CN110518147B - Display panel, manufacturing method thereof and display device - Google Patents

Display panel, manufacturing method thereof and display device Download PDF

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Publication number
CN110518147B
CN110518147B CN201910812621.2A CN201910812621A CN110518147B CN 110518147 B CN110518147 B CN 110518147B CN 201910812621 A CN201910812621 A CN 201910812621A CN 110518147 B CN110518147 B CN 110518147B
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China
Prior art keywords
layer
display
metal layer
isolation
area
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CN110518147A (en
Inventor
吴欣慰
张震
张伟
郭钟旭
李存智
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BOE Technology Group Co Ltd
Chongqing BOE Display Technology Co Ltd
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BOE Technology Group Co Ltd
Chongqing BOE Display Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/842Containers
    • H10K50/8426Peripheral sealing arrangements, e.g. adhesives, sealants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/842Containers
    • H10K50/8428Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00

Abstract

The present disclosure relates to a display panel, a method of manufacturing the same, and a display device, the display panel including: the display device comprises a substrate, isolation columns, a passivation layer and a display layer. The substrate comprises an open area, a transition area surrounding the open area and a display area surrounding the transition area; the isolation column is arranged in the transition area, and the side wall of the isolation column is inwards recessed to form a recessed part; the passivation layer at least covers the isolation column and is covered on the isolation column in a conformal manner, and the passivation layer covers the concave part; the display layer covers the transition area and the display area, the display layer includes the luminescent layer, the luminescent layer is in the concave part of isolation post is interrupted to be set up. The display panel provided by the disclosure can ensure that the isolation column cuts off the validity of the water oxygen invasion channel, and improves the packaging yield of the display panel.

Description

Display panel, manufacturing method thereof and display device
Technical Field
The disclosure relates to the technical field of display, in particular to a display panel, a manufacturing method thereof and a display device.
Background
With the increasing demand of users for products and the intense competitive environment in the industry, most mobile phone factories are pursuing higher screen occupation ratio so as to bring more dazzling visual impact to users and win market competition. However, the development of higher screen ratios for cameras and some sensors is limited, and placing cameras and some sensors in the screen is of great interest in the industry.
When some sensors such as cameras are placed in the screen, openings are needed in the screen, and the openings in the screen easily allow the common luminescent material layer to form a water oxygen intrusion channel. At present, the blocking effect on the public luminescent material layer is realized mainly through the design of the isolation column, so that a water oxygen invasion channel is blocked, and poor packaging is prevented.
However, at present, the isolating column usually has a blocking failure phenomenon, namely, the blocking effect on the public luminescent material layer is failed, so that water and oxygen invade.
It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art.
Disclosure of Invention
The purpose of the present disclosure is to provide a display panel capable of ensuring the effectiveness of isolating columns to intercept a water-oxygen invasion channel, a manufacturing method thereof, and a display device.
According to an aspect of the present disclosure, there is provided a display panel including:
the display device comprises a substrate, a display module and a display module, wherein the substrate comprises an open pore area, a transition area surrounding the open pore area and a display area surrounding the transition area;
the isolation column is arranged in the transition zone, and the side wall of the isolation column is inwards recessed to form a recessed part;
a passivation layer at least covering the isolation column and covering the isolation column along with the shape, wherein the passivation layer covers the concave part;
the display layer covers the transition area and the display area, the display layer comprises a light-emitting layer, and the light-emitting layer is arranged intermittently at the concave part of the isolation column.
In an exemplary embodiment of the present disclosure, the isolation column includes a first metal layer, a second metal layer, and a third metal layer sequentially stacked in a direction away from the substrate, and an outer edge of the third metal layer protrudes from a sidewall of the second metal layer to form the recess.
In an exemplary embodiment of the present disclosure, the outer edge of the first metal extends out of the sidewall of the second metal layer, and the first metal layer, the third metal layer and the sidewall cooperate to form the recess.
In one exemplary embodiment of the present disclosure, the materials of the first and third metal layers include Ti, and the material of the second metal layer includes Al.
In an exemplary embodiment of the present disclosure, the width of the recess in the radial direction of the isolation column is 1 μm to 1.5 μm.
In an exemplary embodiment of the present disclosure, the isolation columns are provided in plurality, and the isolation columns are spaced apart.
According to another aspect of the present disclosure, there is provided a display panel including any one of the embodiments provided above.
According to still another aspect of the present disclosure, there is provided a manufacturing method of a display panel, the manufacturing method including:
forming a substrate, wherein the display substrate comprises an open area, a transition area surrounding the open area and a display area surrounding the transition area;
forming isolation columns on the transition regions, wherein the side walls of the isolation columns are inwards recessed to form recessed parts;
forming a passivation layer at least on the isolation column, wherein the passivation layer covers the isolation column in a conformal manner;
and forming a display layer on the transition region and the display region, wherein the display layer comprises a light-emitting layer, and the light-emitting layer is discontinuously arranged at the concave part of the isolation column.
In one exemplary embodiment of the present disclosure, forming a spacer column on the transition region includes:
sequentially stacking a first metal layer, a second metal layer and a third metal layer on the transition region in a direction away from the substrate;
and carrying out side etching on the two metal layers to form the concave part.
In an exemplary embodiment of the present disclosure, the width of the recess in the radial direction of the isolation column is 1 μm to 1.5 μm.
The utility model provides a display panel is equipped with the spacer column on the transition zone of base plate, and the lateral wall of spacer column is formed with the recess that blocks the luminescent layer, and the passivation layer covers on the spacer column along with the shape, can go out at the depressed part of spacer column to the unsettled part formation supporting role of spacer column lateral wall, protection spacer column structure, avoid the spacer column to sink at the unsettled part of depressed part and lead to the spacer column to block the effect of luminescent layer, and then ensure the spacer column and cut off the validity of water oxygen invasion passageway, can improve display panel's encapsulation yield.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure. It will be apparent to those of ordinary skill in the art that the drawings in the following description are merely examples of the disclosure and that other drawings may be derived from them without undue effort.
Fig. 1 is a schematic view of a display panel according to an embodiment of the disclosure;
fig. 2 is a schematic view of an isolation column provided in an embodiment of the present disclosure.
FIG. 3 is a flow chart of a method for manufacturing a display panel according to an embodiment of the disclosure;
fig. 4 is a detailed flowchart of step S200 in fig. 3.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments may be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the present disclosure. One skilled in the relevant art will recognize, however, that the aspects of the disclosure may be practiced without one or more of the specific details, or with other methods, components, devices, steps, etc. In other instances, well-known technical solutions have not been shown or described in detail to avoid obscuring aspects of the present disclosure.
Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus a repetitive description thereof will be omitted. Some of the block diagrams shown in the figures are functional entities and do not necessarily correspond to physically or logically separate entities. These functional entities may be implemented in software or in one or more hardware modules or integrated circuits or in different networks and/or processor devices and/or microcontroller devices.
The terms "a," "an," "the," and "said" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. in addition to the listed elements/components/etc.; the terms "first," "second," "third," and the like are used merely as labels, and are not intended to limit the number of subjects.
The applicant found that the spacer columns were patterned into undercut primarily by an undercut process and blocked the luminescent material by the wider top portions. However, in the isolation column structure formed after the side etching of the isolation column is completed, the part above the side concave part is in a suspended state, and the thickness of the suspended part above the side concave part is thinner (300A) after the side concave shape is formed, so that the part is easy to fall off in the subsequent process, further the isolation failure of the luminescent material layer is caused, and the water oxygen invasion is caused.
In this exemplary embodiment, there is first provided a display panel, as shown in fig. 1 and 2, including: a substrate 10, isolation pillars 20, a passivation layer (PVX) 30, and a display layer. The substrate 10 includes an open area, a transition area surrounding the open area, and a display area surrounding the transition area; the isolation column 20 is arranged in the transition area, and the side wall of the isolation column 20 is inwards recessed to form a recessed part; the passivation layer 30 at least covers the isolation column 20, and the isolation column 20 is covered with the passivation layer 30, and the concave part is covered with the passivation layer 30; the display layer covers the transition region and the display region, and the display layer includes a light emitting layer 40, and the light emitting layer 40 is intermittently disposed at the concave portion of the barrier rib 20.
The display panel that this disclosure provided is equipped with the spacer column 20 on the transition district of base plate 10, and the lateral wall of spacer column 20 is formed with the recess that blocks luminescent layer 40, and passivation layer 30 along with shape cover on spacer column 20 can go out at the depressed part of spacer column 20 and form the supporting role to the unsettled part of spacer column 20 lateral wall, protects spacer column 20 structure, avoids spacer column 20 to drop at the unsettled part of depressed part and leads to spacer column 20 to block luminescent layer 40's effect, and then ensures the validity of spacer column 20 interception water oxygen invasion passageway, can improve display panel's encapsulation yield.
As shown in fig. 2, the isolation column 20 includes a first metal layer 201, a second metal layer 202, and a third metal layer 203 sequentially stacked in a direction away from the substrate 10, and the outer edge of the third metal layer 203 protrudes from the sidewall of the second metal layer 202 to form a recess, thereby forming a discontinuous action on the light emitting layer 40 and blocking a water oxygen invasion channel.
Specifically, the passivation layer 30 conformally overlies the spacer columns 20. After the passivation layer 30 covers the isolation column 20, the shape of the passivation layer 30 is the same as that of the isolation column 20, namely, the passivation layer 30 also forms a concave area on the side surface of the isolation column 20 to support the isolation column 20 in a suspended area of a concave part, so that the isolation column 20 is prevented from being invalid due to bending and falling, and the effectiveness of the isolation column 20 in intercepting a water and oxygen invasion channel is ensured.
Further, the outer edge of the first metal layer 201 extends out of the sidewall of the second metal layer 202, that is, the outer edges of the first metal layer 201 and the third metal layer 203 simultaneously extend out of the sidewall of the second metal layer 202, and the sidewalls of the first metal layer 201, the third metal layer 203 and the second metal layer 202 cooperate to form a recess.
Specifically, the passivation layer 30 conformally covers the first metal layer 201, the second metal layer 202, and the third metal layer 203. The passivation layer 30 is attached to the lower surface of the third metal layer 203, the side wall of the second metal layer 202 and the upper surface of the first metal layer 201 at the concave part, so that the third metal layer 203 is supported at the suspended part of the concave part, the failure of the isolation column 20 caused by bending and falling is avoided, and the effectiveness of the isolation column 20 in intercepting a water and oxygen invasion channel is ensured. In addition, the partition post 20 may be composed of more layers, for example, four layers, five layers or more, as long as the above-described structure of the partition post 20 can be formed.
The materials of the first metal layer 201 and the third metal layer 203 include Ti, and the material of the second metal layer 202 includes Al. With this material selection, it is ensured that the first metal layer 201 and the third metal layer 203 are not affected by etching when the second metal layer 202 is undercut. Other materials may be selected by those skilled in the art as long as the above technical effects can be achieved, and the present disclosure is not limited thereto.
Specifically, the width of the recessed portion in the radial direction of the separator 20 is 1 μm to 1.5 μm, that is, the depth of the recess is 1 μm to 1.5 μm inward from the side wall of the separator 20. When the isolation column 20 is composed of the first metal layer 201, the second metal layer 202, and the third metal layer 203, that is, the distance between the edge of the third metal layer 203 and the sidewall of the second metal layer 202 is 1 μm to 1.5 μm, the distance between the edge of the first metal layer 201 and the sidewall of the second metal layer 202 may be 1 μm to 1.5 μm. Wherein, the distance between the edge of the first metal layer 201 and the sidewall of the second metal layer 202 may be the same as or different from the distance between the edge of the third metal layer 203 and the second metal layer 202. The depth of the recess is set to 1 μm to 1.5 μm, so that the coverage of the passivation layer 30 on the recess of the isolation column 20 can be ensured, and the effectiveness of the isolation column 20 in intercepting the water and oxygen invasion channel can be further ensured. Of course, the depth of the recess may also be less than 1 μm or greater than 1.5 μm, which is not limiting in this disclosure.
Specifically, the isolation column 20 may be provided in plurality, and the plurality of isolation columns 20 are spaced apart. It should be understood by those skilled in the art that as the number of the spacers 20 increases, the effectiveness of blocking the water oxygen invasion path is necessarily increased, but the increase of the number of the spacers 20 necessarily increases the difficulty of the manufacturing process of the display panel and increases the production cost. As shown in fig. 1, two isolation posts 20 are provided, spaced apart on the substrate. Through setting up two spacer columns 20, can improve the effectiveness of spacer columns 20 cut off the water oxygen invasion passageway, can avoid spacer columns 20 too much to lead to manufacturing cost too big again. One, three or more spacer posts 20 may also be provided on the substrate by those skilled in the art, as this disclosure is not limited in this regard.
When the plurality of isolation pillars 20 are provided, the passivation layer 30 covers the plurality of isolation pillars 20 and the substrate between the isolation pillars 20 at the same time to reduce difficulty in the passivation layer 30 forming process. As shown in fig. 1, a barrier 60 is further disposed on the transition region of the display panel, the isolation column 20 is disposed on the transition region between the display region and the barrier 60, and the passivation layer 30 covers the isolation column 20 and the transition region between the display region and the barrier 60.
As shown in fig. 1, the display area is disposed on the pixel structure, the inorganic layer 11 is disposed on the substrate 10, the substrate 10 may be a flexible substrate or a glass substrate made of polyimide or the like, and the opening area penetrates through the substrate 10 and the inorganic layer 11. The display area is provided with pixel structures which are arranged in an array mode, the pixel structures comprise a plurality of TFTs, and the TFTs can be top gate type TFTs, bottom gate type TFTs or double gate type TFTs. A Planar Layer (PLN) 71 and a Pixel Definition Layer (PDL) 72 are also formed on the substrate to cover the pixel structure.
As shown in fig. 1, the encapsulation film layer includes a first inorganic film layer 51, an organic film layer 52, and a second inorganic film layer 53 in this order in a direction away from the substrate 10. Any one of the first inorganic thin film layer 51 and the second inorganic thin film layer 53 may be SiNx, siCN, siO 2 Etc. The first inorganic thin film layer 51 and the second inorganic thin film layer 53 may be formed by chemical vapor deposition, physical vapor deposition, atomic force deposition, or the like. The organic thin film layer 52 may include an acrylic-based polymer, a silicon-based polymer, or the like. The organic thin film layer 52 may be formed on the first inorganic thin film layer 51 by ink-jet printing, spraying, or the like.
The display device can be, for example, an electronic device with a display panel, such as a mobile phone, a tablet computer, an electronic watch, a sports bracelet, a notebook computer and the like. The technical effects of the display device can be referred to the above discussion of the technical effects of the display panel, and will not be repeated here.
The present disclosure also provides a method of manufacturing a display panel, as shown in fig. 3, the method comprising:
step S100, forming a substrate, wherein the display substrate comprises an open area, a transition area surrounding the open area and a display area surrounding the transition area;
step S200, forming isolation columns on the transition regions, wherein the side walls of the isolation columns are inwards recessed to form recessed parts;
step S300, forming a passivation layer at least on the isolation column, wherein the passivation layer covers the isolation column 20 along with the shape;
and step 400, forming a display layer on the transition area and the display area, wherein the display layer comprises a light-emitting layer, and the light-emitting layer is discontinuously arranged at the concave part of the isolation column.
According to the manufacturing method of the display panel, the isolation column is formed on the transition region of the substrate, the groove for blocking the light-emitting layer is formed on the side wall of the isolation column, the passivation layer covers the isolation column along with the shape, the suspended part of the side wall of the isolation column can be formed into a supporting effect at the recessed part of the isolation column, the structure of the isolation column is protected, the effect that the isolation column blocks the light-emitting layer due to the fact that the suspended part of the isolation column is sunken in the recessed part is avoided, the effectiveness of blocking a water-oxygen invasion channel by the isolation column is further ensured, and the packaging yield of the display panel can be improved.
Next, each step of the method for manufacturing a display panel in the present exemplary embodiment will be further described.
In step S100, a substrate is formed, and the display substrate includes an opening area, a transition area surrounding the opening area, and a display area surrounding the transition area.
Specifically, as shown in fig. 1, a substrate 10 is formed as a carrier, and the substrate 10 may be made of a flexible material such as polyimide. An opening region, a transition region surrounding the opening region, and a display region surrounding the transition region are formed on the substrate 10. The open area can be used for arranging devices such as a camera and a sensor, and the transition area surrounds the via hole area in an annular shape.
In step S200, isolation pillars are formed on the transition regions, and the sidewalls of the isolation pillars are recessed inward to form recessed portions.
Specifically, as shown in fig. 1, the spacer 20 is formed on the display region, and a recess portion recessed inward is formed on the sidewall of the spacer 20 by a side etching process, the width of the recess portion in the radial direction of the spacer 20 being 1 μm to 1.5 μm. By providing the spacer 20, it is possible to prevent vapor, oxygen, or the like from invading the inside of the display panel from the through hole, causing the display panel to exhibit a GDS phenomenon.
Further, as shown in fig. 4, forming the isolation column on the transition region includes the steps of:
step S210, sequentially stacking a first metal layer, a second metal layer and a third metal layer on the transition region in a direction away from the substrate;
specifically, as shown in fig. 2, a first metal layer, a second metal layer, and a third metal layer are sequentially formed on a substrate through a deposition process, and then the first metal layer, the second metal layer, and the third metal layer are etched to form isolation columns.
The first metal layer and the third metal layer are made of Ti, and the second metal layer is made of Al.
And step S220, performing side etching on the two metal layers to form a concave part.
Specifically, the second metal layer may be etched by using an anodic wet etching method, so as to form a recess portion with a preset depth. When the materials of the first metal layer and the third metal layer are Ti and the materials of the second metal layer are Al, the wet etching only etches the second metal layer, but does not etch the first metal layer and the third metal layer, so that the width of the transverse etching of the second metal layer can be controlled better.
In step S300, a passivation layer is formed at least on the isolation pillars, the passivation layer conformally covering the isolation pillars.
Specifically, as shown in fig. 2, a covered passivation layer 30 material is formed on the isolation pillars 20, and then the passivation layer 30 is formed to follow the shape of the isolation pillars 20 through a mask and etching process. After the passivation layer 30 is covered on the isolation column 20 along with the shape, a concave part is correspondingly formed on the side wall of the isolation column 20, so that water vapor or oxygen and the like are prevented from invading into the display panel from the through hole under the protection of the structure of the isolation column 20.
In step S400, a display layer is formed on the transition region and the display region, the display layer including a light emitting layer intermittently disposed in the recess of the isolation column.
Specifically, when the display region forms a pixel structure, a light emitting material layer is also formed on the transition region, i.e., the light emitting material layer covers the isolation pillars 20. The luminescent material layer is organic material, and steam and oxygen enter into the display area through the luminescent material layer easily, through the setting of the spacer column 20, utilize the depressed part can be with luminescent layer 40 interruption, and then the passageway of blocking the invasion of water and oxygen.
Specific details of the layers in the display panel have been described in the corresponding embodiments, and for details not described in this method embodiment, reference may be made to the description related to the above-described embodiments of the display panel.
It should be noted that although the steps of the methods in the present disclosure are depicted in the accompanying drawings in a particular order, this does not require or imply that the steps must be performed in that particular order, or that all illustrated steps be performed, to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step to perform, and/or one step decomposed into multiple steps to perform, etc.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any adaptations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.

Claims (10)

1. A display panel, comprising:
the display device comprises a substrate, a display module and a display module, wherein the substrate comprises an open pore area, a transition area surrounding the open pore area and a display area surrounding the transition area;
the blocking piece is arranged in the transition area;
the isolation column is arranged in the transition region between the display region and the blocking piece, and the side wall of the isolation column is inwards recessed to form a recessed part;
a passivation layer at least covering the isolation column and covering the isolation column along with the shape, wherein the passivation layer covers the concave part;
the display layer covers the transition area and the display area and comprises a light-emitting layer, and the light-emitting layer is discontinuously arranged at the concave part of the isolation column; on the isolation column, the light-emitting layer is positioned on one side of the passivation layer away from the isolation column;
and the packaging film layer is positioned on one side of the display layer, which is away from the substrate, and covers the display area and the transition area between the display area and the blocking piece, and the blocking piece forms a blocking for the packaging film layer.
2. The display panel according to claim 1, wherein the spacer includes a first metal layer, a second metal layer, and a third metal layer sequentially stacked in a direction away from the substrate, and an outer edge of the third metal layer protrudes from a sidewall of the second metal layer to form the recess.
3. The display panel of claim 2, wherein an outer edge of the first metal layer extends beyond a sidewall of the second metal layer, and the first metal layer, the third metal layer, and the sidewall cooperate to form the recess.
4. The display panel of claim 2, wherein the material of the first metal layer and the third metal layer comprises Ti and the material of the second metal layer comprises Al.
5. The display panel according to claim 1, wherein a width of the recess portion in the radial direction of the spacer column is 1 μm to 1.5 μm.
6. The display panel according to claim 1, wherein a plurality of the spacers are provided, and the plurality of spacers are spaced apart.
7. A display device comprising the display panel of any one of claims 1-6.
8. A method of manufacturing a display panel, comprising:
forming a substrate, wherein the substrate comprises an opening area, a transition area surrounding the opening area and a display area surrounding the transition area;
forming a barrier over the transition region;
forming isolation columns on the transition region between the display region and the blocking piece, wherein the side walls of the isolation columns are inwards recessed to form recessed parts;
forming a passivation layer at least on the isolation column, wherein the passivation layer covers the isolation column in a conformal manner;
forming a display layer on the transition region and the display region, wherein the display layer comprises a light-emitting layer, and the light-emitting layer is discontinuously arranged at the concave part of the isolation column; on the isolation column, the light-emitting layer is positioned on one side of the passivation layer away from the isolation column;
forming a packaging film layer on one side of the substrate, wherein the side of the substrate is away from the packaging film layer covers the display area and the transition area between the display area and the barrier; the barrier forms a barrier to the encapsulation film layer.
9. The method of manufacturing of claim 8, wherein forming isolation pillars on the transition region comprises:
sequentially stacking a first metal layer, a second metal layer and a third metal layer on the transition region in a direction away from the substrate;
and carrying out side etching on the two metal layers to form the concave part.
10. The manufacturing method according to claim 8, wherein a width of the recess in the radial direction of the spacer column is 1 μm to 1.5 μm.
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