CN115235383A - A method for detecting and debugging the orthogonality of space cross guides - Google Patents

A method for detecting and debugging the orthogonality of space cross guides Download PDF

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CN115235383A
CN115235383A CN202210873659.2A CN202210873659A CN115235383A CN 115235383 A CN115235383 A CN 115235383A CN 202210873659 A CN202210873659 A CN 202210873659A CN 115235383 A CN115235383 A CN 115235383A
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linear guide
guide rail
guide rails
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plane
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CN115235383B (en
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杨杰
胡琦
罗平
陈希瑞
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Institute of Optics and Electronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction

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Abstract

本发明公开了一种空间十字导轨正交性的检测与调试方法,本发明是借助激光跟踪仪首先测量基准面建立坐标系,测量A、B导轨并调试导轨的直线度与基准面平行;然后利用激光跟踪仪测量A、B导轨运动范围内的空间坐标点拟合XY平面,移动A、B导轨至中心形成正交,利用激光跟踪仪测量A、B导轨运动范围直线并拟合A、B导轨直线度和十字交点,通过XY平面、十字交点、A直线建立空间坐标系,根据实时位置坐标调节B导轨相对A导轨的正交直至达到要求,最后进行复验。本发明借助激光跟踪仪的空间测量精度,对十字双导轨在空间的正交关系进行在位检测与调试,其检测精度较高、操作便捷。

Figure 202210873659

The invention discloses a method for detecting and debugging the orthogonality of a space cross guide rail. The invention first measures a reference plane to establish a coordinate system by means of a laser tracker, measures A and B guide rails, and adjusts the straightness of the guide rails to be parallel to the reference plane; Use the laser tracker to measure the spatial coordinate points within the moving range of the A and B guide rails to fit the XY plane, move the A and B guide rails to the center to form an orthogonal, and use the laser tracker to measure the straight lines of the A and B guide rails and fit the A and B guide rails. The straightness of the guide rail and the intersection point, establish a space coordinate system through the XY plane, the intersection point and the A straight line, adjust the orthogonality of the B guide rail relative to the A guide rail according to the real-time position coordinates until the requirements are met, and finally re-check. The invention uses the space measurement accuracy of the laser tracker to perform on-site detection and debugging of the orthogonal relationship of the cross double guide rail in space, and has high detection accuracy and convenient operation.

Figure 202210873659

Description

一种空间十字导轨正交性的检测与调试方法A detection and debugging method for the orthogonality of space cross guides

技术领域technical field

本发明属于检测领域,具体涉及一种空间十字导轨正交性的检测与调试方法。The invention belongs to the field of detection, and in particular relates to a detection and debugging method for the orthogonality of a space cross guide rail.

背景技术Background technique

目前精密机械、船舶、航天等领域迅猛发展,对于大型精密二维三维等运动系统的需求量不断增大,其运动系统的几何参数要求也越来越高。然而对于在位检测调试的方法也是一种巨大的挑战,传统方法使用标准尺、千分表检测方法已无法满足需求,现代检测设备激光跟踪仪因具有安装快捷、高精度、高效率、能实施在位检测等优点已在各大行业中广泛应用,该设备的测量方法是通过靶球续光移动并接触被测产品外形轮廓,激光头实时采集靶球空间位置坐标,通过强大的软件计算分析几何参数。At present, the fields of precision machinery, ships, aerospace and other fields are developing rapidly. The demand for large-scale precision two-dimensional and three-dimensional motion systems is increasing, and the geometric parameters of the motion systems are also getting higher and higher. However, it is also a huge challenge for the method of in-situ detection and debugging. The traditional method using standard ruler and dial gauge detection method can no longer meet the needs. Modern detection equipment laser tracker has the advantages of fast installation, high precision, high efficiency, and can be implemented. The advantages of in-situ detection and other advantages have been widely used in various industries. The measurement method of this equipment is to move the target ball continuously and contact the outline of the product under test. The laser head collects the space position coordinates of the target ball in real time, and calculates and analyzes it through powerful software. Geometric parameters.

本发明借助激光跟踪仪的空间测量技术,解决十字导轨运动直线度及正交精度的在位检测与调试,能够保证检测精度及准确性,有效降低了该阶段产品的研制周期,节约了时间成本。By means of the space measurement technology of the laser tracker, the invention solves the in-situ detection and debugging of the movement straightness and the orthogonality of the cross guide rail, can ensure the detection precision and accuracy, effectively reduces the development cycle of the product at this stage, and saves time and cost .

发明内容SUMMARY OF THE INVENTION

本发明为解决1.2m二维运动工作台,在XY平面内任意位置移动时与基准平面平行,在A、B导轨工作范围内十字交叉移动都能确保导轨相互正交的问题,提供了一种空间十字导轨正交性的检测与调试方法。In order to solve the problem that the 1.2m two-dimensional motion worktable is parallel to the reference plane when moving at any position in the XY plane, and the guide rails can be crossed and moved in the working range of the A and B guide rails to ensure that the guide rails are orthogonal to each other, the invention provides a The detection and debugging method of the orthogonality of the space cross guide.

本发明采用的技术方案为:一种空间十字导轨正交性的检测与调试方法,按以下步骤实现:The technical scheme adopted in the present invention is: a method for detecting and debugging the orthogonality of a space cross guide rail, which is realized according to the following steps:

步骤一:将A直线导轨横向安装于基准面上,使用激光跟踪仪结合靶球测量基准面并在该表面上建立第一笛卡尔直角坐标系,通过激光跟踪仪根据坐标系实时显示值测量和调试A直线导轨的直线度,以及A直线导轨与基准面的平行度;Step 1: Install the A linear guide rail laterally on the reference surface, use the laser tracker combined with the target ball to measure the reference surface and establish the first Cartesian Cartesian coordinate system on the surface, and display the measured and Debug the straightness of the A linear guide, and the parallelism between the A linear guide and the reference plane;

步骤二:将B直线导轨纵向安装在基准面上,使得其A、B直线导轨呈十字交叉状态;Step 2: Install the B linear guide rail longitudinally on the reference plane, so that the A and B linear guide rails are in a crisscross state;

步骤三:根据所述第一笛卡尔直角坐标系实时显示值调试B直线导轨的滑块行程直线度,同时调试B直线导轨与基准面平行;Step 3: According to the real-time display value of the first Cartesian coordinate system, the straightness of the slider stroke of the B linear guide rail is adjusted, and the B linear guide rail is parallel to the reference plane at the same time;

步骤四:复验与调试A、B直线导轨,使得其A、B直线导轨在二维运动范围内对基准面平行;Step 4: Recheck and debug the A and B linear guides, so that the A and B linear guides are parallel to the reference plane within the two-dimensional motion range;

步骤五:通过激光跟踪仪在A、B直线导轨运动形成的XY平面上均匀分布多个测量点一,并根据测量结果拟合所述XY平面度;再使用激光跟踪仪依次测量A、B直线导轨上均布的多个测量点二,并根据测量数据分别拟合出A、B直线导轨的直线度,以及两直线导轨中心的十字交叉点;所述测量点一和测量点二的数量分布根据导轨行程的范围和精度所决定;Step 5: Use the laser tracker to evenly distribute a plurality of measurement points on the XY plane formed by the motion of the A and B linear guides, and fit the XY flatness according to the measurement results; then use the laser tracker to measure the A and B straight lines in turn A plurality of measurement points 2 evenly distributed on the guide rail, and the straightness of the A and B linear guide rails, and the cross point of the center of the two linear guide rails are respectively fitted according to the measurement data; the number distribution of the measurement point 1 and measurement point 2 Determined according to the range and accuracy of the guide rail stroke;

步骤六:以垂直于XY平面确定+Z轴,其中A、B两直线导轨中心十字交叉点为坐标原点,以A直线导轨方向确定+X轴方向,建立第二笛卡尔直角坐标系;Step 6: Determine the +Z axis perpendicular to the XY plane, where the cross point of the center of the A and B linear guide rails is the coordinate origin, determine the +X axis direction with the A linear guide rail direction, and establish a second Cartesian Cartesian coordinate system;

步骤七:在所述的第二笛卡尔直角坐标系下,不断调试B直线导轨的位置偏差值,使得其与A直线导轨形成正交;Step 7: Under the second Cartesian Cartesian coordinate system, continuously debug the position deviation value of the B linear guide rail so that it is orthogonal to the A linear guide rail;

步骤八:检测复验A、B直线导轨的正交性。Step 8: Check the orthogonality of the linear guide rails A and B.

进一步的,步骤一中,将激光跟踪仪安装于A直线导轨旁侧,在A直线导轨的滑块上固定靶座并放置靶球,扫描测量基准面和A直线导轨直线度,并根据建立的第一笛卡尔直角坐标信息依次对A直线导轨的直线度与基准面的平行度进行粗调、精调直至达到要求。Further, in step 1, install the laser tracker on the side of the A linear guide, fix the target base on the slider of the A linear guide and place the target ball, scan and measure the datum plane and the straightness of the A linear guide, and according to the established The first Cartesian Cartesian coordinate information sequentially performs rough adjustment and fine adjustment on the straightness of the A linear guide rail and the parallelism of the reference plane until the requirements are met.

进一步的,步骤二中,所述通过滑块底部十字驱动槽分别连接于A、B直线导轨上,通过气浮驱动滑块带动A、B直线导轨做单轴直线运动或双轴二维联动。Further, in step 2, the cross drive grooves at the bottom of the slider are respectively connected to the A and B linear guide rails, and the A and B linear guide rails are driven by the air float to drive the slider to perform single-axis linear motion or two-axis two-dimensional linkage.

进一步的,步骤五中,获取所述二维运动范围的XY平面作为基准平面,具体为:分别于A直线导轨和B直线导轨上均匀分布三条测量线形成矩形网格测量路径,均布测量多点并拟合XY平面,移动两导轨于XY平面中心位置并呈十字交叉状态,在该状态下测量A、B直线导轨并将拟合的两导轨直线和交叉点垂直投影到所述的基准平面上,以确保测量参数的正确拟合分析,以及坐标系法向、方向、原点正确建立,并在统一坐标下保证参数的测量重复性和有效性。Further, in step 5, the XY plane of the two-dimensional motion range is obtained as the reference plane, specifically: evenly distributing three measurement lines on the A linear guide rail and the B linear guide rail respectively to form a rectangular grid measurement path, the uniform measurement is more Point and fit the XY plane, move the two guide rails at the center of the XY plane and form a cross state, measure the A and B linear guide rails in this state and project the fitted two guide rail lines and intersection points to the reference plane vertically In order to ensure the correct fitting and analysis of the measurement parameters, and the correct establishment of the normal, direction and origin of the coordinate system, and ensure the repeatability and validity of the parameter measurement under the unified coordinates.

进一步的,所述测量点一为32个;所述测量点二分别为A、B直线导轨各测量11个。Further, the first measurement point is 32; the measurement point two is 11 measurement points for the A and B linear guide rails respectively.

进一步的,步骤六中,建立的第二笛卡尔直角坐标系是模拟A、B直线导轨实际使用状态下建立的坐标,其中A直线导轨方向可与B直线导轨方向互换,即可将+X轴方向互换为+Y轴方向。Further, in step 6, the established second Cartesian Cartesian coordinate system is the coordinates established under the actual use state of the A and B linear guide rails, wherein the A linear guide rail direction can be interchanged with the B linear guide rail direction, and the +X The axis directions are interchanged to the +Y axis direction.

进一步的,步骤七中,通过激光跟踪仪调出实时XYZ位置坐标显示值,调试B直线导轨偏摆锁紧螺母,直到修正B直线导轨坐标值偏离量以使得B直线导轨与A直线导轨正交。Further, in step 7, the real-time XYZ position coordinate display value is called up by the laser tracker, and the yaw lock nut of the B linear guide rail is debugged until the offset of the coordinate value of the B linear guide rail is corrected so that the B linear guide rail is orthogonal to the A linear guide rail. .

进一步的,步骤八中,在重新采集A、B直线导轨二维运动形成的XY平面、直线度、交叉点建立第三笛卡尔直角标系下,重复步骤七,检测和调试直至A、B直线导轨在XY平面范围内运动正交。Further, in step 8, the XY plane, straightness, and intersection formed by the two-dimensional motion of A and B linear guide rails are re-collected to establish a third Cartesian right-angle system, and step 7 is repeated to detect and debug until A, B straight line. The guide rail moves orthogonally in the XY plane.

本发明与现有技术相比的优点在于:The advantages of the present invention compared with the prior art are:

1.由于大尺寸直线运动导轨是作为移动工作台安装在狭小的设备内部,且需要在位解决相互二维台运动间的几何参数和位置精度,利用传统的标准直尺、角尺、千分表等传统手段在位实施调装与检测非常困难;若应用专业设备则需要激光直线度仪、自准直仪、激光干涉仪等精密计量设备和操作人员,因此检测程序较为繁琐、成本较高;1. Since the large-size linear motion guide rail is installed inside the narrow equipment as a moving table, and it is necessary to solve the geometric parameters and positional accuracy between the mutual two-dimensional table motions, the traditional standard ruler, angle ruler and dial indicator are used. It is very difficult to carry out adjustment and inspection in place by traditional means such as laser straightness, autocollimator, laser interferometer and other precision measurement equipment and operators if professional equipment is used, so the inspection procedure is cumbersome and the cost is high;

2.本发明方法借助激光跟踪仪的空间坐标检测技术,有效解决了在位检测并实时动态监测和调试导轨的几何参数及位置精度(如导轨直线度、相互垂直度、移动定位精度及重复定位精度)提高了整个导轨运动系统的检测、调试精度和工作效率;2. The method of the present invention effectively solves the problem of in-situ detection and real-time dynamic monitoring and debugging of the geometric parameters and positional accuracy of the guide rail (such as the straightness of the guide rail, mutual perpendicularity, mobile positioning accuracy and repeated positioning) by means of the spatial coordinate detection technology of the laser tracker. Accuracy) improves the detection, debugging accuracy and work efficiency of the entire guide rail motion system;

3.本发明方法是通过将二维直线导轨运动系统依次进行单直线导轨的几何精度调试再到双轨的正交精度调试,能够使双导轨在XY平面空间内任意位置移动时具有良好的直线性与正交精度。3. The method of the present invention is to debug the geometric accuracy of the single linear guide and then to the orthogonal accuracy of the double rails in turn by the two-dimensional linear guide motion system, so that the double guides can have good linearity when moving at any position in the XY plane space. with quadrature precision.

附图说明Description of drawings

图1为一种空间十字导轨正交性的检测与调试方法的示意图;1 is a schematic diagram of a method for detecting and debugging the orthogonality of a space cross guide;

图2为一种空间十字导轨正交性的检测与调试方法的检测图。FIG. 2 is a detection diagram of a method for detecting and debugging the orthogonality of a space cross guide.

具体实施方式Detailed ways

下面结合附图以及具体实施的方式进一步说明本发明。实施方案过程:通过使用本发明方法对1.2m×1.2m直线运动导轨直线度以及正交性的在位检测与调试过程进行详细说明。The present invention will be further described below with reference to the accompanying drawings and specific implementation manners. Implementation process: By using the method of the present invention, the in-situ detection and debugging process of the straightness and orthogonality of the 1.2m×1.2m linear motion guide rail is described in detail.

按以下步骤实现:Do it as follows:

步骤一:将A直线导轨按照图1所示横向安装于基准面上,使用激光跟踪仪结合靶球测量基准面并在该表面上建立第一笛卡尔直角坐标系,通过激光跟踪仪根据坐标系实时显示值测量和调试A直线导轨的直线度,以及A直线导轨与基准面的平行度;Step 1: Install the A linear guide rail on the reference surface horizontally as shown in Figure 1, use the laser tracker combined with the target ball to measure the reference surface and establish the first Cartesian Cartesian coordinate system on the surface, and use the laser tracker to measure the reference surface according to the coordinate system. Real-time display value to measure and debug the straightness of the A linear guide, as well as the parallelism of the A linear guide and the reference plane;

其中,激光跟踪仪安装于A直线导轨旁侧,在A直线导轨的滑块上固定靶座并放置靶球,扫描测量基准面和A直线导轨直线度,并根据建立的第一笛卡尔直角坐标信息依次对A直线导轨的直线度与基准面的平行度进行粗调、精调直至达到要求。Among them, the laser tracker is installed on the side of the A linear guide, the target base is fixed on the slider of the A linear guide and the target ball is placed, the datum plane and the straightness of the A linear guide are scanned and measured, and according to the established first Cartesian Cartesian coordinates The information sequentially adjusts the straightness of the linear guide A and the parallelism of the reference plane roughly and finely until the requirements are met.

步骤二:将B直线导轨纵向安装在基准面上,使其A、B直线导轨呈十字交叉状态;Step 2: Install the B linear guide rail longitudinally on the reference plane, so that the A and B linear guide rails are in a crisscross state;

其中,通过滑块底部十字驱动槽分别连接于A、B直线导轨上,通过气浮驱动滑块带动A、B直线导轨做单轴直线运动或双轴二维联动。Among them, the cross drive slots at the bottom of the slider are respectively connected to the A and B linear guide rails, and the A and B linear guide rails are driven by the air-floating drive slider to perform single-axis linear motion or two-axis two-dimensional linkage.

步骤三:根据坐标系显示值调试B直线导轨滑块全行程的直线度并使得其与基准面平行;Step 3: According to the displayed value of the coordinate system, adjust the straightness of the full stroke of the B linear guide slider and make it parallel to the reference plane;

步骤四:复验与调试A、B直线导轨二维运动范围对基准面平行;Step 4: The two-dimensional motion range of the linear guide rails A and B is parallel to the reference plane for re-inspection and debugging;

步骤五:按照图2所示通过激光跟踪仪在A、B直线导轨运动形成的XY平面上均匀分布32个测量点,并根据测量结果拟合所述XY平面度;再使用激光跟踪仪依次于A、B直线导轨上均布测量各11个点,并根据测量数据分别拟合出A、B直线导轨的直线度,以及两直线导轨中心的十字交叉点;Step 5: As shown in Figure 2, 32 measurement points are evenly distributed on the XY plane formed by the motion of the A and B linear guide rails by the laser tracker, and the XY flatness is fitted according to the measurement results; A and B linear guides are evenly distributed with 11 points for each measurement, and the straightness of A and B linear guides, as well as the cross point of the center of the two linear guides, are fitted according to the measurement data respectively;

其中,所述XY平面以及A、B直线导轨上的测量点数量分布根据导轨移动行程范围和精度所决定;所述获取二维运动范围的XY平面作为基准平面,具体为:分别于A和B直线导轨运动范围内所构成的平面上,均匀分布三条线形成矩形网格测量路径,移动两导轨于XY平面中心位置时需呈十字交叉状态,在该状态下测量A、B直线导轨并将拟合的两导轨直线和交叉点垂直投影到所述的基准平面上,以确保测量参数的正确拟合分析,以及坐标系法向、方向、原点正确建立,并在统一坐标下保证参数的测量重复性和有效性。Wherein, the XY plane and the distribution of the number of measurement points on the A and B linear guide rails are determined according to the travel range and accuracy of the guide rail; the XY plane for obtaining the two-dimensional motion range is used as the reference plane, specifically: respectively A and B On the plane formed by the motion range of the linear guide, three lines are evenly distributed to form a rectangular grid measurement path. When moving the two guides at the center of the XY plane, they need to be in a crisscross state. The straight line and intersection point of the two guide rails are vertically projected onto the reference plane to ensure the correct fitting and analysis of the measurement parameters, and the correct establishment of the normal, direction, and origin of the coordinate system, and to ensure the repeatability of the parameter measurement under the unified coordinates sex and effectiveness.

步骤六:以垂直于XY平面确定+Z轴,其中A、B两直线导轨中心十字交叉点为坐标原点,以A直线导轨方向确定+X轴方向,建立第二笛卡尔直角坐标系;Step 6: Determine the +Z axis perpendicular to the XY plane, where the cross point of the center of the A and B linear guide rails is the coordinate origin, determine the +X axis direction with the A linear guide rail direction, and establish a second Cartesian Cartesian coordinate system;

其中,建立的第二笛卡尔直角坐标系是模拟A、B直线导轨实际使用状态下建立的坐标,其中A直线导轨方向可与B直线导轨方向互换,即可将+X轴方向互换为+Y轴方向。Among them, the established second Cartesian Cartesian coordinate system is the coordinate established under the simulation of the actual use state of the A and B linear guides. The direction of the A linear guide can be interchanged with the direction of the B linear guide, and the +X axis direction can be exchanged as +Y-axis direction.

步骤七:在所述的第二笛卡尔直角坐标系下,不断调试B直线导轨的位置偏差值,使得其与A直线导轨形成正交;Step 7: Under the second Cartesian Cartesian coordinate system, continuously debug the position deviation value of the B linear guide rail so that it is orthogonal to the A linear guide rail;

其中,通过激光跟踪仪调出实时XYZ位置坐标显示值,调试B直线导轨偏摆锁紧螺母,直到修正B直线导轨坐标值偏离量以使得B直线导轨与A直线导轨正交;Among them, the real-time XYZ position coordinate display value is called out through the laser tracker, and the yaw lock nut of the B linear guide rail is debugged until the offset of the coordinate value of the B linear guide rail is corrected so that the B linear guide rail is orthogonal to the A linear guide rail;

步骤八:检测复验A、B直线导轨的正交性。Step 8: Check the orthogonality of the linear guide rails A and B.

其中,在重新采集A、B直线导轨二维运动形成的XY平面、直线度、交叉点建立的第三笛卡尔直角坐标系下,重复步骤七,检测和调试直至A、B直线导轨在XY平面范围内运动正交。Among them, in the third Cartesian Cartesian coordinate system established by re-collecting the XY plane, straightness, and intersection point formed by the two-dimensional motion of the A and B linear guides, repeat step 7 to detect and debug until the A and B linear guides are in the XY plane. The range of motion is orthogonal.

本发明中涉及到的本领域公知技术未详细阐述。The well-known technologies in the art involved in the present invention are not described in detail.

Claims (8)

1. A method for detecting and debugging orthogonality of a spatial cross guide rail is characterized by comprising the following steps:
the method comprises the following steps: transversely installing the linear guide rail A on a datum plane, measuring the datum plane by using a laser tracker combined with a target ball and establishing a first Cartesian rectangular coordinate system on the datum plane, and measuring and debugging the straightness of the linear guide rail A and the parallelism of the linear guide rail A and the datum plane according to a real-time display value of the coordinate system by using the laser tracker;
step two: longitudinally installing the linear guide rail B on the reference surface to enable the linear guide rails A and B to be in a cross state;
step three: debugging the stroke straightness of the sliding block of the linear guide rail B according to the real-time display value of the first Cartesian rectangular coordinate system, and simultaneously debugging that the linear guide rail B is parallel to a reference surface;
step four: the linear guide rails A and B are rechecked and debugged, so that the linear guide rails A and B are parallel to the reference surface in a two-dimensional motion range;
step five: uniformly distributing a plurality of first measurement points on an XY plane formed by the movement of the linear guide rails A and B through a laser tracker, and fitting the XY plane degree according to the measurement result; sequentially measuring a plurality of second measuring points uniformly distributed on the linear guide rails A and B by using a laser tracker, and respectively fitting the straightness of the linear guide rails A and B and the cross point of the centers of the two linear guide rails according to the measured data; the number distribution of the first measuring points and the second measuring points is determined according to the range and the precision of the guide rail stroke;
step six: determining a + Z axis by taking the X-axis direction perpendicular to the XY plane, wherein a central cross point of the A linear guide rail and the B linear guide rail is taken as a coordinate origin, determining the + X axis direction by taking the A linear guide rail direction, and establishing a second Cartesian rectangular coordinate system;
step seven: continuously debugging the position deviation value of the linear guide rail B under the second Cartesian rectangular coordinate system to enable the position deviation value to be orthogonal to the linear guide rail A;
step eight: and detecting the orthogonality of the linear guide rails A and B of the retest.
2. The method for detecting and debugging the orthogonality of the spatial cross guide rails according to claim 1, wherein: in the first step, the laser tracker is arranged beside the linear guide rail A, a target seat is fixed on a sliding block of the linear guide rail A, a target ball is placed on the sliding block of the linear guide rail A, a measuring reference surface and the straightness of the linear guide rail A are scanned, and the straightness of the linear guide rail A and the parallelism of the reference surface are subjected to coarse adjustment and fine adjustment in sequence according to the established first Cartesian rectangular coordinate information until the requirements are met.
3. The method for detecting and debugging the orthogonality of the spatial cross guide rail according to claim 1, wherein: and in the second step, the cross-shaped driving grooves at the bottoms of the sliding blocks are respectively connected to the linear guide rails A and B, and the sliding blocks are driven by air floatation to drive the linear guide rails A and B to do single-axis linear motion or double-axis two-dimensional linkage.
4. The method for detecting and debugging the orthogonality of the spatial cross guide rails according to claim 1, wherein: and step five, acquiring an XY plane of the two-dimensional motion range as a reference plane, specifically: three measuring lines are uniformly distributed on the linear guide rail A and the linear guide rail B respectively to form a rectangular grid measuring path, multiple points are uniformly distributed and measured, XY planeness is fitted, the two guide rails are moved to the center positions of an XY plane and are in a cross state, the linear guide rail A and the linear guide rail B are measured in the state, the straight line and the cross point of the two guide rails which are fitted are vertically projected onto the reference plane, so that correct fitting analysis of measured parameters is ensured, the normal direction, the direction and the original point of a coordinate system are correctly established, and the measuring repeatability and the effectiveness of the parameters are ensured under the unified coordinate.
5. The method for detecting and debugging the orthogonality of the spatial cross guide rail according to claim 1, wherein: the number of the first measuring points is 32; and the second measuring point is 11 for the linear guide rails A and B respectively.
6. The method for detecting and debugging the orthogonality of the spatial cross guide rail according to claim 1, wherein: and sixthly, establishing a second Cartesian rectangular coordinate system which is a coordinate established under the condition of simulating the practical use state of the linear guide rails A and B, wherein the direction of the linear guide rail A can be interchanged with the direction of the linear guide rail B, namely, the direction of the + X axis can be interchanged into the direction of the + Y axis.
7. The method for detecting and debugging the orthogonality of the spatial cross guide rail according to claim 1, wherein: and seventhly, calling out a real-time XYZ position coordinate display value through a laser tracker, and debugging the B linear guide rail deflection locking nut until the coordinate value deviation of the B linear guide rail is corrected so that the B linear guide rail is orthogonal to the A linear guide rail.
8. The method for detecting and debugging the orthogonality of the spatial cross guide rails according to claim 1, wherein: and step eight, repeating the step seven under the condition that a third Cartesian right-angle coordinate system is established by re-collecting XY planes, straightness and intersection points formed by the two-dimensional motion of the linear guide rails A and B, and detecting and debugging until the linear guide rails A and B move orthogonally in the XY plane range.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117020754A (en) * 2023-10-08 2023-11-10 成都飞机工业(集团)有限责任公司 Tool and method for detecting geometric precision of numerical control machining center of flexible production line

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204439061U (en) * 2015-03-06 2015-07-01 北方民族大学 A kind of novel laser tracking and measuring system
CN111595238A (en) * 2020-06-03 2020-08-28 中国工程物理研究院机械制造工艺研究所 Laser tracker precision field evaluation system based on multi-station method
CN114608486A (en) * 2022-03-24 2022-06-10 中国科学院光电技术研究所 A method for detecting and adjusting parallelism of gantry guide rails

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204439061U (en) * 2015-03-06 2015-07-01 北方民族大学 A kind of novel laser tracking and measuring system
CN111595238A (en) * 2020-06-03 2020-08-28 中国工程物理研究院机械制造工艺研究所 Laser tracker precision field evaluation system based on multi-station method
CN114608486A (en) * 2022-03-24 2022-06-10 中国科学院光电技术研究所 A method for detecting and adjusting parallelism of gantry guide rails

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
高梓成;王国利;郭明;吴耐明;: "大型精密导轨安装检测方法研究", 测绘科学, no. 09, 16 September 2020 (2020-09-16) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117020754A (en) * 2023-10-08 2023-11-10 成都飞机工业(集团)有限责任公司 Tool and method for detecting geometric precision of numerical control machining center of flexible production line
CN117020754B (en) * 2023-10-08 2024-02-23 成都飞机工业(集团)有限责任公司 Tool and method for detecting geometric precision of numerical control machining center of flexible production line

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