TWI782690B - Air floating unit and method of making the same - Google Patents

Abstract

Provided are an air floating unit and a method of making the same. The method includes the steps of: Step (A): preparing a ceramic green body; Step (B): sintering the ceramic green body to obtain a sintered body, which contains an upper area and a lower area communicating with each other, and the upper and lower areas having multiple pores; Step (C): applying a surface treatment agent to a top surface of the upper area, so as to obtain a complex porous ceramic plate; the surface treatment agent comprising an excipient; wherein a part of the surface treatment agent covers the top surface to form a surface-treated layer, and the remaining part of the surface treatment agent extends to an interface of the upper and lower areas to form a surface throttle layer, so the lower area forms a base layer; the complex porous ceramic plate comprising the surface-treated layer, the surface throttle layer and the base layer; and Step (D): disposing the complex porous ceramic plate on a base containing a gas supply port to obtain the air floating unit.

Description

Air flotation component and its manufacturing method

The invention relates to a non-contact carrier, in particular to an air flotation component using gas to form an air cushion and a manufacturing method thereof.

In ultra-precision machining technology, both the accuracy of positioning, the stability of supporting components, and the smoothness of sliding components require more precise mechanical control than traditional processing technologies. Therefore, the air bearing component can provide air flow as a lubricant between the workpiece and the friction force between the air bearing component and the workpiece can be reduced because it is not in direct contact with the workpiece, so that the heat generation is less and the wear degree is minimized , to ensure high-precision output and other advantages. In general, air flotation components are usually divided into components made using orifice or porous media to enable gas flow. Among them, for example, aerostatic bearings use external pressurization methods such as compressors to introduce gas into the bearing through a restrictor and then pass through the hole to form an air cushion and generate static pressure to load the workpiece. , the stiffness of the air cushion and the uniformity of the air cushion are crucial to the load capacity of the aerostatic bearing.

Although, Korean Invention Patent No. 101149350 has disclosed a ceramic material for vacuum chucks with a double-layer porous structure, which is first sintered from ceramic raw material powder to form a support layer with coarse pores, and then coated on one of the surfaces of the support layer A slurry that is mixed with another ceramic raw material powder and a spherical pore-forming agent for forming spherical micropores, and then heated and sintered again to make the slurry form an adsorption layer with a smaller pore size, so that the support layer and the adsorption layer can be obtained Similar ceramic materials for vacuum chucks; however, in the above-mentioned preparation procedure, it is necessary to heat and sinter multiple times and consume a lot of energy, and the pore diameter of the micropores of the aforementioned adsorption layer is preferably 5 microns (μm) to 50 μm, and the coarse pores of the aforementioned support layer The pore diameter is preferably 10 μm to 40 μm. Therefore, the double-layer porous ceramic material is prone to air hammer (air-hammer) vibration when used with an air supply system due to its large pore size. Therefore, the double-layer porous ceramic The material is only suitable for vacuum suction cups, and still cannot be used as air bearing components for air bearing platforms, air bearing slides, and air bearings.

In addition, the applicant has started some related research in the past few years. For example, the invention patent No. I656108 of the Republic of China provides a porous ceramic plate and its preparation method. The preparation method is to stack the ceramic green bodies with different pore diameters and then sinter them again to obtain a porous ceramic plate with a multi-layer structure with good air permeability; because the average pore diameter of the surface ceramic layer of the porous ceramic plate is between 0.3 μm The average pore size of the underlying ceramic layer is between 20 μm and 3000 μm, so the larger pore size can reduce air resistance and provide greater adsorption force, which is especially suitable for vacuum chucks. Although the aforementioned porous ceramic plate can also be applied to non-contact application equipment, the hole size of the porous ceramic plate is still not small enough, which greatly limits the weight of workpieces it can carry and cannot meet the needs of various workpieces. Furthermore, it is difficult to effectively reduce the average pore size of the surface ceramic layer if only by sintering.

In view of the defects that the above-mentioned porous ceramic materials cannot be directly applied to air flotation components, the purpose of the present invention is to provide a method for making an air flotation component, which can provide an air cushion with uniform pressure, so that air hammer can be avoided. Vibration phenomenon, and can carry high weight objects at the same time.

Another object of the present invention is to provide a manufacturing method of the air flotation module, which has simple process and low cost of raw materials used together, so that the manufacturing cost can be reduced, and the development potential of commercial products is further enhanced.

To achieve the aforementioned purpose, the present invention provides a method for manufacturing an air flotation module, which includes steps (A) to (D). Step (A): preparing a ceramic green body, wherein the average particle size of the raw materials contained in the ceramic green body is greater than or equal to 0.05 μm and less than or equal to 3.0 μm. Step (B): Sintering the ceramic green body to obtain a sintered body, wherein the sintered body has an upper region and a lower region connected, and the upper region and the lower region have a plurality of holes. Step (C): Applying a surface treatment agent to a top surface of the upper region of the sintered body, a part of the surface treatment agent covers the top surface to form a surface treatment layer, and the rest of the surface treatment agent is removed from the top surface The surface extends to the interface between the upper region and the lower region of the sintered body to form a surface restriction layer, and the lower region of the sintered body forms a base layer to obtain a composite porous ceramic plate; wherein, the surface treatment agent contains an excipient Forming agent; the composite porous ceramic plate sequentially includes the surface treatment layer, the surface throttle layer and the base layer from top to bottom, the surface treatment layer has a plurality of small holes, and the average pore size of the small holes is less than 0.3 μm, The average pore diameter of the base layer is less than or equal to 1 μm. Step (D): setting the composite porous ceramic plate on a base to obtain the air floating component; wherein, the base has a gas supply port, and the gas supply port is connected to the hole in the lower area and the hole in the upper area. The hole communicates with the small holes.

The present invention applies a surface treatment agent that does not require high-temperature sintering to the top surface of the upper region of the sintered body. Therefore, the present invention can save energy and the cost of raw materials is cheap, so the manufacturing cost can be greatly reduced. Simultaneously, the surface treatment agent of the penetrating part of the present invention extends from the top surface to the direction of the lower region of the sintered body to the upper region of the sintered body until the interface between the upper region and the lower region of the sintered body, so that the distribution Part of the volume of the multiple holes in the upper region of the sintered body is occupied by the surface treatment agent to reduce the size of the original holes, so that the surface throttle layer has a small enough pore size, so that the airflow from the aforementioned holes can be more uniform Distributed on the surface of the composite porous ceramic plate, it can avoid the phenomenon of air hammer vibration, and can also avoid the instability of the air bearing component and can carry workpieces with higher weight. Furthermore, since the surface treatment agent extends downward from the top surface of the upper region, as the depth of the upper region of the sintered body gradually increases, the amount of the surface treatment agent that can occupy the pore volume is gradually reduced, so from the surface The average pore diameter of the throttling layer gradually increases to the average pore diameter of the base layer (that is, the original pore shape and volume of the sintered body are maintained), so the smooth ventilation of the composite porous ceramic plate can be ensured.

Preferably, in the step (A), the raw material of the ceramic green body includes a metal oxide, a silicide, a carbide or any combination thereof, but not limited thereto.

Specifically, the metal oxide may include iron (Fe), manganese (Mn), chromium (Cr), cobalt (Co), magnesium (Mg), calcium (Ca), copper (Cu), aluminum (Al) Oxides of metals such as, but not limited to. For example, iron oxides include ferrous oxide (FeO), ferric oxide (Fe ₂ O ₃ ), etc., but are not limited thereto; manganese oxides include manganese monoxide (MnO), trimanganese tetraoxide (Mn ₃ O ₄ ), manganese trioxide (Mn ₂ O ₃ ), manganese dioxide (MnO ₂ ), etc., but not limited thereto; chromium oxides include chromium monoxide (CrO), dichromium trioxide (Cr ₂ O ₃ ), three Chromium oxide (CrO ₃ ), etc., but not limited thereto; cobalt oxides include cobalt monoxide (CoO), dicobalt trioxide (Co ₂ O ₃ ), tricobalt tetroxide (Co ₃ O ₄ ), etc., but not limited thereto; copper Oxides include cuprous oxide (Cu ₂ O), copper oxide (CuO), etc., but are not limited thereto; aluminum oxides include aluminum oxide (Al ₂ O ₃ ). According to the properties of the above-mentioned metal oxides, properties such as electrical conductivity and mechanical strength of the sintered body as a whole can be adjusted. For example, in order to adjust the electrical conductivity, the raw materials may include metal oxides such as iron oxides, copper oxides, and manganese oxides, but are not limited thereto; preferably, the iron oxide content contained in the raw materials accounts for The total weight of the raw materials is more than 20 weight percent (wt%); more preferably, the iron oxide contained in the raw materials accounts for 30 wt% to 80 wt% of the total weight of the raw materials. Preferably, the copper oxide content contained in the raw material accounts for more than 0.01 wt% of the total weight of the raw material; more preferably, the copper oxide content contained in the raw material accounts for 0.01 wt% of the total weight of the raw material to 50 wt%. In order to adjust the mechanical strength, the raw materials may include metal oxides such as manganese oxides, cobalt oxides, and magnesium oxides, but are not limited thereto; preferably, the manganese oxide content contained in the raw materials accounts for the total More than 0.01 wt% by weight; more preferably, the manganese oxide contained in the raw material accounts for 0.01 wt% to 80 wt% of the total weight of the raw material. Preferably, the cobalt oxide content contained in the raw material accounts for more than 0.01 wt% of the total weight of the raw material; more preferably, the cobalt oxide content contained in the raw material accounts for 0.01 wt% of the total weight of the raw material to 50 wt%. In order to increase mechanical strength and chemical resistance, the raw material may include metal oxides such as aluminum oxide, but is not limited thereto; preferably, the content of aluminum oxide contained in the raw material accounts for 20% of the total weight of the raw material wt% or more; more preferably, the aluminum oxide contained in the raw material accounts for 30 wt% to 80 wt% of the total weight of the raw material.

Specifically, the silicide may include silicon dioxide (SiO ₂ ), silicon nitride (Si ₃ N ₄ ), but not limited thereto.

Specifically, the carbide may include silicon carbide (SiC), zirconium carbide (ZrC), tungsten carbide (WC), etc., but is not limited thereto.

In some specific implementation aspects, the raw materials contained in the ceramic green body in the step (A) may further include pore-forming fillers that are easily burned or decomposed to form pores, such as: calcium carbonate (CaCO ₃ ), carbonic acid Magnesium (MgCO ₃ ), poly(methyl methacrylate), PMMA, or polystyrene (polystyrene, PS), etc., but not limited thereto. Alternatively, in some specific implementations, the raw materials included in the ceramic green body in step (A) may further include a thickener, such as: starch, methyl cellulose, etc., but It is not limited to this. By adding a thickener to these raw materials, it helps to mix the ingredients in the raw materials uniformly, thereby improving the uniformity of the pores of the sintered body; in addition, the thickener is usually a material that can be burned off , can also improve the porosity and air permeability of the sintered body. In addition, without affecting the effect of the manufacturing method of the air flotation component of the present invention, other auxiliary additives can be added to the raw materials contained in the ceramic green body, such as binder, thermal expansion control agent, conductive Control agent, antistatic agent, mechanical strength control agent, friction coefficient adjuster or any combination thereof, etc., but not limited thereto.

Preferably, in the step (A), the average particle size of the raw materials contained in the ceramic green body is greater than or equal to 0.3 μm and less than or equal to 0.8 μm; more preferably, the average particle size of the raw materials contained in the ceramic green body The diameter is greater than or equal to 0.3 μm and less than or equal to 0.5 μm.

According to the present invention, the ceramic green body can be prepared by mixing the aforementioned raw materials evenly, and then through injection molding, pressure molding, extrusion molding, or calendering molding, etc., but is not limited thereto.

Preferably, the sintering temperature in the step (B) is 700°C to 1200°C. The sintering temperature in the above range can reduce energy consumption and at the same time improve the yield of the sintered body obtained after sintering.

In some embodiments, the average thickness of the sintered body (ie, the total thickness of the upper region and the lower region) may be greater than or equal to 500 μm and less than or equal to 10000 μm (ie, 10 millimeters (mm)), but not limited to this. Preferably, the average pore diameter of the sintered body may be greater than or equal to 0.2 μm and less than 1 μm, but not limited thereto.

Preferably, the excipient contained in the surface treatment agent may include carbon powder (graphite powder) or titanium dioxide (TiO ₂ ), but is not limited thereto.

Preferably, the surface treatment agent may further include diluents, solvents, resins, etc., but not limited thereto. Wherein, the diluent is used to help the surface treatment agent have a more appropriate viscosity.

According to the present invention, in the step (C), the method of applying the surface treatment agent includes impregnation, pressurized seepage, negative-pressure seepage, scraping, or spraying coating), but not limited to this.

Specifically, when an impregnation method is used, a direct impregnation method may be used, but not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1 millipascal seconds (mPa‧s) to 25 Pascal seconds (Pa‧s). In some embodiments, the surface treatment agent may also include a solvent to adjust to a viscosity suitable for impregnation; for example, the solvent may be water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptyl alkanes, or combinations thereof, but not limited thereto.

Specifically, when pressurized osmosis is adopted, the pressure may be greater than 1.013 bar and less than or equal to 2000 bar, but not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1 mPa‧s to 250 Pa‧s. In some implementations, the surface treatment agent may also include a solvent to adjust to a viscosity suitable for pressurized penetration; for example, the solvent may be water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane, or combinations thereof, but not limited thereto.

Specifically, when negative pressure osmosis is adopted, the pressure may be greater than or equal to 10 ⁻⁵ Torr and less than 760 Torr, but it is not limited thereto. Preferably, the surface treatment at this time has a viscosity of 0.1 mPa‧s to 150 Pa‧s. In some implementations, the surface treatment agent can also include a solvent to adjust the viscosity suitable for negative pressure penetration; for example, the solvent can be water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane, or combinations thereof, but not limited thereto.

Specifically, when the spraying method is used, direct spraying method and ultrasonic spraying method can be used, but not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1 mPa‧s to 10 Pa‧s. In some embodiments, the surface treatment agent can also include a solvent so that it can be adjusted to a viscosity suitable for spraying; for example, the solvent can be water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptyl alkanes, or combinations thereof, but not limited thereto.

Preferably, the composite porous ceramic plate is connected to the base by cementing or inlaying, but not limited thereto.

The present invention further provides an air flotation component prepared by the aforementioned method for preparing the air flotation component.

Another object of the present invention is to provide an air flotation unit. The air floating component includes: a base and a composite porous ceramic plate. The base has a gas supply port. The composite porous ceramic plate comprises in sequence from top to bottom: a surface treatment layer, a surface throttling layer and a base layer. The surface treatment layer includes a surface treatment agent, the surface treatment agent includes an excipient, the surface treatment layer has a plurality of small holes, and the average pore diameter of the small holes is less than 0.3 μm; the surface throttling layer includes a ceramic sintered An upper area of the body and another surface treatment agent, the other surface treatment agent is the same as the surface treatment agent in the surface treatment layer, there are a plurality of holes in the upper area, and the holes in the upper area are filled with the other surface treatment agent surface treatment agent; and, the base layer is disposed between the surface throttle layer and the base, the base layer includes a lower region of the ceramic sintered body, the upper region is connected to the lower region; the lower region has A plurality of holes, the average pore diameter of the base layer is less than or equal to 1 μm; wherein, the gas supply port of the base communicates with the holes in the lower region, the holes in the upper region and the small holes.

Preferably, the overall porosity of the composite porous ceramic plate is 25% to 50%, but not limited thereto; more preferably, the overall porosity of the composite porous ceramic plate is 30% to 40%.

Preferably, the average pore size of the base layer is greater than or equal to 0.1 μm and less than 1.0 μm, but not limited thereto; more preferably, the average pore size of the base layer is greater than or equal to 0.2 μm and less than or equal to 0.5 μm.

According to the invention, the average pore size of the surface throttle layer is smaller than the average pore size of the base layer. Preferably, the average pore diameter of the surface restricting layer is greater than or equal to 0.05 μm and less than 0.2 μm, but not limited thereto; more preferably, the average pore diameter of the surface restricting layer is greater than or equal to 0.05 μm and less than or equal to 0.1 μm .

According to the present invention, the average pore size of the surface treatment layer is smaller than the average pore size of the base layer, and the average pore size of the surface treatment layer is smaller than or equal to the average pore size of the surface throttle layer. Preferably, the average pore diameter of the surface treatment layer is greater than or equal to 0.05 μm and less than or equal to 0.15 μm; more preferably, the average pore diameter of the surface treatment layer is greater than or equal to 0.05 μm and less than or equal to 0.08 μm.

Since the surface treatment layer is formed by applying the aforementioned surface treatment agent to the top surface of the upper region of a ceramic sintered body, and a part of the surface treatment agent will become the other surface treatment agent from the top surface to the top surface of the ceramic sintered body. The direction of the lower region of the ceramic sintered body extends, therefore, preferably, the average thickness of the surface treatment layer is not greater than 20 μm; that is to say, the thickness of the surface treatment layer refers to the distance between the surface treatment layer and the ceramic sintered body The vertical distance between the contact surface of the top surface of the upper region and the surface relative to said contact surface. The thickness of the surface restricting layer is then defined by the depth at which the other surface treatment agent extends to the sintered body, that is, extending from the top surface of the upper region of the sintered body to the further surface treatment agent The vertical distance between the most end of the surface is the thickness of the surface throttling layer, and the above-mentioned end is the interface between the upper region and the lower region of the ceramic sintered body; preferably, the average thickness of the surface throttling layer is 5 μm to 100 μm. The lower region of the sintered body does not substantially contain the other surface treatment agent extending from the top surface, therefore, the depth of the lower region of the sintered body is the thickness of the base layer; preferably, the base layer The average thickness is 400 μm to 9995 μm.

More preferably, the average thickness of the surface treatment layer is 3 μm to 15 μm; more preferably, the average thickness of the surface throttle layer is 5 μm to 10 μm; more preferably, the average thickness of the base layer is 3000 μm to 6000 μm.

In some implementation aspects, the bottom of the base of the air flotation component may include one or more (more than one) gas supply ports, and the one or more gas supply ports are connected to a gas supply pipeline, and the The gas supply pipeline is then connected with a gas supply system. In some implementation aspects, the top of the base of the air flotation component may contain one or more (more than one) air passages, and the one or more air passages communicate with the aforementioned air supply pipeline, and the air supply pipeline is then Connected to an air supply system.

In addition, the base of the air flotation component can be a double-layer or multi-layer base; through the combined design of the base, it can provide a denser distribution of air supply pipelines, thereby providing a more stable and capable of supporting higher Loaded air cushion.

Preferably, the material of the base of the air floating component includes aluminum alloy, steel, aluminum oxide, silicon carbide and other air-tight materials, but is not limited thereto.

Preferably, the thickness of the base is not particularly limited, and can be customized according to user requirements.

According to the present invention, the geometric structure of the air floating component is not particularly limited, for example, the geometric structure can be a disk, a cuboid or a hollow cylinder.

According to the present invention, the air bearing assembly can be applied to an air bearing platform, an air bearing slide, or an air bearing, but is not limited thereto.

Hereinafter, those skilled in the art can easily understand the advantages and effects of the present invention from the following examples. Therefore, it should be understood that the descriptions presented herein are only for illustrating the preferred embodiments and not for limiting the scope of the present invention, and that various modifications and changes may be made for implementation or application without departing from the spirit and scope of the present invention Contents of the present invention.

Reference example 1 Manufacturing method of air flotation components

The double-layer porous ceramic plate in the air flotation module of this reference example was prepared with reference to Example 1 of the Republic of China Invention Patent No. I656108.

First, prepare the surface ceramic raw materials and the bottom ceramic raw materials: the surface ceramic raw materials include methyl cellulose and iron oxides, manganese oxides and chromium oxides as metal oxides, and the iron oxides account for 10% of the total weight of the surface ceramic raw materials. 30 wt%, manganese oxide accounts for 40 wt% of the total weight of the surface ceramic raw material; the average particle size of the metal oxide in the surface ceramic raw material is 0.5 μm; the bottom ceramic raw material contains methyl cellulose and metal oxide Iron oxide, manganese oxide and chromium oxide, and iron oxide accounts for 30 wt% of the total weight of the bottom ceramic raw material, and manganese oxide accounts for 40 wt% of the bottom ceramic raw material; the metal oxide in the bottom ceramic raw material The average particle diameter is 8 μm.

Next, the surface ceramic raw material and the bottom ceramic raw material are each rolled and formed by calendering, and then the green body formed from the surface ceramic raw material is placed on the top of the green body formed from the bottom ceramic raw material, After the two raw embryos are stacked to form a laminate, the laminate is rolled and formed by calendering to obtain a formed laminate. Then, the formed laminate was sintered at a temperature of 950° C. for 7 hours to obtain a double-layer porous ceramic plate including a surface ceramic layer and a bottom ceramic layer. The total thickness of the double-layer porous ceramic plate is 5000 μm, wherein the thickness of the surface ceramic layer is 500 μm. In addition, the average pore diameter of the surface ceramic layer is 0.5 μm, the average pore diameter of the bottom ceramic layer is 5 μm, and the overall porosity of the double-layer porous ceramic plate is about 44%.

Finally, the double-layer porous ceramic plate is set on a pedestal in a cemented manner; wherein, the bottom of the pedestal has a gas supply port, and the gas supply port communicates with a gas supply pipeline; the pedestal The average thickness is 5000 μm, and the material of the base is aluminum alloy.

Example 1 Manufacturing method of air flotation components

First, prepare the raw materials included in the ceramic green body: methyl cellulose, iron oxides, manganese oxides and chromium oxides as metal oxides, and methyl cellulose accounts for 15 wt% of the total weight of the raw materials, Iron oxide accounts for 30 wt% of the total weight of the raw material, manganese oxide accounts for 40 wt% of the total weight of the raw material, and chromium oxide accounts for 15 wt% of the total weight of the raw material. The particle size of the raw material is 0.3 μm to 1.2 μm, and the average particle size is 0.5 μm. Next, after mixing the above-mentioned raw materials evenly, the raw materials are rolled and formed by calendering to obtain a ceramic green body.

Subsequently, the ceramic green body was sintered at a temperature of 850° C. for 5 hours to obtain a sintered body with an average thickness of 8000 μm, wherein the sintered body has an upper region and a lower region connected to each other, and the sintered body There are a plurality of holes in the upper region and the lower region, and at least a part of the holes in the upper region and at least a part of the holes in the lower region communicate with each other, and the average pore diameter of the sintered body is 0.2 μm.

After the aforementioned sintered body is cooled to room temperature, a surface treatment agent is applied to the top surface of the upper region of the sintered body, wherein the surface treatment agent includes graphite powder (excipient) and a solvent, and the surface treatment agent The viscosity is 1 Pa‧s. A part of the surface treatment agent covers the top surface to form a surface treatment layer with an average thickness of 5 μm; the rest of the surface treatment agent (also known as another surface treatment agent) The top surface extends downwards (i.e. towards the lower region of the sintered body) into the cavities in the upper region of the sintered body until the interface between the upper and lower regions of the sintered body forms a surface throttling layer ; and the lower region of the sintered body that does not substantially contain the other surface treatment agent becomes a base layer.

Please refer to the cross-sectional schematic diagram of the composite porous ceramic plate 10 shown in Figure 1, the composite porous ceramic plate 10 is composed of the base layer 11, the surface throttle layer 12 and the surface treatment layer 13 in the order from bottom to top composed of three layers. The base layer 11 and the surface throttling layer 12 respectively comprise the lower region and the upper region of the sintered body obtained in the step (B) of the present invention, and the upper region and the lower region are connected, and the upper region and the lower region There are multiple holes in the area. The base layer 11 includes a plurality of metal oxide particles 111 in the sintered body, and a plurality of holes 112 formed between the metal oxide particles 111 (ie, the holes in the lower region of the sintered body). The surface throttling layer 12 is the extension area of the surface treatment agent in the sintered body, that is, the other surface treatment agent is filled in the holes in the upper region of the sintered body, so the surface throttling layer 12 is also Contains a plurality of metal oxide particles 111 and a plurality of holes 122, but the difference between the holes 122 of the surface restricting layer 12 and the holes 112 of the base layer 11 is that part of the volume of the plurality of holes 122 is filled with the other surface treatment agent, so , the average pore diameter of the pores 122 of the surface throttle layer 12 is smaller than the average pore diameter of the pores 112 of the base layer 11 . The surface treatment layer 13 includes the surface treatment agent and a plurality of small holes 132 . The overall porosity of the composite porous ceramic plate 10 is 35%.

Please refer to Fig. 1 and Fig. 2 in combination. It is observed through a scanning electron microscope (model: JEOL JSM-5600) that the average thickness of the surface treatment layer 13 formed by the surface treatment agent is 1 μm, and the surface throttling layer 12 The surface treatment agent extends downward from the top surface to the upper region of the sintered body at a depth of about 2 μm to 20 μm, the average thickness of the surface throttling layer 12 is 5 μm, and the average thickness of the base layer 11 is 7995 μm ; In addition, the average aperture of the holes 112 of the base layer 11 is 0.2 μm, the average aperture of the holes 122 of the surface throttle layer 12 is 0.05 μm, and the average aperture of the small holes 132 of the surface treatment layer is 0.05 μm .

Finally, the composite porous ceramic plate 10 is bonded to a base, which is the same as that of Reference Example 1.

Please refer to the schematic cross-sectional view of the air flotation unit 1 shown in FIG. 3 , the geometric structure of the air flotation unit 1 is a disc, and the outer diameter of the disc is 50 mm. The air floating component 1 includes a base 20 and the aforementioned composite porous ceramic plate 10 arranged on the base 20 . The bottom of the base 20 has a gas supply port 21, and the gas supply port 21 communicates with a gas supply pipeline 22, and the top of the base 20 (that is, the surface in contact with the composite porous ceramic plate 10) has a plurality of gas channels 23, and the gas supply port 21 of the base 20 and the air channel 23 and the holes in the base layer (that is, the holes in the lower area) contained in the composite porous ceramic plate 10, the holes in the surface throttle layer (that is, the upper The holes in the area) and the small holes contained in the surface treatment layer are connected. A gas supply system (not shown in the figure) provides gas, and the gas passes through the aforementioned holes contained in the composite porous ceramic plate 10 and then exits from the aforementioned small holes, so that many thrusts with uniform pressure can be formed, so the aforementioned thrusts can provide stable And can support high load air cushion.

"Analysis of Bearing Weight of Air Floating Components"

The air flotation assembly of Example 1 and the air flotation assembly of Reference Example 1 were respectively subjected to a bearing weight test in sequence. In order to ensure the experimental significance of the analysis, the geometric structure and size of the air flotation assembly of the embodiment 1 and the air flotation assembly of the reference example 1 are the same, the bases included in the air flotation assembly are the same, and the gas and gas used in the external pressurization method are matched. The air supply system is the same, and the difference between the two is only in the porous ceramic plates contained in the air flotation components.

When the air pressure provided by the air supply system is 0.40 million Pa (MPa) to 0.60 MPa, the maximum weight that the air flotation component of Example 1 can carry is greater than 30 kg, however, the maximum weight that the air flotation component of Reference Example 1 can carry Only 0.1 kg.

Discussion of Experimental Results

According to the analysis results of the above-mentioned bearing weight, it can be known that the composite porous ceramic plate with significantly smaller pore diameter than the conventional porous ceramic plate can be produced by the method of the present invention, so the air flotation component can provide a densely distributed and uniformly pressured air cushion, As a result, the maximum weight that the air flotation component can carry has been greatly increased, even up to 300 times the maximum weight that can be carried by the air flotation component in Reference Example 1. It can indeed achieve the purpose of carrying high-weight objects, and it can also avoid air hammer vibration during loading Phenomenon.

In addition, compared with the conventional preparation method, the preparation method of the present invention has simple steps, cheap and easy to obtain raw materials, so that the overall manufacturing process is easy to control, and because only one sintering is carried out, it can also save energy and reduce manufacturing costs, thereby making it more efficient. Potential for commercial product development.

Although the foregoing descriptions have set forth many features and advantages of the present invention, as well as details of the constitution and features of the present invention, these are only exemplary descriptions. All within the scope indicated by the general meaning of the patent scope of the present invention, the detailed changes made according to the principles of the present invention, especially the changes in shape, size and component arrangement, all still belong to the scope of the present invention.

1: Air flotation components 10: Composite porous ceramic plate 11: Base layer 111: metal oxide particles 112: hole 12: Surface throttling layer 122: hole 13: Surface treatment layer 132: small hole 20: base 21: Gas supply port 22: Air supply pipeline 23: Airway

Fig. 1 is the schematic cross-sectional view of the composite porous ceramic plate obtained in step (C) in Example 1. Fig. 2 is the SEM photo of the composite porous ceramic plate obtained in step (C) in Example 1. Fig. 3 is a schematic cross-sectional view of the air flotation module prepared in Example 1.

none

10: Composite porous ceramic plate

11: Base layer

111: metal oxide particles

112: hole

12: Surface throttling layer

122: hole

13: Surface treatment layer

132: small hole

Claims (12)

A method for making an air flotation component, which comprises the following steps: Step (A): preparing a ceramic green body, wherein the average particle size of the raw materials contained in the ceramic green body is greater than or equal to 0.05 microns and less than or equal to 3.0 microns; Step (B): sintering the ceramic green body to obtain a sintered body, wherein the sintered body has an upper region and a lower region connected, and the upper region and the lower region have a plurality of holes; Step (C): Applying a surface treatment agent to a top surface of the upper region of the sintered body, a part of the surface treatment agent covers the top surface to form a surface treatment layer, and the rest of the surface treatment agent is removed from the top surface The surface extends to the interface between the upper region and the lower region of the sintered body to form a surface restriction layer, and the lower region of the sintered body forms a base layer to obtain a composite porous ceramic plate; wherein, the surface treatment agent contains an excipient Forming agent; the composite porous ceramic plate sequentially includes the surface treatment layer, the surface restriction layer and the base layer from top to bottom, the surface treatment layer has a plurality of small holes, and the average pore size of the small holes is less than 0.3 microns, The base layer has an average pore size less than or equal to 1 micron; and Step (D): setting the composite porous ceramic plate on a base to obtain the air floating component; wherein, the base has a gas supply port, and the gas supply port is connected to the hole in the lower area and the hole in the upper area. The hole communicates with the small holes. The manufacturing method of the air flotation component as claimed in item 1, wherein, in the step (A), the raw material includes a metal oxide, a silicide, a carbide or any combination thereof. The method for making an air flotation component as described in claim 2, wherein, in the step (A), the raw material further includes a thickener, a pore-forming filler, a binder, a thermal expansion control agent, and a conductivity control agent. agent, an antistatic agent, a mechanical strength control agent, a friction coefficient modifier, or any combination thereof. The manufacturing method of the air flotation module as described in Claim 1, wherein the sintering temperature in the step (B) is 700°C to 1200°C. The manufacturing method of the air flotation module according to claim 1, wherein the excipient of the surface treatment agent includes carbon powder or titanium dioxide. The method for preparing the air flotation component according to any one of claims 1 to 5, wherein, in the step (C), the method of applying the surface treatment agent includes impregnation, pressurized osmosis, negative pressure osmosis, scraping or spraying. An air flotation unit comprising: a base having a gas supply port; and A composite porous ceramic plate, which sequentially includes from top to bottom: A surface treatment layer, the surface treatment layer comprising a surface treatment agent, the surface treatment agent comprising an excipient, the surface treatment layer has a plurality of pores, and the average pore size of the pores is less than 0.3 microns; A surface throttling layer, the surface throttling layer includes an upper region of a ceramic sintered body and another surface treatment agent, the other surface treatment agent is the same as the surface treatment agent in the surface treatment layer, and the upper region has a plurality of holes, and the holes in the upper region are filled with the other surface treatment agent; and A base layer, the base layer is arranged between the surface throttle layer and the base, the base layer includes a lower region of the ceramic sintered body, the upper region is connected to the lower region; there are a plurality of holes in the lower region , the average pore size of the base layer is less than or equal to 1 micron; Wherein, the gas supply port of the base communicates with the hole in the lower area, the hole in the upper area and the small holes. The air flotation component according to claim 7, wherein the overall porosity of the composite porous ceramic plate is 25% to 50%. The air floating component according to claim 8, wherein the average pore diameter of the base layer is greater than or equal to 0.1 micron and less than 1 micron, and the average thickness of the base layer is 400 microns to 9995 microns. The air floating component according to claim 8, wherein the average pore diameter of the surface restriction layer is greater than or equal to 0.05 micron and less than 0.2 micron, and the average thickness of the surface restriction layer is 5 microns to 100 microns. The air floating component according to claim 8, wherein the average pore size of the surface treatment layer is greater than or equal to 0.05 micron and less than or equal to 0.15 micron, and the average thickness of the surface treatment layer is not greater than 20 microns. The air flotation unit according to any one of claims 7 to 11, wherein the geometric structure of the air flotation unit is a disc, a cuboid or a hollow cylinder.

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