CN1157775C - 半导体器件的测试及半导体器件制造方法 - Google Patents
半导体器件的测试及半导体器件制造方法 Download PDFInfo
- Publication number
- CN1157775C CN1157775C CNB991050258A CN99105025A CN1157775C CN 1157775 C CN1157775 C CN 1157775C CN B991050258 A CNB991050258 A CN B991050258A CN 99105025 A CN99105025 A CN 99105025A CN 1157775 C CN1157775 C CN 1157775C
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- 238000012360 testing method Methods 0.000 title claims abstract description 179
- 238000000034 method Methods 0.000 title claims abstract description 94
- 230000008569 process Effects 0.000 title claims abstract description 47
- 239000004065 semiconductor Substances 0.000 title claims description 57
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 18
- 230000009466 transformation Effects 0.000 claims description 17
- 238000013501 data transformation Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 4
- 238000012956 testing procedure Methods 0.000 claims description 2
- 238000004088 simulation Methods 0.000 abstract description 7
- 230000007704 transition Effects 0.000 abstract description 7
- 230000004044 response Effects 0.000 abstract description 5
- 239000000872 buffer Substances 0.000 description 44
- 238000003860 storage Methods 0.000 description 14
- 238000005070 sampling Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 10
- 238000009825 accumulation Methods 0.000 description 4
- 238000013519 translation Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000004069 differentiation Effects 0.000 description 3
- 238000010200 validation analysis Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012421 spiking Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
- G01R31/318307—Generation of test inputs, e.g. test vectors, patterns or sequences computer-aided, e.g. automatic test program generator [ATPG], program translations, test program debugging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
- G01R31/318342—Generation of test inputs, e.g. test vectors, patterns or sequences by preliminary fault modelling, e.g. analysis, simulation
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Tests Of Electronic Circuits (AREA)
- Test And Diagnosis Of Digital Computers (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11550698 | 1998-04-24 | ||
JP115506/98 | 1998-04-24 | ||
JP115506/1998 | 1998-04-24 | ||
JP98133/99 | 1999-04-05 | ||
JP09813399A JP3662439B2 (ja) | 1998-04-24 | 1999-04-05 | 半導体試験用データ処理装置及び方法並びに半導体試験装置 |
JP98133/1999 | 1999-04-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1233850A CN1233850A (zh) | 1999-11-03 |
CN1157775C true CN1157775C (zh) | 2004-07-14 |
Family
ID=26439337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB991050258A Expired - Fee Related CN1157775C (zh) | 1998-04-24 | 1999-04-23 | 半导体器件的测试及半导体器件制造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6721676B1 (zh) |
EP (1) | EP0955551B1 (zh) |
JP (1) | JP3662439B2 (zh) |
CN (1) | CN1157775C (zh) |
DE (1) | DE69925953T2 (zh) |
HK (1) | HK1023182A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7194474B2 (en) * | 1999-12-01 | 2007-03-20 | General Electric Company | Method of processing test information |
DE10392497T5 (de) * | 2002-04-11 | 2005-02-17 | Advantest Corp. | Herstellungsverfahren und Herstellungsvorrichtung zum Vermeiden eines Prototypen-Aufschubs bei der ASIC/SOC-Herstellung |
US6799152B1 (en) * | 2002-07-26 | 2004-09-28 | Macronix International Co., Ltd. | Critical dimension statistical process control in semiconductor fabrication |
JP4880889B2 (ja) * | 2003-09-09 | 2012-02-22 | セイコーインスツル株式会社 | 半導体装置の製造方法 |
JP4761431B2 (ja) * | 2003-09-09 | 2011-08-31 | セイコーインスツル株式会社 | 半導体装置の製造方法 |
US7408336B2 (en) * | 2005-10-26 | 2008-08-05 | International Business Machines Corporation | Importation of virtual signals into electronic test equipment to facilitate testing of an electronic component |
US20070283104A1 (en) * | 2006-05-31 | 2007-12-06 | International Business Machines Corporation | Concurrent Hardware Selftest for Central Storage |
CN104750046B (zh) * | 2013-12-30 | 2017-09-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 半导体制造的工艺任务处理方法及系统 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5537580A (en) * | 1994-12-21 | 1996-07-16 | Vlsi Technology, Inc. | Integrated circuit fabrication using state machine extraction from behavioral hardware description language |
US5668745A (en) * | 1995-10-20 | 1997-09-16 | Lsi Logic Corporation | Method and apparatus for testing of semiconductor devices |
US6363509B1 (en) * | 1996-01-16 | 2002-03-26 | Apple Computer, Inc. | Method and apparatus for transforming system simulation tests to test patterns for IC testers |
US5920490A (en) * | 1996-12-26 | 1999-07-06 | Adaptec, Inc. | Integrated circuit test stimulus verification and vector extraction system |
US5845234A (en) * | 1997-04-22 | 1998-12-01 | Integrated Measurement Systems, Inc. | System and method for efficiently generating testing program code for use in automatic test equipment |
US6061283A (en) * | 1998-10-23 | 2000-05-09 | Advantest Corp. | Semiconductor integrated circuit evaluation system |
-
1999
- 1999-04-05 JP JP09813399A patent/JP3662439B2/ja not_active Expired - Fee Related
- 1999-04-22 US US09/296,488 patent/US6721676B1/en not_active Expired - Fee Related
- 1999-04-23 EP EP99303168A patent/EP0955551B1/en not_active Expired - Lifetime
- 1999-04-23 DE DE69925953T patent/DE69925953T2/de not_active Expired - Lifetime
- 1999-04-23 CN CNB991050258A patent/CN1157775C/zh not_active Expired - Fee Related
-
2000
- 2000-04-12 HK HK00102219A patent/HK1023182A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP3662439B2 (ja) | 2005-06-22 |
HK1023182A1 (en) | 2000-09-01 |
CN1233850A (zh) | 1999-11-03 |
DE69925953D1 (de) | 2005-08-04 |
JP2000009810A (ja) | 2000-01-14 |
DE69925953T2 (de) | 2005-12-22 |
EP0955551A2 (en) | 1999-11-10 |
EP0955551A3 (en) | 2000-10-04 |
US6721676B1 (en) | 2004-04-13 |
EP0955551B1 (en) | 2005-06-29 |
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C06 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20081219 Address after: Tokyo, Japan Patentee after: Fujitsu Microelectronics Ltd. Address before: Kanagawa, Japan Patentee before: Fujitsu Ltd. |
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ASS | Succession or assignment of patent right |
Owner name: FUJITSU MICROELECTRONICS CO., LTD. Free format text: FORMER OWNER: FUJITSU LIMITED Effective date: 20081219 |
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C56 | Change in the name or address of the patentee |
Owner name: FUJITSU SEMICONDUCTOR CO., LTD. Free format text: FORMER NAME: FUJITSU LTD |
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CP01 | Change in the name or title of a patent holder |
Address after: Kanagawa Patentee after: FUJITSU MICROELECTRONICS Ltd. Address before: Kanagawa Patentee before: Fujitsu Microelectronics Ltd. |
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CP02 | Change in the address of a patent holder |
Address after: Kanagawa Patentee after: FUJITSU MICROELECTRONICS Ltd. Address before: Tokyo, Japan Patentee before: Fujitsu Microelectronics Ltd. |
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ASS | Succession or assignment of patent right |
Owner name: SUOSI FUTURE CO., LTD. Free format text: FORMER OWNER: FUJITSU SEMICONDUCTOR CO., LTD. Effective date: 20150526 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150526 Address after: Kanagawa Patentee after: SOCIONEXT Inc. Address before: Kanagawa Patentee before: FUJITSU MICROELECTRONICS Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040714 Termination date: 20160423 |
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CF01 | Termination of patent right due to non-payment of annual fee |