CN115921451B - Vertical furnace tube cleaning tank - Google Patents
Vertical furnace tube cleaning tank Download PDFInfo
- Publication number
- CN115921451B CN115921451B CN202211666049.1A CN202211666049A CN115921451B CN 115921451 B CN115921451 B CN 115921451B CN 202211666049 A CN202211666049 A CN 202211666049A CN 115921451 B CN115921451 B CN 115921451B
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- CN
- China
- Prior art keywords
- furnace tube
- mounting block
- nozzle
- cleaning tank
- fixing plate
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- 238000004140 cleaning Methods 0.000 title claims abstract description 38
- 239000007921 spray Substances 0.000 claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005406 washing Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Abstract
The application relates to a vertical furnace tube cleaning tank, which comprises a tank body and a square supporting frame, wherein the square supporting frame is used for supporting a furnace tube so that the furnace tube is buckled on the supporting frame in a mode that an opening faces downwards, a first nozzle is responsible for spray washing of the furnace tube below, a second nozzle is responsible for spray washing of the furnace tube above, the interior of the furnace tube is sprayed and washed through the two nozzles at the same time, the cleaning effect on the inner wall of the furnace tube is improved, and meanwhile, a nozzle is slightly higher than the supporting frame, so that the furnace tube is simple and convenient to feed.
Description
Technical Field
The application belongs to the technical field of semiconductor production equipment, and particularly relates to a vertical furnace tube cleaning tank.
Background
Along with the development of the technology in the semiconductor field, the requirements of semiconductor manufacturers on the cleanliness of wafers are higher and higher, the requirements on the cleanliness of furnace tubes in direct contact with the wafers are also improved, the furnace tubes are usually provided with a circular furnace tube cap on one side, the furnace tube body is a cylindrical furnace tube side wall, and vertical furnace tube cleaning equipment is specially designed for the requirements. That is, the furnace tube is vertically placed on the supporting frame, and the furnace tube is sprayed from the outside and the inside through the cleaning nozzle.
Chinese patent document CN208853393U discloses a vertical furnace tube cleaning mechanism, including outer shower nozzle support frame, interior shower nozzle support frame, revolving stage and furnace tube support frame, characterized by: a rotary table is arranged on the furnace tube support frame, and a furnace tube is placed on the rotary table; the inner spray head support frame passes through the furnace tube support frame and the rotary table from bottom to top and stretches into the top end of the interior of the furnace tube, and a plurality of groups of inner spray head groups are uniformly arranged on the inner spray head support frame from top to bottom; the outer shower nozzle support frame sets up in boiler tube one side, and outer shower nozzle support frame upper portion extends to the boiler tube top directly over from boiler tube one side, evenly is equipped with a plurality of outer shower nozzles along length direction on the outer shower nozzle support frame, and a plurality of outer shower nozzle spouts are towards the boiler tube. Because the long inner nozzle support frame is arranged in the furnace tube, the furnace tube needs to be lifted to cross the inner nozzle support frame, and the feeding process of the furnace tube is extremely difficult.
Disclosure of Invention
The invention aims to solve the technical problems that: in order to solve the defects in the prior art, the vertical furnace tube cleaning tank is good in cleaning effect and simple and convenient in feeding process.
The technical scheme adopted for solving the technical problems is as follows:
a vertical furnace tube cleaning tank, comprising:
The groove body is square and provided with four side walls;
The support frame is square, is provided with a round fixing plate positioned at the center, is hollow in the middle of the round fixing plate, the hollow part in the middle of the round fixing plate is provided with a mounting block, the center of the mounting block is provided with a first spout which is inclined upwards, the center of the top surface of the mounting block is provided with a second channel and a rotating body, the rotating body is provided with a second spout which is inclined upwards, the second spout which is inclined upwards can be driven to rotate when spraying liquid, the second spout is communicated with the second channel, the height of the spray head is less than one fifth of the height of the furnace tube, the height of the second spout is greater than one eighth of the height of the furnace tube, and an extension line of the central axis of the second spout points to the joint between the furnace tube cap and the side wall of the furnace tube.
Preferably, the vertical furnace tube cleaning tank comprises an upper mounting block, a lower mounting block and a plane bearing arranged between the upper mounting block and the lower mounting block so that the upper mounting block can rotate relative to the lower mounting block.
Preferably, in the vertical furnace tube cleaning tank, the first nozzle is arranged on the upper mounting block, the central axis of the first nozzle is not coplanar with the central axis of the upper mounting block, and the first nozzle can drive the upper mounting block to rotate when spraying water.
Preferably, the vertical furnace tube cleaning tank is provided with sealing rings between the plane bearing and the upper and lower mounting blocks respectively.
Preferably, the top of the rotating body is an inclined plane, a second nozzle is arranged on the inclined plane, the second nozzle is not coplanar with the central axis of the rotating body, and the cleaning liquid can drive the rotating body to rotate when being sprayed out from the second nozzle after flowing through the second channel and the rotating body.
Preferably, the bottom of the circular fixing plate is provided with a water inlet which is connected with a water supply pipe through a hose.
Preferably, the vertical furnace tube cleaning tank of the invention, the supporting frame further comprises diagonal fixing plates for connecting four top angles of the supporting frame with the circular fixing plates, a central line fixing plate for connecting the centers of four sides of the supporting frame with the circular fixing plates, and a central line fixing plate for connecting the centers of two adjacent sides of the four sides of the supporting frame.
Preferably, the vertical furnace tube cleaning tank is characterized in that the diagonal fixing plate is provided with a fixing block, the fixing block is arranged on a sliding rail arranged along the diagonal fixing plate, and the fixing block can be fixed on the sliding rail by screwing a screw.
Preferably, the four sides of the top of the tank body of the vertical furnace tube cleaning tank are provided with flanges.
Preferably, the vertical furnace tube cleaning tank has a bevel in the inclined tank body.
The beneficial effects of the invention are as follows:
The vertical furnace tube cleaning tank comprises a tank body and a square supporting frame, wherein the square supporting frame is used for supporting a furnace tube so that the furnace tube is buckled on the supporting frame in a mode that an opening faces downwards, a first nozzle is used for spraying the furnace tube towards the lower part, a second nozzle is used for spraying the furnace tube towards the upper part, and the two nozzles are used for spraying the interior of the furnace tube at the same time, so that the cleaning effect on the inner wall of the furnace tube is improved. Meanwhile, the spray head is slightly higher than the support frame, so that the furnace tube is simple and convenient to feed.
Drawings
The technical scheme of the application is further described below with reference to the accompanying drawings and examples.
FIG. 1 is a schematic diagram of a vertical furnace tube cleaning tank according to an embodiment of the present application;
FIG. 2 is a schematic view of a supporting frame according to an embodiment of the present application;
FIG. 3 is a cross-sectional view of a support bracket according to an embodiment of the present application;
FIG. 4 is a bottom view of a support bracket according to an embodiment of the present application;
The reference numerals in the figures are:
1. A tank body;
2. A support frame;
11. Flanging;
12. a water spray pipe;
15. An overflow trough;
21. A hinge;
22. a circular fixing plate;
23. a diagonal fixing plate;
24. A midline fixing plate;
25. A center line fixing plate;
26. a fixed block;
31. a mounting block;
32. a spray head;
33. A water inlet;
311. A first channel;
312. a first spout;
313. A planar bearing;
314. an upper mounting block;
315. a lower mounting block;
321. A second channel;
322. a rotating body;
323. And a second nozzle.
Detailed Description
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the scope of the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art in a specific case.
The technical scheme of the present application will be described in detail below with reference to the accompanying drawings in combination with embodiments.
Examples
The embodiment provides a cleaning tank for a vertical furnace tube, as shown in fig. 1, including:
The groove body 1 is square, four sides of the top of the groove body 1 are provided with turned edges 11, at least three turned edges 11 on three sides are provided with inclined planes in the inclined groove body, so that liquid falling onto the turned edges 11 can flow back into the groove body 1, a spray pipe 12 is arranged in the groove body 1, and the nozzle of the spray pipe 12 is inclined downwards;
The support frame 2 is arranged on one side of the tank body 1 through the hinge 21, so that the support frame 2 can rotate around the hinge 21 to be opened, other cleaning objects are conveniently placed in the tank body 1, the support frame 2 is square, as shown in fig. 2, a round fixing plate 22 is arranged at the center, the middle of the round fixing plate 22 is hollowed out, a mounting block 31 is arranged at the hollowed-out part in the middle of the round fixing plate 22, the center of the mounting block 31 is a first channel 311, the top surface of the mounting block 31 is provided with a first spout 312 which is obliquely upwards, the center of the top surface of the mounting block 31 is provided with a spray head 32 (the first spout 312 is arranged around the spray head 32), the spray head 32 is provided with a second channel 321 and a rotating body 322 which are obliquely upwards, the second spout 323 can be driven to rotate when the liquid is sprayed out, the second spout 323 is communicated with the second channel 321, the height of the spray head 32 is less than one fifth of the height of the furnace tube, the height (the height of the support frame 31 is greater than one eighth of the surface of the furnace tube), and the second spout 323 is connected with the side wall of the furnace tube at the position of the side wall of the furnace tube.
The vertical furnace tube cleaning tank of this embodiment, including cell body 1, square support frame 2 is used for supporting the furnace tube and makes the furnace tube detain on support frame 2 with the mode of opening down, and first spout 312 is responsible for the spray rinsing of furnace tube near the below, and second spout 323 is responsible for the spray rinsing of furnace tube near the top, carries out the spray rinsing to the furnace tube inside simultaneously through two spouts, has improved the cleaning performance to the furnace tube inner wall, simultaneously, shower nozzle 32 slightly is higher than support frame 2 for the material loading of furnace tube is simple and convenient. The extension line of the central axis of the second nozzle 323 points to the joint (the inner surface) between the furnace pipe cap and the furnace pipe side wall, and when the water pressure is enough, water can be sprayed to the whole furnace pipe side wall, so that the cleaning effect is ensured.
The mounting block 31 comprises an upper mounting block 314, a lower mounting block 315 and a plane bearing 313 arranged between the upper mounting block 314 and the lower mounting block 315 so that the upper mounting block 314 can rotate relative to the lower mounting block 315, sealing rings are respectively arranged between the plane bearing 313 and the upper mounting block 314 and between the plane bearing 313 and the lower mounting block 315, the first nozzle 312 is arranged on the upper mounting block 314, the central axis of the first nozzle 312 is not coplanar with the central axis of the upper mounting block 314, and the first nozzle 312 can drive the upper mounting block 314 to rotate when spraying water. The first nozzle 312 also rotates, so that the first nozzle 312 spraying to the lower part of the furnace tube also rotates, thereby being capable of sweeping more areas inside the furnace tube and improving the cleaning effect.
The lower mounting block 315 is directly connected and fixed with the rotating body 322, and a through hole can be arranged at the connecting part to facilitate the flow of the cleaning liquid, and the upper mounting block 314 is in sealing connection with the rotating body 322.
The top of the rotating body 322 is an inclined slope, a second nozzle 323 is provided on the inclined slope, the second nozzle 323 is not coplanar with the central axis of the rotating body 322, and the cleaning solution can drive the rotating body 322 to rotate when being sprayed out from the second nozzle 323 after flowing through the second channel 321 and the rotating body 322.
The bottom of the circular fixing plate 22 is provided with a water inlet 33, and is connected with a water supply pipe through a hose, and the hose has a certain deformation capacity and can be adapted to the overturning of the supporting frame 2.
The support frame 2 still includes the connection four apex angles of support frame 2 and the diagonal fixed plate 23 of circular fixed plate 22, connects the center line fixed plate 24 of support frame 2 four sides center and circular fixed plate 22, connect the center line fixed plate 25 of adjacent two limit in the support frame 2 four sides, be provided with fixed block 26 on the diagonal fixed plate 23, can reduce the use of material as far as possible under the circumstances that guarantee support frame 2 has enough intensity, fixed block 26 sets up on follow on the slide rail that diagonal fixed plate 23 arranged, can with fixed block 26 is fixed on the slide rail through screwing up the screw, thereby fixed block 26 realizes the four corners location and can adapt to not unidimensional boiler tube.
It is noted that the overflow trough 15 also has an outer trough body on the outside, which collects the overflowed liquid.
With the above-described preferred embodiments according to the present application as a teaching, the worker skilled in the art could make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of claims.
Claims (7)
1. A vertical furnace tube cleaning tank, comprising:
the groove body (1) is square and is provided with four side walls;
The support frame (2) is arranged on one side of the groove body (1) through a hinge (21), the support frame (2) can rotate around the hinge (21) to be opened, the support frame (2) is square, a round fixing plate (22) positioned at the center is arranged, the middle of the round fixing plate (22) is hollowed out, a mounting block (31) is arranged on the hollowed-out part in the middle of the round fixing plate (22), the center of the mounting block (31) is a first channel (311) and the top surface of the mounting block is provided with a first spout (312) which is obliquely upwards, a spray head (32) is arranged in the center of the top surface of the mounting block (31), the spray head (32) is provided with a second channel (321) and a rotating body (322) which are obliquely upwards, the second spout (323) which is obliquely upwards can drive the rotating body (322) to rotate when the liquid is sprayed out, the second spout (323) is communicated with the second channel (321), the height of the spray head (32) is less than one fifth of the height of a furnace tube, and the height of the second spout (323) is more than one of the eight spout (323) which is connected with the side wall of the furnace tube;
the mounting block (31) comprises an upper mounting block (314) and a lower mounting block (315), and a plane bearing (313) is arranged between the upper mounting block (314) and the lower mounting block (315) so that the upper mounting block (314) can rotate relative to the lower mounting block (315);
The first nozzle (312) is arranged on the upper mounting block (314), the central axis of the first nozzle (312) is not coplanar with the central axis of the upper mounting block (314), and the first nozzle (312) can drive the upper mounting block (314) to rotate when spraying water;
The top of the rotating body (322) is an inclined plane, a second nozzle (323) is formed in the inclined plane, the second nozzle (323) is not coplanar with the central axis of the rotating body (322), and when the cleaning liquid flows through the second channel (321) and the rotating body (322) and then is sprayed out of the second nozzle (323), the rotating body (322) can be driven to rotate.
2. The vertical furnace tube cleaning tank according to claim 1, characterized in that sealing rings are respectively arranged between the plane bearing (313) and the upper mounting block (314) and the lower mounting block (315).
3. The vertical furnace tube cleaning tank according to claim 1, characterized in that a water inlet (33) is provided at the bottom of the circular fixing plate (22) and is connected with a water supply pipe through a hose.
4. The vertical furnace tube cleaning tank according to claim 1, wherein the supporting frame (2) further comprises diagonal fixing plates (23) connecting four top corners of the supporting frame (2) with the circular fixing plates (22), and a central line fixing plate (24) connecting four sides of the supporting frame (2) with the circular fixing plates (22) and a central line fixing plate (25) connecting centers of two adjacent sides of four sides of the supporting frame (2).
5. The vertical furnace tube cleaning tank according to claim 4, characterized in that a fixing block (26) is provided on the diagonal fixing plate (23), the fixing block (26) is provided on a slide rail arranged along the diagonal fixing plate (23), and the fixing block (26) can be fixed on the slide rail by tightening a screw.
6. The vertical furnace tube cleaning tank according to claim 1, wherein four sides of the top of the tank body (1) are provided with flanges (11).
7. The vertical furnace tube cleaning tank according to claim 6, characterized in that the flanges (11) on at least three sides have inclined surfaces in the inclined tank body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211666049.1A CN115921451B (en) | 2022-12-23 | Vertical furnace tube cleaning tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211666049.1A CN115921451B (en) | 2022-12-23 | Vertical furnace tube cleaning tank |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115921451A CN115921451A (en) | 2023-04-07 |
| CN115921451B true CN115921451B (en) | 2024-07-02 |
Family
ID=
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB190517856A (en) * | 1905-09-04 | 1906-06-14 | Emil Weymar | Improvements in and relating to Means for Cleaning Bottles, Jars, Jugs, Glasses and the like. |
| CN210546830U (en) * | 2019-09-24 | 2020-05-19 | 江苏芯梦半导体设备有限公司 | Full-automatic vertical quartz tube cleaning machine |
| CN211217882U (en) * | 2019-12-17 | 2020-08-11 | 无锡亚电智能装备有限公司 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
| CN114192515A (en) * | 2021-10-21 | 2022-03-18 | 无锡亚电智能装备有限公司 | Furnace tube cleaning nozzle and furnace tube cleaning device |
| CN219292277U (en) * | 2022-12-23 | 2023-07-04 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB190517856A (en) * | 1905-09-04 | 1906-06-14 | Emil Weymar | Improvements in and relating to Means for Cleaning Bottles, Jars, Jugs, Glasses and the like. |
| CN210546830U (en) * | 2019-09-24 | 2020-05-19 | 江苏芯梦半导体设备有限公司 | Full-automatic vertical quartz tube cleaning machine |
| CN211217882U (en) * | 2019-12-17 | 2020-08-11 | 无锡亚电智能装备有限公司 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
| CN114192515A (en) * | 2021-10-21 | 2022-03-18 | 无锡亚电智能装备有限公司 | Furnace tube cleaning nozzle and furnace tube cleaning device |
| CN219292277U (en) * | 2022-12-23 | 2023-07-04 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
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