CN110518147A - Display panel and its manufacturing method, display device - Google Patents
Display panel and its manufacturing method, display device Download PDFInfo
- Publication number
- CN110518147A CN110518147A CN201910812621.2A CN201910812621A CN110518147A CN 110518147 A CN110518147 A CN 110518147A CN 201910812621 A CN201910812621 A CN 201910812621A CN 110518147 A CN110518147 A CN 110518147A
- Authority
- CN
- China
- Prior art keywords
- insulated column
- layer
- metal layer
- transition region
- recessed portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8428—Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The disclosure is directed to a kind of display panel and its manufacturing method and display device, which includes: substrate, insulated column, passivation layer and display layer.Substrate includes aperture area, around the transition region of aperture area and around the viewing area of the transition region；Insulated column is set to the transition region, and the side wall of the insulated column, which is recessed inwardly, is formed with recessed portion；Passivation layer at least covers the insulated column, and is covered on the insulated column with the shape, and the passivation layer covers the recessed portion；Display layer covers the transition region and the viewing area, the display layer include luminescent layer, and the luminescent layer is interrupted setting in the recessed portion of the insulated column.The display panel that the disclosure provides, it can be ensured that insulated column is truncated water oxygen and invades path validity, improves the encapsulation yield of display panel.
Description
Technical field
This disclosure relates to field of display technology, in particular to a kind of display panel and its manufacturing method and display
Device.
Background technique
With keen competition environment in the growing and industry to product requirement of user, most of cell phone manufacturer
All pursuing higher screen screen accounting, to bring the visual impact more dazzled to user, competition of winning the market.But for
For camera and some inductors, but limits screen and develop toward higher screen accounting, camera and some inductors are put
It is interior just by highest attention in the industry in screen.
It when some inductors such as camera are placed in screen, needs to carry out aperture on the screen, and opens on the screen
Hole is easy that common light material layer is made to form water oxygen invasion channel.Currently, mainly by isolation post design, to realize to public
The blocking effect of luminous material layer, and then water oxygen is truncated and invades channel, it prevents from encapsulating bad generation.
But current this insulated column, it will usually the phenomenon that blocking failure, the i.e. blocking to common light material layer occur
Effect failure, causes water oxygen to be invaded.
It should be noted that information is only used for reinforcing the reason to the background of the disclosure disclosed in above-mentioned background technology part
Solution, therefore may include the information not constituted to the prior art known to persons of ordinary skill in the art.
Summary of the invention
The disclosure is designed to provide a kind of display surface that can ensure insulated column truncation water oxygen invasion path validity
Plate and its manufacturing method and display device.
According to one aspect of the disclosure, a kind of display panel is provided, which includes:
Substrate, including aperture area, around the transition region of aperture area and around the viewing area of the transition region；
Insulated column is set to the transition region, and the side wall of the insulated column, which is recessed inwardly, is formed with recessed portion；
Passivation layer at least covers the insulated column, and is covered on the insulated column with the shape, described in the passivation layer covering
Recessed portion；
Display layer covers the transition region and the viewing area, and the display layer includes luminescent layer, and the luminescent layer is in institute
State the recessed portion interruption setting of insulated column.
In a kind of exemplary embodiment of the disclosure, the insulated column includes to the direction successively layer far from the substrate
Folded the first metal layer, second metal layer and third metal layer, the outer rim of third metal layer stretch out the side of the second metal layer
Wall forms the recessed portion.
In a kind of exemplary embodiment of the disclosure, the outer rim of first metal stretches out the side of the second metal layer
Wall, the first metal layer, the third metal layer and the side wall cooperatively form the recessed portion.
In a kind of exemplary embodiment of the disclosure, the material of the first metal layer and third metal layer includes Ti,
The material of the second metal layer includes Al.
In a kind of exemplary embodiment of the disclosure, the recessed portion is 1 μm in the width of the insulated column radially
~1.5 μm.
In a kind of exemplary embodiment of the disclosure, the insulated column is equipped with multiple, and multiple insulated column intervals
Distribution.
A kind of display panel provided including any of the above-described embodiment another aspect of the present disclosure provides.
According to the another aspect of the disclosure, a kind of manufacturing method of display panel is provided, which includes:
A substrate is formed, the display base plate includes aperture area, around the transition region of aperture area and around the transition
The viewing area in area；
Insulated column is formed in the transition region, the side wall of the insulated column, which is recessed inwardly, is formed with recessed portion；
Passivation layer is at least formed on the insulated column, the passivation layer is covered on the shape on the insulated column；
Display layer is formed in the transition region and the viewing area, the display layer includes luminescent layer, the luminescent layer
It is interrupted setting in the recessed portion of the insulated column.
In a kind of exemplary embodiment of the disclosure, insulated column is formed in the transition region, comprising:
In the transition region to far from the substrate direction stack gradually to be formed the first metal layer, second metal layer and
Third metal layer；
Lateral erosion is carried out to two metal layer, forms the recessed portion.
In a kind of exemplary embodiment of the disclosure, the recessed portion is 1 μm in the width of the insulated column radially
~1.5 μm.
The transition region of the display panel of the offer of the disclosure, substrate is equipped with insulated column, and the side wall of insulated column is formed with resistance
The groove of disconnected luminescent layer, passivation layer are covered on insulated column with the shape, can be gone out in the recessed portion of insulated column outstanding to insulated column side wall
Empty part forms supporting role, protective separation rod structure, avoid insulated column the hanging part of recessed portion sink and cause every
From the effect that column blocks luminescent layer, and then ensure the validity in insulated column truncation water oxygen invasion channel, can be improved display panel
Encapsulation yield.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The disclosure can be limited.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows the implementation for meeting the disclosure
Example, and together with specification for explaining the principles of this disclosure.It should be evident that the accompanying drawings in the following description is only the disclosure
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the schematic diagram for the display panel that a kind of embodiment of the disclosure provides；
Fig. 2 is the schematic diagram for the insulated column that a kind of embodiment of the disclosure provides.
Fig. 3 is the flow chart for the display panel manufacturing method that a kind of embodiment of the disclosure provides；
Fig. 4 is the detail flowchart of step S200 in Fig. 3.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to example set forth herein；On the contrary, thesing embodiments are provided so that the disclosure will more
Fully and completely, and by the design of example embodiment comprehensively it is communicated to those skilled in the art.Described feature, knot
Structure or characteristic can be incorporated in any suitable manner in one or more embodiments.In the following description, it provides perhaps
More details fully understand embodiment of the present disclosure to provide.It will be appreciated, however, by one skilled in the art that can
It is omitted with technical solution of the disclosure one or more in the specific detail, or others side can be used
Method, constituent element, device, step etc..In other cases, be not shown in detail or describe known solution to avoid a presumptuous guest usurps the role of the host and
So that all aspects of this disclosure thicken.
In addition, attached drawing is only the schematic illustrations of the disclosure, it is not necessarily drawn to scale.Identical attached drawing mark in figure
Note indicates same or similar part, thus will omit repetition thereof.Some block diagrams shown in the drawings are function
Energy entity, not necessarily must be corresponding with physically or logically independent entity.These function can be realized using software form
Energy entity, or these functional entitys are realized in one or more hardware modules or integrated circuit, or at heterogeneous networks and/or place
These functional entitys are realized in reason device device and/or microcontroller device.
Term "one", " one ", "the" and " described " to indicate there are one or more elements/component part/etc.；With
Language " comprising " and " having " is to indicate the open meaning being included and refer to element/composition portion in addition to listing
Also may be present except divide/waiting other element/component part/etc.；Term " first ", " second ", " third " etc. are only as label
It uses, is not the quantity limitation to its object.
It has been found that insulated column, which mainly passes through undercutting etch process, to be made to form side spill looks, and pass through the wider part in top
To block luminescent material.But the isolation rod structure formed after the completion of insulated column lateral erosion, being partially in for side pocket overhead are hanging
Part easily occurs in the subsequent process for state de- due to the thinner thickness (300A) of overhead overhanging portion after formation side spill looks
It falls, and then causes herein to luminous material layer isolated failure, so as to cause water oxygen invasion occurs.
A kind of display panel is provided firstly in this example embodiment, as depicted in figs. 1 and 2, display panel includes: base
Plate 10, insulated column 20, passivation layer (PVX) 30 and display layer.Substrate 10 include aperture area, around aperture area transition region and enclose
Around the viewing area of transition region；Insulated column 20 is set to transition region, and the side wall of insulated column 20, which is recessed inwardly, is formed with recessed portion；Passivation layer
30 at least cover insulated column 20, and are covered on insulated column 20 with the shape, and passivation layer 30 covers recessed portion；Display layer covers transition region
And viewing area, display layer include luminescent layer 40, luminescent layer 40 is interrupted setting in the recessed portion of insulated column 20.
The transition region of the display panel of the offer of the disclosure, substrate 10 is equipped with insulated column 20, the side wall shape of insulated column 20
At there is the groove for blocking luminescent layer 40, passivation layer 30 is covered on insulated column 20 with the shape, can go out in the recessed portion of insulated column 20
The part hanging to 20 side wall of insulated column forms supporting role, and 20 structure of protective separation column avoids insulated column 20 outstanding in recessed portion
Empty part sinks and insulated column 20 is caused to block the effect of luminescent layer 40, and then ensures that water oxygen invasion channel is truncated in insulated column 20
Validity, can be improved the encapsulation yield of display panel.
As shown in Fig. 2, insulated column 20 includes the first metal layer 201, second stacked gradually to the direction far from substrate 10
Metal layer 202 and third metal layer 203, the side wall that the outer rim of third metal layer 203 stretches out second metal layer 202 form recess
Portion acts on the interruption of luminescent layer 40 to be formed, and then water oxygen is blocked to invade channel.
Specifically, passivation layer 30 is covered on the shape on insulated column 20.After passivation layer 30 covers insulated column 20, passivation layer 30
Shape is identical as the shape of insulated column 20, i.e., passivation layer 30 also forms sunk area in the side of insulated column 20, to insulated column 20
Support is formed in the hanging region of recessed portion, avoiding its bending from falling off causes insulated column 20 to fail, it is ensured that water is truncated in insulated column 20
The validity in oxygen invasion channel.
Further, the first metal layer 201 outer rim stretch out second metal layer 202 side wall, i.e., the first metal layer 201 with
The outer rim of third metal layer 203 stretches out the side wall of second metal layer 202 simultaneously, the first metal layer 201, third metal layer 203 with
The side wall of second metal layer 202 cooperatively forms recessed portion.
Specifically, passivation layer 30 covers the first metal layer 201, second metal layer 202 and third metal layer 203 with the shape.It is blunt
Change layer 30 to be fitted at recessed portion on the lower surface of third metal layer 203, on the side wall of second metal layer 202 and the first gold medal
On the upper surface for belonging to layer 201, is formed to third metal layer 203 in the support of recessed portion overhanging portion, avoid its bending from falling off and lead
Insulated column 20 is caused to fail, it is ensured that the validity in water oxygen invasion channel is truncated in insulated column 20.In addition, insulated column 20 can be by more layers structure
At, such as four layers, five layers or more, as long as above-mentioned 20 structure of insulated column can be formed.
Wherein, the material of the first metal layer 201 and third metal layer 203 includes Ti, and the material of second metal layer 202 includes
Al.Using this material selection, it is ensured that second metal layer 202 is when carrying out lateral erosion, the first metal layer 201 and third metal layer
203 not will receive the influence of etching.Those skilled in the art can also choose other materials, as long as being able to achieve above-mentioned technical effect
, the disclosure is without limitation.
Specifically, recessed portion is 1 μm~1.5 μm in the width radially of insulated column 20, i.e., from the side wall of insulated column 20 to
1 μm~1.5 μm of the depth of sunken inside.When insulated column 20 is by the first metal layer 201, second metal layer 202 and third metal layer 203
When composition, i.e. the distance between side wall of the edge of third metal layer 203 and second metal layer 202 is 1 μm~1.5 μm, first
The edge of metal layer 201 can also be 1 μm~1.5 μm with the distance between the side wall of second metal layer 202.Wherein, the first metal
The edge and second metal layer 202 at the distance between the edge of layer 201 and the side wall of second metal layer 202 and third metal 203
The distance between can be identical, can also be different.The depth of recessed portion is set as 1 μm~1.5 μm, can guarantee that passivation layer 30 is being isolated
Spreadability on the recessed portion of column 20 further ensures that the validity in water oxygen invasion channel is truncated in insulated column 20.Certainly, recessed portion
Depth be also smaller than 1 μm or be greater than 1.5 μm, the disclosure is without limitation.
Specifically, insulated column 20 can be equipped with multiple, and be spaced apart multiple insulated columns 20.Those skilled in the art should
Understand, with the increase of the quantity of insulated column 20, necessarily will increase the validity to truncation water oxygen invasion channel, but insulated column 20
The increase of quantity necessarily will increase the manufacturing process difficulty of display panel, increase production cost.As shown in Figure 1, set there are two every
From column 20, it is arranged at intervals on substrate.By the way that two insulated columns 20 are arranged, insulated column 20 can be improved, water oxygen invasion channel is truncated
Validity, and be avoided that 20 quantity of insulated column excessively causes production cost excessive.Those skilled in the art can also be on substrate
One, three or more insulated columns 20 are set, and the disclosure is without limitation.
When multiple insulated columns 20 are arranged, passivation layer 30 covers the lining between multiple insulated columns 20 and insulated column 20 simultaneously
Bottom, to reduce the difficulty of 30 formation process of passivation layer.As shown in Figure 1, block piece 60 is additionally provided in the transition region of display panel, every
From column 20 in the transition region between viewing area and block piece 60, passivation layer 30 covers insulated column 20 and viewing area and blocking
Transition region between part 60.
As shown in Figure 1, being set to dot structure on viewing area, substrate 10 is equipped with inorganic layer 11, and substrate 10 can be sub- for polyamides
Amine etc. constitutes flexible base board or glass substrate, and substrate 10 and inorganic layer 11 are run through in aperture area.It is formed on viewing area and is arranged in array
The dot structure of cloth, dot structure include multiple TFT, and TFT can be top gate type TFT, bottom gate type TFT or double grid type TFT, this Shen
Please with no restrictions to the type of TFT.The flatness layer (PLN) 71 and pixel defining layer of covering dot structure are also formed on substrate
(PDL)72。
As shown in Figure 1, thinner package film layer to far from substrate 10 direction successively include the first inorganic thin film layer 51, it is organic thin
Film layer 52 and the second inorganic thin film layer 53.Any material can be in first inorganic thin film layer 51 and the second inorganic thin film layer 53
SiNx、SiCN、SiO2Deng.Chemical vapor deposition, physics gas can be used in first inorganic thin film layer 51 and the second inorganic thin film layer 53
Mutually the modes such as deposition, atomic force deposition are formed.Organic thin film layer 52 may include acrylic acid based polymer, silicon-based polymer etc..Have
Machine film layer 52 can be used the modes such as inkjet printing, spraying formed on the first inorganic thin film layer 51.
The disclosure additionally provides a kind of display device, which includes above-mentioned display panel, and display device for example may be used
There is the electronic equipment of display panel for mobile phone, tablet computer, electronic watch, motion bracelet, laptop etc..Display dress
The technical effect that setting has can refer to the discussion of the above-mentioned technical effect to display panel, and details are not described herein.
The disclosure additionally provides the manufacturing method of display panel, as shown in figure 3, the manufacturing method includes:
Step S100, a substrate is formed, display base plate includes aperture area, around the transition region of aperture area and around transition
The viewing area in area；
Step S200, insulated column is formed in transition region, the side wall of insulated column, which is recessed inwardly, is formed with recessed portion；
Step S300, passivation layer is at least formed on insulated column, passivation layer is covered on the shape on insulated column 20；
Step S400, display layer is formed in transition region and viewing area, display layer includes luminescent layer, and luminescent layer is in insulated column
Recessed portion be interrupted setting.
The manufacturing method for the display panel that the disclosure provides, is formed with insulated column in the transition region of substrate, insulated column
Side wall is formed with the groove for blocking luminescent layer, and passivation layer is covered on insulated column with the shape, can go out pair in the recessed portion of insulated column
The hanging part of insulated column side wall forms supporting role, and protective separation rod structure avoids the part that insulated column is hanging in recessed portion
Sink and insulated column is caused to block the effect of luminescent layer, and then ensures the validity in insulated column truncation water oxygen invasion channel, it can
Improve the encapsulation yield of display panel.
In the following, each step of the manufacturing method to the display panel in this example embodiment is carried out further
It is bright.
In the step s 100, formed a substrate, display base plate include aperture area, around aperture area transition region and surround
The viewing area of transition region.
Specifically, as shown in Figure 1, forming a substrate 10 is used as carrier, which can be made of flexible material, example
Such as polyimides.Aperture area, the transition region around aperture area and the viewing area around transition region are formed on the substrate 10.Aperture
Area can be used for being arranged the devices such as camera, sensor, and transition region surrounds via area in a ring.
In step s 200, insulated column is formed in transition region, the side wall of insulated column, which is recessed inwardly, is formed with recessed portion.
Specifically, as shown in Figure 1, on viewing area formed insulated column 20, by undercutting etch process insulated column 20 side wall
Upper to form the recessed portion being recessed inwardly, recessed portion is 1 μm~1.5 μm in the width of insulated column 20 radially.Pass through insulated column 20
Setting, can be avoided steam or oxygen etc. from through hole intrusion display panel inside cause display panel GDS phenomenon occur.
Further, as shown in figure 4, in transition region formed insulated column comprising steps of
Step S210, it stacks gradually to form the first metal layer, second metal layer to the direction far from substrate in transition region
With third metal layer；
Specifically, as shown in Fig. 2, on substrate by depositing operation sequentially form the first metal layer, second metal layer and
Then third metal layer performs etching to form insulated column the first metal layer, second metal layer and third metal layer.
Wherein, the material of the first metal layer and third metal layer is Ti, and the material of second metal layer is Al.
Step S220, lateral erosion is carried out to two metal layers, forms recessed portion.
Specifically, anode wet etching can be used, second metal layer is performed etching, form the recessed portion of predetermined depth.
When the material of the first metal layer and third metal layer is Ti, when the material of second metal layer is Al, wet etching only etches second
Metal layer can more preferably control the width of second metal layer lateral etching without etching first metal layer and third metal layer.
In step S300, passivation layer is at least formed on insulated column, passivation layer is covered on insulated column with the shape.
Specifically, as shown in Fig. 2, forming 30 material of passivation layer of covering on insulated column 20, then pass through mask and quarter
Etching technique forms the passivation layer 30 being covered on insulated column 20 with the shape.After passivation layer 30 is covered on the shape on insulated column 20, every
It is corresponding on side wall from column 20 to be formed with recessed portion, to 20 structure of insulated column formed protect under the action of avoid steam or
Oxygen etc. is inside through hole intrusion display panel.
In step S400, form display layer in transition region and viewing area, display layer includes luminescent layer, luminescent layer every
Recessed portion from column is interrupted setting.
Specifically, when viewing area forms dot structure, luminous material layer, i.e. luminescent material are also formed in transition region
Layer covering insulated column 20.Luminous material layer is organic material, and steam and oxygen are easy to enter viewing area by luminous material layer
Luminescent layer 40 can be interrupted by the setting of insulated column 20 using recessed portion by domain, and then block the channel of water oxygen invasion.
The detail of each layer is described in detail in corresponding embodiment in display panel, about this method reality
The details not described in example is applied, can refer to the associated description in above-mentioned display panel embodiment.
It should be noted that although describing each step of method in the disclosure in the accompanying drawings with particular order, this is simultaneously
Undesired or hint must execute these steps in this particular order, or have to carry out the ability of step shown in whole
Realize desired result.Additional or alternative, it is convenient to omit multiple steps are merged into a step and executed by certain steps,
And/or a step is decomposed into execution of multiple steps etc..
Those skilled in the art after considering the specification and implementing the invention disclosed here, will readily occur to its of the disclosure
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the disclosure, these modifications, purposes or
Person's adaptive change follows the general principles of this disclosure and including the undocumented common knowledge in the art of the disclosure
Or conventional techniques.The description and examples are only to be considered as illustrative, and the true scope and spirit of the disclosure are by appended
Claim is pointed out.
Claims (10)
1. a kind of display panel characterized by comprising
Substrate, including aperture area, around the transition region of aperture area and around the viewing area of the transition region；
Insulated column is set to the transition region, and the side wall of the insulated column, which is recessed inwardly, is formed with recessed portion；
Passivation layer at least covers the insulated column, and is covered on the insulated column with the shape, and the passivation layer covers the recess
Portion；
Display layer covers the transition region and the viewing area, and the display layer includes luminescent layer, the luminescent layer it is described every
Recessed portion from column is interrupted setting.
2. display panel according to claim 1, which is characterized in that the insulated column includes to the side far from the substrate
To the first metal layer, second metal layer and the third metal layer stacked gradually, the outer rim of third metal layer stretches out second gold medal
The side wall for belonging to layer forms the recessed portion.
3. display panel according to claim 2, which is characterized in that the outer rim of first metal stretches out second gold medal
Belong to the side wall of layer, the first metal layer, the third metal layer and the side wall cooperatively form the recessed portion.
4. display panel according to claim 2, which is characterized in that the material of the first metal layer and third metal layer
Including Ti, the material of the second metal layer includes Al.
5. display panel according to claim 1, which is characterized in that width of the recessed portion in the insulated column radially
Degree is 1 μm~1.5 μm.
6. display panel according to claim 1, which is characterized in that the insulated column be equipped with it is multiple, and it is multiple it is described every
It is spaced apart from column.
7. a kind of display device, which is characterized in that including display panel described in any one of claims 1-6.
8. a kind of manufacturing method of display panel characterized by comprising
A substrate is formed, the display base plate includes aperture area, around the transition region of aperture area and around the transition region
Viewing area；
Insulated column is formed in the transition region, the side wall of the insulated column, which is recessed inwardly, is formed with recessed portion；
Passivation layer is at least formed on the insulated column, the passivation layer is covered on the shape on the insulated column；
Display layer is formed in the transition region and the viewing area, the display layer includes luminescent layer, and the luminescent layer is in institute
State the recessed portion interruption setting of insulated column.
9. manufacturing method according to claim 8, which is characterized in that form insulated column in the transition region, comprising:
It stacks gradually to form the first metal layer, second metal layer and third to the direction far from the substrate in the transition region
Metal layer；
Lateral erosion is carried out to two metal layer, forms the recessed portion.
10. manufacturing method according to claim 8, which is characterized in that the recessed portion in the insulated column radially
Width is 1 μm~1.5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910812621.2A CN110518147B (en) | 2019-08-30 | 2019-08-30 | Display panel, manufacturing method thereof and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910812621.2A CN110518147B (en) | 2019-08-30 | 2019-08-30 | Display panel, manufacturing method thereof and display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110518147A true CN110518147A (en) | 2019-11-29 |
| CN110518147B CN110518147B (en) | 2023-07-21 |
Family
ID=68628279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910812621.2A Active CN110518147B (en) | 2019-08-30 | 2019-08-30 | Display panel, manufacturing method thereof and display device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110518147B (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111244112A (en) * | 2020-01-20 | 2020-06-05 | 京东方科技集团股份有限公司 | Display panel, display device and manufacturing method of display panel |
| CN111312921A (en) * | 2020-02-20 | 2020-06-19 | 京东方科技集团股份有限公司 | Display panel, manufacturing method thereof and display device |
| CN111354772A (en) * | 2020-03-13 | 2020-06-30 | 京东方科技集团股份有限公司 | Display substrate, preparation method thereof and display device |
| CN111653592A (en) * | 2020-06-11 | 2020-09-11 | Oppo广东移动通信有限公司 | Array substrate, manufacturing method thereof, display panel and electronic equipment |
| CN111968946A (en) * | 2020-08-26 | 2020-11-20 | 京东方科技集团股份有限公司 | Initial array substrate and manufacturing method and detection method thereof |
| CN112768499A (en) * | 2021-01-13 | 2021-05-07 | 重庆京东方显示技术有限公司 | Organic light-emitting diode display substrate, preparation method and display panel |
| WO2021114128A1 (en) * | 2019-12-11 | 2021-06-17 | 京东方科技集团股份有限公司 | Display substrate and manufacturing method thereof, and display device |
| CN113314683A (en) * | 2021-05-27 | 2021-08-27 | 京东方科技集团股份有限公司 | Retaining wall structure, display panel and display device |
| WO2021185045A1 (en) * | 2020-03-20 | 2021-09-23 | 京东方科技集团股份有限公司 | Array substrate and preparation method therefor, and display apparatus |
| CN113451531A (en) * | 2021-06-29 | 2021-09-28 | 合肥鑫晟光电科技有限公司 | Display panel, preparation method thereof and display device |
| CN114203932A (en) * | 2021-12-10 | 2022-03-18 | 云谷（固安）科技有限公司 | Display panel, preparation method thereof and display device |
| WO2022068450A1 (en) * | 2020-09-30 | 2022-04-07 | 京东方科技集团股份有限公司 | Display substrate and display panel |
| JP7446391B2 (en) | 2021-12-23 | 2024-03-08 | エルジー ディスプレイ カンパニー リミテッド | Luminescent display device and multi-screen display device using the same |
| CN111968946B (en) * | 2020-08-26 | 2024-06-11 | 京东方科技集团股份有限公司 | Initial array substrate, manufacturing method thereof and detection method thereof |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6456358B1 (en) * | 2000-04-26 | 2002-09-24 | Ritek Display Technology Co. | Surface-treatment apparatus for forming a photoresist-isolating wall on a panel |
| JP2011210540A (en) * | 2010-03-30 | 2011-10-20 | Canon Inc | Organic el display device and manufacturing method therefor |
| CN107452894A (en) * | 2017-07-31 | 2017-12-08 | 京东方科技集团股份有限公司 | A kind of organic EL display panel, its preparation method and display device |
| CN108574054A (en) * | 2018-04-17 | 2018-09-25 | 京东方科技集团股份有限公司 | A kind of production method of display panel, display device and display device |
| CN109742133A (en) * | 2019-02-28 | 2019-05-10 | 云谷（固安）科技有限公司 | Display panel and preparation method thereof and display device |
| CN109742117A (en) * | 2019-01-08 | 2019-05-10 | 京东方科技集团股份有限公司 | A kind of display base plate and preparation method thereof, display device |
| CN109801956A (en) * | 2019-03-13 | 2019-05-24 | 京东方科技集团股份有限公司 | Display device, display panel and its manufacturing method |
| CN109802052A (en) * | 2019-01-25 | 2019-05-24 | 上海天马微电子有限公司 | A kind of organic light emitting display panel and preparation method thereof |
| CN109888126A (en) * | 2019-02-28 | 2019-06-14 | 云谷（固安）科技有限公司 | Display panel and preparation method thereof and display device with it |
| CN109904346A (en) * | 2019-02-28 | 2019-06-18 | 云谷（固安）科技有限公司 | Display device, display panel and preparation method thereof |
| CN109935730A (en) * | 2019-03-28 | 2019-06-25 | 京东方科技集团股份有限公司 | Display base plate and preparation method thereof, display device |
| CN109935621A (en) * | 2019-03-29 | 2019-06-25 | 京东方科技集团股份有限公司 | Array substrate and its manufacturing method, display device |
| CN110120464A (en) * | 2019-05-27 | 2019-08-13 | 京东方科技集团股份有限公司 | Display base plate and preparation method thereof, display device |
| CN110164945A (en) * | 2019-06-03 | 2019-08-23 | 京东方科技集团股份有限公司 | A kind of preparation method of display base plate, display base plate and display device |
| CN110246984A (en) * | 2019-06-21 | 2019-09-17 | 京东方科技集团股份有限公司 | A kind of production method of display panel, display device and display panel |
| CN110277510A (en) * | 2019-06-27 | 2019-09-24 | 京东方科技集团股份有限公司 | A kind of display panel and preparation method thereof and display device |
-
2019
- 2019-08-30 CN CN201910812621.2A patent/CN110518147B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6456358B1 (en) * | 2000-04-26 | 2002-09-24 | Ritek Display Technology Co. | Surface-treatment apparatus for forming a photoresist-isolating wall on a panel |
| JP2011210540A (en) * | 2010-03-30 | 2011-10-20 | Canon Inc | Organic el display device and manufacturing method therefor |
| CN107452894A (en) * | 2017-07-31 | 2017-12-08 | 京东方科技集团股份有限公司 | A kind of organic EL display panel, its preparation method and display device |
| CN108574054A (en) * | 2018-04-17 | 2018-09-25 | 京东方科技集团股份有限公司 | A kind of production method of display panel, display device and display device |
| CN109742117A (en) * | 2019-01-08 | 2019-05-10 | 京东方科技集团股份有限公司 | A kind of display base plate and preparation method thereof, display device |
| CN109802052A (en) * | 2019-01-25 | 2019-05-24 | 上海天马微电子有限公司 | A kind of organic light emitting display panel and preparation method thereof |
| CN109888126A (en) * | 2019-02-28 | 2019-06-14 | 云谷（固安）科技有限公司 | Display panel and preparation method thereof and display device with it |
| CN109742133A (en) * | 2019-02-28 | 2019-05-10 | 云谷（固安）科技有限公司 | Display panel and preparation method thereof and display device |
| CN109904346A (en) * | 2019-02-28 | 2019-06-18 | 云谷（固安）科技有限公司 | Display device, display panel and preparation method thereof |
| CN109801956A (en) * | 2019-03-13 | 2019-05-24 | 京东方科技集团股份有限公司 | Display device, display panel and its manufacturing method |
| CN109935730A (en) * | 2019-03-28 | 2019-06-25 | 京东方科技集团股份有限公司 | Display base plate and preparation method thereof, display device |
| CN109935621A (en) * | 2019-03-29 | 2019-06-25 | 京东方科技集团股份有限公司 | Array substrate and its manufacturing method, display device |
| CN110120464A (en) * | 2019-05-27 | 2019-08-13 | 京东方科技集团股份有限公司 | Display base plate and preparation method thereof, display device |
| CN110164945A (en) * | 2019-06-03 | 2019-08-23 | 京东方科技集团股份有限公司 | A kind of preparation method of display base plate, display base plate and display device |
| CN110246984A (en) * | 2019-06-21 | 2019-09-17 | 京东方科技集团股份有限公司 | A kind of production method of display panel, display device and display panel |
| CN110277510A (en) * | 2019-06-27 | 2019-09-24 | 京东方科技集团股份有限公司 | A kind of display panel and preparation method thereof and display device |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021114128A1 (en) * | 2019-12-11 | 2021-06-17 | 京东方科技集团股份有限公司 | Display substrate and manufacturing method thereof, and display device |
| CN111244112B (en) * | 2020-01-20 | 2022-11-01 | 京东方科技集团股份有限公司 | Display panel, display device and manufacturing method of display panel |
| CN111244112A (en) * | 2020-01-20 | 2020-06-05 | 京东方科技集团股份有限公司 | Display panel, display device and manufacturing method of display panel |
| CN111312921A (en) * | 2020-02-20 | 2020-06-19 | 京东方科技集团股份有限公司 | Display panel, manufacturing method thereof and display device |
| CN111354772A (en) * | 2020-03-13 | 2020-06-30 | 京东方科技集团股份有限公司 | Display substrate, preparation method thereof and display device |
| CN111354772B (en) * | 2020-03-13 | 2023-04-07 | 京东方科技集团股份有限公司 | Display substrate, preparation method thereof and display device |
| WO2021185045A1 (en) * | 2020-03-20 | 2021-09-23 | 京东方科技集团股份有限公司 | Array substrate and preparation method therefor, and display apparatus |
| CN111653592A (en) * | 2020-06-11 | 2020-09-11 | Oppo广东移动通信有限公司 | Array substrate, manufacturing method thereof, display panel and electronic equipment |
| CN111968946A (en) * | 2020-08-26 | 2020-11-20 | 京东方科技集团股份有限公司 | Initial array substrate and manufacturing method and detection method thereof |
| CN111968946B (en) * | 2020-08-26 | 2024-06-11 | 京东方科技集团股份有限公司 | Initial array substrate, manufacturing method thereof and detection method thereof |
| WO2022068450A1 (en) * | 2020-09-30 | 2022-04-07 | 京东方科技集团股份有限公司 | Display substrate and display panel |
| CN112768499A (en) * | 2021-01-13 | 2021-05-07 | 重庆京东方显示技术有限公司 | Organic light-emitting diode display substrate, preparation method and display panel |
| CN113314683A (en) * | 2021-05-27 | 2021-08-27 | 京东方科技集团股份有限公司 | Retaining wall structure, display panel and display device |
| CN113451531A (en) * | 2021-06-29 | 2021-09-28 | 合肥鑫晟光电科技有限公司 | Display panel, preparation method thereof and display device |
| CN114203932A (en) * | 2021-12-10 | 2022-03-18 | 云谷（固安）科技有限公司 | Display panel, preparation method thereof and display device |
| JP7446391B2 (en) | 2021-12-23 | 2024-03-08 | エルジー ディスプレイ カンパニー リミテッド | Luminescent display device and multi-screen display device using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110518147B (en) | 2023-07-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110518147A (en) | Display panel and its manufacturing method, display device | |
| US10896935B2 (en) | Display panel, method for fabricating the same, and display device | |
| US11011714B2 (en) | Flexible organic electroluminescence device (OLED) display panel and manufacturing method thereof | |
| CN107957813B (en) | A kind of flexible touching display screen and preparation method thereof | |
| US11482694B2 (en) | Display panel, method for fabricating the same, and display device | |
| CN109713162A (en) | A kind of display panel and display device | |
| US11349104B2 (en) | Display panel and method of manufacturing the same | |
| CN106249975B (en) | A kind of production method of touch screen, display device and touch screen | |
| CN106711179B (en) | AMOLED transparent display and preparation method thereof | |
| US20170369983A1 (en) | Mask assembly for thin film deposition and method of manufacturing the same | |
| US9252167B2 (en) | Active device array substrate | |
| CN109326614A (en) | Display base plate and its manufacturing method, display device | |
| US20230209974A1 (en) | Manufacturing method for display panel, display panel, and display device | |
| US11450839B2 (en) | Display device and manufacturing method thereof comprising patterning light-emitting layer in opening region | |
| CN107579075A (en) | Display device | |
| WO2019148838A1 (en) | Touch-control display substrate, manufacturing method, touch-control display apparatus and driving method | |
| KR20200083615A (en) | OLED display substrate and its manufacturing method and display device | |
| CN108493218A (en) | Pressure sensitivity touch-control display panel and preparation method thereof, display device | |
| WO2019184641A1 (en) | Thin film encapsulation method, thin film encapsulation structure, and display device | |
| CN113540201B (en) | Display substrate and display device | |
| US8994679B2 (en) | Touch panel, touch display apparatus using the same and manufactured method thereof | |
| TWI676307B (en) | Organic electroluminescent device and preparation method thereof | |
| CN109213372A (en) | A kind of touch panel and preparation method thereof, touch device | |
| CN102983103A (en) | Method of fabricating thin film transistor array substrate, array substrate and display device | |
| CN105260052B (en) | Cover board and preparation method thereof, display device and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |