CN115570275A - Multi-station laser processing device and alignment calibration method thereof - Google Patents
Multi-station laser processing device and alignment calibration method thereof Download PDFInfo
- Publication number
- CN115570275A CN115570275A CN202211378982.9A CN202211378982A CN115570275A CN 115570275 A CN115570275 A CN 115570275A CN 202211378982 A CN202211378982 A CN 202211378982A CN 115570275 A CN115570275 A CN 115570275A
- Authority
- CN
- China
- Prior art keywords
- laser
- camera
- nth
- alignment
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims abstract description 34
- 230000008569 process Effects 0.000 claims description 17
- 238000003754 machining Methods 0.000 claims description 11
- 238000001179 sorption measurement Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010147 laser engraving Methods 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 24
- 239000002184 metal Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a multi-station laser processing device and an alignment calibration method thereof, wherein the device comprises: the laser system is used for emitting laser to perform imprinting, the vision system is used for monitoring and compensating the working state of the multi-station laser processing device, the Z-axis lifting module is used for adjusting the Z-axis positions of the laser system and the vision system, and the Y-axis displacement mechanism is used for adjusting the Y-axis positions of the laser system and the vision system. The alignment calibration method comprises the following steps: s1, marking alignment identification points on two sides of a flexible film; s2, the camera identifies the counterpoint identification point to move in the X direction; s31, establishing a spatial position relation between cameras; s32, establishing a zero angle; s33, establishing a spatial position relation between the lasers; and S4, repeating the step S3 to finish alignment calibration. The device improves the precision of manufacturing the flexible film, improves the production efficiency by simultaneously operating multiple stations, improves the alignment calibration precision of the multiple stations by setting the zero position angle and the zero point and realizes the consistency of the multiple-station laser processing.
Description
Technical Field
The invention relates to the field of laser processing of flexible films, and particularly provides a multi-station laser processing device and an alignment calibration method thereof.
Background
With the development of laser technology, laser processing is increasingly applied to industrial production, has the advantages of high quality, high precision, high speed and the like, and has special application advantages in flexible thin film processing. With the wider application of the flexible metal film, the cost of the flexible metal film is required to be lower, and higher requirements are provided for the efficiency of the flexible metal film manufacturing equipment. The production and manufacturing speed of equipment is required to be faster and faster, and at present, a metal film is manufactured in a chemical corrosion mode in a large quantity, so that the efficiency and precision requirements can be met, but the environment friendliness is poor, and chemical pollution is easily caused. Due to the increasing environmental requirements, those processes that are less environmentally friendly may be phased out.
Along with the continuous extension of flexible film product, new demand constantly appears, needs multistation, many laser heads simultaneous working, satisfies product production efficiency's demand, simultaneously, along with the improvement of product required precision, also higher and higher to laser beam machining positioning accuracy's requirement. At present, alignment calibration of multi-station laser processing is mainly carried out by adopting methods of human eye observation and manual alignment, the prior art is poor in precision and low in efficiency, and each station is independently aligned without relevance, so that the product consistency is poor, the debugging period is long, the production efficiency is seriously influenced, and the method has great limitation.
Disclosure of Invention
In order to solve the problems, the invention provides the multi-station laser processing device which adopts the alignment calibration method of multi-station laser processing to carry out multi-station laser processing on the flexible film, improves the alignment calibration precision during laser processing among multiple stations and realizes the consistency of the multi-station laser processing.
Multistation laser beam machining device includes:
the device comprises N processing stations, two parallel Y-direction slide rails with equal height and a workbench, wherein N is an even number;
every two processing positions are symmetrically arranged on the substrate;
the base plate is connected to the middle position of the guide rail cross beam, and two ends of the guide rail cross beam are connected to the Y-direction slide rail through the slide block;
each processing station has the same structure and comprises a laser and a camera, the laser is connected to the middle position of the substrate, and the laser is used for laser engraving; the camera is connected to the protruding connecting block at the lower end of the substrate through the X-direction sliding rail and used for image recognition, the camera is connected with the controller and feeds recognition information back to the controller, and the X-direction sliding rail and the Y-direction sliding rail are driven.
Preferably, the X-direction sliding rail and the Y-direction sliding rail both adopt electric control sliding tables.
Preferably, the working table comprises a flexible film and a vacuum adsorption table, and the flexible film is arranged on the vacuum adsorption table.
A contraposition calibration method of a multi-station laser processing device comprises the following steps:
s1, placing a flexible film on a vacuum adsorption table, marking equidistant alignment mark points on two sides of the flexible film, and dividing the flexible film into N processing areas, wherein N is an even number;
s2, correspondingly numbering the N processing areas, the cameras and the lasers;
s3, carrying out alignment calibration on the nth laser and the (N + 1) th laser, wherein the value range of N is an integer from 1 to N-1;
s31, establishing a spatial position relation between the nth camera and the (n + 1) th camera, wherein the specific process is as follows:
the nth camera and the (n + 1) th camera identify the alignment identification points of the nth processing area and the (n + 1) th processing area, and move in the X direction and the Y direction according to the alignment identification point information, so that the alignment identification points of the nth processing area and the (n + 1) th processing area are positioned in the view field centers of the nth camera and the (n + 1) th camera, and the spatial position relation of the nth camera and the (n + 1) th camera is determined;
s32, establishing a zero angle, which comprises the following specific processes:
the nth laser and the (n + 1) th laser respectively process patterns containing vertical angles, and the nth camera performs X, Y axis identification on the processed patterns of the nth laser and sets the processed patterns as zero-position angles;
the n +1 th camera carries out X, Y axis recognition on the machining pattern of the n +1 th laser, controls the n +1 th laser to deflect according to the zero position angle, and ensures that a X, Y axis recognized by the n +1 th camera is parallel to a X, Y axis recognized by the n +1 th camera;
s33, establishing a spatial position relation between the nth laser and the (n + 1) th laser, wherein the specific process is as follows:
respectively dotting the nth laser and the (n + 1) th laser, setting the nth laser and the (n + 1) th laser as an nth zero point and an n +1 th zero point, respectively identifying the spatial positions of the nth zero point and the (n + 1) th zero point relative to the center of a viewing field by the nth camera and the (n + 1) th camera, respectively establishing the spatial position relationship between the nth laser and the nth camera, the spatial position relationship between the (n + 1) th laser and the (n + 1) th camera, and combining the spatial position relationship between the nth camera and the (n + 1) th camera established in the S2 to obtain the spatial position relationship between the nth laser and the (n + 1) th laser, so as to complete the alignment calibration of the nth laser and the (n + 1) th laser;
and S4, repeating the step S3 until the alignment calibration of the N lasers is completed.
Preferably, the pattern containing vertical corners may be a cross or a square pattern.
Compared with the prior art, the invention has the beneficial effects that:
the device of the invention manufactures the flexible film by a laser engraving method, thereby avoiding the pollution caused by the traditional chemical corrosion; the recognition participation is reduced through the camera recognition, the precision of manufacturing the flexible film is improved, and the production efficiency is improved through the simultaneous operation of multiple stations.
The alignment calibration method improves the alignment calibration precision during laser processing among multiple stations through zero position angle and zero position setting, realizes the consistency of the multiple stations laser processing, and can still realize accurate alignment calibration when the flexible film generates micro-offset.
Drawings
Fig. 1 is an isometric view of a multi-station laser machining apparatus provided in accordance with an embodiment of the invention;
fig. 2 is a flowchart of an alignment calibration method of a multi-station laser processing apparatus according to an embodiment of the present invention;
FIG. 3 is a top view of a flexible film provided in accordance with an embodiment of the present invention;
FIG. 4 is a calibration diagram illustrating alignment of a first laser and a second laser according to an embodiment of the present invention;
fig. 5 is a calibration diagram of the alignment of the second laser and the third laser according to the embodiment of the invention.
Wherein the reference numerals include:
a laser 1, a Y-guide rail 2;
a worktable 3, a vacuum adsorption table 31, a flexible film 32, an alignment mark point 311, a first processing region 3121, a second processing region 3122, a third processing region 3123, a fourth processing region 3124, a fifth processing region 3125, a sixth processing region 3126, a seventh processing region 3127, and an eighth processing region 3128;
a guide rail beam 4 and a base plate 5;
the camera assembly 6, the camera 61, the camera fixing block 62, the X-direction slide rail 63 and the connecting block 64;
a first laser machining pattern a, a second laser machining pattern b, and a third laser machining pattern c.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
In the multi-station laser processing device provided by the embodiment of the invention, the laser system takes the Z-axis lifting module as a symmetrical axis and has the same structure at two sides, and only one side of the laser system 1 is taken as an example in the embodiment to explain the structural connection relationship; the vision system 2 is symmetrical with the Z-axis lifting module as a symmetry axis and has the same structure on both sides, and in this embodiment, only one side of the vision system 2 is taken as an example to illustrate the structural connection relationship.
By definition, in this embodiment, the Y-axis displacement mechanism is a positive Y-axis direction along the guide rail direction, and the vertical direction is a positive Z-axis direction.
Fig. 1 shows an isometric view of a multi-station laser processing apparatus provided according to an embodiment of the present invention.
As shown in fig. 1, a multi-station laser processing apparatus according to an embodiment of the present invention includes: n processing positions, two parallel equal-height Y-direction slide rails 2 and a workbench 3, wherein N is an even number, and N =4 in the present embodiment.
Every two machining positions are symmetrically arranged on a base plate 5, the base plate 5 is connected to the middle position of a guide rail cross beam 4, two ends of the guide rail cross beam 4 are connected to a Y-direction slide rail 2 through slide blocks, the Y-direction slide rail 2 and an X-direction slide rail 63 can adopt electric control sliding tables or automatic guide rails, and the Y-axis guide rail 2 is used for adjusting the distance between different machining position groups;
each processing station has the same structure and comprises a laser 1 and a camera assembly 6, so the embodiment is described in detail only by the structure of one processing station, the laser 1 is connected to the middle position of the substrate 5, and the laser 1 is used for emitting laser to perform imprinting;
the camera assembly 6 comprises a camera 61, a camera fixing block 62, an X-direction slide rail 63 and a connecting block 64, and is used for monitoring and compensating the working state of the multi-station laser processing device.
The camera 61 is connected to a connecting block 64 protruding from the lower end of the substrate 5 through an X-direction slide rail 63, the camera 61 is used for image recognition and information feedback, the camera 61 is connected with the controller and feeds back the recognition information to the controller, the controller drives and controls the X-direction slide rail 63 and the Y-direction slide rail 2 according to the feedback information, and the content of the controller belongs to the prior art and is not described herein again.
The workbench 3 comprises a vacuum adsorption platform 31 and a flexible film 32, wherein the vacuum adsorption platform 31 is used for adsorbing and paving the flexible film 32.
The embodiment of the invention provides a method for calibrating the alignment of a multi-station laser processing device by taking the alignment of 4 lasers as an example, which comprises the following steps:
fig. 2 shows a flow of an alignment calibration method of a multi-station laser processing apparatus according to an embodiment of the present invention.
As shown in fig. 2, the alignment calibration method for the multi-station laser processing apparatus provided in the embodiment of the present invention includes the following steps:
FIG. 3 illustrates a top view of a flexible film provided in accordance with an embodiment of the present invention.
As shown in fig. 3, S1, placing the flexible film 32 on the vacuum adsorption table 31, marking the equidistant alignment mark points 311 on both sides of the flexible film 32, and dividing the flexible film into N processing regions, wherein N is an even number, such as a first processing region 3121, a second processing region 3122, a third processing region 3123, a fourth processing region 3124, a fifth processing region 3125, a sixth processing region 3126, a seventh processing region 3127, and an eighth processing region 3128 shown in the figure;
s2, correspondingly numbering the 4 cameras and the 4 lasers;
fig. 4 illustrates alignment calibration of a first laser and a second laser provided according to an embodiment of the present invention.
As shown in fig. 4, S3, performing alignment calibration on the laser;
establishing a spatial position relationship between the first camera and the second camera, which comprises the following specific processes:
the first camera and the second camera identify the alignment mark points of the first processing area 3121 and the second processing area 3122, and move in the X direction and the Y direction according to the alignment mark point information, so that the alignment mark points of the first processing area and the second processing area are positioned in the center of the visual field of the first camera and the second camera, and the spatial position relationship of the first camera and the second camera is determined;
s32, establishing a zero angle, which comprises the following specific processes:
the first laser and the second laser respectively process patterns containing vertical angles, the cross pattern and the square pattern are processed in the embodiment, the first camera carries out X, Y axis identification on the first laser processing pattern a, and X, Y axes which are identified to be vertical to each other are set as zero-position angles;
the second camera carries out X, Y axis recognition on the second laser machining pattern b, and controls the second laser to deflect according to the zero position angle, so that the X, Y axis recognized by the first camera is completely parallel to the X, Y axis recognized by the second camera;
s33, establishing a spatial position relation of the first laser and the second laser, wherein the specific process is as follows:
the first laser and the second laser are respectively dotted and set as a first zero point and a second zero point, the first camera and the second camera respectively identify the first zero point and the second zero point, the spatial position of the first zero point relative to the center of the field of view of the first camera is calculated, the spatial position of the second zero point relative to the center of the field of view of the second camera is calculated, the spatial position relationship between the first laser and the first camera and the spatial position relationship between the second laser and the second camera are respectively established according to the calculation result, the spatial position relationship between the first laser and the second laser is obtained by combining the spatial position relationship between the first camera and the second camera established in the step S2, the alignment calibration of the first laser and the second laser is completed, and the synchronous and accurate processing of the flexible film 32 can be realized by calibrating the first laser and the second laser in the alignment at the moment.
Fig. 5 shows alignment calibration of the second laser and the third laser provided according to the embodiment of the present invention.
As shown in fig. 5, S4, the alignment calibration of the second laser and the third laser, and the alignment calibration of the third laser and the fourth laser are the same as the alignment calibration steps of the first laser and the second laser, which are not described herein again.
In order to improve the production efficiency, more groups of lasers are designed for synchronous laser processing, and steps S3 and S4 adopt a computer program, which is briefly described as follows:
s3, initializing n =1;
s31, establishing a spatial position relation between the nth camera and the (n + 1) th camera, wherein the specific process is as follows:
the nth camera and the (n + 1) th camera identify the alignment identification points of the nth processing area and the (n + 1) th processing area, and move in the X direction and the Y direction according to the alignment identification point information, so that the alignment identification points of the nth processing area and the (n + 1) th processing area are positioned in the view field centers of the nth camera and the (n + 1) th camera, and the spatial position relation of the nth camera and the (n + 1) th camera is determined;
s32, establishing a zero angle, which comprises the following specific processes:
the nth laser and the (n + 1) th laser respectively process patterns containing vertical angles, and the nth camera performs X, Y axis recognition on the processed patterns of the nth laser and sets the processed patterns as a zero angle.
The n +1 th camera carries out X, Y axis identification on the processing pattern of the n +1 th laser, controls the n +1 th laser to deflect according to the zero position angle, and ensures that a X, Y axis identified by the n +1 th camera is parallel to a X, Y axis identified by the n +1 th camera.
S33, establishing a spatial position relation between the nth laser and the (n + 1) th laser, wherein the specific process is as follows:
and respectively dotting the nth laser and the (n + 1) th laser, setting the nth laser and the (n + 1) th laser as an nth zero point and an n + 1) th zero point, respectively identifying the spatial positions of the nth zero point and the (n + 1) th zero point relative to the center of the field of view by the nth camera and the (n + 1) th camera, respectively establishing the spatial position relationship between the nth laser and the nth camera and the spatial position relationship between the (n + 1) th laser and the (n + 1) th camera, and combining the spatial position relationship between the nth camera and the (n + 1) th camera established in the S2 to obtain the spatial position relationship between the nth laser and the (n + 1) th laser, so as to finish the alignment calibration of the nth laser and the (n + 1) th laser.
S4, if N is smaller than N-1, updating N = N +1, and returning to execute S3;
and if N is equal to N-1, stopping the alignment calibration.
While embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are exemplary and should not be taken as limiting the invention. Variations, modifications, substitutions and changes to the embodiments described above will occur to those skilled in the art and are intended to be within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (5)
1. A multi-station laser processing apparatus, comprising: the device comprises N processing stations, two parallel Y-direction slide rails with equal height and a workbench, wherein N is an even number;
every two processing positions are symmetrically arranged on the substrate;
the base plate is connected to the middle position of the guide rail cross beam, and two ends of the guide rail cross beam are connected to the Y-direction slide rail through slide blocks;
each processing station has the same structure and comprises a laser and a camera, the laser is connected to the middle position of the substrate, and the laser is used for laser engraving; the camera is connected to the connecting block protruding from the lower end of the substrate through an X-direction sliding rail and used for image recognition, the camera is connected with the controller and feeds recognition information back to the controller, and the controller drives the X-direction sliding rail and the Y-direction sliding rail.
2. A multi-station laser processing device as claimed in claim 1, wherein the X-direction slide rail and the Y-direction slide rail both employ electrically controlled slide tables.
3. A multi-station laser processing apparatus according to claim 1, wherein said table comprises: the flexible film is arranged on the vacuum adsorption platform.
4. A method for calibrating the alignment of a multi-station laser processing apparatus according to claim 1, comprising the steps of:
s1, placing a flexible film on a vacuum adsorption table, marking equidistant alignment mark points on two sides of the flexible film, and dividing the flexible film into N processing areas;
s2, correspondingly numbering the N processing areas, the cameras and the lasers;
s3, carrying out alignment calibration on the nth laser and the (N + 1) th laser, wherein the value range of N is an integer from 1 to N-1;
s31, establishing a spatial position relation between the nth camera and the (n + 1) th camera, wherein the specific process is as follows:
the nth camera and the (n + 1) th camera identify the alignment identification points of the nth processing area and the (n + 1) th processing area, and move in the X direction and the Y direction according to the alignment identification point information, so that the alignment identification points of the nth processing area and the (n + 1) th processing area are positioned in the view field centers of the nth camera and the (n + 1) th camera, and the spatial position relation of the nth camera and the (n + 1) th camera is determined;
s32, establishing a zero angle, which comprises the following specific processes:
the nth laser and the (n + 1) th laser respectively process patterns containing vertical angles, and the nth camera performs X, Y axis identification on the processed patterns of the nth laser and sets the processed patterns as the zero angle;
the n +1 th camera carries out X, Y axis recognition on the machining pattern of the n +1 th laser, controls the n +1 th laser to deflect according to the zero position angle, and ensures that a X, Y axis recognized by the n +1 th camera is parallel to a X, Y axis recognized by the n +1 th camera;
s33, establishing a spatial position relation between the nth laser and the (n + 1) th laser, wherein the specific process is as follows:
respectively dotting the nth laser and the (n + 1) th laser, setting the laser as an nth zero point and an (n + 1) th zero point, respectively identifying the spatial positions of the nth zero point and the (n + 1) th zero point relative to the center of a visual field by the nth camera and the (n + 1) th camera, respectively establishing the spatial position relationship between the nth laser and the nth camera and the spatial position relationship between the (n + 1) th laser and the (n + 1) th camera, and combining the spatial position relationship between the nth camera and the (n + 1) th camera established in S2 to obtain the spatial position relationship between the nth laser and the (n + 1) th laser, thereby completing the alignment calibration of the nth laser and the (n + 1) th laser;
and S4, repeating the step S3 until the alignment calibration of the N lasers is completed.
5. The alignment calibration method for multi-station laser processing according to claim 4, wherein the pattern with vertical corners can be a cross or a square pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211378982.9A CN115570275B (en) | 2022-11-04 | 2022-11-04 | Multi-station laser processing device and alignment calibration method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211378982.9A CN115570275B (en) | 2022-11-04 | 2022-11-04 | Multi-station laser processing device and alignment calibration method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115570275A true CN115570275A (en) | 2023-01-06 |
| CN115570275B CN115570275B (en) | 2024-06-25 |
Family
ID=84588781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211378982.9A Active CN115570275B (en) | 2022-11-04 | 2022-11-04 | Multi-station laser processing device and alignment calibration method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115570275B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1058175A (en) * | 1996-08-27 | 1998-03-03 | Nikon Corp | Calibration method for optical axis of laser beam machine |
| JP2002009315A (en) * | 2000-06-22 | 2002-01-11 | Kanegafuchi Chem Ind Co Ltd | Method and device for recognizing alignment mark for laser scribe of thin film |
| CN106363304A (en) * | 2016-08-19 | 2017-02-01 | 武汉华工激光工程有限责任公司 | Multi-camera correcting and positioning method and glass laser cutting device |
| CN108269286A (en) * | 2016-12-30 | 2018-07-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | Polyphaser pose correlating method based on combination dimensional mark |
| CN113146060A (en) * | 2021-05-31 | 2021-07-23 | 苏州德龙激光股份有限公司 | Laser processing device and method for rapidly etching large-format conductive film by multiple beams |
| CN113231745A (en) * | 2021-07-12 | 2021-08-10 | 中钞印制技术研究院有限公司 | Laser engraving plate-making apparatus, control system, plate-making method, and storage medium |
| CN113256737A (en) * | 2021-06-21 | 2021-08-13 | 中科长光精拓智能装备(苏州)有限公司 | Identification camera calibration device and calibration method thereof |
| CN113828928A (en) * | 2021-10-13 | 2021-12-24 | 浙江师范大学 | Device and method for processing multiple parallel photovoltaic synergistic micro-nano structures |
| CN215588157U (en) * | 2021-08-31 | 2022-01-21 | 苏州迈为科技股份有限公司 | Multi-station laser processing mechanism and display screen etching device |
| CN217019036U (en) * | 2021-11-29 | 2022-07-22 | 广东镭泰激光智能装备有限公司 | Flexible label paper laser engraving visual positioning system |
-
2022
- 2022-11-04 CN CN202211378982.9A patent/CN115570275B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1058175A (en) * | 1996-08-27 | 1998-03-03 | Nikon Corp | Calibration method for optical axis of laser beam machine |
| JP2002009315A (en) * | 2000-06-22 | 2002-01-11 | Kanegafuchi Chem Ind Co Ltd | Method and device for recognizing alignment mark for laser scribe of thin film |
| CN106363304A (en) * | 2016-08-19 | 2017-02-01 | 武汉华工激光工程有限责任公司 | Multi-camera correcting and positioning method and glass laser cutting device |
| CN108269286A (en) * | 2016-12-30 | 2018-07-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | Polyphaser pose correlating method based on combination dimensional mark |
| CN113146060A (en) * | 2021-05-31 | 2021-07-23 | 苏州德龙激光股份有限公司 | Laser processing device and method for rapidly etching large-format conductive film by multiple beams |
| CN113256737A (en) * | 2021-06-21 | 2021-08-13 | 中科长光精拓智能装备(苏州)有限公司 | Identification camera calibration device and calibration method thereof |
| CN113231745A (en) * | 2021-07-12 | 2021-08-10 | 中钞印制技术研究院有限公司 | Laser engraving plate-making apparatus, control system, plate-making method, and storage medium |
| CN215588157U (en) * | 2021-08-31 | 2022-01-21 | 苏州迈为科技股份有限公司 | Multi-station laser processing mechanism and display screen etching device |
| CN113828928A (en) * | 2021-10-13 | 2021-12-24 | 浙江师范大学 | Device and method for processing multiple parallel photovoltaic synergistic micro-nano structures |
| CN217019036U (en) * | 2021-11-29 | 2022-07-22 | 广东镭泰激光智能装备有限公司 | Flexible label paper laser engraving visual positioning system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115570275B (en) | 2024-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101870039B (en) | Double-workbench drive laser processing machine and processing method thereof | |
| CN108762007B (en) | Direct-writing photoetching mechanism for improving exposure productivity and exposure method thereof | |
| CN110202582A (en) | A kind of robot calibration method based on three coordinates platforms | |
| CN105620050A (en) | High-precision galvanometer error self-correcting device and high-precision galvanometer error self-correcting method based on machine vision | |
| CN102179996A (en) | Substrate positioning method suitable for screen printing technology | |
| CN102122118A (en) | Laser direct writing device | |
| CN110148187A (en) | A kind of the high-precision hand and eye calibrating method and system of SCARA manipulator Eye-in-Hand | |
| CN112697112B (en) | Method and device for measuring horizontal plane inclination angle of camera | |
| US11791178B1 (en) | Compliant mechanical system for mini/micro chip mass transfer and packaging | |
| CN104875514A (en) | Screen printer and screen printing method thereof | |
| CN112894823A (en) | Robot high-precision assembling method based on visual servo | |
| CN112053985A (en) | Wafer alignment device and alignment method thereof | |
| WO2014010154A1 (en) | Scribing method and scribing device | |
| CN114823454A (en) | Wafer alignment device and alignment method | |
| CN115684019A (en) | Alignment device, calibration and alignment method of display panel detection equipment | |
| CN113290330B (en) | Laser processing head space position calibration method of six-axis five-linkage machine tool | |
| CN115570275B (en) | Multi-station laser processing device and alignment calibration method thereof | |
| CN211278404U (en) | Hand eye calibration device of mechanical arm | |
| CN110861076A (en) | Hand eye calibration device of mechanical arm | |
| CN114964056B (en) | Self-calibration method for micro-assembly equipment | |
| CN111308868B (en) | Alignment compensation method of direct-writing exposure machine | |
| CN206595232U (en) | A kind of wafer stage chip upside-down mounting locating platform | |
| CN115235383A (en) | Method for detecting and debugging orthogonality of spatial cross guide rail | |
| CN103419081A (en) | Bench synchronous positioning compensation system | |
| CN111447752A (en) | High-line-number ultra-clear printing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |