CN110315815B - Porous ceramic plate, preparation method and application thereof - Google Patents
Porous ceramic plate, preparation method and application thereof Download PDFInfo
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- CN110315815B CN110315815B CN201910221154.6A CN201910221154A CN110315815B CN 110315815 B CN110315815 B CN 110315815B CN 201910221154 A CN201910221154 A CN 201910221154A CN 110315815 B CN110315815 B CN 110315815B
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- ceramic
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- porous ceramic
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- 239000000919 ceramic Substances 0.000 title claims abstract description 468
- 238000002360 preparation method Methods 0.000 title abstract description 31
- 239000010410 layer Substances 0.000 claims abstract description 244
- 239000002994 raw material Substances 0.000 claims abstract description 160
- 239000011148 porous material Substances 0.000 claims abstract description 72
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 49
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 49
- 239000002344 surface layer Substances 0.000 claims abstract description 43
- 238000005245 sintering Methods 0.000 claims abstract description 20
- 238000003475 lamination Methods 0.000 claims abstract description 10
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 31
- 239000007858 starting material Substances 0.000 claims description 22
- 239000002245 particle Substances 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000000945 filler Substances 0.000 claims description 11
- 238000000465 moulding Methods 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 41
- 235000013980 iron oxide Nutrition 0.000 description 24
- 229910010293 ceramic material Inorganic materials 0.000 description 22
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 12
- 238000001179 sorption measurement Methods 0.000 description 12
- 229910000423 chromium oxide Inorganic materials 0.000 description 11
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 11
- 239000002562 thickening agent Substances 0.000 description 11
- 229920000609 methyl cellulose Polymers 0.000 description 10
- 239000001923 methylcellulose Substances 0.000 description 10
- 235000010981 methylcellulose Nutrition 0.000 description 10
- 239000011230 binding agent Substances 0.000 description 8
- 238000003490 calendering Methods 0.000 description 8
- 229910000428 cobalt oxide Inorganic materials 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 7
- 239000004926 polymethyl methacrylate Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000005096 rolling process Methods 0.000 description 6
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 5
- 238000005265 energy consumption Methods 0.000 description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 239000005751 Copper oxide Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 229910000431 copper oxide Inorganic materials 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- 239000011572 manganese Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000004793 Polystyrene Substances 0.000 description 3
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 3
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 3
- 239000000292 calcium oxide Substances 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229920002472 Starch Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- UBEWDCMIDFGDOO-UHFFFAOYSA-N cobalt(2+);cobalt(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[Co+2].[Co+3].[Co+3] UBEWDCMIDFGDOO-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- UPWOEMHINGJHOB-UHFFFAOYSA-N oxo(oxocobaltiooxy)cobalt Chemical compound O=[Co]O[Co]=O UPWOEMHINGJHOB-UHFFFAOYSA-N 0.000 description 2
- VASIZKWUTCETSD-UHFFFAOYSA-N oxomanganese Chemical compound [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000008107 starch Substances 0.000 description 2
- 235000019698 starch Nutrition 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229940117975 chromium trioxide Drugs 0.000 description 1
- BGGJELJUYBEGKP-UHFFFAOYSA-N chromium(2+);oxygen(2-) Chemical compound [O-2].[Cr+2] BGGJELJUYBEGKP-UHFFFAOYSA-N 0.000 description 1
- GAMDZJFZMJECOS-UHFFFAOYSA-N chromium(6+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+6] GAMDZJFZMJECOS-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000006255 coating slurry Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 1
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 description 1
- 229940112669 cuprous oxide Drugs 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- VBMVTYDPPZVILR-UHFFFAOYSA-N iron(2+);oxygen(2-) Chemical class [O-2].[Fe+2] VBMVTYDPPZVILR-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Images
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/266—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/26—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on ferrites
- C04B35/2658—Other ferrites containing manganese or zinc, e.g. Mn-Zn ferrites
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/636—Polysaccharides or derivatives thereof
- C04B35/6365—Cellulose or derivatives thereof
-
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/06—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof by burning-out added substances by burning natural expanding materials or by sublimating or melting out added substances
- C04B38/063—Preparing or treating the raw materials individually or as batches
- C04B38/0635—Compounding ingredients
- C04B38/0645—Burnable, meltable, sublimable materials
- C04B38/067—Macromolecular compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/14—Semiconductor wafers
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3241—Chromium oxides, chromates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
- C04B2235/775—Products showing a density-gradient
Abstract
The invention provides a porous ceramic plate, a preparation method and application thereof. The preparation method comprises the following steps: step (a): preparing a plurality of ceramic raw materials, wherein the ceramic raw materials respectively comprise a surface layer ceramic raw material and a bottom layer ceramic raw material, and the average grain diameter of metal oxides contained in the surface layer ceramic raw material is less than or equal to 20 micrometers; step (b): respectively carrying out a forming step on the ceramic raw materials to respectively obtain a plurality of green bodies formed by the ceramic raw materials; step (c): stacking the green blanks to form a stack, wherein the stack comprises the green blank formed by the surface layer ceramic raw material and the green blank formed by the bottom layer ceramic raw material; carrying out a forming step on the laminated layer to obtain a formed laminated layer; and, step (d): and sintering the formed lamination to obtain the porous ceramic plate, wherein the porous ceramic plate comprises a surface ceramic layer and a bottom ceramic layer which are mutually overlapped, and the average pore diameter of the surface ceramic layer is smaller than that of the bottom ceramic layer.
Description
Technical Field
The invention relates to a porous ceramic plate, in particular to a porous ceramic plate applied to a vacuum chuck or non-contact application equipment for fixing a wafer or a workpiece, a preparation method of the porous ceramic plate and application of the porous ceramic plate.
Background
In the field of semiconductor manufacturing, in order to maintain stability of a wafer in an automatic transfer process of processing such as cleaning, cutting, grinding, etc., reduce damage to the wafer and improve smoothness of a production line, a vacuum chuck is currently used as a most commonly used carrying adsorption tool, and how to make an adsorption surface of the chuck have high flatness and further improve yield of a wafer manufacturing method becomes a very important issue. Regarding the method for manufacturing the vacuum chuck, japanese patent No. 2779968 discloses a method for manufacturing a vacuum chuck, which comprises firing a raw material of ceramic and organic binder to form a blank, polishing the surface of the chuck to smooth the surface, and forming a ceramic thin film without pores on the surface of the chuck by plasma chemical vapor deposition; although the vacuum chuck with high flatness of the suction surface can be obtained by the preparation method, the preparation method has complicated preparation procedures and high production cost, and is not beneficial to commercial application.
In addition, japanese laid-open patent application No. 2002-373873 discloses a method for preparing a ceramic substrate laminate, which comprises the steps of forming a shape required by each ceramic substrate by mechanical processing of ceramic raw materials and the like, respectively firing the ceramic substrates, performing surface treatment and grooving treatment on the ceramic substrates, and then bonding the ceramic substrates by an inorganic adhesive to obtain the ceramic substrate laminate; however, the preparation process is complicated, energy-consuming, and may result in peeling between the ceramic substrates if the adhesive fails.
Further, korean patent publication No. 101149350 discloses a method for preparing a porous ceramic double layer having different pore sizes, which comprises mixing ceramic raw material powder and an organic binder, followed by a press-forming step of a support layer, and then sintering the support layer having a relatively large pore size by heating; coating slurry mixed with another ceramic raw material powder and an organic binder on one surface of the sintered support layer, and then heating and sintering to form an adsorption layer with smaller pore size by the slurry so as to obtain a double-layer porous ceramic layer with different pore sizes; however, the preparation process of the preparation method is complicated and energy-consuming, and since the adsorption layer slurry is coated on the sintered support layer, the adsorption layer slurry is filled into the holes of the sintered support layer, which causes air resistance difference between the adsorption layer and the support layer, so that the air resistance of the double-layer porous ceramic layer cannot meet the requirement when the double-layer porous ceramic layer is applied to non-contact conveying systems including an air floatation platform, an air floatation slide rail, an air floatation bearing and the like.
Disclosure of Invention
In view of the technical defects of the preparation method, the invention aims to provide a preparation method of a porous ceramic plate, which has simple preparation procedures and can improve the production benefit.
Another object of the present invention is to provide a method for preparing a porous ceramic plate, which can save energy and reduce production costs.
To achieve the above object, the present invention provides a method for preparing a porous ceramic plate, comprising the steps of: step (a): preparing a plurality of ceramic raw materials, wherein the ceramic raw materials respectively comprise a surface layer ceramic raw material and a bottom layer ceramic raw material, and the average grain diameter of metal oxides contained in the surface layer ceramic raw material is less than or equal to 20 micrometers; step (b): respectively carrying out a forming step on the ceramic raw materials to respectively obtain a plurality of green bodies formed by the ceramic raw materials; step (c): stacking the green blanks to form a stack, wherein the stack comprises the green blank formed by the surface layer ceramic raw material and the green blank formed by the bottom layer ceramic raw material; carrying out a forming step on the laminated layer to obtain a formed laminated layer; and, step (d): and sintering the formed lamination to obtain the porous ceramic plate, wherein the porous ceramic plate comprises a surface ceramic layer and a bottom ceramic layer which are mutually overlapped, and the average pore diameter of the surface ceramic layer is smaller than that of the bottom ceramic layer.
The surface layer ceramic raw material and the bottom layer ceramic raw material are respectively formed and then overlapped, and then a sintering step is carried out. Therefore, the porous ceramic plate obtained by the preparation method does not need to be additionally bonded by using an additional adhesive among layers, and the condition that the layers contained in the porous ceramic plate are separated due to the failure of the adhesive is avoided; in addition, the porous ceramic plate obtained by the preparation method has the characteristic of uniform overall pore distribution, and further has the advantage of good uniform air permeability. The surface ceramic layer of the porous ceramic plate has fine average pore size by limiting the average particle size range of the metal oxide contained in the surface ceramic raw material, so that the workpiece can be kept flat and not deformed even when the porous ceramic plate is used for adsorbing and fixing a thin workpiece (such as a wafer) so as to be beneficial to accurate measurement or processing of the workpiece; and when the porous ceramic plate is subsequently connected with a vacuum or gas supply system, the bottom ceramic layer connected with the system has larger average pore diameter so as to reduce gas resistance, further reduce energy consumption and ensure that the porous ceramic plate simultaneously achieves the effects of rigidity and gas permeability. When the air cushion is applied to a non-contact type conveying system, a uniform and stable air cushion layer can be provided, the flatness of the surface of an object is kept, and the air cushion can be applied to conveying the object with high precision or large area.
Preferably, the average particle diameter of the metal oxide contained in the surface layer ceramic raw material used in the step (a) is 10 μm or less; more preferably, the surface ceramic raw material used in step (a) contains metal oxide having an average particle diameter in a range of 0.01 to 8 μm.
In one embodiment, the plurality of ceramic raw materials may be represented as two ceramic raw materials, and in this embodiment, the plurality of ceramic raw materials are a surface layer ceramic raw material and a bottom layer ceramic raw material; in another embodiment, the plurality of ceramic raw materials may also be represented as three ceramic raw materials, in which case the plurality of ceramic raw materials are a surface layer ceramic raw material, a first middle layer ceramic raw material, and a bottom layer ceramic raw material; in yet another embodiment, the plurality of ceramic starting materials may be further represented as four ceramic starting materials, and in this embodiment, the plurality of ceramic starting materials are a surface layer ceramic starting material, a first intermediate layer ceramic starting material, a second intermediate layer ceramic starting material, and a bottom layer ceramic starting material. The ceramic starting material to which the present invention is applicable is illustrated here, but is not limited to the above three embodiments.
Therefore, when the ceramic raw materials are more than two ceramic raw materials, the porous ceramic plate further comprises at least one intermediate ceramic layer formed by the intermediate ceramic raw materials, the average pore size of the surface ceramic layer is smaller than that of the intermediate ceramic layer, and the average pore size of the intermediate ceramic layer is smaller than that of the bottom ceramic layer. For example, when the ceramic raw materials are three ceramic raw materials, the first intermediate layer ceramic raw material may form a first intermediate layer ceramic layer, the average pore size of the surface layer ceramic layer is smaller than the average pore size of the first intermediate layer ceramic layer, and the average pore size of the first intermediate layer ceramic layer is smaller than the average pore size of the bottom layer ceramic layer; when the ceramic raw materials are four ceramic raw materials, the first intermediate layer ceramic material and the second intermediate layer ceramic material can form a first intermediate layer ceramic layer and a second intermediate layer ceramic layer, the average pore size of the surface layer ceramic layer is smaller than that of the first intermediate layer ceramic layer, the average pore size of the first intermediate layer ceramic layer is smaller than that of the second intermediate layer ceramic layer, and the average pore size of the second intermediate layer ceramic layer is smaller than that of the bottom layer ceramic layer. The average pore size of the intermediate layer ceramic layer formed by the intermediate layer ceramic raw material is between the average pore sizes of the surface layer ceramic layer and the bottom layer ceramic layer, so that ventilation from the bottom layer ceramic layer to the surface layer ceramic layer can be smoother.
In order to make the average pore diameters of the ceramic layers different in the porous ceramic plate, it is preferable that the average particle diameters of the metal oxides contained in the ceramic raw materials in step (a) are different; for example, when the ceramic materials are two ceramic materials, the average particle size of the metal oxide contained in the surface layer ceramic material is smaller than the average particle size of the metal oxide contained in the bottom layer ceramic material; when the ceramic raw materials are three ceramic raw materials, the average particle size of the metal oxide contained in each of the surface layer ceramic raw material, the first intermediate layer ceramic raw material and the bottom layer ceramic raw material is from the metal oxide contained in the surface layer ceramic raw material to the metal oxide contained in the first intermediate layer ceramic raw material to the metal oxide contained in the bottom layer ceramic raw material in order from small to large; when the ceramic raw materials are four kinds of ceramic raw materials, the average particle size of the metal oxide contained in each of the surface layer ceramic raw material, the first intermediate layer ceramic raw material, the second intermediate layer ceramic raw material and the bottom layer ceramic raw material is, in order from the metal oxide contained in the surface layer ceramic raw material, the metal oxide contained in the first intermediate layer ceramic raw material, the metal oxide contained in the second intermediate layer ceramic raw material to the metal oxide contained in the bottom layer ceramic raw material from small to large. Then, in the step (c), the green compacts are stacked in order of the average particle size of the metal oxide contained in the ceramic material contained in each green compact to form the stack.
In some embodiments, the ceramic raw materials in step (a) may further include pore-forming fillers that are easily burned or decomposed to create pores, such as: calcium carbonate (CaCO)3) Magnesium carbonate (MgCO)3) Poly (methyl methacrylate), PMMA), Polystyrene (Polystyrene, PS), or the like, but not limited thereto. For example, the pore-forming filler is added to only the bottom ceramic material in step (a), or the pore-forming filler is added to both the middle ceramic material and the bottom ceramic material in step (a), so as to increase the average pore size and porosity of the bottom ceramic layer and/or the middle ceramic layer.
In some embodiments, the plurality of ceramic starting materials of step (a) may each include a thickening agent, such as: starch (Starch), Methyl Cellulose (Methyl Cellulose), and the like, but is not limited thereto. By adding the thickening agent into the ceramic raw materials, all components in the ceramic raw materials can be uniformly mixed, so that the pore uniformity of the porous ceramic plate can be improved; in addition, the thickening agent is usually a material that can be burned off, and can also improve the porosity and air permeability of the ceramic plate.
According to the present invention, the forming step in step (b) and step (c) may use injection molding, pressure molding, extrusion molding, or calendar molding, but is not limited thereto. Preferably, in the step (b), the surface layer ceramic raw material and the base layer ceramic raw material are each formed by a rolling forming method; preferably, the lamination in step (c) is also subjected to a forming step using a calendar forming method. The ceramic raw materials or the laminated layers are rolled by using a horizontal roller, so that the process is simple, and the thickness required by each layer can be achieved without thickening for many times.
Preferably, the calendering method used in step (b) has a calendering force of more than 10 mg per square centimeter, a calendering temperature of between 0 ℃ and 100 ℃ and a calendering environment humidity of between 0 and 100 relative humidity.
Preferably, the calendering method used in step (c) has a calendering force of more than 1000 mg per square centimeter, a calendering temperature of between 15 ℃ and 40 ℃ and a calendering environment humidity of between 40 and 100 relative humidity.
In some embodiments, the metal oxide contained in the plurality of ceramic raw materials in step (a) includes, but is not limited to, iron (Fe), manganese (Mn), chromium (Cr), cobalt (Co), magnesium (Mg), calcium (Ca), copper (Cu), aluminum (Al), and the like. For example, iron oxides include ferrous oxide (FeO), ferric oxide (Fe)2O3) Etc., but are not limited thereto; the manganese oxide includes manganese monoxide (MnO) and manganomanganic oxide (Mn)3O4) Manganese oxide (Mn)2O3) Manganese dioxide (MnO)2) Etc., but are not limited thereto; the chromium oxide includes chromium monoxide (CrO) and chromium sesquioxide (Cr)2O3) Chromium trioxide (CrO)3) Etc., but are not limited thereto; the cobalt oxide comprises cobalt monoxide (CoO) and cobalt sesquioxide (Co)2O3) Cobaltosic oxide (Co)3O4) Etc., but are not limited thereto; the copper oxide comprises cuprous oxide (Cu)2O), copper oxide (CuO), and the like, but is not limited thereto. The properties such as conductivity and mechanical strength of the porous ceramic plate as a whole can be adjusted according to the properties of the metal oxide contained in the ceramic material. For example, in order to adjust the conductivity, the ceramic raw material may include metal oxides such as iron oxide, copper oxide, manganese oxide, etc., but is not limited thereto; preferably, the ceramic raw materials contain iron oxide in an amount of 20 wt% or more based on the total weight of the ceramic raw materials; more preferably, the ceramic starting materials comprise iron oxide in an amount of 30 to 80% by weight based on the total weight of the ceramic starting materials. Preferably, the ceramic starting materials contain copper oxide in an amount of 0.01 wt% or more based on the total weight of the ceramic starting materials; more preferably, the ceramic starting materials contain copper oxide in an amount of 0.01 to 50% by weight based on the total weight of the ceramic starting materials. In order to adjust the mechanical strength, the ceramic raw material may include metal oxides such as manganese oxide, cobalt oxide, magnesium oxide, etc., but is not limited thereto; preferably, the ceramic raw materials contain manganese oxide in an amount of 0.01 wt% or more based on the total weight of the ceramic raw materials; more preferably, the ceramic starting materials contain manganese oxide in an amount of 0.01 to 80% by weight based on the total weight of the ceramic starting materials. Preferably, the cobalt oxide contained in these ceramic raw materials contains cobalt oxide in an amount of 0.01 wt% or more based on the total weight of these ceramic raw materials; more preferably, the ceramic starting materials contain cobalt oxide in an amount of 0.01 to 50 weight percent based on the total weight of the ceramic starting materials.
In some embodiments, the plurality of ceramic starting materials in step (a) may not contain silicon carbide or other high hardness particles (e.g., diamond) to avoid the hardness of the finally formed porous ceramic plate from being too high to scratch the wafer or workpiece easily.
Other auxiliary additives such as a binder, a thermal expansion control agent, a conductivity control agent, an antistatic agent, a mechanical strength control agent, a friction coefficient adjusting agent, and the like may be added to the ceramic raw materials according to the use requirements without affecting the effect of the method for manufacturing the porous ceramic plate of the present invention.
Sintering is to react the green bodies in a high-temperature environment, and heat the bonding agent in the ceramic raw materials to be higher than the glass transition temperature of the bonding agent so as to bond the ceramic raw materials to form a uniform solid phase; therefore, the selection of the sintering temperature is also influenced by the different types of binders. The environmental temperature during the sintering process affects the pore size, pore distribution, structural shape and material composition in the porous ceramic plate, and further affects the performance of the porous ceramic plate. When the sintering temperature is too high, the thermal stress generated by the ceramic plate is too large, which may cause the ceramic plate after sintering to warp, and the ceramic plate to crack or even break. Preferably, the sintering temperature in step (d) is from 500 ℃ to 1250 ℃, more preferably, the sintering temperature in step (d) is from 520 ℃ to 950 ℃. The sintering temperature in the range can reduce the energy consumption and simultaneously improve the yield of the porous ceramic plate obtained after sintering.
In addition, the invention also provides the porous ceramic plate prepared by the preparation method of the porous ceramic plate.
Another object of the present invention is to provide a porous ceramic plate comprising a top ceramic layer and a bottom ceramic layer stacked on each other, the top ceramic layer having an average pore size smaller than that of the bottom ceramic layer. The porous ceramic plate has the characteristic of uniform overall pore distribution, so that the porous ceramic plate has the advantage of good air permeability, and the problem of energy consumption caused by high air resistance of the conventional porous ceramic plate can be solved.
In some embodiments, the porous ceramic plate further comprises at least one intermediate ceramic layer, the intermediate ceramic layer being located between the top ceramic layer and the bottom ceramic layer; the average pore diameter of the surface ceramic layer is smaller than that of the intermediate ceramic layer, and the average pore diameter of the intermediate ceramic layer is smaller than that of the bottom ceramic layer.
In some embodiments, the porosity of the top ceramic layer of the porous ceramic plate is between 15% and 60%, and the porosity of the bottom ceramic layer of the porous ceramic plate is between 30% and 90%. Preferably, the porosity of the top ceramic layer of the porous ceramic plate is between 20% and 50%, and the porosity of the bottom ceramic layer of the porous ceramic plate is between 35% and 65%.
In some embodiments, the porous ceramic plate has an overall porosity of between 30% and 85%. Preferably, the porous ceramic plate has an overall porosity of 30 to 70%.
In some embodiments, the top ceramic layer of the porous ceramic plate has an average pore size of 0.05 micrometers (μm) to 10 μm, and the bottom ceramic layer of the porous ceramic plate has an average pore size of 5 μm to 3000 μm. Preferably, the average pore diameter of the surface ceramic layer of the porous ceramic plate is between 0.3 μm and 5 μm, and the average pore diameter of the bottom ceramic layer of the porous ceramic plate is between 20 μm and 1500 μm. More preferably, the average pore size of the top ceramic layer of the porous ceramic plate is between 0.3 μm and 2 μm, and the average pore size of the bottom ceramic layer of the porous ceramic plate is between 30 μm and 1000 μm.
The porous ceramic plate has a total thickness of more than 200 μm for providing better supporting force, and thus, in some embodiments, the total thickness of the porous ceramic plate is between 200 μm and 20000 μm. Preferably, the surface ceramic layer of the porous ceramic plate has a thickness of 20 μm to 10000 μm; more preferably, the surface ceramic layer of the porous ceramic plate has a thickness of 30 μm to 5000 μm; more preferably, the surface ceramic layer of the porous ceramic plate has a thickness of 50 to 2000 μm.
In order to improve the conductivity, it is preferable that the porous ceramic plate contains iron oxide in a total amount of 10 wt% or more based on the total weight of the porous ceramic plate. More preferably, the porous ceramic plate contains iron oxide in a total amount of 30 wt% or more based on the total weight of the porous ceramic plate.
The porous ceramic plate of the present invention may also be subjected to surface treatment, such as: fluororesin processing, anodic oxidation treatment, electroless metal plating, plating treatment, or the like, but is not limited thereto.
In some embodiments, the porous ceramic plate may have a shape of a circle, a square, a polygon, a semi-cylinder, a cylinder, or the like, but is not limited thereto.
In some embodiments, the porous ceramic plate further comprises a plurality of gas channels extending through the top layer and the bottom layer, each gas channel having a width of 0.1 μm to 3000 μm.
Another objective of the present invention is to provide a vacuum chuck, which comprises a porous ceramic plate and a bottom plate having a surface connected to the porous ceramic plate.
In some embodiments, the surface of the bottom plate to which the porous ceramic plate is attached includes a plurality of vacuum grooves.
Another objective of the present invention is to provide a non-contact application apparatus, which includes a porous ceramic plate as described above and a body, wherein a surface of the body facing the porous ceramic plate includes at least one vent groove. For example, the non-contact application device can be a non-contact conveying system or a precision detection platform, but is not limited thereto.
When the air groove included in the non-contact application equipment is connected with a vacuum generating system, the air groove is a vacuum groove and can provide suction; when the vent groove contained in the non-contact application equipment is connected with an air supply system, the vent groove is the air supply groove and can provide thrust; in addition, the vacuum grooves and the air supply grooves can be arranged at intervals to provide balanced suction and thrust simultaneously, so that a stable air cushion layer is provided, the workpiece can be stably maintained, and the workpiece is not easy to take down from the body.
The non-contact conveying system has the advantages of zero friction force, zero loss, no need of lubricating oil, high speed, stability and the like, reduces the problems of collision or scratch in the conveying process, reduces the possibility of static electricity generated by friction due to non-contact, improves the yield of the manufacturing method, and is suitable for conveying high-precision or large-area objects, such as large-size liquid crystal displays and the like, but the non-contact conveying system is not limited to the above. The non-contact type conveying system comprises an air-floating platform, an air-floating slide rail, an air-floating bearing and the like, but is not limited to the above.
The precision detection platform can provide stable floating height due to the fact that the precision detection platform is provided with the stable and uniform air cushion layer, a workpiece is maintained not to shake, the plane precision is regulated and controlled to be below several micrometers, the bending problem caused by the weight of the workpiece is solved, more accurate positioning and smaller operation errors are provided, and the precision detection platform can be applied to the design of a large detection platform.
Drawings
Fig. 1 is a schematic cross-sectional view of example 1 of the present invention.
Fig. 2 is an SEM photograph of the surface ceramic layer of example 1 of the present invention.
Fig. 3 is an SEM photograph of the underlying ceramic layer of example 1 of the present invention.
Fig. 4 is an SEM photograph of the underlying ceramic layer of example 2 of the present invention.
FIG. 5 is an SEM photograph of example 3 of the present invention.
FIG. 6 is a schematic cross-sectional view of example 4 of the present invention.
Fig. 7 is an SEM photograph of the underlying ceramic layer of example 4 of the present invention.
FIG. 8 is an SEM photograph of example 5 of the present invention.
Fig. 9 is a schematic side view of embodiment 6 of the present invention.
FIG. 10 is a schematic view of a work piece being sucked in accordance with example 6 of the present invention.
Fig. 11 is a schematic side view of example 7 of the present invention.
FIG. 12 is a schematic side view of example 8 of the present invention.
Detailed Description
Hereinafter, those skilled in the art can easily understand the advantages and effects of the present invention from the following examples. Accordingly, it should be understood that the description set forth herein is intended merely to illustrate preferred embodiments and not to limit the scope of the invention, which can be modified, altered, modified, etc. in order to make or use the teachings of the present invention without departing from its spirit and scope.
After the porous ceramic plates were fabricated in the following examples 1 to 5, the porosity of the porous ceramic plates was measured by archimedes method, and the appearance of the porous ceramic plates was observed by using a Scanning Electron Microscope (SEM) of hitachi FlexSEM 1000.
Preparation method of porous ceramic plate of example 1
Firstly, preparing a surface layer ceramic raw material and a bottom layer ceramic raw material: the surface ceramic raw material comprises methylcellulose serving as a thickening agent and metal oxides of iron oxide, manganese oxide and chromium oxide, wherein the iron oxide accounts for 30 wt% of the total weight of the surface ceramic raw material, and the manganese oxide accounts for 40 wt% of the total weight of the surface ceramic raw material; the grain diameter of the metal oxide in the surface layer ceramic raw material is 0.3-1.5 μm, and the average grain diameter is 0.5 μm; the bottom ceramic raw material comprises methyl cellulose as a thickening agent and metal oxides of iron oxide, manganese oxide and chromium oxide, wherein the iron oxide accounts for 30 wt% of the total weight of the bottom ceramic raw material, and the manganese oxide accounts for 40 wt% of the total weight of the bottom ceramic raw material; the grain size of the metal oxide in the bottom layer ceramic raw material is 3-15 μm, the average grain size is 8 μm, which is larger than the average grain size of the metal oxide in the surface layer ceramic raw material.
Then, the surface layer ceramic raw material and the bottom layer ceramic raw material are respectively rolled and formed by a rolling forming method to obtain a square blank formed by the surface layer ceramic raw material and a square blank formed by the bottom layer ceramic raw material.
And then placing the green body formed by the surface layer ceramic raw material above the green body formed by the bottom layer ceramic raw material, after the two green bodies are overlapped to form a lamination, rolling the lamination by a rolling forming method to obtain a formed lamination, and cutting and processing before or after sintering according to the required shape.
The formed laminate was sintered at 950 ℃ for 7 hours to obtain a two-layered porous ceramic plate 10 including a top ceramic layer 110 and a bottom ceramic layer 120, the cross-sectional structure of which is shown in fig. 1.
The double-layered porous ceramic plate 10 of example 1 had a total thickness of 5000 μm, and the surface ceramic layer 110 had a thickness of 500 μm. In addition, the double-layered porous ceramic plate 10 includes iron oxide in a total content of 30 wt% and manganese oxide in a total content of 40 wt%, based on the total weight of the double-layered porous ceramic plate 10.
Referring to fig. 1, the top layer 110 includes a plurality of metal oxide particles 111 and a plurality of pores 112, and the bottom layer 120 includes a plurality of metal oxide particles 121 and a plurality of pores 122.
Referring to fig. 2 and 3, the average pore size of the top ceramic layer 110 is 0.5 μm and the average pore size of the bottom ceramic layer 120 is 5 μm, as observed by a scanning electron microscope.
It was measured that the porosity of the top ceramic layer 110 was about 36%, the porosity of the bottom ceramic layer 120 was about 45%, and the overall porosity of the double-layered porous ceramic plate 10 was about 44%.
Preparation method of porous ceramic plate of example 2
The preparation method of example 2 is similar to the preparation method of example 1 in steps, with the difference that: PMMA balls serving as pore-forming fillers are added into the bottom ceramic raw material, and account for 7 wt% of the total weight of the bottom ceramic raw material. Because the pore-forming filler is added into the bottom ceramic raw material, the bottom ceramic layer of the double-layer porous ceramic plate not only has pores formed by the original stacking and sintering of the ceramic raw materials, but also has larger pores formed by the loss of the pore-forming filler, so that the average pore diameter of the bottom ceramic layer is increased, the porosity of the bottom ceramic layer is greatly increased, and the air resistance is reduced. The double-layered porous ceramic plate of example 2, whose surface ceramic layer had an average pore size of 0.5 μm and whose porosity was about 36%; referring to fig. 4, the average pore size of the bottom ceramic layer is 8 μm, and the porosity thereof is about 55%, while the overall porosity of the double-layered porous ceramic plate is about 53%.
Preparation method of porous ceramic plate of example 3
The preparation method of example 3 is similar to the preparation method of example 1 in steps, with the difference that: the surface ceramic material and the base ceramic material or contents of each of examples 1 and 3 were different. The surface ceramic raw material comprises methylcellulose serving as a thickening agent and metal oxides of iron oxide, manganese oxide and chromium oxide, wherein the iron oxide accounts for 30 wt% of the total weight of the surface ceramic raw material, and the manganese oxide accounts for 40 wt% of the total weight of the surface ceramic raw material; the grain size of the metal oxide in the surface layer ceramic raw material is 3-15 μm, and the average grain size is 8 μm. The bottom ceramic material is similar to the surface ceramic material except that PMMA balls as pore-forming filler are added into the bottom ceramic material, and account for 7 wt% of the total weight of the bottom ceramic material. The pore-forming filler is added into the bottom ceramic raw material, so that after the bottom ceramic layer of the double-layer porous ceramic plate is sintered, the pores formed by the original ceramic raw materials after being stacked and sintered are also larger pores formed by the loss of the pore-forming filler, the average pore diameter of the bottom ceramic layer is increased, the porosity of the bottom ceramic layer is greatly increased, and the air resistance is reduced. Referring to fig. 5, the surface ceramic layer of the double-layered porous ceramic plate of example 3 has an average pore size of 5 μm and a porosity of about 45%; the average pore size of the underlying ceramic layer was 8 μm and the porosity thereof was about 55%, while the overall porosity of the double-layered porous ceramic plate was about 52%.
Preparation method of porous ceramic plate of example 4
Firstly, preparing a surface layer ceramic raw material, a middle layer ceramic raw material and a bottom layer ceramic raw material: the surface ceramic raw material comprises silicon dioxide and aluminum oxide as binders, methyl cellulose as a thickening agent, and metal oxides of iron oxide, manganese oxide, chromium oxide, cobalt oxide, calcium oxide, magnesium oxide and aluminum oxide, wherein the iron oxide accounts for 20 wt% of the total weight of the surface ceramic raw material, and the chromium oxide accounts for 15 wt% of the total weight of the surface ceramic raw material; the grain size of the metal oxide in the surface layer ceramic raw material is 0.3-1.5 μm, and the average grain size is 0.5 μm. The middle layer ceramic raw material comprises silicon dioxide and aluminum oxide as binders, methyl cellulose as a thickening agent, and metal oxides of iron oxide, manganese oxide, chromium oxide, cobalt oxide, calcium oxide, magnesium oxide and aluminum oxide, wherein the iron oxide accounts for 20 wt% of the total weight of the middle layer ceramic raw material, and the chromium oxide accounts for 15 wt% of the total weight of the surface layer ceramic raw material; the particle size of the metal oxide in the intermediate layer ceramic raw material is 3-15 μm, and the average particle size is 8 μm. The bottom ceramic raw material comprises silicon dioxide as a binder, methyl cellulose as a thickening agent, and metal oxides of iron oxide, manganese oxide, chromium oxide, cobalt oxide, calcium oxide, magnesium oxide and aluminum oxide, wherein the iron oxide accounts for 20 wt% of the total weight of the surface ceramic raw material; the grain size of the metal oxide in the bottom layer ceramic raw material is 20-100 μm, and the average grain size is 60 μm.
Then, the surface layer ceramic raw material, the middle layer ceramic raw material and the bottom layer ceramic raw material are respectively rolled and formed by a rolling forming method to obtain a green body formed by the surface layer ceramic raw material, a green body formed by the middle layer ceramic raw material and a green body formed by the bottom layer ceramic raw material.
Placing the green body formed by the middle layer ceramic raw material above the green body formed by the bottom layer ceramic raw material; then, the green body formed by the surface layer ceramic raw material is placed above the green body formed by the middle layer ceramic raw material, the three green bodies are overlapped to form a lamination, and the lamination is rolled and formed by a rolling forming method to obtain a formed lamination.
The formed laminate was sintered at a temperature of 950 c for 7 hours to obtain a three-layered porous ceramic plate 10' including a surface ceramic layer 110, an intermediate ceramic layer 130 and a bottom ceramic layer 120, the cross-sectional structure of which is shown in fig. 6.
The three-layered porous ceramic plate 10' has a total thickness of 5000 μm, in which the surface ceramic layer has a thickness of 500 μm and the intermediate ceramic layer has a thickness of 500 μm. In addition, the three-layered porous ceramic plate 10 'includes iron oxide in an amount of 20% by weight, based on the total weight of the three-layered porous ceramic plate 10'.
Referring to fig. 6, the top layer 110 includes a plurality of metal oxide particles 111 and a plurality of pores 112, the middle layer 130 includes a plurality of metal oxide particles 131 and a plurality of pores 132, and the bottom layer 120 includes a plurality of metal oxide particles 121 and a plurality of pores 122.
As observed in the same manner as above, the porosity of the surface ceramic layer 110 is about 36%, the porosity of the intermediate ceramic layer 130 is about 45%, the porosity of the bottom ceramic layer 120 is 55%, and the overall porosity of the three-layered porous ceramic plate 10' is about 53%.
The average pore size of the top ceramic layer 110 was 0.5 μm and the average pore size of the middle ceramic layer 130 was 5 μm, as measured by the same method as described above, and referring to fig. 7, the average pore size of the bottom ceramic layer 120 was 40 μm.
Preparation method of porous ceramic plate of example 5
The preparation method of example 5 is similar to the preparation method of example 4 in steps, with the difference that: examples 4 and 5 each selected a different amount or content of the surface layer ceramic material, the intermediate layer ceramic material, and the bottom layer ceramic material. The surface layer ceramic material of example 5 was the same as the surface layer ceramic material of example 1; the intermediate layer ceramic raw material of example 5 includes methylcellulose as a thickener, and metal oxides of iron oxide, manganese oxide, and chromium oxide, and the iron oxide accounts for 30 wt% and the manganese oxide accounts for 40 wt% of the total weight of the intermediate layer ceramic raw material; the grain size of the metal oxide in the middle layer ceramic raw material is 3-15 μm, the average grain size is 8 μm, which is larger than the average grain size of the metal oxide in the surface layer ceramic raw material; the bottom ceramic raw material of example 5 includes methyl cellulose as a thickener, PMMA spheres as a pore-forming filler, and metal oxides of iron oxide, manganese oxide, and chromium oxide, and the iron oxide accounts for 30 wt% and the manganese oxide accounts for 40 wt% of the total weight of the bottom ceramic raw material; the grain size of the metal oxide in the bottom layer ceramic raw material is 3-15 μm, the average grain size is 8 μm, which is larger than the average grain size of the metal oxide in the surface layer ceramic raw material; in addition, example 5 contains PMMA spheres in an amount of more than 7 wt% based on the total weight of the underlying ceramic raw material, and has a particle size larger than that of the PMMA spheres used in example 2. Referring to fig. 8, the three-layered porous ceramic plate of example 5 has an average pore size of 0.5 μm in the top ceramic layer, 5 μm in the middle ceramic layer, 40 μm in the bottom ceramic layer, about 36% in the top ceramic layer, about 45% in the middle ceramic layer, and about 55% in the bottom ceramic layer, and about 52% in the entire porosity.
Vacuum chuck of example 6
Referring to fig. 9, embodiment 6 is a vacuum chuck comprising the porous ceramic plate 10 of embodiment 1 and a bottom plate 20, wherein the bottom plate 20 has a surface 201 connected to the porous ceramic plate 10. The surface 201 of the base plate 20 includes a plurality of vacuum grooves 22 and a vacuum pipeline 21, and the vacuum grooves 22 are connected to the vacuum pipeline 21. Referring to fig. 10, the vacuum chuck may further include a fixing member 40 for fixing the position of the porous ceramic plate 10.
Referring to fig. 9 and 10, a vacuum generating system (not shown) may be connected to the vacuum line 21 of the bottom plate 20 of the vacuum chuck of embodiment 6. The negative pressure suction force provided by the vacuum generating system is distributed to the plurality of vacuum grooves 22 of the bottom plate 20 and passes through the plurality of holes included in the porous ceramic plate 10 to form a plurality of uniform suction forces, so that not only a workpiece 30 can be adsorbed and fixed, but also the workpiece 30 can be maintained stable to prevent the workpiece 30 from being damaged.
Precision detection platform of embodiment 7
Referring to fig. 11, an embodiment 7 is a precision inspection platform, which includes the porous ceramic plate 10 of embodiment 1 and a body 50, wherein the body 50 has a surface 501 facing the porous ceramic plate 10. The surface 501 comprises a plurality of vacuum grooves 22 and a plurality of gas supply grooves 24; the vacuum tanks 22 are communicated with a vacuum line 21, and the gas supply tanks 24 are communicated with a gas supply line 23. A vacuum generating system (not shown) is connected to the vacuum line 21, and a gas supply system (not shown) is connected to the gas supply line 23. The negative pressure suction force provided by the vacuum generating system is distributed to the plurality of vacuum grooves 22 of the body 50 and passes through the plurality of holes included in the porous ceramic plate 10 to form a plurality of uniform suction forces; the thrust force provided by the gas supply system is distributed to the gas supply grooves 24 of the body 50 and passes through a plurality of holes included in the porous ceramic plate 10, forming a plurality of uniform thrust forces. The suction force and the thrust force formed by the vacuum grooves and the air supply grooves at intervals are used for providing a stable air cushion layer.
Embodiment 8 non-contact conveying System
Referring to fig. 12, embodiment 8 is a non-contact type delivery system, which includes the porous ceramic plate 10 of embodiment 1 and a body 50 ', the body 50' having a surface 501 "facing the porous ceramic plate 10. The surface 501 "includes a gas feed slot 24 therein, and the gas feed slot 24 is in communication with a gas feed line 23. Thrust generated by gas supplied by a gas supply system (not shown) is formed through a plurality of holes included in the porous ceramic plate 10 to form a plurality of uniform thrust, provide a stable gas cushion layer and provide a transportation function.
Discussion of Experimental results
Compared with the existing preparation method, the preparation method provided by the invention has the advantages that the steps are simple, the operation is easy, the manufacturing method is easy to control, and the production yield of the porous ceramic plate is improved; and because only one-time sintering is carried out, the preparation procedure can be simplified and energy can be saved; in addition, the porous ceramic plates of examples 1 to 5 were uniformly distributed in pores and had good air permeability due to the one-time sintering, thereby improving the quality of the porous ceramic plates.
The surface ceramic layer of the porous ceramic plate has smaller average pore size, so that the workpiece can be kept flat and not deformed even when the porous ceramic plate is used for fixing a very thin workpiece (such as a wafer), and the porous ceramic plate is favorable for accurately measuring or processing the workpiece; when the porous ceramic plate is subsequently connected with a vacuum system, the air resistance is reduced due to the fact that the bottom ceramic layer has a larger average pore size, energy consumption can be reduced, and sufficient supporting force can be provided. In addition, because the surface ceramic layer has smaller average pore size, when the ceramic layer is used as an adsorption platform, the ceramic layer can be applied to local adsorption because of low air leakage, namely, the adsorbed workpiece does not need to completely cover the adsorption platform. In addition, because the middle layer ceramic layer and/or the bottom layer ceramic layer with larger pore diameters are compounded on the lower layer of the surface layer ceramic layer of the porous ceramic plate, the porous ceramic plate can provide larger supporting force and larger adsorption force, reduce air resistance and maintain the rigidity of the whole ceramic plate, achieve larger adsorption force and reduce energy consumption, and avoid the problems of overlarge air resistance and reduced surface adsorption force caused by the fact that the whole porous ceramic plate has fine pore diameters.
While the foregoing description has set forth various features, advantages, and details of the invention, it is to be understood that this is by way of example only. Changes in detail, especially in matters of shape, size and arrangement of parts within the principles of the invention, all within the scope of the invention as expressed in the general meaning of the claims, are intended to be within the scope of the invention.
Claims (13)
1. A method for preparing a porous ceramic plate, comprising the following steps:
step a): preparing a plurality of ceramic raw materials, wherein the ceramic raw materials respectively comprise a surface layer ceramic raw material and a bottom layer ceramic raw material, and the average grain diameter of metal oxides contained in the surface layer ceramic raw material is less than or equal to 20 micrometers; the iron oxide content of the ceramic raw materials accounts for more than 20 weight percent of the total weight of the ceramic raw materials, and the ceramic raw materials do not contain silicon carbide;
step b): respectively carrying out a forming step on the ceramic raw materials to respectively obtain a plurality of green bodies formed by the ceramic raw materials;
step c): stacking the green blanks to form a stack, wherein the stack comprises the green blank formed by the surface layer ceramic raw material and the green blank formed by the bottom layer ceramic raw material; carrying out a forming step on the laminated layer to obtain a formed laminated layer; and
step d): sintering the formed laminate to obtain a porous ceramic plate, wherein the porous ceramic plate comprises a surface ceramic layer and a bottom ceramic layer which are mutually laminated; the average pore diameter of the surface ceramic layer is 0.3 to 10 microns, and the average pore diameter of the bottom ceramic layer is 20 to 3000 microns; the porous ceramic plate has an overall porosity of 30 to 85% and the bottom ceramic layer has a porosity of 55 to 90%.
2. The method of manufacturing porous ceramic plates according to claim 1, wherein the average particle size of the metal oxide contained in the top ceramic raw material is smaller than the average particle size of the metal oxide contained in the bottom ceramic raw material.
3. The method of preparing porous ceramic plate as claimed in claim 1, wherein pore-forming filler is added to the underlying ceramic raw material.
4. The method for preparing porous ceramic plates according to claim 1, wherein the ceramic raw materials in step b) are each subjected to the forming step using a calendar forming method.
5. The method for preparing porous ceramic plate according to claim 4, wherein the lamination in step c) uses a calendar molding method to perform the forming step.
6. The method for preparing porous ceramic plates according to any one of claims 1 to 5, wherein the plurality of ceramic starting materials of step a) further comprises at least one intermediate layer ceramic starting material; and
in the step d), the porous ceramic plate further comprises at least one intermediate ceramic layer, the average pore size of the surface ceramic layer is smaller than that of the intermediate ceramic layer, and the average pore size of the intermediate ceramic layer is smaller than that of the bottom ceramic layer.
7. The method for preparing porous ceramic plates according to any one of claims 1 to 5, wherein the sintering temperature in the step d) is 500 to 1250 ℃.
8. A porous ceramic plate obtained by the production method according to any one of claims 1 to 7; the porous ceramic plate comprises a surface ceramic layer and a bottom ceramic layer which are mutually overlapped; wherein the average pore size of the surface ceramic layer is 0.3 to 10 microns, and the average pore size of the bottom ceramic layer is 20 to 3000 microns; the overall porosity of the porous ceramic plate is between 30 and 85 percent, and the porosity of the bottom ceramic layer is between 55 and 90 percent; the porous ceramic plate contains iron oxide in an amount of 20 wt% or more based on the total weight of the porous ceramic plate.
9. The porous ceramic plate as claimed in claim 8, wherein the porous ceramic plate further comprises at least one intermediate ceramic layer between the top ceramic layer and the bottom ceramic layer; the average pore diameter of the surface ceramic layer is smaller than that of the intermediate ceramic layer, and the average pore diameter of the intermediate ceramic layer is smaller than that of the bottom ceramic layer.
10. The porous ceramic plate as claimed in claim 8, wherein the top ceramic layer has a porosity of 15 to 60% and the bottom ceramic layer has a porosity of 55 to 65%.
11. The porous ceramic plate as claimed in any one of claims 8 to 10, wherein the total thickness of the porous ceramic plate is between 200 microns and 20000 microns, and the surface ceramic layer has a thickness of 20 microns to 10000 microns.
12. A vacuum chuck comprising a porous ceramic plate according to any one of claims 8 to 11 and a bottom plate having a surface connected to the porous ceramic plate.
13. A non-contact application apparatus comprising a porous ceramic plate according to any one of claims 8 to 11 and a body comprising at least one vent channel on a surface of the body facing the porous ceramic plate.
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| TW107111055A TWI656108B (en) | 2018-03-29 | 2018-03-29 | Porous ceramic plate, preparation method thereof and application thereof |
| TW107111055 | 2018-03-29 |
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| TWI706930B (en) * | 2019-07-24 | 2020-10-11 | 日商京瓷股份有限公司 | Ceramic article |
| CN111170759B (en) * | 2020-01-13 | 2022-04-29 | 山东晟世达科技有限公司 | Method for manufacturing non-mould naked-firing foamed ceramic |
| CN113061051B (en) * | 2021-03-17 | 2022-06-17 | 南京航空航天大学 | Porous ceramic for air bearing and preparation method and application thereof |
| TWI782690B (en) * | 2021-09-02 | 2022-11-01 | 中國砂輪企業股份有限公司 | Air floating unit and method of making the same |
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| CN110315815A (en) | 2019-10-11 |
| TW201942095A (en) | 2019-11-01 |
| TWI656108B (en) | 2019-04-11 |
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