CN115615550A - Linear moving mirror mechanism - Google Patents
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- CN115615550A CN115615550A CN202211293993.7A CN202211293993A CN115615550A CN 115615550 A CN115615550 A CN 115615550A CN 202211293993 A CN202211293993 A CN 202211293993A CN 115615550 A CN115615550 A CN 115615550A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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Abstract
The application discloses linear type moves mirror mechanism relates to the relevant technical field of interferometer for solve the poor problem of anti vibration performance of above-mentioned linear type moves mirror mechanism during operation under strong vibration environment. The application provides a linear type moves mirror mechanism includes mount, first swing arm, second swing arm and moves the mirror subassembly, it includes the connecting rod and sets up to move the mirror of connecting rod one end, first swing arm is connected the connecting rod is close to move one side of mirror, the second swing arm is connected the connecting rod is kept away from move one side of mirror, the mount first swing arm the connecting rod with the second swing arm end to end connection constitutes parallelogram mechanism in proper order to all connect through flexible hinge between the two that link to each other. The application is used for improving the stability and the anti-vibration performance of the moving mirror assembly in the moving process so as to realize the high-precision linear motion of the moving mirror surface and ensure that the moving mirror assembly can keep a stable motion state under a strong vibration environment.
Description
Technical Field
The application relates to the technical field of interferometer correlation, concretely relates to linear type moving mirror mechanism.
Background
The Michelson interferometer (Michelson interferometer) is a precision optical instrument designed and manufactured for studying "ethernet" drift in cooperation with the american physicist Michelson and Mo Lei in 1881. The principle of the michelson interferometer is that one incident beam is divided into two beams by a spectroscope and then the two beams are respectively reflected by corresponding plane mirrors, and because the two beams have the same light frequency, the same vibration direction and constant phase difference (namely, the interference condition is met), the interference can be generated. The different optical paths of the two beams of light in the interferometer can be realized by adjusting the length of the interference arm and changing the refractive index of the medium, so that different interference patterns can be formed. The most notable application of the michelson interferometer is the zero result obtained from the observation of the ether wind in the michelson-Mo Lei experiment, which provides the experimental basis for the basic assumption of the swordsman relativity theory. In addition, because laser interferometers can measure optical path differences in interference very accurately, michelson interferometers and other types of interferometers are widely used in modern gravitational wave detection. In addition, michelson interferometers are widely used as analytical instruments such as fourier infrared spectrometers to generate interference of light.
In the michelson interferometer, an optical interference phenomenon occurs, and a necessary condition is to generate an optical path difference. According to the analysis principle, the relative movement of the two reflecting mirror surfaces is required to generate the optical path difference. The common method is to make one mirror stationary and the other mirror moving, and the moving mirror mechanism is usually called as moving mirror mechanism. The stability of the motion state of the movable mirror mechanism largely determines the quality of the interference light, and generally, the movable mirror mechanism is mainly classified into a torsional pendulum type and a linear type according to the motion implementation form. The torsional pendulum type moving mirror mechanism is a mechanism for making a moving mirror perform reciprocating torsional pendulum motion, and is widely applied due to simple realization structure. But due to the characteristics of the structure, the vibration resistance is poor, and the adaptability to the environment is low. The linear type movable mirror mechanism enables the movable mirror to do linear type front-back movement, has higher precision requirement on each part, but has stable structure and better performance of vibration resistance, impact resistance and the like compared with a torsional pendulum type movable mirror mechanism.
However, when the linear moving mirror mechanism is operated under a strong vibration environment, the vibration resistance is poor, and therefore, it is necessary to design a linear moving mirror mechanism to solve the above problems.
Disclosure of Invention
The application provides a linear type moves mirror mechanism, the linear type moves mirror mechanism that this application provided can normally work under strong vibration environment, and it has high anti vibration performance, has improved stability and the anti vibration performance in the moving mirror subassembly motion process.
For reaching above-mentioned purpose, the linear type moving mirror mechanism that this application provided includes mount, first swing arm, second swing arm and moves the mirror subassembly, it includes the connecting rod and sets up to move the mirror of connecting rod one end, first swing arm is connected the connecting rod is close to move one side of mirror, the second swing arm is connected the connecting rod is kept away from move one side of mirror, the mount first swing arm the connecting rod with the second swing arm end to end connection constitutes parallelogram mechanism in proper order to all connect through flexible hinge between the two that link to each other.
In some embodiments of the present application, the flexible hinge comprises a plurality of flexible hinges, each of the flexible hinges comprises a first hinge portion and a second hinge portion which are oppositely opposable, and one of the fixed frame, the first swing arm, the connecting rod and the second swing arm is connected to the first hinge portion, and the other is connected to the second hinge portion.
In some embodiments of the present application, the first swing arm is an H-shaped swing arm, the second swing arm is a Y-shaped swing arm, the flexible hinge includes a first flexible hinge, a second flexible hinge, and a third flexible hinge, the Y-shaped swing arm includes a first connection end, a second connection end, and a third connection end, the first connection end is hinged to the fixing frame through the first flexible hinge, and the second connection end and the third connection end are hinged to opposite sides of the connection rod through the second flexible hinge and the third flexible hinge, respectively.
In some embodiments of the present application, the linear moving mirror mechanism further comprises:
the eccentric adjusting wheel is connected with the first connecting end and the first flexible hinge, and the swing length of the Y-shaped swing arm can be adjusted by adjusting the rotating angle of the eccentric adjusting wheel.
In some embodiments of the present application, a first mounting hole is formed in the first connecting end, the eccentric adjusting wheel includes an adjusting portion and an eccentric wheel having a hollow structure, the adjusting portion is connected to the eccentric wheel, an outer circumferential surface of the eccentric wheel is fixedly mounted in the first mounting hole, an inner circumferential surface of the eccentric wheel is used for mounting the first flexible hinge, an eccentric distance exists between the outer circumferential surface and the inner circumferential surface, and an eccentric distance exists between a circle center of an outer circumferential surface and a circle center of an inner circumferential surface, wherein an adjusting range of an actual swing length of the Y-shaped swing arm and an adjusting accuracy of the eccentric adjusting wheel can be determined by a size of the eccentric distance.
In some embodiments of the present application, the periphery of connecting rod is equipped with first connecting portion and second connecting portion at the interval in its axis direction, first connecting portion with first swing arm passes through flexible hinge and connects, the second connecting portion with the second swing arm passes through flexible hinge and connects, wherein, the connecting rod first connecting portion the second connecting portion with the movable mirror adopts the integral type structure, perhaps, the connecting rod first connecting portion with the second connecting portion adopt the integral type structure.
In some embodiments of the present application, the fixture includes:
the connecting rod comprises a bottom plate, a first connecting rod and a second connecting rod, wherein the bottom plate is provided with a first positioning part and a second positioning part which are arranged oppositely, and the first positioning part and the second positioning part are arranged at intervals in a first direction, wherein the first direction is perpendicular to the axial direction of the connecting rod and is parallel to the bottom plate;
the two brackets are respectively positioned and installed on the bottom plate through the first positioning part and the second positioning part and are perpendicular to the bottom plate;
the top plate is installed on one side of the two supports far away from the bottom plate and is arranged opposite to the bottom plate, wherein the top plate, the first swing arm, the connecting rod and the second swing arm are sequentially connected end to form a parallelogram mechanism.
In some embodiments of the present application, the linear moving mirror mechanism further comprises:
the linear motor is installed on the bottom plate and located one side of the movable mirror is far away from the connecting rod, and the linear motor is used for driving the connecting rod to move linearly along the axis direction of the connecting rod.
In some embodiments of the present application, the linear moving mirror mechanism further comprises:
and the motor bracket is arranged on the bottom plate and used for supporting and positioning the linear motor.
In some embodiments of the present application, the linear moving mirror mechanism further comprises:
and the connecting piece is connected with the output end of the linear motor and one end of the connecting rod, which is far away from the movable mirror.
This application is through making the mount first swing arm the connecting rod with the second swing arm end to end connection constitutes parallelogram mechanism in proper order, can resist the deformation and the swing of external force to the upper and lower and left and right directions that the moving mirror produced, in order to improve the stationarity of moving mirror subassembly in the motion process. And the first swing arm, the connecting rod and the second swing arm are connected in a hinged manner through flexible hinges, so that when the first swing arm, the connecting rod and the second swing arm are connected in a hinged manner, the torque and the rotation angle meet the strict Hu Ke law when the first swing arm, the connecting rod and the second swing arm are connected in a rotatable manner within a small angle (for example, +/-20 degrees), and the first swing arm and the second swing arm have high concentricity, namely the first swing arm and the second swing arm can slightly swing around the rotating shaft formed by the respective flexible hinges, and can resist the swinging in the front-back direction of the movable mirror caused by external force. That is, the present application can improve the torsional rigidity at the rotation position of the parallelogram mechanism and the torsional deformation of the entire linear moving mirror mechanism to improve the vibration resistance by selecting the flexible hinge having a large torsional rigidity. From this, the linear type moves mirror mechanism that this application provided can normally work under strong vibration environment, and it has high vibration resistance, has improved stability and the anti vibration performance in the moving mirror subassembly motion process, and then can realize the high accuracy linear motion of moving mirror surface to can keep stable motion state under stronger vibration environment.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic perspective view of a linear movable mirror mechanism in an embodiment of the present application;
FIG. 2 is a cross-sectional view of the linear moving mirror mechanism in the embodiment of the present application;
FIG. 3 is a schematic structural diagram of a flexible hinge in the linear moving mirror mechanism according to the embodiment of the present application;
FIG. 4 is a schematic structural diagram of a first swing arm in the linear movable mirror mechanism in the embodiment of the present application;
FIG. 5 is a schematic structural diagram of a second swing arm in the linear movable mirror mechanism in the embodiment of the present application;
FIG. 6 is a schematic structural diagram of an eccentric adjusting wheel in the linear movable mirror mechanism in the embodiment of the present application;
FIG. 7 is a schematic structural view of a movable mirror assembly in the linear movable mirror mechanism according to the embodiment of the present application;
FIG. 8 is a schematic structural diagram of a base plate in the linear movable mirror mechanism according to the embodiment of the present application;
FIG. 9 is a schematic structural view of a holder in the linear movable mirror mechanism according to the embodiment of the present application;
FIG. 10 is a schematic view showing the movement of the parallelogram mechanism in the linear movable mirror mechanism according to the embodiment of the present application;
fig. 11 is a geometric schematic diagram of an eccentric adjustment wheel in an embodiment of the present application.
The main reference numbers in the drawings accompanying the present specification are as follows:
1-a fixed mount; 101-a base plate; 1011-a first positioning part; 1012-a second positioning section; 1013-a fourth positioning section; 102-a scaffold; 1021-a third positioning section; 103-a top plate;
2-a first swing arm;
3-a second swing arm; 31-a first mounting hole;
4-a moving mirror assembly; 41-a connecting rod; 411 — first connection; 412-a second connection; 42-moving mirror;
5-a flexible hinge; 51-a first hinge; 52-a second hinge;
6-eccentric adjusting wheel; 61-an adjustment section; 62-eccentric wheel;
7-a linear motor; 71-a magnetic ring; 72-a coil;
8-motor support; 81-positioning surface;
9-connecting piece.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be mechanically coupled, directly coupled, indirectly coupled through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in this application will be understood to be a specific case for those of ordinary skill in the art.
The present application provides a linear movable mirror mechanism, which will be described in detail below. It should be noted that the following description of the embodiments is not intended to limit the preferred order of the embodiments of the present application. In the following embodiments, the descriptions of the respective embodiments have respective emphasis, and reference may be made to related descriptions of other embodiments for parts that are not described in detail in a certain embodiment.
Fig. 1 is a schematic perspective view of a linear movable mirror mechanism in an embodiment of the present application, and fig. 2 is a sectional view of the linear movable mirror mechanism in the embodiment of the present application. Referring to fig. 1 and 2, the linear moving mirror mechanism provided by the present application includes a fixed frame 1, a first swing arm 2, a second swing arm 3, and a moving mirror assembly 4. Wherein, moving mirror assembly 4 includes connecting rod 41 and sets up the moving mirror 42 of connecting rod 41 one end, first swing arm 2 is connected connecting rod 41 is close to one side of moving mirror 42, second swing arm 3 is connected connecting rod 41 is kept away from one side of moving mirror 42, mount 1 first swing arm 2 connecting rod 41 with second swing arm 3 connects end to end in proper order and constitutes parallelogram mechanism to all connect through flexible hinge 5 is articulated between the two that link to each other. That is, the flexible hinge 5 is used as a precision bearing to connect the fixing frame 1, the first swing arm 2, the connecting rod 41 and the second swing arm 3 to form a parallelogram structure.
From this, this application is through making mount 1 first swing arm 2 connecting rod 41 with second swing arm 3 connects end to end in proper order and constitutes parallelogram mechanism, can resist the deformation and the swing of the upper and lower and left and right directions of external force to moving mirror 42 production, in order to improve moving mirror assembly 4 is at the stationarity of motion in-process. Moreover, the two connected swing arms of the first swing arm 2, the connecting rod 41 and the second swing arm 3 are hinged by a flexible hinge 5, so that when the two connected swing arms of the first swing arm 2, the connecting rod 41 and the second swing arm 3 can rotate within a small angle (for example, +/-20 degrees), the torque and the rotation angle meet the strict Hu Ke law, and the concentricity is high, that is, the first swing arm 2 and the second swing arm 3 can slightly swing around the rotation shaft formed by the respective flexible hinges 5, and the shaking in the front-back direction caused by the external force to the mirror 42 can be resisted. That is, the present application can improve the torsional rigidity at the rotation portion of the parallelogram mechanism and the torsional deformation of the entire linear moving mirror mechanism by selecting the flexible hinge 5 having a large torsional rigidity, thereby improving the vibration resistance. Therefore, the linear type movable mirror mechanism provided by the application can normally work under a strong vibration environment, has high vibration resistance, improves the stability and the vibration resistance of the movable mirror assembly 4 in the motion process, can further realize the high-precision linear motion of the mirror surface of the movable mirror 42, and can keep a stable motion state under a strong vibration environment.
Fig. 3 is a schematic structural view of a flexible hinge in a linear moving mirror mechanism in an embodiment of the present application, and referring to fig. 2 and 3, the flexible hinge 5 includes a plurality of flexible hinges 5, each of the flexible hinges 5 includes a first hinge 51 and a second hinge 52 which are relatively opposite to each other, and one of two connected ones of the fixed frame 1, the first swing arm 2, the connecting rod 41, and the second swing arm 3 is connected to the first hinge 51, and the other one is connected to the second hinge 52. It is understood that one of the two connected fixed frames 1, the first swing arm 2, the connecting rod 41 and the second swing arm 3 is fixedly connected to the first hinge portion 51, and the other is fixedly connected to the second hinge portion 52. That is, one of the two connected fixed frame 1, the first swing arm 2, the connecting rod 41 and the second swing arm 3 and the first hinge portion 51 are fixed by fastening screws to ensure no relative movement relationship therebetween, and the other and the second hinge portion 52 are fixed by fastening screws to ensure no relative movement relationship therebetween.
Illustratively, one of the two connected fixed frames 1, the first swing arm 2, the connecting rod 41 and the second swing arm 3 is provided with a first circular connecting hole, the other is provided with a second circular connecting hole, the first hinge portion 51 is embedded and fixed in the first circular connecting hole, and the second hinge portion 52 is embedded and fixed in the second circular connecting hole. It is understood that the outer circumferential surface of the first hinge portion 51 has the same contour shape as the first circular coupling hole, and the outer circumferential surface of the second hinge portion 52 has the same contour shape as the second circular coupling hole.
FIG. 4 is a schematic structural diagram of a first swing arm in the linear movable mirror mechanism in the embodiment of the present application; fig. 5 is a schematic structural diagram of a second swing arm in a linear moving mirror mechanism in an embodiment of the present application, and referring to fig. 2, 4 and 5, the first swing arm 2 is an H-shaped swing arm, the second swing arm 3 is a Y-shaped swing arm, the flexible hinge 5 includes a first flexible hinge, a second flexible hinge and a third flexible hinge, the Y-shaped swing arm includes a first connection end, a second connection end and a third connection end, the first connection end is hinged to the fixed frame 1 through the first flexible hinge, and the second connection end and the third connection end are hinged to opposite sides of the rear end of the connection rod 41 through the second flexible hinge and the third flexible hinge, respectively. Therefore, the structural strength of the linear movable mirror mechanism can be ensured through the H-shaped swing arm and the Y-shaped swing arm, and the function of preventing distortion is achieved.
In a similar way, the H-shaped swing arm comprises a fourth connecting end, a fifth connecting end, a sixth connecting end and a seventh connecting end. The fourth connection end and the fifth connection end are respectively hinged to two opposite sides of the fixed frame 1 through the fourth flexible hinge and the fifth flexible hinge, and the sixth connection end and the seventh connection end are respectively hinged to two opposite sides of the front end of the connection rod 41 through the sixth flexible hinge and the seventh flexible hinge.
According to the kinematics principle of the parallelogram kinematic mechanism, when the lengths of the first swing arm 2 (H-shaped swing arm) and the second swing arm 3 (Y-shaped swing arm) are equal, the movable mirror 42 is driven by the connecting rod 41 to perform strict translational motion, that is, the mirror surface of the movable mirror 42 is always in the vertical direction. However, in the actual manufacturing process, due to the limited processing capability, it is generally difficult to make the lengths of the first swing arm 2 (H-shaped swing arm) and the second swing arm 3 (Y-shaped swing arm) strictly consistent, so the mirror surface of the movable mirror 42 is inclined during the movement process, and the size of the inclination angle directly determines the quality of the interference light. Therefore, the linear movable mirror mechanism further includes an eccentric adjustment wheel 6, as shown in fig. 6. The eccentric adjusting wheel 6 is connected with the first connecting end and the first flexible hinge, and the swing length of the Y-shaped swing arm can be adjusted by adjusting the rotation angle of the eccentric adjusting wheel 6, so that the mirror surface of the movable mirror 42 is always in the vertical direction in the moving process.
Referring to fig. 1 and 6, the first connecting end is provided with the first mounting hole 31, the eccentric adjusting wheel 6 includes an adjusting portion 61 and an eccentric wheel 62 having a hollow structure, the outer circumferential surface of the eccentric wheel 62 is fixedly mounted in the first mounting hole 31, the inner circumferential surface of the eccentric wheel 62 is used for mounting the first flexible hinge, and an eccentric distance exists between the outer circumferential surface and the inner circumferential surface, wherein the adjustment range of the actual swing length of the Y-shaped swing arm and the adjustment accuracy of the eccentric adjusting wheel 6 can be determined by the size of the eccentric distance.
Fig. 7 is a schematic structural view of a movable mirror assembly in the linear movable mirror mechanism according to the embodiment of the present application. Referring to fig. 1, 2 and 7, a first connecting portion 411 and a second connecting portion 412 are spaced apart from each other in an axial direction of the connecting rod 41, the first connecting portion 411 is hinged to the first swing arm 2 by a flexible hinge 5, and the second connecting portion 412 is hinged to the second swing arm 3 by the flexible hinge 5. Wherein the connecting rod 41, the first connecting portion 411, the second connecting portion 412 and the movable mirror 42 are of an integrated structure, for example, the movable mirror 42 is configured to be machined into a plane mirror surface by a single point diamond lathe. Alternatively, the connection bar 41, the first connection part 411, and the second connection part 412 may be integrally formed, and in this case, a plane mirror may be bonded to an end of the connection bar 41. It is also understood that the movable mirror assembly 4 is a one-piece structure.
Fig. 8 is a schematic structural diagram of a bottom plate in a linear moving mirror mechanism in an embodiment of the present application, and with continued reference to fig. 1 and 8, the fixed frame 1 includes a bottom plate 101, the bottom plate 101 has a first positioning portion 1011 and a second positioning portion 1012 arranged oppositely, and the first positioning portion 1011 and the second positioning portion 1012 are arranged at an interval in a first direction, wherein the first direction is perpendicular to an axial direction of the connecting rod 41 and parallel to the bottom plate 101. Illustratively, the first positioning portion 1011 and the second positioning portion 1012 are a first positioning groove and a second positioning groove respectively disposed on the bottom plate 101. The two brackets 102 are positioned and installed on the bottom plate 101 by the first positioning portion 1011 and the second positioning portion 1012, and are perpendicular to the bottom plate 101, respectively, for supporting the top plate 103 to a certain height. The top plate 103 is installed on one side of the two brackets 102 far away from the bottom plate 101 and is arranged opposite to the bottom plate 101, and the top plate 103 is used for connecting the top ends of the first swing arm 2 and the second swing arm 3. The top plate 103, the first swing arm 2, the connecting rod 41 and the second swing arm 3 are sequentially connected end to form a parallelogram mechanism.
The bottom plate 101, the two brackets 102 and the top plate 103 are all fixedly connected together by screws or bolts. The top plate 103 is used for supporting the whole linear type moving mirror mechanism, and functions as a platform, and is provided with fixing threaded holes and positioning grooves (the first positioning portions 1011 and the second positioning portions 1012) for connecting and positioning other components. In other words, the top ends of the H-shaped swing arm and the Y-shaped swing arm are suspended on the top plate 103, and the bottom ends of the H-shaped swing arm and the Y-shaped swing arm are respectively connected with the front end and the rear end of the connecting rod 41, so as to indirectly suspend the movable mirror 42 through the connecting rod 41.
Fig. 9 is a schematic structural diagram of a bracket in the linear moving mirror mechanism according to the embodiment of the present application, and referring to fig. 1 and 9, the top ends of the facing sides of the two brackets 102 are respectively provided with a third positioning portion 1021, and the third positioning portion 1021 is used for limiting the relative positional relationship between the two brackets 102 and the top plate 103.
With reference to fig. 1, the linear moving mirror mechanism further includes a linear motor 7, the linear motor 7 is mounted on the bottom plate 101 and located on a side of the connecting rod 41 away from the moving mirror 42, and the linear motor 7 is configured to drive the connecting rod 41 to move linearly along an axis direction thereof. As shown in fig. 2, the linear motor 7 in the present application is configured as a voice coil motor that provides a motion input to the moving mirror assembly 4, and includes a magnetic ring 71 and a coil 72, and the magnetic ring 71 and the coil 72 can move relative to each other under an applied current. For example, when a certain amount and direction of current is applied to the coil 72, the coil 72 can generate a reciprocating linear motion under the action of the magnetic field of the magnetic ring 71, and the movable mirror 42 is indirectly driven to move linearly through the connecting rod 41.
Based on the above embodiment, the linear movable mirror mechanism further includes the motor bracket 8, and the motor bracket 8 is installed on the bottom plate 101 and used for supporting and positioning the linear motor 7. When the linear motor 7 is a voice coil motor, the motor bracket 8 is used for supporting and fixing a magnetic ring 71 of the voice coil motor. The magnetic ring 71 of the voice coil motor is fixed on the motor support 8 through a set screw, a positioning surface 81 is designed on the motor support 8, and the positioning surface 81 is used for determining the relative installation position between the motor support 8 and the bottom plate 101 and ensuring the installation precision between the motor support 8 and the bottom plate 101. Specifically, the bottom plate 101 is further provided with a fourth positioning portion 1013 (see fig. 1 and 8), the fourth positioning portion 1013 is configured as a positioning groove, and at least a partial area of the bottom of the motor support 8 is embedded in the positioning groove to ensure the coaxiality between the coil 72 of the voice coil motor and the magnetic ring 71 of the voice coil motor, thereby ensuring the linear motion performance of the voice coil motor.
In order to realize the connection between the linear motor 7 and the connecting rod 41, the linear moving mirror mechanism further includes a connecting member 9, wherein the connecting member 9 is used for connecting the output end of the linear motor 7 and one end of the connecting rod 41 away from the moving mirror 42, so as to fixedly connect the connecting rod 41 and the linear motor 7 (for example, the coil of the voice coil motor), and also can transmit the power of the linear motor 7 (for example, the coil of the voice coil motor) to the moving mirror 42.
Specifically, according to the kinematics principle of the parallelogram motion mechanism, when the lengths of the first swing arm 2 (H-shaped swing arm) and the second swing arm 3 (Y-shaped swing arm) are equal, the movable mirror 42 is driven by the connecting rod 41 to perform strict translational motion, that is, the mirror surface of the movable mirror 42 is always in the vertical direction. In the actual manufacturing process, due to the limited processing capability, it is generally difficult to make the lengths of the first swing arm 2 (H-shaped swing arm) and the second swing arm 3 (Y-shaped swing arm) strictly consistent, so the mirror surface of the movable mirror 42 can be inclined in the moving process, and the quality of the interference light is directly determined by the size of the inclination angle.
The following gives the influence on the movement of the movable mirror 42 when the swing lengths of the first swing arm 2 (H-type swing arm) and the second swing arm 3 (Y-type swing arm) are unequal:
fig. 10 is a schematic view of the movement of the parallelogram mechanism in the linear moving mirror mechanism in the embodiment of the present application, and fig. 11 is a schematic view of the geometry of the eccentric adjustment wheel in the embodiment of the present application. Referring to fig. 10 and 11, it is assumed that the first swing arm 2 (H-shaped swing arm) has a length H 1 The length of the second swing arm 3 (Y-shaped swing arm) is h 2 And Δ H is the length H of the first swing arm 2 (H-shaped swing arm) 1 And length h of the second swing arm 3 (Y-shaped swing arm) 2 The error between h is then 2 ＝h 1 + Δ h. The distance between the central axes of the flexible hinge 5 connecting the top plate 103 and the first swing arm 2 and the flexible hinge 5 connecting the top plate 103 and the second swing arm 3 is l 1 And the distance between the central axis of the flexible hinge 5 connecting the connecting rod 41 and the first swing arm 2 and the central axis of the flexible hinge 5 connecting the connecting rod 41 and the second swing arm 3 is l 2 Then let l be 2 ＝l 1 + Δ l. Assuming that the tilt angle of the moving mirror 42 is α (degree) after the voice coil motor drives the first swing arm 2 (H-shaped swing arm) to swing by the angle θ (degree), the following formula can be obtained according to the geometric knowledge:
alpha (degree) =180 DEG-ADB-angle BCD-BDC (5)
α (angular seconds) = α (degree) × 3600 (6)
According to the size of practical application, the method assigns the following parameters, and takes l 1 ＝51.6，h 1 =73 ° and θ =4 °, assuming that there is an error in the lengths of the first swing arm 2 (H-type swing arm) and the second swing arm 3 (Y-type swing arm), let Δ H =0.001, and obtain α (angular second) =5 ″; then, assuming that there is an error in the mounting hole pitch between the two flexible hinges 5 on the top plate 103 and the connecting rod 41, let Δ l =0.001, resulting in α (angular seconds) =0.32 ".
Therefore, the length error of the swing arm in the parallelogram motion mechanism is far larger than the influence of the error of the connecting rod 41 on the inclination angle of the movable mirror 42, so the eccentric adjusting wheel 6 is mainly used for adjusting the length of the second swing arm 3 (Y-shaped swing arm).
The influence of the rotation angle β of the eccentric adjustment wheel 6 on the length of the second swing arm 3 (Y-swing arm) is given below:
the eccentricity adjustment geometry of the eccentric adjustment wheel 6 is shown in fig. 11, OC is the theoretical length of the second swing arm 3 (Y-shaped swing arm), and OC = h is calculated from the above 2 ＝h 1 + Δ h, the theoretical eccentricity OD = d, the rotation angle of the eccentric adjustment wheel 6 is β, and the actual swing length CD of the second swing arm 3 (Y-shaped swing arm) satisfies the following relation:
the magnitude of the eccentricity d determines the adjustment range of the actual swing length CD of the second swing arm 3 (Y-shaped swing arm) and the adjustment accuracy of the eccentric adjustment wheel 6, and the value of the eccentricity d is 1 according to the actual application in the present invention.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims. In addition, the principle and the implementation manner of the present application are explained by applying specific examples in the specification, the above description of the embodiments is only for helping understanding the method and the core idea of the present application, and the content of the present application should not be construed as limiting the present application.
Claims (10)
1. The utility model provides a linear type moves mirror mechanism, its characterized in that, includes mount, first swing arm, second swing arm and moves the mirror subassembly, it includes the connecting rod and sets up to move the mirror of connecting rod one end, first swing arm is connected the connecting rod is close to one side of moving the mirror, the second swing arm is connected the connecting rod is kept away from one side of moving the mirror, the mount first swing arm the connecting rod with the second swing arm end to end connection constitutes parallelogram mechanism in proper order to all connect through flexible hinge between the two that link to each other.
2. The linear moving mirror mechanism according to claim 1, wherein said flexible hinges comprise a plurality of and each of said flexible hinges comprises a first hinge portion and a second hinge portion which are relatively opposed, and wherein one of the fixed frame, the first swing arm, the connecting rod and the second swing arm, which are connected, is connected to said first hinge portion, and the other is connected to said second hinge portion.
3. The linear moving mirror mechanism according to claim 1, wherein the first swing arm is an H-shaped swing arm, the second swing arm is a Y-shaped swing arm, the flexible hinge comprises a first flexible hinge, a second flexible hinge and a third flexible hinge, the Y-shaped swing arm comprises a first connecting end, a second connecting end and a third connecting end, the first connecting end is hinged to the fixed frame through the first flexible hinge, and the second connecting end and the third connecting end are hinged to opposite sides of the connecting rod through the second flexible hinge and the third flexible hinge, respectively.
4. The linear moving mirror mechanism according to claim 3, further comprising:
the eccentric adjusting wheel is connected with the first connecting end and the first flexible hinge, and the swing length of the Y-shaped swing arm can be adjusted by adjusting the rotating angle of the eccentric adjusting wheel.
5. The linear moving mirror mechanism according to claim 4, wherein a first mounting hole is formed in the first connecting end, the eccentric adjusting wheel comprises an adjusting portion and an eccentric wheel having a hollow structure, the adjusting portion is connected to the eccentric wheel, an outer peripheral surface of the eccentric wheel is fixedly mounted in the first mounting hole, an inner peripheral surface of the eccentric wheel is used for mounting the first flexible hinge, an eccentric distance exists between the outer peripheral surface and the inner peripheral surface, and an eccentric distance exists between a circle center of the outer peripheral surface and a circle center of the inner peripheral surface, wherein an adjusting range of an actual swing length of the Y-shaped swing arm and an adjusting accuracy of the eccentric adjusting wheel can be determined according to a magnitude of the eccentric distance.
6. The linear moving mirror mechanism according to claim 1, wherein a first connecting portion and a second connecting portion are provided at an interval in an axis direction of the connecting rod, the first connecting portion is hinged to the first swing arm via a flexible hinge, and the second connecting portion is hinged to the second swing arm via a flexible hinge, wherein the connecting rod, the first connecting portion, the second connecting portion, and the moving mirror are of an integrated structure, or the connecting rod, the first connecting portion, and the second connecting portion are of an integrated structure.
7. The linear moving mirror mechanism according to claim 1, wherein said fixed frame comprises:
the connecting rod comprises a bottom plate, a first connecting rod and a second connecting rod, wherein the bottom plate is provided with a first positioning part and a second positioning part which are arranged oppositely, and the first positioning part and the second positioning part are arranged at intervals in a first direction, wherein the first direction is perpendicular to the axial direction of the connecting rod and is parallel to the bottom plate;
the two brackets are respectively positioned and installed on the bottom plate through the first positioning part and the second positioning part and are perpendicular to the bottom plate;
the top plate is installed on one side of the two supports far away from the bottom plate and is arranged opposite to the bottom plate, wherein the top plate, the first swing arm, the connecting rod and the second swing arm are sequentially connected end to form a parallelogram mechanism.
8. The linear moving mirror mechanism according to claim 6 or 7, further comprising:
the linear motor is installed on the bottom plate and located one side of the movable mirror is far away from the connecting rod, and the linear motor is used for driving the connecting rod to move linearly along the axis direction of the connecting rod.
9. The linear moving mirror mechanism according to claim 8, further comprising:
and the motor bracket is arranged on the bottom plate and used for supporting and positioning the linear motor.
10. The linear moving mirror mechanism according to claim 8, further comprising:
and the connecting piece is connected with the output end of the linear motor and one end of the connecting rod, which is far away from the movable mirror.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211293993.7A CN115615550B (en) | 2022-10-21 | 2022-10-21 | Linear type movable mirror mechanism |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211293993.7A CN115615550B (en) | 2022-10-21 | 2022-10-21 | Linear type movable mirror mechanism |
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| CN115615550B CN115615550B (en) | 2024-03-19 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4693603A (en) * | 1985-10-21 | 1987-09-15 | Midac Corporation | Ruggedized compact interferometer requiring minimum isolation from mechanical vibrations |
| US4991961A (en) * | 1989-05-26 | 1991-02-12 | Nicolet Instrument Corporation | Moving mirror tilt adjust mechanism in an interferometer |
| CN113532648A (en) * | 2020-04-16 | 2021-10-22 | 中国科学院西安光学精密机械研究所 | Interference spectrometer moving mirror scanning system based on symmetrical flexible supporting mechanism |
| CN114324222A (en) * | 2021-12-28 | 2022-04-12 | 苏州徕谱科技有限公司 | Fourier transform infrared spectrometer with swing type movable mirror system |
| CN114397017A (en) * | 2021-12-17 | 2022-04-26 | 光子集成(温州)创新研究院 | Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer |
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2022
- 2022-10-21 CN CN202211293993.7A patent/CN115615550B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4693603A (en) * | 1985-10-21 | 1987-09-15 | Midac Corporation | Ruggedized compact interferometer requiring minimum isolation from mechanical vibrations |
| US4991961A (en) * | 1989-05-26 | 1991-02-12 | Nicolet Instrument Corporation | Moving mirror tilt adjust mechanism in an interferometer |
| CN113532648A (en) * | 2020-04-16 | 2021-10-22 | 中国科学院西安光学精密机械研究所 | Interference spectrometer moving mirror scanning system based on symmetrical flexible supporting mechanism |
| CN114397017A (en) * | 2021-12-17 | 2022-04-26 | 光子集成(温州)创新研究院 | Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer |
| CN114324222A (en) * | 2021-12-28 | 2022-04-12 | 苏州徕谱科技有限公司 | Fourier transform infrared spectrometer with swing type movable mirror system |
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| CN115615550B (en) | 2024-03-19 |
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