CN115724682A - Air floating assembly and manufacturing method thereof - Google Patents
Air floating assembly and manufacturing method thereof Download PDFInfo
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- CN115724682A CN115724682A CN202210444581.2A CN202210444581A CN115724682A CN 115724682 A CN115724682 A CN 115724682A CN 202210444581 A CN202210444581 A CN 202210444581A CN 115724682 A CN115724682 A CN 115724682A
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Abstract
The invention discloses an air-float component and a preparation method thereof, wherein the preparation method comprises the following steps: preparing a ceramic green body; sintering a ceramic green body to obtain a sintered body having an upper region and a lower region connected to each other, the upper region and the lower region having a plurality of holes therein; applying a surface treatment agent containing an excipient to the top surface of the upper region, a part of the surface treatment agent covering the top surface to form a surface treatment layer, and the rest of the surface treatment agent penetrating from the top surface to the interface of the upper region and the lower region to form a surface throttling layer, the lower region forming a base layer, to obtain a composite porous ceramic plate; arranging the composite porous ceramic plate on a base with a gas supply port to obtain the air floatation assembly; the air floating component and the manufacturing method thereof can provide an air cushion layer with uniform pressure, avoid the phenomenon of air hammer vibration, bear high-weight objects, have simple working procedures and low raw material cost, and can reduce the manufacturing cost.
Description
Technical Field
The present disclosure relates to carrier assemblies, and particularly to an air floating assembly and a method for manufacturing the same.
Background
In the ultra-precision machining technique, mechanical control more accurate than the conventional machining technique is required regardless of the accuracy of positioning, the stability of the supporting member, the smoothness of the sliding member, and the like. Therefore, the air floating component using air flow as lubricant between the air floating component and the workpiece can be provided, and the friction force between the air floating component and the workpiece can be reduced because the air floating component is not in direct contact with the workpiece, so that the air floating component has the advantages of generating less heat, reducing the abrasion degree to the minimum, ensuring high-precision output and the like. In general, air bearing assemblies are generally divided into components that are made using orifice plates (orifice) or porous media (porous media) to enable gas flow. Among them, for example, aerostatic bearing (aerostatic bearing) is used to load a workpiece by introducing gas into the bearing through a restrictor by means of external pressurization such as a compressor, and then the gas passes through holes to form an air cushion and generate static pressure, and therefore, the rigidity of the air cushion and the uniformity of the air cushion are important for the loading capacity of the aerostatic bearing.
Although, korean patent No. KR101149350B1 discloses a ceramic material for vacuum chuck having a double-layer porous structure, which is obtained by sintering a support layer having coarse pores from a ceramic raw material powder, coating a slurry mixed with another ceramic raw material powder and a spherical pore-forming agent for forming spherical micropores on one surface of the support layer, and then heating and sintering again to form an adsorption layer having smaller pores from the slurry, thereby obtaining a ceramic material for vacuum chuck in which the support layer and the adsorption layer can communicate with each other; however, the above-mentioned preparation procedure requires heating and sintering many times and consumes considerable energy, and the pore diameter of the micro-pores of the adsorption layer is preferably between 5 micrometers (μm) and 50 μm, and the pore diameter of the coarse-pores of the support layer is preferably between 10 μm and 40 μm, so that the ceramic material with a double-layer porous structure is only suitable for vacuum chuck, and still cannot be used as an air-floating component for air-floating platform, air-floating slide rail, air bearing, etc. because the pore diameter of the ceramic material is too large and the air-hammer vibration phenomenon is easy to occur when the ceramic material is used with an air supply system.
In addition, the applicant has already conducted some research in the last years, for example, patent No. TWI656108B in taiwan provides a porous ceramic plate and a method for preparing the same. The preparation method comprises the steps of stacking ceramic blanks with different apertures to be formed, and sintering the stacked ceramic blanks again to obtain the porous ceramic plate with good air permeability and a multilayer structure; since the average pore size of the surface ceramic layer of the porous ceramic plate is between 0.3 μm and 10 μm and the average pore size of the bottom ceramic layer is between 20 μm and 3000 μm, the larger pore size can reduce the air resistance and provide larger adsorption force, and is especially suitable for being applied to vacuum chucks. Although the porous ceramic plate can be applied to non-contact application equipment, the size of the pores of the porous ceramic plate is still not small enough, so that the weight of the workpiece which can be carried by the porous ceramic plate is greatly limited, and the requirements of various workpieces cannot be met. Furthermore, it is difficult to effectively reduce the average pore diameter of the surface ceramic layer by sintering alone.
Disclosure of Invention
In view of the above-mentioned defect that the porous ceramic material cannot be directly applied to the air floating component, the present invention provides an air floating component and a method for manufacturing the same, wherein the air floating component can provide an air cushion layer with uniform pressure, thereby avoiding the phenomenon of air hammer vibration and simultaneously being capable of bearing objects with high weight.
Another objective of the present invention is to provide an air floating assembly and a method for manufacturing the same, which has simple process and low cost of raw materials, so as to reduce the manufacturing cost and further have the potential for developing commercial products.
To achieve the above object, the present invention provides a method for manufacturing an air floating assembly, which comprises the following steps:
step (A): preparing a ceramic green body, wherein the average grain diameter of raw materials contained in the ceramic green body is more than or equal to 0.05 mu m and less than or equal to 3.0 mu m;
step (B): sintering the ceramic green body to obtain a sintered body, wherein the sintered body has an upper area and a lower area which are connected, and the upper area and the lower area are provided with a plurality of holes;
step (C): applying a surface treatment agent to a top surface of the upper region of the sintered body, a portion of the surface treatment agent covering the top surface forming a surface treatment layer, the remainder of the surface treatment agent penetrating from the top surface to an interface between the upper region of the sintered body and the lower region of the sintered body and forming a surface throttling layer, the lower region of the sintered body forming a base layer to obtain a composite porous ceramic plate; wherein the surface treatment agent comprises an excipient; the composite porous ceramic plate sequentially comprises the surface treatment layer, the surface throttling layer and the substrate layer from top to bottom, the surface treatment layer is provided with a plurality of small holes, the average pore diameter of the small holes is smaller than 0.3 mu m, the substrate layer is provided with a plurality of holes, and the average pore diameter of the holes is smaller than or equal to 1 mu m;
step (D): arranging the composite porous ceramic plate on a base to obtain the air floatation assembly; wherein the susceptor has a gas supply port in communication with the aperture of the lower region, the aperture of the upper region, and the plurality of apertures.
The present invention can save energy and reduce the cost of raw materials by applying a surface treatment agent, which does not require high-temperature sintering, to the top surface of the upper region of the sintered body, thereby greatly reducing the manufacturing cost. Meanwhile, the invention penetrates partial surface treating agent from the top surface to the lower area of the sintered body until the interface between the upper area and the lower area of the sintered body, so that partial volume of a plurality of holes distributed in the upper area of the sintered body is occupied by the surface treating agent to reduce the original hole size, and the surface throttling layer has a small enough hole diameter, so that air flow from the holes can be more uniformly distributed on the surface of the composite porous ceramic plate, the air hammer vibration phenomenon can be avoided, and the instability of the air floating assembly can be avoided so as to bear a workpiece with higher weight. In addition, since the surface treatment agent penetrates downward from the top surface of the upper region, the amount of the surface treatment agent occupying the volume of the pores is gradually reduced as the depth of the upper region of the sintered body is increased, and thus the average pore diameter of the pores of the surface throttle layer is gradually increased to the average pore diameter of the pores of the base layer (i.e., the original pore form and volume of the sintered body are maintained), so that smooth ventilation of the composite porous ceramic plate can be ensured.
Preferably, in the step (a), the raw material of the ceramic green body includes one of a metal oxide, a silicide, a carbide, or any combination thereof, but is not limited thereto.
Specifically, the metal oxide may include oxides of metals such as iron (Fe), manganese (Mn), chromium (Cr), cobalt (Co), magnesium (Mg), calcium (Ca), copper (Cu), aluminum (Al), and the like, but is not limited thereto. For example, iron oxides include ferrous oxide (FeO), ferric oxide (Fe) 2 O 3 ) Etc., but are not limited thereto; the manganese oxide includes manganese monoxide (MnO) and manganomanganic oxide (Mn) 3 O 4 ) Manganese oxide (Mn) 2 O 3 ) Manganese dioxide (MnO) 2 ) Etc., but are not limited thereto; the chromium oxide includes chromium monoxide (CrO) and chromium sesquioxide (Cr) 2 O 3 ) Chromium trioxide (CrO) 3 ) Etc., but are not limited thereto; the cobalt oxide comprises cobalt monoxide (CoO) and cobalt sesquioxide (Co) 2 O 3 ) Cobaltosic oxide (Co) 3 O 4 ) Etc., but are not limited thereto; the copper oxide comprises cuprous oxide (Cu) 2 O), copper oxide (CuO), etc., but is not limited thereto; the aluminum oxide comprises aluminum oxide (Al) 2 O 3 ). The properties of the metal oxide can be adjusted to the properties such as the electrical conductivity and the mechanical strength of the entire sintered body. For example, in order to adjust the conductivity, the raw material may include metal oxides such as iron oxide, copper oxide, manganese oxide, etc., but is not limited thereto; preferably, the iron oxide content of the raw material is more than 20 weight percent (wt%) of the total weight of the raw material; more preferably, the iron oxide content of the feedstock is from 30wt% to 80wt% based on the total weight of the feedstock. Preferably, the raw material contains copper oxide with a content of more than 0.01wt% of the total weight of the raw material; more preferably, the feedstock contains copper oxide in an amount of 0.01wt% to 50wt% based on the total weight of the feedstock. In order to adjust the mechanical strength, the raw material may include metal oxides such as manganese oxide, cobalt oxide, magnesium oxide, etc., but is not limited thereto; preferably, the manganese oxide content of the raw material is more than 0.01wt% of the total weight of the raw material; more preferably, the manganese oxide content of the raw material is 0.01wt% to 80wt% of the total weight of the raw material. Preferably, the cobalt oxide content of the raw material is more than 0.01wt% of the total weight of the raw material; more preferably, the cobalt oxide content of the feedstock is 0.01wt% to 50wt% based on the total weight of the feedstock. In order to increase mechanical strength and chemical resistance, the raw material may include metal oxides such as aluminum oxide, but is not limited thereto; preferably, the feedstock contains aluminum oxide in an amount greater than 20 wt.% based on the total weight of the feedstock; more preferably, the feedstock contains an aluminum oxide content of from 30wt% to 80wt% based on the total weight of the feedstock.
In particular, the silicide may comprise silicon dioxide (SiO) 2 ) Silicon nitride (Si) 3 N 4 ) But is not limited thereto.
Specifically, the carbide may include silicon carbide (SiC), zirconium carbide (ZrC), tungsten carbide (WC), and the like, but is not limited thereto.
Preferably, in the step (a), the raw material further comprises one or any combination of a thickener, a pore-forming filler, a binder, a thermal expansion control agent, a conductivity control agent, an antistatic agent, a mechanical strength control agent, and a friction coefficient adjusting agent.
It is preferable thatThe raw material of the ceramic green body in the step (a) may further include pore-forming filler which is easily burned or decomposed to generate pores, such as: calcium carbonate (CaCO) 3 ) Magnesium carbonate (MgCO) 3 ) Poly (methyl methacrylate), PMMA), polystyrene (PS), or the like, but not limited thereto. Alternatively, in some embodiments, the raw material of the ceramic green body in the step (a) may further comprise a thickener, such as: starch (starch), methyl cellulose (methyl cellulose), and the like, but is not limited thereto. By adding the thickening agent into the raw materials, the components in the raw materials are uniformly mixed, and the pore uniformity of the sintered body is improved; in addition, the thickening agent is typically a burnout material, which also increases the porosity and air permeability of the sintered body. In addition, without affecting the effect of the method for manufacturing the air flotation device of the present invention, other auxiliary additives, such as one or any combination of a binder, a thermal expansion control agent, a conduction control agent, an antistatic agent, a mechanical strength control agent, a friction coefficient adjusting agent, etc., may be added to the raw material of the ceramic green body according to different use requirements, but the present invention is not limited thereto.
Specifically, in the step (A), the ceramic green body contains a raw material having an average particle diameter of 0.3 μm or more and 0.8 μm or less; more preferably, the ceramic green sheet contains raw materials having an average particle size of 0.3 μm or more and 0.5 μm or less.
According to the present invention, the ceramic green body can be prepared by mixing the above raw materials uniformly, and then performing injection molding, pressure molding, extrusion molding, or calendering molding, but is not limited thereto.
Preferably, the sintering temperature of the sintered body in the step (B) is 700 ℃ to 1200 ℃.
Specifically, the sintering temperature in the above range can reduce energy consumption and improve the yield of the sintered body obtained after sintering.
Specifically, the average thickness of the sintered body (i.e., the total thickness of the upper region and the lower region) may be greater than or equal to 500 μm and less than or equal to 10000 μm (i.e., 10 millimeters (mm)), but is not limited thereto. Preferably, the average pore diameter of the sintered body may be greater than or equal to 0.2 μm and less than 1 μm, but is not limited thereto.
Preferably, the excipient of the surface treatment agent comprises carbon powder (graphite powder) or titanium dioxide (TiO) 2 ) But is not limited thereto.
Specifically, the surface treatment agent may further include a diluent, a solvent, a resin, and the like, but is not limited thereto. Wherein the diluent is used to help the surface treatment agent have a more appropriate viscosity.
Preferably, in the step (C), the surface treatment agent is applied by impregnation (impregnation), pressure-infiltration (pressurized infiltration), negative-pressure infiltration (negative-pressure infiltration), knife coating, or spray coating (spraying), but not limited thereto.
Specifically, when the impregnation method is adopted, the direct impregnation method can be adopted, but the method is not limited thereto. Preferably, the surface treatment agent has a surface treatment time of 0.1 mPas
To 25 pascal seconds
Viscosity of (d). In some embodiments, the surface treatment agent may further comprise a solvent to adjust the viscosity to a viscosity suitable for impregnation; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane or a combination thereof, but is not limited thereto.
Specifically, when the pressure permeation mode is employed, the pressure may be greater than 1.013 bar (bar) and less than or equal to 2000bar, but is not limited thereto. Preferably, the surface treatment agent at this time has
To is that
The viscosity of (c). In some embodiments, the surface treatment agent may further comprise a solvent such thatIt can be adjusted to a viscosity suitable for pressure infiltration; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane or a combination thereof, but is not limited thereto.
Specifically, when the negative pressure osmosis is used, the pressure may be 10 or more -5 Torr (torr) and less than 760torr, but is not limited thereto. Preferably, the surface treatment agent at this time has
To
Viscosity of (d). In some embodiments, the surface treatment agent may further comprise a solvent to adjust its viscosity to a suitable viscosity for negative pressure infiltration; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane or a combination thereof, but is not limited thereto.
Specifically, when the spray coating method is used, a direct spray coating method or an ultrasonic spray coating method can be used, but the method is not limited thereto. Preferably, the surface treatment agent at this time has
To is that
Viscosity of (d). In some embodiments, the surface treatment agent may further comprise a solvent to adjust the viscosity to a suitable viscosity for spraying; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane or a combination thereof, but is not limited thereto.
Specifically, the composite porous ceramic plate is connected to the base by gluing or embedding, but not limited thereto.
The invention also provides an air floatation assembly prepared by the preparation method of the air floatation assembly.
It is another object of the present invention to provide an air bearing assembly, comprising:
a base having a gas supply port; and
a composite porous ceramic plate, which comprises from top to bottom:
a surface treatment layer comprising a surface treatment agent comprising an excipient, the surface treatment layer having a plurality of pores, the pores having an average pore size of less than 0.3 μm;
a surface-throttle layer comprising an upper region of a ceramic sintered body and another surface treatment agent, the another surface treatment agent being the same as the surface treatment agent in the surface treatment layer, the upper region having a plurality of pores therein, the pores of the upper region being filled with the another surface treatment agent; and
a base layer disposed between the surface throttle layer and the base, the base layer comprising a lower region of the sintered ceramic body, the upper region being contiguous with the lower region; the lower region has a plurality of pores therein, the plurality of pores of the base layer having an average pore size of less than or equal to 1 μm;
wherein the gas supply port of the susceptor is in communication with the plurality of holes of the lower region, the plurality of holes of the upper region, and the plurality of small holes.
Preferably, the overall porosity of the composite porous ceramic plate is 25 to 50%, but not limited thereto; more preferably, the composite porous ceramic plate has an overall porosity of 30 to 40%.
Preferably, the average pore diameter of the plurality of pores of the substrate layer is greater than or equal to 0.1 μm and less than 1.0 μm, but not limited thereto; more preferably, the average pore diameter of the pores of the substrate layer is greater than or equal to 0.2 μm and less than or equal to 0.5 μm.
According to the invention, the average pore diameter of the plurality of pores of the surface throttle layer is smaller than the average pore diameter of the plurality of pores of the base layer.
Preferably, the average pore diameter of the plurality of pores of the surface throttle layer is greater than or equal to 0.05 μm and less than 0.2 μm, but is not limited thereto; more preferably, the surface throttle layer has an average pore size of 0.05 μm or more and 0.1 μm or less.
According to the invention, the average pore diameter of the pores of the surface treatment layer is smaller than the average pore diameter of the pores of the substrate layer, and the average pore diameter of the pores of the surface treatment layer is smaller than or equal to the average pore diameter of the pores of the surface throttling layer.
Preferably, the average pore diameter of the plurality of pores of the surface treatment layer is greater than or equal to 0.05 μm and less than or equal to 0.15 μm; more preferably, the surface treatment layer has an average pore diameter of 0.05 μm or more and 0.08 μm or less.
Since the surface treatment layer is formed by applying the aforementioned surface treatment agent to the top surface of the upper region of a ceramic sintered body, and a part of the surface treatment agent becomes another surface treatment agent extending from the top surface in a direction toward the lower region of the ceramic sintered body, it is preferable that the average thickness of the surface treatment layer is 20 μm or less (not more); that is, the thickness of the surface-treated layer refers to a contact surface of the surface-treated layer with the top surface of the upper region of the ceramic sintered body and a perpendicular distance to a surface of the contact surface. The thickness of the surface-throttling layer is defined by the depth to which the other surface treatment agent extends to the sintered body, i.e., the vertical distance from the top surface of the upper region of the sintered body to the extreme end of the other surface treatment agent extending as the thickness of the surface-throttling layer, the extreme end being the interface between the upper region and the lower region of the ceramic sintered body; preferably, the surface throttle layer has an average thickness of 5 μm to 100 μm. And the lower region of the sintered body is substantially free of the other surface treatment agent extending from the top surface, and therefore, the depth of the lower region of the sintered body, i.e., the thickness of the base layer; preferably, the substrate layer has an average thickness of 400 μm to 9995 μm.
More preferably, the surface treatment layer has an average thickness of 3 μm to 15 μm; more preferably, the surface throttle layer has an average thickness of 5 μm to 10 μm; more preferably, the substrate layer has an average thickness of 3000 μm to 6000 μm.
In some embodiments, the bottom of the base of the air floatation assembly may include one or more (more than one) gas supply ports, and the one or more gas supply ports may be in communication with a gas supply line that is in turn connected to a gas supply system. In some embodiments, the top of the base of the air floatation assembly may include one or more (more than one) air passages, and the one or more air passages may be in communication with the air supply line, which in turn may be connected to an air supply system.
In addition, the base of the air floating assembly can be a double-layer or multi-layer base; the combined design of the base provides denser distribution of the gas supply pipelines, and further provides a more stable air cushion layer capable of supporting higher load.
Specifically, the material of the base of the air bearing assembly includes, but is not limited to, an air-impermeable material such as aluminum alloy, steel, alumina, and silicon carbide.
Specifically, the thickness of the base is not particularly limited, and may be customized according to the user's needs.
The geometry of the air bearing assembly according to the present invention is not particularly limited.
Preferably, the geometrical structure of the air floating assembly is a disc, a cuboid or a hollow cylinder.
According to the present invention, the air floating assembly can be applied to an air floating platform, an air floating slide rail, or an air floating bearing, but is not limited thereto.
Drawings
Fig. 1 is a schematic cross-sectional view of the composite porous ceramic plate obtained in step (C) of example 1.
Fig. 2 is a Scanning Electron Microscope (SEM) photograph of the composite porous ceramic plate obtained in step (C) of example 1.
FIG. 3 is a schematic cross-sectional view of an air bearing assembly fabricated in accordance with example 1.
Detailed Description
Hereinafter, those skilled in the art can easily understand the advantages and effects of the present invention from the following embodiments. Therefore, it should be understood that the description set forth herein is intended for purposes of illustration only and is not intended to limit the scope of the claims which follow, and that various modifications, changes, etc. can be made in order to practice or use the teachings of the present invention without departing from the scope thereof.
The method for manufacturing the air bearing device of reference example 1:
referring to example 1 of the invention patent No. TWI656108B in taiwan, the air flotation component of this reference example was prepared with a double-layered porous ceramic plate.
Firstly, preparing a surface layer ceramic raw material and a bottom layer ceramic raw material: the surface ceramic raw material comprises methylcellulose and iron oxide, manganese oxide and chromium oxide which are metal oxides, wherein the iron oxide accounts for 30wt% of the total weight of the surface ceramic raw material, and the manganese oxide accounts for 40wt% of the total weight of the surface ceramic raw material; the average grain diameter of the metal oxide in the surface layer ceramic raw material is 0.5 mu m; the bottom ceramic raw material comprises methyl cellulose and iron oxide, manganese oxide and chromium oxide which are metal oxides, wherein the iron oxide accounts for 30wt% of the total weight of the bottom ceramic raw material, and the manganese oxide accounts for 40wt% of the total weight of the bottom ceramic raw material; the average particle size of the metal oxide in the base ceramic raw material was 8 μm.
Then, the surface layer ceramic raw material and the bottom layer ceramic raw material are respectively rolled and formed by a rolling forming method, the green body formed by the surface layer ceramic raw material is placed above the green body formed by the bottom layer ceramic raw material, two layers of green bodies are overlapped to form a lamination, and the lamination is rolled and formed by the rolling forming method to obtain a formed lamination. Then, the molded laminate was sintered at a temperature of 950 ℃ for 7 hours to obtain a two-layer porous ceramic sheet comprising a top ceramic layer and a bottom ceramic layer. The total thickness of the double-layer porous ceramic plate is 5000 μm, wherein the thickness of the surface ceramic layer is 500 μm. Further, the average pore diameter of the top ceramic layer was 0.5 μm, the average pore diameter of the bottom ceramic layer was 5 μm, and the overall porosity of the double-layered porous ceramic plate was about 44%.
Finally, the double-layer porous ceramic plate is arranged on a base in a cementing manner; wherein, the bottom of the base is provided with a gas supply port which is communicated with a gas supply pipeline; the average thickness of the base is 5000 μm, and the base is made of aluminum alloy.
The method of making the air bearing assembly of example 1:
step (A): first, raw materials contained in a ceramic green body are prepared: methylcellulose, iron oxide as a metal oxide, manganese oxide and chromium oxide, wherein the methylcellulose accounts for 15wt% of the total weight of the raw material, the iron oxide accounts for 30wt% of the total weight of the raw material, the manganese oxide accounts for 40wt% of the total weight of the raw material, and the chromium oxide accounts for 15wt% of the total weight of the raw material. The particle size of the raw material is 0.3 μm to 1.2 μm, and the average particle size is 0.5. Mu.m. Then, the raw materials are uniformly mixed and rolled and formed in a rolling forming mode to obtain a ceramic green body.
Step (B): subsequently, the ceramic green body was subjected to sintering at a temperature of 850 ℃ for 5 hours to obtain a sintered body having an average thickness of 8000 μm, wherein the sintered body had an upper region and a lower region joined to each other, the upper region and the lower region of the sintered body had a plurality of pores therein, and at least a part of the pores of the upper region and at least a part of the pores of the lower region were communicated with each other, and the sintered body had an average pore diameter of 0.2 μm.
Step (C): after the sintered body is cooled to room temperature, applying a surface treatment agent to the top surface of the upper area of the sintered body, wherein the surface treatment agent comprises graphite powder (excipient) and a solvent, and the viscosity of the surface treatment agent is
A part of the surface treatment agent covers the top surface to form a surface treatment layer with the average thickness of 5 mu m; the rest of the surface treatment agent (also called another surface treatment agent) penetrates from the top surface of the upper region of the sintered body down (i.e. in the direction of the lower region of the sintered body) into the pores of the upper region of the sintered body up to the interface between the upper and lower regions of the sintered body, forming a surface throttle layer; and a lower region of the sintered body which does not substantially contain the other surface treatment agent becomes a base layer.
Referring to fig. 1, a cross-sectional view of a composite porous ceramic plate 10 is shown, the composite porous ceramic plate 10 is formed by three layers, from bottom to top, of the substrate layer 11, the surface throttling layer 12 and the surface treatment layer 13. The base layer 11 and the surface throttle layer 12 comprise a lower region and an upper region of the sintered body obtained in step (B) of the present invention, respectively, and the upper region and the lower region are connected, and the upper region and the lower region have a plurality of holes therein. The base layer 11 includes a plurality of metal oxide particles 111 in the sintered body, and a plurality of pores 112 formed between the metal oxide particles 111 (i.e., the pores of the lower region of the sintered body). The surface-throttle layer 12 is a penetration region of the surface treatment agent in the sintered body, i.e., the other surface treatment agent is filled in the pores of the upper region of the sintered body, so the surface-throttle layer 12 also comprises a plurality of metal oxide particles 111 and a plurality of pores 122, but the difference between the pores 122 of the surface-throttle layer 12 and the pores 112 of the base layer 11 is that a part of the volume of the plurality of pores 122 is filled with the other surface treatment agent, and thus, the average pore diameter of the pores 122 of the surface-throttle layer 12 is smaller than the average pore diameter of the pores 112 of the base layer 11. The surface treatment layer 13 contains the surface treatment agent and a plurality of pores 132. The overall porosity of the composite porous ceramic plate 10 was 35%.
As shown in FIGS. 1 and 2 together, the surface treatment layer 13 formed of the surface treatment agent was observed by a scanning electron microscope (model: JEOL JSM-5600) to have an average thickness of 1 μm, the surface treatment agent of the surface throttle layer 12 penetrated from the top surface down to the upper region of the sintered body having a depth of about 2 μm to 20 μm, the surface throttle layer 12 had an average thickness of 5 μm, and the base layer 11 had an average thickness of 7995 μm; in addition, the average pore diameter of the pores 112 of the base layer 11 was 0.2 μm, the average pore diameter of the pores 122 of the surface throttle layer 12 was 0.05 μm, and the average pore diameter of the small pores 132 of the surface treatment layer 13 was 0.05 μm.
Step (D): finally, the composite porous ceramic plate 10 was connected to a base in a cementing manner, the base being the same as that of reference example 1.
Referring to the schematic cross-sectional view of the air floating assembly 1 shown in FIG. 3, the geometry of the air floating assembly 1 is a circular disk with an outer diameter of 50mm. The air floating assembly 1 includes a base 20 and the composite porous ceramic plate 10 disposed on the base 20. The gas supply port 21 is formed at the bottom of the susceptor 20, the gas supply port 21 is communicated with a gas supply pipeline 22, the top of the susceptor 20 (i.e., the surface contacting the composite porous ceramic plate 10) is provided with a plurality of gas passages 23, and the gas supply port 21 and the gas passages 23 of the susceptor 20 are communicated with the holes 112 of the substrate layer 11 (i.e., the holes of the lower region) included in the composite porous ceramic plate 10, the holes 122 of the surface throttling layer 12 (i.e., the holes of the upper region) and the holes 132 included in the surface treatment layer 13. A gas supply system (not shown) is used to supply gas through the holes 112, 122 and out of the holes 132 of the porous ceramic composite plate 10, so as to form a plurality of pressure-uniform thrust forces, which can provide a stable and highly loaded gas cushion layer.
Carrying weight analysis of the air floatation assembly:
the air bearing assembly of example 1 and the air bearing assembly of reference example 1 were subjected to a weight bearing test, respectively. In order to ensure the experimental significance of the analysis, the air floating assembly of example 1 and the air floating assembly of reference example 1 have the same geometric structure and size, the same base included in the air floating assembly, the same gas used in combination with the external pressurization and the same gas supply system, and the difference between the two is only different between the porous ceramic plates included in the air floating assembly.
The air bearing assembly of example 1 can support a maximum weight of more than 30 kilograms when the air pressure provided to the air system is 0.40 mega pascal (MPa) to 0.60MPa, however, the air bearing assembly of reference example 1 can support a maximum weight of only 0.1 kilograms.
Discussion of experimental results:
according to the above-mentioned bearing weight analysis results, the composite porous ceramic plate with a pore size significantly smaller than that of the existing porous ceramic plate can be manufactured by the method of the present invention, so that the air-floating assembly can provide air cushion layers with dense distribution and uniform pressure, thereby greatly increasing the maximum weight that the air-floating assembly can bear, even by 300 times as much as the maximum weight that the air-floating assembly of reference example 1 can bear, indeed achieving the purpose of bearing high weight objects, and avoiding the occurrence of air hammer vibration during bearing.
In addition, compared with the existing preparation method, the preparation method of the invention has the advantages of simple steps, cheap and easily obtained raw materials, easy control of the whole process, energy conservation and low manufacturing cost due to one-time sintering, and further has the development potential of commercial products.
Although the foregoing description has set forth various features, advantages, and details of the invention, it is to be understood that these are merely exemplary of the invention, which is set forth in the following claims, and all such modifications are intended to be included within the scope of the invention. Changes in detail, especially in matters of shape, size and arrangement of parts, made in accordance with the teachings of the present invention are intended to be within the scope of the appended claims.
Claims (12)
1. A method for manufacturing an air-bearing assembly, comprising the steps of:
step (A): preparing a ceramic green body, wherein the average grain diameter of raw materials contained in the ceramic green body is greater than or equal to 0.05 microns and less than or equal to 3.0 microns;
step (B): sintering the ceramic green body to obtain a sintered body, wherein the sintered body has an upper area and a lower area which are connected, and the upper area and the lower area are provided with a plurality of holes;
step (C): applying a surface treatment agent to a top surface of the upper region of the sintered body, a portion of the surface treatment agent covering the top surface forming a surface treatment layer, the remainder of the surface treatment agent penetrating from the top surface to an interface between the upper region of the sintered body and the lower region of the sintered body and forming a surface throttling layer, the lower region of the sintered body forming a base layer to obtain a composite porous ceramic plate; wherein the surface treatment agent comprises an excipient; the composite porous ceramic plate sequentially comprises the surface treatment layer, the surface throttling layer and the substrate layer from top to bottom, the surface treatment layer is provided with a plurality of small holes, the average pore diameter of the small holes is smaller than 0.3 micrometer, the substrate layer is provided with a plurality of holes, and the average pore diameter of the holes is smaller than or equal to 1 micrometer; and
a step (D): arranging the composite porous ceramic plate on a base to obtain the air floatation assembly; wherein the susceptor has a gas supply port in communication with the aperture of the lower region, the aperture of the upper region, and the plurality of apertures.
2. The method according to claim 1, wherein in step (a), the material comprises one of a metal oxide, a silicide, a carbide, or any combination thereof.
3. The method of manufacturing an air-bearing assembly as recited in claim 2, wherein in step (a), the material further comprises one or any combination of a thickener, a pore-forming filler, a binder, a thermal expansion control agent, a conductivity control agent, a static electricity preventing agent, a mechanical strength control agent, a friction coefficient modifier.
4. The method of manufacturing an air-bearing assembly as claimed in claim 1, wherein the sintering temperature of the sintered body in step (B) is between 700 ℃ and 1200 ℃.
5. The method for manufacturing an air flotation assembly as recited in claim 1, wherein the excipient of the surface treatment agent comprises carbon powder or titanium dioxide.
6. The method of manufacturing an air-float assembly according to any one of claims 1 to 5, wherein in step (C), said surface treatment agent is applied by impregnation, pressure infiltration, negative pressure infiltration, blade coating or spraying.
7. An air flotation assembly, comprising:
a base having a gas supply port; and
a composite porous ceramic plate, comprising in order from top to bottom:
a surface treatment layer, said surface treatment layer comprising a surface treatment agent, said surface treatment agent comprising an excipient, said surface treatment layer having a plurality of pores, said plurality of pores having an average pore size of less than 0.3 microns;
a surface-throttle layer comprising an upper region of a ceramic sintered body and another surface treatment agent, the another surface treatment agent being the same as the surface treatment agent in the surface treatment layer, the upper region having a plurality of pores therein, the pores of the upper region being filled with the another surface treatment agent; and
a base layer disposed between the surface throttle layer and the base, the base layer comprising a lower region of the sintered ceramic body, the upper region being contiguous with the lower region; the lower region having a plurality of pores therein, the plurality of pores of the base layer having an average pore size of less than or equal to 1 micron;
wherein the gas supply port of the susceptor is in communication with the plurality of holes of the lower region, the plurality of holes of the upper region, and the plurality of small holes.
8. The air flotation assembly of claim 7, wherein the composite porous ceramic plate has an overall porosity of 25% to 50%.
9. The air flotation assembly of claim 8, wherein the plurality of holes of the substrate layer have an average pore size of greater than or equal to 0.1 microns and less than 1 micron, and the substrate layer has an average thickness of 400 microns to 9995 microns.
10. The air flotation assembly of claim 8, wherein the plurality of pores of the surface throttle layer have an average pore size of greater than or equal to 0.05 microns and less than 0.2 microns, and the surface throttle layer has an average thickness of 5 microns to 100 microns.
11. The air bearing assembly of claim 8, wherein an average pore size of the plurality of pores of the surface treatment layer is greater than or equal to 0.05 microns and less than or equal to 0.15 microns, and an average thickness of the surface treatment layer is less than or equal to 20 microns.
12. The air flotation assembly as recited in any one of claims 7 to 11, wherein the geometry of the air flotation assembly is a disk, a cuboid, or a hollow cylinder.
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| TW110132700A TWI782690B (en) | 2021-09-02 | 2021-09-02 | Air floating unit and method of making the same |
| TW110132700 | 2021-09-02 |
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| CN115724682B (en) | 2023-06-20 |
| TWI782690B (en) | 2022-11-01 |
| TW202311114A (en) | 2023-03-16 |
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