CN115728529A - Automatic operating device for needle card protective cover, probe station and wafer detection device - Google Patents
Automatic operating device for needle card protective cover, probe station and wafer detection device Download PDFInfo
- Publication number
- CN115728529A CN115728529A CN202211512395.4A CN202211512395A CN115728529A CN 115728529 A CN115728529 A CN 115728529A CN 202211512395 A CN202211512395 A CN 202211512395A CN 115728529 A CN115728529 A CN 115728529A
- Authority
- CN
- China
- Prior art keywords
- protective cover
- card
- sensing unit
- detection signal
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention provides an automatic operating device for a needle card protective cover, a probe station and a wafer detection device, which comprise a bearing unit, a sensing unit and a mechanical arm, wherein the bearing unit is arranged on the probe station; the bearing unit is arranged on the probe station and is provided with a bearing area for placing the probe card; the sensing unit comprises a first sensing unit, and the first sensing unit is used for detecting whether the protective cover exists in the bearing area and sending a first detection signal to the mechanical arm in real time; the mechanical arm is arranged above the bearing unit and used for receiving the first detection signal from the first sensing unit and the operation instruction sent by the probe station and executing corresponding operation according to the first detection signal and the operation instruction. Utilize the automatics is right the pincard carries out automation mechanized operation, avoids the manual work to forget to install or take off the visor leads to the visor collides with the wafer makes the wafer impaired or probe in the pincard is damaged.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to an automatic operating device for a pin card protective cover, a probe station and a wafer detection device.
Background
In the current semiconductor chip testing industry, in wafer level testing, probes on a pin card are directly contacted with pads or bumps on a chip to lead out chip signals generated by a testing machine, and then peripheral testing instruments and software control are matched to achieve the purpose of automatic measurement. The pin card is applied to the integrated circuit before packaging, can test by using a probe to do work aiming at a bare crystal system, screens out a bad product, and then carries out subsequent packaging engineering, thereby saving the packaging cost of the bad product, and the pin card has great significance for controlling the manufacturing cost in the manufacturing of the integrated circuit.
The pin card is the most expensive consumable in a test factory, so the pin card can be protected by the protective cover when not used, and the protective cover is taken down when used; however, at present, the operation of installing and removing the protective cover of the pin card is manually completed, so that the protective cover is easily forgotten to be installed on the pin card by human errors, or the protective cover of the pin card is forgotten to be removed to carry out production, so that the probe is damaged or even directly scrapped due to the existence of the protective cover in the subsequent testing process, and further great economic loss is caused.
Disclosure of Invention
The invention aims to provide an automatic operating device for a pin card protective cover, a probe station and a wafer detection device, which aim to solve the problem that in the prior art, a probe is damaged because the pin card protective cover is forgotten to be installed on the pin card manually or the pin card protective cover is forgotten to be detached when the probe detects a wafer.
In order to solve the technical problem, the invention provides an automatic operating device for a pin card protective cover, wherein a pin card is used for a probe table to detect a wafer, and the automatic operating device is characterized by comprising a bearing unit, a sensing unit and a mechanical arm; the bearing unit is arranged on the probe station and is provided with a bearing area, and the bearing area is used for placing the needle card; the sensing unit comprises a first sensing unit, and the first sensing unit is used for detecting whether the protective cover exists in the bearing area and sending a first detection signal to the mechanical arm in real time; the mechanical arm is arranged above the bearing unit and used for receiving the first detection signal from the first sensing unit and an operation instruction sent by the probe station and executing corresponding operation according to the first detection signal and the operation instruction.
Preferably, in the automatic operating device for the needle card protective cover, the operating instruction includes a card entering instruction and a card returning instruction, and the executing, by the mechanical arm, corresponding operations according to the detection signal and the operating instruction includes: if the first detection signal shows that the protective cover exists in the bearing area and the operation instruction is the card entering instruction, the protective cover is moved out of the position above the needle card by the mechanical arm; if the first detection signal shows that the protective cover does not exist in the bearing area and the operation instruction is the card entering instruction, the mechanical arm does not execute operation; if the first detection signal shows that the protective cover does not exist in the bearing area and the operation instruction is the card withdrawing instruction, the protective cover is covered on the needle card by the mechanical arm.
Preferably, in the pin card protection cover automation operating device, the pin card protection cover automation operating device further includes a receiving unit, the sensing unit further includes a second sensing unit, the receiving unit is used for placing the protection cover taken down from the pin card, the second sensing unit is used for detecting whether the protection cover exists in the receiving unit and sending a second detection signal to the mechanical arm; if the operation instruction is the card withdrawing instruction and the second detection signal shows that the protective cover exists in the accommodating unit, the protective cover is covered on the pin card by the mechanical arm.
Preferably, in the automatic operation device for a pin card protection cover, the first sensing unit and/or the second sensing unit is/are an infrared sensor.
Preferably, in the pin card protection cover automation operating device, a sensing angle of the first sensing unit and/or the second sensing unit is adjusted according to a height of the protection cover.
Preferably, in the automatic operating device for a needle card protection cover, the automatic operating device for a needle card protection cover further includes a trigger type pressure sensor and a first alarm device, wherein the trigger type pressure sensor is disposed on the bearing unit to sense whether the bearing unit has the needle card, and send the sensing signal to the first alarm device.
Preferably, in the automatic operating device for a pincard protection cover, the first alarm device receives the sensing signal from the trigger pressure sensor and the first detection signal from the first sensing unit, and when the sensing signal indicates that the pincard exists in the carrying unit and the first detection signal indicates that the protection cover does not exist in the carrying area, the alarm device gives an alarm.
Preferably, in the pin card protection cover automation operation device, the pin card protection cover automation operation device further includes a second alarm device, the second alarm device receives the second detection signal and the operation instruction from the second sensing unit, and if the operation instruction is the card withdrawing instruction and the second detection signal indicates that the protective cover does not exist in the accommodating unit, the second alarm device gives an alarm.
The invention provides a probe station which is in communication connection with an automatic operating device of a needle card protective cover.
The invention provides a wafer detection device which comprises an automatic operating device of a needle card protective cover and a probe station.
In summary, the present invention provides an automatic operation device for a pincard protection cover, a probe station and a wafer inspection apparatus, wherein the automatic operation device for the pincard protection cover comprises a carrying unit, a sensing unit and a mechanical arm; the bearing unit is arranged on the probe station and is provided with a bearing area, and the bearing area is used for placing the probe card; the sensing unit comprises a first sensing unit, and the first sensing unit is used for detecting whether the protective cover exists in the bearing area and sending a first detection signal to the mechanical arm in real time; the mechanical arm is arranged above the bearing unit and used for receiving the first detection signal from the first sensing unit and the operation instruction sent by the probe station and executing corresponding operation according to the first detection signal and the operation instruction.
By using the automatic operating device for the needle card protective cover, the probe station and the wafer detection device provided by the invention to protect the needle card during wafer test, the damage of the probe in the needle card due to the lack of protection and the easy contact and friction with the outside caused by the lack of protection caused by forgetting to install the protective cover to the needle card by manual mistake can be effectively avoided, or the damage of the wafer caused by the collision of the protective cover and the wafer and the damage and even scrapping of the probe in the needle card caused by forgetting to take off the protective cover during wafer test can be avoided, so that the economic loss is caused. Furthermore, the automation can be realized by utilizing the automatic device, and the manpower is greatly liberated.
Drawings
FIG. 1 is a schematic view of an automated pin card protection cover handling device;
wherein the reference numerals are as follows:
10-pin card; 20-a protective cover; 30-a probe station;
301-a carrying unit; 302-a housing unit.
Detailed Description
The automatic operation device for the needle card protection cover according to the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention. Further, the structures illustrated in the drawings are intended to be part of actual structures. In particular, the drawings are intended to show different emphasis, sometimes in different proportions.
As used in this application, the singular forms "a," "an," and "the" include plural referents, and the term "or" is generally employed in a sense including "and/or" and, further, the terms "first," "second," and "third" are used merely for descriptive purposes and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Furthermore, as used in the present invention, the disposition of an element with another element generally only means that there is a connection, coupling, fit or driving relationship between the two elements, and the connection, coupling, fit or driving relationship between the two elements may be direct or indirect through intermediate elements, and cannot be understood as indicating or implying any spatial positional relationship between the two elements, i.e., an element may be in any orientation inside, outside, above, below or to one side of another element, unless the content clearly indicates otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The core idea of the invention is to solve the problem that the probe is damaged because the needle card protective cover is forgotten to be installed on the needle card due to manual error or the needle card protective cover is forgotten to be detached when the probe detects the wafer.
In order to realize the idea, referring to fig. 1, the present invention provides an automatic handling device for a pincard protection cover, where the pincard 10 is used for a probe station 30 to detect a wafer, and includes a carrying unit 301, a sensing unit and a robot arm.
The carrying unit 301 is disposed on the probe station 30 and has a carrying area, and the carrying area is used for placing the needle card 10; the sensing unit comprises a first sensing unit, and the first sensing unit is used for detecting whether the protective cover 20 exists in the bearing area and sending a first detection signal to the mechanical arm in real time; the mechanical arm is disposed above the carrying unit 301, and configured to receive the first detection signal from the first sensing unit and an operation instruction sent from the probe station 30, and execute a corresponding operation according to the first detection signal and the operation instruction.
Specifically, the operation instruction includes a card entering instruction and a card returning instruction, and the executing of the corresponding operation by the mechanical arm according to the detection signal and the operation instruction includes: if the first detection signal shows that the protective cover 20 exists in the bearing area, and the operation instruction is the card entering instruction, the mechanical arm moves the protective cover 20 out of the upper part of the pin card 10; if the first detection signal shows that the protective cover 20 does not exist in the bearing area and the operation instruction is the card entering instruction, the mechanical arm does not execute operation; if the first detection signal indicates that the protective cover 20 does not exist in the bearing area, and the operation instruction is the card withdrawing instruction, the mechanical arm covers the protective cover 20 on the pin card 10.
Based on the above description, the mechanical arm receives different operation instructions and different first detection signals, and the operations performed by the mechanical arm are different, so that the fully automatic operation of the protective cover 20 can be realized.
It is understood that the term "enter" refers to the fact that the pin card 10 is placed in the carrying area, and enters a working position to inspect a wafer after the protective cover 20 is removed; the "card ejection" means that the prober 10 is installed with the protective cover 20 and ejected from the prober 30 after the wafer inspection is completed at a working position.
In addition, when the prober 10 is in a working state for detecting the wafer, the protective cover 20 needs to be placed in a space, and preferably, the automatic handling device for the prober 10 and the protective cover 20 further includes a receiving unit 302, where the receiving unit 302 is used for placing the protective cover 20 removed from the prober 10. It should be noted that the accommodating unit 302 may be disposed at a position outside the probe station 30, and optionally, the accommodating unit 302 may also be a fixing area on the probe station 30, which is not limited in the present invention, but it should be noted that the fixing area needs to avoid the carrying area and a working position where the probe card 10 is located when detecting a wafer.
Specifically, the sensing unit further includes a second sensing unit, and the second sensing unit is configured to detect whether the protective cover 20 exists in the accommodating unit 302, and send a second detection signal to the robot arm; if the operation instruction is the card withdrawing instruction and the second detection signal indicates that the accommodating unit 302 has the protective cover 20, the mechanical arm covers the protective cover 20 on the pin card 10.
In this embodiment, the first sensing unit and/or the second sensing unit is an infrared sensor.
In order to make the range detected by the first sensing unit and/or the second sensing unit sufficiently comprehensive, as a preferred embodiment, the sensing angle of the first sensing unit and/or the second sensing unit is adjusted according to the height of the protection cover 20, so that when the height of the protection cover 20 is higher or lower than a preset sensing height, or deviates from a preset sensing area, the sensing angle of the first sensing unit and/or the second sensing unit can be adjusted accordingly so that it can still detect the protection cover 20.
In addition, before the probe station 30 sends the operation instruction, in order to ensure the integrity of the automation process, the automatic operation device for the needle card protection cover further includes a trigger type pressure sensor, which is disposed on the carrying unit 301 to sense whether the needle card exists in the carrying unit 301; further, in order to remind a worker to confirm, investigate or overhaul in time, the automatic operating device for the needle card protective cover further comprises a first alarm device, the first alarm device receives a sensing signal from the trigger type pressure sensor and the first detection signal of the first sensing unit, and when the sensing signal shows that the needle card 10 exists in the bearing unit 301 and the first detection signal shows that the protective cover 20 does not exist in the bearing area, the alarm device gives an alarm.
It should be understood that the pincard 10 is default to have the protective cover 20 before being placed on the carrier unit 301, and therefore, when the trigger type pressure sensor indicates that the carrier unit 301 has the pincard 10 and the first detection signal indicates that the protective cover 20 does not exist on the pincard 10, it is defined as an abnormal phenomenon, and when the abnormal phenomenon occurs, it needs to be confirmed again by a human, that is, the first alarm device alarms, and it is confirmed that the pincard 10 does not exist in the protective cover 20, and then the subsequent process is performed, so as to avoid the damage of the wafer or the probe caused by directly probing the wafer without detecting the protective cover 20 on the pincard 10 due to other reasons.
