硅转化为多晶硅;然后干刻处理有源层104,具体的,使用CF4(四氟化碳)和O2(氧气)的组合气氛,对有源层104进行干刻,然后湿法剥离后完成有源层104的图案化,形成非电容区域掩膜进行离子注入将电容区多晶硅掺杂导体化,掺杂可使用磷烷或者硼烷。Deposit and prepare buffer layer 101 on one side of base substrate 10, the preparation material of buffer layer 101 includes silicon nitride, silicon oxide, etc., wherein, the thickness of silicon nitride is not less than 0.3 microns, not more than 0.7 microns; the thickness of silicon oxide Not less than 1 micron, not more than 1.2 microns. Deposit and prepare the active layer 104 on the side of the buffer layer 101 located at the display region 201, the preparation material of the active layer 104 is amorphous silicon, the thickness of the active layer 104 is 0.05 micron, and the active layer 104 is dehydrogenated , the temperature of the dehydrogenation treatment is not less than 300°C and not more than 350°C; then the active layer 104 is subjected to ELA (Excimer Laser Annealing, excimer laser annealing) treatment, so that part of the amorphous silicon in the active layer 104 is converted into polysilicon and then dry etching the active layer 104, specifically, using a combined atmosphere of CF4 (carbon tetrafluoride) and O2 (oxygen) to carry out dry etching on the active layer 104, and then complete the active layer 104 after wet stripping Patterning, forming a mask in the non-capacitive area, performing ion implantation to conduct the polysilicon doping in the capacitive area, and doping can use phosphine or borane.

在图案化后的有源层104的一侧沉积制备第一栅极绝缘层102,第一栅极绝缘层102的制作材料包括氮化硅、氧化硅,氮化硅的厚度不小于0.05微米,不大于0.09微米;氧化硅的厚度不小于0.03微米,不大于0.06微米。Deposit and prepare the first gate insulating layer 102 on one side of the patterned active layer 104. The material for the first gate insulating layer 102 includes silicon nitride and silicon oxide, and the thickness of silicon nitride is not less than 0.05 microns. Not more than 0.09 microns; the thickness of silicon oxide is not less than 0.03 microns, not more than 0.06 microns.

在第一栅极绝缘层102的一侧沉积制备栅极金属层,然后图案化栅极金属层,具体的,使用SF6(六氟化硫)和O2(氧气)的组合气氛,对栅极金属层进行干刻,完成栅极金属层的图案化;或者,采用高流速的CF4(四氟化碳)和低流速的O2(氧气)的组合气氛,可选地,CF4的流速为2000~2500sccm(Standard Cubic Centimeter per Minute,每分钟标准毫升)O2(氧气)的流速为1000~1500sccm,CF4的流速和O2的流速均包括各自取值范围的端值。完成栅极金属层的图案化,使得位于显示区域201的一侧沉积制备第一栅极层105,第一栅极层105制作材料包括金属钼,第一栅极层105的厚度不小于0.25微米,不大于0.3微米。Deposit and prepare a gate metal layer on one side of the first gate insulating layer 102, and then pattern the gate metal layer, specifically, use a combined atmosphere of SF6 (sulfur hexafluoride) and O2 (oxygen) to The layer is dry-etched to complete the patterning of the gate metal layer; or, a combined atmosphere of CF4 (carbon tetrafluoride) at a high flow rate and O2 (oxygen gas) at a low flow rate is used. Optionally, the flow rate of CF4 is 2000-2500 sccm (Standard Cubic Centimeter per Minute, standard milliliter per minute) The flow rate of O2 (oxygen) is 1000-1500 sccm, and the flow rate of CF4 and O2 include the end values of their respective ranges. Complete the patterning of the gate metal layer, so that the first gate layer 105 is deposited on one side of the display area 201. The material for the first gate layer 105 includes metal molybdenum, and the thickness of the first gate layer 105 is not less than 0.25 microns , not greater than 0.3 microns.

在第一栅极层105的一侧沉积制备第二栅极绝缘层103,然后采用与第一栅极层105的制备工艺相同的制备工艺,在第二栅极绝缘层103的一侧制备得到第二栅极层115。Deposit and prepare the second gate insulating layer 103 on one side of the first gate layer 105, and then adopt the same preparation process as that of the first gate layer 105 to prepare on one side of the second gate insulating layer 103 to obtain The second gate layer 115 .

在第二栅极层115的一侧沉积制备层间绝缘层106,可选地,层间绝缘层106的制作材料包括氮化硅和氧化硅,氮化硅的厚度不小于0.2微米,不大于0.3微米;氧化硅的厚度不小于0.2微米,不大于0.5微米。然后通过光刻工艺形成过孔,使得有源层104的至少部分出露,具体的,可采用CF4(四氟化碳)和O2(氧气)的组合气氛,对间绝缘层106、第二栅极绝缘层103和第一栅极绝缘层102进行干刻,形成过孔使得有源层104的至少部分出露。An interlayer insulating layer 106 is deposited on one side of the second gate layer 115. Optionally, the material for making the interlayer insulating layer 106 includes silicon nitride and silicon oxide, and the thickness of the silicon nitride is not less than 0.2 microns and not greater than 0.3 microns; the thickness of silicon oxide is not less than 0.2 microns and not more than 0.5 microns. Then, a via hole is formed through a photolithography process, so that at least part of the active layer 104 is exposed. Specifically, a combined atmosphere of CF4 (carbon tetrafluoride) and O2 (oxygen) can be used to form the interlayer insulating layer 106 and the second gate. The electrode insulating layer 103 and the first gate insulating layer 102 are dry etched to form via holes so that at least part of the active layer 104 is exposed.

在层间绝缘层106的一侧沉积制备第一金属层107,本申请实施例中,第一金属层107为Ti(钛)/Al(铝)/Ti(钛)膜层结构,Ti(钛)的厚度不小于300微米,不大于600微米;Al(铝)的厚度不小于6000微米,不大于6500微米。可选地,采用BCl3(三氯化硼)和Cl2(氯气)的组合气氛,对第一金属层107进行干刻,以实现第一金属层107的图案化。Deposit and prepare the first metal layer 107 on one side of the interlayer insulating layer 106. In the embodiment of the present application, the first metal layer 107 is a Ti (titanium)/Al (aluminum)/Ti (titanium) film structure, and Ti (titanium) ) is not less than 300 microns and not more than 600 microns; the thickness of Al (aluminum) is not less than 6000 microns and not more than 6500 microns. Optionally, a combined atmosphere of BCl3 (boron trichloride) and Cl2 (chlorine gas) is used to perform dry etching on the first metal layer 107 to achieve patterning of the first metal layer 107 .

采用涂覆、曝光、显影、后烘等工艺,在第一金属层107的一侧制备第一平坦化层108,第一平坦化层108的厚度不小于1.5微米,不大于2微米。然后,在第一平坦化层108与有源层104的源极区域对应的部分开设过孔。在第一平坦化层108的一侧沉积制备第一钝化层109,第一钝化层109的制作材料包括氮化硅,而后进行干法刻蚀在第一钝化层109与第一平坦化层108的过孔对应的区域形成过孔。The first planarization layer 108 is prepared on one side of the first metal layer 107 by coating, exposure, development, post-baking and other processes, and the thickness of the first planarization layer 108 is not less than 1.5 microns and not more than 2 microns. Then, a via hole is opened in the portion of the first planarization layer 108 corresponding to the source region of the active layer 104 . Deposit and prepare the first passivation layer 109 on one side of the first planarization layer 108, the fabrication material of the first passivation layer 109 comprises silicon nitride, and then perform dry etching on the first passivation layer 109 and the first planarization layer. Vias are formed in regions corresponding to the vias of the layer 108.

在层间绝缘层106的一侧沉积制备第二金属层110,本申请实施例中,第二金属层110为Ti(钛)/Al(铝)/Ti(钛)膜层结构,Ti(钛)的厚度不小于300微米,不大于600微米;Al(铝)的厚度不小于6000微米,不大于6500微米。可选地,采用BCl3(三氯化硼)和Cl2(氯气)的组合气氛,对第二金属层110进行干刻,以实现第二金属层110的图案化。Deposit and prepare the second metal layer 110 on one side of the interlayer insulating layer 106. In the embodiment of the present application, the second metal layer 110 is a Ti (titanium)/Al (aluminum)/Ti (titanium) film layer structure, and Ti (titanium ) is not less than 300 microns and not more than 600 microns; the thickness of Al (aluminum) is not less than 6000 microns and not more than 6500 microns. Optionally, a combined atmosphere of BCl3 (boron trichloride) and Cl2 (chlorine gas) is used to perform dry etching on the second metal layer 110 to achieve patterning of the second metal layer 110 .

在第二金属层110的一侧制备第二钝化层111,第二钝化层111的制作材料包括氮化硅。采用涂覆、曝光、显影、后烘等工艺,在第二钝化层111的一侧制备第二平坦化层112,第二平坦化层112的厚度不小于1.5微米,不大于2微米。然后,在第二平坦化层112与有源层104的源极区域对应的部分开设过孔。A second passivation layer 111 is prepared on one side of the second metal layer 110, and the material of the second passivation layer 111 includes silicon nitride. A second planarization layer 112 is prepared on one side of the second passivation layer 111 by coating, exposure, development, post-baking and other processes, and the thickness of the second planarization layer 112 is not less than 1.5 microns and not more than 2 microns. Then, a via hole is opened in the portion of the second planarization layer 112 corresponding to the source region of the active layer 104 .

在第二平坦化层112的一侧制备阳极层113,使得阳极层113的至少部分通过过孔与第一金属层107连接。然后在阳极层113的一侧制备光阻层114,使得光阻层114覆盖准像素结构的阳极层113、第二钝化层111以及准像素结构各个膜层的端部,从而避免阻隔结构20的制备工艺对准像素结构产生影响An anode layer 113 is prepared on one side of the second planarization layer 112 , so that at least part of the anode layer 113 is connected to the first metal layer 107 through via holes. Then prepare a photoresist layer 114 on one side of the anode layer 113, so that the photoresist layer 114 covers the anode layer 113 of the quasi-pixel structure, the second passivation layer 111 and the ends of each film layer of the quasi-pixel structure, thereby avoiding the barrier structure 20 The preparation process has an impact on the pixel structure

在位于阻隔区域202的阻隔结构20制备完成后,剥离位于显示区域201的光阻层114,然后采用涂覆、曝光、显影、后烘等工艺,在阳极层113的一侧制备像素定义结构116。在像素定义结构116的一侧沉积制备有机发光层117,如图9所示,由于阻隔结构20的阻隔,使得有机发光层117得以被隔断。本申请实施例中,像素定义结构116的厚度不小于1.4微米,不大于1.8微米。After the preparation of the barrier structure 20 in the barrier region 202 is completed, the photoresist layer 114 in the display region 201 is peeled off, and then the pixel definition structure 116 is prepared on the side of the anode layer 113 by using processes such as coating, exposure, development, and post-baking. . The organic light emitting layer 117 is deposited and prepared on one side of the pixel definition structure 116 , as shown in FIG. 9 , the organic light emitting layer 117 is blocked by the barrier structure 20 . In the embodiment of the present application, the thickness of the pixel defining structure 116 is not less than 1.4 microns and not more than 1.8 microns.

基于同一发明构思,本申请实施例提供了一种显示面板,包括显示区域201和阻隔区域202,阻隔区域202围绕显示区域201。该显示面板的结构示意图如图10所示,显示面板包括:衬底基板10、阻隔结构20和第一钝化结构30。Based on the same inventive concept, an embodiment of the present application provides a display panel, including a display area 201 and a blocking area 202 , and the blocking area 202 surrounds the display area 201 . A schematic structural view of the display panel is shown in FIG. 10 . The display panel includes: a base substrate 10 , a barrier structure 20 and a first passivation structure 30 .

阻隔结构20,位于衬底基板1的一侧,且位于阻隔区域202;阻隔结构20包括第一结构21,第一结构21包括沿远离衬底基板10的方向依次层叠设置的第一金属子结构211、第二金属子结构212和第三金属子结构213,第二金属子结构212在衬底基板10的正投影,位于第一金属子结构211和第三金属子结构213在衬底基板10的正投影内;第一钝化结构30,位于阻隔结构20远离衬底基板10的一侧。The barrier structure 20 is located on one side of the base substrate 1 and is located in the barrier region 202; the barrier structure 20 includes a first structure 21, and the first structure 21 includes first metal substructures that are sequentially stacked in a direction away from the base substrate 10 211, the second metal substructure 212 and the third metal substructure 213, the orthographic projection of the second metal substructure 212 on the base substrate 10, located on the first metal substructure 211 and the third metal substructure 213 on the base substrate 10 In the orthographic projection of ; the first passivation structure 30 is located on the side of the barrier structure 20 away from the base substrate 10 .

本申请实施例中,显示面板包括显示区域201和与显示区域201相邻的阻隔区域202。如图7所示,阻隔区域202设置有一个阻隔结构20,阻隔结构20包括层叠设置的第一金属子结构211、第二金属子结构212和第三金属子结构213,在垂直于显示面板的横截面方向上,阻隔结构20的截面形状为工字形。In the embodiment of the present application, the display panel includes a display area 201 and a barrier area 202 adjacent to the display area 201 . As shown in FIG. 7 , the barrier region 202 is provided with a barrier structure 20, and the barrier structure 20 includes a first metal substructure 211, a second metal substructure 212, and a third metal substructure 213 arranged in a stacked manner. In the cross-sectional direction, the cross-sectional shape of the barrier structure 20 is I-shaped.

本申请实施例中,通过将阻隔结构20的截面形状设置为工字形,能够提高阻隔结构20的阻隔性能,提高了显示面板的可靠性。In the embodiment of the present application, by setting the cross-sectional shape of the barrier structure 20 as an I-shape, the barrier performance of the barrier structure 20 can be improved, and the reliability of the display panel can be improved.

在本申请的一个实施例中,第二金属子结构212在衬底基板10的正投影的边界,与第一金属子结构211在衬底基板10的正投影的边界具有第一设定距离d1。使得准备得到的阻隔结构的满足要求,以保障阻隔结构的性能,从而能够进一步保障阻隔结构的形成率,能够保障有机发光显示面板的成品率。In one embodiment of the present application, the boundary of the orthographic projection of the second metal substructure 212 on the substrate 10 has a first set distance d1 from the boundary of the orthographic projection of the first metal substructure 211 on the substrate 10 . The prepared barrier structure meets the requirements to ensure the performance of the barrier structure, thereby further ensuring the formation rate of the barrier structure and the yield rate of the organic light-emitting display panel.

可选地,第一钝化结构30在衬底基板10的正投影覆盖第三金属子结构213在衬底基板10的正投影。从而保障第一钝化结构30能完整覆盖第三金属子结构213,以增强第三金属子结构213的刚性,从而能够降低第三金属子结构213出现断裂、塌陷等问题的几率,从而能够保障阻隔结构20的可靠性,保障阻隔结构20的形成率。Optionally, the orthographic projection of the first passivation structure 30 on the base substrate 10 covers the orthographic projection of the third metal substructure 213 on the base substrate 10 . Thereby ensuring that the first passivation structure 30 can completely cover the third metal substructure 213, so as to enhance the rigidity of the third metal substructure 213, thereby reducing the probability of problems such as fracture and collapse of the third metal substructure 213, thereby ensuring The reliability of the barrier structure 20 ensures the formation rate of the barrier structure 20 .

在本申请的一个实施例中,第一金属子结构211在衬底基板10的正投影,与第三金属子结构213在衬底基板10的正投影重叠。即,第二金属子结构212在衬底基板10的正投影的边界,与第三金属子结构213在衬底基板10的正投影的边界具有第一设定距离d1。In one embodiment of the present application, the orthographic projection of the first metal substructure 211 on the substrate 10 overlaps with the orthographic projection of the third metal substructure 213 on the substrate 10 . That is, the boundary of the orthographic projection of the second metal substructure 212 on the base substrate 10 has a first set distance d1 from the boundary of the orthographic projection of the third metal substructure 213 on the base substrate 10 .

在本申请的一个实施例中,如图11所示,阻隔结构20还包括第二结构22,第二结构22位于第一结构21远离衬底基板10的一侧,第二钝化结构40位于第二结构22远离衬底基板10的一侧设置有第二钝化结构40;第二结构22包括沿远离衬底基板10的方向依次层叠设置的第四金属子结构221、第五金属子结构222和第六金属子结构223,第五金属子结构222在衬底基板10的正投影,位于第四金属子结构221在衬底基板10的正投影内。In one embodiment of the present application, as shown in FIG. 11 , the barrier structure 20 further includes a second structure 22, the second structure 22 is located on the side of the first structure 21 away from the substrate 10, and the second passivation structure 40 is located A second passivation structure 40 is provided on the side of the second structure 22 away from the base substrate 10; the second structure 22 includes a fourth metal substructure 221 and a fifth metal substructure stacked in sequence along the direction away from the base substrate 10 222 and the sixth metal substructure 223 , the orthographic projection of the fifth metal substructure 222 on the substrate 10 is located within the orthographic projection of the fourth metal substructure 221 on the substrate 10 .

可选地,第五金属子结构222在衬底基板10的正投影的边界,与第四金属子结构221在衬底基板10的正投影的边界具有第二设定距离d2。使得准备得到的阻隔结构的满足要求,以保障阻隔结构的性能,从而能够进一步保障阻隔结构的形成率,能够保障有机发光显示面板的成品率。Optionally, the boundary of the orthographic projection of the fifth metal substructure 222 on the substrate 10 has a second set distance d2 from the boundary of the orthographic projection of the fourth metal substructure 221 on the substrate 10 . The prepared barrier structure meets the requirements to ensure the performance of the barrier structure, thereby further ensuring the formation rate of the barrier structure and the yield rate of the organic light-emitting display panel.

可选地,第六金属子结构223在衬底基板10的正投影,与第四金属子结构221在衬底基板10的正投影重叠。即,第五金属子结构222在衬底基板10的正投影的边界,与第六金属子结构223在衬底基板10的正投影的边界具有第二设定距离d2。Optionally, the orthographic projection of the sixth metal substructure 223 on the substrate 10 overlaps with the orthographic projection of the fourth metal substructure 221 on the substrate 10 . That is, the boundary of the orthographic projection of the fifth metal substructure 222 on the base substrate 10 has a second set distance d2 from the boundary of the orthographic projection of the sixth metal substructure 223 on the base substrate 10 .

