CN113917794B - Reflector frame and reflecting device - Google Patents
Reflector frame and reflecting device Download PDFInfo
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- CN113917794B CN113917794B CN202111110520.4A CN202111110520A CN113917794B CN 113917794 B CN113917794 B CN 113917794B CN 202111110520 A CN202111110520 A CN 202111110520A CN 113917794 B CN113917794 B CN 113917794B
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- mounting
- reflector
- elastic member
- frame body
- pieces
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Abstract
The invention relates to the technical field of precision instruments, and an embodiment of the invention provides a reflector bracket and a reflector device, which comprise: the frame body is used for being connected with the reflector; three mounting pieces, wherein the mounting pieces are used for being connected with a metering reference part of the photoetching machine; and all the driving devices are connected with the frame body, the mutual connecting lines of the three driving devices on the cross section form a triangle, the driving devices are connected with the mounting pieces in a one-to-one correspondence manner, and each driving device is respectively used for driving the corresponding mounting pieces, so that the corresponding part of the frame body moves along the Z-axis direction relative to each mounting piece and the posture adjustment of the reflecting mirror is realized.
Description
Technical Field
The invention relates to the technical field of precision instruments, in particular to a reflector frame and a reflector device.
Background
In the integrated circuit production and manufacturing equipment such as a photoetching machine or other circuit etching machines and the like, the motion displacement of a micro-motion platform of a workpiece platform is usually very small, the displacement magnitude is generally in the nanometer level, and a laser interferometer is usually selected for measuring the displacement of the type of the very small size.
The laser has the advantages of high intensity, high directivity, spatial coherence, narrow bandwidth and the like, and the laser interferometer mainly comprises optical elements such as a refractor, a reflector and the like and can be divided into a single-frequency laser interferometer and a double-frequency laser interferometer. Due to the excellent characteristics of laser, when the laser interferometer is used for measuring displacement, only attention needs to be paid to avoid external interference, such as the influence caused by optical path errors and gravity caused by mistaken placement of optical elements such as a reflector, and the like, so that high-precision displacement measurement on a measuring object can be realized.
However, in the conventional optical mirror mounting apparatus, since the manual adjustment of the mirror posture is easily restricted by the narrow operating space environment, there is a problem that the adjustment range is limited.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide a mirror holder and a reflection device, which are used to solve the technical problem of the conventional optical mirror device that the adjustment range is limited due to the restriction of narrow operation space environment when the posture of the mirror is adjusted manually.
In order to solve the technical problem, the embodiment of the invention adopts the following technical scheme:
the present embodiment provides a mirror stand, including:
the frame body is used for being connected with the reflector;
three mounting pieces, wherein the mounting pieces are used for being connected with a metering reference part of the photoetching machine;
the driving devices are connected with the mounting pieces in a one-to-one correspondence manner, so that the corresponding parts of the frame body move along the Z-axis direction relative to the mounting pieces, and the posture adjustment of the reflector is realized.
Further, the driving device is a piezoelectric ceramic linear motor, wherein a stator of the piezoelectric ceramic linear motor is mounted on the frame body, and a rotor of the piezoelectric ceramic linear motor is connected with the mounting piece.
Furthermore, a first connecting piece is arranged on the mounting piece and used for being connected with the metering reference component of the photoetching machine.
Further, the driving device is a piezoelectric ceramic linear motor, wherein a stator of the piezoelectric ceramic linear motor is mounted on the frame body, and a rotor of the piezoelectric ceramic linear motor is connected with the mounting piece.
Furthermore, a first connecting piece is arranged on the mounting piece and used for being connected with the metering reference component of the photoetching machine.
Further, first connecting piece is three, wherein, all first connecting piece all establishes on the installed part, and all interconnect on the cross section of first connecting piece forms equilateral triangle, equilateral triangle's center with the geometric centre of installed part is on same vertical axis.
Further, still include:
the anticreep piece, anticreep piece first end with the installed part is connected, the second end of anticreep piece with this body coupling of frame, wherein, anticreep piece is used for working as the speculum is adjusted and is accomplished the back, and is right the speculum carries out the gesture and fixes.
Further, the mounting part is provided with a mounting hole, the axis of the mounting hole is positioned on the geometric center of the mounting part, and the driving device is inserted into the mounting hole and is connected with the mounting hole.
Furthermore, the triangle is an isosceles triangle, and the center of the isosceles triangle and the geometric center of the frame body are on the same vertical axis.
The application also provides a reflection apparatus comprising
The mirror frame as described above;
and the reflecting mirror is connected with the frame body.
Further, the top of speculum is equipped with first installation department and mounting groove, the bottom of frame body extends there are first location foot and second location foot, first location foot has the cell body, first installation department inserts in the cell body and with first location foot is connected, second location foot inserts the mounting groove with the mounting groove is connected.
Further, the first mounting part is provided with a first hole, and the mounting groove is provided with a second hole penetrating through two side walls of the mounting groove;
further comprising:
a first shaft passing through the first bore;
the second shaft penetrates through the second hole and the mounting groove, and the mounting groove is positioned in the middle of the second shaft;
a first elastic member, a first end of the first elastic member being connected to the frame body, a second end of the first elastic member being connected to the first shaft;
a second elastic member, a first end of the second elastic member being connected to the holder body, a second end of the second elastic member being connected to the first shaft, and the first elastic member and the second elastic member being respectively located at both sides of the first mounting portion;
a third elastic member, a first end of the third elastic member being connected to the frame body, and a second end of the third elastic member being connected to a portion of the second shaft located in the mounting groove;
the first shaft and the second shaft are arranged in parallel and are perpendicular to the geometric axis of the frame body.
Compared with the prior art, the embodiment of the invention has the beneficial effects that:
when the reflector needs to be adjusted in the Z-axis direction, all the installation parts are fixedly connected with a metering reference component of a photoetching machine, and when all the driving devices simultaneously drive the corresponding installation parts to move along the Z-axis direction, the reflector translates along the Z-axis direction, namely, the Z-axis direction freedom degree position adjustment is provided for the reflector together, and the movement distances and directions of the three driving devices are kept the same; when the reflector needs to rotate along the Ry direction, the three driving devices take a first driving device, a second driving device and a third driving device as an example, the first driving device is kept still, and the second driving device and the third driving device do differential linear motion along the Z-axis direction, that is, the Z-axis direction movement distances of the second driving device and the third driving device are the same, and the movement directions of the second driving device and the third driving device are opposite, so that the reflector generates rotary motion in the Ry direction, and the rotary motion control of the reflector in the Ry direction is realized; when the reflector needs to rotate along the Rx direction, the second driving device and the third driving device are taken as a whole, if the first driving device moves along the Z-axis direction, the two driving devices which are the whole move reversely along the Z-axis, and the reflector generates rotary motion in the Rx direction through the differential linear motion of the two driving devices and the third driving device which are the whole, so that the rotary motion control in the Rx direction is realized for the reflector.
The reflector bracket of the embodiment has small volume and simple operation, and can automatically adjust the vertical three-degree-of-freedom posture of the optical reflector; the reflector bracket can control the vertical Z, rx and Ry freedom degree postures of the optical reflector, avoids the problem that the reflector posture is easily restricted by narrow operating space environment when being adjusted manually, and simultaneously realizes the automatic quantitative adjustment of the vertical Z, rx and Ry freedom degree postures of the reflector; and the three installation parts are connected with the metering reference component of the photoetching machine above, and the reflector can be subjected to fine adjustment in multiple directions before measurement, so that the lower light path can return in the original path after reaching the reflector, and compared with the traditional reflector frame device only with 2 installation parts for adjustment, the reflector frame device has higher layout sensitivity and larger adjustment range.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only the embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural view of a mirror holder according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a frame body of a mirror frame according to an embodiment of the present invention;
FIG. 3 is a side view of a frame body of a mirror support provided in accordance with an embodiment of the present invention;
fig. 4 is a top view of a frame body of a mirror frame according to an embodiment of the present invention;
FIG. 5 is a schematic view of a mounting assembly for a mirror mount according to an embodiment of the present invention;
FIG. 6 is a top view of a mount for a mirror support provided by an embodiment of the invention;
FIG. 7 is a schematic view of a mirror support from another perspective according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of an emitter of a mirror holder according to an embodiment of the present invention.
Wherein:
1. a mounting member; 2. a frame body; 3. a mirror; 11. a first connecting member; 22. a first shaft; 23. a second elastic member; 24. a second shaft; 25. a first positioning pin; 26. a first elastic member; 27. a second positioning leg; 28. a drive device; 30. a first mounting portion; 31. mounting grooves; 32. and (4) a groove.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the embodiments of the present application and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected" and "connected" should be interpreted broadly, and may be, for example, a fixed connection, an exchangeable connection, an integrated connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, and a communication between two elements. Specific meanings of the above terms in the embodiments of the present application can be understood in specific cases by those of ordinary skill in the art.
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a mirror holder according to an embodiment of the present invention.
As shown in fig. 1-8, embodiments of the present invention provide a mirror frame comprising:
the frame body 2 is used for being connected with the reflector 3;
three mounting pieces 1, wherein the mounting pieces 1 are used for being connected with a metering reference part of a photoetching machine; and three driving devices 28, all the driving devices 28 are connected to the frame body 2, the cross sections of the three driving devices 28 are connected to form a triangle, the driving devices 28 are connected to the mounting members 1 in a one-to-one correspondence, and each driving device 28 is used for driving the corresponding mounting member 1, so that the corresponding part of the frame body moves along the Z-axis direction relative to each mounting member, and the posture adjustment of the mirror is realized.
The frame body 2 can be connected with the reflector 3 by welding, bolt connection or clamping connection; in this embodiment, for the convenience of adjustment, the bottom of the frame body 2 is connected to a surface of the reflector 3 away from the mirror surface.
The three mounting pieces 1 have the same structure, and the mounting pieces 1 can be connected with the measuring reference component of the photoetching machine in a bolt or a buckle mode; wherein the top of the mounting piece 1 is connected with the metering reference part of the photoetching machine;
the driving device 28 is connected with the top of the frame body 2, and the driving device 28 is connected with the bottom of the mounting part 1; drive arrangement 28 can through modes such as bolt, welding or joint with the top of frame body 2 is connected, drive arrangement 28 can through modes such as bolt, welding or joint with installed part 1 is connected, in this implementation, be equipped with first pilot hole on the frame body 2, drive arrangement 28 installs on the pilot hole, installed part 1 has the mounting hole, drive arrangement 28 inserts the mounting hole and with mounting hole interference fit.
The driving devices 28 and the mounting pieces 1 are in one-to-one correspondence, so that three driving devices 28 can respectively drive the corresponding mounting pieces 1, and the three mounting pieces 1 can respectively move in the Z-axis direction according to the driving of the driving devices 28;
in this embodiment, three mounting members 1 are mounted and fixed on the measurement reference component of the lithography machine, and when any one of the driving devices 28 works, it drives the mounting members 1, actually acts on the frame body 2, actually drives the mirror 3 connected thereto to move, thereby realizing the adjustment of the pose of the mirror 3 in the Z-axis direction, the Rx direction and the Ry direction;
when the reflector 3 needs to be adjusted in the Z-axis direction, all the driving devices 28 simultaneously drive the corresponding mounting pieces 1 to move in the Z-axis direction, the reflector 3 translates in the Z-axis direction, that is, the reflector 3 is provided with the adjustment of the position of the degree of freedom in the Z-axis direction together, and the movement distances and directions of the three driving devices 28 are kept the same; when the reflector 3 needs to rotate along the Ry direction, the three driving devices take a first driving device, a second driving device and a third driving device as an example, the first driving device is kept still, and the second driving device and the third driving device do differential linear motion along the Z-axis direction, that is, the moving distances of the second driving device and the third driving device in the Z-axis direction are the same, and the moving directions of the second driving device and the third driving device are opposite, so that the reflector generates rotary motion in the Ry direction, and the rotary motion control of the reflector in the Ry direction is realized; when the reflector needs to rotate along the Rx direction, the second driving device and the third driving device are integrated, if the first driving device moves along the Z-axis direction, the two driving devices 28 as an integrated body move reversely along the Z-axis, and the two driving devices 28 as an integrated body and the third driving device 28 do differential linear motion, so that the reflector 3 generates rotational motion in the Rx direction, and further the rotational motion control in the Rx direction of the reflector 3 is realized.
The reflector bracket of the embodiment has small volume and simple operation, and can automatically adjust the vertical three-degree-of-freedom posture of the optical reflector 3; the reflector bracket can control the vertical Z, rx and Ry freedom degree postures of the optical reflector 3, so that the problem that manual adjustment of the postures of the reflector 3 is easily restricted by narrow operating space environment is solved, and automatic quantitative adjustment of the vertical Z, rx and Ry freedom degree postures of the reflector 3 is realized; and the three installation pieces 1 are connected with the metering reference component of the photoetching machine above, and the reflector 3 can be subjected to fine adjustment in multiple directions before measurement, so that the lower light path can return to the reflector 3 in the original path after reaching the reflector, and compared with the traditional reflector frame device only using 2 installation pieces 1 for adjustment, the reflector frame device has higher layout sensitivity and larger adjustment range.
The working process can be controlled by a controller, wherein a difference value required to be adjusted by the reflector 3 is determined by a detection device, an adjustment path required to control the reflector 3 to compensate the difference value is obtained by analysis and calculation of the controller, and the driving device 28 is controlled to adjust the reflector 3 according to the adjustment path, so that the reflector 3 is further adjusted intelligently and automatically.
The working process can be as follows: connecting a reflector frame provided with a reflector 3 to a photoetching machine metering reference component above the reflector frame through a mounting piece 1; and then opening a laser interferometer which is positioned below the reflecting mirror 3 and is at a certain distance from the side surface of the micropositioner to emit laser, after the laser reaches an isosceles right-angle reflecting prism which is adhered to the side surface of the micropositioner and is opposite to the laser interferometer, changing the optical path by 90 degrees and irradiating the laser to the rectangular bottom surface of the reflecting mirror 3 above, namely a reflecting surface, checking whether the laser is reflected back along the original path or not through a detection device, if not, controlling the three driving devices 28 by the controller to drive the corresponding mounting pieces 1 to do corresponding linear motion so as to drive the overall position and posture of the reflecting mirror 3 to be changed, realizing fine adjustment of the position and posture of the reflecting mirror 3 until the reflecting surface is vertical to the optical path, so that the laser successfully returns to the original path, and further finishing the automatic adjustment of the reflecting mirror 3.
Further, the method also comprises the following steps:
the anticreep piece, anticreep piece first end with installed part 1 is connected, the second end of anticreep piece with frame body 2 is connected, wherein, the anticreep piece is used for working as 3 regulation of speculum are accomplished the back, and are right speculum 3 carries out the gesture fixed.
The anticreep piece is anticreep screw or anticreep bolt etc. wherein, the anticreep piece is at least three, with the quantity of installed part 1 is unanimous, be used for with installed part 1 locking frame body 2, in order to prevent frame body 2 and be connected with frame body 3 drops, and rotatory anticreep screw makes the position of the speculum 3 that the adjustment finishes fixed simultaneously, the speculum frame has ensured through the anticreep piece the security and the stability of speculum 3 in the in-process that uses.
Specifically, the driving device 28 is a piezoelectric ceramic linear motor, wherein a stator of the piezoelectric ceramic linear motor is mounted on the frame body 2, and a rotor of the piezoelectric ceramic linear motor is connected with the mounting member 1.
The piezoelectric ceramic linear motor drives the mounting piece 1 to move along the Z-axis direction, wherein the mounting piece 1 is fixed so that the frame body 2 moves along the Z-axis direction;
the top of the piezoelectric ceramic linear motor is bonded on the first assembling hole, and the rotor of the piezoelectric ceramic linear motor is bonded on the mounting hole.
In addition to the bonding mode, the connection mode of the piezoelectric ceramic linear motors is that 3 piezoelectric ceramic linear motors can be connected between the bottom of the mounting piece 1 and the top of the frame body 2 in a conical ball socket contact, V-shaped groove contact and plane ball contact combination mode;
the reflector bracket can output high-precision and high-resolution displacement by using the piezoelectric ceramic linear motor according to the current posture of the reflector 3 through the three piezoelectric ceramic linear motors, the quantity is controllable, and the freedom degrees of the reflector 3 in the vertical Z-axis direction, the Rx direction and the Ry direction are automatically adjusted and realized to be in the desired target posture.
Specifically, the degree of freedom of the mirror frame in the Z-axis direction with respect to the mirror 3 is adjusted as follows: if the reflector 3 is currently located at the initial zero position in the Z-axis direction, when the reflector 3 needs to perform translation in the Z-axis direction, the first piezoelectric ceramic linear motor, the second piezoelectric ceramic linear motor and the third piezoelectric ceramic linear motor jointly provide the adjustment of the position of the degree of freedom in the Z-axis direction for the reflector 3, and the movement distances and directions of the three piezoelectric ceramic linear motors are kept the same.
The degree of freedom of the reflector frame to the reflector 3 in the direction of Ry is adjusted as follows: if the reflector 3 is currently located at the initial zero position in the Ry direction, when the reflector 3 needs to rotate in the Ry direction, the first piezoelectric ceramic linear motor remains stationary, and the second piezoelectric ceramic linear motor and the third piezoelectric ceramic linear motor perform differential linear motion in the Z-axis direction, that is, the Z-axis direction motion distances of the second piezoelectric ceramic linear motor and the third piezoelectric ceramic linear motor are the same, but the motion directions are opposite, so that the reflector 3 generates rotary motion in the Ry direction, and then the control of the rotary motion in the Ry direction of the reflector 3 is realized.
Further, the Rx direction degree of freedom adjustment strategy of the mirror frame to the mirror 3 is as follows: if the reflector 3 needs to rotate along the Rx direction, the second and third piezoelectric ceramic linear motors are taken as a whole, if the first piezoelectric ceramic linear motor moves along the Z axis in the forward direction, the second and third piezoelectric ceramic linear motors move in the reverse direction along the Z axis, and differential linear motion is performed between the first piezoelectric ceramic linear motor and the second and third piezoelectric ceramic linear motors of the whole, so that the reflector 3 generates rotary motion in the Rx direction, and the Rx direction rotary motion control is realized on the reflector 3.
The three freedom degree adjustment strategies are mutually independent and can be combined for use, and the adjustment of the three vertical freedom degrees of the reflector 3 can be completed at one time.
The piezoelectric ceramic linear motor has a self-locking function, the movement stroke is +/-2 mm, and the movement resolution is 5 mu m.
Furthermore, a first connecting piece 11 is arranged on the mounting piece 1, and the first connecting piece 11 is used for being connected with the metering reference component of the lithography machine.
First connecting piece 11 is three, wherein, all first connecting piece 11 all establishes on installed part 1, and all the interconnect of first connecting piece 11 on the cross section forms equilateral triangle, equilateral triangle's center with the geometric centre of installed part 1 is on same vertical axis.
The first connecting piece 11 can be a bolt, a screw or a stud, and the like, is a connecting piece convenient to disassemble and assemble, and is convenient to disassemble and assemble the mounting piece 1 and the metering reference part of the photoetching machine;
the mounting member 1 of the present embodiment is provided with three through holes, and the three first connecting members 11 respectively penetrate through the corresponding through holes to be connected with the reference component of the lithography machine;
in this embodiment, the connecting lines of the three first connecting pieces 11 are arranged in an equilateral triangle, so that the connection rigidity of the mounting piece 1 and the measurement reference part of the lithography machine can be effectively improved, and a balanced connection effect can be achieved; in some embodiments, four rectangular connecting pieces 11 may be used, and the connecting pieces may also be connected to the metrology reference feature of the lithography machine stably, and the number of the connecting pieces may be determined according to the actual situation, or a plurality of connecting pieces may be arranged in a circle, and the centers of the regular polygons or circles formed by the first connecting pieces 11 are on the axis of the center of the mounting piece 1.
Furthermore, the mounting part 1 has a mounting hole, the axis of the mounting hole is located on the geometric center of the mounting part 1, and the driving device 28 is plugged into the mounting hole.
Drive arrangement 28 be located on the mounting hole of installed part 1 geometric center, make drive arrangement 28 drive that can be more accurate installed part 1 removes, makes the removal of frame body 2 keeps comparatively accurate adjustment, avoids appearing because drive arrangement 28 with the problem of the relation production error of assembly between the installed part 1.
Further, the triangle is an isosceles triangle, and the center of the isosceles triangle and the geometric center of the frame body 2 are on the same vertical axis.
That is to say, when the connecting line of the geometric centers of the mounting pieces 1 form an isosceles triangle, especially an equilateral triangle, the accuracy of the pose adjustment of the reflector 3 and the stability after the pose adjustment is finished are improved.
Implementations in the present application also provide a reflective device, comprising:
a mirror mount as described above;
and the reflecting mirror 3 is connected with the frame body 2.
The effect and the specific assembling relation can be clearly obtained from the reflector bracket in the foregoing, and are not described herein again;
the reflector 3 and the frame body 2 can be fixedly connected together in a welding mode, a threaded connection mode, a clamping mode or a bonding mode and the like.
In this embodiment, the top of speculum 3 is equipped with first installation department 30 and mounting groove 31, the bottom extension of frame body 2 has first location foot 25 and second location foot 27, first location foot 25 has the cell body, first installation department 30 inserts in the cell body and with first location foot 25 is connected, second location foot 27 inserts mounting groove 31 and with mounting groove 31 is connected.
After the first installation part 30 is inserted into the groove body, the first installation part 30 can be connected together through a limiting pin, or a convex ring can be directly arranged on the first installation part 30, a convex ring is arranged in the groove body, and the convex ring passes through the convex ring, so that the first installation part 30 and the first positioning foot 25 can be connected together;
similarly, the mounting groove 31 and the second positioning leg 27 can be connected in various ways;
the first positioning leg 25 and the second positioning leg 27 can play a role in positioning and fixing.
In this embodiment, the first mounting portion 30 has a first hole, and the mounting groove 31 has a second hole passing through both side walls thereof;
further comprising:
a first shaft 22, the first shaft 22 passing through the first hole;
the second shaft 24 penetrates through the second hole and the mounting groove 31, and the mounting groove 31 is positioned in the middle of the second shaft 24;
a first elastic member 26, a first end of the first elastic member 26 being connected to the frame body 2, and a second end of the first elastic member 26 being connected to the first shaft 22;
a second elastic member 23, a first end of the second elastic member 23 is connected to the frame body 2, a second end of the second elastic member 23 is connected to the first shaft 22, and the first elastic member 26 and the second elastic member 23 are respectively located at two sides of the first mounting portion 30;
a third elastic member, a first end of which is connected to the frame body 2, and a second end of which is connected to a portion of the second shaft 24 located in the mounting groove 31;
wherein the first shaft 22 and the second shaft 24 are arranged in parallel and perpendicular to the geometric axis of the rack body 2.
Wherein the first elastic member 26, the second elastic member 23 and the third elastic member are preferably springs;
in order to facilitate the installation of the first elastic element 26 and the second elastic element 23, a first screw, a second screw and a third screw are arranged on the frame body 2, a first end of the first elastic element 26 is connected with the first screw, a first end of the second elastic element 23 is connected with the second screw, and a first end of the third elastic element is connected with the third screw; the first screw, the second screw and the third screw may be replaced by a bolt, a bolt or a stud, or may be three protrusions on the rack body 2.
The frame body 2 is connected with the reflector 3 through three elastic pieces, so that gravity compensation for the reflector 3 can be realized besides pre-tightening, the surface type error of the reflector 3 caused by gravity deformation of the reflector 3 is reduced, and the measurement accuracy is improved. Simultaneously installed part 1, frame body 2 and 3 three direct connections of speculum for compact structure occupies that space is little.
According to the invention, the vertical Z, rx and Ry freedom degrees of the reflector 3 can be automatically and quantitatively adjusted by the reflector 3 through the three piezoelectric ceramic linear motors, and meanwhile, the influence of the gravity of the reflector 3 on the deformation of the surface of the reflector 3 is reduced by utilizing the three springs connected with the frame body 2 and the reflector 3, so that the reflecting light path of the laser interferometer of the photoetching machine has high stability, no error is generated when a laser beam returns to the interferometer in the original path, and the measurement precision of the laser interferometer is ensured. The invention solves the difficult problem of difficult posture adjustment and positioning of the optical reflector 3 inside the photoetching machine, and has the function of automatically and quantitatively adjusting the vertical Z, rx and Ry freedom degrees of the reflector 3.
Further, the reflector 3 has a groove 32, the groove 32 is located on the surface where the first mounting portion 30 is located, and the position of the groove 32 is located on the reflector 3 on the side far away from the mounting groove 31.
That is to say, a partially hollowed structure is arranged at the back of the reflector 3, so that the weight is reduced, the structural strength is improved, and the accuracy of the posture adjustment of the reflector 3 and the stability after the posture adjustment is finished and fixed are improved due to the same symmetrical structure;
and the weight is reduced, the structural strength is improved, the gravity center of the reflector 3 is effectively close to the gravity center of an isosceles triangle formed by the three elastic pieces, the deformation influence of the gravity of the reflector 3 on the surface of the reflector 3 is further reduced, and the stability of the reflector 3 after the pose is fixed is improved.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (6)
1. A mirror holder, comprising:
the frame body is used for being connected with the reflector;
three mounting pieces, wherein the mounting pieces are used for being connected with a metering reference part of the photoetching machine; and
the driving devices are connected with the mounting pieces in a one-to-one correspondence mode, the mounting pieces are provided with mounting holes, the driving devices are inserted into the mounting holes to be in interference fit with the mounting holes, each driving device is respectively used for driving the corresponding mounting pieces so that corresponding parts of the frame body move along the Z-axis direction relative to each mounting piece and pose adjustment of the reflector is achieved, and the three driving devices are respectively and independently driven to control vertical Z, rx and Ry direction freedom degree pose adjustment of the reflector;
the driving device is a piezoelectric ceramic linear motor, wherein a stator of the piezoelectric ceramic linear motor is installed on the frame body, and a rotor of the piezoelectric ceramic linear motor is connected with the installation part;
the mounting piece is provided with a first connecting piece, and the first connecting piece is used for being connected with the metering reference part of the photoetching machine; the number of the first connecting pieces arranged on each mounting piece is three, and all the first connecting pieces are arranged on the mounting pieces;
wherein the mutual connection lines of the first connecting pieces on the mounting pieces form an equilateral triangle in cross section, and the center of the equilateral triangle is on the same vertical axis with the geometric center of the mounting pieces; the mounting piece is provided with a mounting hole, the axis of the mounting hole is positioned on the geometric center of the mounting piece, and the driving device is inserted into the mounting hole; the geometric centers of the mounting pieces are connected to form an equilateral triangle, and the centers of the equilateral triangle and the geometric center of the frame body are on the same vertical axis; the mutual connection lines of the three driving devices on the cross section form an equilateral triangle.
2. The mirror holder of claim 1, further comprising:
the anti-dropping part, anti-dropping part first end with the installed part is connected, anti-dropping part's second end with this body coupling of frame, wherein, anti-dropping part is used for the speculum is adjusted and is accomplished the back, and is right the speculum carries out the gesture and fixes.
3. A reflection device, comprising
The mirror frame of any of claims 1-2;
and the reflecting mirror is connected with the frame body.
4. The reflecting device according to claim 3, wherein a first mounting portion and a mounting groove are arranged at the top of the reflector, a first positioning pin and a second positioning pin extend from the bottom of the frame body, the first positioning pin is provided with a groove body, the first mounting portion is inserted into the groove body and connected with the first positioning pin, and the second positioning pin is inserted into the mounting groove and connected with the mounting groove.
5. The reflection apparatus according to claim 4,
the first mounting part is provided with a first hole, and the mounting groove is provided with a second hole penetrating through two side walls of the mounting groove;
further comprising:
a first shaft passing through the first bore;
the second shaft penetrates through the second hole and the mounting groove, and the mounting groove is positioned in the middle of the second shaft;
a first elastic member, a first end of the first elastic member being connected to the frame body, a second end of the first elastic member being connected to the first shaft;
a second elastic member, a first end of the second elastic member being connected to the holder body, a second end of the second elastic member being connected to the first shaft, and the first elastic member and the second elastic member being respectively located at both sides of the first mounting portion;
a third elastic member, a first end of the third elastic member being connected to the holder body, and a second end of the third elastic member being connected to a portion of the second shaft located in the mounting groove;
the first shaft and the second shaft are arranged in parallel and are perpendicular to the geometric axis of the frame body.
6. The reflection device according to claim 5, wherein the reflector has a groove thereon, and the groove is located on a surface of the first mounting portion and on the reflector on a side away from the mounting groove.
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| CN202111110520.4A CN113917794B (en) | 2021-09-22 | 2021-09-22 | Reflector frame and reflecting device |
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| CN202111110520.4A CN113917794B (en) | 2021-09-22 | 2021-09-22 | Reflector frame and reflecting device |
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| JP2002257509A (en) * | 2001-02-28 | 2002-09-11 | National Institute Of Advanced Industrial & Technology | Adjusting method of interferometer, interferometer used for implementation of the adjusting method, and processing program for the adjusting method |
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| CN113917794A (en) | 2022-01-11 |
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