CN111722475B - Adjusting component and fine adjustment device - Google Patents

Adjusting component and fine adjustment device Download PDF

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Publication number
CN111722475B
CN111722475B CN201910222057.9A CN201910222057A CN111722475B CN 111722475 B CN111722475 B CN 111722475B CN 201910222057 A CN201910222057 A CN 201910222057A CN 111722475 B CN111722475 B CN 111722475B
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China
Prior art keywords
adjustment
adjusting
adjusting rod
fixing pin
rod
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CN201910222057.9A
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Chinese (zh)
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CN111722475A (en
Inventor
宁诗琪
王青亮
郑锋标
张阔峰
郑教增
姜杰
郝凤龙
庞飞
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection

Abstract

The invention discloses an adjusting assembly and a fine adjusting device, and belongs to the technical field of precision machining and assembling. The adjusting component comprises a fixed bottom plate which is fixedly connected with a piece to be adjusted; the first adjusting rod is connected with the fixed bottom plate, a driving block is arranged on the first adjusting rod, and the first adjusting rod can drive the driving block to actuate in the direction perpendicular to the axis of the first adjusting rod; and one end of the second adjusting rod is abutted with the driving block, and the other end of the second adjusting rod is abutted with the fixed reference. The fine adjustment device comprises the adjusting assembly. The adjusting assembly is provided with the first adjusting rod, the driving block, the second adjusting rod and the fixed bottom plate fixedly connected with the adjusting base, and the second adjusting rod applies reaction force to the driving block under the action of the fixed datum so as to push the adjusting base to move.

Description

Adjusting component and fine adjustment device
Technical Field
The invention relates to the technical field of precision machining and assembly, in particular to an adjusting assembly and a fine adjustment device.
Background
In a mask transmission subsystem of a photoetching machine, after coarse pre-alignment of a mask is finished, a mask plate is rotated by a plate exchange hand for 180 degrees and then is transferred to a mask table, so that the position deviation of the mask plate in the plate exchange process is eliminated, the plate loading precision of the mask plate before the mask plate is transferred to a plate exchange manipulator is ensured, and the position repeatability of the mask plate loading to the mask table is ensured.
Specifically, the detector reads the coverage condition of the light source, and judges the position of the mask plate mark, so that the mask plate is subjected to position compensation through the mask table. When the detector judges the position deviation of the mask, the theoretical position of the mask must be set, and before the mask is installed, the central position of the four-quadrant sensor in the detector is adjusted to coincide with the theoretical position of the mask, and the central position is marked as a zero position of the detector.
At present, precision of a fine prealignment detector mounting plate in a photoetching machine product is directly guaranteed through machining, and the position relation between a detector and a mask plate mark is not directly established. In order to directly establish the relationship between the detector and the mask plate mark position, the detector is realized at X, Y and RzDecoupling the three directions, taking the position of the detector adjusted by the three directions as the theoretical position of the mask plate mark, and marking the zero position of the detector. Meanwhile, the X, Y two-direction adjustment resolution needs to meet the micron-scale, RzThe adjustment resolution of the direction needs to meet the milliradian level.
In the mechanical structure, X, Y two-direction adjustment is realized, generally through designing waist-shaped holes, and only X or Y direction adjustment can be realized by one group of waist-shaped holes. If X, Y is to be adjustable in two directions, a two-layer waist hole structure is generally adopted, and the adjustment precision is low and the stability is poor. If further R is to be adjustedzAnd in addition, a rotating mechanism is required. Simultaneous realization of X, Y and RzThe three directions are manually adjustable, and the requirement of a multilayer structure can be met.
Therefore, it is desirable to provide an adjusting assembly and a fine tuning device to solve the above problems.
Disclosure of Invention
One object of the present invention is to provide an adjusting assembly which is simple in structure and can be adjusted in the X direction or the Y direction without providing a kidney-shaped hole.
Another object of the present invention is to provide a trimming device that can be used to provide adjustment assemblies on the same layer structure and achieve X, Y and RzThe three directions are manually adjustable.
In order to achieve the purpose, the invention adopts the following technical scheme:
an adjustment assembly, comprising:
the fixed bottom plate is fixedly connected with the piece to be adjusted;
the first adjusting rod is connected with the fixed bottom plate, a driving block is arranged on the first adjusting rod, and the first adjusting rod can drive the driving block to actuate in the direction perpendicular to the axis of the first adjusting rod;
and one end of the second adjusting rod is abutted with the driving block, and the other end of the second adjusting rod is abutted with the fixed reference.
Optionally, the to-be-adjusted component is provided with a rotating pin, the middle part of the second adjusting rod is rotatably connected with the rotating pin, and the driving block is configured to drive the second adjusting rod to rotate.
Optionally, the adjusting assembly includes an elastic member, the elastic member is disposed at one end of the second adjusting rod, which is abutted to the driving block, one end of the elastic member is connected to the second adjusting rod, the other end of the elastic member is connected to the member to be adjusted, and the elastic member enables the second adjusting rod to be abutted to the driving block.
Optionally, the elastic member is a compression spring, the second adjusting rod is located between the compression spring and the driving block, one end of the compression spring is abutted against the second adjusting rod, and the other end of the compression spring is connected with the member to be adjusted.
Optionally, an end surface of one end of the second adjustment lever abuts against the driving block, and an end surface of the other end of the second adjustment lever abuts against the fixed reference, and the driving block is configured to drive the second adjustment lever to linearly move.
Optionally, the adjusting assembly includes an extension spring, the extension spring is parallel to the linear moving direction of the second adjusting rod, one end of the extension spring is connected to the second adjusting rod, the other end of the extension spring is connected to the member to be adjusted, and the extension spring enables the second adjusting rod to abut against the driving block.
Optionally, the adjusting assembly further comprises:
the first fixing pin is connected with the piece to be adjusted, and one end of the extension spring is connected with the first fixing pin;
the second fixing pin is fixedly connected with the second adjusting rod, and the other end of the extension spring is connected with the second fixing pin;
the first fixing pin is located between the driving block and the second fixing pin, or the driving block is located between the first fixing pin and the second fixing pin.
Optionally, the second adjusting rod is provided with an adjusting groove, the second fixing pin is located in the adjusting groove, the first fixing pin can extend into the adjusting groove, and the first fixing pin is located between the driving block and the second fixing pin.
Optionally, the first fixing pin is parallel to the first adjusting rod, and the first fixing pin and the second fixing pin are arranged vertically.
Optionally, the driving block is a wedge block, the wedge block is in threaded connection with the first adjusting rod, the wedge block is configured to move axially along the first adjusting rod, and one end of the second adjusting rod is abutted to an inclined surface of the wedge block.
Optionally, the driving block is an eccentric wheel, the first adjusting rod is fixedly connected with the eccentric wheel, and one end of the second adjusting rod is abutted to the outer peripheral surface of the eccentric wheel.
A fine adjustment device comprises an adjustment base and any one of the adjustment assemblies, wherein a fixing bottom plate of each adjustment assembly is fixedly connected with the adjustment base.
Optionally, the adjusting base includes a first plane perpendicular to the first direction and a second plane perpendicular to the second direction, at least one of the adjusting assemblies is disposed on a side of the first plane, and at least one of the adjusting assemblies is disposed on a side of the second plane.
Optionally, at least two adjusting assemblies are arranged on the side of the second plane.
Optionally, the adjustment base further includes a third plane opposite to the first plane and a fourth plane opposite to the second plane, and two spring plungers corresponding to the number of the adjustment assemblies are disposed on both the side where the third plane is located and the side where the fourth plane is located.
Optionally, the fixed base plate is located at one end of the first adjusting rod, the fixed base plate is fixedly connected with the lower surface of the adjusting base, the other end of the first adjusting rod extends into a through hole formed in the upper surface of the adjusting base, and the side wall of one end, far away from the fixed base plate, of the first adjusting rod can be in contact with the adjusting base.
The invention has the beneficial effects that:
the adjusting assembly is through setting up first regulation pole, drive block, second regulation pole and with adjustment base fixed connection's PMKD to make the second adjust the pole and apply reaction force to the drive block with the help of the effect of fixed reference, and then promote the adjustment base and remove, this adjusting assembly simple structure, simple to operate, and need not to set up waist type hole and also can realize the displacement along a certain direction.
The fine adjustment device can realize that a plurality of adjustment assemblies are arranged on the same layer structure by adopting the adjustment assemblies.
Drawings
FIG. 1 is a schematic diagram illustrating a first view angle of a fine adjustment apparatus according to the present invention;
FIG. 2 is a schematic structural diagram of an adjustment assembly according to a first embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating a second view of a fine adjustment apparatus according to the present invention;
FIG. 4 is a schematic structural diagram of another adjustment assembly in the second embodiment of the present invention;
fig. 5 is a schematic structural diagram of another adjusting assembly in the third embodiment of the present invention.
In the figure:
1. adjusting the base; 11. a first plane; 12. a second plane;
2. a detector;
31. a first adjusting lever; 32. wedge blocks 33 and a fixed bottom plate; 34. a second adjusting lever; 35. rotating the pin shaft; 36. a compression spring; 37. a first fixing pin; 38. an extension spring; 39. a second fixing pin;
32', an eccentric wheel;
4. a spring plunger; 5. plunger fixing base.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Example one
Fig. 1 is a schematic structural diagram of a first view angle of a fine adjustment device according to the present invention. Referring to fig. 1, the fine adjustment device may be used in a lithography machine, wherein the fine adjustment device includes an adjustment base 1, a detector 2 disposed on the adjustment base 1, and an adjustment assembly capable of adjusting a position of the adjustment base 1 and further adjusting a position of the detector 2. In this embodiment, one detector 2 is located on one side surface of the adjustment base 1, and the other detector 2 is located on the other side surface of the adjustment base 1, so that the position of the detector 2 can be adjusted only by adjusting the movement or rotation of the adjustment base 1 on the XY plane. Specifically, the fine adjustment device comprises a plurality of adjustment components capable of realizing the movement of the adjustment base 1 in three directions of X, Y and Rz, and the position of the detector 2 adjusted by the adjustment components is used as the theoretical position of the mask plate mark, and the detector 2 is subjected to zero marking. Meanwhile, the X, Y adjustment resolution in two directions needs to meet the micron order, and the Rz adjustment resolution needs to meet the milliradian order.
Fig. 2 is a schematic structural diagram of an adjusting assembly in this embodiment. Referring to fig. 2, the adjusting assembly includes a first adjusting rod 31 provided with a driving block and a fixed base plate 33, wherein the fixed base plate 33 is connected to one end of the first adjusting rod 31 and configured to be fixedly connected to a member to be adjusted, i.e. to the adjusting base 1 in this embodiment, and the fixed base plate 33 and the adjusting base 1 may be fixedly connected through a fixing screw structure, or other fixing connection manners may be adopted. The first adjustment bar 31 extends in the Z-direction and the first adjustment bar 31 is provided with a drive block which can be actuated in a direction perpendicular to the axis of the first adjustment bar 31, such as in the Y-direction. The adjustment assembly further comprises a second adjustment bar 34, the second adjustment bar 34 being selectively extendable in the X-direction, one end of the second adjustment bar 34 abutting the drive block in the Y-direction to drive said one end of the second adjustment bar 34 to move in the Y-direction upon actuation of the drive block in the Y-direction. The other end of the second adjustment lever 34 is disposed so as to be able to abut against a fixed reference in the Y direction. The fixed reference and the driving block are both located on the same side of the second adjusting rod 34 and are distributed at two ends of the second adjusting rod 34. Optionally, the second adjusting lever 34 is rotatably connected to the adjusting base 1 by a rotating pin 35 parallel to the first adjusting lever 31. When the first adjusting rod 31 in the adjusting assembly rotates, the driving block drives one end of the second adjusting rod 34 to rotate and is far away from the first adjusting rod 31 along the Y direction, the second adjusting rod 34 rotates around the rotating pin shaft 35, the fixed reference limits the movement of the other end of the second adjusting rod 34, under the reaction force of the fixed reference, the second adjusting rod 34 drives the driving block and the first adjusting rod 31 to move through the rotating pin shaft 35, and the fixed bottom plate 33 arranged at one end of the first adjusting rod 31 drives the adjusting base 1 to move.
Above-mentioned adjusting part is through setting up first regulation pole 31, drive block, second regulation pole 34 and with adjustment base 1 fixed connection's PMKD 33 to make second regulation pole 34 exert reaction force to the drive block with the help of the effect of fixed benchmark, and then promote adjustment base 1 and remove, this adjusting part simple structure, simple to operate, and need not to set up waist type hole and also can realize following the displacement of a certain direction.
Alternatively, in the embodiment of fig. 2, the first adjusting rod 31 in the adjusting assembly is an adjusting bolt, the driving block is a wedge block 32, and the wedge block 32 is in threaded connection with the first adjusting rod 31. The wedge 32 is configured to move axially along the first adjustment lever 31 without rotating as the first adjustment lever 31 rotates. One end of the second adjusting rod 34 abuts against the inclined surface of the wedge block 32, wherein the second adjusting rod 34 is embedded in the member to be adjusted and cannot move along the direction parallel to the axis of the first adjusting rod 31.
Before the operation, one end of the second adjusting rod 34 is abutted with the driving block, and the other end is abutted with the fixed reference, at the moment, the first adjusting rod 31 is rotated, so that the inclined surface of the wedge block 32 moves along the axis of the first adjusting rod 31 to drive one end of the second adjusting rod 34 to move along the Y direction. Because the middle position of the second adjusting rod 34 is provided with the rotating pin shaft 35, the second adjusting rod 34 has a rotating trend relative to the rotating pin shaft 35, but the fixed reference abutted against the other end of the second adjusting rod 34 limits the rotation of the second adjusting rod 34, at this moment, the fixed reference provides a reaction force for the second adjusting rod 34 to push the adjusting base 1 to move, and the adjusting assembly realizes the adjustment of the adjusting base 1.
Optionally, in order to ensure that the second adjusting rod 34 always abuts against the inclined surface of the wedge block 32, an elastic member is disposed at one end of the second adjusting rod 34 abutting against the wedge block 32 in the Y direction, one end of the elastic member is connected with the second adjusting rod 34, and the other end is connected with the adjusting base, so as to ensure that the elastic member can enable the second adjusting rod 34 to abut against the driving block. Wherein the elastic member is selected from the group consisting of an extension spring 38 and a compression spring 36. When the elastic member is the extension spring 38, the end of the extension spring 38 connected to the adjustment base is located between the driving block and the end of the extension spring 38 connected to the second adjustment lever 34, so as to ensure that the extension spring 38 always pulls the second adjustment lever 34 to the side close to the inclined surface of the wedge block 32. When the elastic member is a compression spring 36, one end of the compression spring 36 abuts against one side of the second adjusting lever 34 away from the driving block, and the other end abuts against the adjusting base 1, wherein the compression spring 36 can be inserted into a blind hole formed in the adjusting base 1.
When the adjusting assembly provided in fig. 2 is installed on the adjusting base 1, the adjusting assembly can be selectively disposed on the side of the first plane 11 perpendicular to the X direction, the first adjusting rod 31 is disposed along the Z direction, the second adjusting rod 34 is disposed along the X direction, and the inclined surface of the wedge 32 is disposed toward the Y direction, so that the adjusting base 1 drives the detector 2 to move in the Y direction. Moreover, the adjusting assembly can be selectively arranged on the side of the second plane 12 perpendicular to the Y direction, the first adjusting rod 31 is arranged along the Z direction, the second adjusting rod 34 is arranged along the Y direction, and the inclined surface of the wedge block 32 is arranged towards the X direction, so that the adjusting base 1 can drive the detector 2 to move in the X direction. In addition, two adjusting components can be arranged on the side of the first plane 11, wherein the two adjusting components are distributed along the X direction, and when the two adjusting components drive the adjusting base 1 to have different displacement amounts, the adjusting base 1 can drive the detector 2 to rotate around the Z direction. Of course, when the displacement amounts of the two adjusting components are the same, the adjusting base 1 can still drive the detector 2 to move along the Y direction. Therefore, a plurality of adjustment assemblies can be provided regardless of the first plane 11 or the second plane 12. In addition, optionally, in order to ensure that the adjusting assemblies disposed on the same plane side can uniformly drive the adjusting base 1 to move, the two adjusting assemblies may be symmetrically arranged on the same plane side with reference to fig. 1.
The fine adjustment device can realize that a plurality of adjusting components are arranged in the same layer structure by adopting the adjusting components, so that X-direction and Y-direction displacement adjustment can be realized, two adjusting components can be arranged at the same side to realize rotation around a Z axis, namely, the movement can be realized as rotation by increasing the number of the adjusting components, and X, Y and R can be realized by the fine adjustment device under the condition of not increasing the thickness of the adjustment base 1zThe three-direction adjustment has delicate structure and high adjustment precision, and can be used for high-precision fine adjustment equipment.
Further, when the adjusting assembly is specifically installed on the adjusting base 1, the fixing base plate 33 is located at one end of the first adjusting rod 31, the fixing base plate 33 is fixedly connected to the lower surface of the adjusting base 1, the other end of the first adjusting rod 31 extends into the through hole formed in the upper surface of the adjusting base 1, and the side wall of the end, away from the fixing base plate 33, of the first adjusting rod 31 can contact with the adjusting base 1. Specifically, the lower surface of the adjustment base 1 may be provided with a threaded hole capable of being fixedly connected with the fixed base plate 33, and with a mounting hole for placing an adjustment assembly, wherein the mounting hole is required to expose an end of the second adjustment lever 34 abutting against the fixed reference, and is required to ensure that the wedge 32 as a driving block can move in the mounting hole in the axial direction of the first adjustment lever 31. Set up like this and make adjusting part not only be connected with the lower part of adjustment base 1, still be connected with the upper portion of adjustment base 1, when drive adjusting part drives adjustment base 1 and removes, adjustment base 1 upper portion, lower part, whole can both receive the drive and then remove promptly. Further, optionally, the first adjusting rod 31 is a countersunk bolt, which can be embedded in the adjusting base 1, so that the first adjusting rod 31 is prevented from being protruded to influence other objects on the upper surface of the adjusting base 1, and the tool for adjusting the adjusting assembly can still drive the first adjusting rod 31 to rotate through the through hole on the upper surface of the adjusting base 1.
In addition, fig. 4 is a schematic structural diagram of another view angle of the fine adjustment device provided in this embodiment. The adjusting base 1 further comprises a third plane perpendicular to the X direction and a fourth plane perpendicular to the X direction, the third plane is arranged opposite to the first plane 11, the fourth plane is arranged opposite to the second plane 12, the third plane is provided with a spring plunger 4 and a plunger fixing seat 5, the fourth plane is provided with two spring plungers 4 and two plunger fixing seats 5, the spring plungers 4 can be abutted to the adjusting base 1, and the adjusting base 1 is mainly used for preventing the adjusting base 1 from resetting after moving. Wherein the setting quantity and the position of the spring plungers 4 and the plunger fixing seats 5 can correspond to the quantity of the adjusting components. Of course, when the number of the adjusting assemblies disposed on the side of the second plane 12 is more than two, the number of the spring plungers 4 and the plunger fixing seats 5 disposed on the fourth plane is also more than two, and the adjusting assemblies can be optionally disposed corresponding to the positions of the adjusting assemblies.
In addition, the adjustment accuracy of the fine adjustment device can be adjusted according to the pitch of the first adjustment rod 31 and the inclination angle of the inclined surface of the wedge 32 in the adjustment assembly.
Finally, it is to be noted that the present embodiment only implements the X-direction, the Y-direction and the R-direction for the above-mentioned adjusting componentsZThe explanation of the three directions of movement is that movement in other directions can be achieved when adjusting the setting direction of the adjustment assembly. This embodiment is not described herein.
Example two
Fig. 3 is a schematic structural diagram of another adjusting assembly provided in this embodiment. The present embodiment is substantially the same as the adjustment assembly of the first embodiment, but differs from the first embodiment in that the second adjustment lever 34, which abuts against the first adjustment lever 31, does not rotate but moves linearly by the driving block.
Specifically, the first adjustment lever 31 extends in the Z-direction, and a drive block provided on the first adjustment lever 31 is actuated in a direction perpendicular to the axis, such as in the X-direction. The second adjustment lever 34 is selectively extendable in the X direction, and one end of the second adjustment lever 34 abuts against the driving block in the X direction to drive the one end of the second adjustment lever 34 to move linearly in the X direction when the driving block is actuated in the X direction. The other end of the second adjustment lever 34 is disposed so as to be able to abut against a fixed reference in the X direction, and the driving block is disposed so as to be able to drive the second adjustment lever 34 to linearly move.
The adjusting component of this embodiment still can be through setting up first regulation pole 31, drive block, second regulation pole 34 and with adjustment base 1 fixed connection's PMKD 33 to make second regulation pole 34 exert reaction force to the drive block with the help of the effect of fixed reference, and then promote adjustment base 1 and remove, this adjusting component simple structure, simple to operate, and need not to set up waist type hole and also can realize following the displacement of a certain direction.
Before the specific operation, one end of the second adjusting rod 34 is abutted against the driving block, the other end of the second adjusting rod is abutted against the fixed reference, at this time, the first adjusting rod 31 is rotated, so that the wedge block 32 serving as the driving block moves along the axis of the first adjusting rod 31, and further, the inclined plane abutted against the second adjusting rod 34 moves along the Z direction, and then the second adjusting rod 34 can be driven to move along the X direction. Because the other end of the second adjusting rod 34 is abutted against the fixed reference in the X direction, the fixed reference limits the movement of the second adjusting rod 34 in the X direction, and at this time, the fixed reference provides a reaction force for the second adjusting rod 34 to push the adjusting base 1 to move in the X direction, so that the adjusting assembly realizes the adjustment of the adjusting base 1.
Optionally, in order to ensure that the second adjusting rod 34 always abuts against the inclined surface of the wedge block 32, one end of the second adjusting rod 34 abutting against the wedge block 32 is provided with an elastic member in the X direction, the elastic member may be selected as an extension spring 38, the extension spring 38 is parallel to the linear moving direction of the second adjusting rod 34, that is, the extension spring 38 is arranged along the X direction, one end of the extension spring is connected with the member to be adjusted, that is, the adjusting base 1, and the other end of the extension spring is connected with the second adjusting rod 34, and the extension spring 38 can enable the second adjusting rod 34 to abut against the driving block. Specifically, the adjusting assembly further comprises a first fixing pin 37 connected with the adjusting base 1, and a second fixing pin 39 fixedly connected with the second adjusting rod 34, wherein one end of the extension spring is connected with the first fixing pin 37, the other end of the extension spring is connected with the second fixing pin 39, the first fixing pin 37 is located between the wedge block 32 and the second fixing pin 39, or the driving block is located between the first fixing pin 37 and the second fixing pin 39, and the situation that the second fixing pin 39 is located between the driving block and the first fixing pin 37 cannot occur. In the embodiment, the first fixing pin 37 is arranged between the driving block and the second fixing pin 39, so that the situation that the extension spring 38 needs to bypass the driving block to be connected with the first fixing pin 37 and further causes interference of parts can be avoided, and meanwhile, the arrangement length of the extension spring 38 can be reduced to a certain extent. Further, optionally, the second adjusting rod 34 is provided with an adjusting groove, the second fixing pin 39 is located in the adjusting groove and connected with the second adjusting rod 34, the first fixing pin 37 can extend into the adjusting groove, and the extension spring 38 is naturally also located in the adjusting groove, so that the occupied space of the adjusting assembly can be reduced. Further, the first fixing pin 37 is disposed in parallel with the first adjusting lever 31, in this embodiment, the first fixing pin 37 is disposed along the Z direction, the second fixing pin 39 is disposed along the Y direction, one end of the extension spring 38 is connected to the second fixing pin 39, and the height of the extension spring 38 in the Z direction is limited.
Further, optionally, one end of the inclined bottom surface of the second adjusting rod 34 and the wedge 32 is provided with a projection extending axially toward the first adjusting rod 31, in this embodiment, the projection extends along the Z direction, wherein the projection is provided with a contact inclined surface capable of being attached to the inclined surface of the wedge 32, so as to increase the contact area between the second adjusting rod 34 and the wedge 32. Wherein the bumps may extend in the forward Z-direction and/or the reverse Z-direction.
The adjusting assembly of the embodiment is implemented asThe same adjusting components in the first embodiment can be applied to the adjusting base 1 of the fine adjusting device, and the fine adjusting device can drive the detector 2 in the X direction, the Y direction and the R direction by adjusting the installation position and the installation quantity of the adjusting components in the adjusting base 1ZThree directions of movement, although other directions of movement may be implemented.
Optionally, the adjusting assembly in this embodiment has the same function as the adjusting assembly in the first embodiment, and the adjusting assemblies arranged in the adjustment base 1 may be all the adjusting assemblies in the first embodiment, or all the adjusting assemblies in the second embodiment. Of course, the adjusting assembly in the first embodiment and the adjusting assembly in the second embodiment can be arranged on and adjusted on the base 1.
Specifically, as shown in fig. 1, the fine adjustment device is provided with an adjustment assembly in the first embodiment and an adjustment assembly in the second embodiment on an adjustment base 1. In the first embodiment, the area of the occupied plane of the adjusting component provided with the rotating pin shaft 35 is large, and the area of the occupied plane of the adjusting component in this embodiment is small. Aiming at the characteristics that the area of a first plane 11 of the adjusting base 1 is smaller and the area of a second plane 12 is larger, the fine adjusting device is provided with an adjusting component with smaller area of the occupied plane in the embodiment on the side of the first plane 11, an adjusting component with larger area of the embodiment on the side of the second plane 12, and two adjusting components are arranged on the side of the second plane 12 and used for realizing the rotation of the fine adjusting device around the Z axis.
EXAMPLE III
Referring to fig. 5, which is a schematic structural diagram of another adjusting assembly provided in the present embodiment, the adjusting assembly in the present embodiment is substantially the same as the second embodiment, and the difference between the two embodiments is that the driving block connected to the first adjusting rod 31 is an eccentric 32 ', and the eccentric 32' is fixedly connected to the first adjusting rod 31, does not move along the axis of the first adjusting rod 31, and rotates with the rotation of the first adjusting rod 31. In addition, the mounting hole of the adjusting base 1 for mounting the adjusting assembly does not need to be provided with a moving channel for moving the driving block along the axial direction of the first adjusting rod 31, and needs to be provided with a rotating channel for the eccentric wheel 32' to rotate around the first adjusting rod 31. Accordingly, one end of the second adjustment lever 34 for abutting against the driving block may be selected as a circular arc surface contacting with the side surface of the eccentric wheel 32', and other structures of the second adjustment lever 34 may not be changed.
Similarly, the drive block of the adjustment assembly of the first embodiment may also employ an eccentric 32'. This embodiment is not described herein.
Furthermore, the adjustment accuracy of the fine adjustment device can be adjusted according to the pitch of the first adjustment rod 31 and the eccentricity of the eccentric 32' in the adjustment assembly.
Of course, the adjusting components installed in the fine tuning device may be the combination of the adjusting component in this embodiment and the adjusting component in the first embodiment, or may both be the adjusting components in this embodiment, and a person skilled in the art may apply the adjusting component in this embodiment to the adjusting base 1 by combining the setting manners of the first embodiment and the second embodiment, which is not described herein again.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (13)

1. An adjustment assembly, comprising:
a fixed base plate (33) fixedly connected with the piece to be adjusted;
the first adjusting rod (31) is connected with the fixed bottom plate (33), a driving block is arranged on the first adjusting rod (31), and the first adjusting rod (31) can drive the driving block to actuate in the direction perpendicular to the axis of the first adjusting rod (31);
a second adjustment lever (34) having one end abutting against the drive block and the other end abutting against a fixed reference;
the driving block is configured to drive the second adjusting rod (34) to linearly move;
the adjusting assembly comprises an extension spring (38), the extension spring (38) is parallel to the linear moving direction of the second adjusting rod (34), one end of the extension spring (38) is connected with the second adjusting rod (34), the other end of the extension spring is connected with the piece to be adjusted, and the extension spring (38) can enable the second adjusting rod (34) to be abutted to the driving block;
the adjustment assembly further comprises: a first fixing pin (37) connected with the member to be adjusted, wherein one end of the extension spring (38) is connected with the first fixing pin (37); the second fixing pin (39) is fixedly connected with the second adjusting rod (34), and the other end of the extension spring (38) is connected with the second fixing pin (39); the first fixing pin (37) is located between the drive block and the second fixing pin (39), or the drive block is located between the first fixing pin (37) and the second fixing pin (39).
2. The adjustment assembly according to claim 1, characterized in that the member to be adjusted is provided with a rotation pin (35), the intermediate portion of the second adjustment lever (34) is rotatably connected to the rotation pin (35), and the driving block is configured to drive the second adjustment lever (34) to rotate.
3. The adjustment assembly according to claim 2, characterized in that the adjustment assembly comprises an elastic member, the elastic member is arranged at one end of the second adjustment rod (34) abutting against the driving block, one end of the elastic member is connected with the second adjustment rod (34), the other end is connected with the member to be adjusted, and the elastic member enables the second adjustment rod (34) to abut against the driving block.
4. The adjustment assembly according to claim 3, characterized in that the resilient member is a compression spring (36), the second adjustment lever (34) is located between the compression spring (36) and the drive block, and one end of the compression spring (36) abuts the second adjustment lever (34) and the other end is connected to the member to be adjusted.
5. Adjustment assembly according to claim 1, characterized in that the second adjustment lever (34) is provided with an adjustment slot, in which the second fixing pin (39) is located, and in that the first fixing pin (37) can extend into the adjustment slot, and in that the first fixing pin (37) is located between the drive block and the second fixing pin (39).
6. The adjustment assembly according to claim 5, characterized in that the first fixing pin (37) is parallel to the first adjustment lever (31) and the first fixing pin (37) is arranged perpendicular to the second fixing pin (39).
7. The adjustment assembly according to any of claims 1-6, characterized in that the drive block is a wedge block (32), the wedge block (32) being in threaded connection with the first adjustment rod (31), the wedge block (32) being configured to move axially along the first adjustment rod (31), and one end of the second adjustment rod (34) abutting an inclined surface of the wedge block (32).
8. The adjusting assembly according to any one of claims 1 to 6, characterized in that the driving block is an eccentric (32 '), the first adjusting rod (31) being fixedly connected to the eccentric (32 '), one end of the second adjusting rod (34) abutting against the outer circumferential surface of the eccentric (32 ').
9. A fine adjustment device, characterized in that it comprises an adjustment base (1) and an adjustment assembly according to any one of claims 1 to 8, the fixed base plate (33) of the adjustment assembly being fixedly connected to the adjustment base (1).
10. The fine-tuning device according to claim 9, characterized in that the adjustment base (1) comprises a first plane (11) perpendicular to the first direction and a second plane (12) perpendicular to the second direction, at least one of said adjustment assemblies being arranged on the side of the first plane (11) and at least one of said adjustment assemblies being arranged on the side of the second plane (12).
11. The trimming device according to claim 10, characterized in that at least two of said adjustment assemblies are provided on the side of said second plane (12).
12. The fine-tuning device according to claim 10, characterized in that the adjustment base (1) further comprises a third plane opposite to the first plane (11) and a fourth plane opposite to the second plane (12), and that the sides of the third plane and the fourth plane are provided with two spring plungers (4) corresponding to the number of adjustment assemblies.
13. The fine adjustment device according to claim 9, wherein the fixed base plate (33) is located at one end of a first adjustment rod (31), the fixed base plate (33) is fixedly connected with the lower surface of the adjustment base (1), the other end of the first adjustment rod (31) extends into a through hole formed in the upper surface of the adjustment base (1), and a side wall of one end of the first adjustment rod (31) far away from the fixed base plate (33) can be in contact with the adjustment base (1).
CN201910222057.9A 2019-03-22 2019-03-22 Adjusting component and fine adjustment device Active CN111722475B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6480036A (en) * 1987-09-21 1989-03-24 Toshiba Machine Co Ltd Device for fixing material to be treated
CN101303532A (en) * 2008-06-10 2008-11-12 上海微电子装备有限公司 Six-freedom degree precision positioning platform capable of switching station
CN103901576A (en) * 2012-12-28 2014-07-02 上海微电子装备有限公司 Fine adjustment mechanism of movable lens
CN205787593U (en) * 2016-05-31 2016-12-07 上海微电子装备有限公司 A kind of six degree of freedom adjusting apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6480036A (en) * 1987-09-21 1989-03-24 Toshiba Machine Co Ltd Device for fixing material to be treated
CN101303532A (en) * 2008-06-10 2008-11-12 上海微电子装备有限公司 Six-freedom degree precision positioning platform capable of switching station
CN103901576A (en) * 2012-12-28 2014-07-02 上海微电子装备有限公司 Fine adjustment mechanism of movable lens
CN205787593U (en) * 2016-05-31 2016-12-07 上海微电子装备有限公司 A kind of six degree of freedom adjusting apparatus

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