Further, the automatic operating device for the pincard protection cover further comprises a second alarm device, the second alarm device receives the second detection signal and the operation command from the second sensing unit, and if the operation command is the card withdrawing command and the second detection signal indicates that the holding unit 302 does not have the protection cover 20, the second alarm device gives an alarm.
Specifically, when the second detection signal indicates that the accommodating unit 302 does not have the protective cover 20, the operation command is the card withdrawing command, and at this time, the mechanical arm is stationary and does not move, and it is necessary for a worker to manually place the protective cover 20 on the accommodating unit 302 until the second detection signal indicates that the accommodating unit 302 has the protective cover 20, and the mechanical arm grips and transfers the protective cover 20 from the accommodating unit 302 to the pincard 10.
Based on the same idea, the present invention further provides a probe station 30, please refer to fig. 1, wherein the probe station 30 is connected to the automatic operation device of the protection cover 20 of the needle card 10 in a communication manner.
Based on the same idea, the invention further provides a wafer detection device, which comprises an automatic operation device for the protective cover 20 of the probe card 10, the probe station 30 and a trigger type pressure sensor.
In summary, the present invention provides an automatic operation device for a prober, a prober and a wafer inspection device, wherein the automatic operation device for a prober cover comprises a carrying unit, a sensing unit and a robot arm; the bearing unit is arranged on the probe station and is provided with a bearing area, and the bearing area is used for placing the probe card; the sensing unit comprises a first sensing unit, and the first sensing unit is used for detecting whether the protective cover exists in the bearing area and sending a first detection signal to the mechanical arm in real time; the mechanical arm is arranged above the bearing unit and used for receiving the first detection signal from the first sensing unit and the operation instruction sent by the probe station and executing corresponding operation according to the first detection signal and the operation instruction.
By using the automatic operating device for the needle card protective cover, the probe station and the wafer detection device provided by the invention to protect the needle card during wafer test, the damage of the probe in the needle card due to the lack of protection and the easy contact and friction with the outside caused by the fact that the protective cover is forgotten to be installed to the needle card by manual mistake is effectively avoided, or the damage of the wafer caused by the collision of the protective cover and the wafer and the damage and even scrapping of the probe in the needle card caused by the fact that the protective cover is forgotten to be taken down by manual mistake when the wafer is detected by the probe is avoided, so that the economic loss is caused. Furthermore, the automation can be realized by utilizing the automatic device, and the manpower is greatly liberated.
It should be understood, however, that the intention is not to limit the invention to the particular embodiments disclosed, but to the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims. It will be apparent to those skilled in the art that many changes and modifications can be made, or equivalents employed, to the presently disclosed embodiments without departing from the intended scope of the invention. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the protection scope of the technical solution of the present invention, unless the content of the technical solution of the present invention is departed from.
Claims (10)
1. An automatic operating device for a pin card protective cover, wherein the pin card is used for a probe table to detect a wafer, and the automatic operating device is characterized by comprising: the device comprises a bearing unit, a sensing unit and a mechanical arm;
the bearing unit is arranged on the probe station and is provided with a bearing area, and the bearing area is used for placing the needle card;
the sensing unit comprises a first sensing unit, and the first sensing unit is used for detecting whether the protective cover exists in the bearing area and sending a first detection signal to the mechanical arm in real time;
the mechanical arm is arranged above the bearing unit and used for receiving the first detection signal from the first sensing unit and an operation instruction sent by the probe station and executing corresponding operation according to the first detection signal and the operation instruction.
2. The automatic operation device for protecting cover of pincard as claimed in claim 1, wherein said operation command includes a card entering command and a card exiting command, and said robot performing corresponding operations according to said detection signal and said operation command includes:
if the first detection signal shows that the protective cover exists in the bearing area and the operation instruction is the card entering instruction, the mechanical arm moves the protective cover out of the upper part of the needle card;
if the first detection signal shows that the protective cover does not exist in the bearing area and the operation instruction is the card entering instruction, the mechanical arm does not execute operation;
if the first detection signal shows that the protective cover does not exist in the bearing area and the operation instruction is the card withdrawing instruction, the protective cover is covered on the needle card by the mechanical arm.
3. The pin card protective cover automatic operation device according to claim 1, wherein the pin card protective cover automatic operation device further comprises a receiving unit, the sensing unit further comprises a second sensing unit, the receiving unit is used for placing the protective cover removed from the pin card, the second sensing unit is used for detecting whether the protective cover exists in the receiving unit and sending a second detection signal to the robot arm; if the operation instruction is the card withdrawing instruction and the second detection signal shows that the protective cover exists in the accommodating unit, the protective cover is covered on the pin card by the mechanical arm.
4. The card protection cover automation device of claim 1 or 3, wherein the first sensing unit and/or the second sensing unit is an infrared sensor.
5. The pin card protective cover automation device according to claim 4, wherein a sensing angle of the first sensing unit and/or the second sensing unit is adjusted according to a height of the protective cover.
6. The needle card protective cover automation device of claim 1, further comprising a trigger type pressure sensor and a first alarm device, wherein the trigger type pressure sensor is disposed on the carrier unit to sense whether the needle card is present on the carrier unit and send the sensing signal to the first alarm device.
7. The pin card protective cover automation device of claim 6, wherein the first alarm device receives the sensing signal from the trigger pressure sensor and the first detection signal from the first sensing unit, and the alarm device alarms when the sensing signal indicates the presence of the pin card in the carrying unit and the first detection signal indicates the absence of the protective cover in the carrying area.
8. The pin card protective cover automation device according to claim 1, further comprising a second alarm device, wherein the second alarm device receives the second detection signal and the operation command from the second sensing unit, and the second alarm device alarms if the operation command is the card withdrawing command and the second detection signal indicates that the protective cover does not exist in the accommodating unit.
9. A probe station, wherein the probe station is in communication connection with the card protection cover automation device of any one of claims 1 to 8.
10. A wafer inspection apparatus, comprising: the card protection cover automation device of any one of claims 1 to 8 and the probe station of claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211512395.4A CN115728529A (en) | 2022-11-29 | 2022-11-29 | Automatic operating device for needle card protective cover, probe station and wafer detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211512395.4A CN115728529A (en) | 2022-11-29 | 2022-11-29 | Automatic operating device for needle card protective cover, probe station and wafer detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115728529A true CN115728529A (en) | 2023-03-03 |
Family
ID=85299013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211512395.4A Pending CN115728529A (en) | 2022-11-29 | 2022-11-29 | Automatic operating device for needle card protective cover, probe station and wafer detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115728529A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116755171A (en) * | 2023-08-21 | 2023-09-15 | 矽佳半导体(嘉兴)有限公司 | Safety protection system for CP test |
-
2022
- 2022-11-29 CN CN202211512395.4A patent/CN115728529A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116755171A (en) * | 2023-08-21 | 2023-09-15 | 矽佳半导体(嘉兴)有限公司 | Safety protection system for CP test |
| CN116755171B (en) * | 2023-08-21 | 2023-11-03 | 矽佳半导体(嘉兴)有限公司 | Safety protection system for CP test |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100284558B1 (en) | Probing method and probe device | |
| CN115728529A (en) | Automatic operating device for needle card protective cover, probe station and wafer detection device | |
| KR20180118532A (en) | Clamping chuck | |
| KR20110090753A (en) | Substrate transfer apparatus, substrate transfer method and storage medium | |
| KR101794979B1 (en) | Prober | |
| KR20130105397A (en) | Probe apparatus and providing method for probe card of probe apparatus | |
| KR101788976B1 (en) | An Tap Processing Defect Detecting Module for MCT and Tap Processing Defect Diagnosis System using it | |
| CN209167331U (en) | Manipulator and chip test system | |
| KR102172746B1 (en) | Probe station | |
| CN111474599A (en) | Foreign matter detection device for glass substrate and detection method thereof | |
| KR100897982B1 (en) | Miss align preventing pattern and method thereof between probe card niddle and pad | |
| CN217193789U (en) | Rotating disc type workpiece detection device | |
| CN105988071B (en) | Semiconductor test equipment and method | |
| JPH0441495B2 (en) | ||
| JPH065690B2 (en) | Semiconductor wafer probe method | |
| KR100568513B1 (en) | Prober | |
| CN215894898U (en) | Pogo Pin detection platform | |
| CN220455357U (en) | Detection jig and detection table | |
| CN216977843U (en) | Detection alarm device for automatically identifying missing processing of product | |
| CN219284241U (en) | Placement table precision detection device and precision detection system | |
| CN219716151U (en) | Automatic maintenance and detection system for PCB frame | |
| CN211578716U (en) | Chip heating test mechanism | |
| CN216582593U (en) | Fool-proof device for feeding and discharging of tray disc | |
| CN108458741B (en) | Self-diagnosis method and system of leakage-proof sensor | |
| EP3911138B1 (en) | Back-up pin state confirmation system for component mounting apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |