CN219292277U - Vertical furnace tube cleaning bottom support and cleaning mechanism - Google Patents
Vertical furnace tube cleaning bottom support and cleaning mechanism Download PDFInfo
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- CN219292277U CN219292277U CN202223465727.6U CN202223465727U CN219292277U CN 219292277 U CN219292277 U CN 219292277U CN 202223465727 U CN202223465727 U CN 202223465727U CN 219292277 U CN219292277 U CN 219292277U
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- furnace tube
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Abstract
The application relates to a vertical furnace tube washs bottom sprag and wiper mechanism, including square support frame, square support frame is used for supporting the furnace tube and makes the furnace tube detain on the support frame with the mode of opening down, and first spout is responsible for the furnace tube and leans on the spray rinsing of below, and the second spout is responsible for the furnace tube and leans on the spray rinsing of top, carries out the spray rinsing to the furnace tube inside simultaneously through two spouts, has improved the cleaning performance to the furnace tube inner wall. Meanwhile, the spray head is slightly higher than the support frame, so that the furnace tube is simple and convenient to feed.
Description
Technical Field
The application belongs to the technical field of semiconductor production equipment, and particularly relates to a cleaning bottom support and cleaning mechanism for a vertical furnace tube.
Background
Along with the development of the technology in the semiconductor field, the requirements of semiconductor manufacturers on the cleanliness of wafers are higher and higher, the requirements on the cleanliness of furnace tubes in direct contact with the wafers are also improved, the furnace tubes are usually provided with a circular furnace tube cap on one side, the furnace tube body is a cylindrical furnace tube side wall, and vertical furnace tube cleaning equipment is specially designed for the requirements. That is, the furnace tube is vertically placed on the supporting frame, and the furnace tube is sprayed from the outside and the inside through the cleaning nozzle.
Chinese patent document CN208853393U discloses a vertical furnace tube cleaning mechanism, including outer shower nozzle support frame, interior shower nozzle support frame, revolving stage and furnace tube support frame, characterized by: a rotary table is arranged on the furnace tube support frame, and a furnace tube is placed on the rotary table; the inner spray head support frame passes through the furnace tube support frame and the rotary table from bottom to top and stretches into the top end of the interior of the furnace tube, and a plurality of groups of inner spray head groups are uniformly arranged on the inner spray head support frame from top to bottom; the outer shower nozzle support frame sets up in boiler tube one side, and outer shower nozzle support frame upper portion extends to the boiler tube top directly over from boiler tube one side, evenly is equipped with a plurality of outer shower nozzles along length direction on the outer shower nozzle support frame, and a plurality of outer shower nozzle spouts are towards the boiler tube. Because the long inner nozzle support frame is arranged in the furnace tube, the furnace tube needs to be lifted to cross the inner nozzle support frame, and the feeding process of the furnace tube is extremely difficult.
Disclosure of Invention
The utility model aims to solve the technical problems that: in order to solve the defects in the prior art, the vertical furnace tube cleaning bottom support and cleaning mechanism with good cleaning effect and simple and convenient feeding process is provided.
The technical scheme adopted for solving the technical problems is as follows:
a vertical furnace tube cleaning bottom support and cleaning mechanism comprising:
the support frame is square, is provided with a round fixing plate positioned at the center, is hollow in the middle of the round fixing plate, the hollow part in the middle of the round fixing plate is provided with a mounting block, the center of the mounting block is provided with a first spout which is inclined upwards, the center of the top surface of the mounting block is provided with a second channel and a rotating body, the rotating body is provided with a second spout which is inclined upwards, the second spout which is inclined upwards can be driven to rotate when spraying liquid, the second spout is communicated with the second channel, the height of the spray head is less than one fifth of the height of the furnace tube, the height of the second spout is greater than one eighth of the height of the furnace tube, and an extension line of the central axis of the second spout points to the joint between the furnace tube cap and the side wall of the furnace tube.
Preferably, the vertical furnace tube cleaning bottom support and cleaning mechanism comprises an upper mounting block, a lower mounting block and a plane bearing arranged between the upper mounting block and the lower mounting block so that the upper mounting block can rotate relative to the lower mounting block.
Preferably, in the cleaning bottom support and cleaning mechanism for the vertical furnace tube, the first nozzle is arranged on the upper mounting block, the central axis of the first nozzle is not coplanar with the central axis of the upper mounting block, and the first nozzle can drive the upper mounting block to rotate when spraying water.
Preferably, the cleaning bottom support and the cleaning mechanism of the vertical furnace tube are respectively provided with sealing rings between the plane bearing and the upper and lower mounting blocks.
Preferably, the top of the rotating body is an inclined plane, a second nozzle is arranged on the inclined plane, the second nozzle is not coplanar with the central axis of the rotating body, and the cleaning liquid can drive the rotating body to rotate when being sprayed out from the second nozzle after flowing through the second channel and the rotating body.
Preferably, the bottom support and cleaning mechanism for cleaning the vertical furnace tube is characterized in that the bottom of the circular fixing plate is provided with a water inlet which is connected with a water supply pipe through a hose.
Preferably, the vertical furnace tube cleaning bottom support and cleaning mechanism of the utility model, the support frame further comprises diagonal fixing plates for connecting four top angles of the support frame with the circular fixing plates, a central line fixing plate for connecting the centers of four sides of the support frame with the circular fixing plates, and a central line fixing plate for connecting the centers of two adjacent sides of four sides of the support frame.
Preferably, according to the vertical furnace tube cleaning bottom support and cleaning mechanism, the diagonal fixing plate is provided with the fixing blocks, the fixing blocks are arranged on the sliding rails arranged along the diagonal fixing plate, and the fixing blocks can be fixed on the sliding rails by tightening screws.
The beneficial effects of the utility model are as follows:
the vertical furnace tube cleaning bottom support and cleaning mechanism comprises a square support frame, wherein the square support frame is used for supporting a furnace tube so that the furnace tube is buckled on the support frame in a mode that an opening faces downwards, a first nozzle is used for spraying the furnace tube towards the lower part, a second nozzle is used for spraying the furnace tube towards the upper part, and the two nozzles are used for spraying the interior of the furnace tube at the same time, so that the cleaning effect on the inner wall of the furnace tube is improved. Meanwhile, the spray head is slightly higher than the support frame, so that the furnace tube is simple and convenient to feed.
Drawings
The technical scheme of the application is further described below with reference to the accompanying drawings and examples.
FIG. 1 is a schematic view of a vertical furnace tube cleaning bottom support and cleaning mechanism with a trough body according to an embodiment of the present application;
FIG. 2 is a schematic view of a vertical furnace tube cleaning bottom support and cleaning mechanism according to an embodiment of the present application;
FIG. 3 is a cross-sectional view of a vertical furnace tube cleaning bottom support and cleaning mechanism according to an embodiment of the present application;
FIG. 4 is a bottom view of a vertical furnace tube cleaning bottom support and cleaning mechanism according to an embodiment of the present application;
the reference numerals in the figures are:
1. a tank body;
2. a support frame;
11. flanging;
12. a water spray pipe;
15. an overflow trough;
21. a hinge;
22. a circular fixing plate;
23. a diagonal fixing plate;
24. a midline fixing plate;
25. a center line fixing plate;
26. a fixed block;
31. a mounting block;
32. a spray head;
33. a water inlet;
311. a first channel;
312. a first spout;
313. a planar bearing;
314. an upper mounting block;
315. a lower mounting block;
321. a second channel;
322. a rotating body;
323. and a second nozzle.
Detailed Description
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.
In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application can be understood by those of ordinary skill in the art in a specific context.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in combination with embodiments.
Examples
This embodiment provides a vertical furnace tube cleaning bottom support and cleaning mechanism, as shown in fig. 2-4, comprising:
the support frame 2 is arranged on one side of the tank body 1 through the hinge 21, so that the support frame 2 can rotate around the hinge 21 to be opened, other cleaning objects are conveniently placed in the tank body 1, the support frame 2 is square, as shown in fig. 2, a round fixing plate 22 is arranged at the center, the middle of the round fixing plate 22 is hollowed out, a mounting block 31 is arranged at the hollowed-out part in the middle of the round fixing plate 22, the center of the mounting block 31 is a first channel 311, the top surface of the mounting block 31 is provided with a first spout 312 which is obliquely upwards, the center of the top surface of the mounting block 31 is provided with a spray head 32 (the first spout 312 is arranged around the spray head 32), the spray head 32 is provided with a second channel 321 and a rotating body 322 which are obliquely upwards, the second spout 323 can be driven to rotate when the liquid is sprayed out, the second spout 323 is communicated with the second channel 321, the height of the spray head 32 is less than one fifth of the height of the furnace tube, the height (the height of the support frame 31 is greater than one eighth of the surface of the furnace tube), and the second spout 323 is connected with the side wall of the furnace tube at the position of the side wall of the furnace tube.
The vertical furnace tube cleaning bottom support and cleaning mechanism of this embodiment, including square support frame 2, square support frame 2 is used for supporting the furnace tube and makes the furnace tube detain on support frame 2 with the mode of opening down, and first spout 312 is responsible for the spray rinsing of furnace tube below, and second spout 323 is responsible for the spray rinsing of furnace tube above, carries out the spray rinsing to the furnace tube inside simultaneously through two spouts, has improved the cleaning performance to the furnace tube inner wall, simultaneously, shower nozzle 32 slightly is higher than support frame 2 for the material loading of furnace tube is simple and convenient. The extension line of the central axis of the second nozzle 323 points to the joint (the inner surface) between the furnace pipe cap and the furnace pipe side wall, and when the water pressure is enough, water can be sprayed to the whole furnace pipe side wall, so that the cleaning effect is ensured.
The mounting block 31 comprises an upper mounting block 314, a lower mounting block 315 and a plane bearing 313 arranged between the upper mounting block 314 and the lower mounting block 315 so that the upper mounting block 314 can rotate relative to the lower mounting block 315, sealing rings are respectively arranged between the plane bearing 313 and the upper mounting block 314 and between the plane bearing 313 and the lower mounting block 315, the first nozzle 312 is arranged on the upper mounting block 314, the central axis of the first nozzle 312 is not coplanar with the central axis of the upper mounting block 314, and the first nozzle 312 can drive the upper mounting block 314 to rotate when spraying water. The first nozzle 312 also rotates, so that the first nozzle 312 spraying to the lower part of the furnace tube also rotates, thereby being capable of sweeping more areas inside the furnace tube and improving the cleaning effect.
The lower mounting block 315 is directly connected and fixed with the rotating body 322, and a through hole can be arranged at the connecting part to facilitate the flow of the cleaning liquid, and the upper mounting block 314 is in sealing connection with the rotating body 322.
The top of the rotating body 322 is an inclined slope, a second nozzle 323 is provided on the inclined slope, the second nozzle 323 is not coplanar with the central axis of the rotating body 322, and the cleaning solution can drive the rotating body 322 to rotate when being sprayed out from the second nozzle 323 after flowing through the second channel 321 and the rotating body 322.
The bottom of the circular fixing plate 22 is provided with a water inlet 33, and is connected with a water supply pipe through a hose, and the hose has a certain deformation capacity and can be adapted to the overturning of the supporting frame 2.
The support frame 2 still includes the connection four apex angles of support frame 2 and the diagonal fixed plate 23 of circular fixed plate 22, connects the center line fixed plate 24 of support frame 2 four sides center and circular fixed plate 22, connect the center line fixed plate 25 of adjacent two limit in the support frame 2 four sides, be provided with fixed block 26 on the diagonal fixed plate 23, can reduce the use of material as far as possible under the circumstances that guarantee support frame 2 has enough intensity, fixed block 26 sets up on follow on the slide rail that diagonal fixed plate 23 arranged, can with fixed block 26 is fixed on the slide rail through screwing up the screw, thereby fixed block 26 realizes the four corners location and can adapt to not unidimensional boiler tube.
It should be noted that, the cleaning bottom support and the cleaning mechanism of the vertical furnace tube are arranged in a tank body 1, as shown in fig. 1, the tank body 1 is square, four sides at the top of the tank body 1 are respectively provided with a turned-over edge 11, at least three turned-over edges 11 are provided with inclined planes in the inclined tank body so that the liquid falling onto the turned-over edges 11 can flow back into the tank body 1, a spray pipe 12 is arranged in the tank body 1, and the nozzle of the spray pipe 12 is inclined downwards; an outer tank body can be arranged outside the overflow tank 15, and overflowed liquid can be collected.
With the above-described preferred embodiments according to the present application as a teaching, the related workers can make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of claims.
Claims (8)
1. A vertical furnace tube cleaning bottom support and cleaning mechanism, comprising:
support frame (2), set up on one side of cell body (1) through hinge (21), so that support frame (2) can rotate around hinge (21) and open, support frame (2) are square, have circular fixed plate (22) at the center, are the fretwork in the middle of circular fixed plate (22), and installation piece (31) are installed to fretwork part in the middle of circular fixed plate (22), installation piece (31) center is first spout (312) that have the slope up for the top surface of first passageway (311), shower nozzle (32) are installed at the center of installation piece (31) top surface, shower nozzle (32) have second passageway (321) and rotator (322) at center, be provided with second spout (323) up in the slope on rotator (322), can drive when second spout (323) blowout liquid up in the slope rotator (322) take place the rotation, second spout (323) are linked together with second passageway (321), the height of shower nozzle (32) is less than one fifth of boiler tube height, and the directional boiler tube side wall of second spout (323) that is higher than the second spout that is high.
2. The vertical furnace tube cleaning bottom support and cleaning mechanism according to claim 1, wherein the mounting block (31) comprises an upper mounting block (314) and a lower mounting block (315), and a planar bearing (313) is provided between the upper mounting block (314) and the lower mounting block (315) to enable the upper mounting block (314) to rotate relative to the lower mounting block (315).
3. The vertical furnace tube cleaning bottom support and cleaning mechanism according to claim 2, wherein the first nozzle (312) is disposed on the upper mounting block (314), and a central axis of the first nozzle (312) is not coplanar with a central axis of the upper mounting block (314), and the first nozzle (312) can drive the upper mounting block (314) to rotate when spraying water.
4. The vertical furnace cleaning bottom support and cleaning mechanism of claim 2, wherein sealing rings are provided between the planar bearing (313) and the upper (314) and lower (315) mounting blocks, respectively.
5. The vertical furnace tube cleaning bottom support and cleaning mechanism according to claim 1, wherein the top of the rotating body (322) is an inclined plane, a second nozzle (323) is formed on the inclined plane, the second nozzle (323) is not coplanar with the central axis of the rotating body (322), and the cleaning liquid can drive the rotating body (322) to rotate when being sprayed out from the second nozzle (323) after flowing through the second channel (321) and the rotating body (322).
6. The vertical furnace cleaning bottom support and cleaning mechanism according to claim 1, characterized in that the bottom of the circular fixing plate (22) is provided with a water inlet (33) connected with a water supply pipe through a hose.
7. The vertical furnace tube cleaning bottom support and cleaning mechanism according to claim 1, wherein the supporting frame (2) further comprises diagonal fixing plates (23) connecting four top corners of the supporting frame (2) with the circular fixing plates (22), and a central line fixing plate (24) connecting the centers of four sides of the supporting frame (2) with the circular fixing plates (22) and a central line fixing plate (25) connecting the centers of two adjacent sides of four sides of the supporting frame (2).
8. The vertical furnace tube cleaning bottom support and cleaning mechanism according to claim 7, characterized in that a fixing block (26) is provided on the diagonal fixing plate (23), the fixing block (26) is provided on a slide rail arranged along the diagonal fixing plate (23), and the fixing block (26) can be fixed on the slide rail by tightening a screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223465727.6U CN219292277U (en) | 2022-12-23 | 2022-12-23 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223465727.6U CN219292277U (en) | 2022-12-23 | 2022-12-23 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219292277U true CN219292277U (en) | 2023-07-04 |
Family
ID=86984024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223465727.6U Active CN219292277U (en) | 2022-12-23 | 2022-12-23 | Vertical furnace tube cleaning bottom support and cleaning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219292277U (en) |
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2022
- 2022-12-23 CN CN202223465727.6U patent/CN219292277U/en active Active
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