CN211217882U - Waste liquid collecting mechanism of vertical furnace tube cleaning machine - Google Patents
Waste liquid collecting mechanism of vertical furnace tube cleaning machine Download PDFInfo
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- CN211217882U CN211217882U CN201922270522.4U CN201922270522U CN211217882U CN 211217882 U CN211217882 U CN 211217882U CN 201922270522 U CN201922270522 U CN 201922270522U CN 211217882 U CN211217882 U CN 211217882U
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- waste liquid
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Abstract
The utility model relates to a mechanism is collected to vertical boiler tube cleaning machine waste liquid sets up in vertical boiler tube cleaning machine's washing station bottom for fixed boiler tube accepts and comes from washing spray tube spun washing waste liquid, the backup pad sets up to square, has the circular fixed plate that is located the center, connects four apex angles of backup pad and the diagonal fixed plate of circular fixed plate are connected the central line fixed plate of backup pad four sides center and circular fixed plate is connected the central line fixed plate in the center on two adjacent limits in the backup pad four sides, every be provided with the fixed block on the diagonal fixed plate. Through the arrangement, the support plate can be guaranteed to have strong structural strength so as to support the furnace tube, the hollowed-out area is enlarged as much as possible, the possibility that the top leaked cleaning liquid drops fall to the support plate and splashed is avoided, and the cleaning effect is improved.
Description
Technical Field
The application belongs to the technical field of furnace tube cleaning equipment, and particularly relates to a waste liquid collecting mechanism of a vertical furnace tube cleaning machine.
Background
With the development of the technology in the semiconductor field, the requirement of semiconductor manufacturers on the cleanliness of wafers is higher and higher, and the requirement on the cleanliness of furnace tubes in direct contact with the wafers is also improved, so that the traditional bedroom furnace tube cleaning equipment cannot meet the requirement on higher cleanliness.
Chinese patent document CN 208853393U discloses a vertical furnace tube cleaning mechanism, in which the nozzle is fixed and the rotating mechanism drives the furnace tube to rotate, so as to clean the surface of the furnace tube completely.
Therefore, the fixed vertical furnace tube cleaning machine which does not rotate can be used for cleaning, but the fixed vertical furnace tube cleaning machine is particularly important for fixing the furnace tube.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: in order to solve the defects in the prior art, the waste liquid collecting mechanism of the vertical furnace tube cleaning machine is provided.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a vertical boiler tube cleaning machine waste liquid collection mechanism, includes:
a waste liquid tank,
a support plate disposed at the top of the waste liquid tank;
the supporting plate is square and is provided with a circular fixing plate positioned at the center, diagonal fixing plates connected with four vertex angles of the supporting plate and the circular fixing plate, a center line fixing plate connected with the centers of four sides of the supporting plate and the circular fixing plate, and a center line fixing plate connected with the centers of two adjacent sides of the four sides of the supporting plate, wherein each diagonal fixing plate is provided with a supporting block.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, the fixed block sets up the edge on the slide rail that the diagonal fixed plate was arranged.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, waste liquid inslot side top still is provided with the spray tube, the spray tube can spout the washing liquid in order to wash the waste liquid groove when necessary.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, the spray tube sets up waste liquid inslot side top length direction both sides.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, the spray tube pass through pump and pipeline with waste liquid tank bottom is connected.
Preferably, the nozzle on the spray pipe of the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the utility model is inclined downwards at 30-60 degrees.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, an limit of backup pad is passed through the hinge and is connected with the waste liquid groove top, be provided with the fixed block on the waste liquid groove inside with right relative another limit supports in the backup pad.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, the waste liquid inslot is provided with the filter that has the filtration pore.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collecting mechanism, be provided with the overflow mouth on the cell wall of four sides in waste liquid groove.
Preferably, the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism, the base of overflow mouth is the cusp.
The utility model has the advantages that:
the utility model discloses a vertical boiler tube cleaning machine waste liquid collection mechanism sets up in vertical boiler tube cleaning machine's washing station bottom for fixed boiler tube accepts and comes from washing spray tube spun washing waste liquid, the backup pad sets up to square, has the circular fixed plate that is located the center, connects four apex angles of backup pad and the diagonal fixed plate of circular fixed plate are connected the central line fixed plate of backup pad four sides center and circular fixed plate is connected the central line fixed plate at the center on adjacent two limits in the backup pad four sides, every be provided with the fixed block on the diagonal fixed plate. Through the arrangement, the support plate can be guaranteed to have strong structural strength so as to support the furnace tube, the hollowed-out area is enlarged as much as possible, the possibility that the top leaked cleaning liquid drops fall to the support plate and splashed is avoided, and the cleaning effect is improved.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
FIG. 1 is a top view of a waste liquid collection mechanism of a vertical furnace tube cleaning machine in an embodiment of the present application;
FIG. 2 is a schematic structural diagram of a support plate according to an embodiment of the present application;
FIG. 3 is a schematic structural view of the vertical furnace tube cleaning machine according to the embodiment of the present application, showing one direction when the waste liquid collecting mechanism supports the furnace tube;
FIG. 4 is a schematic structural view of the vertical furnace tube cleaning machine according to the embodiment of the present application, showing the direction of the furnace tube when the waste liquid collecting mechanism supports the furnace tube;
FIG. 5 is a front view of the waste liquid collecting mechanism of the vertical furnace tube cleaning machine according to the embodiment of the present application;
the reference numbers in the figures are:
4 a waste liquid tank;
9 furnace tube;
40 an overflow port;
41 a filter plate;
42 a support plate;
43 a nozzle;
a 421 hinge;
422 circular fixing plate;
423 diagonal fixing plates;
424 midline fixing plates;
425 center line fixing plate;
426 fixed blocks;
431 a pump;
432 piping.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, unless otherwise specified, "a plurality" means two or more.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Examples
The embodiment provides a vertical boiler tube cleaning machine waste liquid collecting mechanism, as shown in fig. 1, includes:
a waste liquid tank 4 for storing waste liquid,
a support plate 42 disposed at the top of the waste liquid tank 4;
the supporting plate 42 is square, and has a structure as shown in fig. 2, and includes a circular fixing plate 422 located at the center, diagonal fixing plates 423 connecting four corners of the supporting plate 42 with the circular fixing plate 422, a center line fixing plate 424 connecting centers of four sides of the supporting plate 42 with the circular fixing plate 422, and center line fixing plates 425 connecting centers of two adjacent sides of the four sides of the supporting plate 42, wherein each of the diagonal fixing plates 423 is provided with a fixing block 426.
The waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment is arranged at the bottom of a cleaning station of the vertical furnace tube cleaning machine and is used for fixing a furnace tube 9 and receiving cleaning waste liquid sprayed from a cleaning spray pipe, the supporting plate 42 is square and provided with a circular fixing plate 422 positioned at the center, diagonal fixing plates 423 connecting four top corners of the supporting plate 42 and the circular fixing plate 422, a center line fixing plate 424 connecting the centers of four edges of the supporting plate 42 and the circular fixing plate 422, a center line fixing plate 425 connecting the centers of two adjacent edges of the four edges of the supporting plate 42, and each diagonal fixing plate 423 is provided with a fixing block 426. Through the arrangement, the support plate 42 can be guaranteed to have stronger structural strength so as to support the furnace tube 9, the hollowed-out area is enlarged as much as possible, the possibility that the leaked cleaning liquid drops fall onto the support plate 42 to splash is prevented, and the cleaning effect is improved.
As an improvement, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the present embodiment, the fixing block 426 is disposed on a sliding rail arranged along the diagonal fixing plate 423. The four corners of the fixed block 426 can be positioned by 4 sliding blocks, so that the position of the fixed block 426 can be adjusted according to different sizes of the furnace tube 9, and the furnace tube 9 with different sizes can be adapted.
As a modification, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment, a spray pipe 43 is further arranged at the top of the inner side of the waste liquid tank 4, and the spray pipe 43 can spray cleaning liquid to clean the waste liquid tank 4 if necessary and promote the liquid flow in the waste liquid tank 4.
As a modification, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the present embodiment, as shown in fig. 4, the spray pipes 43 are disposed at two sides of the length direction of the top inside the waste liquid tank 4.
As a modification, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment, the spray pipe 43 is connected with the bottom of the waste liquid tank 4 through a pump 431 and a pipeline 432.
As a modification, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment, the nozzle on the spray pipe 43 is inclined downwards at an angle of 30-60 degrees.
As a modification, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment, one side of the supporting plate 42 is connected to the top of the waste liquid tank 4 through a hinge 421, and a supporting block 427 is arranged on the inside of the waste liquid tank 4 to support the other opposite side of the supporting plate 42.
As a modification, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment, a filter plate 41 with filter holes is arranged in the waste liquid tank 4.
As an improvement, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the present embodiment, as shown in fig. 5, overflow ports 40 are provided on the four side walls of the waste liquid tank 4, and the overflow ports 40 are provided to allow excess liquid to flow out through the overflow ports 40 when the liquid in the waste liquid tank 4 is excessive.
As an improvement, in the waste liquid collecting mechanism of the vertical furnace tube cleaning machine of the embodiment, the bottom edge of the overflow port 40 is in a tooth shape, and the tooth-shaped overflow port can filter out a part of large-particle impurities in the liquid.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The utility model provides a vertical boiler tube cleaning machine waste liquid collection mechanism which characterized in that includes:
a waste liquid tank (4),
a support plate (42) disposed at the top of the waste liquid tank (4);
the supporting plate (42) is square and is provided with a circular fixing plate (422) located at the center, diagonal fixing plates (423) connected with four top corners of the supporting plate (42) and the circular fixing plate (422), a middle line fixing plate (424) connected with the centers of four sides of the supporting plate (42) and the circular fixing plate (422), a center line fixing plate (425) connected with the centers of two adjacent sides in four sides of the supporting plate (42), and each diagonal fixing plate (423) is provided with a fixing block (426).
2. The vertical furnace tube cleaning machine waste liquid collection mechanism of claim 1, wherein the fixing block (426) is disposed on a slide rail arranged along the diagonal fixing plate (423).
3. The waste liquid collecting mechanism of the vertical furnace tube cleaning machine as claimed in claim 1, wherein a spray pipe (43) is further disposed at the top of the inner side of the waste liquid tank (4).
4. The waste liquid collecting mechanism of the vertical furnace tube cleaning machine as claimed in claim 3, wherein the spraying pipes (43) are arranged at two sides of the length direction of the top inside the waste liquid tank (4).
5. The vertical furnace tube cleaning machine waste liquid collecting mechanism as claimed in claim 4, wherein the spray pipe (43) is connected with the bottom of the waste liquid tank (4) through a pump (431) and a pipeline (432).
6. The vertical furnace tube cleaning machine waste liquid collecting mechanism as claimed in claim 4 or 5, wherein the nozzles on the spray pipe (43) are inclined downwards at an angle of 30-60 °.
7. The vertical furnace tube cleaning machine waste liquid collecting mechanism as claimed in claim 1, wherein one side of the supporting plate (42) is connected with the top of the waste liquid tank (4) through a hinge (421), and a supporting block (427) is arranged on the inside of the waste liquid tank (4) to support the other opposite side of the supporting plate (42).
8. The vertical furnace tube cleaning machine waste liquid collecting mechanism as claimed in claim 1, wherein a filter plate (41) having filter holes is disposed in the waste liquid tank (4).
9. The waste liquid collecting mechanism of the vertical furnace tube cleaning machine as claimed in claim 1, wherein overflow ports (40) are provided on the four sides of the waste liquid tank (4).
10. The vertical furnace tube cleaning machine waste liquid collecting mechanism as claimed in claim 9, wherein the bottom edge of the overflow port (40) is toothed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922270522.4U CN211217882U (en) | 2019-12-17 | 2019-12-17 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922270522.4U CN211217882U (en) | 2019-12-17 | 2019-12-17 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211217882U true CN211217882U (en) | 2020-08-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922270522.4U Active CN211217882U (en) | 2019-12-17 | 2019-12-17 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115921451A (en) * | 2022-12-23 | 2023-04-07 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning tank |
-
2019
- 2019-12-17 CN CN201922270522.4U patent/CN211217882U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115921451A (en) * | 2022-12-23 | 2023-04-07 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning tank |
| CN115921451B (en) * | 2022-12-23 | 2024-07-02 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning tank |
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