CN205787593U - A kind of six degree of freedom adjusting apparatus - Google Patents
A kind of six degree of freedom adjusting apparatus Download PDFInfo
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- CN205787593U CN205787593U CN201620519918.1U CN201620519918U CN205787593U CN 205787593 U CN205787593 U CN 205787593U CN 201620519918 U CN201620519918 U CN 201620519918U CN 205787593 U CN205787593 U CN 205787593U
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Abstract
The utility model discloses a kind of six degree of freedom adjusting apparatus, including base and guiding mechanism, described guiding mechanism includes being arranged on described base and can adjusting structure to adjusting structure, Y-direction adjustment structure and Z-direction by substrate and the setting X on the substrate of movement on described base, described X is to adjusting structure or described Y-direction adjustment structure at least provided with two, described Z-direction adjustment structure is at least provided with three, and regulating object is arranged on the substrate；Six degree of freedom adjusting apparatus described in the utility model realizes the six degree of freedom of regulating object and adjusts, structure zero-clearance transmission is adjusted during adjustment, improve positioning precision, and all adjustment operates all a direction execution, easy to adjust, make described six degree of freedom adjusting apparatus take up room little, use when being particluarly suitable for adjusting limited space.
Description
Technical field
This utility model relates to litho machine field, particularly to a kind of six degree of freedom adjusting apparatus.
Background technology
In the lithographic apparatus, the unit such as alignment device has the highest requirement to positioning precision, but whole
Equipment, during carrying out modularized design, is difficult to ensure above-mentioned each unit by the machining accuracy of part
Equipment is relative to the positioning precision of miscellaneous part.Plus the accumulation of error during assembling, actual debug process
Middle can find that the units such as alignment device have bigger position deviation, the most just need alignment device etc.
Unit carries out the position adjustment of multiple degrees of freedom, trace, to ensure the relative positional accuracy between each parts
Requirement.
Traditional slide unit majority is single shaft or the bidimensional being formed by stacking or the mechanism of three-dimensional, it is difficult to meet multiaxis
The needs adjusted, and it is big to take up room, and is difficult to place in the lithographic equipment of compact conformation；Stroke is little, high
Precision, slim slide unit price the most costly, and the slide unit of outsourcing often interface size can not with reality need
Match.
Number of patent application be 201320284565.8 Chinese patent disclose a kind of three-dimension adjusting mechanism, use
Standard slide unit realizes three directions regulation (X, Y, Z-direction), but the realization of these three direction regulation needs three
Individual direction performs to adjust operation, is only capable of using in the scope of space abundance；Number of patent application is
201220171997.3 Chinese patent disclose a kind of four-degree-of-freedom accurate adjusting mechanism, use and adjust screw
Realizing four-degree-of-freedom regulation (X, Y, Rx, Ry), the realization of this four-degree-of-freedom regulation needs in both direction
Perform to adjust operation, can not use in the case of adjustment space is exclusive.
Utility model content
This utility model provides a kind of six degree of freedom adjusting apparatus, in order to solve mask prealignment illumination group
When each unit equipment of part carries out position adjustment, the adjusting apparatus of employing can not meet positioning precision height simultaneously and adjust
Engagement positions takes up room little problem.
In order to solve above-mentioned technical problem, the technical solution of the utility model is:
A kind of six degree of freedom adjusting apparatus, including base and guiding mechanism, described guiding mechanism includes being arranged on
On described base and can on described base movement substrate and X on the substrate is set to adjustment
Structure, Y-direction adjust structure and Z-direction adjusts structure, and described X is to adjusting structure or described Y-direction adjustment structure
At least provided with two, described Z-direction adjustment structure is at least provided with three, and regulating object is arranged on the substrate,
Described X to adjust structure and described Y-direction adjust structure described regulating object is carried out X to and Y-direction translation adjust
Whole and Rz rotates and adjusts, and described Z-direction adjusts structure and described regulating object carries out Z-direction translation adjustment, with
And Rx and Ry rotates and adjust, described regulating object is realized six degree of freedom and adjusts.
As preferably, described guiding mechanism also includes that the first preloading spring, described first preloading spring are arranged on
The lower surface of described substrate and with X to forming angle, described first preloading spring one end connects described substrate,
The other end connects described base, provides X to the pretightning force with Y-direction for described substrate.
As preferably, described X to adjust structure include X to the first alignment pin, X to adjusting module and X to
Lock-screw, described X is arranged on described base to the first alignment pin, and described X is arranged on to adjusting module
On described substrate, and contact to the first alignment pin with described X in the X direction, described X to adjusting module with
Described X is that locating surface is adjusted to the first alignment pin, when described X moves in the same direction to adjustment structure, real
The X of existing described regulating object adjusts to translation, when described X is in time adjusting structure adverse movement, it is achieved described
The Rz of regulating object to rotate adjust, described X to adjusting module adjust during due to described first pretension bullet
The effect of spring, described X contacts to the first alignment pin with described X all the time to adjusting module, and described X is to locking
Screw is arranged on described X on adjusting module, and after adjustment terminates, X described in locking positioning is to adjusting structure.
As preferably, described X to adjusting module include X to input module with described X to input module phase
X even is to output module and X to gripper shoe, and described X is fixed to gripper shoe by described X to input module
On the substrate, described X to output module arrange on the substrate, and in the X direction with described X
To the first alignment pin contact, described X is arranged on described X on output module to lock-screw, is adjusting knot
After bundle, X described in locking positioning is to adjusting structure.
As preferably, described X to input module include X to adjusting screw and X to adjustment block, described X to
Adjustment block is provided with the first surface groove, and described X is arranged on the lower surface of described substrate to adjustment block, and described
First surface groove is arranged in X direction, and described X sequentially passes through described substrate and institute to adjusting screw along negative Z-direction
State X and to adjustment block and be rotatably connected at described X in gripper shoe, described X to adjustment block and described X to tune
Whole screw is rotatably connected, and described X is rigidly fixed in the lower surface of described substrate to gripper shoe, and described X is to defeated
Enter module by being connected together described X to output module with described first surface groove.
As preferably, described X to output module include X to ball rod, X to the second alignment pin, X to dialling
Bar, described X is arranged on the substrate to the second alignment pin by described X to driving lever, and described X is to driving lever
Can be around described X to the second alignment pin rotary motion, described X is provided with X to arcwall face to driving lever, in X side
The most described X contacts to the first alignment pin with described X to arcwall face, described X to driving lever by described X to
Ball rod connects described X to adjustment block, and described X is arranged on described X on driving lever to the afterbody of ball rod,
Ball head is arranged in described first surface groove the described X that is slidably connected to adjustment block, and described X is to lock-screw
Being arranged on described X on driving lever, after adjustment terminates, X described in locking positioning is to adjusting structure.
As preferably, described substrate is provided with the described X of placement to input module and described X to output module
X-directional concave.
As preferably, described Y-direction adjusts structure and includes Y-direction alignment pin and Y-direction adjusting module, described Y-direction
Alignment pin is arranged on described base, and described Y-direction adjusting module is arranged on the substrate, and in the Y direction
Above contact with described Y-direction alignment pin, when described Y-direction adjustment structure is moved in the same direction, it is achieved described adjustment is right
The Y-direction translation of elephant adjusts；When described Y-direction adjusts structure adverse movement, it is achieved the Rz of described regulating object
Adjusting to rotating, described Y-direction adjusting module is adjusted with described Y-direction alignment pin for locating surface, described Y
Due to the effect of described first preloading spring, described Y-direction adjusting module and institute during adjusting module adjusts
State Y-direction alignment pin to contact all the time.
As preferably, described Y-direction adjusting module includes Y-direction input module, arrange along Y-direction and with described Y
To Y-direction output module and the Y-direction gripper shoe of alignment pin contact, described Y-direction input module is defeated with described Y-direction
Going out module to be connected, described Y-direction input module is fixed on by described Y-direction gripper shoe with described Y-direction output module
On described substrate.
As preferably, described Y-direction input module includes that Y-direction adjusts screw and Y-direction adjustment block, described Y-direction
Adjustment block is provided with the second surface groove, described Y-direction adjustment block and described Y-direction output module and is arranged on described base
The lower surface of plate, described second surface groove is arranged along Y-direction, and described Y-direction output module passes through described second
Surface groove is slidably connected described Y-direction adjustment block, and described Y-direction adjusts screw and sequentially passes through described base along negative Z-direction
Plate and described Y-direction adjustment block are also rotatably connected in described Y-direction gripper shoe, and described Y-direction adjustment block is with described
Y-direction adjusts screw and is rotatably connected, and described Y-direction gripper shoe is rigidly fixed in the lower surface of described substrate, by institute
State Y-direction input module and described Y-direction output module is fixed on the substrate and limited described Y-direction and adjusts spiral shell
Silk can only carry out Rz adjustment.
As preferably, described Y-direction output module includes that Y-direction ball rod and Y-direction perform block, and described Y-direction is held
Row block is arranged in described Y-direction gripper shoe along Y-direction, and contacts with described Y-direction alignment pin in the Y direction,
Contact surface is Y-direction arcwall face, and described Y-direction performs block and connects the adjustment of described Y-direction by described Y-direction ball rod
Block, the afterbody of described Y-direction ball rod is arranged on described Y-direction and performs on block, and ball head is slidably connected described the
In two surface grooves, connect described Y-direction input module.
As preferably, described substrate is provided with through hole, and described Y-direction alignment pin is arranged on institute through described through hole
State on base.
As preferably, described substrate is provided with places described Y-direction input module and described Y-direction output module
Y-direction groove.
As preferably, described X is identical with the adjustment resolution that described Y-direction adjusts screw to adjusting screw, institute
State the inclination of the second surface groove in the angle of inclination of X first surface groove in adjustment block and described Y-direction adjustment block
Angle is identical.
As preferably, described Z-direction adjusts structure and includes that Z-direction pretension screw, Z-direction adjust screw and Z-direction lock
Tight spring, described Z-direction adjusts screw and through described substrate and is rotatably connected on described base along negative Z-direction,
Described Z-direction pretension screw along negative Z-direction be rotatably connected described substrate and with described base contacts, described Z-direction is pre-
Tight screw has pretension and supports the effect of described substrate, regulates described Z-direction and adjusts screw, and combines described Z
The pretightning force applied to pretension screw, it is possible to achieve described substrate moves along Z-direction, described Z-direction locking spring
Along negative Z-direction through described substrate, and one end connects the described substrate other end and connects described base, when adjusting knot
After bundle, Z-direction described in locking positioning adjusts structure, can realize institute when adjusting described Z-direction adjustment structure simultaneously
Stating regulating object and carry out Z-direction translation adjustment, when fixing, a described Z-direction adjustment structure is constant, adjusts simultaneously
Remaining described Z-direction adjusts structure and can realize described regulating object carries out Rx and Ry rotation adjustment.
As preferably, described Z-direction pretension screw is bulb screw.
As preferably, described base is provided with the base groove arranging described substrate, and described substrate includes installing
Portion and adjustment portion, described adjustment portion is arranged in described base groove, and described X is to adjusting structure, Y-direction tune
Whole structure and Z-direction adjust structure and are arranged in described adjustment portion, and described regulating object is arranged on described installation portion
On.
Compared with prior art, this utility model has the advantage that
(1) six degree of freedom adjusting apparatus described in the utility model passes through rational deployment guiding mechanism, it is achieved
The X of regulating object to, Y-direction, Z-direction translation adjust and Rx, Ry, Rz rotation adjust, the most in fact
Existing six degree of freedom adjusts, and improves positioning precision；
(2) all adjustment operations of six degree of freedom adjusting apparatus described in the utility model are all in a direction
Perform, easy to adjust so that described six degree of freedom adjusting apparatus takes up room little, it is particluarly suitable for adjusting sky
Between used in limited time；
(3) six degree of freedom adjusting apparatus described in the utility model has spring preloading device, can realize adjusting
Whole object X to, Y-direction, the pretension in three directions of Z-direction, it is ensured that during adjustment adjust structure zero-clearance transmission；
(4) six degree of freedom adjusting apparatus Adjustment precision described in the utility model depends on adjusting dividing of screw
Resolution and the distribution distance of guiding mechanism, computing formula is simple, and Adjustment precision can adjust according to demand, at light
The fields such as and machinery all can use, and range is wide.
Accompanying drawing explanation
Fig. 1 is the structural representation of the described six degree of freedom adjusting apparatus of this utility model one specific embodiment；
Fig. 2 is the top view of the described guiding mechanism of this utility model one specific embodiment；
Fig. 3 is the upward view of the described guiding mechanism of this utility model one specific embodiment；
Fig. 4 is the structural representation of the described base of this utility model one specific embodiment；
Fig. 5 is the profile of the described guiding mechanism of this utility model one specific embodiment；
Fig. 6 is the structural representation of the described substrate of this utility model one specific embodiment；
Fig. 7 is that the described X of this utility model one specific embodiment is to the structural representation adjusting structure；
Fig. 8 is the structural representation of the described Y-direction adjustment structure of this utility model one specific embodiment；
Fig. 9 is the structural representation of the described Z-direction adjustment structure of this utility model one specific embodiment；
Figure 10 is that the described X of this utility model one specific embodiment is to the structural representation of adjustment block；
Figure 11 is that the described X of this utility model one specific embodiment is to the structural representation of ball rod；
Figure 12 is that the described X of this utility model one specific embodiment is to the structural representation of driving lever；
Figure 13 is the structural representation of the described Y-direction execution block of this utility model one specific embodiment；
Figure 14 is that the described X of this utility model one specific embodiment adjusts to the distance adjusted between structure, Z-direction
The schematic diagram of the distance between whole structure；
Figure 15 is the described X of this utility model one specific embodiment the first surface groove in adjustment block and described
The schematic diagram at the angle of inclination of the second surface groove of Y-direction adjustment block；
Figure 16 is that the described X of this utility model one specific embodiment is to adjusting structure input and exporting described X
Schematic diagram to the distance of the second alignment pin.
Shown in figure: 1-base, 11-base groove, 2-guiding mechanism, 3-regulating object, 21-substrate, 211-X
To groove, 212-Y to groove, 213-through hole, 22-X to adjusting structure, 23-Y to adjusting structure, 24-Z
To adjusting structure, 25-the first preloading spring, 221-X to the first alignment pin, 222-X to adjusting screw, 223-X
Fixed to second to ball rod, 225-X to adjustment block, 2231-the first surface groove, 2232-screw hole, 224-X
Position pin, 2251-ball head, 2252-afterbody, 226-X to lock-screw, 227-X to driving lever, 2271-X to
Arcwall face, 2272-pin-and-hole, 228-X to gripper shoe, 234-Y to perform block, 2341-Y to arcwall face, 235-Y
To gripper shoe, 236-Y to alignment pin, 241-Z to adjusting screw, 242-Z to pretension screw, 243-Z to lock
Tight spring.
Detailed description of the invention
Understandable for enabling above-mentioned purpose of the present utility model, feature and advantage to become apparent from, below in conjunction with attached
Detailed description of the invention of the present utility model is described in detail by figure.It should be noted that, this utility model accompanying drawing
All use the form of simplification and all use non-ratio accurately, only in order to aid in illustrating this reality conveniently, lucidly
By the purpose of new embodiment.
Refer to Fig. 1～3, a kind of six degree of freedom adjusting apparatus, including base 1 and guiding mechanism 2, described tune
Complete machine structure 2 includes that 21, two X of substrate adjust 23, three Z of structure to adjusting 22, Y-direction of structure
To adjusting structure 24 and the first preloading spring 25, described substrate 21 includes installation portion and adjustment portion, described tune
Whole be arranged on described base 1, described X to adjusting structure 22, Y-direction adjusts structure 23 and Z-direction is adjusted
Whole structure 24 is arranged in described adjustment portion, and regulating object 3 is arranged on described installation portion, described base 1
Being provided with the base groove 11 arranging described adjustment portion, described substrate 21 is arranged in described base groove 11
And can move in described base groove 11, described Y-direction adjusts structure 23 and is positioned at the center in described adjustment portion
Position, described X is positioned at edge, described adjustment portion to adjusting structure 22, and described Z-direction adjusts structure 24 in institute
Stating distribution triangular in shape in adjustment portion, support described substrate 21, described first preloading spring 25 is arranged on described
The lower surface of substrate 21 and connect described base to shape angle at 45 °, described first preloading spring 25 one end with X
Plate 21, the other end connects described base 1, provides X to the pretightning force with Y-direction for described substrate 21.
Refer to Fig. 4, Fig. 5 and Fig. 7, described X to adjust structure 22 include X to the first alignment pin 221,
X to adjusting module and X to lock-screw 226, described X to adjusting module include X to input module and
The X that described X is connected to input module to gripper shoe 228, refer to Fig. 6 to output module and X, described
Substrate 21 is provided with the described X of placement to input module and described X to the X-directional concave 211 of output module, institute
State X to input module include X to adjust screw 222 and X to adjustment block 223, described X is to output module
Determine to first to driving lever 227, described X to the second alignment pin 225 and X to ball rod 224, X including X
Position pin 221 is arranged in described base groove 11, refer to Figure 10, described X and sets in adjustment block 223
Have the first surface groove 2231 and with described X to adjusting the screw hole 2232 that mates of screw 222, described X to
Adjustment block 223 is arranged in described X-directional concave 211, and described first surface groove 2231 along X to setting,
Described X sequentially passes through described substrate 21 and described X to adjustment block 223 to adjusting screw 222 along negative Z-direction
And the described X that is rotatably connected is rotatably connected described X to adjustment to gripper shoe 228, described X to adjustment block 223
Screw 222, described X is rigidly fixed on described substrate 21 to gripper shoe 228, by described X to input mould
Block is fixed on described substrate 21, and described X is solid to the second alignment pin 225 by described X to driving lever 227
Being scheduled on described substrate 21, described X can revolve around described X to the second alignment pin 225 to driving lever 227
Turn, refer to Figure 11, described X and be set to X to arcwall face 2271 to the head of driving lever 227, in X-direction
Upper described X contacts to the first alignment pin 221 with described X to arcwall face 2271, and described X is to driving lever 227
By described X to the ball rod 224 described X that is slidably connected to adjustment block 223, refer to Figure 10, described X
Include that ball head 2251 and afterbody 2252, described afterbody 2252 are arranged on described X to dialling to ball rod 224
On bar 227, described ball head 2251 is slidably connected in described first surface groove 2231, and described X is to lock
Tight screw 226 is arranged on described X on driving lever 227.
Refer to Fig. 4, Fig. 5 and Fig. 8, described Y-direction adjusts structure 23 and includes Y-direction alignment pin 236 and Y
To adjusting module, described Y-direction adjusting module include Y-direction input module, along Y-direction arrange and with described Y-direction
The Y-direction output module of alignment pin 236 contact and Y-direction gripper shoe 235, refer to Fig. 6, described substrate 21
It is provided with and described Y-direction input module and the Y-direction groove 212 of described Y-direction output module, described Y-direction are set
Input module includes that Y-direction adjusts screw and Y-direction adjustment block, and described Y-direction output module includes Y-direction ball rod
Performing block 234 with Y-direction, described Y-direction alignment pin 236 is arranged on described base groove 11, refer to Fig. 6,
Described substrate 21 is provided with the through hole 213 keeping away position described Y-direction alignment pin 236, and the present embodiment uses with described
X adjusts screw to adjusting the identical described Y-direction of screw 222, with described X to the identical institute of adjustment block 223
State Y-direction adjustment block, and with described X to the identical described Y-direction ball rod of ball rod 224, described Y-direction
Adjustment block is provided with the second surface groove, described Y-direction adjustment block and described Y-direction execution block 234 and is arranged on described
In Y-direction groove 212, and described second surface groove is arranged along Y-direction, refer to Figure 13, and described Y-direction performs
Block 234 is provided with Y-direction arcwall face 2341, and described Y-direction performs block 234 and arranges along Y-direction, and in the Y direction
Upper described Y-direction arcwall face 2341 contacts with described Y-direction alignment pin 236, and described Y-direction performs block 234 and leads to
Crossing described Y-direction ball rod and connect described Y-direction adjustment block, the afterbody of described Y-direction ball rod is arranged on described Y
To performing on block 234, ball head is slidably connected in described second surface groove, and described Y-direction adjusts screw edge
Negative Z-direction sequentially passes through described substrate 21 and described Y-direction adjustment block and is rotatably connected in described Y-direction gripper shoe
On 235, described Y-direction adjustment block be rotatably connected described Y-direction adjust screw, described Y-direction gripper shoe 235 is firm
Property is fixed on described substrate 21, and described Y-direction input module and described Y-direction output module are fixed on institute
State on substrate 21.
Refer to Fig. 4, Fig. 5 and Fig. 9, described Z-direction adjusts structure 24 and includes that Z-direction adjusts screw 241, Z
To pretension screw 242 and Z-direction locking spring 243, described Z-direction pretension screw 242 is bulb screw, institute
State Z-direction adjustment screw 241 and to be rotatably connected on described base 1 along negative Z-direction through described substrate 21, institute
State Z-direction pretension screw 242 and to contact with described base 1, described Z-direction along negative Z-direction through described substrate 21
Pretension screw 242 is rotatably connected described substrate 21, regulates described Z-direction and adjusts screw 241, and combines described Z
Applying pretightning force to pretension screw 242, it is possible to achieve described substrate 21 moves along Z-direction, described Z-direction is locked
The negative Z-direction of spring 243 passes described substrate 21, and one end connects described substrate 21 other end and connects described base
1, when described Z-direction adjusts locking positioning after structure 24 adjustment terminates.
Concrete operations mode of the present utility model is as follows:
In the present embodiment, refer to Figure 14, Figure 15 and Figure 16, when described X is to adjusting screw 222 and institute
The adjustment resolution stating Y-direction adjustment screw is A, and described X is first surface groove 2231 in adjustment block 223
Angle of inclination and described Y-direction adjustment block on the angle of inclination of the second surface groove be θ, described Z-direction adjusts
The adjustment resolution of screw 241 is B, and described X inputs and export described X to second to adjusting structure 22
The distance of alignment pin 225 is respectively L1, L2, and two described X are L3 to adjusting structure 22 spacing, and three
It is L4, L5 that individual described Z-direction adjusts the distance of screw 241, and the adjustment of described six degree of freedom adjusting apparatus is differentiated
Rate computing formula is as follows:
Dx=(A × tan θ) × L1/L2；
Dy=A × tan θ；
Dz=B；
Rx=B/L4；
Ry=B/L5；
Rz=Dx/L3=(A × tan θ) × L1/ (L2*L3),
Wherein, Dx represents the resolution of X-direction, and Dy represents the resolution of Y-direction, and Dz represents Z-direction
Resolution, Rx represents the adjustment resolution of X-direction, and Ry represents the adjustment resolution of Y-direction, Rz table
Show the adjustment resolution of Z-direction.
By a described X to adjusting as a example by structure 22: described X carries out Rz to rotation to adjusting screw 222,
Drive described X to move up and down to adjustment block 223, thus drive described X by described X to ball rod 224
To driving lever 227 around described X to the second alignment pin 225 along Rz to rotation, it is achieved the X of described substrate 21 to
Adjust, lock described X to driving lever 227 by described X to lock-screw 226 after adjustment, work as adjustment
After end, described X is to adjusting X described in screw 222 locking positioning to adjusting structure 22；
When two described X are to adjusting structure 22 along X in time moving in the same direction, it is achieved the X of described regulating object 3
Adjust to translation；When two described X run back along X to adjustment structure 22, it is achieved described adjustment
The Rz of object 3 is to rotating adjustment；
Described Y-direction adjust screw carry out Rz to rotate time, drive described Y-direction adjustment block to move up and down, from
And drive described Y-direction to perform block 234 by described Y-direction ball rod and move along Y-direction, it is achieved described substrate 21
Y-direction translation adjust, i.e. realize described regulating object 3 Y-direction translation adjust.
Described Z-direction adjusts screw 241 and carries out Rz in time rotating, and described Z-direction pretension screw 242 is to described base
Plate 21 applies pretightning force, makes described substrate 21 move along Z-direction, it is achieved the Z-direction translation of described substrate 21 is adjusted
Whole, after adjustment terminates, Z-direction described in described Z-direction locking spring 243 locking positioning adjusts structure 24；
Can realize described regulating object 3 is carried out Z-direction when adjusting three described Z-directions adjustment structures 24 simultaneously
Translation adjusts, and when fixing, a described Z-direction adjustment structure 24 is constant, adjusts two other described Z-direction simultaneously
Adjust structure 24 can realize described regulating object 3 carries out Rx and Ry rotation adjustment.
It is new without deviating from this practicality that those skilled in the art can carry out various change and modification to utility model
The spirit and scope of type.So, if these amendments of the present utility model and modification belong to this utility model power
Profit requires and within the scope of equivalent technologies, then this utility model is also intended to include that these are changed and modification exists
In.
Claims (17)
1. a six degree of freedom adjusting apparatus, it is characterised in that include base and guiding mechanism, described adjustment
Mechanism include being slidably arranged in the substrate on described base and arrange X on the substrate to adjust structure,
Y-direction adjusts structure and Z-direction adjusts structure, and described X adjusts structure to adjustment structure or described Y-direction and at least sets
Having two, described Z-direction adjustment structure is at least provided with three, and regulating object is arranged on the substrate.
Six degree of freedom adjusting apparatus the most according to claim 1, it is characterised in that described guiding mechanism
Also include that the first preloading spring, described first preloading spring are arranged on the lower surface of described substrate and with X to shape
Becoming angle, described first preloading spring one end to connect described substrate, the other end connects described base.
Six degree of freedom adjusting apparatus the most according to claim 2, it is characterised in that described X is to adjustment
Structure include X to the first alignment pin, X to adjusting module and X to lock-screw, described X is to the first location
Pin be arranged on described base, described X to adjusting module arrange on the substrate, and in the X direction with
Described X contacts to the first alignment pin, and described X is arranged on described X on adjusting module to lock-screw.
Six degree of freedom adjusting apparatus the most according to claim 3, it is characterised in that described X is to adjustment
Module include X to input module, the X that is connected to input module with described X to output module and X to support
Plate, described X is fixing on the substrate to gripper shoe by described X to input module, and described X is to output
Module is arranged on the substrate, and contacts to the first alignment pin with described X in the X direction, described X to
Lock-screw is arranged on described X on output module.
Six degree of freedom adjusting apparatus the most according to claim 4, it is characterised in that described X is to input
Module include X to adjusting screw and X to adjustment block, described X is provided with the first surface groove, institute to adjustment block
State X and be arranged on the lower surface of described substrate to adjustment block, and described first surface groove is arranged in X direction, institute
State X and sequentially pass through described substrate and described X along negative Z-direction and to adjustment block and be rotatably connected in institute to adjusting screw
Stating X in gripper shoe, described X is rotatably connected to adjusting screw with described X to adjustment block, described X to
Fagging is fixed on the lower surface of described substrate, and described X is slided even by described first surface groove to input module
Meet described X to output module.
Six degree of freedom adjusting apparatus the most according to claim 5, it is characterised in that described X is to output
Module include X to ball rod, X to the second alignment pin and X to driving lever, described X to driving lever by described X
Arranging on the substrate to the second alignment pin, described X can revolve around described X to the second alignment pin to driving lever
Transhipment is dynamic, and described X is provided with X to arcwall face to driving lever, and the most described X is to arcwall face and described X
To first alignment pin contact, described X to driving lever by described X to ball rod connection described X to adjustment block,
Described X is arranged on described X on driving lever to the afterbody of ball rod, and ball head is arranged on described first surface groove
In the described X that is slidably connected to adjustment block, described X is arranged on described X on driving lever to lock-screw.
Six degree of freedom adjusting apparatus the most according to claim 6, it is characterised in that set on described substrate
There is the described X of placement to input module and described X to the X-directional concave of output module.
Six degree of freedom adjusting apparatus the most according to claim 7, it is characterised in that described Y-direction adjusts
Structure includes that Y-direction alignment pin and Y-direction adjusting module, described Y-direction alignment pin are arranged on described base, institute
State Y-direction adjusting module to arrange on the substrate, and contact with described Y-direction alignment pin in the Y direction.
Six degree of freedom adjusting apparatus the most according to claim 8, it is characterised in that described Y-direction adjusts
Module includes Y-direction input module, the Y-direction output module arranging along Y-direction and contacting with described Y-direction alignment pin
With Y-direction gripper shoe, described Y-direction input module is connected with described Y-direction output module, and by described Y-direction
Gripper shoe is fixing on the substrate.
Six degree of freedom adjusting apparatus the most according to claim 9, it is characterised in that described Y-direction is defeated
Entering module and include that Y-direction adjusts screw and Y-direction adjustment block, described Y-direction adjustment block is provided with the second surface groove,
Described Y-direction adjustment block and described Y-direction output module are arranged on the lower surface of described substrate, and described second oblique
Face groove is arranged along Y-direction, and described Y-direction output module is slidably connected described Y-direction by described second surface groove
Adjustment block, described Y-direction adjusts screw and sequentially passes through described substrate and described Y-direction adjustment block along negative Z-direction and revolve
Turning and be connected in described Y-direction gripper shoe, described Y-direction gripper shoe is fixed on the lower surface of described substrate, described
Y-direction adjustment block adjusts screw with described Y-direction and is rotatably connected.
11. six degree of freedom adjusting apparatus according to claim 10, it is characterised in that described Y-direction
Output module includes that Y-direction ball rod and Y-direction perform block, and described Y-direction performs block and is arranged on described Y along Y-direction
In gripper shoe, and contacting with described Y-direction alignment pin in the Y direction, contact surface is Y-direction arcwall face, institute
State Y-direction and perform block by the described Y-direction ball rod described Y-direction adjustment block of connection, the tail of described Y-direction ball rod
Portion is arranged on described Y-direction and performs on block, and ball head is slidably connected described second surface groove.
12. six degree of freedom adjusting apparatus according to claim 11, it is characterised in that described substrate
Being provided with through hole, described Y-direction alignment pin is arranged on described base and performs with described Y-direction through described through hole
Block contacts.
13. six degree of freedom adjusting apparatus according to claim 11, it is characterised in that described substrate
It is provided with the described Y-direction input module of placement and the Y-direction groove of described Y-direction output module.
14. six degree of freedom adjusting apparatus according to claim 11, it is characterised in that described X to
Adjust screw identical with the adjustment resolution that described Y-direction adjusts screw, described X first inclined-plane in adjustment block
The angle of inclination of groove is identical with the angle of inclination of the second surface groove in described Y-direction adjustment block.
15. six degree of freedom adjusting apparatus according to claim 1, it is characterised in that described Z-direction is adjusted
Whole structure includes that Z-direction pretension screw, Z-direction adjust screw and Z-direction locking spring, and described Z-direction adjusts screw
Along negative Z-direction through described substrate rotary link on described base, described Z-direction pretension screw is along negative Z-direction
Be passed through described substrate and with described base contacts, described Z-direction pretension screw is rotatably connected described substrate, institute
State Z-direction locking spring and pass described substrate along negative Z-direction, and one end connects the described substrate other end and connects described
Base.
16. six degree of freedom adjusting apparatus according to claim 15, it is characterised in that described Z-direction
Pretension screw is bulb screw.
17. six degree of freedom adjusting apparatus according to claim 1, it is characterised in that on described base
Being provided with the base groove arranging described substrate, described substrate includes that installation portion and adjustment portion, described adjustment portion set
Putting in described base groove, described X adjusts structure setting to adjusting structure, Y-direction adjustment structure and Z-direction
In described adjustment portion, described regulating object is arranged on described installation portion.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620519918.1U CN205787593U (en) | 2016-05-31 | 2016-05-31 | A kind of six degree of freedom adjusting apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620519918.1U CN205787593U (en) | 2016-05-31 | 2016-05-31 | A kind of six degree of freedom adjusting apparatus |
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| CN205787593U true CN205787593U (en) | 2016-12-07 |
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| CN201620519918.1U Active CN205787593U (en) | 2016-05-31 | 2016-05-31 | A kind of six degree of freedom adjusting apparatus |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109938694A (en) * | 2019-01-31 | 2019-06-28 | 华中科技大学苏州脑空间信息研究院 | Multi channel imaging system, image planes method for registering and regulating device |
| CN111352312A (en) * | 2020-04-29 | 2020-06-30 | 中国科学院光电技术研究所 | Multifunctional photoetching device |
| CN111722475A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Adjusting component and fine adjustment device |
-
2016
- 2016-05-31 CN CN201620519918.1U patent/CN205787593U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109938694A (en) * | 2019-01-31 | 2019-06-28 | 华中科技大学苏州脑空间信息研究院 | Multi channel imaging system, image planes method for registering and regulating device |
| CN109938694B (en) * | 2019-01-31 | 2021-10-08 | 华中科技大学苏州脑空间信息研究院 | Multi-channel imaging system and image surface registration method |
| CN111722475A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Adjusting component and fine adjustment device |
| CN111722475B (en) * | 2019-03-22 | 2021-11-23 | 上海微电子装备（集团）股份有限公司 | Adjusting component and fine adjustment device |
| CN111352312A (en) * | 2020-04-29 | 2020-06-30 | 中国科学院光电技术研究所 | Multifunctional photoetching device |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |