CN206104428U - Sapphire wafer surface washing machine - Google Patents
Sapphire wafer surface washing machine Download PDFInfo
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- CN206104428U CN206104428U CN201620946033.XU CN201620946033U CN206104428U CN 206104428 U CN206104428 U CN 206104428U CN 201620946033 U CN201620946033 U CN 201620946033U CN 206104428 U CN206104428 U CN 206104428U
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- ceramic disk
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- tank
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Abstract
The utility model relates to a water spray formula flushing device aims at providing a sapphire wafer surface washing machine. This kind of sapphire wafer surface washing machine includes frame, automatically controlled cabinet, basin, turnover door, pottery dish rotary main shaft subassembly, inlet tube, intake pipe, screwed pipe, drain pipe, water intaking valve, admission valve, the jet -propelled pipe of water spray, hold -in range, motor and detachable waterproof guard shield, can wash the wafer that pastes at ceramic dish cart face. The utility model discloses to sapphire wafer surface adopting the automatic water spray formula mode of washing, and accomplish the back with the wafer surface washing, removing artifical process of drying ceramic dish cart face and wafer surface from, both practicing thrift dustless paper, reducing the wafer processing cost, reducing artificial possibility to the surperficial fish tail of wafer again.
Description
Technical field
This utility model is with regard to water jet flushing device field, more particularly to a kind of Sapphire wafer surface washer.
Background technology
Sapphire has good physics, chemistry and optical characteristics, brilliant in microelectronics, industry, national defence, scientific research one-level GaN
Piece LED substrate field obtains more and more extensive acting on.With the continuous development of science and technology, for the processing of sapphire wafer
Precision and surface quality requirements more and more higher, therefore sapphire efficiently low damage processing technique becomes obstruction sapphire industrial development
Major obstacle.
To improve sapphire clearance and improving surface quality, sapphire is carried out on Ultra-precision Double Polishing Machine two-sided
Polishing.After the completion of polishing, manually the ceramic panel surface for posting chip is rinsed with hydraulic giant, wafer surface residual is thrown
Light liquid is rinsed out, and is then dried ceramic panel surface and wafer surface with dust-free paper, manually measures wafer thickness with measuring instrument.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, there is provided a kind of to be used to substitute artificial flushing
The Sapphire wafer surface automatic flushing apparatus of chip.To solve above-mentioned technical problem, solution of the present utility model is：
A kind of Sapphire wafer surface washer is provided, the chip for being attached to ceramic panel surface can be rinsed, the indigo plant
Gem wafer surface washer includes frame, electrical control cubicles, tank, turnover door, ceramic disk live spindle component, water inlet pipe, air inlet
Pipe, corrugated tubing, drain pipe, water intaking valve, intake valve, water and air injection pipe, Timing Belt, motor and detachable waterproof；
The tank, ceramic disk live spindle component, electrical control cubicles are respectively fixed on the machine frame；Water intaking valve and intake valve are fixed
On the base of frame；Water inlet pipe and air inlet pipe connect water inlet valve inlet and air inlet valve inlet, water inlet valve outlet port, intake valve respectively
Outlet, one end of corrugated tubing are connected by tee pipe coupling；
The bottom of gullet is welded with pipe screw thread union joint and drainage joint, water and air injection pipe using pipe screw thread union joint with
The other end connection of corrugated tubing, drainage joint and drain pipe connection；Detachable waterproof, and water are installed above tank
The side of groove is fixed with turnover door by hinge, and turnover door is provided with magnetic lock, and when rolling up turnover door, turnover door passes through magnetic lock energy
Fix with detachable waterproof, can prevent water from splashing outside tank；
The ceramic disk live spindle component includes O-ring seal, angular contact bearing, rotary shaft, rotation firm banking, depth
Ditch ball bearing, ceramic disk supporting plate, supporting plate mounting seat, bearing gland, bearing (ball) cover, and ceramic disk live spindle component is by rotation
Firm banking is arranged in frame；The rotation firm banking is arranged on the middle part of rotary shaft, and angular contact bearing, deep-groove ball axle
Hold and be separately mounted to rotate between firm banking and rotary shaft：Angular contact bearing is arranged on the top of rotation firm banking, bearing
Gland is arranged on the top of angular contact bearing, and deep groove ball bearing is arranged on the bottom of rotation firm banking, and bearing (ball) cover is arranged on
The bottom of deep groove ball bearing；The supporting plate mounting seat is fixed on the top of rotary shaft, and ceramic disk supporting plate is arranged on supporting plate mounting seat
On；For placing the ceramic disk for posting chip on ceramic disk supporting plate, and O-ring seal is provided with ceramic disk supporting plate, for preventing
When only ceramic disk supporting plate is rotated, there is relative motion in ceramic disk supporting plate and ceramic disk；
The motor is fixed in frame using motor mount, and motor starts using foot switch and cuts out；Motor leads to
Cross Timing Belt to be connected with the bottom of rotary shaft, and then drive the rotation of ceramic disk supporting plate.
As further improvement, electrical equipment (chopper, PLC, relay, converter are installed in the electrical control cubicles
And other electrical equipments), for passing through to control energization, the power-off of electrical equipment, the startup of controlled motor, stopping respectively, and
The startup of water intaking valve and intake valve, stopping.
Used as further improvement, the turnover door is fixed on front side of tank, i.e., turnover door is to spin upside down structure.
Used as further improvement, the outside bending of plane on the tank is bent into a square plane；It is detachable
The bottom of waterproof is a quadrangular base for not having back cover, and the quadrangular base size ratio of detachable waterproof
Big 2～the 3mm of square planar dimension of tank.
Used as further improvement, the lowest surfaces of the supporting plate mounting seat are less than tank bosom bossing highest face
10mm, forms cross section, for preventing water from splashing ceramic disk live spindle component.
As further improvement, the water spray and blowing direction of the water and air injection pipe, the rotation side with ceramic disk supporting plate
To contrary.
Used as further improvement, the water and air injection pipe adopts ring pipe, plastic conduit or steel pipe；And adopt ring
Guan Shi, the water spray of ring pipe, the position blown and angle can be adjusted, and the nozzle quantity of ring pipe can increase.
Used as further improvement, the motor adopts frequency conversion motor, servomotor or motor.
Used as further improvement, in the Sapphire wafer surface washer, ceramic disk live spindle component is provided with two
Individual, tank is provided with one, and bottom of gullet is welded with two pipe screw thread union joints and a drainage joint (has two pipe screw thread connections
Head is welded on bottom of gullet right positions, and a drainage joint is welded on bottom of gullet middle part)；Two ceramic disc spins masters
Shaft assembly passes through Timing Belt and motor connection, realizes that a motor drives two rotary shafts to rotate；The bosom of the tank
Position is provided with dividing plate, and tank central dividing plate bottom is provided with breach, and bottom of gullet has angle of inclination, for facilitate water collection and
Discharge.
Used as further improvement, the Sapphire wafer surface washer also includes ceramic disk, and the surface of ceramic disk is used
In patch chip, and can be arranged on ceramic disk supporting plate.
Compared with prior art, the beneficial effects of the utility model are：
This utility model adopts automatic spray watering type backwashing manner to Sapphire wafer surface, and wafer surface is being rinsed
Cheng Hou, removes the process manually dried to ceramic panel surface and wafer surface from, had both saved dust-free paper, and reduced chip and be processed into
This, reduces the artificial probability scratched to wafer surface again.
This utility model can be adjusted water spraying time and gassing time, effectively rinse chip table by the time relay respectively
Face remaining slurry；Manipulator Transportation ceramic disk can be also adopted, hand labor intensity and personnel amount is reduced.
Description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the tank schematic diagram in this utility model.
Fig. 3 is the schematic diagram of ceramic disk live spindle component in this utility model.
Reference in figure is：1 turnover door；2 ceramic disk live spindle components；3 tanks；4 electrical control cubicles；5 frames；6 is same
Step band；7 water inlet pipes；8 water intaking valves；9 intake valves；10 air inlet pipe；11 motors；12 water and air injection pipes；13 detachable waterproofs；
14 ceramic disks；15 chips；16O type sealing rings；17 angular contact bearings；18 rotary shafts；19 rotation firm bankings；20 deep-groove ball axles
Hold；21 ceramic disk supporting plates；22 supporting plate mounting seats；23 bearing glands.
Specific embodiment
This utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings：
A kind of Sapphire wafer surface washer as shown in Figure 1 includes frame 5, electrical control cubicles 4, tank 3, turnover door 1, pottery
Porcelain dish live spindle component 2, water inlet pipe 7, air inlet pipe 10, corrugated tubing, drain pipe, water intaking valve 8, intake valve 9, water and air injection pipe
12nd, Timing Belt 6, motor 11, detachable waterproof 13, ceramic disk 14, can enter to the chip 15 for being attached to 14 surface of ceramic disk
Row is rinsed.
Tank 3, ceramic disk live spindle component 2, electrical control cubicles 4 are separately fixed in frame 5, and water intaking valve 8 and intake valve 9 are solid
It is scheduled on the base of frame 5.Water inlet pipe 7 and air inlet pipe 10 connect 9 entrance of 8 entrance of water intaking valve and intake valve respectively, and water intaking valve 8 goes out
Mouth, intake valve 9 are exported, one end of corrugated tubing is connected by tee pipe coupling.
3 bottom welding of tank has 2 pipe screw thread union joints and a drainage joint, and water and air injection pipe 12 is connected using pipe screw thread
Joint is connected with the other end of corrugated tubing, and drainage joint and drain pipe connect.The water spray and blowing direction of water and air injection pipe 12, with
The direction of rotation of ceramic disk supporting plate 21 is contrary.Water and air injection pipe 12 can adopt ring pipe, plastic conduit or steel pipe；And adopt
During ring pipe, the water spray of ring pipe, the position blown and angle can be adjusted, and the nozzle quantity of ring pipe can increase
Plus.As shown in Fig. 2 detachable waterproof 13 is installed in the top draw-in groove of tank 3, and the front side of tank 3 passes through hinge
The turnover door 1 for spinning upside down structure, rather than left and right upset are fixed with, are easy to operate and are saved work space；Turnover door 1 is provided with magnetic
Property lock, turnover door 1 can be fixed with detachable waterproof 13 by magnetic lock, during use, will post the ceramic disk of chip 15
14 are put in ceramic disk bracket slot, then roll up turnover door 1, can effectively prevent water from splashing outside stainless steel trough 3.
The outside bending of plane on tank 3 referred to increase the intensity on 3 four side of the space in tank 3 and tank, need by
Tank 3 carries out bending above laterally, is bent into a tetragonal shape, thus on tank 3 has a plane to deposit
；The bottom of detachable waterproof 13 is a quadrangle form for not having back cover, and size is than putting down that tank 3 is formed above
The big 2-3mm of face size, so, detachable waterproof 13 can be directly clamped among on tank 3 in plane, and waterproof will not go out
Now slide and inclined phenomenon occurs.
Certain angle of inclination is arranged at 3 bottom of tank, and 3 central dividing plate bottom of tank is provided with breach, dividing plate herein by tank 3 every
Into the 2 equirotal spaces in left and right, 1 ceramic disk live spindle component 2 can respectively be installed in the left and right sides, because tank 3 is only opened
There is a discharge outlet, so individual side bottom need to be provided with breach, so, inside the tank 3 of the left and right separated by central dividing plate 2
Water can be flowed out by a discharge outlet, and angle of inclination no requirement (NR) facilitates the collection and discharge of water.Tank 3 can adopt rustless steel
Tank, can be difficult the metal or the process for un-metal material that get rusty using other.
As shown in figure 3, ceramic disk live spindle component 2 includes O-ring seal 16, angular contact bearing 17, rotary shaft 18, rotation
Turn firm banking 19, deep groove ball bearing 20, ceramic disk supporting plate 21, supporting plate mounting seat 22, bearing gland 23.The ceramic disc spins
Spindle assemblies 2 are arranged in frame 5 by rotating firm banking 19, and 22 lowest surfaces of supporting plate mounting seat will be less than inside tank 3
Intermediate raised portion highest face 10mm or so, thus forms the cross section of certain distance, can prevent water from splashing ceramics and spiral
Turn on spindle assemblies 2.The installation relation of the rotary shaft 18 and rotary fixing base：Rotary fixing base top is installed by angular contact bearing
17, bearing gland 23 is installed on 17 top of angular contact bearing, while deep groove ball bearing 20, deep-groove ball axle are installed in rotary fixing base bottom
Hold 20 bottoms and bearing (ball) cover is installed.The supporting plate mounting seat 22 is fixed on the top of rotary shaft 18, and ceramic disk supporting plate 21 is arranged on
In supporting plate mounting seat 22；For placing the ceramic disk 14 for posting chip 15 on ceramic disk supporting plate 21, and pacify on ceramic disk supporting plate 21
Equipped with O-ring seal 16, during for preventing ceramic disk supporting plate 21 from rotating, there is relative fortune in ceramic disk supporting plate 21 and ceramic disk 14
It is dynamic.Motor 11 is fixed in frame 5 using motor mount, and motor 11 starts using foot switch and cuts out.Motor 11 passes through
Timing Belt 6 is connected with the bottom of rotary shaft 18, and then drives ceramic disk supporting plate 21 to rotate, and realizes that a motor 11 drives two rotations
Rotating shaft 18 is rotated.Motor 11 adopts frequency conversion motor, servomotor or motor.
During use, the ceramic disk 14 of chip 15 is posted after CMP planarization, turnover door 1 is turned down by operator, posting crystalline substance
In 21 groove of ceramic disk supporting plate that the ceramic disk 14 of piece 15 is moved on ceramic disk rotary components 2, roll up turnover door 1, turnover door 1 passes through
Magnetic key operated lock is fixed on 13 side of detachable waterproof, the foot switch that operator are stepped in frame 5 with foot afterwards,
Electricity on motor 11, drives ceramic disk live spindle component 2 to rotate by Timing Belt 6, and ceramic disk rotary components 2 drive and post chip
15 ceramic disk 14 is rotated.Water intaking valve 8 is opened simultaneously, and water enters ring pipe 12 by water inlet pipe 7, to 15 surface of chip and ceramics
14 surface of disk is rinsed, and after washing time terminates, water intaking valve 8 is closed, and intake valve 9 is opened, and compressed air passes through air inlet pipe 10
Into ring pipe 12, chip 15 and 14 surface of ceramic disk are blown, after chip 15 and 14 surface of ceramic disk are dried up, intake valve 9
Close, 11 power-off of motor, ceramic disk rotary components 2 stop operating, and turnover door 1 is turned down by operator, takes ceramic disk 14 away, its
On chip 15 can do wafer thickness measuring, while be put into new ceramic disk 14 being rinsed.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also have many variations.One of ordinary skill in the art can be from disclosed in this utility model
The all deformations directly derived in content or associate, are considered as protection domain of the present utility model.
Claims (10)
1. a kind of Sapphire wafer surface washer, can be rinsed to the chip for being attached to ceramic panel surface, it is characterised in that institute
State Sapphire wafer surface washer include frame, electrical control cubicles, tank, turnover door, ceramic disk live spindle component, water inlet pipe,
Air inlet pipe, corrugated tubing, drain pipe, water intaking valve, intake valve, water and air injection pipe, Timing Belt, motor and detachable waterproof；
The tank, ceramic disk live spindle component, electrical control cubicles are respectively fixed on the machine frame；Water intaking valve and intake valve are fixed on machine
On the base of frame；Water inlet pipe and air inlet pipe connect water inlet valve inlet and air inlet valve inlet respectively, and water inlet valve outlet port, intake valve go out
Mouth, one end of corrugated tubing are connected by tee pipe coupling；
The bottom of gullet is welded with pipe screw thread union joint and drainage joint, and water and air injection pipe utilizes pipe screw thread union joint and screw thread
The other end connection of pipe, drainage joint and drain pipe connection；Detachable waterproof is installed above tank, and tank
Side is fixed with turnover door by hinge, and turnover door is provided with magnetic lock, when rolling up turnover door, turnover door by magnetic lock can with can
Dismountable waterproof is fixed, and can prevent water from splashing outside tank；
The ceramic disk live spindle component includes O-ring seal, angular contact bearing, rotary shaft, rotation firm banking, deep-groove ball
Bearing, ceramic disk supporting plate, supporting plate mounting seat, bearing gland, bearing (ball) cover, and ceramic disk live spindle component is by rotating fixation
Floor installation is in frame；The rotation firm banking is arranged on the middle part of rotary shaft, and angular contact bearing, deep groove ball bearing point
An Zhuan not rotate between firm banking and rotary shaft：Angular contact bearing is arranged on the top of rotation firm banking, bearing gland
Installed in the top of angular contact bearing, deep groove ball bearing is arranged on the bottom of rotation firm banking, and bearing (ball) cover is arranged on zanjon
The bottom of ball bearing；The supporting plate mounting seat is fixed on the top of rotary shaft, and ceramic disk supporting plate is arranged in supporting plate mounting seat；Pottery
For placing the ceramic disk for posting chip on porcelain dish supporting plate, and O-ring seal is provided with ceramic disk supporting plate, for preventing ceramics
When pan arrest plate is rotated, there is relative motion in ceramic disk supporting plate and ceramic disk；
The motor is fixed in frame using motor mount, and motor starts using foot switch and cuts out；Motor is by same
Step band is connected with the bottom of rotary shaft, and then drives the rotation of ceramic disk supporting plate.
2. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that install in the electrical control cubicles
There is electrical equipment, for the energization by controlling electrical equipment, power-off, the startup of difference controlled motor, stopping, and water intaking valve
Startup, stopping with intake valve.
3. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that the turnover door is fixed on
On front side of tank, i.e., turnover door is to spin upside down structure.
4. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that on the tank plane to
Outer bending, is bent into a square plane；The bottom of detachable waterproof is a quadrangular base for not having back cover,
And the quadrangular base size of detachable waterproof 2～3mm bigger than the square planar dimension of tank.
5. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that the supporting plate mounting seat
Lowest surfaces are less than tank bosom bossing highest face 10mm, form cross section, spiral for preventing water from splashing ceramics
Turn on spindle assemblies.
6. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that the water and air injection pipe
Water spray and blowing direction are contrary with the direction of rotation of ceramic disk supporting plate.
7. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that the water and air injection pipe is adopted
With ring pipe, plastic conduit or steel pipe；And during using ring pipe, the water spray of ring pipe, the position blown and angle can be entered
Row is adjusted, and the nozzle quantity of ring pipe can increase.
8. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that the motor adopts frequency conversion
Motor, servomotor or motor.
9. a kind of Sapphire wafer surface washer according to claim 1, it is characterised in that the sapphire wafer table
In the washer of face, ceramic disk live spindle component is provided with two, and tank is provided with one, and bottom of gullet is welded with two pipe screw threads and connects
Joint and a drainage joint；Two ceramic disk live spindle components pass through Timing Belt and motor connection, realize a motor belt motor
Dynamic two rotary shafts are rotated；The bosom position of the tank is provided with dividing plate, and tank central dividing plate bottom is provided with breach, water
Trench bottom has angle of inclination, for facilitating the collection and discharge of water.
10. a kind of Sapphire wafer surface washer according to claim 1 to 9 any one, it is characterised in that described
Sapphire wafer surface washer also includes ceramic disk, and the surface of ceramic disk is used to paste chip, and can be arranged on ceramic disk supporting plate
On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620946033.XU CN206104428U (en) | 2016-08-24 | 2016-08-24 | Sapphire wafer surface washing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620946033.XU CN206104428U (en) | 2016-08-24 | 2016-08-24 | Sapphire wafer surface washing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206104428U true CN206104428U (en) | 2017-04-19 |
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ID=58513472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620946033.XU Active CN206104428U (en) | 2016-08-24 | 2016-08-24 | Sapphire wafer surface washing machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN206104428U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107282565A (en) * | 2017-07-28 | 2017-10-24 | 西安富康空气净化设备工程有限公司 | A kind of cleaning machine of experimental animal feeding box |
| CN108816880A (en) * | 2018-06-08 | 2018-11-16 | 深圳市艺中乐珠宝有限公司 | A kind of jewelry cleaning drying device convenient for discharging |
| CN109227397A (en) * | 2018-09-30 | 2019-01-18 | 深圳市诺峰光电设备有限公司 | A kind of polishing proof mechanism of water and polishing machine |
| CN114111281A (en) * | 2021-11-26 | 2022-03-01 | 盐城矽润半导体有限公司 | Nitrogen drying equipment for semiconductor wafer processing |
-
2016
- 2016-08-24 CN CN201620946033.XU patent/CN206104428U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107282565A (en) * | 2017-07-28 | 2017-10-24 | 西安富康空气净化设备工程有限公司 | A kind of cleaning machine of experimental animal feeding box |
| CN108816880A (en) * | 2018-06-08 | 2018-11-16 | 深圳市艺中乐珠宝有限公司 | A kind of jewelry cleaning drying device convenient for discharging |
| CN109227397A (en) * | 2018-09-30 | 2019-01-18 | 深圳市诺峰光电设备有限公司 | A kind of polishing proof mechanism of water and polishing machine |
| CN114111281A (en) * | 2021-11-26 | 2022-03-01 | 盐城矽润半导体有限公司 | Nitrogen drying equipment for semiconductor wafer processing |
| CN114111281B (en) * | 2021-11-26 | 2023-05-12 | 盐城矽润半导体有限公司 | Nitrogen drying equipment for semiconductor wafer processing |
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