CN115921451A - Vertical furnace tube cleaning tank - Google Patents
Vertical furnace tube cleaning tank Download PDFInfo
- Publication number
- CN115921451A CN115921451A CN202211666049.1A CN202211666049A CN115921451A CN 115921451 A CN115921451 A CN 115921451A CN 202211666049 A CN202211666049 A CN 202211666049A CN 115921451 A CN115921451 A CN 115921451A
- Authority
- CN
- China
- Prior art keywords
- mounting block
- furnace tube
- cleaning tank
- vertical furnace
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 43
- 210000005056 cell body Anatomy 0.000 claims abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 238000009434 installation Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 239000007921 spray Substances 0.000 abstract description 29
- 238000005406 washing Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 240000004282 Grewia occidentalis Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Images
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to a vertical boiler tube washing tank, vertical boiler tube washing tank includes cell body, square support frame, and square support frame is used for supporting the boiler tube and makes the boiler tube detain on the support frame with opening mode down, and first spout is responsible for the boiler tube and leans on the spray rinsing of below, and the second spout is responsible for the boiler tube and leans on the spray rinsing of top, carries out the spray rinsing to boiler tube inside simultaneously through two spouts, has improved the cleaning performance to the boiler tube inner wall, and simultaneously, the shower nozzle is a little higher than the support frame for the material loading of boiler tube is simple and convenient.
Description
Technical Field
The application belongs to the technical field of semiconductor production equipment, and particularly relates to a vertical furnace tube cleaning tank.
Background
With the development of the technology in the semiconductor field, semiconductor manufacturers have higher and higher requirements on the cleanliness of wafers, and the cleanliness of furnace tubes in direct contact with the wafers is also improved, wherein one side of the furnace tube is usually open, the closed side is a circular furnace tube cap, and the furnace tube body is a cylindrical furnace tube side wall, so that a vertical furnace tube cleaning device is specially designed. Namely, the furnace tube is vertically placed on the support frame, and the furnace tube is sprayed and washed from the outside and the inside through the washing nozzle.
Chinese patent document CN208853393U discloses a vertical furnace tube cleaning mechanism, which comprises an outer spray head support frame, an inner spray head support frame, a rotary table and a furnace tube support frame, and is characterized in that: a rotating platform is arranged on the furnace tube supporting frame, and the furnace tube is placed on the rotating platform; the inner spray head support frame penetrates through the furnace tube support frame and the rotary table from bottom to top and extends into the top end of the interior of the furnace tube, and a plurality of inner spray head groups are uniformly arranged on the inner spray head support frame from top to bottom; the outer spray head support frame is arranged on one side of the furnace tube, the upper part of the outer spray head support frame extends to the position right above the top of the furnace tube from one side of the furnace tube, a plurality of outer spray heads are uniformly arranged on the outer spray head support frame along the length direction, and a plurality of outer spray head nozzles face the furnace tube. Because the interior of the furnace tube is provided with the long inner spray head support frame, the furnace tube needs to be lifted over the inner spray head support frame, so that the feeding process of the furnace tube is difficult.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to solve the defects in the prior art, the vertical furnace tube cleaning tank has good cleaning effect and simple and convenient feeding process.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a vertical furnace tube cleaning tank comprises:
the groove body is square and is provided with four side walls;
the support frame sets up on one side of cell body through the hinge, so that the support frame can rotate and open around the hinge, the support frame is square, has the circular fixed plate that is located the center, is the fretwork in the middle of the circular fixed plate, and the installation piece is installed to the fretwork part in the middle of the circular fixed plate, the installation piece center has slope first spout up for the top surface of passageway, the shower nozzle is installed at the center of installation piece top surface, the shower nozzle has central passageway and rotator, be provided with slope second spout up on the rotator, can drive during slope second spout blowout liquid up the rotator takes place rotatoryly, second spout is linked together with the passageway, the height of shower nozzle is less than the fifth of boiler tube height, and the height of second spout is greater than the eighth of boiler tube height, the junction between directional extension line boiler tube cap and the boiler tube lateral wall of second spout axis.
Preferably, the mounting block comprises an upper mounting block, a lower mounting block and a plane bearing arranged between the upper mounting block and the lower mounting block so that the upper mounting block can rotate relative to the lower mounting block.
Preferably, in the vertical furnace tube cleaning tank disclosed by the invention, the first nozzle is arranged on the upper mounting block, the central axis of the first nozzle is not coplanar with the central axis of the upper mounting block, and the first nozzle can drive the upper mounting block to rotate when spraying water.
Preferably, the vertical furnace tube cleaning tank is provided with a sealing ring between the planar bearing and the upper mounting block and between the planar bearing and the lower mounting block.
Preferably, in the vertical furnace tube cleaning tank of the invention, the top of the rotating body is an inclined plane, the inclined plane is provided with a second nozzle, the second nozzle is not coplanar with the central axis of the rotating body, and the rotating body can be driven to rotate when cleaning liquid is sprayed out from the second nozzle after flowing through the channel and the rotating body.
Preferably, the bottom of the circular fixing plate of the vertical furnace tube cleaning tank is provided with a water inlet which is connected with a water supply pipe through a hose.
Preferably, in the vertical furnace tube cleaning tank of the present invention, the supporting frame further includes a diagonal fixing plate connecting four top corners of the supporting frame with the circular fixing plate, a center line fixing plate connecting centers of four sides of the supporting frame with the circular fixing plate, and a center line fixing plate connecting centers of two adjacent sides of the four sides of the supporting frame.
Preferably, the diagonal fixing plate of the vertical furnace tube cleaning tank is provided with a fixing block, the fixing block is arranged on a sliding rail arranged along the diagonal fixing plate, and the fixing block can be fixed on the sliding rail by screwing down screws.
Preferably, four edges of the top of the tank body of the vertical furnace tube cleaning tank are provided with flanges.
Preferably, at least three flanges on the vertical furnace tube cleaning tank of the invention are provided with inclined planes in the inclined tank body.
The beneficial effects of the invention are:
the vertical furnace tube cleaning tank comprises a tank body and a square support frame, wherein the square support frame is used for supporting a furnace tube so that the furnace tube is buckled on the support frame in a mode that an opening faces downwards, a first nozzle is used for spray-cleaning the lower part of the furnace tube, a second nozzle is used for spray-cleaning the upper part of the furnace tube, and the two nozzles are used for spray-cleaning the inner part of the furnace tube simultaneously, so that the cleaning effect on the inner wall of the furnace tube is improved. Meanwhile, the spray head is slightly higher than the support frame, so that the furnace tube is convenient to feed.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and examples.
FIG. 1 is a schematic structural diagram of a vertical furnace cleaning tank according to an embodiment of the present application;
FIG. 2 is a schematic structural diagram of a support frame according to an embodiment of the present disclosure;
FIG. 3 is a cross-sectional view of a support stand according to an embodiment of the present application;
FIG. 4 is a bottom view of the support bracket of an embodiment of the present application;
the reference numbers in the figures are:
1. a trough body;
2. a support frame;
11. flanging;
12. a water spray pipe;
15. an overflow trough;
21. a hinge;
22. a circular fixing plate;
23. a diagonal line fixing plate;
24. a midline fixing plate;
25. a central line fixing plate;
26. a fixed block;
31. mounting blocks;
32. a spray head;
33. a water inlet;
311. a channel;
312. a first nozzle;
313. a flat bearing;
314. an upper mounting block;
315. a lower mounting block;
321. a channel;
322. a rotating body;
323. and a second nozzle.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific cases.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Examples
The present embodiment provides a vertical furnace cleaning tank, as shown in fig. 1, comprising:
the tank body 1 is square, four sides of the top of the tank body 1 are provided with flanges 11, at least the flanges 11 on three sides are provided with inclined planes inclined into the tank body, so that liquid falling onto the flanges 11 can flow back into the tank body 1, a spray pipe 12 is arranged in the tank body 1, and a nozzle of the spray pipe 12 is inclined downwards;
the support frame 2 is arranged on one side of the tank body 1 through the hinge 21, so that the support frame 2 can rotate around the hinge 21 to be opened, other cleaning objects are conveniently placed in the tank body 1, the support frame 2 is square, as shown in fig. 2, a circular fixing plate 22 positioned at the center is provided, the middle of the circular fixing plate 22 is hollow, the hollow part in the middle of the circular fixing plate 22 is provided with an installation block 31, the center of the installation block 31 is a channel 311, the top surface of the installation block 31 is provided with a first nozzle 312 inclined upwards, the center of the top surface of the installation block 31 is provided with a spray head 32 (the first nozzle 312 surrounds the spray head 32), the spray head 32 is provided with a channel 321 and a rotating body 322 at the center, the rotating body 322 is provided with a second nozzle 323 inclined upwards, the second nozzle 323 inclined upwards can be driven when the second nozzle 323 inclined upwards sprays liquid, the rotating body 322 is communicated with the channel 321, the height of the spray head 32 is less than one fifth of the height of the furnace tube 323, the height of the furnace tube (the surface of the support frame 2) is greater than one eighth of the height of the furnace tube, and the extension line of the furnace tube cap is connected with the side wall of the furnace tube cap at the side wall of the furnace tube cap.
The vertical furnace tube cleaning tank comprises a tank body 1 and a square support frame 2, wherein the square support frame 2 is used for supporting the furnace tube to enable the furnace tube to be buckled on the support frame 2 in a mode that an opening faces downwards, a first nozzle 312 is responsible for spray washing of the furnace tube close to the lower part, a second nozzle 323 is responsible for spray washing of the furnace tube close to the upper part, and spray washing of the inner part of the furnace tube is simultaneously carried out through two nozzles, so that the cleaning effect on the inner wall of the furnace tube is improved, and meanwhile, a spray head 32 is slightly higher than the support frame 2, so that the feeding of the furnace tube is simple and convenient. The extension line of the central axis of the second nozzle 323 points to the joint (located on the inner surface) between the furnace pipe cap and the side wall of the furnace pipe, so that water can be sprayed to the whole side wall of the furnace pipe when the water pressure is enough, and the cleaning effect is ensured.
The mounting block 31 comprises an upper mounting block 314, a lower mounting block 315, and an upper mounting block 314 and a lower mounting block 315, a flat bearing 313 is arranged between the upper mounting block 314 and the lower mounting block 315 so that the upper mounting block 314 can rotate relative to the lower mounting block 315, a sealing ring is respectively arranged between the flat bearing 313 and the upper mounting block 314 and between the flat bearing 313 and the lower mounting block 315, the first nozzle 312 is arranged on the upper mounting block 314, the central axis of the first nozzle 312 is not coplanar with the central axis of the upper mounting block 314, and the first nozzle 312 can drive the upper mounting block 314 to rotate when spraying water. The first nozzles 312 also rotate, so that the first nozzles 312 spraying to the lower part of the furnace tube also rotate, thereby being capable of sweeping more areas in the furnace tube and improving the cleaning effect.
The lower mounting block 315 is directly connected and fixed with the rotating body 322, a through hole can be formed at the connecting part to facilitate the flowing of the cleaning liquid, and the upper mounting block 314 is connected with the rotating body 322 in a sealing manner.
The top of the rotating body 322 is an inclined plane, a second nozzle 323 is arranged on the inclined plane, the second nozzle 323 is not coplanar with the central axis of the rotating body 322, and the rotating body 322 can be driven to rotate when cleaning liquid flows through the passage 321 and the rotating body 322 and is sprayed out from the second nozzle 323.
The bottom of the circular fixing plate 22 is provided with a water inlet 33, and the hose is connected with a water supply pipe through a hose, has certain deformation capacity and can adapt to the overturning of the support frame 2.
The support frame 2 further comprises diagonal fixing plates 23 connected with four top corners of the support frame 2 and the circular fixing plates 22, a center line fixing plate 24 connected with centers of four sides of the support frame 2 and the circular fixing plates 22, and a center line fixing plate 25 connected with centers of two adjacent sides of the support frame 2, wherein fixing blocks 26 are arranged on the diagonal fixing plates 23, so that the use of materials can be reduced as far as possible under the condition that the support frame 2 is ensured to have enough strength, the fixing blocks 26 are arranged on slide rails arranged along the diagonal fixing plates 23, the fixing blocks 26 can be fixed on the slide rails by screwing screws, and the fixing blocks 26 realize four-corner positioning so as to be suitable for furnace tubes of different sizes.
It is worth to be noted that the outer side of the overflow trough 15 is also provided with an outer trough body which collects overflowed liquid.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A vertical furnace tube cleaning tank is characterized by comprising:
the tank body (1) is square and is provided with four side walls;
support frame (2), set up on one side of cell body (1) through hinge (21), so that support frame (2) can be rotatory and open around hinge (21), support frame (2) are square, have circular fixed plate (22) that are located the center, and be the fretwork in the middle of circular fixed plate (22), and installation piece (31) are installed to the fretwork part in the middle of circular fixed plate (22), the top surface that installation piece (31) center is passageway (311) has first spout (312) that the slope is up, shower nozzle (32) are installed to the center of installation piece (31) top surface, shower nozzle (32) have passageway (321) and rotator (322) of center, be provided with slope second spout (323) that the slope is up on rotator (322), can drive when slope second spout (323) upwards spout the liquid the axis when spouting the centre, second spout (323) are linked together with passageway (321), the height of shower nozzle (32) is less than one fifth of boiler tube height, and the height of second spout (323) is greater than one eighth of boiler tube height, the lateral wall department that the boiler tube cap is connected between second spout (323).
2. The vertical furnace tube cleaning tank as claimed in claim 1, wherein the mounting block (31) comprises an upper mounting block (314) and a lower mounting block (315), and is positioned between the upper mounting block (314) and the lower mounting block (315), and a plane bearing (313) is provided between the upper mounting block (314) and the lower mounting block (315) to enable the upper mounting block (314) to rotate relative to the lower mounting block (315).
3. The vertical furnace tube cleaning tank as claimed in claim 2, wherein the first nozzle (312) is disposed on the upper mounting block (314), and the central axis of the first nozzle (312) is not coplanar with the central axis of the upper mounting block (314), and the first nozzle (312) can drive the upper mounting block (314) to rotate when spraying water.
4. The vertical furnace tube cleaning tank as claimed in claim 2, wherein sealing rings are respectively provided between the planar bearing (313) and the upper mounting block (314) and the lower mounting block (315).
5. The vertical furnace tube cleaning tank as claimed in claim 1, wherein the top of the rotating body (322) is an inclined surface, the inclined surface is provided with a second nozzle (323), the second nozzle (323) is not coplanar with the central axis of the rotating body (322), and the rotating body (322) can be driven to rotate when the cleaning solution is sprayed out from the second nozzle (323) after flowing through the channel (321) and the rotating body (322).
6. The vertical furnace tube cleaning tank as defined in claim 1, wherein the bottom of the circular fixing plate (22) is provided with a water inlet (33) connected to a water supply pipe through a hose.
7. The vertical furnace tube cleaning tank as claimed in claim 1, wherein the supporting frame (2) further comprises diagonal fixing plates (23) connecting four top corners of the supporting frame (2) with the circular fixing plates (22), a center line fixing plate (24) connecting centers of four sides of the supporting frame (2) with the circular fixing plates (22), and a center line fixing plate (25) connecting centers of two adjacent sides of the four sides of the supporting frame (2).
8. The vertical furnace tube cleaning tank as claimed in claim 7, wherein a fixing block (26) is provided on the diagonal fixing plate (23), the fixing block (26) is provided on a slide rail arranged along the diagonal fixing plate (23), and the fixing block (26) can be fixed on the slide rail by tightening a screw.
9. The vertical furnace tube cleaning tank as claimed in claim 1, wherein four sides of the top of the tank body (1) are provided with flanges (11).
10. The vertical furnace tube cleaning tank as claimed in claim 9, wherein at least the flanges (11) on three sides have inclined planes inclined into the tank body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211666049.1A CN115921451B (en) | 2022-12-23 | Vertical furnace tube cleaning tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211666049.1A CN115921451B (en) | 2022-12-23 | Vertical furnace tube cleaning tank |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115921451A true CN115921451A (en) | 2023-04-07 |
| CN115921451B CN115921451B (en) | 2024-07-02 |
Family
ID=
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB190517856A (en) * | 1905-09-04 | 1906-06-14 | Emil Weymar | Improvements in and relating to Means for Cleaning Bottles, Jars, Jugs, Glasses and the like. |
| CN210546830U (en) * | 2019-09-24 | 2020-05-19 | 江苏芯梦半导体设备有限公司 | Full-automatic vertical quartz tube cleaning machine |
| CN211217882U (en) * | 2019-12-17 | 2020-08-11 | 无锡亚电智能装备有限公司 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
| CN213103610U (en) * | 2020-08-13 | 2021-05-04 | 苏州芯矽电子科技有限公司 | Unpowered cleaning device for quartz tube |
| JP2021151650A (en) * | 2020-03-19 | 2021-09-30 | クリーンテック株式会社 | Rotary nozzle device |
| CN114192515A (en) * | 2021-10-21 | 2022-03-18 | 无锡亚电智能装备有限公司 | Furnace tube cleaning nozzle and furnace tube cleaning device |
| CN219292277U (en) * | 2022-12-23 | 2023-07-04 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB190517856A (en) * | 1905-09-04 | 1906-06-14 | Emil Weymar | Improvements in and relating to Means for Cleaning Bottles, Jars, Jugs, Glasses and the like. |
| CN210546830U (en) * | 2019-09-24 | 2020-05-19 | 江苏芯梦半导体设备有限公司 | Full-automatic vertical quartz tube cleaning machine |
| CN211217882U (en) * | 2019-12-17 | 2020-08-11 | 无锡亚电智能装备有限公司 | Waste liquid collecting mechanism of vertical furnace tube cleaning machine |
| JP2021151650A (en) * | 2020-03-19 | 2021-09-30 | クリーンテック株式会社 | Rotary nozzle device |
| CN213103610U (en) * | 2020-08-13 | 2021-05-04 | 苏州芯矽电子科技有限公司 | Unpowered cleaning device for quartz tube |
| CN114192515A (en) * | 2021-10-21 | 2022-03-18 | 无锡亚电智能装备有限公司 | Furnace tube cleaning nozzle and furnace tube cleaning device |
| CN219292277U (en) * | 2022-12-23 | 2023-07-04 | 无锡亚电智能装备有限公司 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110935703A (en) | Furnace tube cleaning equipment and cleaning method | |
| CN113289995A (en) | Wafer containing box cleaning equipment and wafer containing box cleaning method | |
| CN112201593A (en) | Wafer cleaning equipment | |
| CN115921451A (en) | Vertical furnace tube cleaning tank | |
| CN219292277U (en) | Vertical furnace tube cleaning bottom support and cleaning mechanism | |
| CN115921451B (en) | Vertical furnace tube cleaning tank | |
| CN213001656U (en) | Stainless steel water tank purifying device | |
| CN113182244A (en) | Photovoltaic silicon wafer cleaning method | |
| CN211304109U (en) | Vertical furnace tube cleaning machine | |
| CN218470102U (en) | Sealing detector for plate-fin heat exchanger | |
| CN207204726U (en) | A kind of cleaning device of eyeglass production | |
| CN114472362B (en) | Wafer cleaning device | |
| CN212664342U (en) | Cleaning machine | |
| CN212597454U (en) | Continuous washing device for catalyst processing | |
| CN211217882U (en) | Waste liquid collecting mechanism of vertical furnace tube cleaning machine | |
| CN217474219U (en) | Rotating and spraying device for effectively achieving single-wafer cleaning process | |
| CN216539852U (en) | Cleaning equipment for cleaning key components dropping from liquid crystal | |
| CN214813020U (en) | Three-phase separator cleaning device | |
| CN207066843U (en) | A kind of Sample Dilution device | |
| CN110648948A (en) | Quartz cleaning equipment | |
| CN210676284U (en) | Beverage bottle washing device | |
| CN218655970U (en) | Reagent bottle washs and weathers integrative frame | |
| CN218610922U (en) | Beverage bottleneck belt cleaning device | |
| CN218048566U (en) | Be used for rust-resistant liquid spraying device of rod iron | |
| CN221184081U (en) | Water supply tank cleaning device for property maintenance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |