CN101303532A - Six-freedom degree precision positioning platform capable of switching station - Google Patents

Six-freedom degree precision positioning platform capable of switching station Download PDF

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Publication number
CN101303532A
CN101303532A CNA2008100387593A CN200810038759A CN101303532A CN 101303532 A CN101303532 A CN 101303532A CN A2008100387593 A CNA2008100387593 A CN A2008100387593A CN 200810038759 A CN200810038759 A CN 200810038759A CN 101303532 A CN101303532 A CN 101303532A
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CN
China
Prior art keywords
precision positioning
positioning platform
air supporting
supporting plate
adjusting
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2008100387593A
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Chinese (zh)
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CN101303532B (en
Inventor
李生强
李志龙
张锋
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Shanghai Micro Electronics Equipment Co Ltd
Shanghai Micro and High Precision Mechine Engineering Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Shanghai Micro and High Precision Mechine Engineering Co Ltd
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Application filed by Shanghai Micro Electronics Equipment Co Ltd, Shanghai Micro and High Precision Mechine Engineering Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN 200810038759 priority Critical patent/CN101303532B/en
Publication of CN101303532A publication Critical patent/CN101303532A/en
Application granted granted Critical
Publication of CN101303532B publication Critical patent/CN101303532B/en
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Abstract

The invention discloses a precision positioning platform with six degrees of freedom and a switchable station; the precision positioning platform comprises a plate sucking platform, an air floating plate, a horizontal fine-turning mechanism, a pedestal and a vertical adjusting mechanism; the plate sucking platform is arranged on the top of the air floating plate through a station switchable mechanism for bearing a mask; the horizontal fine-turning mechanism is connected with the air floating plate and is used for driving the air floating plate to move in the horizontal direction; the lower part of the air floating plate is connected with the pedestal; the vertical adjusting mechanism is arranged at the lower part of the pedestal. The precision positioning platform of the invention has the functions of station switching, horizontal fine-turning and vertical adjusting, being capable of realizing precise adjusting and positioning of six degrees of freedom and meeting the demand on more working positions.

Description

The 6 freedom degree precision positioning station of changeable station
Technical field
The present invention relates to a kind of work stage, particularly be used for the 6 freedom degree precision positioning station of changeable station on semiconductor equipment or the liquid crystal display production equipment.
Background technology
Positioning table is mainly used in the very high occasion of positioning accuracy request, especially little stroke fine setting and location under a plurality of stations, as semiconductor manufacturing and optics and image alignment, positioning table is as one of subsystem, usually to integrate work with other subsystems, very limited on installing space, particularly in height, on May 3rd, 2006 China disclosed " a kind of three-freedom degree precision locating platform " (publication number: CN2777335Y), contact by plane sliding bearing between its lower platform and the motion platform, by being installed on the flexible piece support on the lower platform, be linked to be an integral body with the resilient flexibility part at three steering handle lower platforms and motion platform, this motion platform and X are to driving cam, Y is to fully closely contact of driving cam, the relative lower platform of electric rotating machine actuation movement platform that is subjected to three vertical installations in level to fine setting, its compact overall structure, be easy to realize high precision, but lack the station handoff functionality, and motor is vertically to install, in height taken than large space, in addition, adopt plane sliding bearing to connect between its double-layer structure, be difficult in vertical direction and level between decoupling zero, be difficult to assembling and control.
Summary of the invention
In view of this, technical matters solved by the invention provides a kind of band station handoff functionality, level to fine adjustment function and vertical regulatory function, can realize six degree of freedom minute adjustment and location, and can satisfy the precision positioning platform that multiplex (MUX) more makes status requirement.
For solving the problems of the technologies described above, the present invention has adopted following technical scheme: a kind of 6 freedom degree precision positioning station of changeable station, comprise and inhale bed, air supporting plate, level to micro-adjusting mechanism, base and vertical governor motion, described suction bed is installed in the top of air supporting plate by a station switching mechanism, be used to carry mask, described level connects to the gentle kickboard of micro-adjusting mechanism, being used to drive the air supporting plate moves in the horizontal direction, described air supporting plate below connects base, and described vertical governor motion is installed in described base below.
Described station switching mechanism comprises a cylinder and two guide rails, and described cylinder is affixed to the suction bed by an adaptor, and described guide rail is fixed on air supporting plate upper surface, and described suction bed bottom also is provided with two slide blocks, and can slide along guide rail by slide block.Described station switching mechanism also can comprise electric cylinder and guide rail or linear electric motors and guide rail.
Described precision positioning platform comprises that three levels are to micro-adjusting mechanism, all level is installed on the base, these three levels serve as that group is installed in both sides adjacent on the air supporting plate respectively to micro-adjusting mechanism with two, one, and two groups of levels are vertical mutually to micro-adjusting mechanism, and described three levels overlap with employed centre of figure on the mask to the center of micro-adjusting mechanism.
Described level is connected in sequence by electric rotating machine, shaft coupling, leading screw and screw rod to micro-adjusting mechanism.Also be provided with a plate between described electric rotating machine and the shaft coupling, an end of described extension spring is fixed on the web joint, and the other end is fixed on the air supporting plate, and the pulling force by extension spring makes screw front end contact air supporting plate.
Further, the front end of described screw rod is the bulb shape, and gentle kickboard contact also can be in air supporting plate side slip.The front end of described screw rod also can be a roller structure, can roll in air supporting plate side.
Described precision positioning platform comprises three vertical governor motions, is distributed in described base below by triangle.Described vertical governor motion is made of cam and roller, and the central shaft of described roller is level to setting, and this central shaft is fixed to base by fixture, the mutual interlock of described roller and cam, and described cam also is connected to a drive motor.Further, described roller is barrel-shaped.In addition, but described vertical governor motion also can be the pad of reconditioning.
Described air supporting plate links to each other with base with vacuum by air supporting.
The present invention makes it compared with prior art owing to adopted above-mentioned technical scheme, has following advantage and good effect:
1, band station handoff functionality, level can realize the minute adjustment and the location of six degree of freedom to fine adjustment function and vertical regulatory function, and can satisfy the requirement that multiplex (MUX) more does the position;
2, three levels are to micro-adjusting mechanism following one deck at the station switching mechanism, make three levels always will reduce the error of control aspect with the center of mask figure in photoetching to the center of micro-adjusting mechanism, can effectively improve the bearing accuracy of system;
3, electric rotating machine is a level to installing, and can save vertically the space of (Z to) greatly;
4, only depend on the effect of extension spring to link together between screw rod and the air supporting plate, there are not other constraints, screw front end is made bulb, can be in air supporting plate side slip, this make whole governor motion not only in level to inner decoupling zero, also make level to and vertical between decoupling zero, help the assembling and control;
5, couple together by air supporting and vacuum between air supporting plate and the base, make assembling and adjusting level to the time with level to vertical decoupling zero, almost not friction has improved the efficient of whole mechanism in the course of the work, does not produce pollution, and easy to maintenance;
6, vertical governor motion adopts cam to add the structure of roller, and the Z that can reach sub-micron is to degree of regulation.
Description of drawings
The concrete structure of the 6 freedom degree precision positioning station of changeable station of the present invention is reached by following embodiment
Accompanying drawing provides.
Fig. 1 is the side-looking structural representation of positioning table of the present invention;
Fig. 2 is the plan structure synoptic diagram of positioning table of the present invention;
Fig. 3 is the air supporting plate structure synoptic diagram of positioning table of the present invention;
Fig. 4 is the schematic side view of the another kind of structure of positioning table of the present invention.
Embodiment
Be described in detail below in conjunction with the 6 freedom degree precision positioning station of accompanying drawing changeable station of the present invention.
Referring to Fig. 1 and Fig. 2, the 6 freedom degree precision positioning station of changeable station of the present invention comprises from top to down and inhales bed 34, air supporting plate 21, base 22 and vertical governor motion.Inhale bed 34 and be used to carry mask 35, be printed on the figure that is used to expose on the mask 35, as shown in Figure 2, have two different figures 41 and 42 on this mask 35, can certainly be one or more figures, can use these figures respectively during operate as normal, the effect of whole positioning table is exactly to carry mask and the figure that will expose navigates to appointed positions.Inhale bed 34 usefulness vacuum suction and fix mask 35, the strain that produces when as far as possible reducing permanent mask version 35.
Inhale bed 34 and be installed in the top of air supporting plate 21 by the station switching mechanism, in present embodiment, owing to have only two figures on the mask 35, so only require two stations, precision and repeatable accuracy are less demanding.Therefore, this station switching mechanism adopts double-acting cylinder 31 and guide rail 33 to realize, cylinder 31 is connected with inhaling bed 34 in a side by an adaptor 32, inhales bed 34 belows and slide block and is connected, and slide along two guide rails 33 by slide block, realize along Y to the mask figure switch.The stator of cylinder 31 and guide rail 33 all is fixed on the air supporting plate 21, and 33 pairs on guide rail is inhaled bed 34 and played the effect of supporting and leading.Limit the stroke that switches figure by the impact damper of regulating 31 two end of travels of cylinder,, and finally guarantee repetitive positioning accuracy at two ends as 50mm.According to different accuracy requirements, also can select for use linear electric motors or electric cylinder to replace cylinder.
Air supporting plate 21 is positioned at base 22 tops, its level realizes to micro-adjusting mechanism 23 to moving through three levels that are fixed on the base 22, these three levels to the layout of micro-adjusting mechanism 23 as shown in Figure 2, with two, one serve as the group X that is installed in air supporting plate 21 respectively to Y on side, and three levels to the center of micro-adjusting mechanism 23 always at the center of mask 35 figures that will use, to reduce the error of control aspect, can effectively improve the bearing accuracy of system.Each level is connected in sequence by electric rotating machine 11, web joint 12, shaft coupling 13, leading screw 15, screw rod 16 to micro-adjusting mechanism 23, and be connected by two extension springs 14 between web joint 12 and the air supporting plate 21, therefore only depend on extension spring 14 to be close together between screw rod 16 and the air supporting plate 21, there are not other constraints, screw rod 16 front ends are made bulb, can be in air supporting plate 21 side slip, this make whole governor motion not only in level to inner decoupling zero, also make level to and vertical between decoupling zero, help the assembling and control.Screw front end also can be made roller, rolls in air supporting plate 21 sides, can further reduce wearing and tearing like this.It should be noted that level of the present invention is that level is installed to micro-adjusting mechanism 23, can save the space of short transverse (Z to) so greatly.
What electric rotating machine 11 directly drove is the air supporting plate 21 that is carrying cylinder 31 and guide rail 33, after the figure change action is finished, mask 35, cylinder 31, suction bed 34 maintain static with guide rail 33 relative air supporting plates 21, finely tune along with air supporting plate 21 is being driven on X, Y, three directions of Rz, mask 35 is also just by adjusted in concert.
Level will be with air supporting plate 21 in vertical decoupling zero when regulating, so adopt air floating structure that air supporting plate 21 is floated, level is after fine setting finishes, and air supporting plate 21 tightly is adsorbed on the base 22 of positioning table with vacuum, and vacuum on the air supporting plate 21 and air supporting topology layout are as shown in Figure 3.Adopt vacuum air supporting mode, make assembling and adjusting level to the time can decoupling zero between this both direction, almost not friction has improved the efficient of whole mechanism in the course of the work, does not produce pollution, and easy to maintenance.
The below of base 22 is vertical governor motions.As shown in Figure 1, there are three vertical governor motions 20 to be distributed in 3 points of base 22 belows by triangle, this vertical governor motion 20 is made up of cam 202, motor and roller 201, cam 202 is by motor-driven, come lifting base 22 by friction roller 201 during rotation, 3 drives structure of locating can be at Z to independent lifting with reduce base 22 to certain height, and 3 interlocks can reach final adjusting mask 35 Rx, Ry and the Z purpose to the position, and can reach the degree of regulation of sub-micron.In addition, because when regulating Rx and Ry, roller 201 and cam 202 can relative tilts, so that the profile of roller 201 is made is barrel-shaped.
Referring to Fig. 4, in another embodiment of the present invention, also three vertical governor motions shown in Figure 1 can be changed into three and regulate pad 20 ', reach the purpose of adjusting whole positioning table Z, Rx and Ry three degree of freedom by the thickness of three pads 20 ' of difference reconditioning.Satisfying under the prerequisite of function, make simple in structure, easier realization.
By said structure as can be seen, this positioning table band station handoff functionality, level can realize the minute adjustment and the location of six degree of freedom to fine adjustment function and vertical regulatory function, comprise satisfying the requirement that multiplex (MUX) more does the position.
That more than introduces only is based on preferred embodiment one by one of the present invention, can not limit scope of the present invention with this.Any method of the present invention is done replacement, the combination, discrete of step well know in the art, and the invention process step is done well know in the art being equal to change or replace and all do not exceed exposure of the present invention and protection domain.

Claims (14)

1, a kind of 6 freedom degree precision positioning station of changeable station, it is characterized in that: comprise and inhale bed, air supporting plate, level to micro-adjusting mechanism, base and vertical governor motion, described suction bed is installed in the top of air supporting plate by a station switching mechanism, be used to carry mask, described level connects to the gentle kickboard of micro-adjusting mechanism, be used to drive the air supporting plate and move in the horizontal direction, described air supporting plate below connects base, and described vertical governor motion is installed in described base below.
2, precision positioning platform as claimed in claim 1, it is characterized in that: described station switching mechanism comprises a cylinder and two guide rails, described cylinder is affixed to the suction bed by an adaptor, described guide rail is fixed on air supporting plate upper surface, described suction bed bottom also is provided with two slide blocks, and can slide along guide rail by slide block.
3, precision positioning platform as claimed in claim 1 is characterized in that: described station switching mechanism comprises electric cylinder and guide rail or linear electric motors and guide rail.
4, precision positioning platform as claimed in claim 1, it is characterized in that: described precision positioning platform comprises that three levels are to micro-adjusting mechanism, all level is installed on the base, these three levels serve as that group is installed in both sides adjacent on the air supporting plate respectively to micro-adjusting mechanism with two, one, and two groups of levels are vertical mutually to micro-adjusting mechanism.
5, precision positioning platform as claimed in claim 4 is characterized in that: described three levels overlap with employed centre of figure on the mask to the center of micro-adjusting mechanism.
6, precision positioning platform as claimed in claim 4 is characterized in that: described level is connected in sequence by electric rotating machine, shaft coupling, leading screw and screw rod to micro-adjusting mechanism.
7, precision positioning platform as claimed in claim 6, it is characterized in that: also be provided with a plate between described electric rotating machine and the shaft coupling, one end of described extension spring is fixed on the web joint, and the other end is fixed on the air supporting plate, and the pulling force by extension spring makes screw front end contact air supporting plate.
8, precision positioning platform as claimed in claim 6 is characterized in that: the front end of described screw rod is the bulb shape, and gentle kickboard contact also can be in air supporting plate side slip.
9, precision positioning platform as claimed in claim 6 is characterized in that: the front end of described screw rod is a roller structure, can roll in air supporting plate side.
10, precision positioning platform as claimed in claim 1 is characterized in that: described precision positioning platform comprises three vertical governor motions, is distributed in described base below by triangle.
11, precision positioning platform as claimed in claim 1, it is characterized in that: described vertical governor motion is made of cam and roller, the central shaft of described roller is level to setting, and this central shaft is fixed to base by fixture, the mutual interlock of described roller and cam, and described cam also is connected to a drive motor.
12, precision positioning platform as claimed in claim 11 is characterized in that: described roller is barrel-shaped.
13, precision positioning platform as claimed in claim 1 is characterized in that: but the pad that described vertical governor motion is reconditioning.
14, precision positioning platform as claimed in claim 1 is characterized in that: described air supporting plate links to each other with base with vacuum by air supporting.
CN 200810038759 2008-06-10 2008-06-10 Six-freedom degree precision positioning platform capable of switching station Active CN101303532B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN101303532B CN101303532B (en) 2010-06-09

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CN102135731A (en) * 2011-01-06 2011-07-27 中国电子科技集团公司第四十五研究所 Leveling mechanism for aligning proximity contact photoetching machine with workbench
CN102377289A (en) * 2010-08-17 2012-03-14 上海微电子装备有限公司 Lateral locking device
CN102678748A (en) * 2011-03-07 2012-09-19 上海微电子装备有限公司 Split type air foot
CN102678749A (en) * 2011-03-15 2012-09-19 上海微电子装备有限公司 Air floatation structure of separated type air foot
CN102109766B (en) * 2009-12-25 2012-12-12 上海微电子装备有限公司 Decoupling mechanism and exposure machine using same
CN103212799A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Two-dimensional-motion platform device applicable to laser micromachining of thin-walled tubes
CN103376664A (en) * 2012-04-20 2013-10-30 上海微电子装备有限公司 Reticle stage with station switching function
CN104062854A (en) * 2013-03-21 2014-09-24 上海微电子装备有限公司 Levelling focusing apparatus used for lithography equipment
CN104359648A (en) * 2014-10-17 2015-02-18 北京航天益森风洞工程技术有限公司 Three-DOF (degree of freedom) angle-of-attack mechanism for hypersonic wind tunnel
CN104570614A (en) * 2013-10-25 2015-04-29 上海微电子装备有限公司 Precise positioning table capable of switching stations
CN104749895A (en) * 2013-12-30 2015-07-01 上海微电子装备有限公司 Double air floatation large-scale substrate transmission apparatus
CN102135731B (en) * 2011-01-06 2016-12-14 中国电子科技集团公司第四十五研究所 Close to contact photoetching machine Alignment stage leveling mechanism
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CN111722475A (en) * 2019-03-22 2020-09-29 上海微电子装备(集团)股份有限公司 Adjusting component and fine adjustment device
CN112756996A (en) * 2020-12-29 2021-05-07 中国科学院长春光学精密机械与物理研究所 Six-degree-of-freedom adjusting device

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CN102109766B (en) * 2009-12-25 2012-12-12 上海微电子装备有限公司 Decoupling mechanism and exposure machine using same
CN102377289A (en) * 2010-08-17 2012-03-14 上海微电子装备有限公司 Lateral locking device
CN102377289B (en) * 2010-08-17 2013-05-22 上海微电子装备有限公司 Lateral locking device
CN102135731B (en) * 2011-01-06 2016-12-14 中国电子科技集团公司第四十五研究所 Close to contact photoetching machine Alignment stage leveling mechanism
CN102135731A (en) * 2011-01-06 2011-07-27 中国电子科技集团公司第四十五研究所 Leveling mechanism for aligning proximity contact photoetching machine with workbench
CN102678748A (en) * 2011-03-07 2012-09-19 上海微电子装备有限公司 Split type air foot
US8920031B2 (en) 2011-03-07 2014-12-30 Shanghai Micro Electronics Equipment Co., Ltd. Split type aerostatic bearing
CN102678748B (en) * 2011-03-07 2014-07-16 上海微电子装备有限公司 Split type air foot
CN102678749A (en) * 2011-03-15 2012-09-19 上海微电子装备有限公司 Air floatation structure of separated type air foot
CN102678749B (en) * 2011-03-15 2014-08-20 上海微电子装备有限公司 Air floatation structure of separated type air foot
CN103212799B (en) * 2012-01-19 2016-04-27 昆山思拓机器有限公司 A kind of two-dimension moving platform device being applicable to thin-wall pipes Laser Micro-Machining
CN103212799A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Two-dimensional-motion platform device applicable to laser micromachining of thin-walled tubes
CN103376664A (en) * 2012-04-20 2013-10-30 上海微电子装备有限公司 Reticle stage with station switching function
CN103376664B (en) * 2012-04-20 2016-02-03 上海微电子装备有限公司 A kind of mask platform with Switch of working position function
CN104062854A (en) * 2013-03-21 2014-09-24 上海微电子装备有限公司 Levelling focusing apparatus used for lithography equipment
CN104062854B (en) * 2013-03-21 2016-08-03 上海微电子装备有限公司 Leveling and focusing device for lithographic equipment
CN104570614B (en) * 2013-10-25 2017-06-06 上海微电子装备有限公司 Can Switch of working position precision positioning platform
CN104570614A (en) * 2013-10-25 2015-04-29 上海微电子装备有限公司 Precise positioning table capable of switching stations
CN104749895A (en) * 2013-12-30 2015-07-01 上海微电子装备有限公司 Double air floatation large-scale substrate transmission apparatus
CN104359648A (en) * 2014-10-17 2015-02-18 北京航天益森风洞工程技术有限公司 Three-DOF (degree of freedom) angle-of-attack mechanism for hypersonic wind tunnel
CN104359648B (en) * 2014-10-17 2017-07-11 北京航天益森风洞工程技术有限公司 Hypersonic wind tunnel Three Degree Of Freedom attack angle mechanism
CN106814551A (en) * 2015-11-30 2017-06-09 上海微电子装备有限公司 A kind of substrate delivery/reception device and handover method
CN106814551B (en) * 2015-11-30 2019-04-12 上海微电子装备(集团)股份有限公司 A kind of substrate delivery/reception device and handover method
CN107093768A (en) * 2017-04-14 2017-08-25 鹤壁市诺信电子有限公司 A kind of secondary positioning trimming device of laminating machine
CN107093768B (en) * 2017-04-14 2019-04-09 鹤壁市诺信电子有限公司 A kind of secondary positioning trimming device of laminating machine
CN109725497A (en) * 2017-10-31 2019-05-07 上海微电子装备(集团)股份有限公司 Move table transferring mechanism, sports platform system and lithographic equipment
TWI696896B (en) * 2017-10-31 2020-06-21 大陸商上海微電子裝備(集團)股份有限公司 Moving table moving mechanism, moving table system and photoetching device
CN111722475A (en) * 2019-03-22 2020-09-29 上海微电子装备(集团)股份有限公司 Adjusting component and fine adjustment device
CN112756996A (en) * 2020-12-29 2021-05-07 中国科学院长春光学精密机械与物理研究所 Six-degree-of-freedom adjusting device

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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525

Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd.

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525

Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd.

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.