CN115552043A - 装置以及方法 - Google Patents

装置以及方法 Download PDF

Info

Publication number
CN115552043A
CN115552043A CN202080100845.1A CN202080100845A CN115552043A CN 115552043 A CN115552043 A CN 115552043A CN 202080100845 A CN202080100845 A CN 202080100845A CN 115552043 A CN115552043 A CN 115552043A
Authority
CN
China
Prior art keywords
oil
drying chamber
heat treatment
treated
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080100845.1A
Other languages
English (en)
Chinese (zh)
Inventor
加贺真城
平本昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Industry Co Ltd
Original Assignee
Takasago Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Industry Co Ltd filed Critical Takasago Industry Co Ltd
Publication of CN115552043A publication Critical patent/CN115552043A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F26B5/06—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum the process involving freezing
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/18—Hardening; Quenching with or without subsequent tempering
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/56—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering characterised by the quenching agents
    • C21D1/58—Oils

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
CN202080100845.1A 2020-05-28 2020-05-28 装置以及方法 Pending CN115552043A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/021093 WO2021240718A1 (ja) 2020-05-28 2020-05-28 熱処理装置及び熱処理方法

Publications (1)

Publication Number Publication Date
CN115552043A true CN115552043A (zh) 2022-12-30

Family

ID=78723124

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080100845.1A Pending CN115552043A (zh) 2020-05-28 2020-05-28 装置以及方法

Country Status (4)

Country Link
JP (1) JP7471686B2 (https=)
CN (1) CN115552043A (https=)
DE (1) DE112020007246T5 (https=)
WO (1) WO2021240718A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60190511U (ja) * 1984-05-28 1985-12-17 株式会社池貝 組部品加工機
JPH04263008A (ja) * 1991-02-18 1992-09-18 Ishikawajima Harima Heavy Ind Co Ltd 油焼入れ炉におけるオイルミスト除去方法
JPH0790359A (ja) * 1993-09-14 1995-04-04 Shimadzu Corp 熱処理装置
JPH07150233A (ja) * 1993-11-26 1995-06-13 Shimadzu Corp 熱処理炉
JPH07316642A (ja) * 1994-05-27 1995-12-05 Shimadzu Corp 熱処理炉

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60190551A (ja) * 1984-03-09 1985-09-28 Hitachi Ltd 主蒸気管用耐熱鋼
JPS60190511A (ja) * 1984-03-13 1985-09-28 Ishikawajima Harima Heavy Ind Co Ltd 金属熱処理設備
JP2011219814A (ja) * 2010-04-08 2011-11-04 Daido Plant Kogyo Kk 連続熱処理装置
JP6067823B1 (ja) 2015-11-19 2017-01-25 高砂工業株式会社 真空洗浄装置および真空洗浄方法
JP7300140B2 (ja) 2018-07-19 2023-06-29 國友熱工株式会社 水素脆性防止鋼製ワークの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60190511U (ja) * 1984-05-28 1985-12-17 株式会社池貝 組部品加工機
JPH04263008A (ja) * 1991-02-18 1992-09-18 Ishikawajima Harima Heavy Ind Co Ltd 油焼入れ炉におけるオイルミスト除去方法
JPH0790359A (ja) * 1993-09-14 1995-04-04 Shimadzu Corp 熱処理装置
JPH07150233A (ja) * 1993-11-26 1995-06-13 Shimadzu Corp 熱処理炉
JPH07316642A (ja) * 1994-05-27 1995-12-05 Shimadzu Corp 熱処理炉

Also Published As

Publication number Publication date
JPWO2021240718A1 (https=) 2021-12-02
DE112020007246T5 (de) 2023-03-09
JP7471686B2 (ja) 2024-04-22
WO2021240718A1 (ja) 2021-12-02

Similar Documents

Publication Publication Date Title
US20050166845A1 (en) Method of heating a substrate in a variable temperature process using a fixed temperature chuck
US20090084405A1 (en) Substrate treating apparatus and substrate treating method
CN111052336A (zh) 基板处理装置、半导体装置的制造方法及程序
JP2006324506A (ja) 基板の乾燥処理装置及び乾燥処理方法
JP5583580B2 (ja) 真空処理装置
WO2016080197A1 (ja) 熱処理装置及び冷却装置
CN115552043A (zh) 装置以及方法
JP2008311250A (ja) リフローシステムおよびリフロー方法
KR100296651B1 (ko) 반도체진공설비및이를이용하는방법
KR20200142673A (ko) 기판처리장치 및 이를 이용한 기판처리방법
JP2003123651A5 (https=)
JP2011026653A (ja) 焼入装置
CN101839644A (zh) 基板处理系统和基板处理方法
CN106513273B (zh) 减压干燥装置及减压干燥方法
CN221947099U (zh) 热处理装置
TW201631285A (zh) 減壓乾燥裝置及基板處理系統
CN112746155B (zh) 气氛置换装置和热处理系统
TW202303061A (zh) 有機膜形成裝置及有機膜的製造方法
JP2011102673A (ja) 減圧乾燥装置
JP6117061B2 (ja) 基板処理方法及びその装置
JP2025176088A (ja) 基板処理装置、および、物品の製造方法
US20240328713A1 (en) Drying apparatus, dry condition confirmation method, and wafer storage container cleaning apparatus
JPWO2021240718A5 (https=)
JP4701933B2 (ja) プラズマｃｖｄ装置
CN120690712A (zh) 处理系统、处理方法以及物品的制造方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination