CN115724682B - Air floatation assembly and manufacturing method thereof - Google Patents
Air floatation assembly and manufacturing method thereof Download PDFInfo
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- CN115724682B CN115724682B CN202210444581.2A CN202210444581A CN115724682B CN 115724682 B CN115724682 B CN 115724682B CN 202210444581 A CN202210444581 A CN 202210444581A CN 115724682 B CN115724682 B CN 115724682B
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Abstract
The invention discloses an air floatation assembly and a manufacturing method thereof, wherein the manufacturing method comprises the following steps: preparing a ceramic green body; sintering the ceramic green body to obtain a sintered body having connected upper and lower regions having a plurality of holes therein; applying a surface treatment agent comprising an excipient to a top surface of the upper region, a portion of the surface treatment agent covering the top surface to form a surface treatment layer, and the remaining surface treatment agent penetrating from the top surface to an interface of the upper region and the lower region to form a surface restriction layer, the lower region forming a base layer, to obtain a composite porous ceramic plate; arranging a composite porous ceramic plate on a base with a gas supply port to obtain the air floatation assembly; the air-float assembly and the manufacturing method thereof can provide an air cushion layer with uniform pressure, avoid the phenomenon of air hammer vibration, can bear high-weight articles, and have simple working procedures and low raw material cost, thereby reducing the manufacturing cost.
Description
Technical Field
The present invention relates to a non-contact carrier, and more particularly, to an air-floating assembly and a method for manufacturing the same.
Background
In the ultra-precision machining technology, more precise mechanical control than the conventional machining technology is required, whether the accuracy of positioning, the stability of the supporting member, the smoothness of the sliding member, and the like. Therefore, the air floatation assembly using the air flow as the lubricant between the air floatation assembly and the workpiece can reduce the friction force between the air floatation assembly and the workpiece because the air floatation assembly is not in direct contact with the workpiece, and further has the advantages of less heat generation, minimum abrasion degree, high precision output assurance and the like. In general, an air bearing assembly is generally divided into components made using an orifice plate (orifice) or a porous medium (pore medium) to enable gas flow. Among them, for example, the aerostatic bearing (aerostatic bearing) is to make the gas introduced into the bearing through the restrictor by using external pressurization such as a compressor, and then pass out from the hole to form an air cushion and generate static pressure to load the workpiece, so the rigidity of the air cushion and the uniformity of the air cushion are critical to the loading capacity of the aerostatic bearing.
Although, korean patent No. 101149350B1 has disclosed a ceramic material for a vacuum chuck having a double-layered porous structure, which is obtained by sintering a support layer having coarse pores from ceramic raw material powder, then coating one surface of the support layer with a slurry mixed with another ceramic raw material powder and a spherical pore-forming agent for forming spherical micropores, and then performing heat sintering again to form the slurry into an adsorption layer having a smaller pore diameter, and thus obtaining a ceramic material for a vacuum chuck in which the support layer and the adsorption layer can communicate; however, the above preparation process requires multiple times of heating and sintering, and the pore diameter of the micropores of the above adsorption layer is preferably between 5 micrometers (μm) and 50 μm, and the pore diameter of the coarse pores of the above support layer is preferably between 10 μm and 40 μm, so that the ceramic material with a double-layer porous structure is easy to generate air hammer (air-hammer) vibration phenomenon when being used with an air supply system due to the overlarge pore diameter, and therefore, the ceramic material with a double-layer porous structure is only suitable for vacuum suction cups and still cannot be used as an air floatation assembly applied to an air floatation platform, an air floatation slide rail, an air bearing and the like.
In addition, the applicant has started some related researches in the last few years, for example, the invention patent No. TWI656108B in taiwan area of china provides a porous ceramic plate and a preparation method thereof. The preparation method comprises the steps of layering and stacking ceramic blanks with different apertures, and then sintering the ceramic blanks again to finally obtain the porous ceramic plate with good air permeability and a multilayer structure; since the average pore diameter of the surface ceramic layer of the porous ceramic plate is between 0.3 and 10 mu m, and the average pore diameter of the bottom ceramic layer is between 20 and 3000 mu m, the larger pore diameter can reduce the air resistance and provide larger adsorption force, and the porous ceramic plate is particularly suitable for being applied to vacuum suction cups. Although the porous ceramic plate can be applied to non-contact application equipment, the size of the holes of the porous ceramic plate is still small enough, so that the weight of the workpiece which can be carried by the porous ceramic plate is greatly limited, and the requirements of various workpieces cannot be met. Further, if sintering is used alone, it is difficult to effectively reduce the average pore diameter of the surface ceramic layer.
Disclosure of Invention
In view of the defect that the porous ceramic material cannot be directly applied to an air-floating assembly, the present invention aims to provide an air-floating assembly and a manufacturing method thereof, wherein the manufactured air-floating assembly can provide an air-cushion layer with uniform pressure, so that the air-hammer vibration phenomenon can be avoided, and meanwhile, a high-weight object can be borne.
Another object of the present invention is to provide an air-floating assembly and a method for manufacturing the same, which have simple process and low cost of raw materials used in combination, so as to reduce the manufacturing cost and further have the development potential of commercial products.
In order to achieve the above-mentioned object, the present invention provides a method for manufacturing an air-floating assembly, comprising the following steps:
step (A): preparing a ceramic green body, wherein the ceramic green body comprises raw materials with average grain diameter of more than or equal to 0.05 mu m and less than or equal to 3.0 mu m;
step (B): sintering the ceramic green body to obtain a sintered body, wherein the sintered body is provided with an upper area and a lower area which are connected, and a plurality of holes are formed in the upper area and the lower area;
step (C): applying a surface treatment agent to a top surface of the upper region of the sintered body, a portion of the surface treatment agent covering the top surface to form a surface treatment layer, the remaining portion of the surface treatment agent penetrating from the top surface to an interface between the upper region of the sintered body and the lower region of the sintered body and forming a surface restriction layer, the lower region of the sintered body forming a base layer to obtain a composite porous ceramic plate; wherein the surface treatment agent comprises an excipient; the composite porous ceramic plate sequentially comprises a surface treatment layer, a surface throttling layer and a substrate layer from top to bottom, wherein the surface treatment layer is provided with a plurality of small holes, the average pore diameter of the small holes is smaller than 0.3 mu m, and the substrate layer is provided with a plurality of holes, and the average pore diameter of the holes is smaller than or equal to 1 mu m;
step (D): arranging the composite porous ceramic plate on a base to obtain the air floatation assembly; wherein the base has a gas supply port in communication with the aperture of the lower region, the aperture of the upper region, and the plurality of apertures.
The invention can save energy and has low raw material cost by adopting the surface treating agent which does not need to be sintered at high temperature to be applied to the top surface of the upper region of the sintered body, thereby greatly reducing the manufacturing cost. Meanwhile, the invention permeates part of the surface treating agent from the top surface to the lower region of the sintered body until reaching the interface between the upper region and the lower region of the sintered body, so that the partial volumes of a plurality of holes distributed in the upper region of the sintered body are occupied by the surface treating agent to reduce the original hole size, and the surface throttling layer has small enough pore diameter, so that the air flow coming out of the holes can be distributed on the surface of the composite porous ceramic plate more uniformly, the phenomenon of air hammer vibration can be avoided, and the instability of an air floatation component can be avoided to bear higher weight workpieces. In addition, since the surface treatment agent permeates downwards from the top surface of the upper region, the amount of the surface treatment agent which can occupy the pore volume gradually decreases as the depth of the upper region of the sintered body increases, so that the average pore diameter of the pores of the surface throttling layer increases to the average pore diameter of the pores of the substrate layer (i.e., the original pore shape and the volume of the sintered body are maintained), thereby ensuring smooth ventilation of the composite porous ceramic plate.
Preferably, in the step (a), the raw material of the ceramic green body includes one or any combination of a metal oxide, a silicide and a carbide, but is not limited thereto.
Specifically, the metal oxide may include oxides of metals such as iron (Fe), manganese (Mn), chromium (Cr), cobalt (Co), magnesium (Mg), calcium (Ca), copper (Cu), and aluminum (Al), but is not limited thereto. For example, the iron oxide includes ferrous oxide (FeO), ferric oxide (Fe 2 O 3 ) Etc., but is not limited thereto; the manganese oxide includes manganese monoxide (MnO), manganous oxide (Mn) 3 O 4 ) Manganese sesquioxide (Mn) 2 O 3 ) Manganese dioxide (MnO) 2 ) Etc., but is not limited thereto; the chromium oxide comprises chromium oxide (CrO), chromium oxide (Cr) 2 O 3 ) Chromium trioxide (CrO) 3 ) Etc., but is not limited thereto; the cobalt oxide comprises cobalt monoxide (CoO), cobalt oxide (Co) 2 O 3 ) Tricobalt tetraoxide (Co) 3 O 4 ) Etc., but is not limited thereto; the copper oxide includes cuprous oxide (Cu 2 O), copper oxide (CuO), etc., but is not limited thereto; the aluminum oxide includes aluminum oxide (Al 2 O 3 ). The properties such as the conductivity and mechanical strength of the entire sintered body can be adjusted according to the properties of the metal oxide. For example, in order to adjust the conductivity, the raw material may include metal oxides such as iron oxide, copper oxide, manganese oxide, etc., but is not limited thereto; preferably, the iron oxide content of the raw material is more than 20 weight percent (wt%) of the total weight of the raw material; more preferably, the feedstock contains iron oxide in an amount of from 30wt% to 80wt% based on the total weight of the feedstock. Preferably, the copper oxide content of the raw material is more than 0.01wt% of the total weight of the raw material; more preferably, the feedstock contains copper oxide in an amount of from 0.01wt% to 50wt% based on the total weight of the feedstock. For adjusting the mechanical strength, the raw material may include metal oxides such as manganese oxide, cobalt oxide, magnesium oxide, etc., but is not limited thereto; preferably, the manganese oxide content of the raw material accounts for more than 0.01 weight percent of the total weight of the raw material; more preferably, the feedstock contains manganese oxideThe amount of the catalyst is 0.01 to 80wt% of the total weight of the raw materials. Preferably, the cobalt oxide content of the raw material accounts for more than 0.01 weight percent of the total weight of the raw material; more preferably, the feedstock contains cobalt oxide in an amount of from 0.01wt% to 50wt% based on the total weight of the feedstock. In order to increase mechanical strength and chemical resistance, the raw material may include a metal oxide such as aluminum oxide, but is not limited thereto; preferably, the aluminum oxide content of the raw material is more than 20wt% of the total weight of the raw material; more preferably, the feedstock contains aluminum oxide in an amount of from 30wt% to 80wt% based on the total weight of the feedstock.
In particular, the silicide may comprise silicon dioxide (SiO 2 ) Silicon nitride (Si) 3 N 4 ) But is not limited thereto.
Specifically, the carbide may include silicon carbide (SiC), zirconium carbide (ZrC), tungsten carbide (WC), etc., but is not limited thereto.
Preferably, in the step (a), the raw material further comprises one or any combination of a thickener, a pore-forming filler, a binder, a thermal expansion controlling agent, a conductivity controlling agent, an electrostatic preventing agent, a mechanical strength controlling agent, a friction coefficient adjusting agent.
Preferably, the raw material of the ceramic green body in the step (a) may further include a pore-forming filler that is easily burned out or decomposed to generate pores, for example: calcium carbonate (CaCO) 3 ) Magnesium carbonate (MgCO) 3 ) Polymethyl methacrylate (poly methyl methacrylate, PMMA), polystyrene (PS), or the like, but is not limited thereto. Alternatively, in some embodiments, the starting material for the ceramic green body in step (a) may further comprise a thickener, such as: starch (starch), methyl cellulose (methyl cellulose), and the like, but is not limited thereto. By adding the thickener into the raw materials, the ingredients in the raw materials are uniformly mixed, and the pore uniformity of the sintered body is improved; in addition, the thickener is usually a material that can be burned out, and can also enhance the porosity and air permeability of the sintered body. In addition, under the condition of not affecting the effect of the manufacturing method of the air floatation assembly, other raw materials of the ceramic green body can be added according to different use requirementsAuxiliary additives such as one or any combination of binders, thermal expansion control agents, conductivity control agents, static electricity preventing agents, mechanical strength control agents, friction coefficient adjusting agents, and the like, but are not limited thereto.
Specifically, in the step (A), the ceramic green body contains a raw material having an average particle diameter of 0.3 μm or more and 0.8 μm or less; more preferably, the ceramic green body comprises a starting material having an average particle size of 0.3 μm or more and 0.5 μm or less.
According to the present invention, the ceramic green body may be prepared by uniformly mixing the above raw materials, and then performing injection molding, compression molding, extrusion molding, or calendaring molding, but is not limited thereto.
Preferably, the sintering temperature of the sintered body in the step (B) is 700 ℃ to 1200 ℃.
Specifically, the sintering temperature in the above range can reduce the energy consumption and can improve the yield of the sintered body obtained after sintering.
Specifically, the average thickness of the sintered body (i.e., the total thickness of the upper region and the lower region) may be greater than or equal to 500 μm and less than or equal to 10000 μm (i.e., 10 millimeters (mm)), but is not limited thereto. Preferably, the average pore diameter of the sintered body may be greater than or equal to 0.2 μm and less than 1 μm, but is not limited thereto.
Preferably, the excipient of the surface treatment agent comprises carbon powder (graphite powder) or titanium dioxide (TiO 2 ) But is not limited thereto.
Specifically, the surface treatment agent may further include a diluent, a solvent, a resin, etc., but is not limited thereto. Wherein the diluent is used for helping the surface treatment agent to have more proper viscosity.
Preferably, in the step (C), the surface treatment agent is applied by impregnation (impregnation), pressure infiltration (pressurized seepage), negative pressure infiltration (negative pressure treatment), knife coating, or spray coating (spray coating), but the method is not limited thereto.
Specifically, when the impregnation method is adopted, a direct impregnation method may be adopted, but is not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1 millipascal seconds (mpa·s) to 25 pascal seconds (pa·s). In some embodiments, the surface treatment agent may further comprise a solvent to enable it to adjust to a viscosity suitable for impregnation; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane, or a combination thereof, but is not limited thereto.
Specifically, when the pressurized osmosis mode is employed, the pressure may be more than 1.013 bar (bar) and less than or equal to 2000bar, but is not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1mpa·s to 250pa·s. In some embodiments, the surface treatment agent may further comprise a solvent to enable adjustment to a viscosity suitable for pressurized permeation; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane, or a combination thereof, but is not limited thereto.
Specifically, when a negative pressure osmosis mode is employed, the pressure may be 10 or more -5 Torr (torr) and less than 760torr, but is not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1mpa·s to 150pa·s. In some embodiments, the surface treatment agent may further comprise a solvent to enable adjustment to a viscosity suitable for negative pressure permeation; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane, or a combination thereof, but is not limited thereto.
Specifically, when the spray method is adopted, a direct spray method or an ultrasonic spray method may be adopted, but the method is not limited thereto. Preferably, the surface treatment agent at this time has a viscosity of 0.1mpa·s to 10pa·s. In some embodiments, the surface treatment agent may further comprise a solvent to adjust the viscosity of the surface treatment agent to a suitable viscosity for spraying; for example, the solvent may be one of water, acetone, alcohol, kerosene, toluene, cyclohexane, n-heptane, or a combination thereof, but is not limited thereto.
Specifically, the composite porous ceramic plate is bonded to the susceptor by cementing, embedding, or the like, but is not limited thereto.
The invention also provides an air floatation assembly prepared by the method for preparing the air floatation assembly.
Another object of the present invention is to provide an air bearing assembly comprising:
a base having a gas supply port; and
a composite porous ceramic plate, which comprises from top to bottom in sequence:
a surface treatment layer comprising a surface treatment agent, the surface treatment agent comprising an excipient, the surface treatment layer having a plurality of small pores, the plurality of small pores having an average pore diameter of less than 0.3 μm;
a surface throttle layer comprising an upper region of a ceramic sintered body and another surface treatment agent, the other surface treatment agent being the same as the surface treatment agent in the surface treatment layer, the upper region having a plurality of holes therein, the holes of the upper region being filled with the other surface treatment agent; and
a base layer disposed between the surface throttling layer and the susceptor, the base layer comprising a lower region of the ceramic sintered body, the upper region being connected to the lower region; the lower region having a plurality of holes therein, the plurality of holes of the base layer having an average pore size of less than or equal to 1 μm;
wherein the gas supply port of the base communicates with the plurality of holes of the lower region, the plurality of holes of the upper region, and the plurality of small holes.
Preferably, the overall porosity of the composite porous ceramic plate is 25% to 50%, but is not limited thereto; more preferably, the overall porosity of the composite porous ceramic plate is 30% to 40%.
Preferably, the average pore diameter of the plurality of pores of the base layer is greater than or equal to 0.1 μm and less than 1.0 μm, but is not limited thereto; more preferably, the average pore size of the plurality of pores of the substrate layer is greater than or equal to 0.2 μm and less than or equal to 0.5 μm.
According to the invention, the average pore size of the plurality of pores of the surface throttling layer is smaller than the average pore size of the plurality of pores of the substrate layer.
Preferably, the average pore diameter of the plurality of pores of the surface throttling layer is greater than or equal to 0.05 μm and less than 0.2 μm, but is not limited thereto; more preferably, the average pore diameter of the surface throttle layer is greater than or equal to 0.05 μm and less than or equal to 0.1 μm.
According to the present invention, the average pore size of the plurality of pores of the surface treatment layer is smaller than the average pore size of the plurality of pores of the base layer, and the average pore size of the plurality of pores of the surface treatment layer is smaller than or equal to the average pore size of the plurality of pores of the surface throttling layer.
Preferably, the average pore diameter of the plurality of pores of the surface treatment layer is greater than or equal to 0.05 μm and less than or equal to 0.15 μm; more preferably, the average pore diameter of the surface-treated layer is 0.05 μm or more and 0.08 μm or less.
Since the surface treatment layer is formed by applying the surface treatment agent to the top surface of the upper region of a ceramic sintered body and a portion of the surface treatment agent becomes another surface treatment agent extending from the top surface toward the lower region of the ceramic sintered body, it is preferable that the average thickness of the surface treatment layer is less than or equal to (not more than) 20 μm; that is, the thickness of the surface treatment layer refers to the contact surface of the surface treatment layer with the top surface of the upper region of the ceramic sintered body and the perpendicular distance to the surface of the contact surface. The thickness of the surface throttle layer is defined by the depth to which the other surface treating agent extends into the sintered body, that is, the vertical distance from the top surface of the upper region of the sintered body to the extreme end of the extension of the other surface treating agent, that is, the thickness of the surface throttle layer, is the interface between the upper region and the lower region of the ceramic sintered body; preferably, the surface throttling layer has an average thickness of 5 μm to 100 μm. The lower region of the sintered body is substantially free of the other surface treatment agent extending from the top surface, and therefore, the depth of the lower region of the sintered body, i.e., the thickness of the base layer; preferably, the average thickness of the base layer is 400 μm to 9995 μm.
More preferably, the surface treatment layer has an average thickness of 3 μm to 15 μm; more preferably, the surface throttle layer has an average thickness of 5 μm to 10 μm; more preferably, the average thickness of the base layer is 3000 μm to 6000 μm.
In some embodiments, the bottom of the base of the air bearing assembly may include one or more (more than one) gas supply ports, with one or more gas supply ports in communication with an air supply line, which in turn is connected to an air supply system. In some embodiments, the top of the base of the air floatation assembly may include one or more (more than one) air passages, with one or more air passages communicating with the air supply line, which in turn is connected to an air supply system.
In addition, the base of the air floatation assembly can be a double-layer or multi-layer base; by the combination design of the base, more dense distribution of air supply pipelines is provided, and an air cushion layer which is more stable and can support higher load is provided.
Specifically, the material of the base of the air-floating assembly includes, but is not limited to, an air-impermeable material such as aluminum alloy, steel, aluminum oxide, silicon carbide, and the like.
Specifically, the thickness of the base is not particularly limited, and can be customized according to the needs of the user.
According to the present invention, the geometry of the air bearing assembly is not particularly limited.
Preferably, the geometry of the air floatation assembly is a disc, a cuboid or a hollow cylinder.
According to the invention, the air floatation assembly can be applied to an air floatation platform, an air floatation sliding rail, an air floatation bearing or the like, but is not limited to the air floatation platform, the air floatation sliding rail, the air floatation bearing or the like.
Drawings
FIG. 1 is a schematic cross-sectional view of the composite porous ceramic plate obtained in the step (C) of example 1.
FIG. 2 shows a scanning electron microscope (scanning electron microscope, SEM) photograph of the composite porous ceramic plate obtained in the step (C) of example 1.
FIG. 3 is a schematic cross-sectional view of the air bearing assembly of example 1.
Detailed Description
Hereinafter, the advantages and effects achieved by the present invention will be easily understood by those skilled in the art from the following examples. It is to be understood, therefore, that the description set forth herein is merely illustrative of the preferred embodiments and is not intended to limit the scope of the claims of the present invention, as various modifications, alterations may be made to practice or use the teachings of the invention without departing from the scope of the claims of the present invention.
Production method of air bearing module of reference example 1:
reference to example 1 of the invention patent No. TWI656108B in taiwan area of china a double layer porous ceramic plate in the air bearing assembly of this reference example was prepared.
First, a surface ceramic raw material and a bottom ceramic raw material are prepared: the surface ceramic raw material comprises methyl cellulose, and iron oxide, manganese oxide and chromium oxide as metal oxides, wherein the iron oxide accounts for 30wt% of the total weight of the surface ceramic raw material, and the manganese oxide accounts for 40wt% of the total weight of the surface ceramic raw material; the average grain diameter of the metal oxide in the surface ceramic raw material is 0.5 mu m; the underlying ceramic raw material comprises methyl cellulose and iron oxide, manganese oxide and chromium oxide as metal oxides, wherein the iron oxide accounts for 30wt% of the total weight of the underlying ceramic raw material, and the manganese oxide accounts for 40wt% of the total weight of the underlying ceramic raw material; the average particle size of the metal oxide in the underlying ceramic raw material was 8 μm.
Then, the surface ceramic raw material and the bottom ceramic raw material are respectively rolled and formed by a rolling forming method, the green blank formed by the surface ceramic raw material is placed above the green blank formed by the bottom ceramic raw material, two layers of green blanks are overlapped to form a laminated layer, and the laminated layer is rolled and formed by the rolling forming method to obtain the formed laminated layer. The formed laminate was then sintered at 950 ℃ for 7 hours to obtain a double-layered porous ceramic plate comprising a surface ceramic layer and a bottom ceramic layer. The total thickness of the double-layer porous ceramic plate is 5000 μm, wherein the thickness of the surface ceramic layer is 500 μm. In addition, the average pore diameter of the surface ceramic layer was 0.5. Mu.m, the average pore diameter of the bottom ceramic layer was 5. Mu.m, and the overall porosity of the double-layer porous ceramic plate was about 44%.
Finally, the double-layer porous ceramic plate is arranged on a base in a cementing manner; the bottom of the base is provided with a gas supply port which is communicated with a gas supply pipeline; the average thickness of the base is 5000 mu m, and the base is made of aluminum alloy.
Preparation of air bearing assembly of example 1:
step (A): first, raw materials contained in a ceramic green body are prepared: methylcellulose, iron oxide, manganese oxide and chromium oxide as metal oxides, and methylcellulose comprises 15wt% of the total weight of the feedstock, iron oxide comprises 30wt% of the total weight of the feedstock, manganese oxide comprises 40wt% of the total weight of the feedstock, and chromium oxide comprises 15wt% of the total weight of the feedstock. The particle size of the raw material is 0.3 μm to 1.2 μm, and the average particle size is 0.5 μm. Then, after the raw materials are uniformly mixed, the raw materials are rolled and molded in a calendaring molding mode, so as to obtain a ceramic green body.
Step (B): subsequently, the ceramic green body was subjected to sintering at 850 ℃ for 5 hours to obtain a sintered body having an average thickness of 8000 μm, wherein the sintered body had an upper region and a lower region connected, the upper region and the lower region of the sintered body had a plurality of holes therein, and at least a portion of the holes of the upper region and at least a portion of the holes of the lower region were in communication with each other, and the sintered body had an average pore diameter of 0.2 μm.
Step (C): after the above sintered body was cooled to room temperature, a surface treatment agent was applied to the top surface of the upper region of the sintered body, wherein the surface treatment agent contained graphite powder (excipient) and a solvent, and the viscosity of the surface treatment agent was 1pa·s. A part of the surface treatment agent is covered on the top surface to form a surface treatment layer with an average thickness of 5 mu m; the remainder of the surface treatment agent (also known as another surface treatment agent) penetrates from the top surface of the upper region of the sintered body down into the pores of the upper region of the sintered body (i.e., in the direction of the lower region of the sintered body) until an interface between the upper and lower regions of the sintered body forms a surface restriction layer; while the lower region of the sintered body, which does not substantially contain the other surface treatment agent, becomes a base layer.
Referring to the schematic cross-sectional view of the composite porous ceramic plate 10 shown in fig. 1, the composite porous ceramic plate 10 is composed of three layers, which are sequentially formed from bottom to top, of the base layer 11, the surface throttling layer 12 and the surface treatment layer 13. The base layer 11 and the surface throttle layer 12 comprise a lower region and an upper region of the sintered body obtained in the step (B) of the present invention, respectively, and the upper region and the lower region are connected, and the upper region and the lower region have a plurality of holes therein. The base layer 11 comprises a plurality of metal oxide particles 111 in the sintered body, and a plurality of holes 112 formed between the metal oxide particles 111 (i.e., the holes of the lower region of the sintered body). The surface throttle layer 12 is a penetration region of the surface treating agent in the sintered body, i.e., the other surface treating agent is filled in the pores of the upper region of the sintered body, so the surface throttle layer 12 also includes a plurality of metal oxide particles 111 and a plurality of pores 122, but the pores 122 of the surface throttle layer 12 are different from the pores 112 of the base layer 11 in that a part of the volume of the plurality of pores 122 is filled with the other surface treating agent, and thus, the average pore diameter of the pores 122 of the surface throttle layer 12 is smaller than that of the pores 112 of the base layer 11. The surface treatment layer 13 includes the surface treatment agent and a plurality of pores 132. The overall porosity of the composite porous ceramic plate 10 was 35%.
Referring to FIGS. 1 and 2 together, it is observed by a scanning electron microscope (model: JEOL JSM-5600) that the average thickness of the surface treatment layer 13 formed of the surface treatment agent is 1 μm, the surface treatment agent of the surface throttle layer 12 permeates down from the top surface to the upper region of the sintered body having a depth of about 2 μm to 20 μm, the average thickness of the surface throttle layer 12 is 5 μm, and the average thickness of the base layer 11 is 7995 μm; in addition, the average pore diameter of the pores 112 of the base layer 11 was 0.2 μm, the average pore diameter of the pores 122 of the surface throttle layer 12 was 0.05 μm, and the average pore diameter of the pores 132 of the surface treatment layer 13 was 0.05 μm.
Step (D): finally, the composite porous ceramic plate 10 was adhesively joined to a base identical to that of reference example 1.
Referring to the schematic cross-sectional view of the air-floating assembly 1 shown in fig. 3, the geometry of the air-floating assembly 1 is a disc, and the outer diameter of the disc is 50mm. The air floatation assembly 1 comprises a base 20 and the composite porous ceramic plate 10 arranged on the base 20. The bottom of the susceptor 20 has a gas supply port 21, and the gas supply port 21 is in communication with a gas supply line 22, and the top of the susceptor 20 (i.e., the surface in contact with the composite porous ceramic plate 10) has a plurality of gas passages 23, and the gas supply port 21 and the gas passages 23 of the susceptor 20 are in communication with the holes 112 (i.e., the holes in the lower region) of the substrate layer 11, the holes 122 (i.e., the holes in the upper region) of the surface throttle layer 12, and the holes 132 in the surface treatment layer 13 included in the composite porous ceramic plate 10. The gas is supplied through the holes 112, 122 contained in the composite porous ceramic plate 10 and exits through the holes 132 by a gas supply system (not shown) to form a plurality of uniform pressure thrust forces which provide a stable and highly loaded air cushion layer.
And (3) carrying weight analysis of the air floatation assembly:
the air bearing weight test was performed on the air bearing assembly of example 1 and the air bearing assembly of reference example 1, respectively, in order. In order to ensure experimental significance of analysis, the air floatation assembly of the embodiment 1 and the air floatation assembly of the reference example 1 have the same geometric structure and size, the bases included in the air floatation assembly are the same, the gas used in combination with an external pressurizing mode and the gas supply system are the same, and the difference between the two is only different in porous ceramic plates included in the air floatation assembly.
The maximum weight that the air floatation assembly of example 1 can carry is greater than 30 kg when the air pressure provided to the air supply system is 0.40 to 0.60 megapascals (MPa), however, the maximum weight that the air floatation assembly of reference example 1 can carry is only 0.1 kg.
Discussion of experimental results:
according to the analysis result of the bearing weight, the composite porous ceramic plate with the aperture obviously smaller than that of the existing porous ceramic plate can be manufactured by the manufacturing method of the invention, so that the air floatation assembly can provide air cushion layers with dense distribution and uniform pressure, the maximum bearing weight of the air floatation assembly can be greatly improved, even the maximum bearing weight of the air floatation assembly can be improved by 300 times compared with that of the air floatation assembly of reference example 1, the aim of bearing high-weight objects can be truly realized, and the phenomenon of air hammer vibration during bearing can be avoided.
In addition, compared with the existing preparation method, the preparation method provided by the invention has the advantages that the whole process is easy to control due to simple steps, cheap and easily available raw materials, and the energy is saved and the manufacturing cost is reduced due to the fact that the sintering is performed once, so that the preparation method has the development potential of commercial products.
Although the foregoing description has set forth numerous characteristics, advantages, and features of the invention, this is illustrative only, and is not intended to limit the scope of the invention in any way, except as may be indicated by the broad meaning of the claims. Changes in detail, particularly in matters of shape, size and arrangement of parts, which are indicated by the claims of the present invention, are considered to be within the scope of the claims of the present invention.
Claims (12)
1. A method of making an air bearing assembly comprising the steps of:
step (A): preparing a ceramic green body, wherein the ceramic green body comprises raw materials with average grain sizes of more than or equal to 0.05 microns and less than or equal to 3.0 microns;
step (B): sintering the ceramic green body to obtain a sintered body, wherein the sintered body is provided with an upper area and a lower area which are connected, and a plurality of holes are formed in the upper area and the lower area;
step (C): applying a surface treatment agent to a top surface of the upper region of the sintered body, a portion of the surface treatment agent covering the top surface to form a surface treatment layer, the remaining portion of the surface treatment agent penetrating from the top surface to an interface between the upper region of the sintered body and the lower region of the sintered body and forming a surface restriction layer, the lower region of the sintered body forming a base layer to obtain a composite porous ceramic plate; wherein the surface treatment agent comprises an excipient; the composite porous ceramic plate sequentially comprises a surface treatment layer, a surface throttling layer and a substrate layer from top to bottom, wherein the surface treatment layer is provided with a plurality of small holes, the average pore diameter of the small holes is smaller than 0.3 micron, and the substrate layer is provided with a plurality of holes, and the average pore diameter of the holes is smaller than or equal to 1 micron; and
step (D): arranging the composite porous ceramic plate on a base to obtain the air floatation assembly; wherein the base has a gas supply port in communication with the aperture of the lower region, the aperture of the upper region, and the plurality of apertures.
2. The method of claim 1, wherein in step (a), the material comprises one or any combination of a metal oxide, a silicide, and a carbide.
3. The method of claim 2, wherein in step (a), the raw material further comprises one or any combination of a thickener, a pore-forming filler, a binder, a thermal expansion controlling agent, a conductivity controlling agent, an antistatic agent, a mechanical strength controlling agent, a friction coefficient adjusting agent.
4. The method of claim 1, wherein the sintering temperature of the sintered body in step (B) is 700 ℃ to 1200 ℃.
5. A method of making an air flotation assembly as set forth in claim 1 wherein said excipient of said surface treating agent comprises carbon powder or titanium dioxide.
6. The method of any one of claims 1 to 5, wherein in step (C), the surface treatment agent is applied by impregnation, pressure infiltration, negative pressure infiltration, doctor blading or spraying.
7. An air bearing assembly, comprising:
a base having a gas supply port; and
a composite porous ceramic plate, which comprises from top to bottom in sequence:
a surface treatment layer comprising a surface treatment agent, the surface treatment agent comprising an excipient, the surface treatment layer having a plurality of small pores, the plurality of small pores having an average pore size of less than 0.3 microns;
a surface throttle layer comprising an upper region of a ceramic sintered body and another surface treatment agent, the other surface treatment agent being the same as the surface treatment agent in the surface treatment layer, the upper region having a plurality of holes therein, the holes of the upper region being filled with the other surface treatment agent; and
a base layer disposed between the surface throttling layer and the susceptor, the base layer comprising a lower region of the ceramic sintered body, the upper region being connected to the lower region; the lower region having a plurality of holes therein, the plurality of holes of the base layer having an average pore size of less than or equal to 1 micron;
wherein the gas supply port of the base communicates with the plurality of holes of the lower region, the plurality of holes of the upper region, and the plurality of small holes.
8. The air bearing assembly of claim 7, wherein the composite porous ceramic plate has an overall porosity of 25% to 50%.
9. The air bearing assembly of claim 8, wherein the plurality of holes of the base layer have an average pore size greater than or equal to 0.1 microns and less than 1 micron and an average thickness of 400 microns to 9995 microns.
10. The air bearing assembly according to claim 8, wherein the plurality of holes of the surface throttling layer have an average pore size of greater than or equal to 0.05 microns and less than 0.2 microns, and the surface throttling layer has an average thickness of 5 microns to 100 microns.
11. The air bearing assembly of claim 8, wherein the plurality of pores of the surface treatment layer have an average pore size greater than or equal to 0.05 microns and less than or equal to 0.15 microns, and an average thickness of the surface treatment layer is less than or equal to 20 microns.
12. An air bearing assembly according to any one of claims 7 to 11 wherein the geometry of the air bearing assembly is a disc, a cuboid or a hollow cylinder.
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| TW110132700 | 2021-09-02 |
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| TWI782690B (en) | 2022-11-01 |
| TW202311114A (en) | 2023-03-16 |
| CN115724682A (en) | 2023-03-03 |
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