CN214976141U

CN214976141U - Box cleaning equipment

Info

Publication number: CN214976141U
Application number: CN202121047019.3U
Authority: CN
Inventors: 钱诚; 李刚; 霍召军
Original assignee: Wuxi Aelsystem Intelligent Equipment Co ltd
Current assignee: Wuxi Aelsystem Intelligent Equipment Co ltd
Priority date: 2021-05-14
Filing date: 2021-05-14
Publication date: 2021-12-03
Anticipated expiration: 2031-05-14

Abstract

The utility model discloses a box body cleaning equipment, including being used for holding washing tank and the pipeline part who washs the box. In the cleaning process, make washing liquid and gas in the box take away from the box in through pipe fittings, prevent gaseous gathering in the box to prevent that the box from floating, washing liquid or gaseous backward flow to the washing tank after the wet return flows out from the washing shower nozzle in, realize the washing liquid circulation, prevent the waste of washing liquid.

Description

Box cleaning equipment

Technical Field

The utility model relates to a semiconductor wafer holds the washing field of box, especially relates to box body cleaning equipment.

Background

In the production process of semiconductor wafers, the wafers need to be placed in the containing boxes, and the wafer boxes need to be cleaned while the wafers need to be cleaned.

The wafer box is an open structure comprising a body and a cover body, and is usually reversely buckled in a cleaning tank for cleaning in order to facilitate cleaning and avoid water accumulation. However, in the existing wafer box cleaning equipment, in order to improve the cleaning effect, the bottom of the cleaning tank is provided with a bubbling tube, so that gas can be generated and can float upwards in the cleaning solution, and therefore the gas can enter the inverted wafer box, and when the gas gathering body in the wafer box is too much, the gas can float upwards easily and turn on one's side, so that the wafer box is difficult to be fixed and cleaned, and the cleaning effect is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a box body cleaning equipment for solving the above-mentioned problem.

The utility model discloses a following technical scheme realizes above-mentioned purpose:

the utility model discloses a box body cleaning device, which comprises a cleaning tank for holding a cleaning box body and a pipeline part;

a bubbling pipe is arranged in the cleaning tank;

the pipeline components comprise a water pump, a water return pipe, a cleaning spray nozzle and water pumping pipes, the water pumping pipes are divided into two groups, namely a body and a cover body which are respectively used for supporting the box body, the top end of each group of water pumping pipes is positioned on the same horizontal plane, and the top of each water pumping pipe is provided with an anti-blocking structure;

the cleaning spray head is arranged at the top end of the cleaning spray head and is higher than the setting height of the box body;

the water pump is used for sucking cleaning liquid or gas from the top of the water pumping pipe, and the cleaning liquid or gas flows out of the cleaning spray head through the water return pipe and then flows back into the cleaning tank.

Preferably, the utility model discloses a box body cleaning equipment, wash the shower nozzle slope setting to aim at and be located the washing tank the top surface of box.

Preferably, the utility model discloses a box body cleaning equipment prevents that stifled structure is for preventing stifled groove.

Preferably, the utility model discloses a box body cleaning equipment, every group drinking-water pipe are the rectangle and arrange.

Preferably, the utility model discloses a box body cleaning equipment, the drinking-water pipe still is connected with dry gas supply pipeline to be used for after the washing liquid evacuation, accelerate the drying of box to box blowout gas through the drinking-water pipe.

Preferably, the utility model discloses a box body cleaning equipment, the drinking-water pipe still is connected with washing liquid supply pipe for in-process blowout washing liquid to the washing tank injection washing liquid to wash the inner wall of box.

Preferably, the utility model discloses a box body cleaning equipment, the wet return still is provided with the gas-liquid separation valve.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses a box body cleaning equipment, including being used for holding washing tank and the pipe fitting who washs the box. In the cleaning process, make washing liquid and gas in the box take away from the box in through pipe fittings, prevent gaseous gathering in the box to prevent that the box from floating, washing liquid or gaseous backward flow to the washing tank after the wet return flows out from the washing shower nozzle in, realize the washing liquid circulation, prevent the waste of washing liquid.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.

FIG. 1 is a schematic structural view of the box cleaning apparatus of the present invention;

FIG. 2 is a schematic view of the internal structure of the box cleaning apparatus of the present invention;

FIG. 3 is a schematic structural diagram of a box body of the box body cleaning equipment of the present invention;

FIG. 4 is a schematic view of the structure of the water pumping pipe of the box cleaning device of the present invention;

FIG. 5 is a schematic view of the structure of the anti-blocking groove of the box cleaning device of the present invention;

fig. 6 is a structural view of a piping member in the cartridge cleaning apparatus according to the present invention.

The reference numerals are explained below:

1. a base; 2. a cleaning tank; 3. a water return pipe; 4. cleaning the spray head; 5. a water collection pipe; 6. a water pumping pipe; 7. a bubbling tube; 8. a box body; 9. a bubbling machine; 10. anti-blocking grooves; 11. a water pump; 12. a multi-way valve; 13. a gas-liquid separation valve.

Detailed Description

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The present invention will be further explained with reference to the accompanying drawings:

example 1

As shown in fig. 1 to 5, the cartridge cleaning apparatus includes a cleaning bath 2 for containing a cleaning tank 8 and a pipe part;

the cleaning tank 2 is provided with a base 1 with a bubbling machine 9 arranged inside, and a bubbling pipe 7 connected with the bubbling machine 9 is arranged in a tank body of the cleaning tank 2;

the pipeline components comprise a water pump 11, a water return pipe 3, a cleaning spray nozzle 4 and water pumping pipes 6, the water pumping pipes 6 are divided into two groups which are respectively used for supporting a body and a cover body of the box body 8, the top ends of the water pumping pipes 6 in each group are positioned on the same horizontal plane, and the tops of the water pumping pipes 6 are provided with anti-blocking structures;

the cleaning spray head 4 is arranged at the top end of the cleaning spray head 4 and is higher than the box body 8;

the water pump 11 is used for sucking cleaning liquid or gas from the top of the water pumping pipe 6, and flowing out of the cleaning nozzle 4 through the water return pipe 3 and then flowing back into the cleaning tank 2.

The working principle is as follows: with 8 back-offs of box on two sets of drinking-water pipes 6, drinking-water pipe 6 has played the effect of supporting box 8, start water pump 11 and bubbling machine 9, make bubbling machine 9 follow 7 blowout backs of bubbling pipe with the bubble, can gather in box 8, utilize water pump 11 to draw water to drinking-water pipe 6, make washing liquid (water) and gas in the box 8 take away from in the box 8, prevent gaseous gathering in box 8, thereby prevent that box 8 from floating, washing liquid or gas flow back to in washing tank 2 after the washing shower nozzle 4 flows out through wet return 3, realize the washing liquid circulation, prevent the waste of washing liquid.

Preferably, the cleaning nozzle 4 is disposed obliquely and aligned with the top surface of the tank 8 in the cleaning bath 2. The cleaning spray head 4 is obliquely arranged to form a yielding space, so that the manipulator is not blocked when lifting to grab the box body 8. Spraying the top surface of the tank 8 in alignment can improve the cleaning effect of the top surface of the tank 8. It should be noted that, although only two cleaning nozzles 4 are shown in fig. 2, the cleaning nozzles 4 may be arranged in a row as required by those skilled in the art.

Preferably, the anti-blocking structure is an anti-blocking groove 10 and can also be a wave structure, so that the water pumping pipe 6 is prevented from adsorbing the inner wall of the box body, and the smoothness of a flow channel is ensured.

Preferably, each group of suction pipes 6 is arranged in a rectangular shape to facilitate the support of the tank 8.

Preferably, the pumping pipe 6 is further connected to a dry gas supply pipeline, so that after the cleaning liquid is emptied, the pumping pipe 6 sprays gas to the tank 8 to accelerate the drying of the tank 8.

Preferably, the pumping pipe 6 is further connected to a cleaning solution supply pipe for spraying the cleaning solution to wash the inner wall of the tank 8 during the process of injecting the cleaning solution into the cleaning tank 2.

The switching of the flow path is accomplished by the multi-way valve 12 when the suction pipe 6 is supplied with dry gas or cleaning liquid.

Preferably, the water return pipe 3 is further provided with a gas-liquid separation valve 13 for separating the liquid in the water return pipe 3 into gas and liquid, and only the cleaning liquid is ejected from the cleaning nozzle 4. When the dry gas needs to flow through the return pipe 3, the gas-liquid separation valve 13 is not provided or the gas-liquid separation valve 13 does not work at this time.

It should be noted that a cleaning solution introducing pipe is provided at the bottom or the top of the cleaning tank 2 itself to introduce the cleaning solution into the cleaning tank 2.

The whole process of cleaning the box 8 by the box cleaning device is (some steps can be omitted according to actual needs, for example, the relevant drying step can be omitted without drying):

s1, the box body 8 is put into the emptied cleaning tank 2 in an unfolding mode (namely, no cleaning solution exists), and the body and the cover body of the box body 8 are respectively abutted and fixed by the two groups of water pumping pipes 6;

s2, introducing cleaning liquid into the cleaning tank 2 through a cleaning liquid introducing pipe, so that the cleaning liquid at least submerges the tank body 8;

s3, the water pump 11 and the bubbler 9 work simultaneously, so that the bubbler 9 sprays bubbles out of the bubbling pipe 7, the water pump 11 is used for pumping water from the water pumping pipe 6, cleaning liquid (water) and gas in the box body 8 are pumped out of the box body 8, the gas is prevented from being gathered in the box body 8, and the box body 8 is prevented from floating;

s4, stopping the water pump 11 and the bubbler 9 after a period of time, and emptying the cleaning liquid in the cleaning tank 2;

s5, introducing dry gas into the cleaning tank 2 to dry the box body 8;

and S6, taking the box body 8 away to finish cleaning.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention.

Claims

1. The box body cleaning equipment is characterized by comprising a cleaning tank (2) for containing a cleaning box body (8) and a pipeline part;

a bubbling pipe (7) is arranged in the cleaning tank (2);

the pipeline components comprise a water pump (11), a water return pipe (3), a cleaning spray head (4) and water pumping pipes (6), the water pumping pipes (6) are divided into two groups which are respectively used for supporting a body and a cover body of the box body (8), the top ends of the water pumping pipes (6) of each group are positioned on the same horizontal plane, and the top of each water pumping pipe (6) is provided with an anti-blocking structure;

the cleaning spray head (4) is arranged at the top end of the cleaning spray head (4) and is higher than the setting height of the box body (8);

the water pump (11) is used for sucking cleaning liquid or gas from the top of the water suction pipe (6), and the cleaning liquid or gas flows out of the cleaning spray head (4) through the water return pipe (3) and then flows back into the cleaning tank (2).

2. The cartridge cleaning device according to claim 1, characterized in that said cleaning nozzle (4) is arranged obliquely and aligned with the top surface of said tank (8) inside the cleaning tank (2).

3. The cartridge cleaning apparatus according to claim 1, wherein the anti-clogging structure is an anti-clogging groove (10).

4. The cartridge cleaning device according to claim 1, characterised in that each group of suction pipes (6) is arranged in a rectangular shape.

5. The cartridge cleaning device according to claim 1, characterized in that the suction pipe (6) is also connected to a dry gas supply line for blowing gas through the suction pipe (6) towards the tank (8) to accelerate the drying of the tank (8) after the cleaning liquid has been emptied.

6. The cartridge cleaning apparatus according to claim 1, wherein the suction pipe (6) is further connected to a cleaning liquid supply pipe for spraying the cleaning liquid to wash the inner wall of the tank (8) during the injection of the cleaning liquid into the cleaning bath (2).

7. The cartridge cleaning apparatus according to claim 1, wherein the return pipe (3) is further provided with a gas-liquid separation valve (13).