可选地,第二钝化结构40在衬底基板10的正投影覆盖第六金属子结构223在衬底基板10的正投影。从而保障第二钝化结构40能完整覆盖第六金属子结构223,以增强第六金属子结构223的刚性,从而能够降低第六金属子结构223出现断裂、塌陷等问题的几率,从而能够保障阻隔结构20的可靠性,保障阻隔结构20的形成率。Optionally, the orthographic projection of the second passivation structure 40 on the base substrate 10 covers the orthographic projection of the sixth metal substructure 223 on the base substrate 10 . Thereby ensuring that the second passivation structure 40 can completely cover the sixth metal substructure 223, so as to enhance the rigidity of the sixth metal substructure 223, thereby reducing the probability of problems such as fracture and collapse of the sixth metal substructure 223, thereby ensuring The reliability of the barrier structure 20 ensures the formation rate of the barrier structure 20 .

在本申请的一个实施例中,第五金属子结构222在衬底基板10的正投影,位于第二金属子结构212在衬底基板10的正投影内。In one embodiment of the present application, the orthographic projection of the fifth metal substructure 222 on the substrate 10 is located within the orthographic projection of the second metal substructure 212 on the substrate 10 .

在本申请的一个实施例中,在第二钝化结构40远离衬底基板10的一侧设置有有机发光层117。如前述所知,在像素定义结构116的一侧沉积制备有机发光层117时,位于阻隔区域202的阻隔结构20中第二钝化结构40远离衬底基板10的一侧也会形成有有机发光层117,由于阻隔结构20的阻隔,使得有机发光层117位于显示区域201的部分和位于阻隔区域202的部分被隔断,如图9所示。有机发光层117位于显示区域201的部分与阳极层113接触,显示面板工作过程中,该部分有机发光层117能够正常发光。In one embodiment of the present application, an organic light-emitting layer 117 is disposed on a side of the second passivation structure 40 away from the base substrate 10 . As known above, when the organic light-emitting layer 117 is deposited on one side of the pixel-defining structure 116, the side of the second passivation structure 40 in the barrier structure 20 located in the barrier region 202 away from the base substrate 10 will also form an organic light-emitting layer. The layer 117 is blocked by the blocking structure 20 , so that the part of the organic light-emitting layer 117 located in the display area 201 and the part located in the blocking area 202 are isolated, as shown in FIG. 9 . The part of the organic light emitting layer 117 located in the display area 201 is in contact with the anode layer 113 , and this part of the organic light emitting layer 117 can emit light normally during the operation of the display panel.

应该说明的是,本申请实施例中,通过在第二钝化结构40远离衬底基板10的一侧设置有机发光层117,在显示面板的制造过程中,使得位于显示区域201的有机发光层117和位于阻隔区域202的有机发光层117同时制造形成,从而在形成有机发光层117的过程中,能够避免掩膜版的使用,从而能够降低显示面板的制造成本。It should be noted that, in the embodiment of the present application, by disposing the organic light-emitting layer 117 on the side of the second passivation structure 40 away from the base substrate 10, in the manufacturing process of the display panel, the organic light-emitting layer located in the display area 201 117 and the organic light-emitting layer 117 located in the barrier region 202 are manufactured and formed simultaneously, so that the use of a mask plate can be avoided during the process of forming the organic light-emitting layer 117, thereby reducing the manufacturing cost of the display panel.

在本申请的一个实施例中,第一设定距离d1和第二设定距离d2的取值范围均为0.3-0.5微米。应该说明的是,第一设定距离d1和第二设定距离d2的取值均包括端值0.3微米和0.5微米。In an embodiment of the present application, the value ranges of the first set distance d1 and the second set distance d2 are both 0.3-0.5 microns. It should be noted that the values of the first set distance d1 and the second set distance d2 both include end values of 0.3 μm and 0.5 μm.

在本申请的一个实施例中,阻隔区域202可设置有多个阻隔结构20,且相邻两个阻隔结构20之间的距离d3为8-15微米。应该说明的是,相邻两个阻隔结构20之间的距离d3的取值均包括端8微米和15微米。可选地,如图12所示,阻隔区域202可设置有两个阻隔结构20。In an embodiment of the present application, the blocking region 202 may be provided with a plurality of blocking structures 20 , and the distance d3 between two adjacent blocking structures 20 is 8-15 μm. It should be noted that the values of the distance d3 between two adjacent barrier structures 20 include ends 8 microns and 15 microns. Optionally, as shown in FIG. 12 , the barrier area 202 may be provided with two barrier structures 20 .

应该说明的是,如图12所示,距离d3指的是沿显示区域201指向阻隔区域202的方向,相邻两个阻隔结构20之间的距离。It should be noted that, as shown in FIG. 12 , the distance d3 refers to the distance between two adjacent barrier structures 20 along the direction from the display area 201 to the barrier area 202 .

基于同一发明构思,本申请实施例提供了一种显示设备,包括:上述各个实施例所提供显示面板,或者,包括:采用上述各个实施例所提供的显示面板的制备方法制备得到的显示面板。Based on the same inventive concept, an embodiment of the present application provides a display device, including: the display panel provided by each of the above embodiments, or including: a display panel prepared by using the method for preparing a display panel provided by each of the above embodiments.

应用本申请实施例,至少能够实现如下有益效果:By applying the embodiment of the present application, at least the following beneficial effects can be achieved:

在本申请实施例提供的显示面板的制备方法中,在基于光阻结构1141图案化第一钝化层109和第一金属层107得到第一钝化结构30和第一金属结构1071后,及时剥离在第一金属结构1071的端部形成的阻挡部60,能够避免阻挡部60对后续第一金属结构1071刻蚀过程的影响,以保障第一结构21中、第二金属子结构212在衬底基板10的正投影,位于第一金属子结构211和第三金属子结构213在衬底基板10的正投影内,从而能够保障第一结构21的形成率,进而能够保障阻隔结构20的形成率,能够保障有机发光显示面板的成品率。In the manufacturing method of the display panel provided by the embodiment of the present application, after the first passivation layer 109 and the first metal layer 107 are patterned based on the photoresist structure 1141 to obtain the first passivation structure 30 and the first metal structure 1071, in time Stripping off the barrier portion 60 formed at the end of the first metal structure 1071 can avoid the impact of the barrier portion 60 on the subsequent etching process of the first metal structure 1071, so as to ensure that the second metal substructure 212 in the first structure 21 is formed on the substrate. The orthographic projection of the base substrate 10 is located within the orthographic projection of the first metal substructure 211 and the third metal substructure 213 on the base substrate 10, so that the formation rate of the first structure 21 can be ensured, and the formation of the barrier structure 20 can be ensured. The rate can ensure the yield rate of the organic light emitting display panel.

而且,由于在第一金属层107远离衬底基板10的一侧制备有第一钝化层109,使得形成的第一结构21的第三金属子结构213远离衬底基板10的一侧形成有第一钝化结构30,第一钝化结构30能够增强第三金属子结构213的刚性,从而能够降低第三金属子结构213出现断裂、塌陷等问题的几率,从而能够保障阻隔结构20的可靠性,保障阻隔结构20的形成率。Moreover, since the first passivation layer 109 is prepared on the side of the first metal layer 107 away from the base substrate 10, the third metal substructure 213 of the formed first structure 21 is formed on the side away from the base substrate 10. The first passivation structure 30, the first passivation structure 30 can enhance the rigidity of the third metal substructure 213, thereby reducing the probability of problems such as fracture and collapse of the third metal substructure 213, thereby ensuring the reliability of the barrier structure 20 properties, ensuring the formation rate of the barrier structure 20 .

本技术领域技术人员可以理解,本申请中已经讨论过的各种操作、方法、流程中的步骤、措施、方案可以被交替、更改、组合或删除。进一步地,具有本申请中已经讨论过的各种操作、方法、流程中的其他步骤、措施、方案也可以被交替、更改、重排、分解、组合或删除。进一步地,现有技术中的具有与本申请中公开的各种操作、方法、流程中的步骤、措施、方案也可以被交替、更改、重排、分解、组合或删除。Those skilled in the art can understand that the various operations, methods, and steps, measures, and schemes in the processes that have been discussed in this application can be replaced, changed, combined, or deleted. Furthermore, the various operations, methods, and other steps, measures, and schemes in the processes that have been discussed in this application may also be replaced, changed, rearranged, decomposed, combined, or deleted. Further, steps, measures, and schemes in the prior art that have operations, methods, and processes disclosed in the present application may also be alternated, changed, rearranged, decomposed, combined, or deleted.

在本申请的描述中,需要理解的是,术语“中心”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。In the description of this application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientations or positional relationships indicated by "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, rather than indicating or implying References to devices or elements must have a particular orientation, be constructed, and operate in a particular orientation and therefore should not be construed as limiting the application.

术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中,除非另有说明,“多个”的含义是两个或两个以上。The terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present application, unless otherwise specified, "plurality" means two or more.

在本申请的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本申请中的具体含义。In the description of this application, it should be noted that unless otherwise specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediary, and it can be the internal communication of two elements. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application in specific situations.

在本说明书的描述中,具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in an appropriate manner.

应该理解的是,虽然附图的流程图中的各个步骤按照箭头的指示依次显示,但是这些步骤并不是必然按照箭头指示的顺序依次执行。除非本文中有明确的说明,这些步骤的执行并没有严格的顺序限制,其可以以其他的顺序执行。而且,附图的流程图中的至少一部分步骤可以包括多个子步骤或者多个阶段,这些子步骤或者阶段并不必然是在同一时刻执行完成,而是可以在不同的时刻执行,其执行顺序也不必然是依次进行,而是可以与其他步骤或者其他步骤的子步骤或者阶段的至少一部分轮流或者交替地执行。It should be understood that although the various steps in the flow chart of the accompanying drawings are displayed sequentially according to the arrows, these steps are not necessarily executed sequentially in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some of the steps in the flowcharts of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily executed at the same time, but may be executed at different times, and the order of execution is also It is not necessarily performed sequentially, but may be performed alternately or alternately with at least a part of other steps or sub-steps or stages of other steps.

以上所述仅是本申请的部分实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above descriptions are only some implementations of the present application. It should be pointed out that for those of ordinary skill in the art, some improvements and modifications can be made without departing from the principle of the application. These improvements and modifications are also It should be regarded as the protection scope of this application.

Claims (14)

1.一种显示面板,包括显示区域和阻隔区域,所述阻隔区域围绕所述显示区域,其特征在于,所述显示面板包括:1. A display panel, comprising a display area and a barrier area, the barrier area surrounding the display area, characterized in that the display panel comprises: 衬底基板;Substrate substrate; 阻隔结构,位于所述衬底基板的一侧,且位于所述阻隔区域;所述阻隔结构包括第一结构,所述第一结构包括沿远离所述衬底基板的方向依次层叠设置的第一金属子结构、第二金属子结构和第三金属子结构;所述第二金属子结构在所述衬底基板的正投影,位于所述第一金属子结构和所述第三金属子结构在所述衬底基板的正投影内;The barrier structure is located on one side of the base substrate and is located in the barrier region; the barrier structure includes a first structure, and the first structure includes first stacked layers in a direction away from the base substrate. A metal substructure, a second metal substructure, and a third metal substructure; the orthographic projection of the second metal substructure on the base substrate is located between the first metal substructure and the third metal substructure In the orthographic projection of the substrate substrate; 像素结构,位于所述衬底基板的一侧,且位于所述显示区域,所述像素结构包括第一金属层,与所述第一结构同层设置,所述第一金属层的材料与所述第一结构的材料相同。The pixel structure is located on one side of the base substrate and is located in the display area. The pixel structure includes a first metal layer, which is arranged on the same layer as the first structure. The material of the first metal layer is the same as that of the first metal layer. The materials of the first structure are the same. 2.根据权利要求1所述的显示面板,其特征在于,所述第二金属子结构在所述衬底基板的正投影的边界,与所述第一金属子结构在所述衬底基板的正投影的边界具有第一设定距离。2. The display panel according to claim 1, characterized in that, the boundary of the orthographic projection of the second metal substructure on the base substrate, and the boundary of the first metal substructure on the base substrate The boundary of the orthographic projection has a first set distance. 3.根据权利要求1所述的显示面板,其特征在于,所述第一金属子结构在所述衬底基板的正投影,与所述第三金属子结构在所述衬底基板的正投影重叠。3. The display panel according to claim 1, wherein the orthographic projection of the first metal substructure on the substrate is the same as the orthographic projection of the third metal substructure on the substrate overlapping. 4.根据权利要求2所述的显示面板,其特征在于,所述阻隔结构还包括第二结构,所述第二结构位于所述第一结构远离所述衬底基板的一侧,4. The display panel according to claim 2, wherein the barrier structure further comprises a second structure, the second structure is located on a side of the first structure away from the base substrate, 所述第二结构包括沿远离所述衬底基板的方向依次层叠设置的第四金属子结构、第五金属子结构和第六金属子结构;所述第五金属子结构在所述衬底基板的正投影,位于所述第四金属子结构和所述第六金属子结构在所述衬底基板的正投影内;且所述第五金属子结构在所述衬底基板的正投影的边界,与所述第四金属子结构在所述衬底基板的正投影的边界具有第二设定距离。The second structure includes a fourth metal substructure, a fifth metal substructure, and a sixth metal substructure that are sequentially stacked in a direction away from the base substrate; the fifth metal substructure is on the base substrate The orthographic projection of the fourth metal substructure and the sixth metal substructure are located within the orthographic projection of the substrate substrate; and the boundary of the orthographic projection of the fifth metal substructure on the substrate substrate , having a second set distance from the boundary of the orthographic projection of the fourth metal substructure on the base substrate. 5.根据权利要求4所述的显示面板,其特征在于,所述第六金属子结构在所述衬底基板的正投影,与所述第四金属子结构在所述衬底基板的正投影重叠。5. The display panel according to claim 4, wherein the orthographic projection of the sixth metal substructure on the substrate is the same as the orthographic projection of the fourth metal substructure on the substrate overlapping. 6.根据权利要求4所述的显示面板,其特征在于,所述像素结构包括第二金属层,与所述第二结构同层设置,所述第二金属层的材料与所述第二结构的材料相同。6. The display panel according to claim 4, wherein the pixel structure comprises a second metal layer, which is arranged on the same layer as the second structure, and the material of the second metal layer is the same as that of the second structure of the same material. 7.根据权利要求6所述的显示面板,其特征在于,包括下述至少一项:7. The display panel according to claim 6, comprising at least one of the following: 所述第一金属层包括沿远离所述衬底基板的方向依次层叠设置的第一金属子层、第二金属子层和第三金属子层;所述第一金属子层和所述第三金属子层的材料相同,所述第二金属子层的材料不同于所述第一金属子层和所述第三金属子层的材料;所述第一金属子层和所述第三金属子层的厚度均不小于300微米且不大于600微米,所述第二金属子层的厚度不小于6000微米且不大于6500微米;The first metal layer includes a first metal sub-layer, a second metal sub-layer and a third metal sub-layer sequentially stacked in a direction away from the base substrate; the first metal sub-layer and the third metal sub-layer The materials of the metal sublayers are the same, and the materials of the second metal sublayer are different from the materials of the first metal sublayer and the third metal sublayer; the first metal sublayer and the third metal sublayer The thickness of each layer is not less than 300 microns and not more than 600 microns, and the thickness of the second metal sub-layer is not less than 6000 microns and not more than 6500 microns; 所述第二金属层包括沿远离所述衬底基板的方向依次层叠设置的第四金属子层、第五金属子层和第六金属子层;所述第四金属子层和所述第六金属子层的材料相同,所述第五金属子层的材料不同于所述第四金属子层和所述第六金属子层的材料;所述第四金属子层和所述第六金属子层的厚度均不小于300微米且不大于600微米,所述第五金属子层的厚度不小于6000微米且不大于6500微米。The second metal layer includes a fourth metal sublayer, a fifth metal sublayer and a sixth metal sublayer that are sequentially stacked in a direction away from the base substrate; the fourth metal sublayer and the sixth metal sublayer The materials of the metal sublayers are the same, and the material of the fifth metal sublayer is different from the materials of the fourth metal sublayer and the sixth metal sublayer; the fourth metal sublayer and the sixth metal sublayer The thickness of each layer is not less than 300 microns and not more than 600 microns, and the thickness of the fifth metal sub-layer is not less than 6000 microns and not more than 6500 microns. 8.根据权利要求4所述的显示面板,其特征在于,所述第一设定距离和所述第二设定距离的取值范围均不小于0.3微米且不大于0.5微米。8. The display panel according to claim 4, wherein the value ranges of the first set distance and the second set distance are not less than 0.3 microns and not more than 0.5 microns. 9.根据权利要求1所述的显示面板,其特征在于,所述阻隔区域设置有至少两个所述阻隔结构,任意相邻两个所述阻隔结构之间的距离不小于8微米且不大于15微米。9. The display panel according to claim 1, wherein the barrier region is provided with at least two barrier structures, and the distance between any two adjacent barrier structures is not less than 8 microns and not greater than 15 microns. 10.根据权利要求4所述的显示面板,其特征在于,所述第五金属子结构在所述衬底基板的正投影,位于所述第二金属子结构在所述衬底基板的正投影内。10. The display panel according to claim 4, wherein the orthographic projection of the fifth metal substructure on the substrate is located at the orthographic projection of the second metal substructure on the substrate Inside. 11.根据权利要求4所述的显示面板,其特征在于,所述第二金属子结构在所述衬底基板的正投影,与所述第五金属子结构在所述衬底基板的正投影相重叠。11. The display panel according to claim 4, wherein the orthographic projection of the second metal substructure on the substrate is the same as the orthographic projection of the fifth metal substructure on the substrate overlap. 12.根据权利要求4所述的显示面板,其特征在于,还包括下述至少一项:12. The display panel according to claim 4, further comprising at least one of the following: 第一钝化结构,设置于所述第三金属子结构远离所述衬底基板的一侧;所述第一钝化结构在所述衬底基板的正投影覆盖所述第三金属子结构在所述衬底基板的正投影;The first passivation structure is arranged on the side of the third metal substructure away from the base substrate; the orthographic projection of the first passivation structure on the base substrate covers the third metal substructure on the an orthographic projection of the substrate substrate; 第二钝化结构,设置于所述第六金属子结构远离所述衬底基板的一侧;所述第二钝化结构在所述衬底基板的正投影覆盖所述第六金属子结构在所述衬底基板的正投影。The second passivation structure is arranged on the side of the sixth metal substructure away from the base substrate; the orthographic projection of the second passivation structure on the base substrate covers the sixth metal substructure on the An orthographic projection of the substrate substrate. 13.根据权利要求12所述的显示面板,其特征在于,还包括:有机发光层,设置于所述第二钝化结构远离衬底基板的一侧。13. The display panel according to claim 12, further comprising: an organic light-emitting layer disposed on a side of the second passivation structure away from the base substrate. 14.一种显示设备,其特征在于,包括:如权利要求1-13中任一项所述的显示面板。14. A display device, comprising: the display panel according to any one of claims 1-13.
CN202310070248.4A 2021-06-29 2021-06-29 Display panel and display device Pending CN115996590A (en)

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