CN1158160A - 物体观测设备和方法 - Google Patents

物体观测设备和方法 Download PDF

Info

Publication number
CN1158160A
CN1158160A CN96190695A CN96190695A CN1158160A CN 1158160 A CN1158160 A CN 1158160A CN 96190695 A CN96190695 A CN 96190695A CN 96190695 A CN96190695 A CN 96190695A CN 1158160 A CN1158160 A CN 1158160A
Authority
CN
China
Prior art keywords
target observation
observation part
light
described target
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN96190695A
Other languages
English (en)
Chinese (zh)
Inventor
三宅民生
石田智也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Publication of CN1158160A publication Critical patent/CN1158160A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0817—Monitoring of soldering processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Operations Research (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN96190695A 1995-05-31 1996-05-29 物体观测设备和方法 Pending CN1158160A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP155551/95 1995-05-31
JP15555195 1995-05-31

Publications (1)

Publication Number Publication Date
CN1158160A true CN1158160A (zh) 1997-08-27

Family

ID=15608542

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96190695A Pending CN1158160A (zh) 1995-05-31 1996-05-29 物体观测设备和方法

Country Status (5)

Country Link
EP (1) EP0773426A1 (enExample)
KR (1) KR970705006A (enExample)
CN (1) CN1158160A (enExample)
TW (1) TW296429B (enExample)
WO (1) WO1996038709A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103727880A (zh) * 2012-10-12 2014-04-16 横河电机株式会社 位移传感器、光谱特性测量设备及方法、颜色测量设备及方法、平面测量对象质量监控设备、和位移测量方法
CN108871186A (zh) * 2017-05-12 2018-11-23 株式会社三丰 三维测量机以及三维测量方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001240006A1 (en) * 2000-03-02 2001-09-12 Jerry M Roane Method and apparatus for recording multiple perspective images
EP2551634A1 (de) * 2011-07-26 2013-01-30 Alicona Imaging GmbH Retroflektierender Probenhalter und Messeinrichtung
DE102011108599A1 (de) 2011-07-27 2013-01-31 Byk-Gardner Gmbh Vorrichtung und Verfahren zur Untersuchung von Beschichtungen mit Effektpigmenten
DE102018118097A1 (de) * 2018-07-26 2020-01-30 Sikora Ag Vorrichtung zur Bestimmung des Durchmessers und/oder der Außenkontur eines strangförmigen Gegenstandes
CN210807443U (zh) * 2019-12-27 2020-06-19 苏州康代智能科技股份有限公司 一种拱形照明装置及具有其的成像系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061173B2 (ja) * 1988-05-09 1994-01-05 オムロン株式会社 曲面性状検査装置
JP2932307B2 (ja) * 1990-08-23 1999-08-09 ディフラクト リミテッド 逆反射を利用した表面検査及び歪み測定のための方法及び装置
JP3074195B2 (ja) * 1991-04-16 2000-08-07 富士通株式会社 外観検査装置
JPH05259031A (ja) * 1992-03-12 1993-10-08 Nikon Corp 傾き検出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103727880A (zh) * 2012-10-12 2014-04-16 横河电机株式会社 位移传感器、光谱特性测量设备及方法、颜色测量设备及方法、平面测量对象质量监控设备、和位移测量方法
CN103727880B (zh) * 2012-10-12 2017-09-08 横河电机株式会社 位移传感器、光谱特性测量设备及方法、颜色测量设备及方法、平面测量对象质量监控设备、和位移测量方法
CN108871186A (zh) * 2017-05-12 2018-11-23 株式会社三丰 三维测量机以及三维测量方法

Also Published As

Publication number Publication date
EP0773426A1 (en) 1997-05-14
WO1996038709A1 (fr) 1996-12-05
TW296429B (enExample) 1997-01-21
KR970705006A (ko) 1997-09-06

Similar Documents

Publication Publication Date Title
CN1191470C (zh) 表面检查装置
EP1363153B1 (en) Ring illuminator
CN1661323A (zh) 表面状态检查方法、表面状态检查装置和基板检查装置
CN1280670C (zh) 测距装置、三维计测方法以及光源装置
CN1758018A (zh) 多视角激光测头及其标定方法
JP6462823B2 (ja) 画像検査装置
CN1656337A (zh) 照明装置、采用该照明装置的摄影装置以及投影装置
CN1717171A (zh) 图像产生方法和用于检查基板的照明装置
CN101051619A (zh) 基板检查装置及使用其的基板检查方法
CN1888813A (zh) 图像获取设备
CN1096790C (zh) 图象形成设备和光源装置
CN101034069A (zh) 缺陷检查装置缺陷检查方法
JP2001249012A (ja) 被検体の外観形状検査方法及び装置
CN1742294A (zh) 制作包含深度信息的图像的方法和装置
CN1646983A (zh) 照明设备
US11906357B2 (en) Illumination device for a spectrophotometer having integrated mixing optics, and method for illuminating a sample
CN1618039A (zh) 透射式屏幕及投射式显示装置
CN1940750A (zh) 光学扫描设备
CN1158160A (zh) 物体观测设备和方法
CN1844901A (zh) 缺陷检查方法以及利用该方法的缺陷检查装置
CN1237353C (zh) 正交二向色棱镜及使用正交二向色棱镜的反射型液晶投影仪
CN1220094C (zh) 色彩组合光学系统的位置调整方法与位置调整系统以及放映机
CN1241060C (zh) 照相处理装置
CN1272844C (zh) 表面检查的方法和设备
CN111077164A (zh) 一种基于机器视觉的钙钛矿薄膜质量检测装置及方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C01 Deemed withdrawal of patent application (patent law 1993)
WD01 Invention patent application deemed withdrawn after publication