CN115548838A - Cooling device and method for single-chip jet impact optical element - Google Patents
Cooling device and method for single-chip jet impact optical element Download PDFInfo
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- CN115548838A CN115548838A CN202211373400.8A CN202211373400A CN115548838A CN 115548838 A CN115548838 A CN 115548838A CN 202211373400 A CN202211373400 A CN 202211373400A CN 115548838 A CN115548838 A CN 115548838A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/0407—Liquid cooling, e.g. by water
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D10/00—Energy efficient computing, e.g. low power processors, power management or thermal management
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Abstract
The invention discloses a cooling and heat-dissipating device for a monolithic stage jet impact optical element, which comprises an upper component and a lower component, wherein the upper component comprises a first inlet pipeline, a first outlet pipeline, a first end cover and a first jet recovery structure; the first jet flow recovery structure comprises a first block body, a first jet flow cavity arranged at the middle upper part of the first block body and a first recovery cavity arranged at the lower part of the first block body, and the first jet flow cavity is communicated with the first recovery cavity through a first strip-shaped gap; the lower assembly and the upper assembly are same in structural shape and are axially symmetrically combined and arranged in the height direction; the second recovery cavity of the lower component and the first recovery cavity of the upper component are stacked together; a corresponding heat dissipation method is also disclosed; the uniform flow of upper and lower layers of fluid and the forced heat exchange of high-speed jet impact are realized, the problem of uneven flow distribution of upstream and downstream is solved, and the local stress and deformation of the optical element under the strong jet impact condition are effectively reduced.
Description
Technical Field
The invention belongs to the field of radio frequency and laser equipment, and particularly relates to a cooling and heat dissipation device and method for a single-chip jet impact optical element.
Background
The optical element is used as a common medium form for high-power laser output, a large amount of waste heat is generated in a working state, a large temperature gradient, thermal stress and thermal deformation are generated, the structural form and the refractive index of the medium are changed, and degradation effects such as a thermal lens are generated, so that the quality of output light beams of the laser is reduced, and the medium material is even cracked and damaged due to overlarge thermal stress and thermal deformation. With the increasing of laser output power, the heat dissipation area of the optical element is small, and the hot spot is concentrated, which leads to further increase of heat flux density, and the heat dissipation problem has become one of the bottlenecks that restrict the performance improvement of the laser.
The optical element absorbs a small part of laser in the working process, but still generates extremely high heat flux density in a narrow structural space, the local point heat flux is even up to hundreds of watts per square centimeter, and the traditional heat dissipation method can not meet the requirement. The jet cooling technology fully utilizes the advantages of phase change cooling and fluid circulation cooling, wherein the heat dissipation capacity of the phase change cooling mode is several times or even one order of magnitude higher than that of the conventional methods such as air cooling, water cooling and the like; and the problem of interface thermal resistance between the optical element and the traditional heat sink is solved by a direct fluid cooling mode.
However, the current jet technology is prone to flow non-uniformity, which can lead to non-uniform heat dissipation and non-uniform heat distribution inside the element, and is prone to cause thermal stress inside the element. Specifically, the method comprises the following steps: for the mode of single-side jet impact, the phenomenon of uneven heat dissipation of the jet side and the other side is easy to occur in the heat exchange process of the fluid and the heat source body, and the uneven temperature distribution is easy to cause. For the mode of rapid impact of high-speed heat exchange fluid, local strong convection heat exchange is easy to form, uneven temperature distribution and stress are easy to exist; the jet impact easily causes uneven flow distribution, and further causes uneven heat dissipation, so that the elements have the problems of stress, uneven temperature distribution and the like.
Disclosure of Invention
The invention aims to solve the problems that in the prior art, the flow distribution is uneven due to jet impact in the cooling and heat dissipation jet cooling technology of an optical element, so that the heat dissipation is uneven, the stress is generated on the element, and the temperature distribution is uneven.
In view of the above-mentioned drawbacks and needs of the prior art, the present invention provides a cooling heat sink for a monolithic stage jet impact optical element, comprising an upper assembly and a lower assembly;
the upper assembly comprises a first inlet pipeline, a first outlet pipeline, a first end cover and a first jet flow recovery structure; the first jet flow recovery structure comprises a first block body, a first jet flow cavity arranged at the middle upper part of the first block body and a first recovery cavity arranged at the lower part of the first block body, and the first jet flow cavity is communicated with the first recovery cavity through a first long-strip-shaped gap; a first hole mesh structure is arranged on one side, close to the first jet cavity, in the first strip-shaped gap, and a first optical element placing table structure is arranged on one side, close to the first jet cavity, of the first strip-shaped gap; the first end cover covers the upper end of the first block body, and the first inlet pipeline is arranged in the middle of the side surface of the first block body and communicated with the first jet cavity; the first outlet pipeline is of a semi-open structure, is arranged in the middle of the side surface of the lower end of the first block body and is communicated with the first recovery cavity;
the lower assembly and the upper assembly are same in structural shape and are arranged in an axially symmetrical combination manner in the height direction; the second recovery cavity of the lower component and the first recovery cavity of the upper component are stacked together, and the second outlet pipeline of the lower component and the first outlet pipeline of the upper component are combined to form a closed outlet pipeline structure.
Further, a mesh structure is no less than two-layer bar mesh coincide by quantity and forms, and the quantity is no less than two-layer bar mesh and staggers the arrangement from top to bottom each other.
Furthermore, the upper ends of the two sides of the first long strip-shaped gap are provided with a stepped sunken table, and the first mesh structure is nested on the sunken table.
Furthermore, a first pressing plate with a hollow middle part is laminated on the first hole mesh structure, the first pressing plate is a long-strip frame structure with a hollow middle part, and the frame structure can be just embedded into the first concave table.
Furthermore, an outlet pipeline includes a left outlet pipeline and a right outlet pipeline, and a left outlet pipeline and a right outlet pipeline are all installed in the side of a block and are linked together with a recovery chamber, and a left outlet pipeline and a right outlet pipeline's cross-section is semi-circular.
Further, a block is cuboid or square structure, and an entry pipeline and an outlet pipe all arrange respectively on the adjacent side of a block with the vertical state, also be the vertical state between an entry pipeline and an outlet pipe.
Furthermore, an optical element places a structure including setting up two bar massive structures at rectangular shape gap both sides edge No. one, bar massive structure is close to one side undercut in rectangular shape gap No. one, and the recess forms the platform of placing optical element.
Furthermore, the width of the first jet cavity close to the inlet of the first inlet pipeline is larger than that of the opposite end of the inlet of the first inlet pipeline, and the first jet cavity is of a conical or trapezoidal structure with a wide end and a narrow end.
Furthermore, the width of the middle part of the first recovery cavity is larger than that of the side of the first outlet pipeline, and the first recovery cavity is of a polygonal structure with a wide middle part and narrow two ends.
As another aspect of the present invention, there is also provided a monolithic stage jet impact optical element cooling heat dissipation method, including placing an optical element on an optical element placing table structure No. two of a lower assembly; then introducing a cooling working medium, wherein the cooling working medium enters a jet flow cavity of the heat dissipation device through a first inlet pipeline of the upper assembly and a second inlet pipeline of the lower assembly, and after the cooling working medium is buffered by the jet flow cavity, fluid in the jet flow cavity impacts an internal optical element heat source after passing through a first mesh structure of the upper assembly and a second mesh structure of the lower assembly, so that efficient forced convection heat exchange is performed on the optical element; the fluid impacting the optical element flows into the first recycling cavity of the upper assembly and the second recycling cavity of the lower assembly and flows out of the device through outlet pipelines at two sides, and the heat dissipation process of the optical element is completed.
Further, in general, compared with the prior art, the above technical solution conceived by the present invention can achieve the following beneficial effects:
(1) The invention relates to a cooling and heat-dissipating device and a cooling and heat-dissipating method for a single-chip level jet impact optical element, wherein an upper layer and a lower layer of flow-equalizing and close-packed mesh structures are adopted, and the uniform flow of the upper layer and the lower layer of flow and the forced heat exchange of high-speed jet impact are realized by combining the design of a customized shrinkage fluid accelerating jet cavity;
(2) The device and the method for cooling and radiating the monolithic jet impact optical element adopt a symmetrical structure, and combine the conical or polygonal shapes of the jet cavity and the recovery cavity, so that the speed distribution difference of fluid entering the jet cavity and the recovery cavity is reduced, the problem that the optical element is locally pressed greatly is avoided, and the local stress and deformation of the optical element under the strong jet impact condition can be effectively reduced;
(3) According to the cooling and heat dissipation device and method for the single-chip-level jet impact optical element, the jet cavity with the larger volume is arranged, so that the speed of jet flow entering jet flow is reduced, the height of a jet flow groove (namely a first long-strip-shaped gap and a second long-strip-shaped gap) is increased, the pressure drop in the jet flow groove is increased, and the problem of uneven upstream and downstream flow distribution is solved by matching with a mesh structure.
Drawings
FIG. 1 is a schematic overall structure of a preferred embodiment of the present invention;
FIG. 2 is an exploded pictorial illustration of FIG. 1;
FIG. 3 is an exploded pictorial illustration (from bottom to top) of the FIG. 1 assembly from another angle;
FIG. 4 is a schematic view of the overall structure of the upper assembly;
FIG. 5 is an exploded pictorial illustration of FIG. 4;
FIG. 6 is a schematic view of the installation of a first mesh structure in accordance with a preferred embodiment of the present invention;
FIG. 7 is an enlarged schematic view of FIG. 6 at the dashed line;
FIG. 8 is a schematic view of another angle of the jet recovery structure according to the first preferred embodiment of the present invention;
FIG. 9 is an enlarged schematic view of FIG. 8 at the dashed line;
in all the figures, the same reference numerals denote the same features, in particular: 1-upper assembly, 11-first inlet pipeline, 12-first outlet pipeline, 121-first left outlet pipeline, 122-first right outlet pipeline, 13-first end cover, 14-first jet flow recycling structure, 141-first block, 142-first jet flow cavity, 143-first recycling cavity, 144-first long strip-shaped gap, 145-first hole net structure, 146-first optical element placing table structure, 147-first concave table, 148-first pressing plate, 2-lower assembly, 21-second inlet pipeline, 22-second outlet pipeline, 221-second left outlet pipeline, 222-second right outlet pipeline, 23-second end cover, 24-second jet flow recycling structure, 241-second block, 242-second jet flow cavity, 243-second recycling cavity, 244-second long strip-shaped gap, 245-second hole net structure and 246-second optical element placing table structure.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1:
referring to fig. 1-4, the present invention relates to a cooling and heat dissipating device for monolithic fluidic impact optical device, which includes an upper assembly 1 and a lower assembly 2;
the upper assembly 1 comprises a first inlet pipeline 11, a first outlet pipeline 12, a first end cover 13 and a first jet flow recovery structure 14; the first jet flow recovery structure 14 comprises a first block body 141, a first jet flow cavity 142 arranged at the middle upper part of the first block body and a first recovery cavity 143 arranged at the lower part of the first block body, wherein the first jet flow cavity 142 and the first recovery cavity 143 are communicated through a first long strip-shaped gap 144, and from the angle of increasing the pressure drop in the first long strip-shaped gap, the vertical height of the first long strip-shaped gap is designed to be higher, and preferably, the vertical height can be selected to be not less than 5mm; a first hole mesh structure 145 is arranged on one side, close to the first jet flow cavity 142, in the first strip-shaped gap 144, and a first optical element placing table structure 146 is arranged on one side, close to the first jet flow recovery cavity 143, of the first strip-shaped gap 144; the first end cover 13 covers the upper end of the first block, and the first inlet pipeline 11 is arranged in the center of the side surface of the first block 141 and communicated with the first jet cavity 142; the first outlet pipeline 12 is of a semi-open structure, is arranged in the middle of the side surface of the lower end of the first block body 141 and is communicated with the first recovery cavity 143;
the lower assembly 2 and the upper assembly 1 are the same in structural shape and are arranged in an axially symmetrical combination manner in the height direction (in practice, the combination manner can be pressed through bolts or other connection manners); the lower component 2 specifically comprises a second inlet pipeline 21, a second outlet pipeline 22, a second end cover 23 and a second jet flow recovery structure 24, the second jet flow recovery structure 24 comprises a second block 241, a second jet flow cavity 242 arranged at the middle lower part of the second block and a second recovery cavity 243 arranged at the lower part of the second block, and the second jet flow cavity 242 is communicated with the second recovery cavity 243 through a second long strip-shaped gap 244; a second hole mesh structure 245 is arranged on one side, close to the second jet flow cavity 242, in the second long strip-shaped gap 244, and a second optical element placing table structure 246 is arranged on one side, close to the second jet flow cavity 243, of the second long strip-shaped gap 244; the second end cover 23 covers the upper end of the second block body, and the second inlet pipeline 21 is centrally arranged on the side surface of the second block body 241 and communicated with the second jet cavity 242; the second outlet pipeline 22 is of a semi-open structure, is arranged in the middle of the upper end side surface of the second block body 241, and is communicated with the second recovery cavity 243;
the second recovery chamber 243 of the lower module 2 and the first recovery chamber 143 of the upper module 1 are stacked together, and the second outlet pipeline 12 of the lower module 2 and the first outlet pipeline 12 of the upper module 1 are combined to form a closed outlet pipeline structure.
The upper assembly 1 and the lower assembly 2 adopt a completely symmetrical structure, so that the fluid flowing into the two inlet pipelines under the first inlet pipeline 11 and the second inlet pipeline 21 hardly generates stress influence on jet impact of the optical element, and a near-stress-free clamping effect is realized.
Because the upper assembly 1 and the lower assembly 2 have the same structure, the above and below descriptions are only for convenience of distinguishing corresponding figures, and in fact, the upper and lower positions of the upper assembly 1 and the lower assembly 2 can be interchanged, for the local structure, the following takes the upper assembly as an example, and describes the local structure of the upper assembly in detail, the local structure of the lower assembly is not described one by one, and the number of the first number of the upper assembly is changed to 2, that is, the upper assembly can correspond to the corresponding component of the lower assembly.
Referring to fig. 5-6, the first mesh structure 145 is formed by overlapping at least two layers of strip-shaped meshes, wherein meshes between the at least two layers of strip-shaped meshes are staggered up and down (which is beneficial to uniformity of filtered jet flow), and the mesh diameters are preferably fifty meshes and forty meshes.
Referring to fig. 7, stepped first concave platforms 147 are disposed at upper ends of two sides of the first elongated slit 144, and the first mesh structure 145 is embedded on the first concave platforms 147.
As an optimal scheme, in order to ensure that the mesh structure is more stable in the working process, a first pressing plate 148 with a hollow middle part is further laminated on the first mesh structure 145, the first pressing plate 148 is a long strip-shaped frame structure with a hollow middle part, the frame structure can be just clamped into the first concave table 147, and the frame structure and the inner wall of the first concave table 147 have large friction force and certain elasticity, so that the first mesh structure is ensured not to slide off.
No. one outlet pipeline 12 includes a left outlet pipeline 121 and a right outlet pipeline 122, and a left outlet pipeline 121 and a right outlet pipeline 122 all install the side at a block 141 and be linked together with a recovery chamber 143, and a left outlet pipeline 121 and a right outlet pipeline 122's cross-section is semi-circular.
The first block 141 is of a cuboid or cube structure, the first inlet pipeline 11 and the first outlet pipeline 12 are respectively arranged on the adjacent side surfaces of the first block 141 in a vertical state, and the first inlet pipeline 11 and the first outlet pipeline 12 are also in a vertical state; under the design, the jet flow enters from the upper side and the lower side of the optical element and flows out from the other two sides, and due to the symmetrical arrangement, only the temperature uniformity of one side needs to be considered.
Referring to fig. 8-9, the first optical element placing platform structure 146 includes two bar-shaped block structures disposed at two side edges of the first elongated slit 144, one side of the bar-shaped block structures near the first elongated slit is recessed downward, and the recessed portion forms a platform for placing optical elements.
Example 2:
as preferred scheme, because an entry pipeline 11, no. two entry pipelines 21 entrance jet velocities are great, have an even velocity distribution for guaranteeing the inside efflux of a efflux chamber, a efflux chamber 142 is close to the width of an entry pipeline entrance and is greater than the width of an entry pipeline entrance to the side, is the narrow toper of the wide one end of one end or trapezium structure, and guarantees that the efflux of entrance can slow down speed in great width space release, tightens up then can suitably accelerate jet velocities to the side width diminishes, guarantees that the inside efflux of efflux chamber has an even velocity distribution. In addition, the volume of the first jet flow cavity is suitable for being a large point, the buffer space is larger, and the effect is better.
Based on the same consideration, the width of the middle part of the first recycling cavity 143 is larger than the width of the side of the first outlet pipeline 12, and the middle part is wide, and the two ends are narrow, and the first recycling cavity is in a polygonal structure, such as an octagonal structure. The jet flow flowing out of the first long-strip-shaped gap and the second long-strip-shaped gap can be ensured to be slowly released in a larger space firstly, and then the jet flow is narrowed at the outlet to flow out, so that the uniform speed distribution is achieved.
As another aspect of the present invention, a method for cooling and dissipating heat of a monolithic fluidic impact optical element is further provided, comprising the steps of: placing the optical element on the No. two optical element placing table structure 246 of the lower assembly 2; then, a cooling working medium is introduced, the cooling working medium enters a jet flow cavity of the heat dissipation device through a first inlet pipeline 11 of the upper assembly 1 and a second inlet pipeline 21 of the lower assembly 2, after being buffered by the jet flow cavity, fluid in the jet flow cavity impacts an internal optical element heat source after passing through a first mesh structure 145 of the upper assembly 1 and a second mesh structure 245 of the lower assembly 2, and efficient forced convection heat exchange is carried out on the optical element; the fluid impacting the optical element flows into the first recycling cavity of the upper assembly 1 and the second recycling cavity of the lower assembly 2, and flows out of the device through outlet pipelines at two sides, so that the heat dissipation process of the optical element is completed.
According to the technical scheme, a symmetrical near-stress-free clamping scheme is adopted, the pressure difference between two ends of the optical element is reduced in a targeted manner, the structural strength problem is solved, and the optical element is guaranteed not to be clamped by stress and can be uniformly distributed due to the vertically symmetrical structural design of the inlet jet flow cavity and the outlet recovery cavity.
Based on symmetrical double-sided near-unstressed clamping and a double-layer flow-equalizing close-packed mesh structure, a fluid direct contact type cooling mode is adopted, high-efficiency heat dissipation of the optical element under the condition of high heat flux density of hundreds of watts per square centimeter in a narrow space is realized, in practical application, the temperature gradient is small (the body temperature difference is superior to 32K, the surface temperature difference is superior to 21.9K), and the wave aberration degradation quantity of the element caused by fluid is superior to 0.045 (RMS).
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description. And are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A cooling and heat dissipating device for a monolithic stage jet impact optical element is characterized by comprising an upper component and a lower component;
the upper assembly comprises a first inlet pipeline, a first outlet pipeline, a first end cover and a first jet flow recovery structure; the first jet flow recovery structure comprises a first block body, a first jet flow cavity arranged at the middle upper part of the first block body and a first recovery cavity arranged at the lower part of the first block body, and the first jet flow cavity is communicated with the first recovery cavity through a first long-strip-shaped gap; a first hole mesh structure is arranged on one side, close to the first jet flow cavity, in the first strip-shaped gap, and a first optical element placing table structure is arranged on one side, close to the first jet flow cavity, of the first strip-shaped gap; the first end cover covers the upper end of the first block body, and the first inlet pipeline is arranged in the middle of the side surface of the first block body and communicated with the first jet cavity; the first outlet pipeline is of a semi-open structure, is arranged in the middle of the side surface of the lower end of the first block body and is communicated with the first recovery cavity;
the lower assembly and the upper assembly are same in structural shape and are arranged in an axially symmetrical combination manner in the height direction; the second recovery cavity of the lower component and the first recovery cavity of the upper component are stacked together, and the second outlet pipeline of the lower component and the first outlet pipeline of the upper component are combined to form a closed outlet pipeline structure.
2. The cooling and heat dissipating device for a monolithic stage jet impact optical element as claimed in claim 1, wherein the first mesh structure is formed by overlapping at least two layers of strip-shaped meshes, and the meshes of the at least two layers of strip-shaped meshes are staggered up and down.
3. The device for cooling and dissipating heat of a single-chip stage jet impact optical element according to claim 2, wherein a stepped first concave platform is disposed at the upper ends of two sides of the first elongated slit, and a first mesh structure is nested on the first concave platform.
4. The cooling and heat dissipating device for the monolithic stage jet impact optical element according to claim 1, wherein a first pressing plate with a hollow middle part is laminated on the first mesh structure, the first pressing plate is a long strip frame structure with a hollow middle part, and the frame structure can be just embedded into the first concave platform.
5. The single stage jet impact optical element cooling and heat dissipating device according to claim 1, wherein the first outlet line comprises a first left outlet line and a first right outlet line, the first left outlet line and the first right outlet line are both installed on the side surface of the first block and are communicated with the first recycling cavity, and the first left outlet line and the first right outlet line are both semicircular in cross section.
6. The device as claimed in claim 1, wherein the first block is a rectangular or square block, the first inlet line and the first outlet line are disposed in a vertical state on adjacent sides of the first block, and the first inlet line and the first outlet line are disposed in a vertical state.
7. The cooling and heat dissipating device for a single-chip stage jet impact optical element according to claim 1, wherein the first optical element placing platform structure comprises two bar-shaped block structures disposed at two side edges of the first elongated slot, one side of each bar-shaped block structure close to the first elongated slot is recessed downward, and the recessed portions form a platform for placing the optical element.
8. The device for cooling and dissipating heat of a monolithic stage jet impact optical element as claimed in claim 1, wherein the width of the first jet cavity near the inlet of the first inlet pipe is larger than the width of the inlet of the first inlet pipe at the opposite end, and the first jet cavity has a tapered or trapezoidal structure with one wider end and one narrower end.
9. The cooling and heat dissipating device for a monolithic stage fluidic impact optical element according to any one of claims 1 to 8, wherein the width of the middle of the first recycling cavity is larger than the width of the side where the first outlet pipeline is located, and the first recycling cavity is in a polygonal structure with a wide middle and narrow ends.
10. A cooling and heat dissipation method for a single-chip jet impact optical element is characterized by comprising the following steps: placing the optical element on a second optical element placing table structure of the lower assembly; then introducing a cooling working medium, wherein the cooling working medium enters a jet flow cavity of the heat dissipation device through a first inlet pipeline of the upper assembly and a second inlet pipeline of the lower assembly, and after the cooling working medium is buffered by the jet flow cavity, fluid in the jet flow cavity impacts an internal optical element heat source after passing through a first mesh structure of the upper assembly and a second mesh structure of the lower assembly, so that efficient forced convection heat exchange is performed on the optical element; the fluid after impacting the optical element flows into the first recovery cavity of the upper assembly and the second recovery cavity of the lower assembly and flows out of the device through outlet pipelines at two sides to finish the heat dissipation process of the optical element.
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CN112185918A (en) * | 2020-05-29 | 2021-01-05 | 谷歌有限责任公司 | Impingement jet manifold for near-edge jet of chip cooling |
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US20070272392A1 (en) * | 2006-05-23 | 2007-11-29 | Debashis Ghosh | Impingement cooled heat sink with low pressure drop |
US20160090978A1 (en) * | 2013-06-10 | 2016-03-31 | Jung-Hoon Kim | Single actuator-operated cooling jet apparatus |
JP2015133420A (en) * | 2014-01-14 | 2015-07-23 | トヨタ自動車株式会社 | Cooler and manufacturing method therefor |
CN108811473A (en) * | 2018-08-20 | 2018-11-13 | 中国科学院上海技术物理研究所 | A kind of high heat flux density heat transmission compound jet cooling heat sink |
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