CN115570275B - Multi-station laser processing device and alignment calibration method thereof - Google Patents
Multi-station laser processing device and alignment calibration method thereof Download PDFInfo
- Publication number
- CN115570275B CN115570275B CN202211378982.9A CN202211378982A CN115570275B CN 115570275 B CN115570275 B CN 115570275B CN 202211378982 A CN202211378982 A CN 202211378982A CN 115570275 B CN115570275 B CN 115570275B
- Authority
- CN
- China
- Prior art keywords
- laser
- camera
- nth
- processing
- station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012545 processing Methods 0.000 title claims abstract description 90
- 238000000034 method Methods 0.000 title claims abstract description 37
- 230000008569 process Effects 0.000 claims description 18
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 230000000007 visual effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 21
- 239000002184 metal Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 238000004590 computer program Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a multi-station laser processing device and an alignment calibration method thereof, wherein the device comprises the following components: the laser system is used for emitting laser to carry out marking, the vision system is used for monitoring and compensating the working state of the multi-station laser processing device, the Z-axis lifting module is used for adjusting the Z-axis positions of the laser system and the vision system, and the Y-axis displacement mechanism is used for adjusting the Y-axis positions of the laser system and the vision system. The alignment calibration method comprises the following steps: s1, marking alignment mark points on two sides of a flexible film; s2, the camera recognizes the alignment mark point to move in the X direction; s31, establishing a spatial position relation among cameras; s32, establishing a zero angle; s33, establishing a spatial position relation among lasers; s4, repeating the step S3 to finish alignment calibration. The device improves the precision of manufacturing the flexible film, the production efficiency is improved by multi-station simultaneous operation, the alignment calibration precision of the multi-station is improved by setting the zero angle and the zero point, and the consistency of multi-station laser processing is realized.
Description
Technical Field
The invention relates to the field of laser processing of flexible films, and particularly provides a multi-station laser processing device and an alignment calibration method thereof.
Background
Along with the development of laser technology, laser processing is increasingly applied to industrial production, and has the advantages of high quality, high precision, high speed and the like, and has special application advantages in flexible film processing. As the application of flexible metal films becomes wider, the cost of the flexible metal film is required to be lower and lower, and higher requirements are put on the efficiency of flexible metal film manufacturing equipment. The equipment is required to be produced and manufactured at a higher speed, and a great deal of chemical corrosion is used for manufacturing the metal thin film at present, so that the requirements on efficiency and precision can be met, but the equipment is poor in environmental friendliness and easy to cause chemical pollution. As environmental requirements are now increasing, those processes that are less environmentally friendly may be phased out.
Along with the continuous extension of flexible film product, new demand appears constantly, needs multistation, many laser heads simultaneous working, satisfies product production efficiency's demand, simultaneously, along with the improvement of product precision requirement, also higher and higher to the requirement of laser processing positioning accuracy. At present, multi-station laser processing alignment calibration is carried out by adopting methods of human eye observation and manual alignment, the prior art has poor precision and low efficiency, and each station is independently aligned without relevance, so that the product consistency is poor, the debugging period is long, the production efficiency is seriously affected, and the method has great limitation.
Disclosure of Invention
The invention aims to solve the problems, and provides a multi-station laser processing device which adopts a multi-station laser processing alignment calibration method to perform multi-station laser processing on a flexible film, so that the alignment calibration precision during laser processing among the multi-stations is improved, and the consistency of the multi-station laser processing is realized.
A multi-station laser processing apparatus comprising:
n processing stations, two parallel Y-direction sliding rails with equal height and a workbench, wherein N is an even number;
every two processing positions are symmetrically arranged on the substrate;
The base plate is connected to the middle position of the guide rail cross beam, and two ends of the guide rail cross beam are connected to the Y-direction slide rail through the sliding blocks;
Each processing station has the same structure and comprises a laser and a camera, wherein the laser is connected to the middle position of the substrate and is used for laser marking; the camera is connected to the connecting block protruding from the lower end of the base plate through the X-direction sliding rail, the camera is used for image recognition, the camera is connected with the controller, and recognition information is fed back to the controller to drive the X-direction sliding rail and the Y-direction sliding rail.
Preferably, the X-direction sliding rail and the Y-direction sliding rail are both electric control sliding tables.
Preferably, the table comprises a flexible membrane and a vacuum chuck, the flexible membrane being disposed on the vacuum chuck.
A para-position calibration method of a multi-station laser processing device comprises the following steps:
S1, placing a flexible film on a vacuum adsorption table, marking equidistant alignment mark points on two sides of the flexible film, and dividing the flexible film into N processing areas, wherein N is an even number;
S2, carrying out corresponding numbering on N processing areas, cameras and lasers;
s3, performing para-position calibration on the nth laser and the (n+1) th laser, wherein the value range of N is an integer from 1 to N-1;
S31, establishing a spatial position relation between an nth camera and an n+1th camera, wherein the specific process is as follows:
the nth camera and the n+1 th camera identify the alignment mark points of the nth processing area and the n+1 th processing area, X-direction and Y-direction movement is carried out according to the information of the alignment mark points, so that the alignment mark points of the nth processing area and the n+1 th processing area are positioned at the centers of the visual fields of the nth camera and the n+1 th camera, and the spatial position relation between the nth camera and the n+1 th camera is determined;
S32, establishing a zero angle, wherein the specific process is as follows:
the nth laser and the n+1th laser respectively process patterns containing vertical angles, and the nth camera carries out X, Y-axis identification on the processed patterns of the nth laser and sets the processed patterns as zero angles;
The n+1th camera carries out X, Y-axis identification on the processing pattern of the n+1th laser, and controls the n+1th laser to deflect according to the zero angle, so that the X, Y-axis identified by the n camera is parallel to the X, Y-axis identified by the n+1th camera;
S33, establishing a spatial position relation between an nth laser and an n+1th laser, wherein the specific process is as follows:
The nth laser and the n+1th laser are respectively dotted and are set as an nth zero point and an n+1th zero point, the nth camera and the n+1th camera respectively identify the space positions of the nth zero point and the n+1th zero point relative to the center of a visual field, the space position relation between the nth laser and the nth camera and the space position relation between the n+1th laser and the n+1th camera are respectively established, and the space position relation between the nth laser and the n+1th camera established in the S2 is combined to obtain the space position relation between the nth laser and the n+1th laser, so that the para-position calibration of the nth laser and the n+1th laser is completed;
s4, repeating the step S3 until all N lasers finish alignment calibration.
Preferably, the pattern with vertical angles can be a cross or a letter-like pattern.
Compared with the prior art, the invention has the beneficial effects that:
The device of the invention manufactures the flexible film by a laser imprinting method, thereby avoiding pollution caused by traditional chemical corrosion; the camera identification reduces the participation, improves the precision of manufacturing the flexible film, and improves the production efficiency by multi-station simultaneous operation.
According to the alignment calibration method, the alignment calibration precision in laser processing among multiple stations is improved through zero angle and zero setting, the consistency of the laser processing among the multiple stations is realized, and the accurate alignment calibration can still be realized when the flexible film is slightly offset.
Drawings
Fig. 1 is an isometric view of a multi-station laser processing apparatus provided in accordance with an embodiment of the present invention;
FIG. 2 is a flow chart of a method for calibrating alignment of a multi-station laser processing device according to an embodiment of the invention;
FIG. 3 is a top view of a flexible film provided in accordance with an embodiment of the present invention;
FIG. 4 is a diagram of alignment calibration of a first laser and a second laser according to an embodiment of the present invention;
Fig. 5 is a diagram illustrating alignment calibration of the second laser and the third laser according to an embodiment of the present invention.
Wherein reference numerals include:
a laser 1 and a Y-shaped guide rail 2;
A table 3, a vacuum suction table 31, a flexible film 32, an alignment mark 311, a first processing region 3121, a second processing region 3122, a third processing region 3123, a fourth processing region 3124, a fifth processing region 3125, a sixth processing region 3126, a seventh processing region 3127, an eighth processing region 3128;
a rail beam 4 and a base plate 5;
The camera assembly 6, the camera 61, the camera fixing block 62, the X-direction slide rail 63 and the connecting block 64;
a first laser processing pattern a, a second laser processing pattern b, and a third laser processing pattern c.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
In the multi-station laser processing device provided by the embodiment of the invention, the laser system takes the Z-axis lifting module as symmetrical axis symmetry and has the same structure on two sides, and in the embodiment, only one side of the laser system 1 is taken as an example for structure connection relation; the vision system 2 uses the Z-axis lifting module as symmetry axis and has the same structure on both sides, and in this embodiment, only one side of the vision system 2 is used as an example for illustrating the structure connection relationship.
In the present embodiment, the Y-axis displacement mechanism is defined as a Y-axis positive direction along the guide rail direction, and the vertical upward direction is a Z-axis positive direction.
Fig. 1 shows an isometric view of a multi-station laser processing apparatus provided in accordance with an embodiment of the present invention.
As shown in fig. 1, a multi-station laser processing apparatus provided in an embodiment of the present invention includes: n processing stations, two parallel Y-directional slide rails 2 with equal height and a workbench 3, wherein N is an even number, and n=4 in this embodiment.
Every two processing positions are symmetrically arranged on the base plate 5, the base plate 5 is connected to the middle position of the guide rail cross beam 4, two ends of the guide rail cross beam 4 are connected to the Y-direction slide rail 2 through sliding blocks, the Y-direction slide rail 2 and the X-direction slide rail 63 can adopt electric control sliding tables or automatic guide rails, and the Y-axis slide rail 2 is used for adjusting the distance between different processing position groups;
the structure of each processing station is the same and comprises a laser 1 and a camera component 6, so the embodiment only uses the structure of one processing station to describe in detail, the laser 1 is connected at the middle position of the substrate 5, and the laser 1 is used for emitting laser to carry out imprinting;
the camera assembly 6 comprises a camera 61, a camera fixing block 62, an X-direction sliding rail 63 and a connecting block 64, and is used for monitoring and compensating the working state of the multi-station laser processing device.
The camera 61 is connected to the connection block 64 protruding from the lower end of the base plate 5 through the X-direction slide rail 63, the camera 61 is used for image recognition and information feedback, the camera 61 is connected to the controller, and feeds back the recognition information to the controller, the controller drives and controls the X-direction slide rail 63 and the Y-direction slide rail 2 according to the feedback information, and the content of the controller belongs to the prior art, and is not described herein.
The workbench 3 comprises a vacuum adsorption table 31 and a flexible film 32, wherein the vacuum adsorption table 31 is used for adsorbing and paving the flexible film 32.
The embodiment of the invention provides an alignment calibration method for a multi-station laser processing device, which takes alignment calibration of 4 lasers as an example, and is described as follows:
Fig. 2 shows a flow of a method for calibrating alignment of a multi-station laser processing device according to an embodiment of the invention.
As shown in fig. 2, the alignment calibration method of the multi-station laser processing device provided by the embodiment of the invention includes the following steps:
fig. 3 illustrates a top view of a flexible film provided in accordance with an embodiment of the present invention.
As shown in fig. 3, S1, a flexible film 32 is placed on a vacuum adsorption table 31, and two sides of the flexible film 32 are marked with equidistant alignment marks 311 and divided into N processing areas, where N is an even number, a first processing area 3121, a second processing area 3122, a third processing area 3123, a fourth processing area 3124, a fifth processing area 3125, a sixth processing area 3126, a seventh processing area 3127 and an eighth processing area 3128 are shown in the figure;
S2, carrying out corresponding numbering on the 4 cameras and the 4 lasers;
Fig. 4 shows alignment calibration of a first laser and a second laser according to an embodiment of the present invention.
S3, as shown in FIG. 4, performing alignment calibration on the laser;
the spatial position relation between the first camera and the second camera is established, and the specific process is as follows:
the first camera and the second camera identify alignment mark points of the first processing area 3121 and the second processing area 3122, and move in the X direction and the Y direction according to the information of the alignment mark points, so that the alignment mark points of the first processing area and the second processing area are positioned at the centers of the visual fields of the first camera and the second camera, and the spatial position relationship of the first camera and the second camera is determined;
S32, establishing a zero angle, wherein the specific process is as follows:
The first laser and the second laser respectively process patterns containing vertical angles, the embodiment processes cross and square patterns, the first camera carries out X, Y shaft identification on the first laser processing pattern a, and the X, Y shafts which are mutually perpendicular are set as zero angles;
Performing X, Y axis identification on the second laser processing pattern b by the second camera, and controlling the second laser to deflect according to the zero angle, so as to ensure that the X, Y axis identified by the first camera is completely parallel to the X, Y axis identified by the second camera;
S33, establishing a spatial position relation between the first laser and the second laser, wherein the specific process is as follows:
The first laser and the second laser respectively perform dotting and are set as a first zero point and a second zero point, the first camera and the second camera respectively identify the first zero point and the second zero point, the spatial position of the first zero point relative to the center of the field of view of the first camera is calculated, the spatial position of the second zero point relative to the center of the field of view of the second camera is calculated, the spatial position relation between the first laser and the first camera and the spatial position relation between the second laser and the second camera are respectively established according to the calculation result, the spatial position relation between the first camera and the second camera established in the S2 is combined, the spatial position relation between the first laser and the second laser is obtained, the alignment calibration of the first laser and the second laser is completed, and the alignment calibration of the first laser and the second laser can realize synchronous accurate processing of the flexible film 32.
Fig. 5 shows alignment calibration of the second laser and the third laser according to an embodiment of the present invention.
As shown in fig. 5, the alignment calibration of the second laser and the third laser and the alignment calibration of the third laser and the fourth laser are the same as those of the first laser and the second laser, and are not described herein.
In order to improve the efficiency, more groups of lasers are designed for synchronous laser processing, and the steps S3 and S4 adopt computer programs, and the computer programs are briefly described as follows:
s3, initializing n=1;
S31, establishing a spatial position relation between an nth camera and an n+1th camera, wherein the specific process is as follows:
the nth camera and the n+1 th camera identify the alignment mark points of the nth processing area and the n+1 th processing area, X-direction and Y-direction movement is carried out according to the information of the alignment mark points, so that the alignment mark points of the nth processing area and the n+1 th processing area are positioned at the centers of the visual fields of the nth camera and the n+1 th camera, and the spatial position relation between the nth camera and the n+1 th camera is determined;
S32, establishing a zero angle, wherein the specific process is as follows:
the nth laser and the n+1th laser respectively process patterns containing vertical angles, and the nth camera carries out X, Y-axis identification on the processed patterns of the nth laser and sets the processed patterns as zero angles.
The n+1th camera carries out X, Y-axis identification on the processing pattern of the n+1th laser, and controls the n+1th laser to deflect according to the zero angle, so that the X, Y-axis identified by the n camera is parallel to the X, Y-axis identified by the n+1th camera.
S33, establishing a spatial position relation between an nth laser and an n+1th laser, wherein the specific process is as follows:
The nth laser and the n+1th laser are respectively dotted and are set as an nth zero point and an n+1th zero point, the nth camera and the n+1th camera respectively identify the space positions of the nth zero point and the n+1th zero point relative to the center of a visual field, the space position relation between the nth laser and the nth camera and the space position relation between the n+1th laser and the n+1th camera are respectively established, and the space position relation between the nth laser and the n+1th camera established in the S2 is combined to obtain the space position relation between the nth laser and the n+1th laser, so that the para-position calibration of the nth laser and the n+1th laser is completed.
S4, if N is smaller than N-1, updating n=n+1, and returning to execute S3;
And if N is equal to N-1, stopping para-position calibration.
While embodiments of the present invention have been illustrated and described above, it will be appreciated that the above described embodiments are illustrative and should not be construed as limiting the invention. Variations, modifications, alternatives and variations of the above-described embodiments may be made by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention do not limit the scope of the present invention. Any other corresponding changes and modifications made in accordance with the technical idea of the present invention shall be included in the scope of the claims of the present invention.
Claims (3)
1. The utility model provides a counterpoint calibration method of multistation laser beam machining device which characterized in that, multistation laser beam machining device includes: n processing stations, two parallel Y-direction sliding rails with equal height and a workbench, wherein N is an even number;
each two processing positions are symmetrically arranged on the substrate;
The base plate is connected to the middle position of the guide rail cross beam, and two ends of the guide rail cross beam are connected to the Y-direction slide rail through sliding blocks;
each processing station has the same structure and comprises a laser and a camera, wherein the laser is connected to the middle position of the substrate and is used for laser imprinting; the camera is connected to the connecting block protruding from the lower end of the base plate through an X-direction sliding rail, the camera is used for image recognition, the camera is connected with the controller and feeds back the recognition information to the controller, the controller drives the X-direction sliding rail and the Y-direction sliding rail,
The work bench includes: a flexible film and a vacuum adsorption stage, the flexible film being disposed on the vacuum adsorption stage;
the alignment calibration method of the multi-station laser processing device comprises the following steps:
S1, placing a flexible film on a vacuum adsorption table, marking equidistant alignment mark points on two sides of the flexible film, and dividing the flexible film into N processing areas;
s2, carrying out corresponding numbering on the N processing areas, the camera and the laser;
s3, performing para-position calibration on the nth laser and the (n+1) th laser, wherein the value range of n is an integer of 1-N-1;
S31, establishing a spatial position relation between an nth camera and an n+1th camera, wherein the specific process is as follows:
the nth camera and the n+1 th camera identify the alignment mark points of the nth processing area and the n+1 th processing area, X-direction and Y-direction movement is carried out according to the information of the alignment mark points, so that the alignment mark points of the nth processing area and the n+1 th processing area are positioned at the centers of the visual fields of the nth camera and the n+1 th camera, and the spatial position relation between the nth camera and the n+1 th camera is determined;
S32, establishing a zero angle, wherein the specific process is as follows:
The nth laser and the n+1th laser respectively process patterns containing vertical angles, and the nth camera carries out X, Y-axis identification on the processed patterns of the nth laser and sets the processed patterns as the zero-position angles;
The n+1th camera carries out X, Y-axis identification on the processing pattern of the n+1th laser, and controls the n+1th laser to deflect according to the zero angle, so that the X, Y-axis identified by the n camera is parallel to the X, Y-axis identified by the n+1th camera;
S33, establishing a spatial position relation between an nth laser and an n+1th laser, wherein the specific process is as follows:
The nth laser and the n+1th laser are respectively dotted and are set as an nth zero point and an n+1th zero point, the nth camera and the n+1th camera respectively identify the space positions of the nth zero point and the n+1th zero point relative to the center of a visual field, the space position relation between the nth laser and the nth camera and the space position relation between the n+1th laser and the n+1th camera are respectively established, and the space position relation between the nth laser and the n+1th camera established in the S2 is combined to obtain the space position relation between the nth laser and the n+1th laser, so that the para-position calibration of the nth laser and the n+1th laser is completed;
s4, repeating the step S3 until all N lasers finish alignment calibration.
2. The alignment calibration method of a multi-station laser processing device according to claim 1, wherein the pattern with vertical angle can be cross or square pattern.
3. The alignment calibration method of the multi-station laser processing device of claim 1, wherein the X-direction slide rail and the Y-direction slide rail are both electric control slide tables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211378982.9A CN115570275B (en) | 2022-11-04 | 2022-11-04 | Multi-station laser processing device and alignment calibration method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211378982.9A CN115570275B (en) | 2022-11-04 | 2022-11-04 | Multi-station laser processing device and alignment calibration method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115570275A CN115570275A (en) | 2023-01-06 |
| CN115570275B true CN115570275B (en) | 2024-06-25 |
Family
ID=84588781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211378982.9A Active CN115570275B (en) | 2022-11-04 | 2022-11-04 | Multi-station laser processing device and alignment calibration method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115570275B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN215588157U (en) * | 2021-08-31 | 2022-01-21 | 苏州迈为科技股份有限公司 | Multi-station laser processing mechanism and display screen etching device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1058175A (en) * | 1996-08-27 | 1998-03-03 | Nikon Corp | Calibration method for optical axis of laser beam machine |
| JP4672833B2 (en) * | 2000-06-22 | 2011-04-20 | 株式会社カネカ | Method and apparatus for recognizing alignment mark for thin film laser scribing |
| CN106363304B (en) * | 2016-08-19 | 2018-05-22 | 武汉华工激光工程有限责任公司 | The device that a kind of polyphaser correction and localization method and glass laser are cut |
| CN108269286B (en) * | 2016-12-30 | 2020-06-19 | 中国空气动力研究与发展中心超高速空气动力研究所 | Multi-camera pose association method based on combined three-dimensional signs |
| CN113146060A (en) * | 2021-05-31 | 2021-07-23 | 苏州德龙激光股份有限公司 | Laser processing device and method for rapidly etching large-format conductive film by multiple beams |
| CN113256737B (en) * | 2021-06-21 | 2021-10-15 | 中科长光精拓智能装备(苏州)有限公司 | Identification camera calibration device and calibration method thereof |
| CN113231745B (en) * | 2021-07-12 | 2022-02-15 | 中钞印制技术研究院有限公司 | Laser engraving plate-making apparatus, control system, plate-making method, and storage medium |
| CN113828928A (en) * | 2021-10-13 | 2021-12-24 | 浙江师范大学 | Device and method for processing multiple parallel photovoltaic synergistic micro-nano structures |
| CN217019036U (en) * | 2021-11-29 | 2022-07-22 | 广东镭泰激光智能装备有限公司 | Flexible label paper laser engraving visual positioning system |
-
2022
- 2022-11-04 CN CN202211378982.9A patent/CN115570275B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN215588157U (en) * | 2021-08-31 | 2022-01-21 | 苏州迈为科技股份有限公司 | Multi-station laser processing mechanism and display screen etching device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115570275A (en) | 2023-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101870039B (en) | Double-workbench drive laser processing machine and processing method thereof | |
| CN101293419B (en) | Digital full-automatic register system for glass screen painting | |
| CN102179996A (en) | Substrate positioning method suitable for screen printing technology | |
| CN104875514A (en) | Screen printer and screen printing method thereof | |
| US11791178B1 (en) | Compliant mechanical system for mini/micro chip mass transfer and packaging | |
| CN112053985A (en) | Wafer alignment device and alignment method thereof | |
| CN201227883Y (en) | Digital full-automatic register system of glass screen printing | |
| WO2014010154A1 (en) | Scribing method and scribing device | |
| CN115570275B (en) | Multi-station laser processing device and alignment calibration method thereof | |
| CN113290330B (en) | Laser processing head space position calibration method of six-axis five-linkage machine tool | |
| CN207884983U (en) | A kind of substrate rotating device and a kind of substrate adjusting apparatus | |
| CN211278404U (en) | Hand eye calibration device of mechanical arm | |
| CN205787593U (en) | A kind of six degree of freedom adjusting apparatus | |
| CN108955530B (en) | Mechanical optical position convenient calibration system and calibration method thereof | |
| CN216387740U (en) | Lifting type photoetching machine | |
| CN208390354U (en) | One kind can object identification, high-precision vision glue applying mechanism | |
| CN206595232U (en) | A kind of wafer stage chip upside-down mounting locating platform | |
| CN103419081A (en) | Bench synchronous positioning compensation system | |
| CN112631080B (en) | Exposure method of double-workbench exposure machine | |
| CN111308868B (en) | Alignment compensation method of direct-writing exposure machine | |
| CN111447752A (en) | High-line-number ultra-clear printing method | |
| CN109905969A (en) | A kind of PCB plug-in unit independent positioning method of online plug-in machine | |
| CN219115013U (en) | UVW alignment mechanism of workbench | |
| CN111965944A (en) | Novel double-sided double-carrier-plate mechanism digital direct-writing exposure machine and exposure method | |
| CN221326932U (en) | Single-workbench moving platform and LDI exposure machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |